CN114114674B - Light beam stabilizing device based on inertial feedback-free correction - Google Patents
Light beam stabilizing device based on inertial feedback-free correction Download PDFInfo
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Abstract
The invention discloses a light beam stabilizing device based on inertial feedback correction. The invention realizes the position and angle control of the light beam by using the light beam deflector, completely eliminates the mechanical movement in the control execution component and eliminates the interference of environmental noise. And the advantage of high response frequency (can reach more than 1 MHz) of the acousto-optic deflector is utilized to realize rapid and high-precision beam angle drift correction. The stable light beam obtained by the method and the device can be widely used for super-resolution microscopic imaging systems and high-precision laser direct-writing photoetching systems.
Description
Technical Field
The invention belongs to the field of ultra-precise optical imaging and writing, and particularly relates to a light beam stabilizing device based on inertial feedback correction.
Background
With the continuous expansion of the application field of laser equipment and the continuous improvement of requirements, the performance index of the laser equipment to a light source system is also continuously enhanced, however, the laser equipment is difficult to avoid the problem of light beam drift due to the influence of factors such as the principle, the structure and the external environment of the laser equipment. Besides the drift of the light source when generating light beams, the stability of light beam conduction is affected by the structural characteristics and environmental changes of the device in the subsequent light path, for example, the mechanical structural member is strained by temperature and external force, the air flow density change in the system cavity, electromagnetic interference and the like can cause the light beams to deviate from an ideal conduction path, and finally obtained light spots are affected by the superposition of the factors, are translated in position and are deflected in angle. Usually, a precise optical system is placed in a closed controlled constant-temperature and constant-humidity environment, vibration isolation platforms are used for passive damping, and an air filtering system is arranged, so that the influence of the environment on the stability of an optical path in the system can be avoided to a certain extent. However, as the precision requirement of precision optical systems is increasing, the cost of high-specification environmental control systems is difficult to control, the amount of beam drift remaining after control by passive means such as environmental control cannot be ignored, and the beam drift of optical systems needs to be controlled by introducing more effective means.
In general, the amount of beam drift can ultimately be equivalent to a shift in position, where there is a translation of the beam parallel to the desired axis, and an angle, where the beam forms an angle with the desired axis. The light beam drift phenomenon in the optical system can be regarded as a random real-time process, the light beam stabilizing device is used, the light beam pointing can be corrected in real time by using an active control means of monitoring feedback, and the light beam drift amount which cannot be controlled by a passive means is eliminated to the maximum extent, so that the optical system meets the preset precision requirement.
The existing light beam stabilizing device has obtained better stable control performance through optimization of various light path configurations and control algorithms. However, with the continuous improvement of performance indexes of precision optical systems, there still exists a certain short plate in current beam stabilizers, which mainly represents the limitation of beam stability performance caused by the performance of the actuator itself, in current beam stabilizers, the actuator is mainly a fast mirror driven by a mechanical device, the driving device is usually a voice coil motor driver or a piezoelectric ceramic driver, both the structure and the mirror have a certain inertia, which results in an excessively long response time during execution and a limitation of control frequency.
Disclosure of Invention
The invention aims to provide a light beam stabilizing device based on inertial feedback correction aiming at the defects of the prior art.
The invention is realized by the following technical scheme:
a light beam stabilizing device based on inertial feedback correction comprises two pairs of light beam deflectors, a first beam splitter prism, a second beam splitter prism, a first lens, a second lens, a first photoelectric sensor, a second photoelectric sensor and a controller; each pair of beam deflectors comprises an X-axis beam deflector and a Y-axis beam deflector which are vertically arranged and are respectively used for carrying out angle deflection on beams along the X direction and the Y direction of an incident beam, the incident beam deflected by the two pairs of beam deflectors is split into an emergent beam and a first reflected beam through the first beam splitter prism, and the first reflected beam is split into a first monitoring beam and a second monitoring beam through the second beam splitter prism; the first monitoring light beam reaches the first photoelectric sensor after passing through the first lens, and the second monitoring light beam reaches the second photoelectric sensor after passing through the second lens; the incident position of the incident beam reaching the second pair of beam deflectors and the detection surface of the first photoelectric sensor are in an object-image relationship with respect to the first lens; the second photoelectric sensor detection surface is arranged at the focal plane of the second lens. The first photoelectric sensor and the second photoelectric sensor respectively and independently monitor the position and the angle of the light beam and send the light beam to the controller, and the controller controls the two pairs of light beam deflectors to deflect and correct the light path of the incident light beam according to monitoring information.
Further, in the two pairs of beam deflectors, two X-axis beam deflectors are arranged in parallel and oppositely, and two Y-axis beam deflectors are arranged in parallel and oppositely.
Further, the beam deflector is an acousto-optic deflector or an electro-optic deflector.
Furthermore, when the controller controls the two pairs of beam deflectors to deflect and correct the light paths of the incident beams according to the monitoring information, the incident positions of the incident beams reaching the second pair of beam deflectors after passing through the first pair of beam deflectors are kept unchanged.
Further, the first photoelectric sensor and the second photoelectric sensor are position detectors or four-quadrant detectors.
Further, the device also comprises a second reflector for adjusting the direction of the first monitoring beam or the second monitoring beam to be parallel to the optical path of the incident beam.
Further, a third lens is also included; the third lens and the second lens form a lens group.
Furthermore, the high transmission reflectance of the first beam splitter prism transmits most of energy of the main beam and then emits the main beam from the rear end of the beam stabilizing device, and the rest of energy is reflected to enter the monitoring optical path. The second beam splitter prism has equal transmission reflectance and equally divides the first reflected beam into a first monitoring beam and a second monitoring beam.
The invention has the beneficial effects that: the invention provides a light beam stabilizing device based on angle non-inertial feedback correction, which utilizes a light beam deflector without inertial feedback to simultaneously realize the correction of the angle and the position of a light beam, removes all mechanical execution devices compared with the traditional light beam stabilizing device, improves the light beam drift correction precision of a system, and can greatly reduce the correction period and realize the rapid correction of the angle and the position of the light beam by means of the high control frequency of the light beam deflector.
Drawings
FIG. 1 is a schematic diagram of a light beam stabilizing apparatus based on angle-based inertial feedback correction according to the present invention;
FIG. 2 is a diagram of the optical path design for position drift detection and real-time correction in accordance with the present invention;
FIG. 3 is a diagram of the optical path design for detecting and correcting angular drift in real time according to the present invention;
FIG. 4 is a schematic diagram of the present invention using a beam deflector to correct the position of the optical path;
fig. 5 is a schematic diagram of correcting an optical path angle using a beam deflector according to the present invention.
In the figure, a 1-X axis first beam deflector, a 2-Y axis first beam deflector, a 3-X axis second beam deflector, a 4-Y axis second beam deflector, a 5-first beam splitting prism, a 6-second beam splitting prism, a 7-first lens, an 8-second lens, a 9-second reflecting mirror, a 10-third lens, an 11-first photoelectric sensor, a 12-second photoelectric sensor and a 13-controller.
Detailed Description
The present invention is further illustrated by the following examples and figures, but should not be construed as being limited thereby.
The invention provides a light beam stabilizing device based on inertial feedback correction, which comprises two pairs of light beam deflectors, a first beam splitter prism 5, a second beam splitter prism 6, a first lens 7, a second lens 8, a first photoelectric sensor 11, a second photoelectric sensor 12, a controller 13 and the like; each pair of beam deflectors comprises an X-axis beam deflector and a Y-axis beam deflector which are vertically arranged and are respectively used for carrying out angle deflection on beams along the X direction and the Y direction of an incident beam, the incident beam deflected by the two pairs of beam deflectors is split into an emergent beam and a first reflected beam through the first beam splitter 5, and the first reflected beam is split into a first monitoring beam and a second monitoring beam through the second beam splitter 6; the first monitoring light beam reaches the first photoelectric sensor 11 after passing through the first lens 7, and the second monitoring light beam reaches the second photoelectric sensor 12 after passing through the second lens 8; the incident position of the incident beam reaching the second pair of beam deflectors and the detection surface of the first photoelectric sensor 11 are in an object-image relationship with respect to the first lens 7; the detection surface of the second photoelectric sensor 12 is placed at the focal surface of the second lens 8. The first photoelectric sensor 11 and the second photoelectric sensor 12 respectively and independently monitor the position and the angle of the light beam and send the light beam to the controller 13, and the controller 13 controls the two pairs of beam deflectors to deflect and correct the light path of the incident light beam according to the monitoring information.
As a preferred scheme, as shown in fig. 1, the two pairs of beam deflectors include an X-axis first beam deflector 1 and a Y-axis first beam deflector 2 which constitute the first pair of beam deflectors, and an X-axis second beam deflector 3 and a Y-axis second beam deflector 4 which constitute the second pair of beam deflectors, wherein the X-axis first beam deflector 1 and the X-axis second beam deflector 3 are disposed in parallel and in reverse, and the Y-axis first beam deflector 2 and the Y-axis second beam deflector 4 are disposed in parallel and in reverse for performing two times of angular deflection on the beams along the incident beam X and Y directions, respectively, so as to realize X-axis and Y-axis position and angle control.
Further, a second mirror 9 is included for adjusting the direction of the first monitoring beam or the second monitoring beam to be parallel to the optical path of the incident beam to reduce the volume of the apparatus.
Further, a third lens 10 is included; the third lens 10 and the second lens 8 form a lens group which can be equivalent to a telephoto lens, so that the optical path can be shortened and a focus can be found during debugging. Fig. 1 is a structural diagram of a preferred embodiment of an apparatus, and the method for real-time stabilization of an incident light beam according to the present invention is further described with reference to the apparatus shown in fig. 1, specifically as follows:
an incident beam with the wavelength of 532nm enters the beam stabilizing device, and then is transmitted through two pairs of vertically placed beam deflectors (an X-axis first beam deflector 1, a Y-axis first beam deflector 2, an X-axis second beam deflector 3 and a Y-axis second beam deflector 4), wherein the acousto-optic deflector with the model of 4090-7, manufactured by Gooch & Housego of UK, can be selected, the scanning angle of the acousto-optic deflector is about 44mrad, the Bragg angle of the acousto-optic deflector is 1.76 degrees, each beam deflector can realize random deflection of the beam within a certain range near the Bragg angle of the beam deflector, and the angle deflection is carried out on a fixed plane according to the arrangement direction of the beam deflector. In the present invention, the light beam may be deflected twice in the direction of X, Y.
The light beams exiting from the two pairs of beam deflectors exit after passing through a first beam splitting prism 5 having 9: 1, so that 90% of energy of the main beam is transmitted and then exits from the rear end of the beam stabilizing device, and the remaining 10% of energy is reflected and enters a monitoring light path. The reflected beam passes through a transmission reflectance of 1: 1, a second beam splitter prism 6 is divided into a first monitoring beam and a second monitoring beam, the first monitoring beam is projected onto a detection surface of a first photoelectric sensor 11 after passing through a first lens 7, the photoelectric sensor processes signals and then sends position information to a controller 13, and the system obtains a beam position by detecting real-time displacement of a focusAn angular deflection condition is set. FIG. 2 is a diagram of the optical path design for position drift detection and real-time correction, where d0=30mm is the distance from the incident point of the second pair of beam deflectors to the center of the first beam splitter prism 5, d1=40mm is the distance from the center of the first beam splitter prism 5 to the center of the second beam splitter prism 6, d2=30mm is the distance from the center of the second beam splitter prism 6 to the center of the first lens 7, d3=100mm is the distance from the center of the first lens 7 to the detection plane of the first photosensor 11, and the focal length of the first lens 7 is f1=50mm, the above respective distance values satisfy the following relational expression (1):
according to the above relation, the incident position of the incident beam reaching the second pair of beam deflectors and the detection plane of the first photoelectric sensor 11 are in an object-image relation with respect to the first lens 7, when the two pairs of beam deflectors are matched with each other in a small range in front and back to adjust the incident beam angle, the respective deflection angle is calculated and selected by the controller, so that the beam still passes through the center of the first beam splitter prism 5 after the angle is changed, and due to the object-image relation, the light spot position at the object point is unchanged, and the light spot position on the first photoelectric sensor 11 is also unchanged; when the two pairs of beam deflectors are used for position correction, the position of the light spot on the first photoelectric sensor 11 will change correspondingly due to the existence of the object-image relationship. The first photosensor 11 can thus achieve independent monitoring of the beam position without being disturbed by the angle correction.
The second monitoring beam passes through the second lens 8, the first reflector 9 and the third lens 10 and then enters the detection surface of the second photoelectric sensor 12, and the system obtains the angle deflection condition through detecting the real-time displacement calculation of the focus. FIG. 3 is a diagram of the optical path design for detecting and real-time correcting angular drift, where d4=60mm is the distance of the second lens 8 from the center of the first mirror 9, d5=28mm is the distance from the center of the first mirror 9 to the third lens 10, d6The second lens 8 is selected from the Soranbo type according to the distance from the third lens 10 to the detection surface of the second photoelectric sensor 12Lens of LBF254-100-A, focal length f2=100mm, the third lens 10 is a lens with the model LD2060 of sorrel, and the focal length f3= -15mm, the equivalent focal length F of the combined rear lens group can be calculated according to relation (2):
the distance d from the third lens 10 to the detection surface of the second photoelectric sensor 126Can be calculated according to the relation (3):
according to the conversion result, the detection surface of the second photoelectric sensor 12 is placed at the focal plane of the lens group consisting of the second lens 8 and the third lens 10, and at this time, when only the position of the light beam changes, the position of the light spot at the focal plane is not changed, and when the angle of the light beam changes, the light spot at the focal plane correspondingly moves, and the change of the angle of the light beam can be obtained through calculation. The second photosensor 12 can thus achieve independent monitoring of the beam angle without being disturbed by position correction.
The position and the angle of the light beam are independently monitored through the two photoelectric sensors, information is transmitted to the controller 13, the controller calculates the information of the angle position, the correction quantity is calculated, the driving signal is fed back to the light beam deflector, and the real-time correction of the position and the angle of the light beam is realized. Specifically, the controller 13 precisely controls the deflection angles of the light beams in the X direction and the Y direction, respectively, by controlling the 4 beam deflector frequencies. Wherein, the same plane placement, namely, the front and back beam deflectors (the first beam deflector 1 of the X axis, the second beam deflector 3 of the X axis are placed in the same plane, and the first beam deflector 2 of the Y axis, the second beam deflector 4 of the Y axis) which are adjusted in the same axis are placed in the same plane) can realize the position and angle control of the beam on the plane through the matching of the respective angle settings. Fig. 4 is a schematic diagram illustrating the position control of a light beam by the cooperation of two front and back beam deflectors disposed on the same plane, wherein the beam deflectors are disposed in opposite directions (i.e., opposite deflection directions), the front beam deflector a is disposed, and the rear beam deflector B is disposed; when the incident light beam is shifted from the L1 position to the L2 position, the light beam exit angle and position need to be corrected to the exit angle and position of the L1 optical path. In the process, the incident angle of the beam deflector A is unchanged, the input frequency of the beam deflector A is increased to increase the emergent angle thereof, the incident point of the beam deflector B is restored to the incident intersection point of the L1 optical path and the beam deflector B, the incident angle of the beam deflector B is increased, the input frequency of the beam deflector B is required to be reduced, the emergent angle is reduced to restore the size before adjustment, and the emergent angle and the position of the L1 optical path are still maintained when the beam enters from the position L2. Fig. 5 is a schematic diagram of the angle control of the light beam achieved by the cooperation of two front and back light beam deflectors disposed on the same plane, where the light beam deflectors are disposed in opposite directions (i.e., opposite deflection directions), and when the incident light beam is deflected from an angle of L1 to an angle of L2, the exit angle and position of the light beam need to be corrected to the exit angle and position of the optical path of L1. In the process, the incident angle of the beam deflector A is increased, and the distance between the beam deflectors A, B is usually smaller than the distance between the beam deflection starting point and the beam deflector A, so the input frequency of the beam deflector A needs to be increased to increase the exit angle, the incident point of the beam deflector B is restored to the incident intersection point of the L1 optical path and the beam deflector B, the incident angle of the beam deflector B is increased, the input frequency of the beam deflector B is adjusted to decrease the exit angle, the exit angle of the exit light is corrected to the exit angle of the L1 optical path, and the exit angle and the position of the L1 optical path are still maintained when the light beam enters from the L2 angle. The above angle and position correction directions are vice versa. In the invention, the X-axis first light beam deflector 1 is matched with the X-axis second light beam deflector 3 to realize position and angle correction in the X direction of a light beam, and the Y-axis first light beam deflector 2 is matched with the Y-axis second light beam deflector 4 to realize position and angle correction in the Y direction of the light beam.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. This need not be, nor should all embodiments be exhaustive. And obvious variations or modifications of the invention may be made without departing from the scope of the invention.
Claims (8)
1. A light beam stabilizing device based on inertial feedback correction is characterized by comprising two pairs of light beam deflectors, a first beam splitter prism (5), a second beam splitter prism (6), a first lens (7), a second lens (8), a first photoelectric sensor (11), a second photoelectric sensor (12) and a controller (13); each pair of beam deflectors comprises an X-axis beam deflector and a Y-axis beam deflector which are vertically arranged and are respectively used for carrying out angle deflection on beams along the X direction and the Y direction of an incident beam, the incident beam deflected by the two pairs of beam deflectors is split into an emergent beam and a first reflected beam through the first beam splitter prism (5), and the first reflected beam is split into a first monitoring beam and a second monitoring beam through the second beam splitter prism (6); the first monitoring light beam reaches the first photoelectric sensor (11) after passing through the first lens (7), and the second monitoring light beam reaches the second photoelectric sensor (12) after passing through the second lens (8); the incident position of the incident beam reaching the second pair of beam deflectors and the detection surface of the first photoelectric sensor (11) are in an object-image relationship with respect to the first lens (7); the detection surface of the second photoelectric sensor (12) is placed at the focal surface of the second lens (8);
the first photoelectric sensor (11) and the second photoelectric sensor (12) respectively and independently monitor the position and the angle of the light beam and send the light beam to the controller (13), and the controller (13) controls the two pairs of light beam deflectors to deflect and correct the light path of the incident light beam according to monitoring information.
2. The apparatus of claim 1, wherein the two pairs of beam deflectors are arranged with the two X-axis beam deflectors in parallel and the two Y-axis beam deflectors in opposite directions.
3. The device of claim 1, wherein the beam deflector is an acousto-optic deflector or an electro-optic deflector.
4. The optical beam stabilizing apparatus based on non-inertial feedback correction as claimed in claim 1, wherein the controller (13) controls the two pairs of beam deflectors to deflect and correct the optical path of the incident beam according to the monitoring information, and keeps the incident position of the incident beam reaching the second pair of beam deflectors unchanged after the incident beam passes through the first pair of beam deflectors.
5. The optical beam stabilizing device based on no inertial feedback correction according to claim 1, wherein the first photo-sensor (11) and the second photo-sensor (12) are position detectors or four-quadrant detectors.
6. The beam stabilizer based on no inertial feedback correction of claim 1, further comprising a second mirror (9) for adjusting the direction of the first monitor beam or the second monitor beam to be parallel to the optical path of the incident beam.
7. The optical beam stabilizing device based on the inertial feedback correction of claim 1, further comprising a third lens (10); the third lens (10) and the second lens (8) form a lens group.
8. The device of claim 1, wherein the transmittance-reflectance of the first beam splitter prism is greater than 0.5, and the transmittance-reflectance of the second beam splitter prism is equal.
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