CN114438583B - Charging device for single crystal furnace - Google Patents
Charging device for single crystal furnace Download PDFInfo
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- CN114438583B CN114438583B CN202111597255.7A CN202111597255A CN114438583B CN 114438583 B CN114438583 B CN 114438583B CN 202111597255 A CN202111597255 A CN 202111597255A CN 114438583 B CN114438583 B CN 114438583B
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- 230000000670 limiting effect Effects 0.000 claims description 37
- 239000010453 quartz Substances 0.000 claims description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 30
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- 238000004519 manufacturing process Methods 0.000 abstract description 26
- 238000003466 welding Methods 0.000 abstract description 19
- 238000000137 annealing Methods 0.000 abstract description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 4
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
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- 229910052710 silicon Inorganic materials 0.000 description 3
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The application belongs to the technical field of monocrystalline silicon production equipment, and particularly discloses a feeding device for a monocrystalline furnace, which comprises the following components: the charging barrel is used for storing materials and charging materials into the single crystal furnace, and a positioning groove is formed in the outer side wall of the charging barrel; the flange is sleeved on the outer side of the charging barrel; the supporting piece is fixedly arranged in the positioning groove; and the connecting piece is used for fixedly connecting the flange and the supporting piece so as to ensure that the flange is fixedly positioned on the charging barrel. The scheme ensures that the supporting piece is fixedly positioned in the positioning groove, is convenient to install, is stable and reliable in positioning, and can be directly disassembled and replaced if the flange is damaged, thereby improving the production efficiency and reducing the cost; compared with the prior art that the flange is fixed by using a welding process, the flange is mechanically fixed by using the positioning groove, the supporting piece and the connecting piece, so that the environmental pollution is avoided, and the production cost can be reduced by about half; and the positioning groove does not need to carry out procedures such as annealing, cold working and the like, so that the processing is simpler, a plurality of production links can be eliminated, and the working efficiency is greatly improved.
Description
Technical Field
The invention belongs to the technical field of monocrystalline silicon production equipment, and particularly relates to a feeding device for a monocrystalline furnace.
Background
The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas environment by using a graphite heater to melt polycrystalline materials such as polysilicon.
The existing single crystal furnace generally adopts a mode of only feeding once in the crystal pulling process, namely, silicon materials are filled in a quartz crucible at one time before melting materials. However, in the melting process, since the polycrystalline silicon is changed from solid to liquid, the volume is reduced, and gaps exist between solid silicon materials during charging, so that the formed silicon liquid volume is far smaller than the charging volume, and a large amount of space is reserved on the upper part of the quartz crucible, so that the cost of the crucible is saved, the efficiency is improved, and secondary charging into the quartz crucible is generally required. The main component of the currently used secondary feeding device is a quartz feeding barrel, and when in secondary feeding, the quartz feeding barrel is placed in a single crystal furnace barrel, and then silicon materials are led into a quartz crucible to finish feeding, so that the utilization rate of the quartz crucible is greatly improved, and the production cost is reduced.
The existing quartz feeding cylinder consists of an upper flange, a quartz cylinder, a positioning flange, a lower port flange and other parts. The positioning flange is welded on the outer wall of the quartz tube and used for limiting the quartz tube, the quartz charging barrel is required to carry out a plurality of working procedures such as blanking, welding, high-temperature annealing, secondary welding, polishing and cleaning on the quartz barrel when being integrally manufactured, and the positioning flange part is required to carry out a plurality of working procedures such as forming polishing and grinding, drilling, cleaning and high-temperature annealing, so that the production period is long, the assembly difficulty is high, the production cost is high, the welding working procedure adopts oxyhydrogen welding, a large amount of harmful gas is generated, the environment is polluted, and the worker health is endangered.
Disclosure of Invention
The invention aims to provide a feeding device of a monocrystalline silicon growth furnace, which can eliminate a plurality of oxyhydrogen welding operations and polishing lathe operations with great influence on the environment in the production process, avoid the production procedures of welding flanges, cleaning hydrofluoric acid and the like through the oxyhydrogen welding in the prior art, reduce the environmental pollution, reduce the production cost by about half, shorten the production period from two days to one hour and greatly provide the working efficiency.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
A charging device for a single crystal furnace, comprising:
the charging barrel is used for storing materials and charging materials into the single crystal furnace, and a positioning groove is formed in the outer side wall of the charging barrel;
the flange is sleeved on the outer side of the charging barrel;
The supporting piece is fixedly arranged in the positioning groove;
And at least one connecting piece fixedly connecting the flange and the supporting piece so as to ensure that the flange is fixedly positioned on the charging barrel.
Optionally, the connector comprises:
a first connecting rod having one end passing through the support member and the other end passing through the flange;
the plurality of first locking pieces are detachably connected with the first connecting rods, so that the first connecting rods are respectively and tightly connected with the flange and the supporting piece.
Optionally, the first connecting rod is a bolt comprising a screw and a head, and the first locking member is a nut matched with the screw of the first connecting rod;
The support piece with the through-hole that the screw rod of head rod passed has all been seted up on the flange, the screw rod of head rod is followed the downside of flange upwards passes the flange with the through-hole on the support piece, make the head of head rod support the downside of flange, and in the last side locking of flange has at least one first retaining member the downside locking of support piece has at least one first retaining member, and in the last side locking of support piece has at least one first retaining member.
Optionally, the flange is a split structure including at least two arc bodies, and the inner diameter of the flange is the same as the outer diameter of the charging barrel.
Optionally, the feeding device further comprises a circular limiting piece sleeved on the feeding cylinder, wherein the inner diameter of the limiting piece is larger than the outer diameter of the feeding cylinder, and the outer diameter of the limiting piece is equal to the outer diameter of the flange;
the limiting piece is arranged on one side of the flange, and the two arc-shaped bodies of the flange are fixedly connected with the limiting piece through the connecting piece, so that the two arc-shaped bodies are combined to form the flange.
Optionally, the positioning groove is an annular groove circumferentially formed in the outer wall of the charging barrel, and the supporting piece is a clamp matched with the annular groove.
Optionally, the flange is made of a polytetrafluoroethylene material and/or the support is made of a polytetrafluoroethylene material.
Optionally, the feeding device further includes a discharging component for discharging silicon material, and the discharging component includes:
Dan Yingzhui, which is arranged at the bottom of the charging barrel and is used for sealing or opening a discharge hole at the bottom of the charging barrel;
The connecting rod is coaxially arranged in the charging barrel, and is connected with the quartz cone to pull the quartz cone to move up and down so as to seal or open a discharge hole at the bottom of the charging barrel.
Optionally, a positioning piece is arranged on the upper portion of the charging barrel, the positioning piece comprises a positioning plate fixedly arranged on the top of the charging barrel, a guide hole is formed in the positioning plate, and the connecting rod penetrates through the guide hole to be connected with a driving device for driving the quartz cone to move up and down.
Optionally, the positioning piece further comprises a second connecting rod, one end of the second connecting rod passes through the supporting piece, and the other end of the second connecting rod passes through the positioning plate; the positioning piece further comprises a second locking piece detachably connected with the second connecting rod, so that the second connecting rod is respectively and tightly connected with the positioning plate and the supporting piece.
The beneficial effects of this scheme are as follows:
On the one hand, through set up the constant head tank on reinforced section of thick bamboo lateral wall, make support piece fixed positioning in the constant head tank, simple to operate, location is reliable and stable, and this device can also dismantle the part after finishing using moreover, and the classification of the spare part of being convenient for deposits, and further, if the flange damages can directly dismantle the change flange, need not because flange and reinforced section of thick bamboo weld together and need make reinforced section of thick bamboo again like prior art to improve production efficiency, reduce cost.
On the other hand, compared with the prior art that the flange is fixed by using a welding process, the flange is mechanically fixed by using the positioning groove, the supporting piece and the connecting piece, so that a plurality of oxyhydrogen welding operations and polishing lathe operations which have great influence on the environment are eliminated in the production process, the production process of welding the flange by oxyhydrogen welding in the prior art is avoided, the environmental pollution is reduced, and the production cost can be reduced by about half.
In addition, the technical requirements on the positioning groove are not high, the working procedures such as annealing and cold working are not needed, the processing is simpler, a plurality of production links can be eliminated, and under the condition that raw materials are full, the production period is shortened from two days to one hour, and the working efficiency is greatly improved.
Drawings
FIG. 1 is a schematic view of a charging device according to an embodiment of the present invention;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is an upper half of the cross-sectional view of section A-A of FIG. 2;
FIG. 4 is a cross-sectional view of a feed drum of a feed device according to one embodiment of the present invention;
FIG. 5 is a lower half of the cross-sectional view of section A-A of FIG. 2;
FIG. 6 is a cross-sectional view taken along section A-A of FIG. 2;
Fig. 7 is a schematic structural view of a flange of a feeding device according to an embodiment of the present invention.
Reference numerals in the drawings of the specification include: 1-charging barrel, 2-support piece, 3-flange, 301-first arc body, 302-second arc body, 4-connecting piece, 401-first connecting rod, 402-first locking piece, 5-spacing piece, 6-constant head tank, 7-connecting rod, 8-support flange, 9-locating plate, 10-second connecting rod, 11-second locking piece, 12-quartz cone.
Detailed Description
Various embodiments according to the present invention will be described in detail with reference to the accompanying drawings. Here, it is to be noted that in the drawings, the same reference numerals are given to constituent parts having substantially the same or similar structures and functions, and repeated description thereof will be omitted.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
The drawings in the present specification are schematic views, which assist in explaining the concept of the present invention, and schematically show the shapes of the respective parts and their interrelationships.
An alternative embodiment according to the present invention will be described in detail below with reference to fig. 1 to 7.
The embodiment provides a feeding device for a monocrystalline silicon furnace, which comprises: the feeding device comprises a feeding barrel 1 for storing materials and feeding materials into a single crystal furnace, a flange sleeved on the outer side of the feeding barrel 1, a supporting piece 2 and a connecting piece 4, wherein a positioning groove 6 is formed in the outer side wall of the feeding barrel 1, the supporting piece 2 is fixedly arranged in the positioning groove 6, and the flange 3 and the supporting piece 2 are fixedly connected through at least one connecting piece 4 so that the flange 3 is fixedly positioned on the feeding barrel 1.
Based on the basic scheme, the application principle of the embodiment is as follows, when the flange 3 is sleeved on the charging barrel 1, then the supporting piece 2 is installed in the positioning groove 6 on the charging barrel 1, the supporting piece 2 is fixed and axially positioned through the positioning groove 6, and then the flange 3 is fixedly connected with the supporting piece 2 through the connecting piece 4, so that the flange 3 and the charging barrel 1 are fixed.
The charging device that this embodiment provided mainly relies on flange 3 to fix a position charging barrel 1 in the single crystal growing furnace when installing to the single crystal growing furnace in, specifically, can set up the spacing flange that allows charging barrel 1 to pass through and flange 3 can't pass through on the single crystal growing furnace generally, and spacing flange's hole diameter is greater than charging barrel 1's external diameter and is less than flange 3's external diameter, consequently, makes flange 3 and spacing flange cooperation when placing charging barrel 1 in the single crystal growing furnace, alright with charging barrel 1 setting up the specific height department in the single crystal growing furnace, accomplishes the location of charging barrel 1.
Referring to fig. 1, in this embodiment, a charging barrel 1 is a high temperature resistant quartz barrel, two ends of the charging barrel 1 are open, an upper end opening is a feed inlet, a lower end opening is a discharge outlet, when charging and storing materials into the charging barrel 1, the discharge outlet at the lower end of the charging barrel 1 is closed, and silicon materials are added into the charging barrel 1 through the feed inlet; when the feeding device is placed in the single crystal furnace at a specific height to feed the material into the single crystal furnace, the silicon material in the feeding cylinder 1 is put into the single crystal furnace by opening a discharge hole at the bottom of the feeding cylinder 1.
Referring to fig. 4, in the present embodiment, a positioning groove 6 is provided on the outer side wall of the charging barrel 1 near the upper end opening to fix the support 2 on the upper portion of the charging barrel 1.
Specifically, in this embodiment, the positioning groove 6 is an annular groove circumferentially formed on the outer wall of the charging barrel 1, and the preparation of the positioning groove 6 is mainly completed by a grinding process capable of machining on special and complex surfaces such as a cylindrical surface, a conical surface, and the like. In this embodiment, the support 2 is a clamp matching with the annular groove, and the support 2 can be fixed by clamping the clamp in the annular groove and holding the charging barrel 1 during installation. Under this structure, utilize constant head tank 6 to carry out axial positioning to support piece 2, apply decurrent resistance through support piece 2 that the upside convex surface of constant head tank 6 is located in the constant head tank 6 to through support piece 2 and flange fixed connection, thereby realize the upper and lower spacing to flange 3, replace among the prior art through the welding with flange 3 direct fixation at quartz capsule smooth outer wall's connected mode.
Referring to fig. 3, in this embodiment, the depth of the positioning groove 6 is about one third of the wall thickness of the charging barrel 1, the thickness of the supporting member 2 is greater than the depth of the positioning groove 6, so that only the inner portion of the supporting member 2 is embedded into the positioning groove 6, and the outer portion of the supporting member 2 protrudes outside the charging barrel 1 to be connected with the first connecting rod 401. And the width of the support piece 2 is equal to the width of the positioning groove 6, so that the support piece 2 can be just embedded into the positioning groove 6 without gaps, and the installation stability of the support piece 2 is ensured. Specifically, the wall thickness of the charging cartridge 1 is 8mm-15mm, for example, the wall thickness of the charging cartridge 1 is 8mm, 9mm, 10mm, 11mm, 12mm, 13mm, 14mm, 15mm. Preferably, the wall thickness of the feed cylinder 1 is 13mm.
In some embodiments, the flange 3 is made of a polytetrafluoroethylene material and/or the support 2 is made of a polytetrafluoroethylene material. In this embodiment, the support 2 is preferably a tetrafluoro collar, the flange 3 is preferably a tetrafluoro flange, and under normal conditions, metal easily pollutes silicon liquid, so that single crystal parameters are abnormal, therefore, in this embodiment, the tetrafluoro collar is used as the support 2, and the tetrafluoro flange is used as the flange structure, and the working heat-resistant temperature reaches 250 ℃, so that the use requirement can be met, and the material has self-lubricity, surface non-tackiness, atmospheric aging resistance and incombustibility, and meets the use requirement.
Referring to fig. 3, the flange 3 is sleeved outside the charging barrel 1 and is positioned at the upper part of the charging barrel 1, and in order to avoid interference between the supporting piece 2 and a limiting structure in the single crystal furnace, the flange 3 is arranged below the supporting piece 2. In this embodiment, the flange 3 and the support member 2 are fixed by at least one connecting member 4, and the support member 2 is fixedly disposed in the positioning slot 6 of the charging barrel 1, so that the flange 3 and the support member 2 are fixed by the connecting member 4 to achieve the fixed connection between the flange 3 and the charging barrel 1. The flange 3 and the charging barrel 1 are fixed only through the mechanical connection mode, the assembly mode is simple, the production time and the production cost are reduced, the welding process is avoided, and the influence on the environment is small.
Referring to fig. 1, in some embodiments, each connector 4 comprises a first connector rod 401, one end of the first connector rod 401 passing through the support 2 and the other end passing through the flange 3; the connecting member 4 further includes a plurality of first locking members 402 detachably connected to the first connecting rod 401, so that the first connecting rod 401 is fastened to the flange 3 and the supporting member 2, respectively. During installation, the first connecting rod 401 is fixed with the support piece 2 and the flange 3 respectively through the first locking piece 402, so that the flange 3 is fixedly connected with the support piece 2, the mechanical fixation of the flange 3 and the charging barrel 1 is completed, and the welding fixation is avoided. Specifically, the first locking members 402 are fastened to both sides of the first connecting rod 401 passing through the support 2 or the flange 3, and the support 2 and the flange 3 are fastened to the first connecting rod 401 in the up-down direction, thereby achieving a fixed connection with each other.
The existing single crystal furnaces of different types and different specifications and the charging barrel 1 are different in height and length, and the positioning heights of the same charging barrel 1 in different single crystal furnaces are also different, so that the charging barrel 1 welded and fixed with the flange 3 is incapable of being matched with the single crystal furnaces of different specifications due to the fact that the height of the flange 3 cannot be adjusted, the universality of the charging barrel 1 is poor, the corresponding charging barrel 1 is required to be manufactured for the single crystal furnaces of each specification, and the production cost is high.
In this embodiment, the first connecting rod 401 is a rod with a certain length, the positioning groove 6 and the supporting member 2 are fixed in position, when the height of the flange 3 on the charging barrel 1 is adjusted, the first locking members 402 locked on the upper side and the lower side of the supporting member 2 are detached first, then the flange 3 and the first connecting rod 401 integrally move upwards or downwards along the charging barrel 1, so that the portion of the first connecting rod 401 penetrating out of the supporting member 2 is lengthened or shortened to adjust the height of the flange 3, finally the first locking members 402 on the upper side and the lower side of the supporting member 2 are respectively locked on the upper side and the lower side of the supporting member 2 to realize the fixed positioning of the flange 3, and the adjustment of the height of the flange 3 can be completed, so that the device can adapt to single crystal furnaces with different height requirements.
In this embodiment, the first connecting rod 401 is a bolt including a screw and a head, and the first locking member 402 is a nut matching the screw of the first connecting rod 401; the support 2 and the flange 3 are provided with through holes for the screw rods of the first connecting rod 401 to pass through, the screw rods of the first connecting rod 401 pass through the flange 3 and the through holes of the support 2 from the lower side of the flange 3, so that the head of the first connecting rod 401 is propped against the lower side of the flange 3, at least one first locking piece 402 is locked on the upper side of the flange 3, at least one first locking piece 402 is locked on the lower side of the support 2, and at least one first locking piece 402 is locked on the upper side of the support 2.
Based on the above-structured connector 4, when installing the flange 4, the bolt is turned upside down (the head of the bolt is turned downward), then the screw rod of the bolt is passed upward through the through hole of the flange 3, and after the screw rod passes through the through hole of the flange 3, two nuts are mounted on the screw rod, then the bolt is driven to move upward so that the screw rod passes through the through hole of the support 2 until the head of the bolt abuts against the lower side surface of the flange 3, and then one nut is mounted on the top of the screw rod. Then, the screw rod is moved up and down to drive the flange 3 to move up and down, so as to adjust the position of the flange 3 on the charging barrel 1, after the position of the flange 3 is determined, the nut at the top of the screw rod is rotated down to lock the nut on the upper side surface of the supporting piece 2, then two nuts positioned between the flange 3 and the supporting piece 2 are respectively rotated up and down until the lower nut is locked on the upper side surface of the flange 3, and the upper nut is locked on the lower side surface of the supporting piece 2, thereby completing the fixed connection between the flange 3 and the first connecting rod 401 and the fixed connection between the supporting piece 2 and the first connecting rod 401, and realizing the mechanical fixation of the flange 3 and the charging barrel 1.
Referring to fig. 1, in order to further improve the stability of the flange 3 on the cartridge 1, a plurality of first connecting rods 401 are preferably provided, in this embodiment, the first connecting rods 401 are provided with 6, and the 6 first connecting rods 401 are uniformly arranged along the circumferential direction of the outer sidewall of the cartridge 1, and corresponding to the number of the first connecting rods 401, in this embodiment, there are 6 through holes on the flange 3 and the supporting member 2.
It should be understood that, in other possible embodiments, the first connecting rod 401 may be a polished rod, where a plurality of first fastening holes are formed on the polished rod at intervals, and accordingly, the first locking member 402 may be a pin or a screw, for example, through holes penetrating up and down are formed on the flange 3 and the support member 2, and second fastening holes communicating with the through holes are horizontally formed on circumferential side walls of the flange 3 and the support member 2, and when the first connecting rod 401 is installed, the first fastening holes on the first connecting rod 401 are opposite to the second fastening holes on the flange 3 and the support member 2, and then the fastening connection between the first connecting rod 401 and the support member 2 and the flange 3 can be achieved by inserting the screw or the pin into the second fastening holes and the first fastening holes from the outside.
In some embodiments, the flange 3 is a split structure comprising at least two arcs, and the inner diameter of the flange 3 is the same as the outer diameter of the feed cylinder 1. In the embodiment, the inner diameter of the flange 3 is designed to be the same as the outer diameter of the charging barrel 1, so that the flange 3 and the charging barrel 1 are in clearance-free fit, the flange 3 and the charging barrel 1 are coaxially arranged, and the charging barrel 1 can be vertically arranged in the single crystal furnace; and can also avoid leading to the problem emergence that feed cylinder 1 rocks because of there is the clearance between flange 3 and the feed cylinder 1, promoted the stability of device.
However, the flange 3 and the charging barrel 1 are in clearance-free fit, so that the flange 3 cannot easily move on the charging barrel 1 for a long distance, and therefore, in the embodiment, the flange 3 is designed into a split structure, so that the flange 3 can be conveniently and rapidly installed at any position of the charging barrel 1, and the flange 3 can be rapidly detached, so that the device can rapidly adjust the position of the flange 3 on the charging barrel 1. Specifically, the flange 3 of the split structure is formed by a plurality of detachable and combined arc-shaped bodies, for example, the existing split flange 3, and the arc-shaped bodies are connected end to end through a connecting structure to form the flange 3 of the annular structure.
Referring to fig. 7, in some embodiments, there are two arc bodies, namely, a first arc body 301 and a second arc body 302, and the first arc body 301 and the second arc body 302 are both in a semicircular structure, so that the two arc bodies can both hold the charging barrel 1 at a large angle.
Referring to fig. 7, in other embodiments, the first arc body 301 and the second arc body 302 are not fixed by using a bolt-nut assembly, but are combined and fixed by adopting the following structure, referring to fig. 1 and 3, an annular limiting piece 5 is further sleeved on the charging barrel 1, and the inner diameter of the limiting piece 5 is larger than the outer diameter of the charging barrel 1; the limiting piece 5 is arranged on one side of the flange 3, and the flange 3 is fixedly connected with the limiting piece 5 through the connecting piece 4 so that a plurality of arc-shaped bodies are combined to form the flange 3.
Specifically, in this embodiment, the limiting member 5 is a stainless steel ring structure, and its inner diameter is greater than the outer diameter of the charging barrel 1, so that the limiting member 5 can easily move axially on the charging barrel 1, and also can avoid scratching the charging barrel 1 when the limiting member 5 moves. Referring to fig. 1, in this embodiment, the outer diameter of the limiting member 5 is equal to the outer diameter of the flange 3, so that the problem that the strength of the limiting member 5 is small due to the small annular width of the limiting member 5 caused by the small outer diameter of the limiting member 5 can be avoided, and the problem that the limiting member 5 interferes with the limiting structure in the single crystal furnace due to the large outer diameter of the limiting member 5 can be avoided.
Specifically, referring to fig. 1, in the present embodiment, the limiting member 5 is disposed on the upper side of the flange 3, and a through hole is also formed at a position of the limiting member 5 corresponding to the through hole formed in the flange 3, so as to facilitate the first connecting rod 401 passing through.
Based on the above structure, during assembly, the screw of the first connecting rod 401 is moved upward from the bottom of the flange 3 to sequentially pass through the arc body of the flange 3 and the through hole on the limiting member 5, then two first locking members 402 are installed on the first connecting rod 401, the first connecting rod 401 is driven to move upward to pass through the through hole on the supporting member 2 until the head of the lower end of the first connecting rod 401 abuts against the flange 3, then the first locking member 402 is installed on the first connecting rod 401 passing through the through hole of the supporting member 2 and locked on the upper side of the supporting member 2, finally the two first locking members 402 between the limiting member 5 and the supporting member 2 are respectively rotated upward and downward until the lower first locking member 402 is locked on the upper side of the limiting member 5, and the upper first locking member 402 is locked on the lower side of the supporting member 2. After the assembly is completed, the two arc bodies are fixed on the lower surface of the limiting piece 5 under the limiting action of the first locking piece 402 and the first connecting rod 401, and at this time, the two arc bodies are positioned on the same horizontal plane and are connected end to form the annular flange 3.
In this embodiment, the internal diameter of the limiting piece 5 is greater than the external diameter of the charging barrel 1, so that the limiting piece 5 does not interfere with the charging barrel 1 during assembly, does not contact with the charging barrel 1, avoids polluting silicon liquid, and can combine the arc body into an annular flange 3 and provide a certain supporting effect for the flange 3.
Referring to fig. 2, in some embodiments, in order to facilitate assembly of the flange 3 and the limit structure in the single crystal furnace, a chamfer is circumferentially arranged on the outer side of the bottom of the flange 3, and the chamfer can guide the flange 3 to be in contact with and matched with the limit structure in the single crystal furnace when the feeding device moves in the single crystal furnace, so that the bottom of the flange 3 can be seamlessly embedded into the limit structure.
Referring to fig. 3 to 6, in some embodiments, to facilitate feeding silicon material, the apparatus is further provided with a feeding assembly for feeding material into the single crystal furnace, the feeding assembly comprising: the quartz cone 12 is arranged at the bottom of the charging barrel 1 and is used for sealing or opening a discharge hole at the bottom of the charging barrel 1; the connecting rod 7 is coaxially arranged in the charging barrel 1 and is connected with the quartz cone 12 to pull the quartz cone 12 to move up and down so as to seal or open a discharging hole at the bottom of the charging barrel 1.
Specifically, the quartz cone 12 is a conical body with the bottom diameter larger than the diameter of the discharge hole of the charging barrel 1, the conical body is positioned at the bottom of the charging barrel 1, the lower end of the connecting rod 7 is coaxially fixed with Dan Yingzhui, the upper end of the connecting rod extends upwards to the upper part of the feed hole of the charging barrel 1 and is connected with a driving device for driving the quartz cone 12 to move up and down, and when the quartz conical body is used, the driving device lifts the connecting rod 7 upwards to enable the quartz cone 12 to block the discharge hole, and pushes the connecting rod 7 downwards to open the discharge hole.
Referring to fig. 1,2 and 3, in some embodiments, in order to limit the movement of the connecting rod 7 in the horizontal direction, a positioning member is further disposed at the upper portion of the charging barrel 1 of the device, the positioning member includes a positioning plate 9 fixedly disposed at the top of the charging barrel 1, and a guiding hole through which the connecting rod 7 passes is formed in the positioning plate 9, so that the connecting rod 7 is connected with a driving device for driving the quartz cone 12 to move up and down. Specifically, referring to fig. 1, in this embodiment, a support flange 8 is fixedly mounted at the top end of the charging barrel 1, a positioning plate 9 may be disposed on the support flange 8 by means of screw connection, a guide hole is disposed at the center of the positioning plate 9, and the guide hole is located on the axis of the charging barrel 1, so that the connecting rod 7 is coaxial with the charging barrel 1.
Referring to fig. 1, in other embodiments, the positioning member further comprises a second connecting rod 10, one end of the second connecting rod 10 passing through the support member 2, and the other end passing through the positioning plate 9; the positioning piece further comprises a second locking piece 11 which is detachably connected with the second connecting rod 10, so that the second connecting rod (10) is fixedly connected with the positioning plate 9 and the supporting piece 2 respectively.
Specifically, referring to fig. 1 and 2, in this embodiment, the second connecting rod 10 is also a bolt, the second locking member 11 is a nut matched with the second connecting rod 10, the positioning plate 9 is a rectangular plate, through holes for the second connecting rod 10 to pass through are formed in the supporting member 2, the supporting flange 8 and the positioning plate 9, and when the feeding barrel 1 is installed, the screw portion of the second connecting rod 10 sequentially passes through the through holes of the supporting member 2, the supporting flange 8 and the positioning plate 9 from the lower direction of the supporting member 2 until the head of the lower end of the second connecting rod 10 abuts against the lower side of the supporting member 2, and then the second locking member 11 abuts against the upper surface of the positioning plate 9 from the upper portion of the second connecting rod 10 and is screwed tightly so as to fix the positioning plate 9 and the feeding barrel 1.
Based on the structure of the positioning piece, in this embodiment, the second connecting rod 10 and the second locking piece 11 not only have fixing and limiting effects on the positioning plate 9, but also have a certain supporting protection effect on the supporting piece 2, so that the connection stability of the supporting piece 2 and the charging barrel 1 is improved.
The embodiment has the following effects based on the scheme: on the one hand, through setting up constant head tank 6 on reinforced section of thick bamboo 1 lateral wall, make support piece 2 fixed positioning in constant head tank 6, simple to operate, location is reliable and stable, and this device can also dismantle the part after finishing using moreover, and the classification of the spare part of being convenient for deposits, if flange 3 damages can directly dismantle change flange 3, need not because flange and reinforced section of thick bamboo weld together and need make reinforced section of thick bamboo 1 again like prior art to improve production efficiency, reduce cost. On the other hand, compared with the prior art that the flange 3 is fixed by utilizing a welding process, the flange 3 is mechanically fixed by utilizing the positioning groove 6, the supporting piece 2 and the connecting piece 4, so that a plurality of oxyhydrogen welding operations and polishing lathe operations which have great influence on the environment are eliminated in the production process, the environment of welding the flange 3 by oxyhydrogen welding in the prior art is avoided, the pollution to the environment is reduced, and the production cost can be reduced by about half. In addition, the technical requirements on the positioning groove 6 are not high, the working procedures such as annealing and cold working are not needed, the processing is simpler, a plurality of production links can be eliminated, and under the condition that raw materials are full, the production period is shortened from two days to one hour, so that the working efficiency is greatly improved.
The foregoing describes in detail preferred embodiments of the present invention. It should be understood that numerous modifications and variations can be made in accordance with the concepts of the invention by one of ordinary skill in the art without undue burden. Therefore, all technical solutions which can be obtained by logic analysis, reasoning or limited experiments based on the prior art by the person skilled in the art according to the inventive concept shall be within the scope of protection defined by the claims.
Claims (10)
1. A charging device for a single crystal furnace, comprising:
The feeding cylinder (1) is used for storing materials and feeding materials into the single crystal furnace, a positioning groove (6) is formed in the outer side wall of the feeding cylinder, the positioning groove (6) is an annular groove formed in the outer wall of the feeding cylinder (1) in a circumferential direction, and the feeding cylinder is finished through a grinding process on the surface of the outer wall of the feeding cylinder (1);
The flange (3) is sleeved on the outer side of the charging barrel (1), and the flange (3) is used for positioning the charging barrel (1) in the single crystal furnace;
the support piece (2) is fixedly arranged in the positioning groove (6);
And at least one connecting piece (4) for fixedly connecting the flange (3) and the supporting piece (2) so that the flange (3) is fixedly positioned on the charging barrel (1), and the height position of the flange (3) on the charging barrel (1) is adjusted through the at least one connecting piece (4).
2. Charging device for single crystal furnaces according to claim 1, characterised in that said connection (4) comprises:
a first connecting rod (401), one end of which passes through the support (2) and the other end of which passes through the flange (3);
And the plurality of first locking pieces (402) are detachably connected with the first connecting rods (401), so that the first connecting rods (401) are respectively and tightly connected with the flange (3) and the supporting piece (2).
3. The charging device for a single crystal furnace according to claim 2, wherein the first connecting rod (401) is a bolt comprising a screw and a head, and the first locking member (402) is a nut that mates with the screw of the first connecting rod (401);
The support piece (2) with all offer the confession on flange (3) the through-hole that the screw rod of head rod (401) passed, the screw rod of head rod (401) is followed the downside of flange (3) upwards passes flange (3) with the through-hole on support piece (2), make the head of head rod (401) support in the downside of flange (3), and in the upside of flange (3) locking has at least one first retaining member (402) the downside of support piece (2) locking has at least one first retaining member (402), and in the upside of support piece (2) locking has at least one first retaining member (402).
4. A charging device for a single crystal furnace according to claim 3, characterized in that the flange (3) is a split structure comprising at least two arc-shaped bodies, and the inner diameter of the flange (3) is the same as the outer diameter of the charging barrel (1).
5. The charging device for a single crystal furnace according to claim 4, further comprising an annular limiting piece (5) sleeved on the charging barrel (1), wherein the inner diameter of the limiting piece (5) is larger than the outer diameter of the charging barrel (1), and the outer diameter of the limiting piece (5) is equal to the outer diameter of the flange (3);
The limiting piece (5) is arranged on one side of the flange (3), and the two arc-shaped bodies of the flange (3) are fixedly connected with the limiting piece (5) through the connecting piece (4) so that the two arc-shaped bodies are combined to form the flange (3).
6. Charging device for a single crystal furnace according to any one of claims 1-5, characterized in that the support (2) is a clamp fitting into the annular groove.
7. Charging device for single crystal furnaces according to claim 6, characterised in that said flange (3) is made of polytetrafluoro material and/or said support (2) is made of polytetrafluoro material.
8. The charging apparatus for a single crystal furnace of claim 1, further comprising a discharge assembly for charging the single crystal furnace, the discharge assembly comprising:
dan Yingzhui (12) which is arranged at the bottom of the charging barrel (1) and is used for sealing or opening a discharge hole at the bottom of the charging barrel (1);
the connecting rod (7) is coaxially arranged in the charging barrel (1) and is connected with the quartz cone (12) to pull the quartz cone (12) to move up and down so as to seal or open a discharge hole at the bottom of the charging barrel (1).
9. The feeding device for the single crystal furnace according to claim 8, wherein a positioning piece is arranged on the upper portion of the feeding barrel (1), the positioning piece comprises a positioning plate (9) fixedly arranged on the top of the feeding barrel (1), a guide hole is formed in the positioning plate (9), and the connecting rod (7) penetrates through the guide hole to be connected with a driving device for driving the quartz cone (12) to move up and down.
10. The charging apparatus for a single crystal furnace according to claim 9, wherein the positioning member further comprises:
a second connecting rod (10), one end of which passes through the supporting piece (2) and the other end of which passes through the positioning plate (9);
the second locking piece (11) is detachably connected with the second connecting rod (10), so that the second connecting rod (10) is respectively and tightly connected with the positioning plate (9) and the supporting piece (2).
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