CN114352493B - Integrated gas distribution and ion collection assembly for radio frequency cathode - Google Patents
Integrated gas distribution and ion collection assembly for radio frequency cathode Download PDFInfo
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- CN114352493B CN114352493B CN202111487286.7A CN202111487286A CN114352493B CN 114352493 B CN114352493 B CN 114352493B CN 202111487286 A CN202111487286 A CN 202111487286A CN 114352493 B CN114352493 B CN 114352493B
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- radio frequency
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- discharge chamber
- gas
- gas distributor
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- 239000000919 ceramic Substances 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 230000005672 electromagnetic field Effects 0.000 abstract description 5
- 238000009434 installation Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 44
- 150000002500 ions Chemical class 0.000 description 42
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- Electron Sources, Ion Sources (AREA)
Abstract
The application relates to the technical field of aerospace propulsion, in particular to an integrated gas distribution and ion collection assembly for a radio frequency cathode, which comprises a gas circuit joint, insulating ceramics, a gas distributor and an ion collection electrode, wherein: the gas distributor is fixed at the ceramic rear cover of the discharge chamber through a fastening nut; one end of the gas distributor is welded and sealed with the insulating ceramic, and the other end of the gas distributor is integrally formed with the ion collecting electrode, so that the ion collecting electrode is fixed in the discharge chamber; the gas circuit joint is welded and sealed with the insulating ceramic. The application simplifies the structure, is convenient for installation and disassembly, realizes high-efficiency ionization, ensures enough ion collection area by arranging the large-area circular ion collection electrode in the discharge chamber, and simultaneously allows the radio frequency electromagnetic field to effectively enter the discharge chamber.
Description
Technical Field
The application relates to the technical field of aerospace propulsion, in particular to an integrated gas distribution and ion collection assembly for a radio frequency cathode.
Background
The radio frequency ion electric propulsion has the characteristics of electrodeless discharge, no need of additional magnetic field constraint, low electron temperature, low proportion of double charged ions, good uniformity of ion current density at the upstream of a grid electrode, easiness in realizing accurate control of beam current and the like, and is one of the most competitive electric propulsion types.
The radio frequency ion electric propulsion system needs a radio frequency cathode as a neutralizer, and the two functions are that firstly, initial electrons are provided for the starting discharge of the radio frequency thruster, and secondly, ion flow sprayed by the thruster is neutralized. If a hot filament is adopted as a neutralizer, the total flushing of the system is severely limited due to the short service life of the filament; the hollow cathode needs to be heated for a long time, and is difficult to obtain higher working medium utilization rate in the order of 100mA, and the hot cathode is easy to pollute and is not suitable for non-inert gases such as iodine working medium. Compared with the prior art, the radio frequency neutralizer has the advantages of simple structure, instant start, no pollution, long service life and the like, can share an excitation power supply with the radio frequency ion thruster, improves the system integration level, improves one order of magnitude relative to a hot cathode, and realizes optimal system performance. The existing radio frequency neutralizer generally adopts a design that an ion collecting electrode is separated from gas distribution, the structure is complex, the gas distribution adopts a straight-through type, and the utilization rate of working media is low.
Disclosure of Invention
The application mainly aims to provide an integrated gas distribution and ion collection assembly for a radio frequency cathode, which simplifies the structure of the radio frequency cathode and increases ionization efficiency and working medium utilization rate.
In order to achieve the above object, the present application provides an integrated gas distribution and ion collection assembly for a radio frequency cathode, comprising a gas path joint, an insulating ceramic, a gas distributor and an ion collection electrode, wherein: the gas distributor is fixed at the ceramic rear cover of the discharge chamber through a fastening nut; one end of the gas distributor is welded and sealed with the insulating ceramic, and the other end of the gas distributor is integrally formed with the ion collecting electrode, so that the ion collecting electrode is fixed in the discharge chamber; the gas circuit joint is welded and sealed with the insulating ceramic.
Further, the ion collecting electrode is disc-shaped, the inside of the ion collecting electrode is uniformly provided with an air inlet, and the included angle between the air inlet and the inner wall of the discharge chamber is 50-80 degrees.
Further, a lead-out hole is arranged at the front cover of the discharge chamber.
Further, the gas distributor is connected with a stabilized voltage power supply.
Further, a radio frequency coil is provided around the discharge chamber.
Further, the radio frequency coil is connected with a radio frequency power supply through a matching network.
Further, the materials of the gas distributor and the ion collecting electrode are conductive materials resistant to sputtering.
Further, the ceramic back cover also comprises an ignition electrode, wherein the ignition electrode is welded and sealed with the ceramic back cover and is connected with a high-voltage pulse power supply.
The integrated gas distribution and ion collection assembly for the radio frequency cathode has the following beneficial effects:
The application simplifies the structure by integrating the gas path insulation, the gas distributor and the ion collecting electrode into one component, is convenient for installation and disassembly, circumferentially and uniformly distributes the gas inlet holes which form a certain angle with the wall of the discharge chamber, ensures that the gas is smoothly sent into the radio-frequency skin-seeking layer, further realizes high-efficiency ionization, and the discharge chamber is internally provided with the large-area round ion collecting electrode, ensures enough ion collecting area and simultaneously allows the radio-frequency electromagnetic field to effectively enter the discharge chamber.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application, are incorporated in and constitute a part of this specification. The drawings and their description are illustrative of the application and are not to be construed as unduly limiting the application. In the drawings:
FIG. 1 is a schematic illustration of a gas distributor and ion collection electrode provided in accordance with an embodiment of the present application;
FIG. 2 is a schematic overall view of an integrated gas distribution and ion collection assembly for a radio frequency cathode according to an embodiment of the present application;
in the figure: the device comprises a 1-ceramic rear cover, a 2-air inlet, a 3-discharge chamber, a 4-radio frequency coil, a 5-lead-out hole, a 6-stabilized voltage power supply, a 7-matching network, an 8-radio frequency power supply, a 9-air path connector, 10-insulating ceramic, an 11-gas distributor, a 12-fastening nut, a 13-ion collecting electrode, a 14-ignition electrode and a 15-high-voltage pulse power supply.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
As shown in fig. 1-2, the present application provides an integrated gas distribution and ion collection assembly for a radio frequency cathode, comprising a gas path junction 9, an insulating ceramic 10, a gas distributor 11, and an ion collection electrode 13, wherein: the gas distributor 1l is fixed at the ceramic rear cover 1 of the discharge chamber 3 by a fastening nut 12; one end of the gas distributor l1 is welded and sealed with the insulating ceramic 10, and the other end is integrally formed with the ion collecting electrode 13, so that the ion collecting electrode 13 is fixed in the discharge chamber 3; the gas path joint 9 is welded and sealed with the insulating ceramic 10.
Specifically, the integrated gas distribution and ion collection assembly for the radio frequency cathode provided by the embodiment of the application integrates the gas distributor 11 and the ion collection electrode 13 together, and is integrally arranged at the ceramic rear cover 1 of the discharge chamber 3, so that the structure is simplified, the installation and the detachment are convenient, and the ionization efficiency and the working medium utilization rate are improved. The gas circuit joint 9 is mainly used for being connected with a gas supply unit, and gas supplied by the gas supply unit can enter the discharge chamber 3 to be ionized through the gas circuit joint 9, the insulating ceramic 10 and the gas distributor 11 in sequence.
Further, the ion collecting electrode 13 is disc-shaped, the inside of the ion collecting electrode is uniformly provided with an air inlet hole 2, and the included angle between the air inlet hole 2 and the inner wall of the discharge chamber 3 is 50-80 degrees. The ion collecting electrode 13 and the gas distributor 11 are integrated together in an integrated manner, the air inlet hole 2 is arranged in the ion collecting electrode 13, a certain angle is formed between the air inlet hole 2 and the inner wall of the discharge chamber 3, and the ion collecting electrode is mainly used for smoothly and uniformly conveying the gas in the gas distributor 11 into an ionization area close to the wall surface of the discharge chamber 3, and does not directly flow out along the axial direction or the radial direction of the discharge chamber 3, so that the working medium utilization rate is effectively improved.
Further, a lead-out hole 5 is provided at the front cover of the discharge chamber 3. After the gas in the discharge chamber 3 is ionized, the generated equivalent electrons are led out from the lead-out holes 5, so that the charge balance in the discharge chamber 3 is realized.
Further, the gas distributor 11 is connected to the regulated power supply 6. The regulated power supply 6 is negative potential, and after ions are collected by the ion collecting electrode 13, the ions can be led out of the discharge chamber 3 through the regulated power supply 6 with negative potential to the ground, the ion collecting electrode 13 can ensure that a radio-frequency electromagnetic field effectively enters the discharge chamber 3, and the disc-shaped ion collecting electrode 13 can also provide larger surface area so as to ensure larger electron current to be led out.
Further, a radio frequency coil 4 is provided around the discharge chamber 3. A plurality of sets of radio frequency coils 4 are arranged around the outer wall of the discharge chamber 3.
Further, the radio frequency coil 4 is connected to a radio frequency power supply 8 through a matching network 7. The radio frequency coil 4 forms a radio frequency electromagnetic field under the action of the radio frequency power supply 8 and the matching network 7, and ionizes the gas in the discharge chamber 3 into plasma.
Further, the materials of the gas distributor 11 and the ion collecting electrode 13 are conductive materials resistant to sputtering. In the embodiment of the present application, the materials of the gas distributor 11 and the ion collecting electrode 13 are preferably molybdenum, titanium or graphite.
Further, the ceramic back cover 1 also comprises an ignition electrode 14, wherein the ignition electrode 14 is welded and sealed with the ceramic back cover 1 and is connected with a high-voltage pulse power supply 15. Under the pulse voltage, discharge occurs between the ignition electrode 14 and the ion collection electrode 13, a large amount of electrons are generated, and plasma discharge is started under the excitation of the radio frequency electromagnetic field.
The above description is only of the preferred embodiments of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (3)
1. An integrated gas distribution and ion collection assembly for a radio frequency cathode comprising a gas path junction, insulating ceramic, a gas distributor, and an ion collection electrode, wherein:
the gas distributor is fixed at the ceramic rear cover of the discharge chamber through a fastening nut;
One end of the gas distributor is welded and sealed with the insulating ceramic, and the other end of the gas distributor is integrally formed with the ion collecting electrode, so that the ion collecting electrode is fixed in the discharge chamber;
The gas circuit joint is welded and sealed with the insulating ceramic;
The ion collecting electrode is disc-shaped, an air inlet hole is uniformly formed in the ion collecting electrode, and the included angle between the air inlet hole and the inner wall of the discharge chamber is 50-80 degrees;
A leading-out hole is formed in the front cover of the discharge chamber;
The gas distributor is connected with a stabilized voltage power supply;
A radio frequency coil is arranged around the discharge chamber;
The radio frequency coil is connected with a radio frequency power supply through a matching network.
2. The integrated gas distribution and ion collection assembly for a radio frequency cathode of claim 1, wherein the materials of the gas distributor and the ion collection electrode are each a sputter resistant conductive material.
3. The integrated gas distribution and ion collection assembly for a radio frequency cathode of claim 1, further comprising an ignition electrode welded to the ceramic back cover and connected to a high voltage pulsed power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111487286.7A CN114352493B (en) | 2021-12-06 | 2021-12-06 | Integrated gas distribution and ion collection assembly for radio frequency cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111487286.7A CN114352493B (en) | 2021-12-06 | 2021-12-06 | Integrated gas distribution and ion collection assembly for radio frequency cathode |
Publications (2)
| Publication Number | Publication Date |
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| CN114352493A CN114352493A (en) | 2022-04-15 |
| CN114352493B true CN114352493B (en) | 2024-09-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111487286.7A Active CN114352493B (en) | 2021-12-06 | 2021-12-06 | Integrated gas distribution and ion collection assembly for radio frequency cathode |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106941066A (en) * | 2017-03-22 | 2017-07-11 | 中山市博顿光电科技有限公司 | A kind of radio-frequency ion source averager for ionizing effect stability |
| CN109979794A (en) * | 2017-12-27 | 2019-07-05 | 核工业西南物理研究院 | A kind of radio frequency induction coupled plasma averager |
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| EP1082541B1 (en) * | 1998-06-05 | 2002-10-09 | General Dynamics OTS (Aerospace), Inc. | Uniform gas distribution in ion accelerators with closed electron drift |
| CA2517465C (en) * | 1999-03-31 | 2009-01-27 | Science Research Laboratory, Inc. | Plasma gun and methods for the use thereof |
| DE19948229C1 (en) * | 1999-10-07 | 2001-05-03 | Daimler Chrysler Ag | High frequency ion source |
| AT502984B8 (en) * | 2003-09-15 | 2008-10-15 | Qasar Technologieentwicklung Gmbh | METHOD AND DEVICE FOR PRODUCING ALFVEN WAVES |
| US7400096B1 (en) * | 2004-07-19 | 2008-07-15 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Large area plasma source |
| CN1725424A (en) * | 2004-07-23 | 2006-01-25 | 亚洲光学股份有限公司 | Improved ion gun |
| US7516610B2 (en) * | 2005-10-07 | 2009-04-14 | The Regents Of The University Of Michigan | Scalable flat-panel nano-particle MEMS/NEMS thruster |
| US7498592B2 (en) * | 2006-06-28 | 2009-03-03 | Wisconsin Alumni Research Foundation | Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams |
| US8006939B2 (en) * | 2006-11-22 | 2011-08-30 | Lockheed Martin Corporation | Over-wing traveling-wave axial flow plasma accelerator |
| CN102015112A (en) * | 2008-04-21 | 2011-04-13 | 德塞拉股份有限公司 | Ionic fluid flow accelerator |
| US8508908B2 (en) * | 2011-04-22 | 2013-08-13 | Tessera, Inc. | Electrohydrodynamic (EHD) fluid mover with field shaping feature at leading edge of collector electrodes |
| RU2667822C1 (en) * | 2017-04-18 | 2018-09-24 | Федеральное государственное унитарное предприятие "Опытное конструкторское бюро "Факел" ФГУП "ОКБ "Факел" | Plasma accelerator with closed electron drift |
| CN108535607B (en) * | 2017-12-22 | 2020-07-10 | 兰州空间技术物理研究所 | Ion thruster hollow cathode performance test and service life assessment test device and method |
| CN108335957B (en) * | 2017-12-22 | 2020-01-10 | 兰州空间技术物理研究所 | Gas discharge electron source based on hot cathode |
| CN110439771A (en) * | 2019-08-12 | 2019-11-12 | 北京精密机电控制设备研究所 | A kind of air-breathing pulse plasma thruster |
| CN112160884A (en) * | 2020-09-24 | 2021-01-01 | 上海交通大学 | Integrated radio frequency ion propulsion device |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106941066A (en) * | 2017-03-22 | 2017-07-11 | 中山市博顿光电科技有限公司 | A kind of radio-frequency ion source averager for ionizing effect stability |
| CN109979794A (en) * | 2017-12-27 | 2019-07-05 | 核工业西南物理研究院 | A kind of radio frequency induction coupled plasma averager |
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| CN114352493A (en) | 2022-04-15 |
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