CN114414862B - Viscous adsorption method for test probe cleaning method - Google Patents
Viscous adsorption method for test probe cleaning method Download PDFInfo
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- CN114414862B CN114414862B CN202210126255.7A CN202210126255A CN114414862B CN 114414862 B CN114414862 B CN 114414862B CN 202210126255 A CN202210126255 A CN 202210126255A CN 114414862 B CN114414862 B CN 114414862B
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- test probe
- sleeve
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- 239000000523 sample Substances 0.000 title claims abstract description 263
- 238000012360 testing method Methods 0.000 title claims abstract description 229
- 238000004140 cleaning Methods 0.000 title claims abstract description 164
- 238000000034 method Methods 0.000 title claims abstract description 57
- 238000001179 sorption measurement Methods 0.000 title claims abstract description 39
- 230000005540 biological transmission Effects 0.000 claims abstract description 117
- 239000012535 impurity Substances 0.000 claims abstract description 46
- 230000009471 action Effects 0.000 claims abstract description 34
- 239000000428 dust Substances 0.000 claims abstract description 26
- 238000005096 rolling process Methods 0.000 claims abstract description 4
- 238000007790 scraping Methods 0.000 claims description 68
- 238000007789 sealing Methods 0.000 claims description 32
- 230000033001 locomotion Effects 0.000 claims description 6
- 239000003292 glue Substances 0.000 abstract description 22
- 239000004065 semiconductor Substances 0.000 abstract description 9
- 230000000694 effects Effects 0.000 description 8
- 238000009434 installation Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000035508 accumulation Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 210000001503 joint Anatomy 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000013100 final test Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/16—Rigid blades, e.g. scrapers; Flexible blades, e.g. wipers
- B08B1/165—Scrapers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
The invention discloses a viscous adsorption method for a cleaning method of a test probe, and relates to the technical field of semiconductors; the method specifically comprises the following steps: the transmission motor is started to rotate clockwise to drive the driving trapezoidal gear to rotate clockwise, the driving trapezoidal gear drives the threaded sleeve to rotate anticlockwise to drive the transmission shaft to move downwards, the cleaning soft glue is driven to move downwards to abut against the upper end face of the test probe through the fixing piece, the cleaning soft glue is deformed by contact, abutting and rolling under the contact action of the cleaning soft glue and the plum blossom probe part of the test probe, impurities and dust on the upper end face of the plum blossom probe are adhered to the surface of the cleaning soft glue, the transmission motor is adjusted to rotate anticlockwise to finish the previous action in the reverse direction, and the cleaning soft glue moves upwards to be separated from the upper end face of the test probe so as to finish the viscous adsorption cleaning work; the method is applied to a test probe cleaning method, can effectively replace manual cleaning, and ensures the cleaning quality and the test efficiency.
Description
The application is a divisional application of the invention patent application of 'cleaning method of test probe and friction scraping, adhesive adsorption and probe fixing method'.
Application date of the original case: 2020-11-28.
Original application No.: 2020113656141.
the name of the original invention is: a test probe cleaning method and a friction scraping, adhesive adsorption and probe fixing method.
Technical Field
The invention discloses a viscous adsorption method for a cleaning method of a test probe, and relates to the technical field of semiconductors.
Background
The last process of semiconductor manufacturing is testing, which can be divided into preliminary testing and final testing, and the main purpose of which is to classify semiconductor devices according to specifications, in addition to finding defects of the semiconductor devices. In the process of testing a semiconductor device such as a chip, a probe makes electrical contact with a pin, such as a solder ball, on the semiconductor device to test the related electrical properties of the semiconductor device and evaluate whether the function of the semiconductor device is normal, but since the solder ball on the bottom surface of the chip to be tested is made of a metal material, after the probe tip repeatedly contacts the solder ball in the repeated testing process, metal oxide and other organic materials on the solder ball are accumulated on the probe tip. When these impurity accumulations are in a certain amount, need in time clear up, otherwise can influence the characteristic of probe tip for the test result becomes inaccurate, still need to change the test probe on the whole test socket even when the deposit is serious, the probe of the comparatively extensive probe of current application is mostly plum blossom form, and especially four-jaw plum blossom probe is used and extensive, and the cleaning work to four-jaw plum blossom probe mainly has following problem:
the first and the main cleaning modes are that the brush is manually used for cleaning, and the test result is influenced due to the fact that the cleaning quality is uneven;
secondly, even if manual cleaning is adopted, the test socket needs to be detached from the test base, the probes are detached and separated from the test socket and then cleaned, and after the cleaning is finished, the probes are installed one by one, so that the production line is stopped, and the test efficiency and the output are influenced;
thirdly, removing impurities deposited on the edge and corner end faces of the plum blossom probe according to the shape of the plum blossom probe;
and fourthly, how to completely remove the removed foreign dust from the probe so as to maintain the accuracy of the test result of the probe.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a test probe cleaning method, which is used for solving the problems of how to effectively replace manual cleaning and how to thoroughly clean a probe.
The technical scheme of the invention is as follows:
a test probe cleaning device comprises a cleaning member, a clamping member, a test socket, a test base and a test probe; the cleaning device comprises a cleaning component, a test socket, a clamping component and a test base, wherein the clamping component is arranged above the cleaning component, the test socket is arranged below the cleaning component, the clamping component can control the cleaning component above the test socket through a transmission mechanical arm in a moving mode, the cleaning component can move into the test socket and abut against a probe of a test probe in the test socket, and therefore the work of scraping accumulated impurities from the test probe and adsorbing and removing the impurities and dust from the test socket is completed;
the cleaning component comprises a sleeve, a sealing sheet, a mounting plate, a limiting sheet, a piston, a driving trapezoidal gear, a driven trapezoidal gear, a transmission rod, a moving sheet, an elastic piece, a scraping piece, a threaded sleeve, a transmission shaft, a fixing sheet, a cleaning soft rubber, a reset spring and an output long shaft; the utility model discloses a socket, including mounting panel, casing, upper spacing piece, flexible glue piece, mounting panel, drive trapezoidal gear, driven trapezoidal gear, transmission rod, transmission shaft, output long axis, driven trapezoidal gear, flexible glue piece, the casing passes through the gasket array and sets up under the mounting panel on the terminal surface, but the portable piston that is provided with between upper spacing piece and the gasket, and the initiative trapezoidal gear and the driven trapezoidal gear of piston lower extreme mesh mutually, driven trapezoidal gear both ends symmetry is provided with the transfer line, and the one end of transfer line links to each other with the one end of piston, and the other end of transfer line passes two spacing pieces and links to each other with the removal of limiting piece up and down, and be provided with reset spring on being located the transmission shaft between two spacing pieces through the elastic part display, the transmission motor sets up on the casing lateral wall of one side, and the output long axis links to each other, the output long axis passes the casing that the array set up, and the driven trapezoidal gear setting on the output long axis, the scraping the flexible glue piece can carry out the piston up and down reciprocating motion to the lower terminal surface of scraping the piece and leaning on the probe of piece through the elastic part to offset the impurity of plum blossom point to the clean socket that offsets on the plum blossom point, clean impurity that just can inhale the clean dust and glue the clean impurity of plum blossom from the clean surface and glue the socket.
Preferably, the clamping member comprises a clamping body, an air pipeline and a sealing plate; the air suction device is characterized in that an adsorption port is formed in the lower portion of an inner cavity of the clamping body, an air pipeline is arranged in the clamping body, an air suction end of the air pipeline is connected to the adsorption port, the clamping body can provide air suction through the adsorption port in the lower end of the air pipeline to suck a cleaning component, the cleaning component is adsorbed on a sealing plate in the lower end of the clamping body, and a plurality of positioning holes are symmetrically formed in the two ends of the clamping body.
Preferably, the test base comprises a base body, a first limiting clamping piece, a second limiting clamping piece, a first lead screw nut, a second lead screw nut, a first adjusting bolt, a second adjusting bolt and a positioning pin; the utility model discloses a test socket, including base body, base body lateral wall, first spacing clamping piece, first adjusting bolt, second adjusting bolt, locating pin, locating hole, locating socket, base body lateral wall symmetry is opened there is the bar through-hole, and first spacing clamping piece and the activity of the spacing clamping piece of second set up in the bar through-hole, the left end of first spacing clamping piece is connected with first lead screw nut, the spacing clamping piece of second is connected with second lead screw nut, first adjusting bolt passes first lead screw nut and rotates the setting on the left end lateral wall of base body, second adjusting bolt passes second lead screw nut and rotates the setting on the right-hand member lateral wall of base body, the locating pin symmetry sets up in the base body upper end, and with the locating hole cooperate, equal array is opened on first spacing clamping piece and the spacing clamping piece of second has circular through-hole, and the plum blossom probe of test probe can pass circular through-hole, sets up at the test base body originally internally, and the test socket is installed on the base body.
Preferably, the side wall of the sleeve is provided with an air inlet hole, the air inlet hole is positioned between the piston and the upper limiting sheet, and the air inlet hole is connected with the air inlet pipe.
Preferably, the center of the movable plate is provided with a through hole, and the transmission shaft penetrates through the through hole in the center of the movable plate to be connected with the upper end face of the fixed plate.
Preferably, the inner diameter of the sleeve matches the outer diameter of the test probe.
Preferably, the first limit clamping piece and the second limit clamping piece are respectively provided with an inner diameter with circular through holes in an array mode, and the inner diameter is matched with the outer diameter of the test probe.
A clamping component of a test probe cleaning device comprises a clamping body, an air pipeline and a sealing plate; the air suction device is characterized in that an adsorption port is formed in the lower portion of an inner cavity of the clamping body, an air pipeline is arranged in the clamping body, an air suction end of the air pipeline is connected to the adsorption port, the clamping body can provide air suction through the adsorption port in the lower end of the air pipeline to suck a cleaning component, the cleaning component is adsorbed on a sealing plate in the lower end of the clamping body, and a plurality of positioning holes are symmetrically formed in the two ends of the clamping body.
A test base of a test probe cleaning device comprises a base body, a first limiting clamping piece, a second limiting clamping piece, a first lead screw nut, a second lead screw nut, a first adjusting bolt and a second adjusting bolt; the utility model discloses a test socket, including base body, base body lateral wall, first spacing clamping piece, second spacing clamping piece, first adjusting bolt, second adjusting bolt, locating pin, locating socket, base body lateral wall symmetry open there are two sets of bar through-holes, and first spacing clamping piece and the activity of the spacing clamping piece of second set up in two sets of bar through-holes, the left end of first spacing clamping piece is connected with first lead screw nut, the spacing clamping piece of second is connected with second lead screw nut, first adjusting bolt passes first lead screw nut and rotates the setting on the left end lateral wall of base body, second adjusting bolt passes second lead screw nut and rotates the setting on the right-hand member lateral wall of base body, the locating pin symmetry sets up in base body upper end, and with the locating hole cooperate, equal array division has circular through-hole on first spacing clamping piece and the spacing clamping piece of second, the plum blossom probe of test probe can pass circular through-hole, sets up at the test base body originally internally, the test socket is installed on the base body.
A test probe cleaning method comprising the steps of:
step a, fixing a probe, adjusting a first adjusting bolt and a second adjusting bolt which are symmetrically arranged on a base body corresponding to a test probe to be cleaned, simultaneously rotating the first adjusting bolt clockwise and the second adjusting bolt counterclockwise, and rotating the first adjusting bolt and the second adjusting bolt for the same number of turns, wherein the first adjusting bolt and the first lead screw nut are in threaded action, so that the first lead screw nut pulls a first limiting clamping piece to move outwards for a certain distance along the axial direction of the first adjusting bolt, and simultaneously, the second adjusting bolt and the second lead screw nut are in threaded action, so that the second lead screw nut pulls a second limiting clamping piece to move outwards for a distance corresponding to the first limiting clamping piece along the axial direction of the second adjusting bolt, the side walls of the corresponding circular through holes on the first limiting clamping piece and the second limiting clamping piece are in relative displacement, and the side walls of the circular through holes which are in relative displacement are staggered and abut against the outer wall of the test probe arranged in the corresponding circular through holes, so as to fix the test probe;
b, performing adsorption installation, namely sucking air through an air pipeline arranged in the clamping body, and forming a suction effect on the cleaning component through an adsorption port so as to adsorb the cleaning component on the bottom surface of the sealing plate;
c, alignment adjustment, namely, placing the cleaning component which is subjected to adsorption installation right above the test socket by controlling the transmission mechanical arm, enabling a positioning pin on the test base to correspond to a positioning hole formed in the clamping body, pushing the clamping component to drive the cleaning component to move downwards by controlling the transmission mechanical arm, enabling the positioning pin to be inserted into the positioning hole, enabling the test probe to be inserted into a corresponding sleeve pipe, and enabling the lowest end of the sleeve pipe and the lower end surface of the quincuncial probe of the test probe to be located on the same horizontal plane so as to complete alignment adjustment work;
d, scraping by friction resistance, inputting gas into the gas inlet hole formed in the side wall of the upper end of the sleeve through the gas inlet pipe to increase the air pressure of a closed space between the sealing sheet and the piston, pushing the piston to move downwards under the action of the pressure, pushing the transmission rod by the piston which moves downwards to overcome the elastic action of the return spring so as to drive the movable sheet to move downwards, pushing the scraping piece to move downwards through the elastic piece by the movable sheet which moves downwards, wherein the scraping piece which moves downwards corresponds to the edge of the upper end face of the plum blossom probe, and under the action of the elastic force of the elastic piece, the lower end face of the scraping piece is tightly attached to the edge end face of the plum blossom probe and moves downwards along the edge, and when the scraping piece moves to the bottom of the plum blossom probe, the gas inlet hole formed in the side wall of the upper end of the sleeve is sucked through the gas inlet pipe, the pneumatic pressure of a sealed space between the sealing sheet and the piston is reduced, the piston is driven to move upwards under the action of the pressure, the piston moving upwards and the elastic force of the reset spring drive the transmission rod to move upwards, and further drive the moving sheet to move upwards, the moving sheet moving upwards pushes the scraping piece to move upwards through the elastic piece, the lower end face of the scraping piece is tightly attached to the edge end face of the plum blossom probe and moves upwards along the edge end face under the action of the elastic force of the elastic piece, after the preset reciprocating times are finished, the friction scraping is finished, at the moment, the scraping piece is separated from the test probe through the pneumatic pressure control between the sealing sheet and the piston and the transmission rod and the moving sheet, and at the moment, the gas input or output to the gas inlet pipe is stopped;
step e, viscidity adsorption, starting a transmission motor arranged on the side wall of the sleeve to rotate clockwise, enabling the transmission motor to drive a driving trapezoidal gear to rotate clockwise through an output long shaft, enabling the driving trapezoidal gear to drive a threaded sleeve to rotate anticlockwise through a driven trapezoidal gear, enabling the internal thread of the threaded sleeve to rotate anticlockwise and the external thread of a transmission shaft to act on the external thread of the transmission shaft, driving the transmission shaft to move downwards, enabling the transmission shaft moving downwards to drive a cleaning soft rubber to move downwards to abut against the upper end face of the test probe through a fixing piece, enabling the cleaning soft rubber to contact with and abut against and roll the plum blossom probe part of the test probe to deform, enabling the deformed cleaning soft rubber to fully adapt to the complex edge angle end face of the upper end face of the plum blossom probe of the test probe, completely adhering impurities and dust on the upper end face of the plum blossom probe to the surface of the cleaning soft rubber, adjusting the sleeve transmission motor to rotate anticlockwise, enabling the transmission motor to drive the driving trapezoidal gear to rotate anticlockwise through the output long shaft, enabling the driving trapezoidal gear to drive the threaded sleeve to rotate clockwise through the driven trapezoidal gear to drive the external thread of the flexible sleeve to rotate clockwise, and completing the separation of the adhesion of the cleaning soft rubber from the upper end face of the adhesive.
Preferably, the method is implemented on a test probe cleaning device.
A friction scraping method for testing probe cleaning includes inputting gas to air inlet on side wall of upper end of sleeve through air inlet pipe to increase air pressure of sealed space between sealing plate and piston, pushing piston to move downwards under action of pressure, pushing drive rod to overcome elastic force of reset spring by piston moving downwards to drive moving plate to move downwards, pushing scraping piece to move downwards through elastic piece, sucking air to air inlet on side wall of upper end of sleeve through air inlet pipe to reduce air pressure of sealed space between sealing plate and piston, pushing piston to move upwards under action of pressure, driving drive rod to move upwards by elastic force of piston and reset spring to drive moving piece to move upwards, pushing moving piece to move upwards through elastic piece to push it to move upwards, stopping scraping off gas through elastic piece, and stopping scraping.
Preferably, the test probe cleaning device is implemented on a test probe cleaning device.
The utility model provides a viscidity adsorption method of test probe cleaning method, the drive motor that sets up on the start sleeve lateral wall rotates clockwise, drive motor leads to the output major axis and drives initiative trapezoidal gear clockwise rotation, clockwise pivoted initiative trapezoidal gear drives the screw sleeve anticlockwise rotation through driven trapezoidal gear, the effect of the internal thread of anticlockwise pivoted screw sleeve and the external screw thread of transmission shaft, drive transmission shaft downstream, the transmission shaft of downstream drives clean flexible glue downstream through the stationary blade to lean on with the up end of test probe counterbalance, clean flexible glue is by the contact with the plum blossom probe part of test probe, the support, roll and take place deformation, the clean flexible glue that takes place deformation, can fully adapt to the complicated edges and corners terminal surface of plum blossom probe up end of test probe, completely glue the impurity and the dust of plum blossom probe up end on the surface of clean flexible glue, adjust sleeve transmission motor anticlockwise rotation, drive motor leads to the output major axis and drives initiative trapezoidal gear anticlockwise rotation, anticlockwise pivoted initiative trapezoidal gear drives screw sleeve through driven trapezoidal gear and rotates clockwise rotation, the internal thread of clockwise pivoted screw sleeve and the effect of transmission shaft drive the transmission shaft upward movement, the external screw sleeve drives the cleaning work phase separation on the test probe through driven by the stationary blade.
Preferably, the test probe cleaning device is implemented on a test probe cleaning device.
A first adjusting bolt and a second adjusting bolt which are symmetrically arranged on a base body corresponding to a test probe to be cleaned are adjusted, the first adjusting bolt is rotated clockwise and the second adjusting bolt is rotated anticlockwise at the same time, and the first adjusting bolt and the first lead screw nut rotate for the same number of turns, so that the first lead screw nut pulls a first limiting clamping piece to move outwards for a certain distance along the axial direction of the first adjusting bolt, meanwhile, the second adjusting bolt and the second lead screw nut are in threaded action, so that the second lead screw nut pulls a second limiting clamping piece to move outwards along the axial direction of the second adjusting bolt for a distance which is equal to that of the first limiting clamping piece, the side walls of the corresponding circular through holes on the first limiting clamping piece and the second limiting clamping piece are displaced relatively, the side walls of the circular through holes which are displaced relatively are dislocated and abut against the outer wall of the test probe arranged in the corresponding circular through holes, and the test probe is fixed.
Preferably, the test probe cleaning device is implemented on a test probe cleaning device.
The invention has the beneficial effects that:
first, the centre gripping component can be through the clean component of transmission arm mobility control test socket top, can make clean component remove to in the test socket, and support and lean on with the probe laminating of the test probe in the test socket, with the completion striking off earlier the accumulation impurity to the test probe, adsorb the work of cleaing away from the test socket internal with the impurity dust again, can effectively thoroughly strike off sedimentary impurity, can thoroughly effectively clear away from the test probe surface with the impurity dust of cleaing away again simultaneously, need not to dismantle the installation test probe from the test socket in simultaneously, can effectively clear away, and the work efficiency is greatly improved.
Secondly, gas is input or output through an air inlet pipe to an air inlet hole formed in the side wall of the upper end of the sleeve, so that the air pressure of a closed space between the sealing sheet and the piston is increased or reduced, the piston is pushed to move downwards or upwards, then under the action of elastic force of the elastic piece, the lower end face of the scraping piece is tightly attached to the edge end face of the plum blossom-shaped probe and moves downwards or upwards along the plum blossom-shaped probe, after preset reciprocating times are completed, friction scraping is completed, reciprocating motion is realized to repeatedly contact a probe tip with an object to be tested such as a solder ball to be tested, impurities formed at the probe tip are effectively scraped, impurities deposited on the plum blossom-shaped probe of the test probe can be effectively removed in the repeated scraping process, the problems that cleaning is needed after manual disassembly and separation are solved, the characteristic of the probe of the test probe is guaranteed, the measurement result is more accurate, and the accuracy and the test yield are guaranteed.
Third, the drive motor who sets up on the starting sleeve lateral wall rotates clockwise, drive motor leads to the output major axis and drives initiative trapezoidal gear clockwise, it rotates to drive the threaded sleeve through driven trapezoidal gear, and then drive the transmission shaft downstream, the transmission shaft of downstream passes through the stationary blade and drives clean flexible glue downstream to the up end with and offset and lean on, clean flexible glue is by the contact action with the plum blossom probe part, support and lean on, it takes place deformation to roll, take place the clean flexible glue of deformation, can fully adapt to the complicated edges and corners terminal surface of plum blossom probe up end of test probe, glue the impurity and the dust of plum blossom probe up end on the surface of clean flexible glue completely, can effectually will persist the bottom at the plum blossom probe, impurity and the dust after striking off the component clearance adsorb completely, make the cleaning work clean more clean thoroughly, further guaranteed the characteristic of test probe, make the measuring result more accurate effective.
Fourthly, gas is input into an air inlet hole formed in the side wall of the upper end of the sleeve through an air inlet pipe, when the piston is pushed to drive the movable piece to move downwards, the transmission motor is not started to rotate at the moment, the cleaning soft rubber is positioned right above the test probe and is not in contact with the test probe, the situation that deposited impurities on the plum blossom-shaped probe of the test probe are effectively removed by the scraping piece is fully guaranteed at the moment, after the scraping is finished, the air pressure of a sealed cavity between the cleaning soft rubber and the scraping piece is controlled to be reduced, the upward moving piston drives the scraping piece to move upwards to be completely separated from the plum blossom-shaped probe, the downward moving of the cleaning soft rubber is controlled to be abutted against the plum blossom-shaped end face of the test probe through the transmission motor, necessary conditions are provided for achieving the viscous adsorption, the purpose that the deposited impurities of the probe are firstly scraped and then adsorbed through the viscous adsorption, the two are not interfered with each other, the working efficiency is greatly improved, the deposited impurities are thoroughly removed, the problem that the measurement result is not thorough due to the fact that the cleaning action of the deposited impurities are carried out by the traditional manual work through a brush, namely the replacement of the manual cleaning action, and the test efficiency and the output are guaranteed.
Fifthly, relative displacement takes place through the lateral wall of the corresponding circular through-hole of first spacing clamping piece and the spacing clamping piece of second, the dislocation takes place for the lateral wall of the circular through-hole that takes place relative displacement, and lean on with the outer wall counterbalance of the test probe that sets up in the circular through-hole that corresponds, in order to fix the test probe, guaranteed the clean in-process of plum blossom probe to the test probe, the test probe is under the effect of pressure, avoid taking place decurrent displacement, keep abundant stability, strike off the effect that frictional resistance strikes off and viscidity is absorbent in order to guarantee.
Drawings
FIG. 1 is a schematic view of the overall installation of a test probe cleaning apparatus;
FIG. 2 is a schematic diagram of the operation of a test probe cleaning apparatus;
FIG. 3 is a front view of the cleaning member;
FIG. 4 is a front view of the internal structure of the sleeve;
FIG. 5 is a side view of the internal structure of the sleeve;
FIG. 6 is a schematic view of the butt joint, scraping and adsorption;
FIG. 7 is a front view of the test base when not secured;
FIG. 8 is a front view of the test base as it is being secured;
fig. 9 is an overall schematic view of the holding member.
In the figure: 1-cleaning component, 1-1-sleeve, 1-2-sealing sheet, 1-3-mounting plate, 1-4-limiting sheet, 1-5-piston, 1-6-driving trapezoidal gear, 1-7-driven trapezoidal gear, 1-8-transmission rod, 1-9-moving sheet, 1-10-elastic piece, 1-11-scraping piece, 1-12-threaded sleeve, 1-13-transmission shaft, 1-14-fixing piece, 1-15-cleaning soft rubber, 1-16-reset spring, 1-17-output long shaft, 2-clamping component, 2-1-clamping body, 2-2-adsorption port, 2-3-air pipeline, 2-4-sealing plate, 2-5-positioning hole, 3-test socket, 4-test base, 4-1-base body, 4-3-first limiting clamping sheet, 4-4-second limiting clamping sheet, 4-5-first lead screw nut, 4-6-second lead screw nut, 4-7-first adjusting bolt, 4-8-adjusting bolt, 4-5-second adjusting probe and 4-5-adjusting probe.
Detailed Description
The following detailed description of embodiments of the invention is provided in connection with the accompanying drawings.
Detailed description of the invention
The following is a specific embodiment of a test probe cleaning apparatus of the present invention.
The test probe cleaning apparatus in this embodiment, as shown in fig. 1 to 9, includes a cleaning member 1, a holding member 2, a test socket 3, a test base 4, and a test probe 5; a clamping component 2 is arranged above the cleaning component 1, a test socket 3 is arranged below the cleaning component 1, the test socket 3 is installed on a test base 4, the clamping component 2 can control the cleaning component 1 above the test socket 3 in a moving mode through a transmission mechanical arm, the cleaning component 1 can be moved into the test socket 3 and abutted against a probe of a test probe 5 in the test socket 3, accumulated impurities are firstly scraped off from the test probe 5, and then impurity dust is adsorbed and removed from the test socket 3, so that deposited impurities can be effectively and thoroughly scraped off, and meanwhile, the removed impurity dust can be effectively and thoroughly removed from the surface of the test probe;
the cleaning component 1 comprises a sleeve 1-1, a sealing sheet 1-2, a mounting plate 1-3, a limiting sheet 1-4, a piston 1-5, a driving trapezoidal gear 1-6, a driven trapezoidal gear 1-7, a transmission rod 1-8, a moving sheet 1-9, an elastic piece 1-10, a scraping piece 1-11, a threaded sleeve 1-12, a transmission shaft 1-13, a fixing piece 1-14, a cleaning soft rubber 1-15, a return spring 1-16 and an output long shaft 1-17; the sleeve 1-1 is arranged on the lower end face of the mounting plate 1-3 through a sealing sheet 1-2 array, a piston 1-5 is movably arranged between an upper limiting sheet 1-4 and the sealing sheet 1-2, a driving trapezoidal gear 1-6 at the lower end of the piston 1-5 is meshed with a driven trapezoidal gear 1-7, transmission rods 1-8 are symmetrically arranged at two ends of the driven trapezoidal gear 1-7, one end of each transmission rod 1-8 is connected with one end of the piston 1-5, the other end of each transmission rod 1-8 penetrates through the two limiting sheets 1-4 to be connected with the upper end face of a movable sheet 1-9, a plurality of scraping pieces 1-11 are arranged on the lower end face of the movable sheet 1-9 through elastic pieces 1-10 in an array manner, the driven trapezoidal gear 1-7 is rotatably arranged on the lower limiting sheet 1-4 through a threaded sleeve 1-12, the upper end of the transmission shaft 1-13 penetrates through the threaded sleeve 1-12 and is matched with the threaded sleeve 1-12, the other end of the transmission shaft 1-13 is connected with a fixed piece 1-14, the lower end of the fixed piece 1-14 is provided with cleaning soft glue 1-15, a reset spring 1-16 is arranged on the transmission shaft 1-13 between two limiting pieces 1-4, the transmission motor is arranged on the side wall of the sleeve 1-1 on one side, the output end of the transmission motor is connected with an output long shaft 1-17, the output long shaft 1-17 penetrates through the sleeve 1-1 arranged in an array, a driven trapezoidal gear 1-7 in the sleeve 1-1 is arranged on the output long shaft 1-17, and the scraping piece 1-11 can do up-and-down reciprocating motion through a piston 1-5, and the lower end face of the scraping piece 1-11 is abutted against the quincuncial tip of the probe of the test probe 5 through the elastic piece 1-10 so as to scrape the impurities accumulated on the quincuncial tip, and the cleaning soft rubber 1-15 can stick and absorb the clean impurities and dust on the surface of the cleaning soft rubber 1-15, so that the impurities and dust are removed from the test socket 3.
The probe of the test probe 5 in the embodiment is a quincuncial probe, and the embodiment mainly aims at a four-claw quincuncial probe with a large application amount, and can correspondingly produce corresponding claw numbers aiming at the quincuncial claw numbers of the probe of the test probe 5;
a sealing sheet 1-2 arranged at the upper end of the sleeve 1-1 and a movable piston 1-5 arranged in the sleeve form a sealed chamber, and gas is input or output to an air inlet hole formed in the side wall of the sleeve 1-1 through an air inlet pipe so as to control the air pressure change in the sealed chamber and push the piston to move downwards or upwards;
the air pressure of a closed space between the sealing sheet 1-1 and the piston 1-5 is increased by inputting air to an air inlet hole formed in the side wall of the upper end of the sleeve 1-1 through an air inlet pipe, the piston 1-5 is pushed to move downwards under the action of the pressure, the piston 1-5 which moves downwards pushes the transmission rod 1-8 to overcome the elastic force of the return spring 1-16, so as to drive the moving sheet 1-9 to move downwards, the moving sheet 1-9 which moves downwards pushes the scraping member 1-11 to move downwards through the elastic member 1-10, the scraping member 1-11 which moves downwards corresponds to the corner of the upper end face of the plum blossom probe, the lower end face of the scraping member 1-11 is tightly attached to the corner of the plum blossom probe and moves downwards along the corner under the action of the elastic member 1-10, when the scraping member moves to the bottom of the plum blossom probe, the air inlet hole formed in the side wall of the upper end of the sleeve 1-1 is sucked through the air inlet pipe when the piston moves to the bottom of the plum blossom probe, so as to reduce the air pressure of the closed space between the sealing sheet 1-2 and the piston 1-5, the piston 1-5 pulls the piston 1 to move upwards, the elastic member 1-5 to drive the elastic member to move upwards through the elastic member 1-10, the elastic member to move upwards and the elastic member 1-10, the elastic member to move upwards to drive the elastic member 1-10 to move upwards, friction scraping is completed, at the moment, the scraping piece 1-11 is separated from the test probe 5 through air pressure control between the sealing piece 1-2 and the piston 1-5 through the transmission rod 1-8 and the moving piece 1-9, at the moment, gas input or output to the air inlet pipe is stopped, reciprocating motion is realized, so that a probe tip is repeatedly contacted with an object to be tested such as a tin ball to be tested, impurities formed at the probe tip are effectively scraped, in the repeated scraping process, impurities deposited on a plum blossom probe of the test probe 5 can be effectively removed, namely, the problem that cleaning is carried out after manual disassembly and separation is needed is solved, the characteristics of the probe of the test probe 5 are ensured, the working efficiency is improved, the operation is carried out at any time, the cleaning is carried out at any time, the measurement result is more accurate, and the test accuracy and the test yield are ensured;
the lower end face of the scraping piece 1-11, which is abutted against the test probe 5, is provided with a cleaning sheet, and the cleaning sheet can be purchased from the market, such as a precision cleaning sheet manufactured in Japan and America;
the method comprises the steps that a transmission motor arranged on the side wall of a starting sleeve 1-1 rotates clockwise, the transmission motor drives a driving trapezoidal gear 1-6 to rotate clockwise through an output long shaft 1-17, the driving trapezoidal gear 1-6 rotating clockwise drives a threaded sleeve 1-12 to rotate anticlockwise through a driven trapezoidal gear 1-7, the internal thread of the threaded sleeve 1-12 rotating anticlockwise and the external thread of a transmission shaft 1-13 drive the transmission shaft 1-13 to move downwards, the transmission shaft 1-13 moving downwards drives a cleaning soft rubber 1-15 to move downwards to abut against the upper end face of a test probe 5 through a fixing piece 1-14, the cleaning soft rubber 1-15 contacts, abuts and rolls and deforms with a quincuncial probe part of the test probe 5 to form a cleaning soft rubber 1-15 deformed through a fixing piece 1-14, the impurities and dust on the upper end face of the quincuncial probe of the test probe 5 can be fully adhered to the surface of the cleaning soft rubber 1-15, the impurities and the dust on the upper end face of the quincuncial probe can be effectively accumulated at the bottom of the test probe, the bottom of the test probe can be fully scraped off, the impurities and dust, the top face of the quincuncial probe can be fully adhered to the surface of the top face of the clean soft rubber 1-15, the transmission sleeve 1-6, the transmission sleeve, the transmission motor can be more effectively enabled to rotate clockwise through the transmission motor to drive the transmission motor to rotate clockwise through the transmission motor to rotate the transmission motor to drive the transmission sleeve 1-6, the transmission sleeve 1-13, the transmission sleeve 1-6, the external thread of the transmission sleeve 1-13, the transmission shaft 1-13 is driven to move upwards, and the transmission shaft 1-13 which moves upwards drives the cleaning soft glue 1-15 to move upwards through the fixing piece 1-14 to be separated from the upper end face of the test probe 5;
the method comprises the steps that gas is input into an air inlet hole formed in the side wall of the upper end of a sleeve 1-1 through an air inlet pipe, when a piston is pushed to drive a moving piece 1-9 to move downwards, a transmission motor is not started to rotate at the moment, cleaning soft rubber 1-15 is positioned right above a test probe 5, and the test probe 5 is not contacted with the cleaning soft rubber, so that deposited impurities on a plum blossom probe of the test probe 5 are fully removed by a scraping piece 1-11, after scraping is finished, the pressure of a sealed cavity between the cleaning soft rubber 1-2 and the cleaning soft rubber 1-5 is controlled to be reduced, the scraping piece 1-11 is driven by the piston 1-5 moving upwards to be completely separated from the plum blossom probe, the cleaning soft rubber 1-15 is controlled to move downwards to be abutted against the plum blossom end face of the test probe 5 through the transmission motor, necessary conditions are provided for completing viscous adsorption, so that the impurities deposited on the probe are firstly scraped, then the viscous adsorption is realized, and the two are not interfered with each other, the working efficiency is greatly improved, the deposited dust impurities are thoroughly removed, and the problems that the traditional dust impurities are thoroughly removed because the cleaning action is performed manually and the result of micro friction of instruments are not accurate measurement result are solved;
meanwhile, the probes of the plurality of test probes 5 are cleaned, one test probe of one test probe 5 corresponds to one sleeve 1-1, and the cleaning work is ensured to be independently carried out without mutual influence.
An air inlet is formed in the side wall of the sleeve 1-1 and located between the piston 1-5 and the upper limiting piece 1-4, and the air inlet is connected with an air inlet pipe.
A through hole is arranged in the center of the movable plate 1-9, and the transmission shaft 1-13 penetrates through the through hole in the center of the movable plate 1-9 to be connected with the upper end surface of the fixed plate 1-14.
The inner diameter of the sleeve 1-1 matches the outer diameter of the test probe 5.
The size of the scraping pieces 1-11 can be produced according to the size and the acting position of a tin ball abutting against the probe of the test probe 5 and the size of the plum blossom probe, when the plum blossom probe is removed, the corresponding probe determines the shape of the corresponding scraping pieces 1-11, the four-claw plum blossom probe which is widely applied is adopted in the embodiment, and the corresponding scraping pieces 1-11 are inverted V-shaped so as to fully match the edge end faces of the plum blossom probe.
Detailed description of the invention
The following is a detailed embodiment of a test base of a test probe cleaning apparatus of the present invention.
It should be noted that the test base of the test probe cleaning apparatus according to the present embodiment may be implemented independently, that is, may exist independently as a component of the test probe cleaning apparatus, and the test probe cleaning apparatus according to the first embodiment may be further limited.
As shown in fig. 1, 2, 7 and 8, the test base of the test probe cleaning device in the embodiment comprises a base body 4-1, a first limiting clamping piece 4-3, a second limiting clamping piece 4-4, a first lead screw nut 4-5, a second lead screw nut 4-6, a first adjusting bolt 4-7 and a second adjusting bolt 4-8; the side wall of the base body 4-1 is symmetrically provided with two groups of strip-shaped through holes, a first limiting clamping piece 4-3 and a second limiting clamping piece 4-4 are movably arranged in the two groups of strip-shaped through holes, the left end of the first limiting clamping piece 4-3 is connected with a first lead screw nut 4-5, the second limiting clamping piece 4-4 is connected with a second lead screw nut 4-6, a first adjusting bolt 4-7 penetrates through the first lead screw nut 4-5 to be rotatably arranged on the side wall of the left end of the base body 4-1, a second adjusting bolt 4-8 penetrates through the second lead screw nut 4-6 to be rotatably arranged on the side wall of the right end of the base body 4-1, positioning pins 4-9 are symmetrically arranged at the upper end of the base body 4-1 and matched with the positioning holes 2-5, circular through holes are formed in the first limiting clamping piece 4-3 and the second limiting clamping piece 4-4 in an array mode, probes of the test probes 5 can penetrate through the circular through holes and are arranged in the test base body 4-1, and the test socket 3 is installed on the base body 4-1.
The first limiting clamping piece 4-3 and the second limiting clamping piece 4-4 are both provided with circular through holes in array, and the inner diameters of the circular through holes are matched with the outer diameter of the test probe 5.
Adjusting a first adjusting bolt 4-7 and a second adjusting bolt 4-8 which are symmetrically arranged on a base body 4-1 corresponding to a test probe 5 to be cleaned, simultaneously rotating the first adjusting bolt 4-7 clockwise and the second adjusting bolt 4-8 anticlockwise, and rotating the same number of turns, wherein the first adjusting bolt 4-7 and the first lead screw nut 4-5 are in threaded action, so that the first lead screw nut 4-5 pulls a first limit clamping piece 4-3 to move outwards for a certain distance along the axial direction of the first adjusting bolt 4-7, and simultaneously the second adjusting bolt 4-8 and a second lead screw nut 4-6 are in threaded action, so that the second limit clamping piece 4-4 is pulled outwards from the base body 4-1 by the second lead screw nut 4-6 along the axial direction of the second adjusting bolt 4-8, so that the distance between the first limit clamping piece 4-3 and the first limit clamping piece 4-1 is moved outwards from the base body, the first limit clamping piece 4-3 and the second limit clamping piece 4-4 are in threaded action, so that the side walls of the corresponding circular through holes on the first limit clamping piece 4-4 and the second limit clamping piece 4-4 move towards the outer wall of the base body, thereby ensuring that the probe 5 is in a stable and the test probe 5 is scraped, and the side wall is in a staggered way, thereby ensuring that the probe is in a test probe is in a stable and a test probe.
The cleaning component 1 which is adsorbed and installed is arranged right above the test socket 3 by the control transmission mechanical arm, the positioning pins 4-9 on the test base 4 correspond to the positioning holes 2-5 formed in the clamping body 2-1, and the clamping component 2 is pushed by the control transmission mechanical arm to drive the cleaning component 1 to move downwards, so that the positioning pins 4-9 are inserted into the positioning holes 2-5, and accurate butt joint is achieved.
Detailed description of the invention
The following is a specific embodiment of a clamping member of a test probe cleaning apparatus of the present invention.
It should be noted that the holding member of the test probe cleaning apparatus according to the present embodiment may be implemented separately, that is, may exist separately as a component of the test probe cleaning apparatus, or may be further limited to the test probe cleaning apparatus according to the first embodiment.
As shown in fig. 1, 2 and 9, the clamping member of the test probe cleaning device in the embodiment comprises a clamping body 2-1, an air pipeline 2-3 and a sealing plate 2-4; an adsorption port 2-2 is arranged at the lower part of an inner cavity of the clamping body 2-1, an air pipeline 2-3 is arranged in the clamping body 2-1, a suction end of the air pipeline 2-3 is connected to the adsorption port 2-2, the clamping body 2-1 can provide suction through the adsorption port 2-2 at the lower end of the air pipeline 2-3 to suck the cleaning component 1, the cleaning component 1 is adsorbed on a sealing plate 2-4 at the lower end of the clamping body 2-1, and a plurality of positioning holes 2-5 are symmetrically formed in two ends of the clamping body 2-1.
Through holding and fixing, the original driving device in the detection process can be fully utilized, more driving components are not needed, the cleaning cost is greatly saved, and meanwhile, the resources are utilized to the maximum extent.
Detailed description of the invention
The following is a specific embodiment of a test probe cleaning method of the present invention.
The method for cleaning a test probe in this embodiment includes the following steps:
a, fixing and adjusting a probe, namely, a first adjusting bolt 4-7 and a second adjusting bolt 4-8 which are symmetrically arranged on a base body 4-1 corresponding to a test probe 5 to be cleaned are fixed and adjusted, the first adjusting bolt 4-7 is simultaneously rotated clockwise, the second adjusting bolt 4-8 is rotated anticlockwise and rotates for the same number of turns, and the first adjusting bolt 4-7 and the first lead screw nut 4-5 have screw thread action, so that the first lead screw nut 4-5 pulls a first limiting clamping piece 4-3 to move outwards for a certain distance towards the base body 4-1 along the axial direction of the first adjusting bolt 4-7, and simultaneously, the second adjusting bolt 4-8 and a second lead screw nut 4-6 have screw thread action, so that the second lead screw nut 4-6 pulls a second limiting clamping piece 4-4 to move outwards from the base body 4-1 for a distance equal amount with the first limiting clamping piece 4-3 along the axial direction of the second adjusting bolt 4-8, the first limiting clamping piece 4-3 and the corresponding side wall of the circular through hole are relatively displaced, and the circular through hole is correspondingly fixed and offset against the through hole 5 for testing;
b, performing adsorption installation, namely sucking air through an air pipeline 2-3 arranged inside the clamping body 2-1, and forming a suction effect on the cleaning member 1 through an adsorption port 2-2 so as to adsorb the cleaning member 1 on the bottom surface of the sealing plate 2-4;
c, aligning and adjusting, namely placing the cleaning component 1 which is subjected to adsorption installation right above the test socket 3 by controlling the transmission mechanical arm, corresponding a positioning pin 4-9 on the test base 4 to a positioning hole 2-5 formed in the clamping body 2-1, pushing the clamping component 2 to drive the cleaning component 1 to move downwards by controlling the transmission mechanical arm, inserting the positioning pin 4-9 into the positioning hole 2-5, simultaneously inserting the test probe 5 into the corresponding sleeve 1-1, and enabling the lowest end of the sleeve 1-1 and the lower end face of the quincuncial probe of the test probe 5 to be on the same horizontal plane so as to finish aligning and adjusting work;
d, scraping by friction resistance, inputting gas into an air inlet hole formed in the side wall of the upper end of the sleeve 1-1 through an air inlet pipe to increase the air pressure of a closed space between the sealing sheet 1-2 and the piston 1-5, pushing the piston 1-5 to move downwards under the action of the pressure, pushing the transmission rod 1-8 by the piston 1-5 moving downwards to overcome the elastic force of the return spring 1-16 so as to drive the moving sheet 1-9 to move downwards, pushing the scraping member 1-11 to move downwards through the elastic member 1-10 by the moving sheet 1-9 moving downwards, corresponding the scraping member 1-11 moving downwards to the edge of the upper end face of the plum blossom probe, enabling the lower end face of the scraping member 1-11 to be tightly attached to the edge end face of the plum blossom probe under the action of the elastic member 1-10, enabling the scraping member 1-11 to move downwards along the edge of the plum blossom probe when moving to the bottom of the plum blossom probe, sucking the air into the air inlet hole formed in the side wall of the upper end of the sleeve 1-1 through the air inlet pipe so as to reduce the air pressure between the piston 1-5 and the air pressure between the sealing sheet 1-5, pulling the piston 1-5 to move upwards and drive the elastic member 1-10 to move upwards along the elastic member 1-10 moving spring 1-1 moving part to move upwards, after the preset reciprocating times are finished, friction scraping is finished, at the moment, the scraping piece 1-11 is separated from the test probe 5 through air pressure control between the sealing piece 1-2 and the piston 1-5 and the transmission rod 1-8 and the moving piece 1-9, and at the moment, gas input or gas output to the gas inlet pipe is stopped;
e, the viscous adsorption and starting of the transmission motor arranged on the side wall of the sleeve 1-1 rotates clockwise, the transmission motor drives the driving trapezoidal gear 1-6 to rotate clockwise through the output long shaft 1-17, the driving trapezoidal gear 1-6 rotating clockwise drives the threaded sleeve 1-12 to rotate anticlockwise through the driven trapezoidal gear 1-7, the internal thread of the threaded sleeve 1-12 rotating anticlockwise and the external thread of the transmission shaft 1-13 drive the transmission shaft 1-13 to move downwards, the transmission shaft 1-13 moving downwards drives the cleaning soft rubber 1-15 to move downwards to abut against the upper end face of the test probe 5 through the fixing piece 1-14, the cleaning soft rubber 1-15 deforming through contact, abutting and rolling under the contact action of the quincuncial probe part of the test probe 5, the deformed cleaning soft rubber 1-15 can fully adapt to the complex quincuncial end face of the upper end face of the quincuncial probe of the test probe 5, impurities and dust on the surface of the cleaning soft rubber 1-15 are completely adhered to the surface of the cleaning soft rubber 1-15, the transmission motor is adjusted to rotate anticlockwise, the transmission motor outputs the transmission shaft, the transmission motor, the transmission shaft 1-17 drives the external thread of the trapezoidal gear 1-6 to rotate anticlockwise through the external thread of the transmission shaft 1-13, the helical gear 1-13, the external thread of the trapezoidal gear 1-13, the helical gear 1-13 drives the cleaning soft rubber 1 to rotate clockwise, so as to finish the viscous adsorption cleaning work and ensure that the cleaning is cleaner and more thorough.
Detailed description of the invention
The following is a specific embodiment of a friction scraping method of a test probe cleaning method according to the present invention.
It should be noted that the friction scraping method of the test probe cleaning method according to the present embodiment may be implemented separately, that is, exists separately as a key step of the test probe cleaning method.
In the friction scraping method for the test probe cleaning method under the embodiment, gas is input to the air inlet hole formed in the side wall of the upper end of the sleeve 1-1 through the air inlet pipe to increase the air pressure of the closed space between the sealing sheet 1-2 and the piston 1-5, the piston 1-5 is pushed to move downwards under the action of the pressure, the piston 1-5 which moves downwards pushes the transmission rod 1-8 to overcome the elastic force of the return spring 1-16 so as to drive the moving sheet 1-9 to move downwards, the moving sheet 1-9 which moves downwards pushes the scraping member 1-11 to move downwards through the elastic member 1-10, the scraping member 1-11 which moves downwards corresponds to the edge of the upper end face of the plum blossom probe, the lower end face of the scraping member 1-11 is tightly attached to the edge of the plum blossom probe under the action of the elastic member 1-10, the lower end face of the scraping member 1-11 is tightly attached to the edge of the plum blossom probe and moves downwards along the plum blossom probe, when the scraping member moves to the bottom of the probe, the air inlet pipe sucks air in the air inlet hole formed in the upper end wall of the sleeve 1-1, the sealing sheet 1, the elastic member 1-5 and the piston 1-5, the piston 1-5 moves upwards under the action of the elastic member 1-10, the elastic force, the elastic member 1-10, the elastic member pushes the elastic member 1-10, the elastic member to move upwards, and drives the elastic member to move upwards, and move upwards along the scraper, after finishing the preset reciprocating times, finishing friction scraping, controlling the air pressure between the sealing sheet 1-2 and the piston 1-5, separating the scraping piece 1-11 from the test probe 5 through the transmission rod 1-8 and the moving sheet 1-9, and stopping inputting or outputting air to the air inlet pipe.
Detailed description of the invention
The following is a specific embodiment of the viscous absorption method of a test probe cleaning method of the present invention.
It should be noted that the viscous adsorption method of the test probe cleaning method according to this embodiment may be implemented separately, that is, may exist separately as a key step of the test probe cleaning method.
In the method for cleaning the adhesive adsorption of the test probe in the embodiment, a transmission motor arranged on the side wall of a sleeve 1-1 is started to rotate clockwise, the transmission motor drives a driving trapezoidal gear 1-6 to rotate clockwise through an output long shaft 1-17, the driving trapezoidal gear 1-6 rotating clockwise drives a threaded sleeve 1-12 to rotate anticlockwise through a driven trapezoidal gear 1-7, the internal thread of the threaded sleeve 1-12 rotating anticlockwise and the external thread of a transmission shaft 1-13 drive the transmission shaft 1-13 to move downwards, the transmission shaft 1-13 moving downwards drives a cleaning soft rubber 1-15 to move downwards to abut against the upper end face of the test probe 5 through a fixing piece 1-14, the cleaning soft rubber 1-15 deforms by contact, abutting and rolling under the contact action of the cleaning soft rubber 1-15 and a quincuncial probe part of the test probe 5, the deformed clean soft rubber 1-15 can fully adapt to the complex edge end face of the upper end face of the plum blossom probe of the test probe 5, impurities and dust on the upper end face of the plum blossom probe are completely stuck on the surface of the clean soft rubber 1-15, the adjusting sleeve 1-1 is driven by a transmission motor to rotate anticlockwise, the transmission motor drives a driving trapezoidal gear 1-6 to rotate anticlockwise through an output long shaft 1-17, the driving trapezoidal gear 1-6 which rotates anticlockwise drives a threaded sleeve 1-12 to rotate clockwise through a driven trapezoidal gear 1-7, the internal threads of the threaded sleeve 1-12 which rotates clockwise and the external threads of the transmission shaft 1-13 drive the transmission shaft 1-13 to move upwards, and the transmission shaft 1-13 which moves upwards drives the clean soft rubber 1-15 to move upwards to be matched with the test probe 5 through a fixing sheet 1-14 The upper end surfaces of the two plates are separated to complete the viscous adsorption cleaning work.
Detailed description of the preferred embodiment
The following is a specific embodiment of a method for fixing a probe of a test probe cleaning apparatus according to the present invention.
It should be noted that the probe fixing method of the test probe cleaning method according to the present embodiment may be implemented separately, that is, may exist separately as a key step of the test probe cleaning method.
In the fixing method for cleaning the test probe in the embodiment, the first adjusting bolt 4-7 and the second adjusting bolt 4-8 which are symmetrically arranged on the base body 4-1 corresponding to the test probe 5 to be cleaned are adjusted, the first adjusting bolt 4-7 is rotated clockwise and the second adjusting bolt 4-8 is rotated counterclockwise at the same time, and the same number of turns are rotated, the first adjusting bolt 4-7 and the first lead screw nut 4-5 are in threaded action, so that the first lead screw nut 4-5 pulls the first limiting clamping piece 4-3 to move outwards from the base body 4-1 for a certain distance along the axial direction of the first adjusting bolt 4-7, and simultaneously, the second adjusting bolt 4-8 and the second lead screw nut 4-6 are in threaded action, so that the second lead screw nut 4-6 pulls the second limiting clamping piece 4-4 to move outwards from the base body 4-1 for a distance corresponding to the first limiting clamping piece 4-3 along the axial direction of the second adjusting bolt 4-8, the first limiting clamping piece 4-3 and the corresponding round through hole 4-4 on the second limiting clamping piece 4-4 are displaced relatively to the outer wall, and the through hole is fixed by the circular through hole, and the circular through hole 5 is displaced correspondingly, and the test probe, and the circular through hole is offset against the circular through hole, and the test probe 5.
The above embodiments are merely illustrative of the present patent and do not limit the scope of the patent, and those skilled in the art can make modifications to the parts thereof without departing from the spirit and scope of the patent.
Claims (1)
1. The viscous adsorption method of the test probe cleaning method is realized on a test probe cleaning device and is applied to the test probe cleaning method, and the test probe cleaning method comprises the following steps: step a, fixing a probe; b, adsorbing and mounting; step c, alignment adjustment; d, scraping friction resistance; step e, sticky adsorption; the method is characterized in that: the viscidity adsorption method of the test probe cleaning method comprises the steps that a transmission motor arranged on the side wall of a sleeve (1-1) is started to rotate clockwise, the transmission motor is connected with an output long shaft (1-17) to drive a driving trapezoidal gear (1-6) to rotate clockwise, the driving trapezoidal gear (1-6) rotating clockwise drives a threaded sleeve (1-12) to rotate anticlockwise through a driven trapezoidal gear (1-7), the internal thread of the threaded sleeve (1-12) rotating anticlockwise and the external thread of a transmission shaft (1-13) drive the transmission shaft (1-13) to move downwards, the transmission shaft (1-13) moving downwards drives a cleaning soft rubber (1-15) to move downwards to abut against the upper end face of a test probe (5) through a fixing sheet (1-14), the cleaning soft rubber (1-15) deforms through contact, abutting and rolling under the contact action of a plum blossom probe part of the test probe (5), the cleaning soft rubber (1-15) deforming is in anticlockwise contact with the plum blossom probe part of the plum blossom probe part, the cleaning soft rubber (1-15) is capable of fully adapting to the complex plum blossom probe upper end face of the test probe (5), impurities on the plum blossom probe upper end face are completely adjusted, the surface of the plum blossom probe (1-1) and the sleeve, the dust output motor is completely adhered to the transmission motor, the dust output long shaft (1-17), the driving trapezoidal gear (1-6) rotating anticlockwise drives the threaded sleeve (1-12) to rotate clockwise through the driven trapezoidal gear (1-7), the internal thread of the threaded sleeve (1-12) rotating clockwise and the external thread of the transmission shaft (1-13) drive the transmission shaft (1-13) to move upwards, and the transmission shaft (1-13) moving upwards drives the cleaning soft rubber (1-15) to move upwards through the fixing piece (1-14) to be separated from the upper end face of the test probe (5) so as to finish viscous adsorption cleaning work;
the test probe cleaning device comprises a cleaning component (1), a clamping component (2), a test socket (3), a test base (4) and a test probe (5); a clamping component (2) is arranged above the cleaning component (1), a test socket (3) is arranged below the cleaning component (1), the test socket (3) is installed on a test base (4), the clamping component (2) can control the cleaning component (1) above the test socket (3) through a transmission mechanical arm in a moving way, so that the cleaning component (1) can move into the test socket (3) and is abutted against a probe of a test probe (5) in the test socket (3) to scrape off and accumulate impurities in the test probe (5) first, and then the impurity and dust are adsorbed and removed from the test socket (3);
the cleaning component comprises a sleeve (1-1), a sealing sheet (1-2), a mounting plate (1-3), a limiting sheet (1-4), a piston (1-5), a driving trapezoidal gear (1-6), a driven trapezoidal gear (1-7), a transmission rod (1-8), a moving sheet (1-9), an elastic part (1-10), a scraping part (1-11), a threaded sleeve (1-12), a transmission shaft (1-13), a fixing sheet (1-14), a cleaning soft rubber (1-15), a reset spring (1-16) and an output long shaft (1-17); the sleeve (1-1) is arranged on the lower end face of the mounting plate (1-3) through a sealing sheet (1-2) array, a driving trapezoidal gear (1-6) at the lower end of the piston (1-5) is meshed with a driven trapezoidal gear (1-7), two ends of the driven trapezoidal gear (1-7) are symmetrically provided with transmission rods (1-8), one end of each transmission rod (1-8) is connected with one end of the piston (1-5), the other end of each transmission rod (1-8) penetrates through two limiting sheets (1-4) to be connected with the upper end face of the movable sheet (1-9), the lower end face of the movable sheet (1-9) is provided with a plurality of scraping pieces (1-11) through elastic pieces (1-10), the driven trapezoidal gear (1-7) is rotatably arranged on the lower limiting sheet (1-4) through a threaded sleeve (1-12), the upper end of each transmission shaft (1-13) penetrates through the threaded sleeve (1-12) and is matched with the threaded sleeve (1-12), the other end of the transmission shaft (1-13) is connected with a fixing piece (1-14), two reset springs (1-14) are arranged between the fixing pieces (1-4), the transmission motor is arranged on the side wall of the sleeve (1-1) on one side, the output end of the transmission motor is connected with the output long shaft (1-17), the output long shaft (1-17) penetrates through the sleeve (1-1) arranged in an array, the driven trapezoidal gear (1-7) in the sleeve (1-1) is arranged on the output long shaft (1-17), the scraping piece (1-11) can do up-and-down reciprocating motion through the piston (1-5), the lower end face of the scraping piece (1-11) abuts against the plum blossom tip of the probe of the test probe (5) through the elastic piece (1-10), so that accumulated impurities on the plum blossom tip can be scraped, and the clean soft rubber (1-15) can stick and absorb the clean impurities and dust on the surface of the clean soft rubber (1-15), and further remove the impurities and dust from the test socket (3).
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000174079A (en) * | 1998-12-08 | 2000-06-23 | Micronics Japan Co Ltd | Method and apparatus for cleaning probe |
TW200302537A (en) * | 2002-01-18 | 2003-08-01 | Formfactor Inc | Apparatus and method for cleaning test probes |
CN1466182A (en) * | 2002-06-06 | 2004-01-07 | ���ǵ�����ʽ���� | Apparatus and method for cleaning probe card contacts |
KR20040004892A (en) * | 2002-07-06 | 2004-01-16 | 삼성전자주식회사 | Apparatus for cleaning test probe of probing system and method for cleaning thereof |
CN1535765A (en) * | 2003-04-08 | 2004-10-13 | ������������ʽ���� | Probe cleaning device |
JP2004317272A (en) * | 2003-04-16 | 2004-11-11 | Japan Electronic Materials Corp | Probe tip cleaning member, probe cleaning device, and probe tip cleaning method |
DE69837690D1 (en) * | 1997-07-24 | 2007-06-06 | Mitsubishi Electric Corp | Device for removing foreign matter adhering to a test tip end surface |
TW200841943A (en) * | 2007-04-25 | 2008-11-01 | Advanced Semiconductor Eng | Mechanism and method for automatic cleaning test interface of IC test socket |
WO2011013383A1 (en) * | 2009-07-31 | 2011-02-03 | Wit株式会社 | Cleaning pad for test probe and method of cleaning test probe |
JP2014032035A (en) * | 2012-08-01 | 2014-02-20 | Sheru Electronics Kk | Probe cleaning device and method of the same |
TW202039106A (en) * | 2019-04-24 | 2020-11-01 | 南韓商李諾工業股份有限公司 | Probe cleaner |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1187438A (en) * | 1997-09-03 | 1999-03-30 | Mitsubishi Electric Corp | Member and method for cleaning of probe tip, and test method for semiconductor wafer |
JP2001313317A (en) * | 2000-04-28 | 2001-11-09 | Ando Electric Co Ltd | Method and device for cleaning probe |
US6817052B2 (en) * | 2001-11-09 | 2004-11-16 | Formfactor, Inc. | Apparatuses and methods for cleaning test probes |
EP1460434A4 (en) * | 2001-12-25 | 2008-12-03 | Sumitomo Electric Industries | Contact probe |
JP5027468B2 (en) * | 2006-09-15 | 2012-09-19 | 日本ミクロコーティング株式会社 | Probe cleaning or probe processing sheet and probe processing method |
CN101249630B (en) * | 2008-03-25 | 2011-03-30 | 日月光半导体制造股份有限公司 | Automatically cleaning mechanism of test interface of integrated circuit test jack and cleaning method thereof |
CN202256598U (en) * | 2011-09-27 | 2012-05-30 | 致茂电子(苏州)有限公司 | Point measuring machine with probe cleaning function |
US9138121B2 (en) * | 2012-03-07 | 2015-09-22 | Byron Keith Baarsch | Scraper attachment for sponges |
JP2014181962A (en) * | 2013-03-18 | 2014-09-29 | Fujitsu Ltd | Cleaning mechanism and cleaning method of probe pin and electrode |
TWM461144U (en) * | 2013-03-29 | 2013-09-01 | Fittech Co Ltd | Probe cleaning device |
NL2011710C2 (en) * | 2013-10-31 | 2015-05-04 | F G J Lammertink Beheer B V | Device for cleaning a stylus of a measuring probe. |
CN103878150B (en) * | 2014-03-05 | 2016-02-24 | 上海华虹宏力半导体制造有限公司 | The clean method of probe and probe cleaning device |
CN204479617U (en) * | 2015-03-11 | 2015-07-15 | 法特迪精密科技(苏州)有限公司 | For the test Connection Block of chip scale of mass production test |
JP6556612B2 (en) * | 2015-12-04 | 2019-08-07 | ルネサスエレクトロニクス株式会社 | Manufacturing method of semiconductor device |
CN205263143U (en) * | 2015-12-29 | 2016-05-25 | 苏州韬盛电子科技有限公司 | A grip block for probe |
JP6874583B2 (en) * | 2017-08-02 | 2021-05-19 | 東京エレクトロン株式会社 | Probe device |
US10627426B2 (en) * | 2018-03-12 | 2020-04-21 | Aculon Inc. | Method and kit for cleaning and coating a tip of a test probe utilized in a test system for an integrated circuit package |
CN110389243B (en) * | 2018-04-18 | 2022-05-06 | 台湾中华精测科技股份有限公司 | Probe card device |
CN208758223U (en) * | 2018-07-05 | 2019-04-19 | 黄河科技学院 | Cleaning air bag for computer keyboard fine crack |
JP7129261B2 (en) * | 2018-07-27 | 2022-09-01 | キオクシア株式会社 | test equipment |
CN208568871U (en) * | 2018-08-10 | 2019-03-01 | 浙江金连接科技有限公司 | A kind of test probe phosphor bronze sleeve |
CN109985753A (en) * | 2019-02-21 | 2019-07-09 | 深圳市珍木舍家具有限公司 | The coating cloud of bathroom cabinet spray painting based on the comprehensive paint removal of temperature absorbs drenching installation |
CN210094480U (en) * | 2019-03-20 | 2020-02-21 | 江苏三麦食品机械有限公司 | Dough scraping mechanism of shortening machine |
CN210876421U (en) * | 2019-09-03 | 2020-06-30 | 丁娟 | LED chip photoelectric detection needle cleaning equipment |
CN110743875A (en) * | 2019-11-13 | 2020-02-04 | 宁波镇海合冰能源技术有限公司 | Inside cleaning equipment of natural gas line |
CN210879375U (en) * | 2019-11-15 | 2020-06-30 | 申雕数控仿真技术(青岛)有限公司 | False tooth carving clamp |
-
2020
- 2020-11-28 CN CN202210126254.2A patent/CN114472252B/en active Active
- 2020-11-28 CN CN202210126255.7A patent/CN114414862B/en active Active
- 2020-11-28 CN CN202011365614.1A patent/CN112462104B/en active Active
- 2020-11-28 CN CN202210126256.1A patent/CN114405887B/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69837690D1 (en) * | 1997-07-24 | 2007-06-06 | Mitsubishi Electric Corp | Device for removing foreign matter adhering to a test tip end surface |
JP2000174079A (en) * | 1998-12-08 | 2000-06-23 | Micronics Japan Co Ltd | Method and apparatus for cleaning probe |
TW200302537A (en) * | 2002-01-18 | 2003-08-01 | Formfactor Inc | Apparatus and method for cleaning test probes |
CN1466182A (en) * | 2002-06-06 | 2004-01-07 | ���ǵ�����ʽ���� | Apparatus and method for cleaning probe card contacts |
KR20040004892A (en) * | 2002-07-06 | 2004-01-16 | 삼성전자주식회사 | Apparatus for cleaning test probe of probing system and method for cleaning thereof |
CN1535765A (en) * | 2003-04-08 | 2004-10-13 | ������������ʽ���� | Probe cleaning device |
JP2004317272A (en) * | 2003-04-16 | 2004-11-11 | Japan Electronic Materials Corp | Probe tip cleaning member, probe cleaning device, and probe tip cleaning method |
TW200841943A (en) * | 2007-04-25 | 2008-11-01 | Advanced Semiconductor Eng | Mechanism and method for automatic cleaning test interface of IC test socket |
WO2011013383A1 (en) * | 2009-07-31 | 2011-02-03 | Wit株式会社 | Cleaning pad for test probe and method of cleaning test probe |
JP2014032035A (en) * | 2012-08-01 | 2014-02-20 | Sheru Electronics Kk | Probe cleaning device and method of the same |
TW202039106A (en) * | 2019-04-24 | 2020-11-01 | 南韓商李諾工業股份有限公司 | Probe cleaner |
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CN114405887A (en) | 2022-04-29 |
CN114414862A (en) | 2022-04-29 |
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CN114472252A (en) | 2022-05-13 |
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CN112462104A (en) | 2021-03-09 |
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