CN114112087B - An array type atomic layer thermopile heat flow sensor - Google Patents
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Abstract
Description
技术领域Technical Field
本发明属于航空航天空气动力学地面测试领域，更具体地涉及一种阵列式原子层热电堆热流传感器。The present invention belongs to the field of aerospace aerodynamic ground testing, and more specifically relates to an array-type atomic layer thermopile heat flow sensor.
背景技术Background Art
在航空、航天、能源、建筑等众多国民经济领域中，热流测量发挥着重要的作用，是一项关键的测量技术，也是一项值得研究的课题。尤其在航空航天领域，飞行器表面热流参数的获取能够为飞行器表面流动机理研究和飞行器设计优化提供重要的参考数据。在高超声速气动热问题中，表面热流和摩擦力的大小都与边界层流态密切相关，高超声速边界层理论和试验研究是认识转捩机理的重要手段。通过开展阵列式高频响热流测量方法研究，可获得高超声速边界层中高频扰动波传播、演化，以及它们之间相互干扰的关键信息。In many national economic fields such as aviation, aerospace, energy, and construction, heat flow measurement plays an important role. It is a key measurement technology and a topic worth studying. Especially in the field of aerospace, the acquisition of aircraft surface heat flow parameters can provide important reference data for the study of aircraft surface flow mechanism and aircraft design optimization. In hypersonic aerodynamic thermal problems, the magnitude of surface heat flow and friction are closely related to the boundary layer flow state. Theoretical and experimental research on hypersonic boundary layers is an important means to understand the transition mechanism. By conducting research on array-type high-frequency response heat flow measurement methods, key information on the propagation and evolution of high-frequency disturbance waves in the hypersonic boundary layer, as well as their mutual interference, can be obtained.
在2010年之前，国内外在热流测量领域应用的传感器主要有薄膜热电阻、热电偶、同轴热电偶等，这些技术利用测点温度或温差随时间的变化，根据半无限长假设的基材传热模型计算热流率。这些传感器最大的缺点在于以下两个方面：Before 2010, the sensors used in the field of heat flow measurement at home and abroad mainly included thin film thermal resistors, thermocouples, coaxial thermocouples, etc. These technologies use the change of the temperature or temperature difference of the measuring point over time to calculate the heat flow rate based on the semi-infinite length assumption of the substrate heat transfer model. The biggest disadvantages of these sensors are the following two aspects:
①从数据的噪声源来看，通过温度的时间梯度计算热流率无法避免温度测量噪声信号的干扰，从而导致热流测量结果的信噪比很难提高；① From the perspective of data noise sources, calculating heat flow rate through the time gradient of temperature cannot avoid the interference of temperature measurement noise signals, which makes it difficult to improve the signal-to-noise ratio of heat flow measurement results;
②从传感器的测量时长来看，无论薄膜传感器还是同轴热电偶，其基底/材料厚度限制了热流测量时长，这样就很大程度上限制了传感器的应用灵活性。② From the perspective of the sensor's measurement time, whether it is a thin film sensor or a coaxial thermocouple, the thickness of its substrate/material limits the heat flow measurement time, which greatly limits the application flexibility of the sensor.
利用高温超导材料薄膜内部的热电各向异性特点，Lengfellner等于1991年首次利用Seebeck张量建立了YBCO热流传感器的数学模型，证明了原子层热电堆(ALTP)技术可直接测量热流率等优点。2007年后，斯图加特大学Rodiger在其博士论文中发展了原子层热电堆的静、动态标定方法，评估了热流测量不确定度，同时通过低速、超声速、高超声速试验验证，证明了该传感器在频响范围、测量不确定度方面的优势。Using the thermoelectric anisotropy characteristics of high-temperature superconducting material films, Lengfellner et al. first used Seebeck tensors to establish a mathematical model of YBCO heat flow sensor in 1991, proving the advantages of atomic layer thermopile (ALTP) technology in directly measuring heat flow rate. After 2007, Rodiger of the University of Stuttgart developed static and dynamic calibration methods for atomic layer thermopile in his doctoral thesis, evaluated the uncertainty of heat flow measurement, and verified the advantages of the sensor in frequency response range and measurement uncertainty through low-speed, supersonic and hypersonic tests.
相比于传统通过测温间接测量热流的方法，原子层热电堆技术可通过传感器两端电势差利用灵敏系数直接换算热流率，避免了由温度信号噪声以及计算过程带来的热流率测量偏差，同时具有更高的频率响应特性。Compared with the traditional method of indirectly measuring heat flow through temperature measurement, the atomic layer thermopile technology can directly convert the heat flow rate using the sensitivity coefficient through the potential difference at both ends of the sensor, avoiding the heat flow rate measurement deviation caused by temperature signal noise and the calculation process, and at the same time has a higher frequency response characteristic.
目前，国内外基于原子层热电堆技术研究开发的热流传感器均为单点式传感器，而在航空航天空气动力学地面测试领域，往往需要采集模型表面一定区域内的热流率数据。在测量区域阵列排布多个单点式传感器的方式不仅安装结构复杂，而且分辨率较低。At present, the heat flow sensors developed based on atomic layer thermopile technology at home and abroad are all single-point sensors. In the field of aerospace aerodynamic ground testing, it is often necessary to collect heat flow rate data in a certain area on the model surface. Arranging multiple single-point sensors in an array in the measurement area not only has a complex installation structure, but also has a low resolution.
发明内容Summary of the invention
为解决现有技术中采用单点式传感器阵列排布方式的安装结构复杂，而且分辨率较低问题，本发明提供一种阵列式原子层热电堆热流传感器。In order to solve the problems of complex installation structure and low resolution of the single-point sensor array arrangement method in the prior art, the present invention provides an array-type atomic layer thermopile heat flow sensor.
本发明采用的具体方案为：一种阵列式原子层热电堆热流传感器，所述传感器包括传感器基座、信号引出端、敏感层基底、敏感层；所述的传感器基座上阵列排布多个凹槽，所述凹槽内粘接敏感层基底；所述的敏感层基底上沉积有敏感层；所述敏感层两端分别连接一个信号引出端；所述的敏感层通过信号引出端与外部测量设备连接。The specific scheme adopted by the present invention is: an array-type atomic layer thermopile heat flow sensor, the sensor includes a sensor base, a signal lead-out terminal, a sensitive layer substrate, and a sensitive layer; a plurality of grooves are arranged in an array on the sensor base, and the sensitive layer substrate is bonded in the grooves; a sensitive layer is deposited on the sensitive layer substrate; two ends of the sensitive layer are respectively connected to a signal lead-out terminal; and the sensitive layer is connected to an external measuring device through the signal lead-out terminal.
所述传感器基座的材料为氧化铝陶瓷材料。The sensor base is made of alumina ceramic material.
所述传感器基座与被测构件之间通过螺纹紧固件连接，所述传感器上的敏感层一侧的端面与被测构件表面边缘平齐。The sensor base is connected to the measured component via a threaded fastener, and the end surface of one side of the sensitive layer on the sensor is flush with the edge of the surface of the measured component.
所述的信号引出端由固化在敏感层两端的导电浆料和金属引线组成。The signal lead-out terminal is composed of conductive paste solidified at both ends of the sensitive layer and metal leads.
所述金属引线由传感器基座上阵列排布的多个凹槽内的小孔穿出，使用胶黏剂与传感器基座粘接在一起，再通过导电浆料使其与敏感层之间形成可靠的导电连接。The metal lead wires pass through small holes in a plurality of grooves arranged in an array on the sensor base, are bonded to the sensor base using an adhesive, and then form a reliable conductive connection with the sensitive layer using a conductive paste.
所述敏感层基底上开有通孔；所述敏感层基底上的通孔分别与凹槽内的通孔同轴对齐，使金属引线能够连续穿过传感器基座上的通孔和敏感层基底上的通孔。The sensitive layer substrate is provided with through holes; the through holes on the sensitive layer substrate are coaxially aligned with the through holes in the grooves, so that the metal leads can continuously pass through the through holes on the sensor base and the through holes on the sensitive layer substrate.
所述敏感层基底为钛酸锶材料。The sensitive layer substrate is strontium titanate material.
所述敏感层为氧化钇钡铜材料，所述敏感层通过真空磁控溅射镀膜工艺沉积在敏感层基底外端面的两个通孔之间，厚度200nm～500nm，通过导电浆料使其与金属引线之间形成可靠电连接。The sensitive layer is made of yttrium barium copper oxide material, which is deposited between two through holes on the outer end surface of the sensitive layer substrate by vacuum magnetron sputtering coating process, with a thickness of 200nm to 500nm, and is reliably electrically connected to the metal lead by conductive paste.
所述传感器的形状为扇形。The sensor is in the shape of a sector.
本发明相对于现有技术具有如下有益效果：Compared with the prior art, the present invention has the following beneficial effects:
本发明传感器基座上阵列排布多个凹槽，所述凹槽内粘接敏感层基底；所述的敏感层基底上沉积有敏感层；所述敏感层两端分别连接一个信号引出端；所述的敏感层通过信号引出端与外部测量设备连接，相对于以往的单点式原子层热电堆测量方法，可实现多点同步测量，空间分辨率高，热流频响高。The sensor base of the present invention has a plurality of grooves arranged in an array, a sensitive layer substrate is bonded in the grooves; a sensitive layer is deposited on the sensitive layer substrate; two ends of the sensitive layer are respectively connected to a signal lead-out terminal; the sensitive layer is connected to an external measuring device via the signal lead-out terminal, and compared with the previous single-point atomic layer thermopile measurement method, multi-point synchronous measurement can be achieved, with high spatial resolution and high heat flow frequency response.
另一方面，本发明结构简单，加工容易；采用螺纹紧固件连接，安装方便；相对于以往的单点式原子层热电堆测量方法，可实现多点同步测量，空间分辨率高；可根据被测构件外形进行传感器基座外形设计，适用于航空航天领域高超声速飞行器气动热与边界层转捩高频扰动信号测量。On the other hand, the present invention has a simple structure and is easy to process. It adopts threaded fasteners for connection and is easy to install. Compared with the previous single-point atomic layer thermopile measurement method, it can realize multi-point synchronous measurement with high spatial resolution. The sensor base shape can be designed according to the shape of the component to be measured, and is suitable for the measurement of high-frequency disturbance signals of aerodynamic heat and boundary layer transition of hypersonic aircraft in the aerospace field.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明的阵列式原子层热电堆热流传感器的三维结构图；FIG1 is a three-dimensional structural diagram of an array-type atomic layer thermopile heat flow sensor of the present invention;
图2为本发明的阵列式原子层热电堆热流传感器的敏感单元的结构示意图。FIG. 2 is a schematic structural diagram of a sensitive unit of an array-type atomic layer thermopile heat flow sensor of the present invention.
其中，附图标记分别为：Wherein, the reference numerals are respectively:
1.传感器基座；2.敏感单元；3.敏感层基底；4.敏感层；5.金属引线。1. Sensor base; 2. Sensitive unit; 3. Sensitive layer substrate; 4. Sensitive layer; 5. Metal lead.
具体实施方式DETAILED DESCRIPTION
下面结合附图和具体实施方式对本发明作进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
本发明提供一种阵列式原子层热电堆热流传感器。该传感器主要由传感器基座1、信号引出端、敏感层基底3、敏感层4等组成，其中敏感层基底、敏感层和信号引出端组成一个敏感单元，传感器基座上的每个凹槽内安装一个敏感单元。The present invention provides an array-type atomic layer thermopile heat flow sensor. The sensor is mainly composed of a sensor base 1, a signal lead-out terminal, a sensitive layer substrate 3, a sensitive layer 4, etc., wherein the sensitive layer substrate, the sensitive layer and the signal lead-out terminal form a sensitive unit, and a sensitive unit is installed in each groove on the sensor base.
传感器基座采用氧化铝陶瓷材料，作为整个传感器的封装支撑结构，与被测构件之间通过螺纹紧固件连接。传感器基座的外形可根据被测构件的外形进行设计，如用于高超声速飞行器风洞试验热流测量的传感器基座外形需按照风洞试验模型的外形进行设计，使其对流场的干扰或影响降至最低。The sensor base is made of alumina ceramic material, which serves as the packaging support structure of the entire sensor and is connected to the component under test through threaded fasteners. The shape of the sensor base can be designed according to the shape of the component under test. For example, the shape of the sensor base used for heat flow measurement in the wind tunnel test of a hypersonic aircraft needs to be designed according to the shape of the wind tunnel test model to minimize its interference or influence on the flow field.
在传感器基座上阵列排布多个外形尺寸相同的凹槽，用于安装敏感层基底。凹槽深度与敏感层基底高度一致，敏感层基底放入凹槽后能够保持外端面边缘平齐。每个凹槽底部开有两个通孔，孔径为0.5mm，用于安装金属引线5。A plurality of grooves of the same outer dimensions are arranged in an array on the sensor base for mounting the sensitive layer substrate. The depth of the groove is consistent with the height of the sensitive layer substrate, and the sensitive layer substrate can keep the outer end face edge flush after being placed in the groove. Two through holes with a hole diameter of 0.5 mm are opened at the bottom of each groove for mounting the metal lead 5.
敏感层基底为钛酸锶材料，通过胶黏剂粘接在凹槽内。敏感层基底上同样开有两个通孔，孔径为0.5mm。当敏感层基底安装在传感器基座的凹槽内时，敏感层基底上的两个通孔分别与凹槽内的两个通孔同轴对齐，使金属引线能够连续穿过传感器基座上的通孔和敏感层基底上的通孔。The sensitive layer substrate is made of strontium titanate material and is bonded in the groove by adhesive. There are also two through holes on the sensitive layer substrate, with a hole diameter of 0.5 mm. When the sensitive layer substrate is installed in the groove of the sensor base, the two through holes on the sensitive layer substrate are coaxially aligned with the two through holes in the groove, so that the metal lead can continuously pass through the through holes on the sensor base and the through holes on the sensitive layer substrate.
金属引线通过胶黏剂粘接在传感器基座的通孔内，金属引线的一侧端面与敏感层基底外端面平齐。敏感层为氧化钇钡铜材料，通过真空磁控溅射镀膜工艺沉积在敏感层基底外端面的两个通孔之间，厚度200nm～500nm，通过导电浆料使其与金属引线之间形成可靠电连接。金属引线和导电浆料构成信号引出端，起到传递电信号的作用。The metal lead is bonded to the through hole of the sensor base by adhesive, and one end face of the metal lead is flush with the outer end face of the sensitive layer substrate. The sensitive layer is made of yttrium barium copper oxide material, which is deposited between the two through holes on the outer end face of the sensitive layer substrate by vacuum magnetron sputtering coating process, with a thickness of 200nm to 500nm. A reliable electrical connection is formed between it and the metal lead through conductive paste. The metal lead and conductive paste constitute the signal lead-out terminal, which plays the role of transmitting electrical signals.
图1所示传感器基座就是按照高超声速风洞飞行器翼舵缝隙干扰区测量试验模型进行的外形设计，其测量面为一个扇形平面，可以实现舵轴附近干扰区热流的高空间分辨率的多点测量。The sensor base shown in Figure 1 is designed according to the appearance of the hypersonic wind tunnel vehicle wing-rudder gap interference zone measurement test model. Its measurement surface is a fan-shaped plane, which can achieve multi-point measurement of heat flow in the interference zone near the rudder axis with high spatial resolution.
在传感器基座上沿径向和环向阵列排布多个外形尺寸相同的凹槽，用于安装敏感层基底，凹槽间距典型尺寸为径向3mm，环向5mm～5.3mm。凹槽典型尺寸为长度4mm，宽度2mm，深度0.5mm，与敏感层基底外形尺寸一致，敏感层基底放入凹槽后能够保持外端面边缘平齐。Multiple grooves with the same dimensions are arranged in radial and circumferential arrays on the sensor base for mounting the sensitive layer substrate. The typical dimensions of the groove spacing are 3mm in radial direction and 5mm to 5.3mm in circumferential direction. The typical dimensions of the grooves are 4mm in length, 2mm in width, and 0.5mm in depth, which are consistent with the dimensions of the sensitive layer substrate. After the sensitive layer substrate is placed in the groove, the outer end face edge can be kept flush.
本发明解决了现有技术中采用单点式传感器阵列排布方式的安装结构复杂，而且分辨率较低问题，且可实现多点同步测量，具备空间分辨率高，热流频响高的优点。The present invention solves the problems of complex installation structure and low resolution of the single-point sensor array arrangement in the prior art, and can realize multi-point synchronous measurement, and has the advantages of high spatial resolution and high thermal flow frequency response.
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