CN114252028B - Compact four-facula two-dimensional corner detection device combined with laser triangulation method - Google Patents
Compact four-facula two-dimensional corner detection device combined with laser triangulation method Download PDFInfo
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- CN114252028B CN114252028B CN202210030875.0A CN202210030875A CN114252028B CN 114252028 B CN114252028 B CN 114252028B CN 202210030875 A CN202210030875 A CN 202210030875A CN 114252028 B CN114252028 B CN 114252028B
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention discloses a compact four-facula two-dimensional corner detection device combining a laser triangulation method, which comprises a laser, a one-half beam splitting unit, a two-half beam splitting unit and a photoelectric detection unit, wherein the one-half beam splitting unit comprises a half wave plate I, a polarization beam splitting prism I, a quarter wave plate II, an isosceles right angle prism I and an isosceles right angle prism II, the two-half beam splitting unit comprises a half wave plate II, a polarization beam splitting prism II, a quarter wave plate III, a quarter wave plate IV, an isosceles right angle prism III and an isosceles right angle prism IV, and the photoelectric detection unit comprises a detected plane, an imaging lens, a CCD camera and a computer. According to the invention, the measurement sensitivity is adjusted by moving the isosceles right prism, the measurement result is not affected by vibration of an object, and the measurement range is large; the method has the advantages that a reflector or a mark point is not required to be arranged on an object, the operation is convenient, and ideal non-contact measurement can be realized; the device has simple and compact structure and low cost.
Description
Technical Field
The invention relates to the technical field of optical measurement and mechanical measurement, in particular to a compact four-facula two-dimensional corner detection device combined with a laser triangulation method.
Background
Two-dimensional rotation angle is a very important geometrical parameter in the measurement. With the continuous development of the current society technology, the two-dimensional angle measurement method is also continuously improved. Compared with the traditional mechanical angle measurement method, the optical measurement method has the characteristics of non-contact measurement, high precision and the like, such as a circular grating method, a laser interferometry method, a laser collimation method and a laser triangulation method. In the optical measurement method, the round grating method measures the rotation angle by measuring the number of grating pitches rotated by the grating, so that the stability is good, the precision is high, but the requirements on equipment installation and the grating precision are high, and the resolution is difficult to ensure; the laser interferometry converts the object rotation angle measurement into the optical path difference of coherent light waves, the measurement accuracy is high, but the measurement result is easily influenced by environmental vibration and airflow, and the method is only applicable to small-angle measurement and has a small measurement range; the laser collimation method is based on the optical auto-collimation principle, a reflecting mirror is required to be installed on an object, the deflection of a collimated light beam reflected by a measured object is used for measuring a rotation angle, and the method is also suitable for small-angle measurement and has a limited measurement range; the laser triangulation method is characterized in that a beam of laser is incident on the surface of an object to be measured, then a CCD camera is used for imaging light spots on the surface of the object from another angle, and the rotation angle parameter is obtained by calculating the displacement of the light spots. In order to avoid the influence of vibration of the measured object, at least two parallel beams are generally required to generate two light spots in practical application, in this case, only one-dimensional rotation angle can be measured, further, a method of generating four light spots by four parallel beams can be used for measuring two-dimensional rotation angle, for example, in the current tilt angle measuring system based on laser triangulation, four approximately parallel beams are formed by using a double wedge mirror to detect the tilt angle and direction, and because the four beams formed by the system are not strictly parallel, the measurement result of the tilt angle or rotation angle can be influenced when the distance between the measured object and the measuring system is changed. Therefore, it is especially necessary to design a two-dimensional corner non-contact optical measuring device which is flexible to apply, has a large measuring range, does not need to install a reflecting mirror, has adjustable measuring sensitivity and is not influenced by the vibration of an object, and reliable technical guarantee is provided for two-dimensional corner measurement of a planar object.
Disclosure of Invention
The invention aims to provide a compact four-facula two-dimensional corner detection device combining a laser triangulation method, so as to solve the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the compact four-facula two-dimensional corner detection device comprises a laser, a beam splitting unit and a photoelectric detection unit, wherein the beam splitting unit comprises a half wave plate I, a polarization beam splitting prism I, a quarter wave plate II, an isosceles right angle prism I and an isosceles right angle prism II, the half wave plate I is arranged below the polarization beam splitting prism I, the laser is arranged below the half wave plate I, the quarter wave plate I and the isosceles right angle prism I are sequentially arranged on one side of the polarization beam splitting prism I, and the quarter wave plate II and the isosceles right angle prism II are sequentially arranged above the polarization beam splitting prism I;
the two-half four-beam splitting unit comprises a half wave plate II, a polarization beam splitting prism II, a quarter wave plate III, a quarter wave plate IV, an isosceles right angle prism III and an isosceles right angle prism IV, wherein the half wave plate II is arranged on one side of the polarization beam splitting prism II, which is close to the one-half beam splitting unit, the quarter wave plate III and the isosceles right angle prism III are sequentially arranged above the polarization beam splitting prism II, the quarter wave plate IV and the isosceles right angle prism IV are sequentially arranged on the other side of the polarization beam splitting prism II, the isosceles right angle prism III rotates 90 degrees around the axis of the vertical direction relative to the isosceles right angle prism II, and the isosceles right angle prism IV rotates 90 degrees along the axis of the horizontal direction relative to the isosceles right angle prism I;
the photoelectric detection unit comprises a detected plane, an imaging lens, a CCD camera and a computer, wherein the detected plane is positioned under the two-division four-beam unit, the imaging lens and the CCD camera are sequentially positioned above the detected plane in an inclined manner, and the CCD camera is connected with the computer through a data line.
Preferably, the half wave plate I is rotated to enable the vibration direction of linearly polarized light emitted by the laser to be 45 degrees with the fast axis direction of the polarization beam splitting prism I after passing through the half wave plate I, the fast axis directions of the quarter wave plate I and the quarter wave plate II are 45 degrees with the fast axis direction of the polarization beam splitting prism I, and the linearly polarized light beam emitted by the laser passes through the half beam splitting unit to form two linearly polarized light beams a and b which are equal in intensity, parallel to each other in emergent direction and orthogonal to each other in vibration direction.
Preferably, the half-wave plate II, the quarter-wave plate III and the quarter-wave plate IV have the same functions as the half-wave plate I, the quarter-wave plate I and the quarter-wave plate II; the beam a and the beam b pass through the two-to-four beam splitting unit to form the beam a 1 Beam a 2 And beam b 1 Beam b 2 The light beam a 1 Beam a 2 And beam b 1 Beam b 2 Is four parallel beams.
Preferably, the imaging lensOptical axis and the light beam a 1 Beam a 2 And beam b 1 Beam b 2 The included angle of the propagation direction of the CCD camera is an acute angle, and the imaging lens converges four light spots incident on the measured plane to form four light spot images on the target surface of the CCD camera.
Preferably, the isosceles right prism I and the isosceles right prism II can move in a certain range along the vertical direction and the horizontal direction respectively; the isosceles right prism III and the isosceles right prism IV can respectively move in a certain range along the direction perpendicular to the view.
Compared with the prior art, the invention has the following beneficial effects:
the invention applies the polarization beam splitting principle and the property of isosceles right prisms, and generates four beams with equal intensity and parallel mutually, and the beams are incident on a measured plane to form four light spots; the laser triangulation principle is adopted, the two-dimensional rotation angle of the measured object is obtained by utilizing the variation of the central position of the light spot, and meanwhile, the diffuse reflection imaging mode is adopted instead of the specular reflection mode, so that the measuring range of the device is improved. For small-angle measurement, the relative distance between four light spots is increased through the translation of the isosceles right prism, so that the measurement sensitivity of the device is improved, and the measurement accuracy is improved. The invention solves the defects of poor application flexibility, limited measurement range and the like of the prior art, and has the advantages of simultaneously detecting the two-dimensional rotation angle, ensuring that the detection result is not influenced by the vibration of the detected object and the like.
1. Compared with the single-light spot or two-light spot detection technology, the invention forms four parallel light beams by one light beam, is a compact four-light spot device, can realize two-dimensional angle real-time detection, can overcome vibration influence, and has high detection precision and reliable detection result.
2. Compared with a laser collimation method, the invention utilizes the principle of a laser triangulation method, calculates a two-dimensional rotation angle through the change of the relative positions of four light spots, does not need to install a reference mirror on a measured plane, is convenient to apply, has a larger rotation angle measurement range, and is an ideal non-contact measurement technology.
3. Compared with the existing inclination angle measurement system, the four light beams generated by the invention are strictly parallel so as to ensure the accuracy of measurement results; the four light spots formed by the method are consistent in shape and the same as the light spot shape of the incident light beam, so that the barycentric coordinates of the four light spots are easy to detect and the detection precision can be ensured; the invention can adjust the distance between four light spots, thereby conveniently adjusting the measurement sensitivity;
4. compared with a laser interferometry, the device has the advantages of simple structure, easy debugging and low cost, and is built by using a conventional optical element.
Drawings
FIG. 1 is a schematic illustration of the present invention;
FIG. 2 is a schematic diagram of the principle of operation of the quarter wave plate of the present invention;
FIG. 3 is a schematic diagram of the principle of operation and adjustment of the distance between light spots of the middle right angle prism of the present invention;
FIG. 4 is a schematic diagram of a two-dimensional angular state that can be detected according to the present invention.
In the figure: 1. the device comprises a laser, 2-1, a half wave plate I, 2-2, a half wave plate II, 3, a polarization beam splitting prism I, 4-1, a quarter wave plate I, 4-2, a quarter wave plate II, 5-1, an isosceles right angle prism I, 5-2, an isosceles right angle prism II, 6, a polarization beam splitting prism II, 7-1, a quarter wave plate III, 7-2, a quarter wave plate IV, 8-1, an isosceles right angle prism III, 8-2, an isosceles right angle prism IV, 9, a measured plane 10, an imaging lens, 11, a CCD camera, 12 and a computer.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 to 4, the present invention provides a technical solution:
a compact four-facula two-dimensional corner detection device combining a laser triangulation method comprises a laser 1, a one-split and two-split unit, a two-split and four-split unit and a photoelectric detection unit;
the half-wave plate I2-1 is arranged right below the polarization beam splitting prism I3, the laser 1 is arranged right below the half-wave plate I2-1, the quarter-wave plate I4-1 and the isosceles right angle prism I5-1 are sequentially arranged on one side of the polarization beam splitting prism I3 from inside to outside, and the quarter-wave plate II 4-2 and the isosceles right angle prism II 5-2 are sequentially arranged above the polarization beam splitting prism I3 from bottom to top;
the half wave plate I2-1 is rotated to enable the vibration direction of linearly polarized light emitted by the laser 1 to form a 45-degree angle with the fast axis direction of the polarization beam splitter prism I3 after passing through the half wave plate I2-1, and the fast axis direction of the quarter wave plate I4-1 and the fast axis direction of the polarization beam splitter prism I3 form a 45-degree angle linearly polarized light beam with the vibration direction and the fast axis direction of the polarization beam splitter prism I3 after passing through the half wave plate I2-1, so that two linearly polarized light beams with orthogonal polarization are formed after entering the polarization beam splitter prism I3, and the light beam reflected by the polarization beam splitter prism I3 is reflected by the isosceles right angle prism I5-1 after passing through the quarter wave plate I4-1 again and is completely transmitted by the polarization beam splitter prism I3 to form a light beam a; the light beam transmitted by the polarization beam splitting prism I3 passes through the quarter wave plate II 4-2 and then is reflected by the isosceles right angle prism II 5-2, and passes through the quarter wave plate II 4-2 again and then is completely reflected by the polarization beam splitting prism I3 to form a light beam b; the linearly polarized light beam a and the linearly polarized light beam b have equal intensities, the emergent directions are parallel to each other, and the vibration directions are orthogonal to each other.
The two-half beam splitting unit comprises a half wave plate II 2-2, a polarization beam splitting prism II 6, a quarter wave plate III 7-1, a quarter wave plate IV 7-2, an isosceles right angle prism III 8-1 and an isosceles right angle prism IV 8-2, wherein the half wave plate II 2-2 is arranged on one side of the polarization beam splitting prism II 6, which is close to the two-half beam splitting unit, the quarter wave plate III 7-1 and the isosceles right angle prism III 8-1 are sequentially arranged above the polarization beam splitting prism II 6 from bottom to top, the quarter wave plate IV 7-2 and the isosceles right angle prism IV 8-2 are sequentially arranged on the other side of the polarization beam splitting prism II 6 from inside to outside, the isosceles right angle prism III 8-1 rotates 90 degrees around a vertical axis relative to the isosceles right angle prism II 5-2, and the isosceles right angle prism IV 8-2 rotates 90 degrees around a horizontal axis relative to the isosceles right angle prism I5-1;
the half-wave plate II 2-2, the quarter-wave plate III 7-1 and the quarter-wave plate IV 7-2 have the same functions as the half-wave plate I2-1, the quarter-wave plate I4-1 and the quarter-wave plate II 4-2; rotating the half wave plate II 2-2 to enable the vibration direction of the light beam a and the light beam b to form an angle of 45 degrees with the fast axis direction of the polarization beam splitting prism II 6 after passing through the half wave plate II 2-2; similar to the light splitting principle of a light splitting and splitting unit, the light beam a is split into light beams a1 and a2, the light beam b is split into light beams b1 and b2, and the four light beams have equal intensity, mutually parallel propagation directions and are distributed in a rectangular shape in space.
The photoelectric detection unit comprises a detected plane 9, an imaging lens 10, a CCD camera 11 and a computer 12, wherein the detected plane 9 is positioned under the two-division four-beam unit, four parallel beams are incident on the detected plane 9, the imaging lens 10 and the CCD camera 11 are sequentially positioned above the detected plane 9 from bottom to top, the included angle between the optical axis of the imaging lens 10 and the propagation directions of the light beams a1, a2, b1 and b2 is an acute angle, the imaging lens 10 converges and images four light spots incident on the detected plane 9 on the target surface of the CCD camera 11 to form four-light-spot images, and the CCD camera 11 is connected with the computer 12 through a data line.
As shown in fig. 2, the vibration direction of the incident ray polarized light beam forms an angle of 45 degrees with the fast axis direction of the polarized beam splitting prism i 3, the light beam is split into two linearly polarized light beams with equal intensity after passing through the polarized beam splitting prism i 3, the light beam transmitted by the polarized beam splitting prism i 3 passes through the quarter wave plate ii 4-2 and becomes left-handed (or right-handed) circularly polarized light, then the light beam is reflected by the isosceles right angle prism ii 5-2 and becomes linearly polarized light after passing through the quarter wave plate ii 4-2 again, and the vibration direction of the light beam is converted into 90 degrees relative to the light beam when being incident, so that the light beam is totally reflected after passing through the polarized beam splitting prism 3.
As shown in fig. 3, the isosceles right prism i 5-1 and the isosceles right prism ii 5-2 can move within a certain range along the vertical and horizontal directions, respectively, and the isosceles right prism iii 8-1 and the isosceles right prism iv 8-2 can move within a certain range along the direction perpendicular to the view, respectively, so as to adjust the relative distance of four light spots; the beam emitted by the laser 1 passes through a beam splitting unit to form two parallel beams a and b, and the distance is set as x 1 . If the isosceles right prism II 5-2 moves downward along the vertical direction for a certain distance h, the distance between the two parallel beams becomes x 2 The distance between the light spots can be changed by translating the isosceles right prism within a certain range.
As shown in FIG. 4, the z-axis in the three-dimensional coordinate system represents the propagation directions of four light beams, the initial position of the measured plane 9 is assumed to be in the x-y plane, and the rotation angle generated when the measured plane 9 rotates around the x-axis is represented as θ x The rotation angle generated when rotating around the y-axis is denoted as θ y Therefore, the two-dimensional rotation angle which can be detected by the invention is theta x And theta y 。
Examples:
the following are only examples of the present invention, but not all. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
According to the arrangement shown in fig. 1, a laser 1 emits linearly polarized light beams, and the linearly polarized light beams are incident on a beam splitting and splitting unit to form two orthogonal linearly polarized light beams a and b with equal intensity and mutually parallel propagation directions; then enters a two-to-four beam splitting unit to form four beams a parallel to each other 1 Beam a 2 And beam b 1 Beam b 2 And is incident on the measured plane 9 at an approximately perpendicular angle to form four spots.
According to the measurement precision requirement and the structural size of the measured plane 9, the distance between the four light spots is adjusted by translating each isosceles right prism. Then, the image is formed on the target surface of the CCD camera 11 through the imaging lens 10, a four-spot image is obtained, and the four-spot image is transmitted into the computer 12 through a data line.
The system calibration is required before the actual rotation angle is measured, and a one-dimensional rotation angle such as theta is determined x The relation between the light spot distance variation quantity comprises the following specific steps: the measured plane 9 is arranged on a rotating platform with a known rotation angle, and a series of one-dimensional rotation angles with a known size are gradually generated; after the measured plane 9 rotates, the CCD camera 11 collects corresponding four-spot images and inputs the images into the computer 12; selecting the gravity center position of the lower left light spot as a reference point, and calculating the relative variation of the light spot position by using an image processing technology; based on a group of rotation angle and light spot position variation data, theta is obtained through data fitting x Mathematical relationship with spot offset. θ y The relation calibration method between the offset of the light spot and the offset of the light spot is the same as the process.
During formal measurement, when the measured plane 9 does not rotate, a frame of four-spot image is acquired, after rotation, a frame of four-spot image is acquired, the center of gravity position of a lower left spot is selected as a reference point, the relative variation of the spot positions in the two frames of images is calculated, and the two-dimensional rotation angle is calculated after substituting the relative variation into a calibrated mathematical relation.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides a compact four facula two-dimensional corner detection device of combination laser triangle method, includes laser instrument (1), one divides two beam splitting unit, two quartering beam splitting unit and photoelectric detection unit, its characterized in that: the one-half beam splitting unit comprises a half wave plate I (2-1), a polarization beam splitting prism I (3), a quarter wave plate I (4-1), a quarter wave plate II (4-2), an isosceles right angle prism I (5-1) and an isosceles right angle prism II (5-2), wherein the half wave plate I (2-1) is arranged right below the polarization beam splitting prism I (3), the laser (1) is arranged right below the half wave plate I (2-1), the quarter wave plate I (4-1) and the isosceles right angle prism I (5-1) are sequentially arranged on one side of the polarization beam splitting prism I (3) from inside to outside, and the quarter wave plate II (4-2) and the isosceles right angle prism II (5-2) are sequentially arranged right above the polarization beam splitting prism I (3) from bottom to top;
the two-half beam splitting unit comprises a half wave plate II (2-2), a polarization beam splitting prism II (6), a quarter wave plate III (7-1), a quarter wave plate IV (7-2), an isosceles right angle prism III (8-1) and an isosceles right angle prism IV (8-2), wherein the half wave plate II (2-2) is arranged on one side of the polarization beam splitting prism II (6) close to the one-half beam splitting unit, the quarter wave plate III (7-1) and the isosceles right angle prism III (8-1) are sequentially arranged right above the polarization beam splitting prism II (6) from bottom to top, the quarter wave plate IV (7-2) and the isosceles right angle prism IV (8-2) are sequentially arranged on the other side of the polarization beam splitting prism II (6) from inside to outside, the isosceles right angle prism III (8-1) rotates 90 degrees around a vertical axis relative to the isosceles right angle prism II (5-2), and the isosceles right angle prism IV (8-2) rotates around a horizontal axis 90 degrees relative to the isosceles right angle prism I (5-1).
The photoelectric detection unit comprises a detected plane (9), an imaging lens (10), a CCD camera (11) and a computer (12), wherein the detected plane (9) is positioned under the bisection and four-beam splitting unit, the imaging lens (10) and the CCD camera (11) are sequentially positioned above the detected plane (9) from bottom to top, and the CCD camera (11) is connected with the computer (12) through a data line.
2. The compact four-spot two-dimensional rotation angle detection device combined with the laser triangulation method as set forth in claim 1, wherein: the half wave plate I (2-1) is rotated to enable the vibration direction of linearly polarized light emitted by the laser (1) after passing through the half wave plate I (2-1) to form an angle of 45 degrees with the fast axis direction of the polarization beam splitting prism I (3), the fast axis directions of the quarter wave plate I (4-1) and the quarter wave plate II (4-2) form an angle of 45 degrees with the fast axis direction of the polarization beam splitting prism I (3), and two linearly polarized light beams a and b with equal intensity, mutually parallel emergent directions and mutually orthogonal vibration directions are formed after the linearly polarized light beams emitted by the laser (1) pass through the half beam splitting unit.
3. The compact four-spot two-dimensional rotation angle detection device combined with the laser triangulation method as set forth in claim 2, wherein: the half-wave plate II (2-2), the quarter-wave plate III (7-1) and the quarter-wave plate IV (7-2) have the same functions as the half-wave plate I (2-1), the quarter-wave plate I (4-1) and the quarter-wave plate II (4-2); the beam a and the beam b pass through the two-to-four beam splitting unit to form the beam a 1 Beam a 2 And beam b 1 Beam b 2 The light beam a 1 Beam a 2 And beam b 1 Beam b 2 Is four parallel beams.
4. A compact four-spot two-dimensional rotation angle detection device combined with laser triangulation method according to claim 3, wherein: an optical axis of the imaging lens (10) and the light beam a 1 Beam a 2 And beam b 1 Beam b 2 The included angle of the propagation direction of the CCD camera (11) is an acute angle, and the imaging lens (10) converges four light spots incident on the measured plane (9) to form four light spot images on the target surface of the CCD camera.
5. The compact four-spot two-dimensional rotation angle detection device combined with the laser triangulation method as set forth in claim 1, wherein: the isosceles right prism I (5-1) and the isosceles right prism II (5-2) can move in a certain range along the vertical direction and the horizontal direction respectively; the isosceles right prism III (8-1) and the isosceles right prism IV (8-2) can move within a certain range along the direction perpendicular to the view respectively.
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| CN213147728U (en) * | 2020-09-04 | 2021-05-07 | 内蒙古工业大学 | Online thickness measuring device for planar wood products based on collimation wide light beam |
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