CN114295650B - X-ray CT detection device and detection method - Google Patents
X-ray CT detection device and detection method Download PDFInfo
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Abstract
本发明公开了X射线CT检测装置及X射线CT检测方法。CT检测装置包括置物台运动系统，位于置物台运动系统上方的X射线传感器运动系统，下方的X射线源运动系统，以及用于提供驱动X射线传感器与X射线源同步运动的传动系统；通过图像重建及显示单元对采集到的图像进行算法重建并显示重建结果，本发明可以实现对被检物目标区域选择、放大率调整及扫描检测响应速度大大加快。CT检测方法主要为X射线传感器面中心与X射线源焦点的连线，穿过被检物体，且X射线传感器与X射线源按预定圆周轨迹旋转时，间隔一定角度，采集一定数量图像，在此过程中X射线传感器面中心与焦点连线始终穿过被检物体。
The present invention discloses an X-ray CT detection device and an X-ray CT detection method. The CT detection device includes a platform motion system, an X-ray sensor motion system located above the platform motion system, an X-ray source motion system below, and a transmission system for driving the X-ray sensor and the X-ray source to move synchronously; the collected image is algorithmically reconstructed and the reconstruction result is displayed by the image reconstruction and display unit. The present invention can greatly accelerate the target area selection, magnification adjustment and scanning detection response speed of the object to be inspected. The CT detection method mainly involves the line connecting the center of the X-ray sensor surface and the focus of the X-ray source passing through the object to be inspected, and when the X-ray sensor and the X-ray source rotate according to a predetermined circular trajectory, a certain number of images are collected at a certain angle, and during this process, the line connecting the center of the X-ray sensor surface and the focus always passes through the object to be inspected.
Description
Technical field:
The invention relates to the field of nondestructive testing equipment in the electronic industry, in particular to an X-ray CT (computed tomography) detection device and an X-ray CT detection method.
The background technology is as follows:
With the rapid development of the electronic industry, the application of integrated circuits has been advanced to various fields of production and life, and with the development of processing technology, fine micromachining is applied in a large number, and the traditional integrated circuits achieve a qualitative leap, so that high integration is achieved. However, there is a problem that the characteristics of each layer inside the integrated circuit are not seen from the appearance, and the conventional inspection method cannot realize the inspection inside the integrated circuit. Meanwhile, a method for scanning and detecting an object to be detected to acquire internal characteristic information of the object by using a CT device has been widely used in the fields of medical detection and industrial detection for decades. The acquisition of images by X-ray irradiation of integrated circuits and the reconstruction of images are therefore an important way of performing internal inspection of integrated circuits.
In the existing X-ray detection equipment for integrated circuit detection, 2D detection is mainly used, a plurality of main single machines are used, the detection efficiency is low, and an X-ray CT imaging technology mainly appears in an additional optional mode.
Meanwhile, the time required for image acquisition and image tomographic reconstruction of the existing equipment on the market is long, so that the detection efficiency is greatly influenced, and the requirement of a large amount of detection is gradually not met.
For example, an existing automatic detection device for defects of an LED chip based on X-rays on the market has an X-ray detection body and a shielding case; wherein the X-ray detection main body comprises: an X-ray source which irradiates an X-ray generated by the X-ray source on a chip to be inspected placed on an objective table; a detector that detects X-rays that pass through the chip to be inspected; the chip clamp is positioned on the objective table in a detachable mode and is provided with a plurality of chip grooves; a motion platform configured to effect movement of the stage in X, Y and Z directions; and a control system configured to acquire the position coordinates of the moving platform in real time and drive the moving platform in a path. Although the chip is detected by X-rays, the motion mode of the object stage in X, Y and Z directions is realized by the motion platform, and the multi-angle and multi-directional resolution can not be adjusted in the detection process.
The invention comprises the following steps:
Aiming at the defects existing in the prior art, the invention provides a rapid and efficient X-ray detection device and a detection method, and the device and the method have greatly accelerated response speed to the target area selection, the amplification adjustment and the scanning detection of the detected object. Meanwhile, detection and image reconstruction are separately carried out, after the first detected object is scanned and detected, the data uploading server processes, the detection device can immediately carry out the next detected object scanning and detection, the detection use efficiency of the device is greatly improved, the device can be conveniently docked with a production line, and the production efficiency is greatly improved.
In order to achieve the above purpose, the present invention provides the following technical solutions:
The X-ray CT detection device comprises a storage table moving system, an X-ray sensor moving system positioned above the storage table moving system, an X-ray source moving system positioned below the storage table moving system and a transmission system for providing synchronous movement for driving the X-ray sensor and the X-ray source; and carrying out algorithm reconstruction on the acquired image through an image reconstruction and display unit and displaying a reconstruction result.
As a further scheme of the invention, the X-ray source movement system comprises an X-ray source, and the voltage and the current of the X-ray source are adjustable; the X-ray sensor motion system comprises an X-ray sensor, wherein the X-ray sensor has different acquisition frame rates and resolutions; the transmission system is used for adjusting and correcting different positions and angles of the X-ray sensor, the X-ray source and the detected object.
As a further scheme of the invention, in the X-ray sensor moving system and the X-ray source moving system, the track planes of the X-ray sensor and the X-ray source are ensured to be parallel and coaxial in rotation; the X-ray sensor and the X-ray source realize 360-degree circular motion through preset parameters;
The X-ray sensor and the X-ray source can move along the radial direction of the circular orbit;
the included angle between the X-ray sensor and the X-ray source and the horizontal direction can be adjusted.
As a further scheme of the invention, the motion forms such as circular track motion of the X-ray sensor and the X-ray source are realized by different track combination schemes and the like. Meanwhile, when the X-ray sensor and the X-ray source move, a corresponding counterweight device is arranged; the method comprises the following steps: the movement modes of the X-ray sensor and the X-ray source comprise: 1) A linear (or cross, rice-shaped and the like) track circular rail moves, a linear (or cross, rice-shaped and the like) radial track is arranged on the circular track, an X-ray sensor and an X-ray source can move radially on the track to realize circular movements with different radiuses, and meanwhile, when the X-ray sensor and the X-ray source move, a corresponding counterweight device is arranged; 2) Or crisscross orbital motion: two X, Y-direction crossed motion tracks are arranged on each circular track, and circular track motions with different radiuses are realized through the cooperative motion of the two directions; 3) Or a preset coordinate point motion: each circular track is provided with a preset coordinate point, a X, Y direction coordinate mark and a circumference coordinate mark, and the X-ray sensor and the X-ray source directly reach the preset coordinate points to realize circular track movement with different radiuses and X, Y direction movement; 4) Or radial tracks (the radial tracks can be in a straight shape, a cross shape, a rice shape and the like) can circularly move, the upper part and the lower part of the radial tracks are respectively provided with two radial tracks, the two tracks are respectively driven by a motor to circularly move, and the X-ray sensor and the X-ray source can radially move on the tracks so as to realize circular movements with different radiuses.
As a further scheme of the invention, when the X-ray sensor and the X-ray source move in the horizontal direction and move along the radial direction, the counterweight moves correspondingly according to the positions of the X-ray sensor and the X-ray source.
As a further scheme of the invention, the X-ray sensor and the track plane where the X-ray source is positioned are calibrated in parallel and aligned by utilizing laser, and the optical signals are received by the sensor; the included angle between the X-ray sensor and the horizontal plane is alpha, the included angle between the X-ray source and the horizontal plane is beta, wherein the angle of the X-ray sensor is more than or equal to 0 degree and less than or equal to 90 degrees, the angle of the X-ray source is more than or equal to 0 degree and less than or equal to 90 degrees, and the coordinate position of the center of the X-ray sensor surface and the focal point of the X-ray source is always unchanged when the angle of alpha and beta is adjusted; the object placing table in the object placing table moving system is inclined and adjusted to be +/-gamma degrees along the horizontal direction, the gamma angles are set according to actual needs by matching with the X-ray sensor and the X-ray source for different angle detection, the object placing table can move along the Z-axis direction, the object to be detected is enlarged and reduced, and the gamma angles are included angles between the object placing table and the horizontal plane.
The invention also provides an X-ray CT detection method, which comprises the following steps:
Step S1: providing a placing table, an X-ray sensor, an X-ray source and an image reconstruction and display unit, and adjusting the placing table, the X-ray sensor and the X-ray source to a position to be detected through a motion system;
step S2: the connecting line of the center of the X-ray sensor surface and the focus of the X-ray source passes through the detected object, and the X-ray center beam is perpendicular to the plane of the X-ray sensor;
Step S3: after the X-ray sensor and the X-ray source enter a preset detection position, the X-ray sensor and the X-ray source relatively move for one circle, and a corresponding number of images are acquired. The CT detection method includes that a connecting line of the center of an X-ray sensor surface and a focus of an X-ray source penetrates through an object to be detected, the X-ray sensor surface and the X-ray source rotate for one circle in a relative motion mode after entering a preset detection position, a certain angle is formed between the X-ray sensor surface center and the focus, a corresponding number of images are acquired, and the connecting line of the X-ray sensor surface center and the focus always penetrates through the object to be detected in the process.
As a further scheme of the invention, according to different resolution requirements, the magnification is adjusted, different target areas are selected, M=FD/FO is satisfied, the larger the value of the magnification M is, the higher the resolution of the CT reconstructed image is, wherein F is a Focus (Focus), O is an Object to be detected (Object), D is an X-ray source sensor (Detector), FD is the distance from the center of the surface of the X-ray sensor to the connecting line of the Focus of the X-ray source, and FO is the distance from the X-ray source to the center of the Object to be detected. In the amplification rate adjusting process, the center position of the center surface of the object to be detected is unchanged all the time.
As a further scheme of the invention, according to different resolution requirements, the larger the inclination angle theta, the inclination angle alpha and the inclination angle beta meet the values of theta, alpha and beta, the higher the resolution of the CT reconstructed image is, wherein alpha is the included angle between the X-ray sensor and the horizontal plane, beta is the included angle between the X-ray source and the horizontal plane, and theta is the included angle between the connecting line of the center of the X-ray sensor surface and the X-ray source focus and the Z axis.
As a further scheme of the invention, the image acquisition angle interval can be set according to different CT reconstruction image resolution requirements.
The invention has the following beneficial effects:
The invention comprises an X-ray sensor, an X-ray source, a motion system unit and an image reconstruction and display unit. Wherein the voltage and current of the X-ray source are adjustable; the X-ray sensor can set different acquisition frame rates and resolutions; the motion system unit can adjust and correct the positions and angles of the X-ray sensor, the X-ray source and the detected object. Image reconstruction, display unit: and carrying out algorithm reconstruction on the acquired image, and displaying a reconstruction result.
2. According to the invention, an X-ray sensor and X-ray source movement system, a storage table movement system and a transmission system for driving the X-ray sensor and the X-ray source to synchronously move are adopted; all movements are independent of each other, and can be respectively moved or linked by control; the X-ray sensor and the X-ray source moving system have to be parallel and coaxial in rotation with the plane of the orbit where the X-ray sensor and the X-ray source are located, and the necessary calibration is carried out during installation. The X-ray sensor and the X-ray source realize 360-degree circular motion through preset parameters. The X-ray sensor and the X-ray source can move along the radial direction of the circular orbit.
In order to more clearly illustrate the structural features and efficacy of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and examples.
Description of the drawings:
Fig. 1a and 1b are schematic diagrams of a module and a structure of an X-ray CT detector according to the present invention, respectively.
Fig. 2 and 3 are reference diagrams of relative position and motion states of the X-ray sensor and the X-ray source motion system according to the present invention.
Fig. 4, 5, 6 and 7 show four implementations of the circular motion trajectory of the X-ray sensor and the X-ray source according to the present invention.
FIG. 8 is a schematic view of the weight of the X-ray sensor and the X-ray source of the present invention in motion.
Fig. 9 and 10 are schematic views of the coaxial and parallel alignment of the orbital planes of the present invention.
Fig. 11 and 12 are schematic diagrams of the position adjustment movements of the X-ray sensor and the X-ray source in the present invention.
Fig. 13a and 13b are schematic diagrams showing the X-ray sensor surface center and the X-ray source focal coordinates kept unchanged when the angle between the X-ray sensor and the X-ray source is adjusted according to the present invention.
Fig. 14 is a schematic view of a table moving system in the present invention for realizing X, Y axis movement along the horizontal direction.
Fig. 15 shows one embodiment of an X-ray sensor, an X-ray source motion system and a table according to the present invention.
The specific embodiment is as follows:
The invention will be further described in the following clear and complete description with reference to the figures and the associated knowledge, it being evident that the described applications are only some, but not all embodiments of the invention.
Referring to fig. 1 a-1 b, an X-ray CT detector apparatus comprises: an X-ray sensor 1, an X-ray source 2, a motion system unit 3, an image reconstruction and display unit. Wherein the voltage and current of the X-ray source 2 are adjustable; the X-ray sensor 1 can set different acquisition frame rates. The motion system unit 3 can perform different position and angle adjustment on the X-ray sensor 1, the X-ray source 2 and the detected object. The image reconstruction and display unit reconstructs the acquired image and displays the reconstruction result; all movements are independent of each other, and can be controlled to move or be linked respectively.
Referring to fig. 2 and 3, the plane of the circular motion track of the X-ray source 2 is parallel and coaxial, and the two are driven by a transmission rod driven by a motor to perform synchronous linkage on the right side, so that the consistency of motion is ensured, and the connecting line of the center of the X-ray sensor surface and the focal point of the X-ray source always passes through the center point of the target area of the detected object. The middle part is a storage platform, and X/Y/Z triaxial movement can be realized independently. After a user places the object to be detected, the target area can be moved to a preset position by software, so that the center point of the center plane of the target area is positioned on the connecting line of the center of the sensor plane and the focus.
In the present invention, the X-ray CT detection method includes, after the initial zero position and the detection position are set, as shown in fig. 3, a line connecting the center of the X-ray sensor surface and the focus of the X-ray source passes through the object to be detected. Preferably, the line is perpendicular to the plane of the X-ray sensor.
When the X-ray sensor and the X-ray source rotate along a preset circumferential track, the connecting line of the surface center and the focus always passes through the detected object. After the X-ray sensor and the X-ray source enter a preset detection position, the X-ray sensor and the X-ray source relatively move for one circle, and a certain number of images are acquired.
The resolution of CT reconstructed images is good or bad: namely, the display effect of the CT reconstruction image on the details of the detected object is finer and finer as the resolution of the reconstruction image is higher.
Wherein, referring to fig. 3, the resolution of the reconstructed image is determined by a number of factors: FOD distance, tilt angle (device tilt angle θ, X-ray sensor tilt angle α and X-ray source tilt angle β), image acquisition angle spacing, X-ray sensor pixel size, X-ray source focus size, etc. The resolution of the CT reconstructed image can be adjusted according to different resolution requirements, and the inclination angle theta of the device, the inclination angle alpha of the X-ray sensor and the inclination angle beta of the X-ray source can be adjusted.
The resolution of the CT reconstructed image can be adjusted according to different resolution requirements, and different target areas can be selected. The magnification is as follows: m=fd/FO, the larger the M value, the higher the CT reconstructed image resolution.
After the detected object enters a preset detection position, setting an image acquisition angle interval according to different CT reconstruction image resolution requirements, wherein the smaller the angle interval is, the higher the CT reconstruction image resolution is.
After adjusting parameters (such as voltage, current, inclination angle, etc.) related to the X-ray sensor and the X-ray source, image acquisition, reconstruction, display, etc. are started.
Further preferably, the image acquisition control process is: after the object to be inspected is placed on the object placing table, the X-ray sensor and the X-ray source enter a set initial position, and a connecting line between the center of the sensor surface and the focus of the X-ray source is required to pass through the object to be inspected. Through the motion system, the X-ray source and the X-ray sensor start to rotate synchronously in a circular orbit, and each time the X-ray sensor and the X-ray source rotate for a certain angle, image acquisition is carried out, and a plurality of images are acquired. The rotation rate of the X-ray source and the X-ray sensor is matched with the image acquisition frame rate of the X-ray sensor, and is determined by preset parameters. After the image acquisition is completed, the image data enters a processing system and is reconstructed in the background. After the image reconstruction is completed, the image can be displayed locally or remotely. Meanwhile, the device can continue to acquire the image of the next object, and the detection time is not occupied.
As described above, according to the X-ray CT detector of the present invention, an arbitrary detection region can be set for an object to be detected, and the object to be detected can be quickly adjusted and selected, thereby performing multi-angle and different magnification detection. Meanwhile, the X-ray source and the X-ray sensor can synchronously rotate to perform rapid image acquisition, and high-precision images can be reconstructed by reducing the image acquisition angle interval, increasing the magnification and the like. Meanwhile, in the detection process, the image always keeps near saturation display along with the change of the distance.
According to the X-ray CT detection method, through the motion system, the detected object can be subjected to image acquisition in different directions and angles and background reconstruction, so that the detection service time of equipment is shortened, and the service efficiency of the equipment is improved. Meanwhile, the detection area can be changed through motion control under the condition that the object to be detected is not moved, and image acquisition and reconstruction display can be performed under the condition that the object to be detected is difficult to move.
The invention specifically comprises the following steps:
referring to fig. 3, the X-ray sensor movement system of the present invention can realize the radial movement and the up-down Z-direction movement of the X-ray sensor while realizing 360 ° rotation.
The method comprises the following steps: the object placing table moving system can realize horizontal X, Y-direction movement, up-down Z-direction movement and horizontal direction inclination +/-gamma degrees, and the gamma angles can be set according to actual needs. The X-ray source movement system can realize radial movement and up-down Z-direction movement of the X-ray source while realizing 360-degree rotation. The object placing table moving system in the system can realize the butt joint with the assembly line through horizontal movement. The corresponding speeds of the three motion systems are high, for example: after the motion command is issued, the position adjustment is completed within 2 seconds on average.
Wherein, when CT detection is performed, CT scanning imaging of a target area can be completed in a very short time (such as within 6 s).
Mechanical amplification of the detection device: m=fd/FO, the larger the FD/FO ratio, the larger the magnification, and vice versa.
The distance between FD and FO can be changed by the up-and-down movement and horizontal movement of the X-ray source, X-ray sensor and object placing table.
Angle θ: the X-ray sensor and the X-ray source can move along the radial direction of the circular orbit, and the relative position of the X-ray sensor and the X-ray source determines the angle theta.
Angle alpha: the X-ray sensor forms an included angle with the horizontal direction.
Angle beta: the X-ray source is at an angle to the horizontal.
The relative change of the three determines the Z-direction resolution of the reconstructed image of the object.
When the X-ray sensor and the X-ray source are at the initial position and other detection positions, and no detected object exists, the X-ray sensor reaches near saturation, and the saturation is generally 90% of the maximum pixel value of the X-ray sensor.
Meanwhile, as the distance between FD and FO changes, the saturation is kept relatively stable by adjusting the voltage and current of the X-ray source.
R1 is radial displacement of X-ray sensor
R2 is the radial displacement of the X-ray source.
H1 is the distance between the track plane of the X-ray sensor motion system and the object placing table plane.
H2 is the distance between the track plane of the X-ray source motion system and the object placing table plane.
In order to keep the detected object motionless and the center unchanged in the detection process, the angles h1, h2, theta, R1, R2 and the like are correspondingly adjusted at any time.
It is further preferred that the X-ray sensor and the X-ray source movement system, the X-ray sensor and the X-ray source are arranged on a track plane which must be parallel and coaxial, and the calibration is performed during the installation. The transmission system drives the X-ray sensor and the X-ray source to synchronously move, and the synchronous transmission device realizes the synchronous movement of the X-ray sensor and the X-ray source, and the movement precision is ensured by an encoder (or a machine).
The X-ray sensor and the X-ray source realize 360-degree circular motion through preset parameters.
The X-ray sensor and the X-ray source can move along the radial direction of the circular orbit.
The included angles of the X-ray sensor, the X-ray source and the horizontal direction are adjustable, and the movement precision is ensured by the angle sensor. The included angle alpha is more than or equal to 0 degree and less than or equal to 90 degrees, and beta is more than or equal to 0 degree and less than or equal to 90 degrees.
Further preferably, the circular motion track has four implementation modes:
Referring to fig. 4, two fixed circular tracks are arranged at the upper and lower sides, and a straight (or cross, rice-shaped, etc.) radial track is arranged on the circular tracks to realize circular motions with different radiuses. Meanwhile, when the X-ray sensor and the X-ray source move, a corresponding counterweight device is arranged.
Referring to fig. 5, two X, Y-direction intersecting movement tracks are respectively arranged up and down, and circular track movement is realized through the cooperation movement of the two directions.
Referring to fig. 6, each of the upper and lower parts has a preset coordinate point, such as a cross mark, a X, Y direction coordinate mark and a circumferential coordinate mark, and the X-ray sensor and the X-ray source directly reach the preset coordinate point to realize the circumferential track movement and X, Y direction movement.
Referring to fig. 7, two radial tracks (i.e., straight, cross, m-shaped, etc.) are provided up and down, and the two tracks are driven by motors (e.g., stepper motors, etc.) to perform circular motion. Meanwhile, when the X-ray sensor and the X-ray source move, a corresponding counterweight device is arranged.
In the present invention, referring to fig. 8, when the X-ray sensor and the X-ray source move in the horizontal direction and move in the radial direction, the balance weight moves correspondingly according to the positions of the X-ray sensor and the X-ray source, so as to ensure balance, and the same balance weight is provided for the X-ray sensor moving system, which is not repeated here.
In the present invention, referring to fig. 9-10, the track plane coaxial and parallel alignment mode is: four collimating tunnels are opened on the track, and calibration is performed by using a laser, wherein the number of collimating tunnels may be several, and it is further preferred that in fig. 10, h is the collimating tunnel height, w is the collimating tunnel width, δ=h/w, δ is the beam diffusion angle parameter, and the greater the δ value, the higher the calibration accuracy.
The light source is not limited to laser light, but includes visible light, X-rays, and the like.
In the present invention, referring to fig. 11, 12, 13a, and 13b, the inclination movement modes of the X-ray sensor and the X-ray source are as follows: the alpha and beta angles are included angles between the X-ray sensor and the X-ray source and the horizontal direction respectively, the alpha and beta angles can be adjusted respectively and can also be adjusted synchronously, and in the adjustment process, the alpha and beta angle rotation centers are respectively the central axis of the X-ray sensor surface and the focus of the X-ray source, so that the coordinate position is kept unchanged all the time, and the stability of the detection position is ensured after the adjustment to the detection position.
The X-ray sensor angle adjustment is as follows: alpha is more than or equal to 0 degree and less than or equal to 90 degrees.
The X-ray source angle is adjusted as follows: beta is more than or equal to 0 degree and less than or equal to 90 degrees;
It is further preferred that both the X-ray sensor and the X-ray source in fig. 12 be movable in a radial direction and up and down.
In the object placing table moving system, the object placing table plane can realize X, Y-axis movement along the horizontal direction, and detection of different parts of an object to be detected can be realized. Meanwhile, the object placing table can incline by +/-gamma degrees along the horizontal direction, and the gamma angles can be set according to actual needs by matching with the detection of different angles of the X-ray sensor and the X-ray source. And can realize Z-axis direction movement and the enlargement and reduction of the detected object.
The following provides a specific embodiment of the present invention
Example 1
The X-ray CT detection device comprises: an X-ray sensor, an X-ray source, a motion system unit, an image reconstruction and display unit. The X-ray sensor and the X-ray source move to different preset positions to receive X-rays passing through the object to be detected for imaging, and the object to be detected is analyzed through image reconstruction.
An X-ray source: the voltage and the current are adjustable.
X-ray sensor: different acquisition frame rates and resolutions may be set.
Motion system unit: the X-ray sensor, the X-ray source and the detected object can be subjected to different position and angle adjustment and correction.
And an image reconstruction and display unit: and carrying out algorithm reconstruction on the acquired image, and displaying a reconstruction result.
In this embodiment, the motion system unit includes: the X-ray sensor and X-ray source motion system, the object placing table motion system and the transmission system for driving the X-ray sensor and the X-ray source to synchronously move. All movements of the system are independent from each other, and can be respectively moved or linked by controlling.
In this embodiment, the X-ray sensor and the X-ray source motion system must be parallel and rotationally coaxial to the orbital plane in which the X-ray sensor and the X-ray source are located, and the necessary calibration is performed during installation.
The X-ray sensor and the X-ray source realize 360-degree circular motion through preset parameters.
The X-ray sensor and the X-ray source can move along the radial direction of the circular orbit.
The included angle between the X-ray sensor and the X-ray source as well as the horizontal direction is adjustable, and the movement precision is ensured by the angle sensor. The included angle alpha is more than or equal to 0 degree and less than or equal to 90 degrees, and beta is more than or equal to 0 degree and less than or equal to 90 degrees.
The angle theta is the inclination angle of the device during image acquisition, and is the included angle between the central connecting line of the X-ray sensor surface of the X-ray source focus and the central axis, and the angle theta is more than or equal to 0 degree and less than 90 degrees.
Wherein:
the central axis of the whole device is coincident with the central axis of radial displacement of the X-ray sensor and the X-ray source.
The X-ray sensor and the X-ray source are each movable radially so that the central beam of the X-ray source is aligned with the X-ray sensor, in which case α=β is forward.
The X-ray sensor and the X-ray source can respectively and independently move up and down.
The X-ray sensor movement system can realize radial movement and up-down Z-direction movement of the X-ray sensor while realizing 360-degree rotation.
The object placing table moving system can realize horizontal X, Y-direction movement, up-down Z-direction movement and horizontal direction inclination +/-gamma degrees, and the gamma angles can be set according to actual needs.
The X-ray source movement system can realize radial movement and up-down Z-direction movement of the X-ray source while realizing 360-degree rotation. The object placing table moving system in the system can realize the butt joint with the assembly line through horizontal movement. The corresponding speeds of the three motion systems are high, for example: after the motion command is issued, the position adjustment is completed within 2 seconds on average.
Wherein CT detection is performed, CT scanning imaging of a target area is completed in a very short time (such as within 6 s).
Mechanical amplification of the detection device: m=fd/FO. The larger the FD/FO ratio, the larger the magnification and vice versa. The distance between FD and FO can be changed by the up-and-down movement and horizontal movement of the X-ray source, X-ray sensor and object placing table.
The relative changes of the angle theta, the angle alpha and the angle beta determine the Z-direction resolution of the reconstructed image of the detected object.
Best examples: θ=α=β=50° (not limited to three angles equal and not limited to 50 °) when the X-ray source focus is perpendicular to the X-ray sensor plane with respect to the X-ray sensor plane center line.
When the X-ray sensor and the X-ray source are at the initial position and other detection positions, and no detected object exists, the X-ray sensor reaches near saturation, and the saturation is generally 90% of the maximum pixel value of the X-ray sensor. Meanwhile, as the distance between FD and FO changes, the saturation is kept relatively stable by adjusting the voltage and current of the X-ray source.
For a 16-bit X-ray sensor, the near saturation value is: 65536X 80% ≡ 58982.
When h1 and h2 are unchanged and the angle theta is changed by delta theta, the radial moving distance of the X-ray sensor is as follows in order to keep the detected object motionless and the center of the target plane unchanged: Δr= |r1-h1| tan (θ++Δθ) |, and the X-ray sensor angle is also adjusted accordingly Δθ. Also, the moving distance and the adjusting angle of the X-ray source can be calculated and deduced in the same way.
When R1 and R2 are unchanged and the angle of h1 is changed by delta h1, the angle of the X-ray sensor is adjusted to keep the detected object motionless and the center of the target plane unchanged: Δα= |arctan (R1/h 1) -arctan (R1/h1++Δh1) |, similarly, the X-ray source movement distance and adjustment angle can be deduced by the same calculation.
The above is merely an example, and the X-ray sensor, the X-ray source, and the θ -angle change are not limited to the above changes. The corresponding moving distance can be calculated according to different movements.
In this embodiment, the circular motion trajectory is realized by:
the upper and lower tracks are respectively provided with two straight radial tracks, the two tracks are respectively driven by a motor (a stepping motor and the like) to do circular motion, and the upper and lower tracks can synchronously move and also can respectively move. Meanwhile, when the X-ray sensor and the X-ray source move, a corresponding counterweight device is arranged.
The balance weight in the embodiment moves correspondingly according to the positions of the X-ray sensor and the X-ray source when the X-ray sensor and the X-ray source move in the horizontal direction along the radial direction, so that balance is ensured. The X-ray sensor motion system also has the same weight and is not described in detail herein.
In this embodiment, the track plane is aligned coaxially and parallel in the following manner:
Four collimation tunnels are opened on the track, the four collimation tunnels are evenly distributed on the track, a sensor is arranged at the top of the tunnel to receive optical signals, the collimation tunnels are calibrated by laser, and the collimation tunnels can be increased according to actual conditions.
In this embodiment, the inclination angle α of the X-ray sensor and the inclination angle β of the X-ray source can be adjusted separately or simultaneously, and as shown in fig. 13a and 13b, when the angles α and β are adjusted, the center axis of the X-ray sensor surface and the focus of the X-ray source are respectively rotation centers, so that the coordinate positions of the surface center and the focus are kept unchanged all the time, and after the adjustment to the detection position, the stability of the detection position is ensured.
The X-ray sensor angle adjustment is as follows: alpha is more than or equal to 0 degree and less than or equal to 90 degrees.
The X-ray source angle is adjusted as follows: beta is more than or equal to 0 DEG and less than or equal to 90 DEG, wherein the central axis of the whole device is coincident with the central axis of radial displacement of the X-ray sensor and the X-ray source.
In this embodiment, both the X-ray sensor and the X-ray source are movable in a radial direction and up and down. And the object placing table moving system can realize X, Y-axis movement along the horizontal direction on the object placing table plane and can realize detection of different parts of an object to be detected. Meanwhile, the object placing table can incline by +/-gamma degrees along the horizontal direction, and can detect different angles by matching with the X-ray sensor and the X-ray source, and the gamma angles can be set according to actual needs. The object placing table can move in the Z-axis direction, and the object to be detected can be enlarged or reduced.
In this embodiment, the synchronous movement of the X-ray sensor and the X-ray source is achieved by a synchronous conveyor, the movement accuracy of which is ensured by an encoder.
In this embodiment, the image reconstructing and displaying unit transmits the image acquired by the X-ray CT detection method into the image reconstructing and displaying unit. The unit comprises an independent processor, and after image data is obtained, image analysis and reconstruction are automatically completed, so that the follow-up detection content of the device is not affected.
In this embodiment, after the initial zero position and the detection position are set in the detection process, the line connecting the center of the X-ray sensor surface and the focal point of the X-ray source passes through the object to be detected, and the X-ray center beam is perpendicular to the plane of the X-ray sensor. And in the process of moving and scanning the X-ray sensor and the X-ray source according to a preset circular track, the connecting line of the center of the X-ray sensor surface and the focus of the X-ray source always passes through the object to be detected.
After the X-ray sensor and the X-ray source enter a preset detection position, the X-ray sensor and the X-ray source relatively move for one circle, and a certain number of images are acquired.
Advantages and disadvantages of CT reconstructed image resolution: namely, the display effect of the CT reconstruction image on the details of the detected object is finer and finer as the resolution of the CT reconstruction image is higher.
The resolution of a CT reconstructed image is determined by a number of factors: FOD distance, tilt angle (device tilt angle θ, X-ray sensor tilt angle α and X-ray source tilt angle β), image acquisition angle spacing, X-ray sensor pixel size, X-ray source focus size, etc.
The resolution of the CT reconstructed image can be adjusted according to different resolution requirements, and the inclination angle theta of the device, the inclination angle alpha of the X-ray sensor and the inclination angle beta of the X-ray source can be adjusted.
The larger the values of θ, α and β, the higher the resolution of the CT reconstructed image. Typical value θ= α=β=50°.
And the values of θ, α and β are not limited to θ=α=β, and can be adjusted according to actual needs.
In addition, the resolution of the CT reconstructed image can be adjusted according to different resolution requirements, and different target areas can be selected.
The magnification is as follows: m=fd/FO, the larger the M value, the higher the CT reconstructed image resolution.
The amplification factor can be adjusted in the following two adjustment modes.
The inclination angles (alpha and beta) of the X-ray sensor and the X-ray source are unchanged, the relative positions of the X-ray sensor and the X-ray source are unchanged, the track plane of the X-ray sensor and the track plane of the X-ray source are adjusted up and down, or the object placing table plane is adjusted up and down at the same time, and the amplification rate adjustment is realized.
The inclination angles (alpha and beta) of the X-ray sensor and the X-ray source are changed, the relative positions of the X-ray sensor and the X-ray source can be changed, and the track plane of the X-ray sensor, the track plane of the X-ray source and the object placing table plane can be respectively adjusted up and down, so that the amplification rate adjustment is realized.
In the two modes, the object placing table plane is subjected to position adjustment in the horizontal direction according to the up-and-down movement distance of each track plane, so that the center position of the center plane of the object to be detected is always unchanged. The specific magnification adjustment is not limited to the above two adjustment modes.
CT rebuilds the image resolution, according to the different rebuild image resolution requirement, set up the image acquisition angle interval, like: image acquisition is performed at intervals of 1 °, 2 °, and the like. The smaller the angular separation, the higher the resolution of the CT reconstructed image.
After adjusting parameters (such as voltage, current, inclination angle, etc.) related to the X-ray sensor and the X-ray source, image acquisition, reconstruction, display, etc. are started.
The rotation rate of the X-ray source and the X-ray sensor is matched with the image acquisition frame rate of the X-ray sensor, and is determined by preset parameters.
After the image acquisition is completed, the image data enters a processing system and is reconstructed in the background. After the image reconstruction is completed, the image can be displayed locally or remotely. Meanwhile, the device can continue to acquire the image of the next object, and the detection time is not occupied.
As described above, according to the X-ray CT detector of the present invention, an arbitrary detection region can be set for an object to be detected, and the object to be detected can be quickly adjusted and selected, thereby performing multi-angle and different magnification detection. Meanwhile, the X-ray source and the X-ray sensor can synchronously rotate to perform rapid image acquisition, and high-precision images can be reconstructed by reducing the image acquisition angle interval, increasing the magnification and the like. Meanwhile, in the detection process, the image always keeps near saturation display along with the change of the distance. According to the X-ray CT detection method, through the motion system, the detected object can be subjected to image acquisition in different directions and angles and background reconstruction, so that the detection service time of equipment is shortened, and the service efficiency of the equipment is improved. Meanwhile, the detection area can be changed through motion control under the condition that the object to be detected is not moved, and image acquisition and reconstruction display can be performed under the condition that the object to be detected is difficult to move.
The technical principle of the present invention has been described above in connection with specific embodiments, but is only the preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. Other embodiments of the invention will occur to those skilled in the art without the exercise of inventive effort and are intended to fall within the scope of the invention.
Claims (13)
1. An X-ray CT detection device is characterized by comprising a storage table moving system, an X-ray sensor moving system positioned above the storage table moving system, an X-ray source moving system positioned below the storage table moving system and a transmission system for providing synchronous movement of an X-ray sensor and an X-ray source; carrying out algorithm reconstruction on the acquired image through an image reconstruction and display unit and displaying a reconstruction result;
The X-ray sensor movement system realizes 360-degree rotation and simultaneously realizes radial movement and up-down Z-direction movement of the X-ray sensor;
The X-ray source movement system realizes 360-degree rotation and simultaneously realizes radial movement and up-down Z-direction movement of the X-ray source;
in the X-ray sensor moving system and the X-ray source moving system, an X-ray sensor is parallel to the track plane where the X-ray source is positioned and rotates coaxially;
the magnification is adjusted by the up-and-down motion and the horizontal motion of the X-ray source, the X-ray sensor and the object placing table so as to meet the requirements of different resolutions, wherein the magnification M=FD/FO, FD is the distance between the center of the surface of the X-ray sensor and the focal point of the X-ray source, FO is the distance between the X-ray source and the center of the object placing table, in the magnification adjustment process, the center position of the center surface of the object to be detected is always unchanged by adjusting the position of the center surface of the object to be detected in the horizontal direction according to the up-and-down moving distance of each track plane, the connecting line between the center of the surface of the X-ray sensor and the focal point of the X-ray is always passed through the center point of the object to be detected, after the image acquisition of the first object to be detected is completed, the image data enters the image reconstruction and the display unit to carry out background reconstruction, and the detection device continues the image acquisition of the next object to be detected,
And, with the distance change of FD and FO, adjust the voltage and current of X-ray source, in order to make the saturation of the picture keep relatively stable;
The upper and lower track planes are coaxial and parallel, and the calibration mode is as follows: and (3) a plurality of collimating tunnels are opened on the track, and the collimating tunnels are calibrated by using a laser, wherein h is the collimating tunnel height, w is the collimating tunnel width, delta=h/w, delta is the beam diffusion angle parameter, and the greater the delta value is, the higher the calibrating accuracy is.
2. The X-ray CT detection apparatus of claim 1 wherein the X-ray source motion system comprises an X-ray source and the X-ray sensor motion system comprises an X-ray sensor having different acquisition frame rates and resolutions; the transmission system is used for adjusting and correcting different positions and angles of the X-ray sensor, the X-ray source and the detected object.
3. The X-ray CT detector of claim 1 wherein the X-ray sensor and the X-ray source perform a 360 ° circular motion with preset parameters;
the X-ray sensor and the X-ray source move along the radial direction of the circular orbit;
the included angle between the X-ray sensor and the X-ray source and the horizontal direction can be adjusted.
4. An X-ray CT detector according to claim 3 wherein: the motion modes of the X-ray sensor and the X-ray source comprise: 1) The X-ray sensor and the X-ray source can move radially on the track to realize circular motion with different radiuses, and meanwhile, when the X-ray sensor and the X-ray source move, a corresponding counterweight device is arranged; 2) Or crisscross orbital motion: two X, Y-direction crossed motion tracks are arranged on each circular track, and circular track motions with different radiuses are realized through the cooperative motion of the two directions; 3) Or a preset coordinate point motion: each circular track is provided with a preset coordinate point, a X, Y direction coordinate mark and a circumference coordinate mark, and the X-ray sensor and the X-ray source directly reach the preset coordinate points to realize circular track movement with different radiuses and X, Y direction movement; 4) Or the radial track moves circularly, the upper and lower parts of the radial track are respectively provided with two radial tracks, the two tracks are respectively driven by a motor to do circular motion, the X-ray sensor and the X-ray source can move radially on the tracks so as to realize circular motion with different radiuses, and meanwhile, when the X-ray sensor and the X-ray source move, the corresponding counterweight device is arranged.
5. The X-ray CT detector of claim 4 wherein the four X-ray sensors and X-ray source motion are implemented in a common manner characterized by: 1) The circular motion is achieved by utilizing the rotation of the linear slide rail or other modes so as to realize the synchronous scanning motion of the circular tracks of the X-ray sensor and the X-ray source respectively; 2) In the moving process, the X-ray sensor and the X-ray source synchronously move all the time and are positioned at opposite positions all the time; 3) The radius of the circular track movement of the X-ray sensor and the X-ray source can be adjusted; 4) The relative angles of the X-ray sensor and the X-ray source are adjusted according to different circular track movement radiuses and different relative distances; 5) The straight track or the radial track is expanded into a cross track and a rice-shaped track, and the number is increased according to actual needs.
6. The X-ray CT apparatus of claim 4 wherein the weight means moves in response to the X-ray sensor and X-ray source positions when the X-ray sensor and X-ray source are both moved in a horizontal direction in a radial direction.
7. The X-ray CT detector of claim 5 wherein the X-ray sensor and the orbital plane on which the X-ray source is positioned receive optical signals from the sensor and are calibrated with a laser; the included angle between the X-ray sensor and the horizontal plane is alpha, the included angle between the X-ray source and the horizontal plane is beta, wherein the angle of the X-ray sensor is more than or equal to 0 degree and less than or equal to 90 degrees, the angle of the X-ray source is more than or equal to 0 degree and less than or equal to 90 degrees, and the coordinate position of the center of the X-ray sensor surface and the focal point of the X-ray source is always unchanged when the angle of alpha and beta is adjusted; the object placing table in the object placing table moving system is inclined and adjusted to be +/-gamma degrees along the horizontal direction, the gamma angles are set according to actual needs by matching with the X-ray sensor and the X-ray source for different angle i detection, the object placing table can move in the Z-axis direction, and the object to be detected can be enlarged and reduced, wherein the gamma angles are included angles between the object placing table and the horizontal plane.
The 8.X ray CT detection method is characterized by comprising the following steps of:
Step S1: providing a placing table, an X-ray sensor, an X-ray source and an image reconstruction and display unit, and adjusting the placing table, the X-ray sensor and the X-ray source to a position to be detected through a motion system;
step S2: the connecting line of the center of the X-ray sensor surface and the focus of the X-ray source passes through the detected object, and the X-ray center beam is perpendicular to the plane of the X-ray sensor;
Step S3: after the X-ray sensor and the X-ray source enter a preset detection position, the X-ray sensor and the X-ray source relatively move for one circle, and a corresponding number of images are acquired;
the X-ray sensor movement system realizes 360-degree rotation and simultaneously realizes radial movement and up-down Z-direction movement of the X-ray sensor;
The X-ray source movement system realizes 360-degree rotation and simultaneously realizes radial movement and up-down Z-direction movement of the X-ray source;
in the X-ray sensor moving system and the X-ray source moving system, an X-ray sensor is parallel to the track plane where the X-ray source is positioned and rotates coaxially;
The magnification is adjusted by the up-and-down motion and the horizontal motion of the X-ray source, the X-ray sensor and the object placing table so as to meet the requirements of different resolutions, wherein the magnification M=FD/FO, FD is the distance between the center of the surface of the X-ray sensor and the focal point of the X-ray source, FO is the distance between the X-ray source and the center of the object placing table, in the magnification adjustment mode, the position of the object placing table surface is adjusted in the horizontal direction according to the up-and-down moving distance of each track plane, so that the center position of the center surface of the object to be detected is always unchanged, the connecting line between the center of the surface of the X-ray sensor and the focal point of the X-ray is always passed through the center point of the object to be detected, after the image acquisition of the first object to be detected is completed, the image data enters the image reconstruction and the display unit to carry out background reconstruction, and the detection device continues the image acquisition of the next object to be detected,
And, with the distance change of FD and FO, adjust the voltage and current of X-ray source, in order to make the saturation of the picture keep relatively stable;
The upper and lower track planes are coaxial and parallel, and the calibration mode is as follows: and (3) a plurality of collimating tunnels are opened on the track, and the collimating tunnels are calibrated by using a laser, wherein h is the collimating tunnel height, w is the collimating tunnel width, delta=h/w, delta is the beam diffusion angle parameter, and the greater the delta value is, the higher the calibrating accuracy is.
9. The X-ray CT detection method of claim 8 wherein the line connecting the center of the X-ray sensor surface and the focal point of the X-ray source passes through the object during the scanning of the X-ray sensor and the X-ray source in a predetermined circular path.
10. The method of claim 8, wherein the larger the inclination angles θ, α, β satisfy values θ, α, β according to different resolution requirements, the higher the resolution of the CT reconstructed image, where α is an angle between the X-ray sensor and a horizontal plane, β is an angle between the X-ray source and a horizontal plane, and θ is an angle between a line connecting a center of the X-ray sensor plane and a focal point of the X-ray source and a Z-axis.
11. The X-ray CT detection method of claim 8 wherein the greater the value of magnification M, the greater the resolution of the CT reconstructed image.
12. The X-ray CT detection method of claim 8 wherein the image acquisition angular interval is set according to different reconstructed image resolution requirements, the smaller the angular interval, the higher the CT reconstructed image resolution.
13. The X-ray CT detection method of claim 8 wherein the magnification adjustment mode comprises: the inclination angle of the X-ray sensor and the X-ray source is unchanged, the relative positions of the X-ray sensor and the X-ray source are unchanged, and meanwhile, the track plane of the X-ray sensor and the track plane of the X-ray source are adjusted up and down, or the object placing table plane is adjusted up and down, so that the amplification rate is adjusted; or the inclination angles of the X-ray sensor and the X-ray source are changed, the relative positions of the X-ray sensor and the X-ray source can be changed, and the track plane of the X-ray sensor, the track plane of the X-ray source and the object placing table plane can be respectively adjusted up and down, so that the amplification rate adjustment is realized.
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