CN114683673A

CN114683673A - Peeling mechanism and laminating apparatus using the same

Info

Publication number: CN114683673A
Application number: CN202111344872.6A
Authority: CN
Inventors: 牧野由; 泽田智世
Original assignee: Nikkiso Co Ltd
Current assignee: Nikkiso Co Ltd
Priority date: 2020-12-28
Filing date: 2021-11-15
Publication date: 2022-07-01
Anticipated expiration: 2041-11-15
Also published as: CN114683673B; TW202226441A; JP7558058B2; JP2022103834A; TWI807484B

Abstract

The present invention relates to a peeling mechanism and a laminating apparatus using the same, which can smoothly perform a peeling operation without damaging a sheet by easily forming a peeling start point portion. The peeling mechanism (100) is provided with: a peeling stage (20); a peeling head (10); and a cooling device (11) for cooling a part of the outer periphery of the thin sheet (Sf) with the thin film to form a peeling starting point (Ra); the peeling head (10) includes film holding means (12, 14), and the film holding means (12, 14) peel the film (f) from the sheet (S) by relative movement of the peeling head (10) and the peeling stage (20) in a state where the film (f) of the peeling start point portion (Ra) is held. Accordingly, the peeling operation can be smoothly performed without damaging the sheet by easily forming the peeling start point portion.

Description

Peeling mechanism and laminating apparatus using the same

Technical Field

The present invention particularly relates to a peeling mechanism provided with a cooling device and a laminating device using the peeling mechanism.

Background

The laminating apparatus is provided with a peeling mechanism, an alignment device, a laminating device, a conveying device, and the like. The peeling mechanism peels the film from the uppermost sheet before the sheets are aligned by the aligning device or after a stacked body of a plurality of sheets is formed by the stacking device.

For example, patent document 1 (see, in particular, paragraphs [0052] to [0055] and fig. 6 (a)) describes a peeling mechanism (hereinafter, referred to as "conventional peeling mechanism") that heat-treats the entire sheet having a film, and peels the film from the sheet after the adhesive force is reduced by bubbling and expansion of an adhesive layer.

However, the conventional peeling mechanism has a problem that it is difficult to peel the film from the sheet, that is, it is difficult to form a peeling start point portion (hereinafter, referred to as "difficulty in forming a peeling start point portion"), because the entire sheet having the film is softened by the heat treatment.

[ Prior art documents ]

[ patent document ]

Patent document 1: japanese patent laid-open publication No. 2019-186399.

Disclosure of Invention

[ problem to be solved by the invention ]

In recent years, as the laminated body is required to be miniaturized and have a low height, the laminated sheet itself is thinned, and the rigidity of the thinned sheet becomes relatively low. Therefore, when the entire thinned sheet having a thin film is subjected to a heat treatment using a conventional peeling mechanism, the rigidity of the thinned sheet is further reduced, and the thin film and the thin sheet are integrated. Accordingly, since the operation of peeling the film from the sheet itself becomes very difficult, the above-described problem (difficulty in forming the peeling start point portion) becomes more remarkable, and when the peeling operation is performed in this state, irreversible wrinkles are formed in the sheet, so that the sheet itself may be damaged.

The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a peeling mechanism and a laminating apparatus using the peeling mechanism, which are capable of smoothly performing a peeling operation without damaging a sheet by easily forming a peeling start point portion.

[ means for solving the problems ]

A peeling mechanism according to an embodiment of the present invention includes: a peeling stage for placing the sheet having the film in a fixed state; and a peeling head for peeling the film from the sheet placed on the peeling stage; the peeling head comprises: a cooling device for cooling a part of the outer periphery of the thin film-provided sheet to form a peeling starting point; and a film holding device configured to peel the film from the sheet by relative movement of the peeling head and the peeling stage in a state where the film at the peeling start point portion is held.

A laminating apparatus according to an embodiment of the present invention includes the peeling mechanism, and includes: an alignment device for aligning the sheet; and a laminating device for laminating the aligned sheets.

[ efficacy of the invention ]

According to the present invention, it is possible to provide a peeling mechanism and a laminating apparatus using the peeling mechanism, which can smoothly perform a peeling operation without damaging a sheet by easily forming a peeling start point portion.

Drawings

Fig. 1 is a schematic plan view showing a laminating apparatus using a peeling mechanism according to an embodiment of the present invention.

Fig. 2 is a schematic explanatory view of a peeling mechanism according to an embodiment of the present invention, and fig. 2 (a) is a plan view showing the peeling mechanism, fig. 2 (b) is a side view of a peeling head along a diagonal line of a sheet, and fig. 2 (c) is a side view of a peeling stage along a diagonal line of the sheet.

Fig. 3 is an explanatory view from a cooling preparation operation to a peeling start point portion forming operation in a thin film peeling step, and is a side view and a plan view showing the cooling preparation operation in fig. 3 (a) and fig. 3 (b), respectively, and a side view and a plan view showing the peeling start point portion forming operation in fig. 3 (c) and fig. 3 (d).

Fig. 4 is an explanatory view from the sticking operation to the winding operation in the film peeling step, and is a side view and a plan view respectively showing the sticking operation in fig. 4 (a) and fig. 4 (b), and a side view and a plan view showing the winding operation in fig. 4 (c) and fig. 4 (d).

Fig. 5 is an explanatory view from the drawing operation to the clamping operation in the film peeling step, and is a side view and a plan view showing the drawing operation in fig. 5 (a) and fig. 5 (b), respectively, and a side view and a plan view showing the clamping operation in fig. 5 (c) and fig. 5 (d), respectively.

Fig. 6 is an explanatory view of a peeling operation in a film peeling step, which is a side view and a plan view showing the peeling operation (horizontal direction) in fig. 6 (a) and fig. 6 (b), respectively, and a side view and a plan view showing the peeling operation (oblique upward direction) in fig. 6 (c) and fig. 6 (d).

Fig. 7 is an explanatory view of the completion of peeling in the film peeling step, and is a side view and a plan view showing the completion of peeling in fig. 7 (a) and fig. 7 (b), respectively.

Description of the reference numerals

1: laminating apparatus

10 stripping head

Cooling module (cooling device)

11a nozzle

11b tube

11c rotating shaft

12 adhesive roller (film holding device)

12b outer peripheral surface

13 elastic pushing component

13a rotating shaft

14 clamping jaw (film holding device)

14a projection

20 stripping stage

21 adsorption plate

22 adsorption through hole

100 stripping mechanism

200 alignment device

300 laminating apparatus

f is film

fa is adhesive boundary line

Pl1, Pl2, Pl3, Pl4 Peel off thread

Ra peeling origin part

S thin slice

Sf, thin sheet with thin film.

Detailed Description

Embodiments of the present invention will be described in detail below with reference to the drawings. The embodiments described below exemplify modes for specifically implementing the present invention. As described above, the configuration of the embodiments described below may be appropriately modified or changed in accordance with the configuration of the apparatus to which the present invention is applied and various conditions, and the present invention is not limited to the embodiments described below.

< about the expression >

In the description and claims of the present specification, terms are defined as follows. The term "lamination" refers to the attachment of a plurality of sheets (including two sheets). The term "laminate" refers to a laminate in which a plurality of (including two) sheets S are laminated. The "peeling line" indicates a boundary line between a region where the film f is adhered to the sheet S and a region after peeling. The "film adhesion boundary line" indicates a boundary line between a region of the film f adhered to the lower end portion of the adhesion roller 12 and a region of the film f not adhered to the lower end portion of the adhesion roller 12.

Fig. 1 is a schematic plan view showing a laminating apparatus 1 using a peeling mechanism 100 according to an embodiment of the present invention. Here, the X-axis direction indicates one direction in which the peeling stage 20 extends, and the Y-axis direction indicates another direction orthogonal to the X-axis direction and in which the peeling stage 20 extends. The Z-axis direction indicates a direction perpendicular to the X-axis direction and the Y-axis direction and facing the peeling stage 20. Points a to C in fig. 1 indicate the center positions of the stages, and correspond to the peeling stage position, the alignment stage position, and the lamination stage position, respectively.

< with respect to the stacked device >

The laminating apparatus 1 is an apparatus for laminating a plurality of thin sheets S constituting an electronic component at high accuracy and high speed. The laminating apparatus 1 includes a peeling mechanism 100, an alignment device 200, a laminating device 300, and a conveying device (not shown). These configurations will be described in order below. The laminating apparatus 1 further includes a peeling mechanism 100, an alignment device 200, a laminating device 300, and a control device (not shown) for controlling the conveying device.

< with respect to the peeling means >

The peeling mechanism 100 includes a peeling head 10 (see fig. 2 (a)) and a peeling stage 20. The peeling mechanism 100 is described in detail below, and after a thin film-equipped sheet Sf which is an object to be peeled is placed in a fixed state on a peeling stage 20, the thin film f is peeled from the sheet S by a peeling head 10.

< with respect to alignment means >

The alignment device 200 performs alignment of the reference position of the sheet S, and the alignment device 200 includes: an alignment stage 201 on which the sheet S is fixed by suction and placed; an electric actuator (not shown) for moving and rotating the alignment stage 201 in the XY plane by aligning the sheet S with the reference position, and an alignment imaging unit (not shown) for imaging a mark for alignment reference provided on the sheet S.

The alignment apparatus 200 performs vacuum suction of the sheet S placed on the alignment stage 201 through a plurality of suction ports (not shown). Then, the alignment imaging unit images a reference mark provided on the sheet S. The captured image is transferred to an image processing device (not shown), and the position of the reference mark is calculated by image processing, and the error between the calculated reference mark and a predetermined reference position is calculated. Here, if the error is within the predetermined range, it is determined that the alignment of the sheet S has been properly performed, and the alignment operation of the sheet S is terminated in response to an instruction from the control device. On the other hand, if the error is outside the predetermined range, it is determined that the alignment of the sheet S is not properly performed. At this time, the electric actuator performs movement and rotation of the sheet S in the XY plane by the alignment stage 201 so as to minimize an error in accordance with an instruction from the control device. This alignment with respect to the predetermined reference position continues until the error is within a predetermined range.

< with respect to the stacked device >

The laminating apparatus 300 includes a laminating stage 301 on which a plurality of sheets S are laminated to form a laminated body.

< related to a carrying device >

The conveying device is provided with: a transport slide mechanism (not shown) that can move in the X-axis direction (the direction of arrow I: peeling stage position a and alignment stage position B, and the direction of arrow II: alignment stage position B and stacking stage position C) and the Z-axis direction; and a conveyance holding mechanism (not shown) that is suspended and supported by the conveyance sliding mechanism and that sucks and holds the sheet S.

< regarding the lamination process in the lamination apparatus >

The stacking process of the sheets S in the stacking apparatus 1 will be described in order with reference to fig. 1.

First, in the peeling mechanism 100, after a sheet Sf having a thin film is placed in a fixed state on the peeling stage 20, a part of the outer peripheral portion of the thin film f is held by the peeling head 10. Thereafter, the film f is peeled from the sheet S by the relative movement of the peeling head 10 (see fig. 2 (a)) and the peeling stage 20. In the peeling mechanism 100 of the present embodiment, the entire thin film-equipped sheet Sf is not subjected to heat treatment as in the conventional peeling mechanism, and therefore, the entire thin film-equipped sheet can be prevented from softening.

In the peeling mechanism 100, when peeling of the film f from the sheet S is completed, the conveyance holding mechanism is moved from the standby position (not shown) to the peeling stage position a by the conveyance sliding mechanism, and then moved downward in the Z-axis direction. When the conveyance holding mechanism abuts on the sheet S, the sheet S is held by the conveyance holding mechanism by vacuum suction. Thereafter, the conveyance holding mechanism is moved upward in the Z-axis direction by the conveyance sliding mechanism, moved from the peeling stage position a to the alignment stage position B in the X-axis direction, moved downward in the Z-axis direction, and brought into contact with the upper surface of the alignment stage 201. Then, after the conveyance holding mechanism releases the suction holding and causes the sheet S to be placed at a predetermined position on the alignment stage 201, the conveyance holding mechanism is moved to the standby position by the conveyance sliding mechanism.

In the alignment apparatus 200, when the sheet S is appropriately aligned, the conveyance holding mechanism is moved from the standby position to the alignment stage position B by the conveyance sliding mechanism, and then moved downward in the Z-axis direction. Then, when the conveyance holding mechanism abuts on the sheet S positioned on the alignment stage 201 properly, the sheet S is held by the conveyance holding mechanism by vacuum suction. Thereafter, the conveyance holding mechanism is moved upward in the Z-axis direction by the conveyance slide mechanism, moved from the alignment stage position B to the stacking stage position C, moved in the X-axis direction (arrow II direction), and then moved downward in the Z-axis direction to come into contact with the upper surface of the stacking stage 301 or with another sheet S already stacked. Then, the conveyance holding mechanism releases the suction holding, and thereby the sheet S is placed at a predetermined position on the stacking stage 301. As described above, by performing the lamination step in the lamination device 1, the film f is peeled off from the sheet S, and the sheet S aligned properly is laminated to form a laminated body. Accordingly, a laminate can be formed using the sheet S with the quality degradation suppressed.

Since the object to be peeled in the peeling mechanism 100 of the present embodiment is a sheet Sf having a thin film, the thin film f is peeled from the sheet S before the sheet S is aligned by the alignment device 200. However, the present invention is not limited to this embodiment, and for example, if the object to be peeled is the uppermost thin film-bearing sheet Sf of the laminate, a laminate composed of a plurality of sheets S may be formed by the laminating apparatus 300, and after the sheets S are temporarily pressure-bonded, the thin film f may be peeled from the uppermost thin film S.

The laminating apparatus 1 of the present embodiment includes: a peeling mechanism 100, an alignment device 200, a stacking device 300, a conveying device, and a control device. However, the laminating apparatus 1 of the present embodiment is not limited to this configuration, and may include, for example, a sheet supply device that supplies the sheet S onto the peeling stage 20, a pressure bonding device that pressure bonds and integrates the laminated body of sheets S, and the like.

< detailed constitution of peeling means >

Fig. 2 is a schematic explanatory view of a peeling mechanism according to an embodiment of the present invention, and fig. 2 (a) is a plan view showing the peeling mechanism, fig. 2 (b) is a side view of a peeling head along a diagonal line of a sheet, and fig. 2 (c) is a side view of a peeling stage along a diagonal line of the sheet. Here, a chain line L at one point in part (a) of fig. 2 is an extension line of one diagonal line of the film-equipped sheet Sf placed on the peeling stage 20. In addition, a point a, a point D, a point E, and a point F in part (a) of fig. 2 represent the center position, the standby position, the start position, and the end position of the sheet S, respectively, and are arranged on the one-dot chain line L.

The peeling mechanism 100 includes: a peeling head 10; a peeling head driving device (relative movement device) (not shown) for moving the peeling head 10 in the diagonal direction L; a peeling stage 20; and a peeling stage driving device (relative movement device) (not shown) that moves the peeling stage 20 in the diagonal direction L. These configurations will be described in order below. In the present embodiment, for simplification of explanation, as shown in fig. 2 (a) and 2 (b), the peeling stage 20 is set in a fixed state, and the peeling head 10 is moved in the diagonal direction L (arrow III direction), the Z-axis direction (arrow IV direction), and the obliquely upward direction (arrow IX direction) along the diagonal direction L by the peeling head driving device. This enables the peeling head 10 and the peeling stage 20 to move relative to each other.

< about the peeling head >

As shown in fig. 2 (b), the peeling head 10 includes: a cooling module (cooling device) 11, an adhesive roller (film holding device) 12, an urging member 13, a clamp claw (film holding device) 14, and a clamp claw driving mechanism (not shown).

< Cooling Module >

The cooling module 11 includes: a nozzle 11a provided at the lower end of the peeling head 109 and ejecting a cooling fluid; a flexible tube 11b which is held by the peeling head 10 and supplies a cooling fluid from a fluid source (not shown) storing the cooling fluid to the nozzle 11 a; a compressor (not shown) and a cooling device (not shown) for pressurizing and cooling the cooling fluid; and a nozzle drive mechanism (not shown) for rotating the nozzle 11 a. In addition, in the case where a high-pressure vessel storing a cooling fluid in a pressurized state is used as a fluid source or the like, the compressor can be omitted. The nozzle 11a has a tapered shape with a narrowed tip end, and can locally spray the cooling fluid (see a broken line in part (b) of fig. 2). The nozzle drive mechanism adjusts the spray angle α of the cooling fluid by rotating the nozzle 11a in the rotational direction (arrow V direction) about a rotational axis 11c extending in the horizontal direction, perpendicular to the diagonal direction L.

Here, the type of the cooling fluid of the present embodiment may be selected from Liquefied Petroleum Gas (LPG), Liquefied Natural Gas (LNG), ethanol, menthol, novel refrigerant gas (R32, R410a), liquid nitrogen, carbon dioxide gas, and the like. The temperature of the cooling fluid in the present embodiment is set to be equal to or lower than the ambient temperature (for example, room temperature), but is preferably set to be equal to or lower than 0 (deg.c). The ejection time of the cooling fluid in the present embodiment is 10 seconds (sec) or less, but is preferably 3 seconds (sec) or less. The flow velocity, flow rate, and temperature of the cooling fluid in the present embodiment are kept at fixed values, but are not limited to this embodiment, and may be changed, for example. In addition, in order to spray the cooling fluid onto the upper surface and the side surface of the thin film Sf having various specifications, the spray angle α of the cooling fluid of the present embodiment is set to be 0(°) to 90(°) with respect to the horizontal plane.

< adhesive roller and elastic pushing member >

The pressure-sensitive adhesive roller 12 has a cylindrical shape and has a pressure-sensitive adhesive surface having pressure-sensitive adhesiveness on the outer peripheral surface 12 b. However, the adhesive surface of the adhesive roller 12 can be peeled from the sheet S by adhering the film f, and can hold the peeled film f. The entire outer peripheral surface 12b of the pressure roller 12 of the present embodiment is a pressure-sensitive adhesive surface, but the present invention is not limited to this embodiment, and at least a part (for example, a region to which the film f is adhered) may be a pressure-sensitive adhesive surface. The material of the adhesive surface of the adhesive roller 12 of the present embodiment is, for example, an acrylic adhesive or a silicone adhesive.

The urging member 13 is formed of a spring or the like, has a rotation shaft 13a extending in the horizontal direction perpendicular to the diagonal direction L at the lower end portion, and is supported in a state of hanging down from the peeling head 10.

The pressure-sensitive adhesive roller 12 is pivotally supported by the urging member 13 so as to be rotatable in a rotational direction (arrow VII direction) about the rotational axis 13 a. In the present embodiment, when the pressure-sensitive adhesive roller 12 is brought into contact with the film f, the pressure-sensitive adhesive roller 12 can apply a load to the film f with a desired elastic pushing force by adjusting the pushing amount of the elastic pushing member 13 in the elastic pushing direction (arrow VI direction) by the peeling head driving device.

< clamping claw and clamping claw driving mechanism >

The clamping claw 14 has a projection 14a projecting in the diagonal direction L at the lower end portion, and is disposed opposite to the adhesive roller 12 in the diagonal direction L. The clamp claw driving mechanism moves the clamp claw 14 in a direction (arrow VIII) to move away from and toward the adhesive roller 12. With this clamp claw driving mechanism, the clamp claws 14 are disposed close to the adhesive roller 12, and the film f can be clamped between the clamp claws 14 and the adhesive roller 12.

< with respect to lift-off stage >

As shown in fig. 2 (c), the peeling stage 20 includes: an adsorption plate 21 disposed on the peeling stage 20; and a plurality of suction ports 22 for vacuum-sucking a thin film Sf belonging to a peeling object through a suction plate 21.

In order to prevent the sheet S from being damaged, the suction plate 21 may be formed of a plate-shaped member having a plurality of through holes or a resin porous material, for example.

< relating to the sheet Sf with film >

The sheet Sf having a film, which is an object to be peeled, is laminated with a film f on the sheet S. The film-equipped sheet Sf includes a sheet (e.g., an adhesive tape) having an adhesive layer between the sheet S and the film f, a sheet (e.g., a PET film) having no adhesive layer between the sheet S and the film f, and the like. Here, the sheet Sf with a film of the present embodiment is a thin sheet, and the thicknesses of the sheet S and the film f are set to 50(μm) and 20(μm), respectively, but the present invention is not limited to this embodiment, and the thicknesses of the sheet S and the film f may be set to 1(μm) or less, respectively.

< peeling step in peeling means >

The peeling step in the peeling mechanism 100 will be described with reference to fig. 3 to 7. The peeling mechanism 100 is driven mainly by a control device in accordance with an instruction from the control device. For convenience of explanation, the outer shape of the peeling head 10 is shown by a broken line and the nozzle 11a is shown by a solid line in fig. 3 (b), 3 (d), 4 (b), 4 (d), 5 (b), 5 (d), 6 (b), 6 (d), and 7 (b).

< preparation action for Cooling >

First, the cooling preparation operation will be described with reference to fig. 3 (a) and 3 (b). In the initial state, the peeling head 10 is stopped at the standby position D, and the nozzles 11a are arranged so as to be oriented in the horizontal direction. Further, a thin film-equipped sheet Sf which is an object to be peeled is fixed by suction to the peeling stage 20 through a suction plate 21.

The peeling head 10 is moved in the diagonal direction L (arrow III (1)) from the standby position D to the start position E by the peeling head driving device. At this time, the adhesive roller 12 is disposed above one corner portion (the subsequent peeling start point Ra) of the film-bearing sheet Sf. Thereafter, the peeling head 10 is moved downward in the Z-axis direction (in the direction of arrow IV (2)) by the peeling head driving device. The nozzle 11a is rotated in the rotational direction (the direction of arrow V (3)) by a nozzle driving mechanism, and is disposed to face one corner of the thin film-coated sheet Sf.

Here, the arrangement of the nozzles 11a can be adjusted according to the type (e.g., thickness, etc.) of the sheet Sf having a thin film. For example, when the film-equipped sheet Sf is thin, the rigidity of the film f and the sheet S can be increased by cooling from above the film-equipped sheet Sf. In this way, the nozzle 11a is separated upward (in the direction of arrow IV (2)) from the thin film-equipped sheet Sf, and is rotated greatly in the rotational direction (in the direction of arrow V (3)), so that the ejection angle α of the cooling fluid is set to be large (see part (c) of fig. 3). On the other hand, when the film f of the thin film Sf is thick, the rigidity of the film f and the sheet S can be increased by cooling from the side of the thin film Sf. In this way, the nozzle 11a is moved closer to the thin film Sf in the downward direction (arrow IV (2)) and is rotated slightly in the rotational direction (arrow V (3)) to set the spray angle α of the cooling fluid to be small (see part (c) of fig. 3).

< action of Forming peeling Start Point >

Next, the operation of forming the peeling start point portion when the thin sheet Sf having a thin film is thin will be described with reference to fig. 3 (c) and 3 (d). Since the thin film Sf having a relatively thick film f is different from the thin film Sf only in the ejection angle α of the cooling fluid, the description thereof will be omitted.

In the cooling process, the cooling module 11 sprays the cooling fluid from above the thin film Sf in a state where the nozzle 11a is disposed to face one corner of the thin film Sf. Accordingly, the local cooling region after the cooling fluid is sprayed in the thin sheet Sf having the film temporarily increases the rigidity of the film f and the thin sheet S as compared with the non-cooling region, and therefore, the integration of the film f and the thin sheet S is suppressed. Accordingly, the local cooling region is formed as the peeling start point Ra, and peeling of the film f from the sheet S can be started.

Here, the sheet Sf with a thin film includes: the sheet S and the film f have an adhesive layer therebetween, and the adhesive force (chemical bonding force) of the adhesive layer constitutes the adhesion force (mechanical bonding force) between the sheet S and the film f, and the sheet S and the film f do not have an adhesive layer therebetween, and the adhesion force (mechanical bonding force) caused by anchor effect (anchor effect), the bonding force (physical bonding force) caused by intermolecular interaction, and the like constitute the adhesion force between the sheet S and the film f. In the conventional peeling mechanism, a thin film Sf having an adhesive layer is subjected to a heat treatment to foam and expand the adhesive layer, thereby reducing the adhesion between the thin film f and the sheet S.

In contrast, the peeling mechanism 100 of the present embodiment can easily form the peeling starting point portions Ra on the respective sheets Sf having a thin film regardless of the presence or absence of the adhesive layer. The state where the peeling starting point Ra belonging to the cooling region is formed is a temporary state, and the temperature changes to the ambient temperature with time. Therefore, after the peeling starting point portion Ra is formed by jetting the cooling fluid, it is necessary to promptly perform the peeling at the peeling starting point portion Ra.

In the peeling mechanism 100 of the present embodiment, since the cooling process is performed to increase the rigidity of each of the film f and the sheet S, thereby suppressing integration of the film f and the sheet S, it is possible to solve the problem (difficulty in forming the peeling start point portion) of the conventional peeling mechanism, and it is possible to smoothly perform the peeling operation without damaging the sheet S.

In the present embodiment, a peeling starting point Ra is formed at one corner of the film-equipped sheet Sf, and the film f is peeled from the sheet S from the peeling starting point Ra toward the center position a of the film-equipped sheet Sf. In this embodiment, compared with the case where the uniform peeling start point Ra is formed along one side of the film-equipped sheet Sf, the time for forming the peeling start point Ra can be shortened, and the film f can be continuously peeled from the sheet S uniformly along the peeling line. The cooling module 11 in the present embodiment sprays the cooling fluid when forming the peeling starting point Ra, but is not limited to this embodiment, and for example, the nozzle 11a may be configured to be capable of scanning in the horizontal direction, and the cooling fluid may be sprayed to the side portions of the sheet S and the film f while scanning in the horizontal direction when peeling the film f from the sheet S.

< action on adhesion >

The sticking operation will be described with reference to fig. 4 (a) and 4 (b). The peeling head 10 is moved downward in the Z-axis direction (in the direction of arrow IV (4)) by the peeling head driving device, and the adhesive surface having adhesiveness on the outer peripheral surface 12b of the adhesive roller 12 comes into contact with the region corresponding to the peeling start point Ra of the film f. At this time, the peeling head driving device adjusts the amount of advance of the urging member 13 in the urging direction (arrow VI (5) direction), and the adhesive roller 12 presses the film f with a desired urging force. Accordingly, the region of the film f corresponding to the peeling start point Ra is securely adhered and held by the adhesive surface of the adhesive roller 12. Then, the nozzle 11a is rotated in the rotational direction (arrow V (6)) by the nozzle driving mechanism, and is returned to the initial state toward the horizontal direction. Accordingly, interference between the nozzle 11a and another member can be avoided in the subsequent peeling operation.

< about winding action >

The winding operation will be described with reference to fig. 4 (c) and 4 (d). First, the peeling head 10 is moved in the diagonal direction L (arrow III (7) direction) from the start position E toward the center position a by the peeling head driving means.

In this winding operation, the cooling effect at the peeling starting point Ra is maintained, and the rigidity of the film f and the sheet S is still increased as compared with the non-cooled region. The pressure roller 12 is constantly loaded in the pushing direction (arrow VI (5)) by the pushing member 13, and the film f is pressure-bonded and held on the pressure surface of the pressure roller 12. The adhesive force of the adhesive surface of the adhesive roller 12 to the film f is set to be higher than the adhesion force generated at the interface between the sheet S and the film f.

Next, as the peeling head 10 moves in the diagonal direction L (arrow III (7)) the pressure sensitive adhesive roller 12 rotates in the rotational direction (arrow VII (8)) about the rotational axis 13 a. At this time, the outer peripheral surface 12b of the sticking roller 12 is rotated relative to the film f so that the film f is sequentially wound from the region corresponding to the peeling start point portion Ra and is stuck and held on the sticking surface of the sticking roller 12, and the peeling line Pl1 is formed.

By winding the film f around the sticking roller 12, the area to be stuck and held can be increased, that is, the adhesive force of the sticking roller 12 to the film f can be increased. Here, for the subsequent clamping operation, the leading end of the film f to be wound around the adhesive roller 12 is wound up to a position above the straight line connecting the projection 14a of the clamping claw 14 and the rotation shaft 13a of the adhesive roller 12 in the Z-axis direction.

In the present embodiment, the time from the peeling start point portion forming operation to the winding operation is set to 0(s) to 30(s), but is preferably set to 0(s) to 10(s). As described above, in the present embodiment, the peeling is performed at the peeling start point portion Ra within a time period (for example, within several seconds after the cooling fluid is sprayed) in which the cooling effect of the peeling start point portion Ra is maintained, and the peeling operation can be performed smoothly.

< about the pulling action >

The pull-up operation will be described with reference to fig. 5 (a) and 5 (b). This pulling-up operation is performed in order to avoid the peeling head 10 physically disturbing the peeling stage 20, the suction plate 21, the sheet S, and the peeled film f in the subsequent peeling operation (horizontal direction).

The peeling head 10 is moved upward in the Z-axis direction (in the direction of arrow IV (9)) by the peeling head driving means, at this time, the pressure roller 12 is loaded in the pushing direction (the direction of arrow VI (10)) by the pushing member 13, and a part of the film f is wound around the pressure roller 12, and therefore, a tensile force is generated to the film f between the adhesion boundary line fa of the film f and the peeling line Pl2, by which the film f is peeled off again from the sheet S and moves from the peeling line Pl1 to the peeling line Pl2, here, by adjusting the frictional force generated between the sticking roller 12 and the urging member 13 when the sticking roller 12 rotates, the sticking roller 12 can be prevented from rotating during the pulling-up operation, and further, by winding the film f around the sticking roller 12, since the adhesive force of the adhesive roller 12 to the film f is increased, the film f can be prevented from falling from the adhesive roller 12 during the pulling operation.

< about clamping action >

The clamping operation will be described with reference to fig. 5 (c) and 5 (d). This clamping operation is performed to continuously peel the film f from the sheet S in the subsequent peeling operation (horizontal direction).

The clamp claw 14 is moved in the approaching direction (arrow VIII (11)) by the clamp claw driving mechanism. At this time, the film f wound around the adhesive surface of the adhesive roller 12 is sandwiched between the protrusions 14a of the clamping claws 14 and the adhesive roller 12. Accordingly, the film f can be more firmly supported by the pressure roller 12 by the clamping force of the clamping claws 14 and the pressure roller 12 in addition to the adhesive force of the pressure roller 12.

< about peeling action (horizontal direction) >)

The peeling operation (horizontal direction) will be described with reference to fig. 6 (a) and 6 (b). The peeling head 10 is moved in the diagonal direction L (arrow III (12) direction) toward the center position a by the peeling head driving device. Here, as the peeling head 10 moves toward the center position a, the length of the peeling line (Pl2, Pl3), that is, the area to be peeled increases, and the peeling force becomes larger. Therefore, the angle β 1 formed by the region where the film f is adhered to the sheet S and the peeled region through the peeling line Pl3 is set to a small acute angle, and the moving speed in the diagonal direction L (arrow III (12) direction) is set to a low speed (for example, 1(mm/sec) to 50 (mm/sec)). Accordingly, as shown in fig. 6 (a), the direction in which the adhesive force of the adhesive roller 12 and the clamping force between the clamping claws 14 and the adhesive roller 12 (substantially horizontal direction) are generated can be made to coincide with the direction in which the tensile force is generated in the film f by the peeling head driving device, and the film f can be prevented from falling off the adhesive roller 12 and can be reliably peeled from the sheet S.

< regarding peeling action (obliquely upward) >)

The peeling operation (obliquely upward) will be described with reference to fig. 6 (c) and 6 (d). The peeling head 10 is moved in the diagonal direction L and in the upward direction along the Z-axis direction, that is, in the obliquely upward direction (arrow IX (13) direction) by the peeling head driving device. Here, as the peeling head 10 moves from the center position a toward the end position F, the length of the peeling line (Pl3, Pl4), that is, the region to be peeled is reduced, and the peeling force becomes smaller. Therefore, the angle β 2 formed by the area where the film f is adhered to the sheet S and the peeled area through the peeling line Pl4 is set to a large angle, and the moving speed in the obliquely upward direction (the arrow IX (13) direction) is set to a high speed (for example, 10(mm/sec) to 100 (mm/sec)). Accordingly, as shown in fig. 6 (c), even if the adhesive force of the adhesive roller 12 is generated and the direction (substantially horizontal direction) of the clamping force between the clamping claws 14 and the adhesive roller 12 is slightly different from the direction of the tensile force generated to the film f by the peeling head driving device, the film f can be quickly peeled from the sheet S without being detached from the adhesive roller 12.

< about the end of peeling >

The end of peeling will be described with reference to fig. 7 (a) and 7 (b). The peeling head 10 is moved to the end position F by the peeling head driving means. The peeled film f hangs down from the sticking roller 12. After the peeled film f is sucked or held by a recovery mechanism (not shown) (e.g., a suction pad, a robot hand, etc.), the clamp claw 14 is separated from the adhesive roller 12 by a clamp claw driving mechanism, and the clamping force between the clamp claw 14 and the adhesive roller 12 is released. The recovery mechanism is moved to above the recovery tank (not shown) by a recovery mechanism driving device (not shown), and then the suction or the grip is released. Accordingly, the film f is peeled off from the adhesion roller 12 and discharged to the collection box. Thereafter, the peeling head 10 moves to the standby position D which is the initial state, and the peeling process is performed on the other thin film-equipped sheet Sf.

(with respect to other embodiments)

In the present embodiment, the cooling module 11 is configured to spray the cooling fluid through the nozzle 11a, but is not limited to this embodiment. For example, a small blower may be used instead of the nozzle 11a, or a Peltier element or the like may be provided in a region of the peeling stage 20 corresponding to one corner portion (peeling start point Ra) of the thin film-equipped sheet Sf, and cooling may be performed from below the thin film-equipped sheet Sf. Accordingly, the peeling head 10 can be made lightweight, and the distance between the sticking roller 12 and the thin film-bearing sheet Sf can be made close to each other in advance, so that the peeling operation can be reliably performed while maintaining the cooling effect of the peeling start point portion Ra. When the cooling module 11 is provided on the peeling stage 20, the cooling module 11 may be provided only in a region corresponding to at least the peeling start point Ra of the thin film-equipped sheet Sf, and may be provided in a region corresponding to the entire thin film-equipped sheet Sf, for example.

(embodiments of the invention)

A first embodiment of the present invention is a peeling mechanism 100 including: a peeling stage 20 for placing the sheet Sf having the film thereon in a fixed state; a peeling head 10 for peeling off the film f from the sheet S placed on the peeling stage 20; and a cooling device 11 for cooling a part of the outer periphery of the thin sheet Sf to form a peeling starting point Ra; the peeling head 10 includes

film holding devices

12 and 14, and the

film holding devices

12 and 14 peel the film f from the sheet S by relative movement of the peeling head 10 and the peeling stage 20 in a state where the film f of the peeling start point portion Ra is held.

As described above, the peeling starting point Ra is formed by cooling a part of the outer periphery of the thin film-equipped sheet Sf, and the respective rigidities of the thin film f and the thin sheet S can be increased, thereby suppressing the integration of the thin film f and the thin sheet S.

In the second embodiment of the present invention, in the first embodiment, the cooling device 11 is further provided in the peeling head 10, and cools the thin sheet Sf from above and from the side to form the peeling starting point portion Ra.

As described above, the cooling position can be adjusted according to the type (for example, thickness) of the sheet Sf having a thin film.

In the third embodiment of the present invention, in the first embodiment, the cooling device 11 is further provided on the peeling stage 20, and cools the thin film Sf from below to form the peeling start point Ra.

With the above configuration, the distance between the pressure roller 12 and the film-bearing sheet Sf can be made close to each other in advance, and therefore, an effect is achieved that the peeling operation can be reliably performed while the cooling effect of the peeling start point portion Ra is maintained.

In a fourth embodiment of the present invention, in the first embodiment, the thin

film holding devices

12 and 14 further include: a push-up member 13 provided in a hanging manner on the peeling head 10; and an adhesive roller 12 rotatably provided on the urging member 13 and having an adhesive surface on at least a part of an outer peripheral surface 12 b; the sticking roller 12 rolls the film f around the sticking surface by pressing the sticking surface against the peeling start point Ra by the urging member 13 and relatively moving the sheet S.

With the above configuration, the peeling operation can be performed for a period of time while maintaining the cooling effect of the peeling starting point Ra.

In a fifth embodiment of the present invention, in the fourth embodiment, the thin

film holding devices

12 and 14 further include: a clamping claw 14 which is arranged opposite to the adhesive roller 12 and can move in a direction of separating and approaching relative to the adhesive roller 12; the clamping claw 14 clamps the film f wound around the adhesive surface of the adhesive roller 12 between the film f and the adhesive roller 12 in a state of being disposed close to the adhesive roller 12.

As described above, the film f can be more firmly supported by the pressure of the clamping claws 14 and the pressure roller 12, and therefore, the film f can be prevented from falling off the pressure roller 12 when the peeling operation (horizontal direction, obliquely upward direction) is performed.

The sixth embodiment of the present invention is the first embodiment further including: the thin film-equipped sheet Sf has a substantially rectangular shape, and a peeling start point Ra is formed at one corner of the thin film-equipped sheet Sf, and relative movement in the diagonal direction L of the sheet S is caused between the peeling head 10 and the peeling stage 20 to peel the thin film f from the sheet S.

With the above configuration, compared with the case where the uniform peeling start point portion Ra is formed along one side of the film-equipped sheet Sf, the effect of being able to shorten the forming time of the peeling start point portion Ra and uniformly maintain the peeling of the film f from the sheet S along the peeling line can be achieved.

A seventh embodiment of the present invention is a laminating apparatus 1 including: the peeling mechanism 100 according to any one of the first to sixth embodiments; an alignment device 200 for aligning the sheet S; and a laminating device 300 for laminating the aligned sheets S.

With the above configuration, the effect of forming a laminate using the sheet S while solving the problem of the deterioration in quality of the sheet S can be achieved.

Claims

1. A peeling mechanism includes:

a peeling stage for placing the sheet having the film in a fixed state;

a peeling head for peeling the film from the sheet placed on the peeling stage; and

a cooling device for cooling a part of the outer periphery of the thin film-equipped sheet to form a peeling starting point;

the peeling head includes a film holding device for peeling the film from the sheet by relative movement of the peeling head and the peeling stage in a state where the film of the peeling start point portion is held.

2. The peeling mechanism according to claim 1, wherein the cooling device is provided in the peeling head, and cools the film-coated sheet from above and from the side to form a peeling start point portion.

3. The peeling mechanism as claimed in claim 1, wherein the cooling means is provided on the peeling stage, and cools the film-coated sheet from below to form a peeling start point portion.

4. The peeling mechanism as claimed in claim 1, wherein the film holding device comprises: a spring-pushing member provided in a hanging manner on the peeling head; and an adhesive roller rotatably provided on the urging member and having an adhesive surface on at least a part of an outer peripheral surface thereof;

the adhesive roller presses the adhesive surface against the peeling starting point portion by the urging member and relatively moves the sheet, thereby winding the film around the adhesive surface.

5. The peeling mechanism as claimed in claim 4, wherein the film holding device further comprises: a clamping claw disposed opposite to the adhesive roller and capable of moving in a direction of separation and approach with respect to the adhesive roller;

the clamping claw clamps the film wound on the adhesive surface of the adhesive roller between the clamping claw and the adhesive roller in a state of being arranged close to the adhesive roller.

6. The peeling mechanism as claimed in claim 1, wherein the film-formed sheet has a substantially rectangular shape, the peeling start point portion is formed at one corner portion of the film-formed sheet,

the peeling head and the peeling stage are relatively moved in a diagonal direction of the sheet to peel the film from the sheet.

7. A laminating apparatus includes:

the peeling mechanism of any one of claims 1 to 6;

an alignment device for aligning the sheet; and

and a laminating device for laminating the aligned sheets.