CN114526419A - Single-degree-of-freedom deflection platform - Google Patents
Single-degree-of-freedom deflection platform Download PDFInfo
- Publication number
- CN114526419A CN114526419A CN202210031681.2A CN202210031681A CN114526419A CN 114526419 A CN114526419 A CN 114526419A CN 202210031681 A CN202210031681 A CN 202210031681A CN 114526419 A CN114526419 A CN 114526419A
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- flexible
- unit
- top plate
- middle beam
- driving
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- 230000007246 mechanism Effects 0.000 claims abstract description 63
- 238000006073 displacement reaction Methods 0.000 claims description 13
- 239000000919 ceramic Substances 0.000 claims description 10
- 230000009471 action Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
- F16M11/12—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting in more than one direction
- F16M11/121—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting in more than one direction constituted of several dependent joints
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/70—Wind energy
- Y02E10/72—Wind turbines with rotation axis in wind direction
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Micromachines (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210031681.2A CN114526419B (en) | 2022-01-12 | 2022-01-12 | Single-degree-of-freedom deflection platform |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210031681.2A CN114526419B (en) | 2022-01-12 | 2022-01-12 | Single-degree-of-freedom deflection platform |
Publications (2)
Publication Number | Publication Date |
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CN114526419A true CN114526419A (en) | 2022-05-24 |
CN114526419B CN114526419B (en) | 2022-11-25 |
Family
ID=81621052
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210031681.2A Active CN114526419B (en) | 2022-01-12 | 2022-01-12 | Single-degree-of-freedom deflection platform |
Country Status (1)
Country | Link |
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CN (1) | CN114526419B (en) |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3631383A (en) * | 1969-07-25 | 1971-12-28 | Bendix Corp | Piezoelectric transducer configuration |
CN2629926Y (en) * | 2003-07-08 | 2004-08-04 | 哈尔滨工业大学博实精密测控有限责任公司 | Three-free-degree precise positioning work bench |
US20070085450A1 (en) * | 2005-10-14 | 2007-04-19 | Academia Sinica | Motion actuator |
CN102962683A (en) * | 2012-11-22 | 2013-03-13 | 上海交通大学 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
CN103823302A (en) * | 2014-03-03 | 2014-05-28 | 重庆大学 | One-dimensional rapid control reflector |
CN107154747A (en) * | 2017-06-05 | 2017-09-12 | 西安交通大学 | A kind of radial direction piezoelectric actuator based on flexible structure for amplifying |
CN107481767A (en) * | 2017-09-11 | 2017-12-15 | 河南理工大学 | Drive component and flexible precision positioning platform |
CN107479187A (en) * | 2017-09-29 | 2017-12-15 | 河南理工大学 | A kind of two-dimentional quick beat speculum and its method of work |
CN109546887A (en) * | 2018-12-05 | 2019-03-29 | 哈尔滨工业大学 | A kind of symmetrical structure Piezoelectric Driving two dimension direction regulating mechanism and rotatable platform angle regulation method |
CN110058404A (en) * | 2019-04-26 | 2019-07-26 | 广东工业大学 | A kind of big stroke micro-nano beat platform of piezoelectric driven integral type |
CN110289785A (en) * | 2019-07-12 | 2019-09-27 | 哈尔滨工业大学 | A kind of power-off keeps Three Degree Of Freedom piezoelectricity to be directed toward adjustment device and platform courses method |
CN112346238A (en) * | 2020-11-02 | 2021-02-09 | 西安交通大学 | Piezoelectric two-dimensional fast reflecting mirror without axial displacement and driving and deflection angle measuring method |
-
2022
- 2022-01-12 CN CN202210031681.2A patent/CN114526419B/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3631383A (en) * | 1969-07-25 | 1971-12-28 | Bendix Corp | Piezoelectric transducer configuration |
CN2629926Y (en) * | 2003-07-08 | 2004-08-04 | 哈尔滨工业大学博实精密测控有限责任公司 | Three-free-degree precise positioning work bench |
US20070085450A1 (en) * | 2005-10-14 | 2007-04-19 | Academia Sinica | Motion actuator |
CN102962683A (en) * | 2012-11-22 | 2013-03-13 | 上海交通大学 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
CN103823302A (en) * | 2014-03-03 | 2014-05-28 | 重庆大学 | One-dimensional rapid control reflector |
CN107154747A (en) * | 2017-06-05 | 2017-09-12 | 西安交通大学 | A kind of radial direction piezoelectric actuator based on flexible structure for amplifying |
CN107481767A (en) * | 2017-09-11 | 2017-12-15 | 河南理工大学 | Drive component and flexible precision positioning platform |
CN107479187A (en) * | 2017-09-29 | 2017-12-15 | 河南理工大学 | A kind of two-dimentional quick beat speculum and its method of work |
CN109546887A (en) * | 2018-12-05 | 2019-03-29 | 哈尔滨工业大学 | A kind of symmetrical structure Piezoelectric Driving two dimension direction regulating mechanism and rotatable platform angle regulation method |
CN110058404A (en) * | 2019-04-26 | 2019-07-26 | 广东工业大学 | A kind of big stroke micro-nano beat platform of piezoelectric driven integral type |
CN110289785A (en) * | 2019-07-12 | 2019-09-27 | 哈尔滨工业大学 | A kind of power-off keeps Three Degree Of Freedom piezoelectricity to be directed toward adjustment device and platform courses method |
CN112346238A (en) * | 2020-11-02 | 2021-02-09 | 西安交通大学 | Piezoelectric two-dimensional fast reflecting mirror without axial displacement and driving and deflection angle measuring method |
Non-Patent Citations (3)
Title |
---|
ZHANG, GUIXIN等: "A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography", 《INTELLIGENT ROBOTICS AND APPLICATIONS》 * |
周子夜等: "紧凑型压电式高性能快反镜结构设计", 《中国激光》 * |
张路等: "面向精密定轴偏摆平台的PSD转角测量系统", 《激光杂志》 * |
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CN114526419B (en) | 2022-11-25 |
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GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240208 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240228 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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CI03 | Correction of invention patent | ||
CI03 | Correction of invention patent |
Correction item: transfer of patent right Correct: Revoke False: Transfer Number: 09-01 Volume: 40 |