CN114068729A

CN114068729A - Double-sided back contact solar cell and back structure thereof

Info

Publication number: CN114068729A
Application number: CN202111390784.XA
Authority: CN
Inventors: 林文杰; 邱开富; 许文理; 杨新强; 王永谦; 陈刚
Original assignee: Zhejiang Aiko Solar Energy Technology Co Ltd; Guangdong Aiko Technology Co Ltd; Tianjin Aiko Solar Energy Technology Co Ltd; Zhuhai Fushan Aixu Solar Energy Technology Co Ltd
Current assignee: Zhejiang Aiko Solar Energy Technology Co Ltd; Guangdong Aiko Technology Co Ltd; Tianjin Aiko Solar Energy Technology Co Ltd; Zhuhai Fushan Aixu Solar Energy Technology Co Ltd
Priority date: 2021-11-23
Filing date: 2021-11-23
Publication date: 2022-02-18

Abstract

The application is suitable for the technical field of solar cells and provides a double-sided back contact solar cell and a back structure thereof. The back structure comprises a P-type contact region structure and an N-type contact region structure which are alternately arranged on the back of the silicon substrate, the P-type contact region structure is connected with the first conductive layer, and the N-type contact region structure is connected with the second conductive layer; at least one of the P-type contact region structure and the N-type contact region structure is a selectively passivated contact structure; the selectively passivated contact structure comprises a first passivated contact region and a second passivated contact region which are alternately arranged; the first passivation contact region comprises a first doping layer, a first passivation layer and a second doping layer which are sequentially stacked on the silicon substrate; the second passivation contact region comprises a second passivation layer, a third doping layer and a third passivation layer which are sequentially stacked on the silicon substrate; the thickness of the second doped layer is larger than that of the third doped layer, and the doping polarities of the second doped layer and the third doped layer are the same.

Description

Double-sided back contact solar cell and back structure thereof

Technical Field

The application belongs to the technical field of solar cells, and particularly relates to a double-sided back contact solar cell and a back structure thereof.

Background

The electricity generated by the solar cell is a sustainable clean energy source, and the solar cell can convert sunlight into electric energy by utilizing the photovoltaic effect of a semiconductor p-n junction, so that the photoelectric conversion efficiency is an important index for measuring the performance of the solar cell. In a solar cell, the loss of photoelectric conversion efficiency includes both electrical loss and optical loss. The electrical loss mainly comprises recombination loss and resistance loss caused by metal-semiconductor contact, and the optical loss mainly comprises shielding of a metal grid line of a light receiving surface and parasitic absorption of a front doped layer.

Solar cells in the related art have significant electrical properties by providing a passivated contact structure, which can achieve both low contact resistivity and low surface recombination. The passivating contact structure typically includes a passivating layer and a doped layer.

However, the absorption of light by the doped layers in the passivated contact structure is a 'parasitic' absorption, which does not contribute to the photocurrent, so that there is a severe parasitic absorption in the passivated contact area, resulting in a lower current for the solar cell. Therefore, how to reduce the parasitic absorption of the solar cell becomes a technical problem to be solved urgently.

Disclosure of Invention

The embodiment of the application provides a double-sided back contact solar cell and a back structure thereof, aiming at solving the problem of how to reduce the parasitic absorption of the solar cell.

The back structure of the double-sided back contact solar cell comprises a P-type contact region structure and an N-type contact region structure which are alternately arranged on the back of a silicon substrate of the double-sided back contact solar cell, wherein the P-type contact region structure is connected with a first conductive layer of the double-sided back contact solar cell, and the N-type contact region structure is connected with a second conductive layer of the double-sided back contact solar cell; at least one of the P-type contact region structure and the N-type contact region structure is a selectively passivated contact structure; the selectively passivated contact structure comprises first passivated contact regions and second passivated contact regions arranged alternately; the first passivation contact region comprises a first doping layer, a first passivation layer and a second doping layer which are sequentially stacked on the silicon substrate; the second passivation contact region comprises a second passivation layer, a third doping layer and a third passivation layer which are sequentially stacked on the silicon substrate; the thickness of the second doped layer is larger than that of the third doped layer, and the doping polarities of the second doped layer and the third doped layer are the same.

Further, the doping polarity of the first doping layer and the second doping layer is the same; the second passivation contact region further comprises a fourth doped layer arranged between the silicon substrate and the second passivation layer, and the doping polarity of the fourth doped layer is the same as that of the third doped layer.

Furthermore, the second passivation layer is of a porous structure, the hole region of the second passivation layer is provided with the fourth doping layer and/or the third doping layer, and the third doping layer and the fourth doping layer are connected through the doped hole region.

Furthermore, the first passivation layer is a porous structure, the first doping layer and/or the second doping layer are/is arranged in the hole region of the first passivation layer, and the second doping layer is connected with the first doping layer through the doped hole region.

Further, the first passivation layer is a porous structure, and the average pore diameter of the pores of the first passivation layer is less than 1000 nm; and/or the second passivation layer is a porous structure, and the average pore diameter of the pores of the second passivation layer is less than 1000 nm.

Furthermore, the first passivation layer is of a porous structure, and holes of the first passivation layer are formed by means of thermal diffusion impact; and/or the second passivation layer is of a porous structure, and holes of the second passivation layer are formed by thermal diffusion impact.

Furthermore, the first passivation layer is a porous structure, and the holes of the first passivation layer are distributed sparsely on the first passivation layer; and/or the second passivation layer is of a porous structure, and all holes of the second passivation layer are distributed on the second passivation layer in a scattered and sparse mode.

Furthermore, the first passivation layer is of a porous structure, and the ratio of the area of the hole region of the first passivation layer to the overall area of the first passivation layer is less than 20%; and/or the second passivation layer is of a porous structure, and the ratio of the area of the hole region of the second passivation layer to the whole area of the second passivation layer is less than 20%.

Furthermore, the first passivation layer is of a porous structure, and the first doping layers are discretely and locally distributed in each hole region of the first passivation layer; and/or the second passivation layer is of a porous structure, the second passivation contact region further comprises a fourth doping layer arranged between the silicon substrate and the second passivation layer, and the fourth doping layer is discretely and locally distributed in each hole region of the second passivation layer.

Further, the first passivation layer is a porous structure, and the first doping layer is completely and continuously arranged between the silicon substrate and the first passivation layer; and/or the second passivation layer is of a porous structure, the second passivation contact region further comprises a fourth doped layer arranged between the silicon substrate and the second passivation layer, and the fourth doped layer is completely and continuously arranged between the silicon substrate and the second passivation layer.

Furthermore, the first passivation layer is one or more of an oxide layer, a nitride layer, a oxynitride layer, a silicon carbide layer and an amorphous silicon layer; and/or the second passivation layer is one or more of an oxide layer, a nitride layer, a oxynitride layer, a silicon carbide layer and an amorphous silicon layer.

Further, the oxide layer is composed of one or more of a silicon oxide layer and an aluminum oxide layer.

Furthermore, the second passivation contact region further comprises a fourth doped layer disposed between the silicon substrate and the second passivation layer, and the doping concentration of the first doped layer is greater than or equal to that of the fourth doped layer.

Further, the thickness of the third doped layer is 0-500 nm.

The double-sided back contact solar cell of the embodiment of the application comprises the back structure of any one of the double-sided back contact solar cells.

Furthermore, the P-type contact region structure is a selective passivation contact structure, the double-sided back contact solar cell comprises a first conductive layer, the first conductive layer is connected with the second doped layer, and the width of the first conductive layer is greater than that of the second doped layer; and/or the N-type contact region structure is a selective passivation contact structure, the double-sided back contact solar cell comprises a second conductive layer, the second conductive layer is connected with the second doping layer, and the width of the second conductive layer is greater than that of the second doping layer.

Furthermore, the P-type contact region structure is a selective passivation contact structure, the double-sided back contact solar cell comprises a first conductive layer, a fourth passivation layer is arranged on the second doping layer, an opening is formed in the fourth passivation layer, and the first conductive layer penetrates through the opening to be connected with the second doping layer;

and/or the N-type contact region structure is a selective passivation contact structure, the double-sided back contact solar cell comprises a second conducting layer, a fourth passivation layer is arranged on the second doping layer, an opening is formed in the fourth passivation layer, and the second conducting layer penetrates through the opening to be connected with the second doping layer.

According to the double-sided back contact solar cell and the back structure thereof, due to the fact that the thickness of the third doping layer is small, parasitic absorption of the second passivation contact area can be reduced, and short-circuit current is improved. Meanwhile, the second doping layer is thicker, so that the conducting layer can be prevented from burning through the second doping layer, and the open-circuit voltage is improved. Meanwhile, the method has excellent interface passivation performance and lower contact resistance. Meanwhile, the P-type contact region structure and the N-type contact region structure are arranged on the back surface of the silicon substrate, so that the grid line shielding on the front surface of the silicon substrate can be reduced. In this way, the photoelectric conversion efficiency of the solar cell can be maximized.

Drawings

Fig. 1 is a schematic structural diagram of a backside structure of a double-sided back-contact solar cell according to an embodiment of the present disclosure in various implementations;

fig. 2-5 are schematic diagrams of various implementations of a selectively passivated contact structure in a backside structure of a double-sided back-contact solar cell according to an embodiment of the present disclosure;

fig. 6-10 are schematic structural diagrams of various implementations of a double-sided back-contact solar cell according to an embodiment of the present disclosure.

Description of the main element symbols:

a double-sided back contact solar cell 1000, a P-type contact region structure 101, an N-type contact region structure 102, a selective passivation contact structure 100, a silicon substrate 10, a first passivation contact region 11, a first doping layer 111, a first passivation layer 112, a second doping layer 113, a fourth passivation layer 114, an opening 1141, a second passivation contact region 12, a fourth doping layer 121, a second passivation layer 122, a third doping layer 123, and a third passivation layer 124; undoped region 200, first conductive layer 30, second conductive layer 50, second surface passivation layer 70.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral connections; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Due to the fact that the thickness of the third doping layer is small, parasitic absorption of the second passivation contact area can be reduced, and current is improved. Meanwhile, the second doping layer is thicker, so that the conducting layer can be prevented from burning through the second doping layer. Meanwhile, the method has excellent interface passivation performance and lower contact resistance. Meanwhile, the P-type contact region structure and the N-type contact region structure are arranged on the back surface of the silicon substrate, so that the grid line shielding on the front surface of the silicon substrate can be reduced. In this way, the photoelectric conversion efficiency of the solar cell can be maximized.

Example one

In the first embodiment of the present application, a backside structure of a double-sided back contact solar cell is provided, and for convenience of description, only the relevant portions of the embodiment of the present application are shown.

Referring to fig. 1 and fig. 2, a backside structure 1001 of a double-sided back contact solar cell provided in an embodiment of the present application includes a P-type contact region structure 101 and an N-type contact region structure 102 alternately disposed on a backside of a silicon substrate 10 of the double-sided back contact solar cell; the P-type contact region structure 101 is connected with a first conductive layer of the double-sided back contact solar cell, and the N-type contact region structure 102 is connected with a second conductive layer of the double-sided back contact solar cell; at least one of the P-type contact region structure 101 and the N-type contact region structure 102 is a selectively passivated contact structure 100;

the selectively passivated contact structure 100 includes: first and second

passivation contact regions

11 and 12 alternately arranged; the first passivation contact region 11 includes a first doping layer 111, a first passivation layer 112 and a second doping layer 113 sequentially stacked on the silicon substrate 10; the second passivation contact region 12 includes a second passivation layer 122, a third doping layer 123 and a third passivation layer 124 sequentially stacked on the silicon substrate 10; the thickness of the second doped layer 113 is greater than that of the third doped layer 123, and the doping polarities of the second doped layer 113 and the third doped layer 123 are the same.

In the back structure 1001 of the double-sided back contact solar cell according to the embodiment of the present application, the thickness of the third doped layer 123 is small, so that the parasitic absorption of the second passivation contact region 12 can be reduced, and the short-circuit current can be increased. Meanwhile, the second doped layer 113 has a larger thickness, so that the conductive layer can be prevented from burning through the second doped layer 113, and the open-circuit voltage can be increased. Meanwhile, the method has excellent interface passivation performance and lower contact resistance. Meanwhile, the P-type contact region structure 101 and the N-type contact region structure 102 are both disposed on the back surface of the silicon substrate 10, so that the gate line shading on the front surface of the silicon substrate 10 can be reduced. In this way, the photoelectric conversion efficiency of the solar cell can be maximized.

In particular, the silicon substrate 10 has a front side facing the sun and a back side facing away from the sun during normal operation. The front surface is a light receiving surface of the solar cell, and the back surface is arranged on the other side of the silicon substrate 10 departing from the front surface. That is, the front surface and the back surface are located on opposite sides of the silicon substrate 10. In the present embodiment, the silicon substrate 10 is an N-type single crystal silicon wafer. It is understood that in other embodiments, the silicon substrate 10 may be a polysilicon wafer or a quasi-monocrystalline silicon wafer, and the silicon substrate 10 may also be P-type. In this manner, the silicon substrate 10 may be provided according to actual use requirements, and the specific form of the silicon substrate 10 is not limited herein.

Specifically, the front surface of the silicon substrate 10 may be formed with an anti-reflection structure. Such as random pyramid structures, inverted pyramid structures, spherical cap structures, V-groove structures. The anti-reflection structure may be formed by texturing on the front surface of the silicon substrate 10. Therefore, the reflection of sunlight from the front can be reduced, and the photoelectric conversion efficiency can be improved.

Specifically, the back surface of the silicon substrate 10 may be a polished surface. For example, an alkaline polishing surface, an acid polishing surface, a mechanical polishing surface, and the like.

Specifically, the phrase "at least one of the P-type contact region structure 101 and the N-type contact region structure 102 is the selectively passivated contact structure 100" means that: the P-type contact region structure 101 is not a selectively passivated contact structure 100 and the N-type contact region structure 102 is a selectively passivated contact structure 100, as shown in fig. 1; alternatively, the P-type contact region structure 101 is a selectively passivated contact structure 100 and the N-type contact region structure 102 is not a selectively passivated contact structure 100; alternatively, both the P-type contact region structure 101 and the N-type contact region structure 102 are the selectively passivated contact structure 100. It is understood that the P-type contact region structure 101 or the N-type contact region structure 102 may be doped structures or other structures when the contact structure 100 is not selectively passivated.

The P-type contact region structure 101 is not the selectively passivated contact structure 100 and the N-type contact region structure 102 is the selectively passivated contact structure 100.

Specifically, "the doping polarities of the second doping layer 113 and the third doping layer 123 are the same" means that: the doping polarities of the second doping layer 113 and the third doping layer 123 are both N-type; alternatively, the doping polarities of the second doping layer 113 and the third doping layer 123 are both P-type.

Note that, in the case that the P-type contact region structure 101 is the selective passivation contact structure 100, the first doping layer 111, the second doping layer 113, the third doping layer 123, and the fourth doping layer 121 are all P-type doping layers; in the case that the N-type contact region structure 102 is the selective passivation contact structure 100, the first doping layer 111, the second doping layer 113, the third doping layer 123, and the fourth doping layer 121 are all N-type doping layers.

Specifically, the P-type contact region structures 101 and the N-type contact region structures 102 are alternately arranged on the back surface of the silicon substrate 10, which means that one P-type contact region structure 101 is arranged between two N-type contact region structures 102, and one N-type contact region structure 102 is arranged between two P-type contact region structures 101. In other words, the N-type contact region structures 102, the P-type contact region structures 101, and the N-type contact region structures 102 are arranged in sequence along the alternating direction.

In particular, the alternating arrangement of the first and second

passivation contact regions

11 and 12 means that, in the selective passivation contact structure 100, one first passivation contact region 11 is arranged between two second passivation contact regions 12. In other words, the second passivation contact region 12, the first passivation contact region 11 and the second passivation contact region 12 are arranged in sequence along the direction of the alternating arrangement.

Specifically, the direction in which the first passivation contact regions 11 and the second passivation contact regions 12 are alternately arranged is perpendicular to the thickness direction of the silicon substrate 10. The direction in which the first passivation contact regions 11 and the second passivation contact regions 12 are alternately arranged may be parallel to the length direction of the silicon substrate 10, may also be perpendicular to the length direction of the silicon substrate 10, and may also form an acute angle or an obtuse angle with the length direction of the silicon substrate.

Referring to FIG. 2, first doped layer 111 may alternatively have a thickness in the range of 50nm to 2000 nm. For example, 50nm, 51nm, 60nm, 100nm, 500nm, 1000nm, 1500nm, 1900nm, 2000 nm. In this way, contact resistance can be reduced and a field passivation effect can be provided.

Note that in other embodiments, the thickness of the first doped layer 111 may be 0 nm. In other words, the first doping layer 111 may be omitted and the first passivation contact region 11 includes the first passivation layer 112 and the second doping layer 113 sequentially stacked on the silicon substrate 10.

Referring to fig. 2, first doped layer 111 is optionally a doped monocrystalline silicon layer. Further, the first doping layer 111 may be formed by diffusion, ion implantation, source diffusion, or other processes; the first doping layer 111 may also be formed in the silicon substrate 10 by making a doping source directly through the first passivation layer 112 or through a hole in the porous structure when the second doping layer 113 is prepared.

Referring to fig. 2, the doping concentration of the first doping layer 111 is optionally less than the doping concentration of the second doping layer 113. Thus, by lightly doping, carrier lateral transport may be improved.

Referring to fig. 2, the first passivation layer 112 may have a thickness of 0.5nm to 20 nm. For example, 0.5nm, 0.6nm, 1nm, 1.5nm, 5nm, 10nm, 12nm, 15nm, 18nm, 20 nm.

Referring to fig. 2, the first passivation layer 112 may optionally include one or more of an oxide layer, a nitride layer, an oxynitride layer, a silicon carbide layer, and an amorphous silicon layer. Further, the oxide layer comprises one or more of a silicon oxide layer and an aluminum oxide layer. Thus, an excellent interface passivation effect can be provided.

Further, the silicon carbide layer comprises a hydrogenated silicon carbide layer. Thus, hydrogen in the hydrogenated silicon carbide layer enters the silicon substrate 10 under the action of a diffusion mechanism and a thermal effect, dangling bonds on the back surface of the silicon substrate 10 can be neutralized, and defects of the silicon substrate 10 are passivated, so that the defect energy level in a forbidden band is reduced, and the probability that carriers enter the second doped layer 113 through the first passivation layer 112 is improved.

Referring to fig. 3, optionally, the first passivation layer 112 is a porous structure, the hole region of the first passivation layer 112 has the first doped layer 111 and/or the second doped layer 113, and the second doped layer 113 is connected to the first doped layer 111 through the doped hole region. Specifically, the second doped layer 113 is connected to the silicon substrate 10 through the doped hole region and the first doped layer 111. In this manner, a conductive via is formed in the hole region of the first passivation layer 112, thereby forming a good resistivity of the first passivation layer 112, reducing the sensitivity of the thickness of the first passivation layer 112 to the effects of resistance, and thus reducing the control requirements for the thickness of the first passivation layer 112. Meanwhile, the first doping layer 111 disposed between the silicon substrate 10 and the first passivation layer 112 may form a separation electric field for enhancing surface electron holes, thereby improving a field passivation effect. Meanwhile, since the first doping layer 111 has a different fermi level from that of the silicon substrate 10, the first doping layer 111 changes the fermi level, increases the solid concentration of impurities (transition group metals), and may form an additional gettering effect. Meanwhile, the second doping layer 113 is connected with the silicon substrate 10 through the doped hole region and the first doping layer 111 on the porous structure, so that the overall resistance of the prepared battery is further reduced, and the conversion efficiency of the battery is finally improved.

In one example, the hole region has the first doping layer 111 therein and does not have the second doping layer 113; in another example, the hole region has the second doping layer 113 therein and does not have the first doping layer 111; in yet another example, the hole region has a first doping layer 111 and a second doping layer 113 therein. In addition, the first doped layer 111 and/or the second doped layer 113 may be filled with one or more holes, or may be filled with a portion of one or more holes, or some holes may not be filled in the first doped layer 111 and the second doped layer 113. The specific doping profile of the void region is not limited herein.

It is understood that in other embodiments, the first passivation layer 112 may also be a completely continuous structure. In other words, the first passivation layer 112 may not include holes.

Referring to fig. 3, optionally, the first passivation layer 112 is a porous structure, and the average pore diameter of the pores of the first passivation layer 112 is less than 1000 nm. Examples thereof include 4nm, 10nm, 16nm, 50nm, 480nm, 830nm, 960nm and 999 nm. Thus, the average pore diameter of the porous structure is on the order of nanometers, so that the total contact area of the second doped layer 113 and the silicon substrate 10 is greatly reduced, and recombination loss can be reduced. Still further, the porous structure has an average pore size of less than 500 nm. As such, the overall contact area of the second doped layer 113 and the silicon substrate 10 is further reduced, thereby further reducing recombination losses. Still further, 90% of the through-holes may have an average pore size of less than 1000 nm. Therefore, a certain floating space is provided, the product yield can be guaranteed under the condition of ensuring small composite loss, the production efficiency is improved, extra processes such as laser hole opening are not needed to be added, and the preparation process is simple.

Referring to fig. 3, optionally, the first passivation layer 112 is a porous structure, and the holes of the first passivation layer 112 are formed by thermal diffusion impact. Specifically, the temperature range of the thermal diffusion impact is 500 ℃ to 1200 ℃. For example, 500 deg.C, 510 deg.C, 550 deg.C, 600 deg.C, 700 deg.C, 800 deg.C, 820 deg.C, 900 deg.C, 950 deg.C, 1000 deg.C, 1050 deg.C, 1100 deg.C, 1150 deg.C, 1200 deg.C. Preferably, the thermal diffusion impact temperature is from 800 ℃ to 1100 ℃. For example, 800 deg.C, 820 deg.C, 900 deg.C, 950 deg.C, 1000 deg.C, 1050 deg.C, 1100 deg.C. Therefore, the formed porous structure has smaller holes, the average pore diameter is less than 1000nm, and the composite loss is favorably reduced. Moreover, the surface density of the holes is higher and can reach 10⁶-10⁸/cm²The transverse transport distance can be reduced, the current crowding effect is eliminated, the resistance loss is reduced, and the resistance reducing effect is better. It is understood that in other embodiments, the porous structure may be formed by chemical etching, dry etching, or other means.

Referring to fig. 3, optionally, the first passivation layer 112 is a porous structure, and the holes of the first passivation layer 112 are distributed sparsely on the first passivation layer 112. Therefore, the distribution state of the holes does not need to be strictly controlled, and the production efficiency is favorably improved.

Referring to fig. 3, optionally, the first passivation layer 112 is a porous structure, and a ratio of an area of the hole region of the first passivation layer 112 to an entire area of the first passivation layer 112 is less than 20%. In this way, the total area of the hole regions is controlled by the area ratio of the hole regions, so that the total contact area between the second doped layer 113 and the silicon substrate 10 is small, and the recombination loss is reduced while ensuring low contact resistance.

Referring to fig. 3, optionally, the first passivation layer 112 is a porous structure, and the first doping layer 111 is discretely and locally distributed in each hole region of the first passivation layer 112. Therefore, under the condition that the first doping layers 111 are distributed discretely, the orthographic projection of the holes of the passivation layer on the silicon substrate 10 can be covered by the orthographic projection of the first doping layers 111 on the silicon substrate 10, so that the second doping layers 113 can not be in direct contact with the silicon substrate 10, and the serious recombination caused by the fact that the second doping layers 113 are in direct contact with the silicon substrate 10 is avoided.

Referring to fig. 3, optionally, the first passivation layer 112 is a porous structure, and the first doped layer 111 is completely and continuously disposed between the silicon substrate 10 and the first passivation layer 112. Thus, since the first doping layer 111 is completely and continuously disposed, the orthographic projection of the hole of the passivation layer on the silicon substrate 10 is necessarily covered by the orthographic projection of the first doping layer 111 on the silicon substrate 10, and the second doping layer 113 cannot be in direct contact with the silicon substrate 10, thereby avoiding the serious recombination caused by the direct contact of the second doping layer 113 with the silicon substrate 10.

Further, the profile of the first doping layer 111 can be controlled by the doping duration. The longer the doping time, the more the doping amount, the higher the proportion of the first doping layer 111 will be continued until a completely covered layer of the first doping layer 111 is formed on the silicon substrate 10. Further, the junction depth of first doped layer 111 is less than 1.5 um. Thus, contact resistance can be reduced, and field effect passivation can be improved.

Specifically, the thickness of the second doped layer 113 ranges from 0nm to 500 nm. For example, 0.1nm, 50nm, 100nm, 150nm, 200nm, 250nm, 300nm, 350nm, 400nm, 450nm, 500 nm. Thus, the thickness range of the second doped layer 113 is wide, and can meet different requirements in actual production.

Preferably, the thickness of the second doped layer 113 ranges from 100nm to 500 nm. Examples thereof include 100nm, 150nm, 200nm, 250nm, 300nm, 350nm, 400nm, 450nm and 500 nm. Thus, the thicker second doping layer 113 can prevent the conducting layer from burning through the second doping layer 113, reduce contact recombination, improve open-circuit voltage, improve process width, and ensure product yield.

Specifically, the second doping layer 113 includes a doped polysilicon layer, a doped silicon carbide layer, or a doped amorphous silicon layer. Preferably, the second doped layer 113 comprises a doped silicon carbide layer. Thus, the silicon carbide material has wide optical band gap and low absorption coefficient, so that parasitic absorption can be reduced, and the short-circuit current density can be effectively improved. Further, the doped silicon carbide layer is composed of at least one doped silicon carbide film having different refractive indexes, and the refractive indexes of the doped silicon carbide films are sequentially decreased from the silicon substrate 10 to the outside. Thus, a gradient of refractive index can be formed, and a gradient extinction effect can be formed. Further, the doped silicon carbide layer in the second doped layer 113 includes a doped hydrogenated silicon carbide layer having a conductivity of greater than 0.01S-cm and a thickness of greater than 10 nm. Thus, the conductivity requirement of the second doped layer 113 can be satisfied, and the parasitic absorption is lower, thereby increasing the short-circuit current.

Referring to fig. 4, the doping polarities of the first doped layer 111 and the second doped layer 113 are optionally the same; the second passivation contact region 12 further comprises a fourth doped layer 121 disposed between the silicon substrate 10 and the second passivation layer 122, the fourth doped layer 121 and the third doped layer 123 having the same doping polarity. Thus, effective field passivation can be formed and contact resistance can be reduced.

It is understood that, as described above, the doping polarities of the second doping layer 113 and the third doping layer 123 are the same, and thus, the doping polarities of the first doping layer 111, the second doping layer 113, the third doping layer 123, and the fourth doping layer 121 are all the same. Namely: the doping polarities of the first doping layer 111, the second doping layer 113, the third doping layer 123 and the fourth doping layer 121 are all N-type; alternatively, the doping polarities of the first doping layer 111, the second doping layer 113, the third doping layer 123, and the fourth doping layer 121 are all P-type.

Referring to fig. 5, optionally, the second passivation contact region 12 further includes a fourth doped layer 121 disposed between the silicon substrate 10 and the second passivation layer 122, and the doping concentration of the first doped layer 111 is greater than or equal to the doping concentration of the fourth doped layer 121. Therefore, the transmission of carriers can be increased, and the photoelectric conversion efficiency can be improved.

Specifically, the range of the peak doping concentration of the first doping layer 111 is 10¹⁷/cm³～10²⁰/cm³The range of the peak doping concentration of the fourth doping layer 121 is 10¹⁷/cm³～10²⁰/cm³。

Referring to fig. 5, the doping concentration of the fourth doping layer 121 is optionally less than the doping concentration of the third doping layer 123. As such, carrier lateral transport may be improved by the light doping of the fourth doping layer 121.

Referring to fig. 5, optionally, the second passivation layer 122 is a porous structure, the hole region of the second passivation layer 122 has the fourth doped layer 121 and/or the third doped layer 123, and the third doped layer 123 is connected to the fourth doped layer 121 through the doped hole region. Specifically, the third doped layer 123 is connected to the silicon substrate 10 through the doped hole region and the fourth doped layer 121. Optionally, the second passivation layer 122 is a porous structure, and the average pore diameter of the pores of the second passivation layer 122 is less than 1000 nm. Alternatively, the second passivation layer 122 is a porous structure, and the second passivation layer 122 is formed by thermal diffusion impact. Optionally, the second passivation layer 122 is a porous structure, and the holes of the second passivation layer 122 are distributed sparsely on the second passivation layer 122. Optionally, the second passivation layer 122 is a porous structure, and a ratio of an area of the hole region of the second passivation layer 122 to an entire area of the second passivation layer 122 is less than 20%. Optionally, the second passivation layer 122 is a porous structure, the second passivation contact region 12 further includes a fourth doped layer 121 disposed between the silicon substrate 10 and the second passivation layer 122, and the fourth doped layer 121 is discretely and locally distributed in each hole region of the second passivation layer 122. Optionally, the second passivation layer 122 is a porous structure, the second passivation contact region 12 further comprises a fourth doped layer 121 disposed between the silicon substrate 10 and the second passivation layer 122, the fourth doped layer 121 being disposed completely continuously between the silicon substrate 10 and the second passivation layer 122. Optionally, the first passivation layer 112 is one or more of an oxide layer, a nitride layer, a silicon carbide layer, and an amorphous silicon layer. Optionally, the second passivation layer 122 is one or more of an oxide layer, a nitride layer, a silicon carbide layer, and an amorphous silicon layer. Optionally, the oxide layer is composed of one or more of a silicon oxide layer and an aluminum oxide layer.

Note that, for the explanation and explanation of this portion, reference may be made to the portion of the first passivation layer 112 having a porous structure, and the description thereof is omitted here for the sake of avoiding redundancy.

Referring to fig. 2, the thickness of the third doped layer 123 may optionally range from 0nm to 500 nm. For example, 0nm, 0.01nm, 0.8nm, 1nm, 5nm, 10nm, 35nm, 50nm, 80nm, 100nm, 120nm, 150nm, 198nm, 200nm, 250nm, 300nm, 450nm, 500 nm. In this way, parasitic absorption can be reduced and lateral transport of carriers can be ensured. It is understood that the thickness of the third doped layer 123 is 0, that is, the third doped layer 123 may be omitted.

Further, the thickness of the third doped layer 123 ranges from 0nm to 120 nm. For example, 0nm, 0.01nm, 0.8nm, 1nm, 5nm, 10nm, 35nm, 50nm, 80nm, 100nm, 120 nm. In this way, both minimizing parasitic absorption and ensuring lateral transport of carriers can be considered. It is understood that in the case where the thickness of the third doped layer 123 is 0, parasitic absorption is minimized; in the case where the thickness of the third doped layer 123 is 120nm, lateral transmission can be secured, and at the same time, parasitic absorption is also smaller than that at the second doped layer 113.

Preferably, the thickness of the third doped layer 123 ranges from 20nm to 120 nm. Examples thereof include 20nm, 22nm, 35nm, 50nm, 80nm, 100nm and 120 nm. Thus, the overall performance of the battery is best while taking into account parasitic absorption and ensuring lateral transport of carriers.

Referring to fig. 2, optionally, the third passivation layer 124 includes one or more of an aluminum oxide layer, a silicon nitride layer, a silicon oxynitride layer, a silicon carbide layer, an amorphous silicon layer, and a silicon oxide layer. Thus, it is possible to reduce reflection and reduce the surface recombination rate. Further, the third passivation layer 124 may be composed of at least one passivation film having different refractive indexes, and the refractive indexes of the passivation films are sequentially decreased from the silicon substrate 10 outward.

Alternatively, the selectively passivated contact structure 100 may comprise a protection layer provided at the second passivated contact region 12, the top surface of the protection layer being at a larger distance to the silicon substrate 10 than the top surface of the second doped layer. Therefore, the second doping layer can be protected by the protection layer, and the second doping layer is prevented from being scratched. Specifically, the protection layer may be disposed between the third passivation layer 124 and the third doped layer, or disposed on a side of the third passivation layer 124 facing away from the third doped layer 123. In particular, the protective layer may comprise an insulating layer. Thus, leakage current can be avoided.

In the back structure 1001 of the double-sided back contact solar cell according to the embodiment of the present application, the thickness of the third doped layer 123 is small, so that the parasitic absorption of the second passivation contact region 12 can be reduced, and the current can be increased. Meanwhile, since the second doping layer 113 has a large thickness, the conductive layer can be prevented from burning through the second doping layer 113. Meanwhile, the P-type contact region structure 101 and the N-type contact region structure 102 are both disposed on the back surface of the silicon substrate 10, so that the gate line shading on the front surface of the silicon substrate 10 can be reduced. In this way, the photoelectric conversion efficiency of the solar cell can be maximized.

Example two

Referring to fig. 6, a double-sided back-contact solar cell 1000 is further provided in the second embodiment of the present application, where the double-sided back-contact solar cell 1000 includes the back surface structure 1001 of the double-sided back-contact solar cell in the first embodiment.

In the double-sided back contact solar cell 1000 according to the embodiment of the present application, the thickness of the third doping layer 123 is small, so that the parasitic absorption of the second passivation contact region 12 can be reduced, and the short-circuit current can be increased. Meanwhile, since the second doped layer 113 has a large thickness, the first conductive layer 30 can be prevented from burning through the second doped layer 113, thereby increasing the open-circuit voltage. Meanwhile, the method has excellent interface passivation performance and lower contact resistance. Meanwhile, the P-type contact region structure 101 and the N-type contact region structure 102 are both disposed on the back surface of the silicon substrate 10, so that the gate line shading on the front surface of the silicon substrate 10 can be reduced. In this way, the photoelectric conversion efficiency of the solar cell can be maximized.

For further explanation and explanation of this section, reference is made to the foregoing description, and further explanation is omitted here to avoid redundancy.

Optionally, the P-type contact region structure 101 is a selective passivation contact structure 100, and the double-sided back-contact solar cell 1000 includes a first conductive layer 30, where the first conductive layer 30 is connected to the second doped layer 113.

Specifically, the first conductive layer 30 is a fine gate. Thus, the selective passivation contact structure 100 is limited under the fine grid, so that the shielded sunlight can be reduced, and the photoelectric conversion efficiency can be improved. It is understood that in other embodiments, the first conductive layer 30 may also be a main gate.

Alternatively, the first conductive layer 30 may include a Transparent Conductive Oxide (TCO). Thus, the TCO can effectively collect the current of the double-sided back contact solar cell 1000, and the normal work of the double-sided back contact solar cell 1000 is ensured. Moreover, the TCO has high permeability and can reflect light, so that the loss of sunlight can be reduced. Thus, the photoelectric conversion efficiency is advantageously improved.

Further, the TCO includes one or more of fluorine-doped tin oxide (FTO), Indium Zinc Oxide (IZO), Indium Tin Oxide (ITO), aluminum-doped zinc oxide (AZO), aluminum-doped tin oxide (ATO), and IGO-indium-doped gallium oxide (IGO). It is understood that the first conductive layer 30 may also include metals such as silver, gold, aluminum, copper, molybdenum, tungsten, nickel, magnesium, tin, tantalum, and the like. The first conductive layer 30 may also include TCO and metal electrodes.

Optionally, the N-type contact region structure 102 is a selectively passivated contact structure 100, and the double-sided back-contact solar cell 1000 includes a second conductive layer 50, and the second conductive layer 50 is connected to the second doped layer 113.

Note that the explanation and description of the second conductive layer 50 can be added to the explanation and description of the first conductive layer 30, and are not repeated herein to avoid redundancy.

Referring to fig. 6, optionally, a non-doped region 200 is disposed between the P-type contact region structure 101 and the N-type contact region structure 102.

It is understood that the undoped region 200 refers to a region that is not doped on the silicon substrate 10. Therefore, the interval between the adjacent P-type contact region structure 101 and the adjacent N-type contact region structure 102 is realized through the non-doped region 200, and a groove, a boss, a groove or an insulating piece does not need to be arranged between the two adjacent P-type contact region structures 101 and the two adjacent N-type contact region structures 102, so that the production efficiency is improved.

Further, a plurality of selectively passivated contact structures 100 may be formed by high temperature diffusion, and a surface passivation layer such as a silicon nitride layer may be formed in the undoped region 200 before the high temperature diffusion, thereby improving minority carrier lifetime.

Specifically, referring to fig. 7, a plurality of grooves may be formed at intervals on the back surface of the silicon substrate 10, the P-type contact region structure 101 and the N-type contact region structure 102 are disposed in each groove, and a boss is formed in a region between two adjacent grooves. In this way, the spacing of the P-type contact region structure 101 and the N-type contact region structure 102 disposed in the adjacent two grooves can be achieved. Further, the recess may be formed by laser ablation or by a combination of a mask (e.g., a hard mask, a silicon oxide mask, a silicon nitride mask, a photoresist mask, etc.) and wet/dry etching. Further, the groove may be rectangular, circular arc, trapezoidal, or square. The plurality of grooves may all be the same shape, all be different, or be partially the same and partially different.

In another embodiment, referring to fig. 8, a plurality of grooves are spaced apart from each other on the back surface of the silicon substrate 10, a boss is formed in a region between two adjacent grooves, one of two adjacent P-type contact region structures 101 and two adjacent N-type contact region structures 102 is disposed in the groove, and the other is disposed on the boss. In this way, the spacing between two adjacent P-type contact region structures 101 and N-type contact region structures 102 is achieved by the height difference between the grooves and the lands.

In another embodiment, referring to fig. 9, a plurality of grooves are formed at intervals on the back surface of the silicon substrate 10, a boss is formed in a region between two adjacent grooves, and the P-type contact region structure 101 and the N-type contact region structure 102 are disposed on each boss. In this way, the spacing of adjacent P-type contact region structures 101 and N-type contact region structures 102 is achieved by the grooves between the lands.

In other embodiments, a trench may be disposed between adjacent P-type contact region structures 101 and N-type contact region structures 102. In this manner, the spacing of adjacent P-type contact region structures 101 and N-type contact region structures 102 is achieved by the trenches.

In other embodiments, an insulator may be disposed between adjacent P-type contact region structures 101 and N-type contact region structures 102. In this manner, the spacing of adjacent P-type contact region structures 101 and N-type contact region structures 102 is achieved by the insulating members. Further, the insulator includes at least one of EPE (pearl wool), EVA (ethylene-vinyl acetate copolymer), and PET (polyethylene glycol terephthalate). Therefore, the buffer function can be achieved while insulation is achieved, and battery protection is facilitated.

Specifically, the number of the back structures 1001 may be 2, 3, 4, 5 or other values, and the specific number of the back structures 1001 is not limited herein.

Specifically, referring to fig. 6, in the present embodiment, the orthographic projection of the selectively passivated contact structure 100 on the silicon substrate 10 covers and exceeds the orthographic projection of the first conductive layer 30 on the silicon substrate 10. In other embodiments, the orthographic projection of the selectively passivated contact structure 100 on the silicon substrate 10 may completely overlap with the orthographic projection of the first conductive layer 30 on the silicon substrate 10; it is also possible that the orthographic projection of the selectively passivated contact structure 100 on the silicon substrate 10 is located within the orthographic projection of the first conductive layer 30 on the silicon substrate 10. The specific positional relationship of the selectively passivated contact structure 100 and the first conductive layer 30 is not limited herein. The relationship between the plurality of selectively passivated contact structures 100 and the corresponding first conductive layers 30 may be the same, different, or partially the same.

Specifically, referring to fig. 6, in the present embodiment, the lengths, widths, and thicknesses of the plurality of selective passivation contact structures 100 are the same, the lengths, widths, and thicknesses of the first doped layers 111 in the plurality of selective passivation contact structures 100 are the same, the lengths, widths, and thicknesses of the first passivation layers 112 in the plurality of selective passivation contact structures 100 are the same, the lengths, widths, and thicknesses of the second doped layers 113 in the plurality of selective passivation contact structures 100 are the same, the lengths, widths, and thicknesses of the second passivation layers 122 in the plurality of selective passivation contact structures 100 are the same, the lengths, widths, and thicknesses of the third doped layers 123 in the plurality of selective passivation contact structures 100 are the same, and the lengths, widths, and thicknesses of the third passivation layers 124 in the plurality of selective passivation contact structures 100 are the same. That is, the plurality of selective passivation contact structures 100 have the same size, and the sizes of the internal structures of the plurality of selective passivation contact structures are correspondingly the same.

In other embodiments, the length of the plurality of selectively passivated contact structures 100 may all be different or partially the same; the widths of the plurality of selectively passivated contact structures 100 may all be different or partially the same; the thickness of the plurality of selectively passivated contact structures 100 may all be different or partially the same. Similarly, the dimensions of the internal structures of the plurality of selectively passivated contact structures 100 may be the same, different, and partially the same. The specific dimensional relationships of the plurality of selectively passivated contact structures 100 are not limited herein.

In the present embodiment, the distance between two adjacent selective passivation contact structures 100 is 0.1mm to 10 mm. For example, 0.1mm, 0.11mm, 0.15mm, 0.5mm, 1mm, 2mm, 5mm, 8mm, 10 mm.

Referring to fig. 6, optionally, the P-type contact region structure 101 is a selectively passivated contact structure 100, and the width of the first conductive layer 30 is greater than the width of the second doped layer 113. Thus, the second doped layer 113 in contact with the first conductive layer 30 has a larger thickness and a lower contact resistance, and can serve as an effective barrier layer to prevent the portion of the first conductive layer 30 in contact with the second doped layer 113 from contacting the silicon substrate 10, so that the metal contact recombination is lower. Meanwhile, the third doped layer 123 and the third passivation layer 124 may act as effective blocking layers to block the portion of the first conductive layer 30 not in contact with the second doped layer 113 from contacting the silicon substrate 10, so that recombination is lower.

Specifically, the first conductive layer 30 may be formed by an electroplating process. Thus, the first conductive layer 30 has a strong adhesion force, and is in close contact with the second doped layer 113, so that the first conductive layer is not easy to fall off.

It is understood that in the case where the N-type contact region structure 102 is the selective passivation contact structure 100, the width of the second conductive layer 50 is greater than the width of the second doped layer 113. For the explanation and explanation of this part, reference is made to the foregoing description, and redundant description is omitted here.

Referring to fig. 10, optionally, a fourth passivation layer 114 is disposed on the second doped layer 113, an opening 1141 is formed in the fourth passivation layer 114, and the first conductive layer 30 is connected to the second doped layer 113 through the opening 1141. Thus, leakage current can be prevented. Meanwhile, the width of the first conductive layer 30 is small, so that the material consumption of the first conductive layer 30 can be reduced, the shading area can be reduced, and the photoelectric conversion efficiency can be improved.

Specifically, the first conductive layer 30 may be fabricated on the fourth passivation layer 114 using a screen printing process. Thus, the first conductive layer 30 can be directly burned through the fourth passivation layer 114 to contact the second doped layer 113, which is beneficial to improving the production efficiency. Meanwhile, the width of the second doping layer 113 can provide tolerance for the alignment of screen printing, which is beneficial to improving the yield of the battery.

Specifically, the fourth passivation layer 114 includes one or more of an aluminum oxide layer, a silicon nitride layer, a silicon oxynitride layer, a silicon carbide layer, an amorphous silicon layer, and a silicon oxide layer.

Specifically, the fourth passivation layer 114 may be composed of at least one passivation film having different refractive indexes, and the refractive indexes of the passivation films are sequentially decreased from the silicon substrate 10 outward. Thus, a gradient of refractive index can be formed, and a gradient extinction effect can be formed.

It is understood that in the case of the N-type contact region structure 102 being the selectively passivated contact structure 100, the second conductive layer 50 is connected to the second doped layer 113 through the opening 1141. For the explanation and explanation of this part, reference is made to the foregoing description, and redundant description is omitted here.

Referring to fig. 6, 7, 8, 9 and 10, optionally, the double-sided back-contact solar cell 1000 may further include a first surface passivation layer 60, where the first surface passivation layer 60 is disposed between the plurality of first conductive layers 30 and the plurality of second conductive layers 50. Thus, it is possible to reduce reflection and reduce the surface recombination rate.

Specifically, in the examples of fig. 6, 7, 8 and 9, the orthographic projection of the first conductive layer 30 on the silicon substrate 10 covers and exceeds the orthographic projection of the second doped layer 113 on the silicon substrate 10, and the orthographic projection of the second conductive layer 50 on the silicon substrate 10 completely covers the orthographic projection of the P-type contact region structure 101 on the silicon substrate 10.

The orthographic projection of the first surface passivation layer 60 on the silicon substrate 10 is positioned outside the orthographic projection of the second conductive layer 50 and the second doped layer 113 on the silicon substrate 10, and the orthographic projection of the first surface passivation layer 60, the second conductive layer 50 and the second doped layer 113 on the silicon substrate 10 covers the whole area of the silicon substrate 10.

In this manner, the entire back surface of the battery is covered with the first surface passivation layer 60 except for the conductive contact region of the first conductive layer 30 and the conductive contact region of the second conductive layer 50, which can substantially prevent leakage current and reduce the surface recombination rate. Note that the conductive contact region of the first conductive layer 30 refers to a region where the first conductive layer 30 and the second doped layer 113 are in contact. The conductive contact region of the second conductive layer 50 refers to a region where the second conductive layer 50 is in contact with the P-type contact region structure 101.

It is understood that the third passivation layer 124 is a partial structure of the first surface passivation layer 60, covering the third doped layer 123. The third passivation layer 124 may be the same material as or different from the first surface passivation layer 60 except for the third passivation layer 124. In the present embodiment, the third passivation layer 124 and the first surface passivation layer 60 except for the third passivation layer 124 are made of the same material. Thus, the production efficiency can be improved.

Note that the first surface passivation layer 60 fills gaps between the first conductive layer 30, the second doped layer 113, and the third doped layer 123. Thus, leakage current can be avoided.

Specifically, the first surface passivation layer 60 includes one or more of an aluminum oxide layer, a silicon nitride layer, a silicon oxynitride layer, a silicon carbide layer, an amorphous silicon layer, and a silicon oxide layer.

Specifically, the first surface passivation layer 60 may be composed of at least one passivation film having different refractive indexes, and the refractive indexes of the passivation films are sequentially decreased from the silicon substrate 10 outward. Thus, a gradient of refractive index can be formed, and a gradient extinction effect can be formed.

Specifically, in the example of fig. 10, the orthographic projection of the first conductive layer 30 on the silicon substrate 10 is located in the orthographic projection of the second doped layer 113 on the silicon substrate 10, and the orthographic projection of the second conductive layer 50 on the silicon substrate 10 is located in the orthographic projection of the P-type contact region structure 101 on the silicon substrate 10.

The orthographic projection of the first surface passivation layer 60 on the silicon substrate 10 is positioned outside the orthographic projection of the first conductive layer 30 and the second conductive layer 50 on the silicon substrate 10, and the orthographic projection of the first surface passivation layer 60, the first conductive layer 30 and the second conductive layer 50 on the silicon substrate 10 covers the whole area of the silicon substrate 10.

In this manner, all but the conductive contact area of the first conductive layer 30 and the conductive contact area of the second conductive layer 50 are covered by the first surface passivation layer 60, which can sufficiently prevent leakage current and reduce the surface recombination rate.

It is understood that the third passivation layer 124 is a partial structure of the first surface passivation layer 60, covering the third doped layer 123. The fourth passivation layer 114 is a partial structure of the first surface passivation layer 60, and covers a region of the second doped layer 113 not in contact with the first conductive layer 30. The third passivation layer 124, the fourth passivation layer 114, and the first surface passivation layer 60 except for the third passivation layer 124 and the fourth passivation layer 114 may be made of the same material or different materials. In the present embodiment, the third passivation layer 124, the fourth passivation layer 114, and the first surface passivation layer 60 except for the third passivation layer 124 and the fourth passivation layer 114 are simultaneously made of the same material. Thus, the production efficiency can be improved.

Referring to fig. 6, 7, 8, 9 and 10, optionally, the double-sided back-contact solar cell 1000 may further include a second surface passivation layer 70, and the second surface passivation layer 70 is disposed on the front surface of the silicon substrate 10. Thus, it is possible to reduce reflection and reduce the surface recombination rate.

Specifically, the second surface passivation layer 70 includes one or more of an aluminum oxide layer, a silicon nitride layer, a silicon oxynitride layer, a silicon carbide layer, an amorphous silicon layer, and a silicon oxide layer.

Specifically, the second surface passivation layer 70 may be composed of at least one passivation film having different refractive indexes, and the refractive indexes of the passivation films are sequentially decreased from the silicon substrate 10 outward. Thus, a gradient of refractive index can be formed, and a gradient extinction effect can be formed.

Specifically, in the case where the second surface passivation layer 70 has the same structure as the first surface passivation layer 60, the front and back surfaces of the silicon substrate 10 may be prepared by the same process, respectively. Thus, the production efficiency is improved. It is understood that the second surface passivation layer 70 may also have a different structure than the first surface passivation layer.

The present invention is not intended to be limited to the particular embodiments shown and described, but is to be accorded the widest scope consistent with the principles and novel features herein disclosed.

Claims

1. The back structure of the double-sided back contact solar cell is characterized by comprising a P-type contact region structure and an N-type contact region structure which are alternately arranged on the back surface of a silicon substrate of the double-sided back contact solar cell, wherein the P-type contact region structure is connected with a first conductive layer of the double-sided back contact solar cell, and the N-type contact region structure is connected with a second conductive layer of the double-sided back contact solar cell; at least one of the P-type contact region structure and the N-type contact region structure is a selectively passivated contact structure;

the selectively passivated contact structure comprises first passivated contact regions and second passivated contact regions arranged alternately; the first passivation contact region comprises a first doping layer, a first passivation layer and a second doping layer which are sequentially stacked on the silicon substrate; the second passivation contact region comprises a second passivation layer, a third doping layer and a third passivation layer which are sequentially stacked on the silicon substrate; the thickness of the second doped layer is larger than that of the third doped layer, and the doping polarities of the second doped layer and the third doped layer are the same.

2. The backside structure of a bifacial back contact solar cell of claim 1 wherein the doping polarity of said first doping layer and said second doping layer is the same; the second passivation contact region further comprises a fourth doped layer arranged between the silicon substrate and the second passivation layer, and the doping polarity of the fourth doped layer is the same as that of the third doped layer.

3. The backside structure of a bifacial back contact solar cell according to claim 2, wherein the second passivation layer is a porous structure, the hole region of the second passivation layer has the fourth doped layer and/or the third doped layer, and the third doped layer and the fourth doped layer are connected by the doped hole region.

4. The backside structure of a double-sided back-contact solar cell according to claim 1, wherein the first passivation layer is a porous structure, the first doping layer and/or the second doping layer is/are located in a hole region of the first passivation layer, and the second doping layer is connected to the first doping layer through the doped hole region.

5. The backside structure of a double-sided back-contact solar cell according to claim 1, wherein the first passivation layer is a porous structure, and the average pore diameter of the pores of the first passivation layer is less than 1000 nm;

and/or the second passivation layer is a porous structure, and the average pore diameter of the pores of the second passivation layer is less than 1000 nm.

6. The backside structure of a double-sided back-contact solar cell according to claim 1, wherein the first passivation layer is a porous structure, and the holes of the first passivation layer are formed by thermal diffusion impact;

and/or the second passivation layer is of a porous structure, and holes of the second passivation layer are formed by thermal diffusion impact.

7. The backside structure of a double-sided back-contact solar cell according to claim 1, wherein the first passivation layer is a porous structure, and the holes of the first passivation layer are distributed sparsely on the first passivation layer;

and/or the second passivation layer is of a porous structure, and all holes of the second passivation layer are distributed on the second passivation layer in a scattered and sparse mode.

8. The backside structure of a double-sided back-contact solar cell according to claim 1, wherein the first passivation layer is a porous structure, and the ratio of the area of the hole region of the first passivation layer to the total area of the first passivation layer is less than 20%;

and/or the second passivation layer is of a porous structure, and the ratio of the area of the hole region of the second passivation layer to the whole area of the second passivation layer is less than 20%.

9. The backside structure of a double-sided back-contact solar cell according to claim 1, wherein the first passivation layer is a porous structure, and the first doping layer is discretely and locally distributed in each hole region of the first passivation layer;

and/or the second passivation layer is of a porous structure, the second passivation contact region further comprises a fourth doping layer arranged between the silicon substrate and the second passivation layer, and the fourth doping layer is discretely and locally distributed in each hole region of the second passivation layer.

10. The backside structure of a double-sided back-contact solar cell according to claim 1, wherein the first passivation layer is a porous structure, the first doped layer being disposed completely continuously between the silicon substrate and the first passivation layer;

and/or the second passivation layer is of a porous structure, the second passivation contact region further comprises a fourth doped layer arranged between the silicon substrate and the second passivation layer, and the fourth doped layer is completely and continuously arranged between the silicon substrate and the second passivation layer.

11. The backside structure of a double-sided back-contact solar cell of claim 1 wherein the first passivation layer is one or more of an oxide layer, a nitride layer, a oxynitride layer, a silicon carbide layer, and an amorphous silicon layer;

and/or the second passivation layer is one or more of an oxide layer, a nitride layer, a oxynitride layer, a silicon carbide layer and an amorphous silicon layer.

12. The backside structure of a bifacial back contact solar cell of claim 11 wherein the oxide layer is comprised of one or more of a silicon oxide layer, an aluminum oxide layer.

13. The backside structure of a bifacial back contact solar cell of claim 1 wherein said second passivation contact region further comprises a fourth doped layer disposed between said silicon substrate and said second passivation layer, said first doped layer having a doping concentration greater than or equal to a doping concentration of said fourth doped layer.

14. The backside structure of a double-sided back-contact solar cell according to claim 1 wherein the thickness of the third doped layer is 0-500 nm.

15. A bifacial back contact solar cell comprising the back side structure of the bifacial back contact solar cell of any one of claims 1-14.

16. The bifacial back contact solar cell of claim 15, wherein said P-type contact region structure is a selectively passivated contact structure, said bifacial back contact solar cell comprising a first conductive layer connected to said second doped layer, said first conductive layer having a width greater than a width of said second doped layer;

and/or the N-type contact region structure is a selective passivation contact structure, the double-sided back contact solar cell comprises a second conductive layer, the second conductive layer is connected with the second doping layer, and the width of the second conductive layer is greater than that of the second doping layer.

17. The bifacial back contact solar cell of claim 15, wherein the P-type contact region structure is a selectively passivated contact structure, the bifacial back contact solar cell comprising a first conductive layer, a fourth passivation layer disposed on the second doped layer, the fourth passivation layer defining an opening, the first conductive layer being connected to the second doped layer through the opening;