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CN1145933C - Supporting mechanism and system for recording/reproducing head - Google Patents

Supporting mechanism and system for recording/reproducing head Download PDF

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Publication number
CN1145933C
CN1145933C CNB998021326A CN99802132A CN1145933C CN 1145933 C CN1145933 C CN 1145933C CN B998021326 A CNB998021326 A CN B998021326A CN 99802132 A CN99802132 A CN 99802132A CN 1145933 C CN1145933 C CN 1145933C
Authority
CN
China
Prior art keywords
suspension
slider pad
actuator
slider
ground
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB998021326A
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Chinese (zh)
Other versions
CN1288560A (en
Inventor
Д
市川慎司
����һ
添野佳一
綱隆満
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
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TDK Corp
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Publication date
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Publication of CN1288560A publication Critical patent/CN1288560A/en
Application granted granted Critical
Publication of CN1145933C publication Critical patent/CN1145933C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005Specially adapted for spacing from a rotating disc using a fluid cushion
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00Head arrangements not specific to the method of recording or reproducing
    • G11B21/16Supporting the heads; Supporting the sockets for plug-in heads
    • G11B21/18Supporting the heads; Supporting the sockets for plug-in heads while the head is moving
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00Head arrangements not specific to the method of recording or reproducing
    • G11B21/16Supporting the heads; Supporting the sockets for plug-in heads
    • G11B21/22Supporting the heads; Supporting the sockets for plug-in heads while the head is out of operative position
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/40Protective measures on heads, e.g. against excessive temperature 
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • G11B5/4826Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • G11B5/4826Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
    • G11B5/483Piezoelectric devices between head and arm, e.g. for fine adjustment
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/54Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/54Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
    • G11B5/55Track change, selection or acquisition by displacement of the head
    • G11B5/5521Track change, selection or acquisition by displacement of the head across disk tracks
    • G11B5/5552Track change, selection or acquisition by displacement of the head across disk tracks using fine positioning means for track acquisition separate from the coarse (e.g. track changing) positioning means
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0925Electromechanical actuators for lens positioning
    • G11B7/0929Electromechanical actuators for lens positioning for tracking only
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0925Electromechanical actuators for lens positioning
    • G11B7/0932Details of sprung supports
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0925Electromechanical actuators for lens positioning
    • G11B7/0935Details of the moving parts
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0925Electromechanical actuators for lens positioning
    • G11B7/0937Piezoelectric actuators
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122Flying-type heads, e.g. analogous to Winchester type in magnetic recording

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)

Abstract

An object of the invention is to provide a write/read head supporting mechanism for a magnetic disk system or optical disk system having a microactuator for effecting a micro-displacement of a slider, wherein any electrostatic breakdown of an electromagnetic transducer element or an optical module is prevented without detriment to the displacement capability of the microactuator. The write/read head supporting mechanism of the invention comprises a slider 2 provided with an electromagnetic transducer element or an optical module, and a suspension 3. The slider 2 is supported on the suspension 3 by way of a microactuator 4 for displacing the slider 2. A ground region that the suspension 3 has is electrically connected to the slider 2 by way of an electrical connecting member 8 movable and/or deformable in the displacement direction of the slider 2 by the microactuator 4.

Description

Writing/Reading head support mechanism and Writing/Reading system
Technical field
The present invention relates to a kind of Writing/Reading system that is used for, for example Writing/Reading head support mechanism of hard disk drive (hereinafter referred is HDD) or CD drive, and a kind of Writing/Reading system that comprises such Writing/Reading head support mechanism.
Background technology
The head support mechanism of the prior art of using with HDD, general by the slider pad that has electromagnetic sensing element, be used to support the suspension of this slider pad and the interconnection pattern that is connected with this electromagnetic sensing element is formed.
This electromagnetic sensing element comprises that being used for electrical signal conversion is the magnetic pole and the coil (vice versa) of magnetic signal, is used for magneto-resistance effect element that magnetic signal is transformed to voltage signal or the like, and each is all made by thin-film technique, packaging technology etc.This slider pad is by nonmagnetic ceramic, such as Al 2O 3-TiC or CaTiO 3Constitute,, constitute such as ferrite, and generally have cube shaped perhaps by magnetic material.The surface (air-supported surface) of the slider pad relative with the dish medium constitutes the shape that is suitable for producing pressure, so that slider pad flies over the dish medium with little gap.The suspension that is used to support slider pad is by crooked, punching press or otherwise process the elastic stainless steel plate and form.
When slider pad is used for practical application, on slider pad, produce static.The generation of this static is owing to begin to stop slip between (CSS) flying surface of locating slider pad and surface of coiling medium in contact, because the surface of the dish medium of the relative high speed rotating of slider pad is contacting between the flight of a small amount of slider pad flying surface that causes and the surface of coiling medium very, because the friction between slider pad and the air etc.
When producing static on slider pad, static often causes the electrostatic breakdown of electromagnetic sensing element.For fear of this situation, the slider pad of most of magnetic heads is connected (for example JP-A2-61810, JP-A 2-244419 and JP-A 8-111015) with ground.Above-mentioned JP-A 2-61810 discloses a kind of thin-film head, wherein a conductor is electrically connected with magnetic core on being installed in slider pad, with electroconductive binder this conductor is combined with the universal joint part that is in earthy suspension.Above-mentioned JP-A 2-244419 discloses with electroconductive binder the side of slider pad and suspension has been combined.Above-mentioned JP-A 8-111015 discloses a kind of magnetic head system, and a ground-electrode wherein is installed on the flexible wired substrate that is provided with on the suspension, and this ground-electrode is electrically connected with slider pad.
On the other hand, along with recording density is more and more higher, HDD more and more requires size reduction, and therefore, HDD has more and more higher track density and more and more narrow track width.In order to improve the path accuracy among the high density recording HDD, provide the magnetic head that has actuator, so that the relative suspension of electromagnetic sensing element or slider pad realizes that micrometric displacement is effective.Such actuator is for example at JP-A 6-259905, and is open among JP-A 6-309822 and the JP-A 8-180623.
Summary of the invention
In a kind of magnetic head that has an actuator, when actuator drives slider pad, the relative suspension displacement of slider pad.Therefore possible is can damage this displacement to suspension side and slider pad side wire connecting.
Yet each discloses the preparation of actuator above-mentioned publication, and does not mention any being connected about slider pad and ground.Therefore, certain in other words, these publications do not disclose any device that slider pad is connected with ground, can not damage the displacement capacity of actuator when this device is set.
The purpose of this invention is to provide a kind of Writing/Reading head support mechanism that is used for disk system or optical disk system, it has an actuator, be used to produce the micrometric displacement of electromagnetic sensing element or slider pad, wherein any electrostatic breakdown to electromagnetic sensing element or optical module is prevented, and does not damage the displacement capacity of actuator.
Such purpose can be realized by following array structure.
(1) a kind of Writing/Reading head support mechanism, comprise a slider pad and a suspension, slider pad is equipped with an electromagnetic sensing element or an optical module, and wherein said slider pad is supported on described suspension by an actuator that is used for mobile described slider pad, and
The access area that described suspension has is electrically connected with described slider pad by an electric connecting part, and this electric connecting part can move and/or is out of shape along the sense of displacement of described slider pad by described actuator.
(2) according to the Writing/Reading head support mechanism of above-mentioned (1), wherein said suspension is made by conductive material, and described suspension itself is as described access area.
(3) according to the Writing/Reading head support mechanism of above-mentioned (1), wherein said suspension is provided with a ground-electrode in its surface, as described access area.
(4) a kind of Writing/Reading head support mechanism, comprise a slider pad and a suspension, slider pad is equipped with an electromagnetic sensing element or an optical module, and wherein said slider pad is supported on described suspension by an actuator that is used for mobile described slider pad, and
At least a portion of described actuator is equipped with a conduction region, and the access area that described suspension has is electrically connected with described slider pad by this conduction region, and wherein a ground-electrode that is used to drive described actuator is used as described conduction region.
(6) a kind of Writing/Reading head support mechanism, comprise a slider pad and a suspension, slider pad is equipped with an electromagnetic sensing element or an optical module, wherein said slider pad is supported on described suspension by an actuator that is used for mobile described slider pad, and this Writing/Reading head support mechanism comprises an interconnection pattern, it comprises a line that is electrically connected with described electromagnetic sensing element or described optical module, with a ground wire that is electrically connected with described slider pad, described interconnection pattern comprises a tight osculatory that closely contacts with described suspension, with one leave described suspension and extend to described slider pad, and the unsteady line that can move and/or be out of shape along the sense of displacement of described slider pad by described actuator.
(7) a kind of Writing/Reading head support mechanism comprises a slider pad and a suspension, and slider pad is equipped with an electromagnetic sensing element or an optical module, and wherein said slider pad is supported on described suspension by an actuator that is used for mobile described slider pad,
The fore-end of described suspension comprises a flex region, and it is turned or crooked to the slider pad side, and can move and/or be out of shape along the sense of displacement of described slider pad by described actuator, and
An interconnection pattern closely contacts with the surface of described flex region, and described interconnection pattern comprises the line and the ground wire that is electrically connected usefulness with described slider pad that are electrically connected usefulness with described electromagnetic sensing element or described optical module.
(8) according to the Writing/Reading head support mechanism of above-mentioned (6) or (7), wherein said suspension is made by conductive material, and is connected with described suspension electrical from the described ground wire that described interconnection pattern is drawn.
(9) a kind of Writing/Reading system comprises as any one described Writing/Reading head support mechanism in above-mentioned (1) to (8).
The accompanying drawing summary
Fig. 1 is the side view of explanation according to a kind of demonstration structure of the magnetic head of first aspect present invention, and wherein slider pad is installed on the suspension by actuator.
Fig. 2 is the planimetric map of explanation according to another demonstration structure of the magnetic head of first aspect, and wherein slider pad is installed on the surface of the suspension relative with medium by actuator.
Fig. 3 is the side view of explanation according to the another demonstration structure of the magnetic head of first aspect, and wherein slider pad is installed on the suspension by actuator.
Fig. 4 is the side view of explanation according to a kind of demonstration structure of the magnetic head of second aspect present invention, and wherein slider pad is installed on the suspension by actuator.
Fig. 5 is the side view of explanation according to another demonstration structure of the magnetic head of second aspect, and wherein slider pad is installed on the suspension by actuator.
Fig. 6 is the side view of explanation according to the another demonstration structure of the magnetic head of second aspect, and wherein slider pad is installed on the suspension by actuator.
Fig. 7 is the planimetric map of explanation according to a kind of demonstration structure of the magnetic head of third aspect present invention, and wherein slider pad is installed on the surface of the suspension relative with medium by actuator.
Fig. 8 is the planimetric map of explanation according to another demonstration structure of the magnetic head of the third aspect, and wherein slider pad is installed on the surface of the suspension relative with medium by actuator.
Fig. 9 is the planimetric map of explanation according to the another demonstration structure of the magnetic head of the third aspect, and wherein slider pad is installed on the surface of the suspension relative with medium by actuator.
Figure 10 is the again planimetric map of a demonstration structure of explanation according to the magnetic head of the third aspect, and wherein slider pad is installed on the surface of the suspension relative with medium by actuator.
Figure 11 is the decomposition diagram of a kind of demonstration structure of explanation head support mechanism.
Preferred forms of the present invention
According to Writing/Reading head support mechanism of the present invention, comprise that one is equipped with the slider pad of electromagnetic sensing element or optical module, and a suspension, this slider pad while one shifter that this slider pad is moved is installed on the suspension is placed between them.Now with reference to having the magnetic head that is installed on the electromagnetic sensing element on the slider pad the present invention is made an explanation.
At first, the typical structure to suspension, actuator and slider pad describes.
Figure 11 is the decomposition diagram that comprises head support mechanism one demonstration structure of actuator.This head support mechanism by the slider pad 2 that is equipped with electromagnetic sensing element 1 and the suspension 3 that is used to support this slider pad 2 constitute, suspension 3 has actuator 4 and places between this slider pad 2 and the suspension 3.
Actuator 4 is provided to cause the microdisplacement of slider pad 2 with respect to suspension 3, and fixes by engaging with the universal 3a that is positioned at suspension 3 one ends.Universal joint piece 3a constitutes by with etching, punching press or other similar approach groove being set in suspension member, so that this slider pad can be followed the dish dielectric surface.Here it is to be noted that this magnetic head is equipped with a main actuator (VCM or other similar device) and is used to drive whole suspension.
Actuator 4 comprises a fixed part 43 and a moving part 44, and further comprises two shaft-like displacement generating mechanisms 41 and 41.Each displacement generating mechanism 41 is equipped with the piezoelectricity or the electrostriction material layer that have electrode layer on the two sides at least, and constitutes in such a manner, causes it to produce elongation and shorten according to the voltage that is applied on the electrode layer.This piezoelectricity or electrostriction material layer are made of piezoelectricity or electrostriction material, rely on inverse piezoelectric effect or electrostrictive effect to produce elongation and shorten.One end of displacement generating mechanism 41 links by fixed part 43 and suspension, and the other end of displacement generating mechanism 41 links by moving part 44 and slider pad.According to the elongation and the shortening of displacement generating mechanism 41, slider pad so produces mobile, makes electromagnetic sensing element produce annular movement.This so cause that electromagnetic sensing element is across the recording track of dish on the medium.
Piezoelectricity in being clipped in the displacement generating mechanism 41 of actuator 4 between the electrode layer or electrostriction material layer are by so-called piezoelectric, and when constituting such as PZT, this piezoelectricity or electrostriction material layer will be handled through hyperpolarization usually, so that improve its displacement capacity.The polarised direction of handling by this polarization is the thickness direction of this actuator.When being in line according to the direction of an electric field that is applied to the voltage on the electrode layer and this polarised direction, piezoelectricity between two electrode layers or electrostriction material layer be along elongation (longitudinal piezoelectric effect) on its thickness direction, and shorten (piezo-electric traverse effect) along its in-plane.On the other hand, when direction of an electric field was opposite with polarised direction, piezoelectricity or electrostriction material layer shortened (longitudinal piezoelectric effect) along its thickness direction, and along its in-plane elongation (piezo-electric traverse effect).When alternating voltage that contraction is inducted when putting on a displacement generating mechanism and another displacement generating mechanism, length ratio between a displacement generating mechanism and another displacement generating mechanism changes, so that produces deflection in the same direction of two displacement generating mechanisms in this actuator plane.By this deflection, moving part 44 is the center by lift-over and luffing that the position of moving part 44 limits when not having voltage, produces lift-over and pitching along the direction shown in the arrow among Figure 11 with respect to fixed part 43.This lift-over and luffing make moving part 44 to make annular movement along elongation that is substantially perpendicular to displacement generating mechanism 41 and the direction that shortens direction, and the direction of this lift-over and luffing is positioned at the plane of actuator.Yet electromagnetic sensing element also produces lift-over and pitching in circular orbit.At this moment, that does not worry polarizing weakens, because voltage direction and polarised direction are straight.Even it is pointed out that similarly lift-over and luffing also can take place when making two displacement generating mechanism elongations because of the voltage that alternately is applied thereto.
In the illustrated embodiment, voltage can be added on two displacement generating mechanisms by this way simultaneously, makes that their displacement is reverse each other.In other words, alternating voltage can be added on two displacement generating mechanisms by this way simultaneously, makes one to extend and another shortening, and vice versa.At this moment, the center of the lift-over of moving part 44 and luffing is limited the position of moving part 44 when not having voltage.Suppose and use same driving voltage herein, about the amplitude of lift-over and luffing is twice than the situation of alternating voltage utilization.So a side displacement generating mechanism of lift-over and luffing so extends in the case, so that the direction of driving voltage is opposite with polarised direction.Therefore, being polarized in of piezoelectricity or electrostriction material layer applies under the high voltage or may produce decay when being continuously applied voltage.Thereby require to apply the fixed Dc bias of weighing apparatus and aforementioned alternating voltage is superimposed upon on this bias voltage obtaining driving voltage, thereby get rid of the direction possibility opposite of driving voltage with polarised direction in the direction identical with polarised direction.In the case, the state of the displacement generating mechanism of the center of lift-over and luffing when adding thereon separately at this bias voltage limits.
Illustrated actuator has a kind of structure, and wherein displacement generating mechanism 41 and fixing and moving part 43 and 44 are by punching and worker's groove independent part in aggregates to laminar piezoelectricity or the electrostriction material member that has at the electrode layer of given location formation.Therefore may improve the hardness and the dimensional accuracy of actuator, and need not to worry the error of assembling.In addition, any bonding agent not being used in the production of actuator, is very slippery because the actuator position that produces stress in the distortion because of the displacement generating mechanism adheres to any adhesive phase.Point out that in addition like is absolutely not generation owing to adhesive phase causes loss and the time dependent problem of bond strength.
" piezoelectricity or the electrostriction material " of Shi Yonging refers to because inverse piezoelectric effect or electrostrictive effect can produce the material that elongates or shortens herein.As long as can be applied to any desired piezoelectricity or the electrostriction material of actuator displacement generating mechanism can use.Yet because high rigidity, preferred usually piezoelectric ceramics or the electrostriction material of using is such as PZT (Pb (Zr, Ti) O 3), PT (PbTiO 3), PLZT ((Pb, La) (Zr, Ti) O 3), and barium titanate (BaTiO 3).When actuator is manufactured by piezoelectric ceramics or electrostriction material, use thick-film technique, can easily produce such as thin layer processing or printing process.It may be noted that the also available thin-film technique of this actuator produces.When piezoelectricity or electrostriction material had crystallographic structure, it both can be a polycrystalline structure, also mono-crystalline structures.
Do not apply specific restriction for how forming electrode layer; From various processes,, consider how to form piezoelectricity or electrostriction material layer simultaneously such as making suitable selection in the drying of printing, roasting, sputter and conductive paste.
Actuator can have structure arbitrarily, and wherein at least one is present on the displacement generating mechanism at piezoelectricity that electrode layer is all arranged on the two sides or electrostriction material layer.But, preferably using a kind of sandwich construction, wherein two or more such piezoelectricity or electrostriction material layer superpose each other.The elongation and the shortening amount of piezoelectricity or electrostriction material layer are proportional to electric field intensity.Yet aforesaid sandwich construction makes it to do piezoelectricity or electrostriction material layer so thin, and consequently required electric field intensity can obtain under low-voltage, so that driving voltage can reduce.When using with the same driving voltage of single layer structure, elongation can become much bigger with the amount that shortens.The thickness of piezoelectricity or electrostriction material layer is not critical, thereby can determine such as driving voltage, elongation that needs and the easy program that shortens total amount and production according to various conditions.Yet common 5 μ m preferably approximately are to the thickness of about 50 μ m in practical application of the present invention.Equally, the upper limit of the quantity of Die Jia piezoelectricity or electrostriction material layer is not critical each other, thereby can such method determine, can obtain to have the displacement generating mechanism of wishing thickness.The piezoelectricity or the electrostriction material layer that it may be noted that coating are arranged on the outermost electrode layer usually.
Slider pad 2 is by having low-resistance relatively pottery, for example Al 2O 3-TiC or Mn-Zn ferrite constitute.Slider pad 2 is equipped with magnetic core or coil in the one side by an insulation course, to form electromagnetic sensing element 1.
Although not explanation, according to circumstances suspension 3 interconnection pattern and that is equipped with an excitation actuator 4 in its surface is connected to the interconnection pattern of electromagnetic sensing element 1.Suspension 3 also can be equipped with an excitation IC chip (read/write IC) in its surface.If signal processing IC is installed on this suspension, then might reduce the length of interconnection pattern, so that signal frequency can increase owing to the reduction of inductive component from electromagnetic sensing element to this signal processing IC.
Though the present invention is applicable to the occasion of using integrally-built actuator shown in Figure 11, should be appreciated that the present invention also can be applicable to have the various actuators of the package assembly of utilizing piezoelectric element, the actuator of using electrostatic force and the various occasions that electromagnetic force is employed.
Suspension 3 constitutes such as stainless steel usually by flexible metal material.Yet constituting suspension 3 by insulating material such as resin also is acceptable.On the other hand, have general structure for its part of interconnection pattern, wherein the resin-coating lead produces with the suspension surface and contacts closely.Do not apply special restriction for how forming interconnection pattern with this structure; But preferably use a kind of method; wherein on the surface of suspension 3, form an insulating resin film; and on this resin molding, form lead by forming another resin molding thereon as diaphragm subsequently; and a kind of method, the interconnection film (flexible wired substrate) that wherein has the sandwich construction that comprises such resin molding and lead is bonded on the suspension 3.
In the head support mechanism that constitutes according to the present invention as mentioned above, slider pad ground connection is so that prevent the electrostatic breakdown of electromagnetic sensing element.To specify now and how make slider pad ground connection according to the present invention.
According to a first aspect of the invention, an access area of suspension is electrically connected with slider pad by an electric connecting part, and this electric connecting part can move and/or is out of shape along the sense of displacement of slider pad by actuator.
A demonstration structure of a first aspect of the present invention is shown among Fig. 1.Fig. 1 is explanation invests the slider pad 2 on the suspension 3 by actuator 4 a side view.Bonding agent 7a is used for the fixed part 43 of actuator 4 is adhered to suspension 3, and the moving part 44 of actuator 4 is adhered on the slider pad 2.Suspension 3 by conductive material for example metal make, and remain on earth potential.Therefore, suspension 3 itself provides above-mentioned access area.The lead-in wire 8 of slider pad 2 and suspension 3 usefulness highly flexibles is electrically connected, so that the electrostatic energy that produces on slider pad 28 flows to suspension 3 by going between.Here note, with electroconductive binder 7b and 7b lead-in wire 8 is adhered to slider pad 2 and suspension 3 respectively.
Another demonstration structure of a first aspect of the present invention is shown in Fig. 2.Fig. 2 is from the suspension relative with medium 3 side findings, invests the planimetric map of the slider pad 2 on the suspension 3 by actuator 4.As shown in Figure 2, suspension 3 is equipped with ground wire 90 in its surface, and the one end is connected with the ground-electrode 91 that limits above-mentioned access area.The other end of ground wire 90 be in earthy electric conductor (HDD box or other similar devices) and be connected.The lead-in wire 8 of ground-electrode 91 and slider pad 2 usefulness highly flexibles is electrically connected, and that is to say, makes slider pad 2 ground connection.Here note, with electroconductive binder 7b and 7b lead-in wire 8 is adhered on slider pad 2 and the suspension 3 respectively.In Fig. 2, label 52 expression actuator drive wire assemblies, it comprises two signal line and a ground wire, and arranges in intimate contact with the surface of suspension 3.The signal wire that label 51 expressions are electrically connected with electromagnetic sensing element.This signal wire stretches out from the back side of suspension 3, and the front end of walking around suspension 3 returns, and the junction with termination electrode group in the electromagnetic sensing element on being arranged on slider pad 2 stops.
According to the structure of Fig. 1 and Fig. 2, wherein employed lead-in wire 8 is a high flexibility, and actuator 4 can move no disturbance status under slider pad 2 ground connection.In addition, the bonding position of lead-in wire 8 and slider pad 2 can freely be selected relatively.According to structure shown in Figure 2, even when suspension 3 is made by insulating material, slider pad 2 also can ground connection.
Fig. 3 is the explanation of another structure of a first aspect of the present invention.In Fig. 1, actuator 4 is positioned at the back side of slider pad 2, promptly on the surface of the slider pad 2 relative with suspension 3.Yet in Fig. 3, actuator 4 is arranged in the side of slider pad 2, so that make the whole height of this structure keep very low.In other respects, the structure of the structure of Fig. 3 and Fig. 1 is identical.Aspect included all, slider pad is as Fig. 1 and such relative actuator position shown in any one among Fig. 3 in first aspect present invention.
According to a second aspect of the invention, at least a portion of actuator is equipped with a conduction region, and the access area by this conduction region suspension is electrically connected with slider pad.
A demonstration structure of a second aspect of the present invention is shown in Fig. 4.Fig. 4 is explanation invests the slider pad 2 on the suspension 3 by actuator 4 a side view.Suspension 3 by conductive material for example metal make, and remain earth potential.Actuator is equipped with earth conductor 9 in its surface, and it gets the shape of above-mentioned conduction region in this manner, so that fixed part 43 is connected with moving part 44.Use electroconductive binder 7b and 7b that the fixed part 43 of actuator 4 is bonding with suspension 3 respectively, and the moving part 44 of actuator 4 is bonding with slider pad 2.These bonding agents 7b and 7b cover an end and the other end of above-mentioned earth conductor 9.Therefore, make slider pad 2 ground connection.
Though depend on the type of employed actuator, notice that the whole or surface portion of actuator can be made by conductive material.In this case, the whole or surface portion of actuator can be used as above-mentioned conduction region, so that slider pad is connected with ground.
Another demonstration structure of a second aspect of the present invention is shown in Fig. 5.Actuator 4 shown in Figure 5 is so as mentioned above multi-layer piezoelectric actuators.Such as already explained, the multi-layer piezoelectric actuator has a kind of structure, and wherein piezoelectricity or electrostriction material layer are clipped between the pair of electrode layers.In the structure of Fig. 5, ground-electrode (earth conductor 9 shown in Figure 5) be this to one in the electrode layer, it is as above-mentioned conduction region, so that slider pad 2 is connected with ground.Say that further the two ends of earth conductor 9 are exposed in the side of actuator 4.So, use electroconductive binder 7b and 7b respectively, so that an end of conductor 9 is electrically connected with suspension 3, and the other end is electrically connected with slider pad 2, thereby slider pad 2 is connected with ground.In other respects, the structure of the structure of Fig. 5 and Fig. 4 is identical.
According to Fig. 4 and structure shown in Figure 5, when actuator 4 being adhered on suspension 3 and the slider pad 2, use electroconductive binder respectively to replace conventional bonding agent.When making actuator 4, only need to form or exposed earth conductor 9, so that slider pad 2 is connected with ground.Therefore when slider pad 2 is connected with ground, do not damage the displacement capacity of actuator 4.In addition, can reduce slider pad 2 and ground step of connecting number.
In the structure of Fig. 4 and Fig. 5, only utilize electroconductive binder.Yet in some cases, electroconductive binder is poorer than common adhesive viscosity.This is because electroconductive binder generally comprises binder resin, wherein dispersed electro-conductive material, for example silver foil or carbon dust.If therefore requirement can be accepted to mix the use electroconductive binder with such common adhesive.
The another structure of a second aspect of the present invention is shown in Fig. 6.As shown in the figure, be equipped with an interconnection pattern, it comprises a flexible wired substrate, comprises a signal wire that is electrically connected with electromagnetic sensing element on the slider pad 2.This interconnection pattern is by the tight osculatory 5A that closely contact with the surface of suspension 3, and the unsteady line 5B formation that extends to slider pad 2 from outstanding part 3.Here note, do not represent the drive wire of actuator.
Interconnection pattern comprises tight osculatory 5A and unsteady line 5B, it is by form the tight osculatory that comprises flexible wired substrate on the surface of the suspension relative with medium 3, remove the fore-end of suspension 3 then, thereby make a part of closely osculatory place afloat and form.In illustrated structure, on the fore-end of suspension 3, form in advance and the termination electrode group of electromagnetic sensing element electrical connection.Then, the part of the fore-end of suspension 3 is removed like this, so as termination electrode group near be left termination battery lead plate 32.Subsequently, the line 5B that floats is turned or crooked to slider pad 2 sides, so that the one side of termination battery lead plate 32 combines with slider pad 2, and another side combines with actuator 4, and above-mentioned termination battery lead plate is connected with termination electrode group on the slider pad 2.Removing of the part of suspension 3 for example can be realized by punching press or wet etching.
The structure of Fig. 6 and the similar of Fig. 5, the earth conductor 9 that is actuator 4 is as above-mentioned conduction region, so that slider pad 2 is connected with ground.Yet in Fig. 6 structure,, earth conductor 9 is connected with a surface of termination battery lead plate 32, and makes another surperficial connection of slider pad 2 and termination battery lead plate 32 with electroconductive binder 7b with electroconductive binder 7b in the side of the moving part 44 of actuator 4.Termination battery lead plate 32 is made of the conductive material identical with the conductive material of suspension 3, so that slider pad 2 can be electrically connected with suspension 3.
In the structure of Fig. 5 and Fig. 6, conductive suspension 3 and earth conductor 9 usefulness electroconductive binder 7b and 7b link together, so that slider pad 2 can be connected with ground by them.Selectively be, earth conductor 9 can be connected with ground wire, and ground wire reaches suspension 3 sides again.For example, as shown in Figure 2, can use the actuator drive wire 52 that comprises ground wire.In this case, ground wire can or be in earthy electric conductor (HDD box etc.) with conductive suspension 3 and is connected.Under preceding kind of situation, the ground wire that draw in the somewhere from interconnection pattern can be connected with suspension 3, as the situation of Figure 10 ground wire 90.Under the kind situation of back, suspension 3 is unnecessary to be electric conductor.Therefore if utilize ground wire, might make the change minimum of the manufacturing step that slider pad 2 is connected with ground.In addition, owing to actuator 4 carries out with the available common adhesive of combining of suspension 3, so might be than realizing higher bond strength with electroconductive binder.
Magnetic head according to third aspect present invention comprises an interconnection pattern, and it comprises a line that is electrically connected with electromagnetic sensing element, with a ground wire that is connected with slider pad.This interconnection pattern comprises the tight osculatory and the unsteady line that extends to slider pad from suspension that closely contact with suspension.Closely osculatory can move and/or is out of shape along the sense of displacement of slider pad by actuator.
A demonstration structure of a third aspect of the present invention is shown in Fig. 7.Fig. 7 is from the outstanding part relative with medium 3 side findings, invests the planimetric map of the slider pad 2 on the suspension 3 by actuator 4.
As shown in Figure 7, be equipped with an interconnection pattern, it comprises a flexible wired substrate 51, comprises a signal wire that is electrically connected with electromagnetic sensing element on the slider pad 2.This interconnection pattern is by tight osculatory 5A that closely contact with the surface of suspension 3 and the unsteady line 5B formation that extends to slider pad 2 sides from suspension 3.In Fig. 7, label 52 expression actuator drive wires, it is arranged to the surface of suspension 3 and closely contacts.
Interconnection pattern comprises tight osculatory 5A and unsteady line 5B, it is by form the tight osculatory that comprises flexible wired substrate on the surface of the suspension relative with medium 3, remove the fore-end of suspension 3 then, thereby make the part of tight osculatory place afloat and form.In illustrated structure, on the fore-end of flexible wired substrate, form and comprise the termination electrode group 94 of four termination electrodes in advance.Then, the part of the fore-end of suspension 3 is removed like this, so as termination electrode group 94 near be left termination battery lead plate 32.Subsequently, the line 5B that floats is turned or crooked to slider pad 2 sides, so that termination battery lead plate 32 combines with the back side of slider pad 2, and termination electrode group 94 is connected with termination electrode group on the slider pad 2.Yet note, not necessarily require to form termination battery lead plate 32, that is to say, can accept termination electrode group direct unsteady line 5B and on the slider pad 2 and be connected.Removing of the part of suspension 3 for example can be realized by punching press or wet etching.
In Fig. 7, the line 5B that floats forms like this, so that it can be connected with the termination electrode group on the slider pad 2, and when being arranged on such connection status, can move and/or is out of shape along the sense of displacement of slider pad 2 by actuator 4.Therefore, unsteady line 5B can not damage the displacement capacity of actuator 4.
The interconnection pattern that comprises tight osculatory 5A and unsteady line 5B except that comprising the signal wire 51 that is electrically connected with electromagnetic sensing element, also comprises a ground wire 90.Ground wire 90 1 ends are connected with ground-electrode 91, and the other end be in earthy electric conductor (HDD box etc.) and be connected, ground-electrode 91 is gone up the termination electrode group 94 that forms with unsteady line 5B and is also put.Ground-electrode 91 is electrically connected with slider pad 2 by electroconductive binder, gold goal or other similar devices, and just slider pad 2 can be connected with ground.
In the structure of Fig. 7, the ground-electrode 91 on the line 5B that floats is connected with the surface electrical of slider pad 2 of formation electromagnetic sensing element on it.Yet, as shown in Figure 8, when on this surface, not exposing low resistance stupalith, for example Al 2O 3During-TiC, can be by changing the position of ground-electrode 91, it is connected with the side of slider pad 2 of exposure low resistance stupalith on it.As shown in Figure 9, if the ground-electrode 91 on the line 5B that floats is connected with ground by lead-in wire 8, might select the position that is connected with slider pad in relative mode freely so.
According to a third aspect of the invention we, use to be connected with ground with the such gentle bundle of lines slider pad 2 of above-mentioned unsteady line 5B, thus at slider pad 2 with under ground is connected, weaken the displacement capacity of actuator 4 hardly.When slider pad 2 is connected with ground, the structure of unnecessary change actuator 4.Compare with other aspects, this aspect can realize with the number of steps that reduces more, therefore be suitable for most robotization.
Another demonstration structure of a third aspect of the present invention is shown in Figure 10.As shown in figure 10, urgent close osculatory 5A ground wire 90 its ends of drawing are fixed on the suspension 3 with electroconductive binder 7b.In this structure, suspension 3 is made by conductive material.In other respects, the structure of the structure of Figure 10 and Fig. 8 is identical.
According to the another structure of third aspect present invention, closely osculatory 5A can carry on the back the surface formation of the suspension 3 of medium at face.So the unsteady line 5B in abutting connection with this tight osculatory 5A allows to walk around suspension 3, and in slider pad 2 terminations.
In the magnetic head according to fourth aspect present invention, the fore-end of suspension is turned or crooked to the slider pad side, and it has a flex region that can move and/or be out of shape along the sense of displacement of slider pad by actuator.Be arranged to the interconnection pattern that closely contacts with the surface of flex region, comprise a line that is electrically connected with electromagnetic sensing element and a ground wire that is electrically connected with slider pad.
According to the magnetic head of fourth aspect present invention, can use and the similar process of process of according to a third aspect of the invention we magnetic head is made.Return the Fig. 7 with reference to explanation a third aspect of the present invention, termination electrode slice 32 separates fully with suspension 3.Yet, when the magnetic head made according to a forth aspect of the invention, can accept to make termination electrode slice 32 to contact, thereby allow above-mentioned interconnection pattern closely to contact with the area that partly contacts with suspension 3 parts.Then, the fore-end of suspension is turned or bending like this, so that the situation of termination electrode slice 32 is such as shown in Figure 7, make the termination battery lead plate walk around actuator 4, and arrive slider pad 2.Structure hereto requires the rigidity of fore-end of suspension enough low so that as above-mentioned turning or bending, and can move and/or be out of shape along the sense of displacement of slider pad by actuator.Flex region with so low rigidity can be as mentioned above after forming tight osculatory, forms by etching is carried out at the two ends of the fore-end of suspension.Selectively, can accept to use the suspension of the such shape that constitutes in advance, it has the fore-end that reduces rigidity.And, as the situation of a third aspect of the present invention,, not necessarily require to form termination electrode slice 32 in a fourth aspect of the present invention.
Though the present invention carries out with reference to the HDD magnetic head in the middle of the Writing/Reading head, should be understood that the present invention also can be applicable to optical disk system.Traditional optical disk system utilization includes the light picker of the optical module that comprises lens at least.This light picker so designs, and makes that these lens can be by mechanical adjustment, so that focus on the recording surface of CD.In recent years, near-field recording is suggested so that reach more and more high video disc recording density (can be referring to " NIKKEIELECTRONICS ", 1997.6.16 (No.691), 99 pages).This near-field recording utilizes a kind of suspension head that is similar to floating type magnetic head (flying magnetic head) usefulness.What be installed in this slider pad inside is an optical module, and it comprises that one is known as dome lens, magnetic field modulation record coil and the prefocus lens of solid immersion lens or SIL.The suspension head that another kind of near-field recording is used is disclosed in No.5, in 497,359 the United States Patent (USP).Along with higher recording density, such suspension head also needs to have higher tracking accuracy day by day, as the situation of HDD magnetic head.So the microdisplacement actuator also is effective for this suspension head.Therefore, the present invention also can be applicable to this Writing/Reading head (optical head) that optical record medium is used.
More put it briefly, the applicable optical head of the present invention comprises that one is similar to the slider pad in the aforementioned magnetic head, and a wherein built-in optical module, perhaps itself is the slider pad that is made of optical module.This optical module comprises lens at least, if desired, also has the lens actuator and the magnetic field that are incorporated into wherein and produces coil.This optical head, for example, not only comprise the sort of suspension head that is used for near-field recording, and comprise the optical head that slider pad wherein can slide, promptly false contact-type (pseudo-contact type) or contact-type optical head on the recording medium surface as top firm description.For the present invention being applied to the situation easy to understand of optical head, the electromagnetic sensing element in the explanation of front should be read out as optical head.Should be appreciated that the present invention can be applicable to accurate contact-type or contact-type magnetic head equally.
In concept, term used herein " Writing/Reading head " should comprise Writing/Reading head, a writing head and read head only.Equally, term used herein " Writing/Reading system " should comprise Writing/Reading system, an one-writing system, reach a read apparatus.Term used herein " recording medium " except that recordable media, should comprise read-only type medium, equally such as read-only optical disc.
Advantage of the present invention
In write/read head supporting mechanism of the present invention, rocker piece can be connected with ground, does not cause and do not damage Move the displacement capacity of device, therefore can prevent any static shock of electromagnetic sensing element or optical module Wear, and do not sacrifice their positioning accuracy.

Claims (2)

1. a Writing/Reading head support mechanism comprises a slider pad and a suspension, and slider pad is equipped with an electromagnetic sensing element or an optical module, and wherein said slider pad is supported on described suspension by an actuator that is used for mobile described slider pad, and
At least a portion of described actuator is equipped with a conduction region, and the access area that described suspension has is electrically connected with described slider pad by this conduction region, and wherein, a ground-electrode that is used to drive described actuator is used as described conduction region.
2. a Writing/Reading system comprises Writing/Reading head support mechanism as claimed in claim 1.
CNB998021326A 1998-11-13 1999-10-22 Supporting mechanism and system for recording/reproducing head Expired - Fee Related CN1145933C (en)

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JP341129/1998 1998-11-13
JP3411129/1998 1998-11-13

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CN1326119C (en) 2007-07-11
US20020135940A1 (en) 2002-09-26
US7161765B2 (en) 2007-01-09
US20040022169A1 (en) 2004-02-05
CN1549247A (en) 2004-11-24
US7050266B2 (en) 2006-05-23
CN1288560A (en) 2001-03-21
JP3501758B2 (en) 2004-03-02
WO2000030080A1 (en) 2000-05-25
HK1034350A1 (en) 2001-10-19
US20050254172A1 (en) 2005-11-17
US6621661B1 (en) 2003-09-16

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