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CN114008105A - Resin composition for sealing, electronic component device, and method for manufacturing electronic component device - Google Patents

Resin composition for sealing, electronic component device, and method for manufacturing electronic component device Download PDF

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Publication number
CN114008105A
CN114008105A CN202080046323.8A CN202080046323A CN114008105A CN 114008105 A CN114008105 A CN 114008105A CN 202080046323 A CN202080046323 A CN 202080046323A CN 114008105 A CN114008105 A CN 114008105A
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Prior art keywords
resin composition
active ester
ester compound
epoxy resin
sealing
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Inventor
斋藤贵大
山浦格
春日圭一
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Resonac Holdings Corp
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Showa Denko KK
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • C08G59/4223Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof aromatic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Epoxy Resins (AREA)

Abstract

A resin composition for sealing, which contains an epoxy resin and a curing agent containing an active ester compound, wherein the equivalent ratio of the active ester compound to the epoxy resin (active ester compound/epoxy resin) is 0.9 or less.

Description

Resin composition for sealing, electronic component device, and method for manufacturing electronic component device
Technical Field
The present invention relates to a sealing resin composition, an electronic component device, and a method for manufacturing an electronic component device.
Background
The transmission loss amount generated by the heat conversion of the radio wave transmitted for communication in the dielectric body is expressed as: the product of frequency, the square root of the relative dielectric constant, and the dielectric loss tangent. That is, since a transmission signal is easily heated in proportion to a frequency, a material of a communication member is required to have low dielectric characteristics in a high frequency band in order to suppress a transmission loss.
For example, patent documents 1 to 2 disclose thermosetting resin compositions containing an active ester resin as a curing agent for an epoxy resin, and describe that the dielectric loss tangent of a cured product can be suppressed to a low level.
[ Prior art documents ]
[ patent document ]
Patent document 1: japanese patent laid-open No. 2012-246367
Patent document 2: japanese patent laid-open No. 2014-114352
Disclosure of Invention
[ problems to be solved by the invention ]
In the field of message communication, radio waves are becoming higher in frequency with an increase in the number of channels and an increase in the amount of messages transmitted. Currently, 5th Generation Mobile Communication Technology (5G) is under investigation all over the world, and several frequency band candidates to be used are in a range of about 30GHz to 70 GHz. Since wireless communication will be mainstream in the future in such a high frequency band, a further reduction in dielectric loss tangent is required for a material used for manufacturing a communication member.
Further, these materials must satisfy process applicability in the fabrication steps of the package. For example, in the case of manufacturing a semiconductor package, a rewiring layer may be formed after a substrate and a chip are sealed with a sealing resin composition, and in this case, an alkaline solution may be used. However, the sealing resin composition using an active ester compound as a curing agent has room for improvement in resistance to a chemical liquid of an alkaline solution.
The present invention has been made in view of the above circumstances, and an object thereof is to provide a resin composition for sealing which can obtain a cured product having a low dielectric loss tangent and excellent chemical resistance, an electronic component device sealed by using the resin composition, and a method for manufacturing an electronic component device sealed by using the resin composition.
[ means for solving problems ]
Specific means for solving the problems include the following aspects.
< 1 > a sealing resin composition comprising an epoxy resin and a hardener comprising an active ester compound, wherein the equivalent ratio of the active ester compound to the epoxy resin (active ester compound/epoxy resin) is 0.9 or less.
< 2 > the resin composition for sealing according to < 1 > wherein the equivalent ratio of the active ester compound to the epoxy resin (active ester compound/epoxy resin) is 0.5 or more.
< 3 > the sealing resin composition according to < 1 > or < 2 > wherein the equivalent ratio of the whole hardener to the epoxy resin (whole hardener/epoxy resin) is 0.5 to 1.2.
< 4 > an electronic part device comprising: a support member, an element disposed on the support member, and a cured product of the sealing resin composition according to any one of < 1 > - < 3 > sealing the element.
< 5 > a method for manufacturing an electronic part device, comprising: a step of disposing an element on a support member, and a step of sealing the element with the sealing resin composition according to any one of < 1 > -to < 3 >.
[ Effect of the invention ]
The present disclosure provides a resin composition for sealing which can provide a cured product having a low dielectric loss tangent and excellent chemical resistance, an electronic component device sealed using the resin composition, and a method for manufacturing an electronic component device sealed using the electronic component device.
Detailed Description
In the present disclosure, the term "step" includes a step that is independent from other steps, and includes a step if the purpose of the step is achieved even when the step cannot be clearly distinguished from other steps.
In the numerical range expressed by the expression "to" in the present disclosure, the numerical values described before and after the expression "to" are included as the minimum value and the maximum value, respectively.
In the numerical ranges recited in the present disclosure, the upper limit or the lower limit recited in one numerical range may be replaced with the upper limit or the lower limit recited in the other numerical ranges recited in the present disclosure. In the numerical ranges disclosed in the present disclosure, the upper limit or the lower limit of the numerical range may be replaced by the values shown in the examples.
In the present disclosure, each ingredient may contain a plurality of compatible substances. When a plurality of substances corresponding to each component are present in the composition, the content or content of each component means the total content or content of the plurality of substances present in the composition unless otherwise specified.
In the present disclosure, a plurality of particles corresponding to each component may be contained. In the case where a plurality of particles corresponding to each component are present in the composition, the particle diameter of each component means a value concerning a mixture of the plurality of particles present in the composition unless otherwise specified.
In the present disclosure, the "active ester compound" refers to a compound having 1 or more ester groups (active ester groups) reactive with epoxy groups in 1 molecule and having a hardening effect of an epoxy resin.
< resin composition for sealing >
The sealing resin composition of the present disclosure is a sealing resin composition comprising: the epoxy resin composition contains an epoxy resin and a curing agent containing an active ester compound, wherein the equivalent ratio of the active ester compound to the epoxy resin (active ester compound/epoxy resin) is 0.9 or less.
The inventors of the present invention have studied and found that a cured product obtained by curing the sealing resin composition having the above-described structure has a low dielectric loss tangent and excellent chemical resistance. The reason is not necessarily clear, but is considered as follows.
First, the sealing resin composition of the present disclosure includes an active ester compound as a hardener. Phenol hardeners, amine hardeners, and the like, which are generally used as hardeners for epoxy resins, generate 2-staged hydroxyl groups in the reaction with the epoxy resins. On the other hand, in the reaction between the epoxy resin and the active ester compound, an ester group having a polarity lower than that of the 2-stage hydroxyl group is generated. Therefore, the sealing resin composition of the present disclosure can suppress the dielectric loss tangent of a cured product to be low as compared with a sealing resin composition containing only a curing agent generating a 2-stage hydroxyl group.
Further, the sealing resin composition of the present disclosure has superior chemical resistance liquid as compared to a sealing resin composition in which the equivalent ratio of the active ester compound to the epoxy resin exceeds 0.9. The reason is not necessarily clear, but is considered as follows.
In a sealing resin composition using an active ester compound as a curing agent for an epoxy resin, an ester group is generated in a cured product by a reaction between an epoxy group and an active ester group. The ester group is considered to be a cause of a decrease in the chemical resistance because it is hydrolyzed under alkaline conditions. In the sealing resin composition of the present disclosure, the number of active ester groups relative to epoxy groups is suppressed to a certain level or less. Therefore, it is considered that the formation of ester groups by the reaction of epoxy groups with active ester groups is suppressed, and good chemical resistance is maintained.
From the viewpoint of obtaining good resistance to chemical liquid, the equivalent ratio of the active ester compound to the epoxy resin (active ester compound/epoxy resin) in the sealing resin composition may be 0.8 or less, or may be 0.7 or less.
The lower limit value of the equivalent ratio of the active ester compound to the epoxy resin (active ester compound/epoxy resin) in the sealing resin composition is not particularly limited. From the viewpoint of reducing the dielectric loss tangent of the cured product, it may be 0.5 or more, or 0.6 or more.
The sealing resin composition of the present disclosure may contain only the active ester compound as the hardener, and may further contain hardeners other than the active ester compound (a phenol hardener, an amine hardener, an acid anhydride hardener, and the like). When the sealing resin composition contains an active ester compound as a curing agent and a curing agent other than the active ester compound, the equivalent ratio of the entire curing agent to the epoxy resin (the entire curing agent/the epoxy resin) is not particularly limited. For example, it may be in the range of 0.5 to 1.2.
In the sealing resin composition of the present disclosure, the active ester compound contains an epoxy group that does not react with an active ester group because the equivalent ratio of the active ester compound to the epoxy resin is 0.9 or less. The epoxy group which does not react with the active ester group may react with a functional group (hydroxyl group, etc.) of the curing agent other than the active ester compound, and also may cause a self-polymerization reaction of the epoxy group. The self-polymerization of the epoxy groups can precede the reaction of the epoxy groups with the active ester groups, resulting in ether linkages. The ether bond is not hydrolyzed under alkaline conditions, and thus good resistance to chemicals is maintained.
(epoxy resin)
The kind of the epoxy resin contained in the sealing resin composition of the present disclosure is not particularly limited.
Specific examples of the epoxy resin include: a novolak type epoxy resin (e.g., a phenol novolak type epoxy resin, an o-cresol novolak type epoxy resin, etc.) obtained by condensing or co-condensing at least one phenolic compound selected from the group consisting of phenol compounds such as phenol, cresol, xylenol, resorcinol, catechol, bisphenol a, and bisphenol F, and naphthol compounds such as α -naphthol, β -naphthol, and dihydroxynaphthalene, with an aliphatic aldehyde compound such as formaldehyde, acetaldehyde, and propionaldehyde in the presence of an acidic catalyst to obtain a novolak resin, and epoxidizing the novolak resin; triphenylmethane epoxy resins obtained by subjecting the above phenolic compounds and aromatic aldehyde compounds such as benzaldehyde and salicylaldehyde to condensation or cocondensation in the presence of an acidic catalyst to obtain triphenylmethane phenol resins and subjecting the triphenylmethane phenol resins to epoxidation; a co-polymerization type epoxy resin obtained by co-condensing the phenol compound, the naphthol compound and the aldehyde compound in the presence of an acidic catalyst to obtain a novolac resin and epoxidizing the novolac resin; diglycidyl ethers such as bisphenol a and bisphenol F, i.e., diphenylmethane type epoxy resins; diglycidyl ethers of alkyl-substituted or unsubstituted bisphenols, i.e., biphenyl-type epoxy resins; diglycidyl ethers of a diphenylethylene type epoxy resin; diglycidyl ethers of bisphenol S and the like, i.e., sulfur atom-containing epoxy resins; epoxy resins which are glycidyl ethers of alcohols such as butanediol, polyethylene glycol, and polypropylene glycol; glycidyl ester type epoxy resins which are glycidyl esters of polycarboxylic acid compounds such as phthalic acid, isophthalic acid and tetrahydrophthalic acid; glycidyl amine type epoxy resins, which are obtained by substituting an active hydrogen bonded to a nitrogen atom of aniline, diaminodiphenylmethane, isocyanuric acid, or the like with a glycidyl group; a dicyclopentadiene type epoxy resin obtained by epoxidizing a co-condensation resin of dicyclopentadiene and a phenol compound; alicyclic epoxy resins such as vinylcyclohexene diepoxide, 3, 4-epoxycyclohexylmethyl-3, 4-epoxycyclohexane carboxylate, and 2- (3, 4-epoxy) cyclohexyl-5, 5-spiro (3, 4-epoxy) cyclohexane-dioxane, which are obtained by epoxidizing an olefin bond in the molecule; glycidyl ether of p-xylene-modified phenol resin, namely p-xylene-modified epoxy resin; glycidyl ether of m-xylene-modified phenol resin, i.e., m-xylene-modified epoxy resin; glycidyl ethers of terpene-modified phenol resins, i.e., terpene-modified epoxy resins; the glycidyl ether of the dicyclopentadiene modified phenol resin is dicyclopentadiene modified epoxy resin; glycidyl ether of cyclopentadiene-modified phenol resin, namely cyclopentadiene-modified epoxy resin; glycidyl ether of the polycyclic aromatic ring modified phenol resin is polycyclic aromatic ring modified epoxy resin; glycidyl ethers of phenol resins containing naphthalene rings, namely naphthalene-type epoxy resins; halogenated phenol novolac type epoxy resins; p-phenylene bisphenol type epoxy resin; trimethylolpropane type epoxy resins; linear aliphatic epoxy resins obtained by oxidizing an olefin bond with a peroxy acid such as peroxyacetic acid; aralkyl type epoxy resins obtained by epoxidizing aralkyl type phenol resins such as phenol aralkyl resins and naphthol aralkyl resins; and so on. Further, epoxy resins such as epoxy resins of acrylic resins can be cited. These epoxy resins may be used alone in 1 kind, or may be used in combination in 2 or more kinds.
The epoxy equivalent (molecular weight/number of epoxy groups) of the epoxy resin is not particularly limited. From the viewpoint of balance among various properties such as moldability, reflow resistance and electrical reliability, it is preferably 100 to 1000g/eq, more preferably 150 to 500 g/eq.
The epoxy equivalent of the epoxy resin is determined by using a resin composition according to Japanese Industrial Standards (JIS) K7236: 2009 by the method.
The softening point or melting point of the epoxy resin is not particularly limited. From the viewpoint of moldability and reflow resistance, it is preferably from 40 ℃ to 180 ℃, and from the viewpoint of handling properties in the production of the sealing resin composition, it is more preferably from 50 ℃ to 130 ℃.
The melting point or softening point of the epoxy resin is set to pass JIS K7234: 1986 and JIS K7233: 1986, the single cylinder rotational viscometer method.
The content of the epoxy resin in the sealing resin composition is preferably 0.5 to 50% by mass, and more preferably 2 to 30% by mass, from the viewpoints of strength, fluidity, heat resistance, moldability, and the like.
(hardening agent)
The sealing resin composition of the present disclosure contains at least an active ester compound as a hardener. The sealing resin composition of the present disclosure may include a hardener other than the active ester compound.
As described above, the resin composition for sealing of the present disclosure can suppress the dielectric loss tangent of a cured product to a low level by using an active ester compound as a curing agent.
In addition, the polar group in the cured product increases the water absorption of the cured product, and as a result, by using the active ester compound as the curing agent, the concentration of the polar group in the cured product can be suppressed, and the water absorption of the cured product can be suppressed. Further, by suppressing the water absorption of the cured product, that is, by suppressing the H which is a polar molecule2The content of O can further suppress the dielectric loss tangent of the cured product to a low level. The water absorption of the cured product is preferably 0% to 0.35%, more preferably 0% to 0.30%, and still more preferably 0% to 0.25%. Here, the water absorption of the cured product is a mass increase rate determined by a pressure cooker test (121 ℃, 2.1 atm, 24 hours).
The active ester compound is not particularly limited as long as it has 1 or more ester groups reactive with epoxy groups in the molecule.
Examples of the active ester compound include a phenol ester compound, a thiophenol ester compound, an N-hydroxylamine ester compound, and an ester compound of a heterocyclic hydroxyl compound.
Examples of the active ester compound include ester compounds obtained from at least one of an aliphatic carboxylic acid and an aromatic carboxylic acid and at least one of an aliphatic hydroxy compound and an aromatic hydroxy compound. An ester compound having an aliphatic compound as a polycondensation component tends to have excellent compatibility with an epoxy resin because it has an aliphatic chain. An ester compound having an aromatic compound as a polycondensation component tends to have excellent heat resistance because it has an aromatic ring.
Specific examples of the active ester compound include aromatic esters obtained by a condensation reaction of an aromatic carboxylic acid and a phenolic hydroxyl group of an aromatic hydroxyl compound. Among them, preferred is an aromatic ester obtained by a condensation reaction of an aromatic carboxylic acid with a phenolic hydroxyl group of an aromatic hydroxy compound, wherein the aromatic carboxylic acid is a mixture of an aromatic carboxylic acid component obtained by substituting 2 to 4 of the hydrogen atoms of an aromatic ring such as benzene, naphthalene, biphenyl, diphenylpropane, diphenylmethane, diphenyl ether, or diphenylsulfonic acid with a carboxyl group, a 1-valent phenol obtained by substituting 1 of the hydrogen atoms of the aromatic ring with a hydroxyl group, and a polyhydric phenol obtained by substituting 2 to 4 of the hydrogen atoms of the aromatic ring with a hydroxyl group. That is, the aromatic ester preferably has a structural unit derived from the aromatic carboxylic acid component, a structural unit derived from the 1-valent phenol, and a structural unit derived from the polyhydric phenol.
Specific examples of the active ester compound include the following active ester resins described in japanese patent laid-open publication No. 2012-246367: the resin composition has a structure obtained by reacting a phenol resin having a molecular structure in which a phenol compound is formed by the nucleation of an aliphatic cyclic hydrocarbon group, an aromatic dicarboxylic acid or a halide thereof, and an aromatic monohydroxy compound. The active ester resin is preferably a compound represented by the following structural formula (1).
[ solution 1]
Figure BDA0003430260350000061
In the structural formula (1), R1Is an alkyl group having 1 to 4 carbon atoms, X is a benzene ring, a naphthalene ring, a benzene ring or a naphthalene ring substituted with an alkyl group having 1 to 4 carbon atoms, or a biphenyl group, Y is a benzene ring, a naphthalene ring, or a benzene ring or a naphthalene ring substituted with an alkyl group having 1 to 4 carbon atoms, k is 0 or 1, and n represents an average of the number of repetitions and is 0.25 to 1.5.
Specific examples of the compound represented by the structural formula (1) include the following exemplified compounds (1-1) to (1-10). t-Bu in the structural formula is tert-butyl.
[ solution 2]
Figure BDA0003430260350000071
[ solution 3]
Figure BDA0003430260350000072
Specific examples of the active ester compound include a compound represented by the following structural formula (2) and a compound represented by the following structural formula (3) described in japanese patent application laid-open No. 2014-114352.
[ solution 4]
Figure BDA0003430260350000081
In the structural formula (2), R1And R2Each independently represents a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, or an alkoxy group having 1 to 4 carbon atoms, Z represents an ester-forming structural moiety (Z1) selected from the group consisting of a benzoyl group, a naphthoyl group, a benzoyl or naphthoyl group substituted with an alkyl group having 1 to 4 carbon atoms, and an acyl group having 2 to 6 carbon atoms, or a hydrogen atom (Z2), and at least one of Z represents an ester-forming structural moiety (Z1).
[ solution 5]
Figure BDA0003430260350000082
In the structural formula (3), R1And R2Each independently represents a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, or an alkoxy group having 1 to 4 carbon atoms, Z represents an ester-forming structural moiety (Z1) selected from the group consisting of a benzoyl group, a naphthoyl group, a benzoyl or naphthoyl group substituted with an alkyl group having 1 to 4 carbon atoms, and an acyl group having 2 to 6 carbon atoms, or a hydrogen atom (Z2), and at least one of Z represents an ester-forming structural moiety (Z1).
Specific examples of the compound represented by the structural formula (2) include the following exemplified compounds (2-1) to (2-6).
[ solution 6]
Figure BDA0003430260350000091
Specific examples of the compound represented by the structural formula (3) include the following exemplified compounds (3-1) to (3-6).
[ solution 7]
Figure BDA0003430260350000101
As the active ester compound, commercially available products can be used. As the commercially available active ester compounds, there may be mentioned "EXB 9451", "EXB 9460S" and "HPC-8000-65T" (manufactured by Diegon (DIC) Co., Ltd.) as active ester compounds having a dicyclopentadiene type diphenol structure; "EXB 9416-70 BK", "EXB-8", "EXB-9425" (manufactured by DIC Co., Ltd.) as an active ester compound having an aromatic structure; "DC 808" (manufactured by mitsubishi chemical corporation) which is an active ester compound containing an acetylated product of phenol novolac; "YLH 1026" (manufactured by Mitsubishi chemical corporation) which is an active ester compound containing a benzoyl compound of phenol novolak, and the like.
The active ester compounds can be used alone in 1 kind, also can be combined with more than 2 kinds.
The ester equivalent (molecular weight/active ester number) of the active ester compound is not particularly limited. From the viewpoint of balance among various properties such as moldability, reflow resistance, and electrical reliability, it is preferably from 150 to 400g/eq, more preferably from 170 to 300g/eq, and still more preferably from 200 to 250 g/eq.
The ester equivalent of the active ester compound is determined by the following equation in accordance with JIS K0070: 1992.
The hardener may contain other hardeners than the active ester compound. In this case, the kind of the other curing agent is not particularly limited, and can be selected according to the desired characteristics of the sealing resin composition. Examples of the other hardeners include a phenol hardener, an amine hardener, an acid anhydride hardener, a polythiol hardener, a polyaminoamide hardener, an isocyanate hardener, and a blocked isocyanate hardener.
Specific examples of the phenol curing agent include: polyhydric phenol compounds such as resorcinol, catechol, bisphenol a, bisphenol F, and substituted or unsubstituted bisphenols; a novolak-type phenol resin obtained by condensing or co-condensing at least one phenolic compound selected from the group consisting of phenolic compounds such as phenol, cresol, xylenol, resorcinol, catechol, bisphenol a, bisphenol F, phenylphenol, and aminophenol, and naphthol compounds such as α -naphthol, β -naphthol, and dihydroxynaphthalene, with aldehyde compounds such as formaldehyde, acetaldehyde, and propionaldehyde, under an acidic catalyst; aralkyl phenol resins such as phenol aralkyl resins and naphthol aralkyl resins synthesized from the above phenolic compounds and dimethoxyp-xylene, bis (methoxymethyl) biphenyl and the like; p-xylene-modified phenol resin, m-xylene-modified phenol resin; a melamine-modified phenol resin; terpene-modified phenol resin; dicyclopentadiene type phenol resins and dicyclopentadiene type naphthol resins synthesized from the above-mentioned phenolic compounds and dicyclopentadiene by copolymerization; a cyclopentadiene-modified phenol resin; polycyclic aromatic ring-modified phenol resins; a biphenyl type phenol resin; a triphenylmethane type phenol resin obtained by condensing or co-condensing the above phenolic compound with an aromatic aldehyde compound such as benzaldehyde or salicylaldehyde under an acidic catalyst; phenol resins obtained by copolymerizing 2 or more of these. These phenol hardeners may be used alone in 1 kind, or may be used in combination with 2 or more kinds.
The functional group equivalent (hydroxyl group equivalent in the case of a phenol hardener) of the other hardener is not particularly limited. From the viewpoint of balance among various properties such as moldability, reflow resistance and electrical reliability, it is preferably from 70g/eq to 1000g/eq, more preferably from 80g/eq to 500 g/eq.
The functional group equivalent (hydroxyl group equivalent in the case of a phenol curing agent) of the other curing agent is determined by the following equation in accordance with JIS K0070: 1992.
The softening point or melting point of the hardener is not particularly limited. From the viewpoint of moldability and reflow resistance, it is preferably from 40 ℃ to 180 ℃, and from the viewpoint of handling properties in the production of the sealing resin composition, it is more preferably from 50 ℃ to 160 ℃.
The melting point or softening point of the hardener is defined as a value obtained by JIS K7234: 1986 and JIS K7233: 1986, the single cylinder rotational viscometer method.
From the viewpoint of suppressing the dielectric loss tangent of the cured product to a low level, the content of the active ester compound relative to the total mass of the active ester compound and the other curing agent is preferably 50 mass% or more, more preferably 60 mass% or more, and still more preferably 70 mass% or more.
From the viewpoint of suppressing the dielectric loss tangent of the cured product to a low level, the total content of the epoxy resin and the active ester compound based on the total mass of the epoxy resin, the active ester compound, and the other curing agent is preferably 70 mass% or more, more preferably 75 mass% or more, and still more preferably 80 mass% or more.
(hardening accelerator)
The sealing resin composition may contain a hardening accelerator. The type of the curing accelerator is not particularly limited, and can be selected according to the type of the epoxy resin or the curing agent, the desired properties of the sealing resin composition, and the like.
Examples of the hardening accelerator include diazabicycloalkenes such as 1,5-Diazabicyclo [4.3.0] nonene-5 (1,5-Diazabicyclo [4.3.0] nonene-5, DBN) and 1,8-Diazabicyclo [5.4.0] undecene-7 (1,8-Diazabicyclo [5.4.0] undecene-7, DBU), and cyclic amidine compounds such as 2-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 2-ethyl-4-methylimidazole, 2-phenyl-4-methylhydroxyimidazole and 2-heptadecylimidazole; derivatives of the cyclic amidine compounds; a phenol novolac salt of the cyclic amidine compound or a derivative thereof; compounds having intramolecular polarization, which are obtained by adding a quinone compound such as maleic anhydride, 1, 4-benzoquinone, 2, 5-methoquinone, 1, 4-naphthoquinone, 2, 3-dimethylbenzoquinone, 2, 6-dimethylbenzoquinone, 2, 3-dimethoxy-5-methyl-1, 4-benzoquinone, 2, 3-dimethoxy-1, 4-benzoquinone, phenyl-1, 4-benzoquinone, or a compound having a pi bond such as bisazophenylmethane to these compounds; cyclic amidino compounds such as tetraphenylborate of DBU, tetraphenylborate of DBN, tetraphenylborate of 2-ethyl-4-methylimidazole and tetraphenylborate of N-methylmorpholine; tertiary amine compounds such as pyridine, triethylamine, triethylene diamine, benzyldimethylamine, trimethanolamine, dimethylaminomethanol, and tris (dimethylaminomethyl) phenol; derivatives of the tertiary amine compounds; ammonium salt compounds such as tetra-n-butylammonium acetate, tetra-n-butylammonium phosphate, tetraethylammonium acetate, tetra-n-hexylammonium benzoate, tetrapropylammonium hydroxide and the like; tertiary phosphines such as triphenylphosphine, diphenyl (p-tolyl) phosphine, tri (alkylphenyl) phosphine, tri (alkoxyphenyl) phosphine, tri (alkyl-alkoxyphenyl) phosphine, tri (dialkylphenyl) phosphine, tri (trialkylphenyl) phosphine, tri (tetraalkylphenyl) phosphine, tri (dialkoxyphenyl) phosphine, tri (trialkoxyphenyl) phosphine, tri (tetraalkoxyphenyl) phosphine, trialkylphosphine, dialkylarylphosphine, and alkyldiarylphosphine; phosphine compounds such as complexes of the tertiary phosphine and an organic boron compound; a compound having intramolecular polarization obtained by adding the tertiary phosphine or the phosphine compound to a quinone compound such as maleic anhydride, 1, 4-benzoquinone, 2, 5-methoquinone, 1, 4-naphthoquinone, 2, 3-dimethylbenzoquinone, 2, 6-dimethylbenzoquinone, 2, 3-dimethoxy-5-methyl-1, 4-benzoquinone, 2, 3-dimethoxy-1, 4-benzoquinone, or phenyl-1, 4-benzoquinone, or a compound having a pi bond such as bisazophenylmethane; reacting the tertiary phosphine or the phosphine compound with 4-bromophenol, 3-bromophenol, 2-bromophenol, 4-chlorophenol, 3-chlorophenol, 2-chlorophenol, 4-iodinated phenol, 3-iodinated phenol, 2-iodinated phenol, a compound having intramolecular polarization obtained by a dehydrohalogenation step after reacting a halogenated phenol compound such as 4-bromo-2-methylphenol, 4-bromo-3-methylphenol, 4-bromo-2, 6-dimethylphenol, 4-bromo-3, 5-dimethylphenol, 4-bromo-2, 6-di-tert-butylphenol, 4-chloro-1-naphthol, 1-bromo-2-naphthol, 6-bromo-2-naphthol, 4-bromo-4' -hydroxybiphenyl, etc.; tetra-substituted phosphonium such as tetraphenylphosphonium, tetra-substituted phosphonium having no phenyl group bonded to a boron atom such as tetra-p-tolylborate, and tetra-substituted borate; salts of tetraphenylphosphonium with phenol compounds, and the like.
When the sealing resin composition contains a curing accelerator, the amount thereof is preferably 0.1 to 30 parts by mass, more preferably 1 to 15 parts by mass, per 100 parts by mass of the resin component (total amount of the epoxy resin and the curing agent). When the amount of the curing accelerator is 0.1 part by mass or more per 100 parts by mass of the resin component, the resin tends to be cured well in a short time. If the amount of the curing accelerator is 30 parts by mass or less based on 100 parts by mass of the resin component, the curing rate tends not to be too high, and a good molded article tends to be obtained.
(inorganic Filler)
The sealing resin composition of the present disclosure may contain an inorganic filler. The kind of the inorganic filler is not particularly limited. Specific examples thereof include inorganic materials such as fused silica, crystalline silica, glass, alumina, aluminum nitride, boron nitride, talc, clay, and mica. An inorganic filler having a flame retardant effect may be used. Examples of the inorganic filler having a flame retardant effect include aluminum hydroxide, magnesium hydroxide, a composite metal hydroxide such as a composite hydroxide of magnesium and zinc, zinc borate, and the like.
Among the inorganic fillers, silica such as fused silica is preferable from the viewpoint of reducing the linear expansion coefficient, and alumina is preferable from the viewpoint of high thermal conductivity. The inorganic filler may be used alone in 1 kind, or may be used in combination of 2 or more kinds. Examples of the form of the inorganic filler include powder, beads obtained by spheroidizing the powder, and fibers.
When the inorganic filler is in the form of particles, the average particle diameter thereof is not particularly limited. For example, the average particle diameter is preferably 0.2 to 100. mu.m, more preferably 0.5 to 50 μm. When the average particle diameter is 0.2 μm or more, the increase in viscosity of the sealing resin composition tends to be further suppressed. When the average particle diameter is 100 μm or less, the filling property tends to be further improved. The average particle diameter of the inorganic filler was determined as a volume average particle diameter (D50) by a particle size distribution measuring apparatus using a laser scattering diffraction method.
The content of the inorganic filler contained in the sealing resin composition is not particularly limited. From the viewpoint of fluidity and strength, the volume of the sealing resin composition is preferably 30 to 90% by volume, more preferably 35 to 85% by volume, and still more preferably 40 to 80% by volume. If the content of the inorganic filler is 30 vol% or more of the entire sealing resin composition, the properties of the cured product, such as the thermal expansion coefficient, thermal conductivity, and elastic modulus, tend to be further improved. If the content of the inorganic filler is 90 vol% or less of the entire sealing resin composition, the viscosity of the sealing resin composition tends to be inhibited from increasing, and the flowability and therefore the moldability tend to be improved.
[ various additives ]
The sealing resin composition may contain various additives such as coupling agents, ion exchangers, release agents, flame retardants, and colorants, which are exemplified below, in addition to the above components. The sealing resin composition may contain, in addition to the additives exemplified below, various additives known in the art as needed.
(coupling agent)
The sealing resin composition may contain a coupling agent. The sealing resin composition preferably contains a coupling agent from the viewpoint of improving the adhesion between the resin component and the inorganic filler. Examples of the coupling agent include known coupling agents such as silane compounds including epoxy silane, mercapto silane, amino silane, alkyl silane, ureido silane, vinyl silane, and disilazane, titanium compounds, aluminum chelate compounds, and aluminum/zirconium compounds.
When the sealing resin composition contains a coupling agent, the amount of the coupling agent is preferably 0.05 to 15 parts by mass, and more preferably 0.1 to 10 parts by mass, based on 100 parts by mass of the inorganic filler. When the amount of the coupling agent is 0.05 parts by mass or more per 100 parts by mass of the inorganic filler, the adhesion to the frame tends to be further improved. When the amount of the coupling agent is 15 parts by mass or less based on 100 parts by mass of the inorganic filler, the moldability of the package tends to be further improved.
(ion exchanger)
The sealing resin composition may contain an ion exchanger. The sealing resin composition preferably contains an ion exchanger from the viewpoint of improving moisture resistance and high-temperature storage characteristics of an electronic component device including a sealed element. The ion exchanger is not particularly limited, and conventionally known ion exchangers can be used. Specifically, there may be mentioned hydrotalcite compounds, hydrous oxides of at least one element selected from the group consisting of magnesium, aluminum, titanium, zirconium and bismuth, and the like. The ion exchanger may be used alone in 1 kind, or in combination of 2 or more kinds. Among them, preferred is hydrotalcite represented by the following general formula (a).
MG(1-X)AlX(OH)2(CO3)X/2·mH2O……(A)
(X is more than 0 and less than or equal to 0.5, and m is a positive number)
When the sealing resin composition contains an ion exchanger, the content thereof is not particularly limited as long as it is a sufficient amount for capturing halogen ion plasma. For example, the amount is preferably 0.1 to 30 parts by mass, more preferably 1 to 10 parts by mass, per 100 parts by mass of the resin component (the total amount of the epoxy resin and the curing agent).
(mold releasing agent)
The sealing resin composition may contain a release agent from the viewpoint of obtaining good releasability from a mold at the time of molding. The release agent is not particularly limited, and a conventionally known release agent can be used. Specific examples thereof include carnauba wax, higher fatty acids such as montanic acid and stearic acid, higher fatty acid metal salts, ester waxes such as montanic acid esters, and polyolefin waxes such as oxidized polyethylene and non-oxidized polyethylene. The mold release agent can be used alone in 1 kind, also can be combined with more than 2 kinds.
When the sealing resin composition contains a release agent, the amount thereof is preferably 0.01 to 10 parts by mass, more preferably 0.1 to 5 parts by mass, per 100 parts by mass of the resin component (total amount of the epoxy resin and the curing agent). When the amount of the release agent is 0.01 parts by mass or more per 100 parts by mass of the resin component, sufficient releasability tends to be obtained. When the amount is 10 parts by mass or less, more favorable adhesion tends to be obtained.
(flame retardant)
The sealing resin composition may contain a flame retardant. The flame retardant is not particularly limited, and conventionally known flame retardants can be used. Specifically, there may be mentioned organic or inorganic compounds containing a halogen atom, an antimony atom, a nitrogen atom or a phosphorus atom, metal hydroxides, and the like. The flame retardant may be used alone in 1 kind, or in combination of 2 or more kinds.
When the sealing resin composition contains a flame retardant, the amount thereof is not particularly limited as long as it is an amount sufficient to obtain a desired flame retardant effect. For example, the amount is preferably 1 to 30 parts by mass, and more preferably 2 to 20 parts by mass, per 100 parts by mass of the resin component (the total amount of the epoxy resin and the curing agent).
(coloring agent)
The sealing resin composition may contain a colorant. Examples of the colorant include known colorants such as carbon black, organic dyes, organic pigments, titanium oxide, lead tetraoxide, and red iron oxide. The content of the colorant can be appropriately selected depending on the purpose and the like. The colorant may be used alone in 1 kind, or in combination of 2 or more kinds.
(method for producing sealing resin composition)
The method for producing the sealing resin composition is not particularly limited. As a general method, a method of sufficiently mixing a predetermined amount of components by a mixer or the like, then melt-kneading the mixture by a mixing roll, an extruder or the like, cooling the mixture, and pulverizing the mixture can be mentioned. More specifically, for example, a method of uniformly stirring and mixing predetermined amounts of the above components, kneading the mixture with a kneader, a roll, an extruder or the like heated in advance to 70 to 140 ℃, cooling the mixture, and pulverizing the mixture can be mentioned.
The sealing resin composition is preferably solid at normal temperature and normal pressure (e.g., 25 ℃ C., atmospheric pressure). The shape of the sealing resin composition in the case of being a solid is not particularly limited, and examples thereof include a powder, a granule, and a tablet. From the viewpoint of handling properties, the size and mass of the sealing resin composition in the form of a pellet are preferably such that they meet the molding conditions for the package.
< electronic component device >
An electronic component device according to an embodiment of the present disclosure includes: an element, and a cured product of the sealing resin composition of the present disclosure sealing the element.
As an electronic component device, there is one in which an element section, which is obtained by mounting an element (an active element such as a semiconductor chip, a transistor, a diode, or a thyristor, a passive element such as a capacitor, a resistor, or a coil, or the like) on a support member such as a lead frame, a wired carrier tape, a wiring board, glass, a silicon wafer, or an organic substrate, is sealed with a sealing resin composition.
More specifically, a general resin-sealed Integrated Circuit (IC) having a structure in which an element is fixed to a lead frame, a terminal portion of the element such as a bonding pad and the lead portion are connected by wire bonding, a bump or the like, and then the element is sealed by transfer molding or the like using a sealing resin composition is exemplified, such as a Dual Inline Package (DIP), a Plastic Lead Chip Carrier (PLCC), a Quad Flat Package (QFP), a Small Outline Package (SOP), a Small Outline J-lead Package (SOJ), a Thin Small Outline Package (op), a Thin Quad Flat Package (TQFP); a Tape Carrier Package (TCP) having a structure in which a component connected by bumps is sealed on a Carrier Tape with a sealing resin composition; chip On Board (COB) modules, hybrid ICs, multi-Chip modules, and the like having a structure in which elements connected to wiring formed On a support member by wire bonding, flip Chip bonding, solder, or the like are sealed with a sealing resin composition; a Ball Grid Array (BGA) Package, a Chip Size Package (CSP), a Multi-Chip Package (MCP) Package, or the like having a structure in which an element is mounted on the surface of a support member having terminals for connecting a wiring board formed on the back surface thereof, the element and the wiring formed on the support member are connected to each other by bumps or wires, and the element is sealed with a sealing resin composition. In addition, the sealing resin composition can also be preferably used for a printed wiring board.
< method for manufacturing electronic component device >
The method for manufacturing an electronic component device of the present disclosure includes: a step of disposing an element on a support member, and a step of sealing the element with the sealing resin composition of the present disclosure.
The method for carrying out each step is not particularly limited, and can be carried out by a general method. The type of the supporting member and the element used for manufacturing the electronic component device is not particularly limited, and a supporting member and an element generally used for manufacturing the electronic component device can be used.
As a method for sealing an element using the sealing resin composition of the present disclosure, a low-pressure transfer molding method, an injection molding method, a compression molding method, and the like can be cited. Of these, low-pressure transfer molding is generally used.
[ examples ]
The embodiments are specifically described below by way of examples, but the scope of the embodiments is not limited to these examples.
< preparation of sealing resin composition >
The following components were mixed in the blending ratios (parts by mass) shown in table 1 to prepare sealing resin compositions of examples and comparative examples.
Epoxy resin 1: triphenylmethane type epoxy resin, epoxy equivalent 167g/eq (Mitsubishi chemical corporation, brand name "1032H 60")
Epoxy resin 2: biphenyl type epoxy resin, epoxy equivalent 186g/eq (Mitsubishi chemical corporation, trade name "YX-4000")
Hardening agent 1: active ester compound manufactured by DIC corporation
Hardener 2: phenol hardener manufactured by Minghe Kangsha Ltd, under the name "MEHC 7851-SS"
Hardening accelerator 1: 2-Ethyl-4-methylimidazole (four kingdoms chemical Co., Ltd.)
Hardening accelerator 2: triphenylphosphine/p-benzoquinone adduct
Coupling agent 1: 3-methacryloxypropyltrimethoxysilane (shin-Etsu chemical industries, Ltd., brand name "KBM-503")
Coupling agent 2: n-phenyl-3-aminopropyltrimethoxysilane (trade name "KBM-573" from shin-Etsu chemical industries, Ltd.)
Mold release agent: montanic acid ester wax (Clarian Japan Co., Ltd.; brand name "HW-E")
The colorant: carbon Black (Mitsubishi chemical corporation, brand name "MA 600")
Filler 1: fused silica (volume average particle diameter 6 μm)
Filler 2: fused silica (volume average particle diameter 0.6 μm)
Filler 3: fused silica (volume average particle diameter 11.2 μm)
< evaluation of Properties of sealing resin composition >
(measurement of relative dielectric constant and dielectric loss tangent)
The sealing resin composition was charged into a transfer molding machine, molded at a mold temperature of 175 ℃, a molding pressure of 2.5MPa and a curing time of 600 seconds, and cured at 175 ℃ for 6 hours to obtain a cured product in the form of a plate (12.5 mm in the vertical direction, 25mm in the horizontal direction, and about 0.2mm in the thickness). A plate-like cured product was used as a test piece, and the relative permittivity and the dielectric loss tangent at a temperature of 25. + -. 3 ℃ and 60GHz were measured using a dielectric constant measuring apparatus (Agilent, trade name "Circuit network Analyzer N5227A").
(spiral flow test)
The flow distance (inch) was determined by molding the sealing resin composition using a mold for spiral flow measurement according to EMMI-1-66 at a mold temperature of 180 ℃, a molding pressure of 6.9MPa, and a curing time of 120 seconds.
(drug resistance test)
The sealing resin composition was charged into a transfer molding machine, and the molding was carried out at a mold temperature of 180 ℃ and a molding pressure of 6.9MPa for a curing time of 90 seconds, followed by curing at 175 ℃ for 6 hours to obtain a cured product in the form of a rod (5 mm. times.5 mm. times.20 mm). A rod-shaped cured product was immersed in a mixed solution of dmso (dimethyl sulfoxide)/tmah (tetramethylammonium hydroxide, 25% AQ.) 92/8 (mass ratio) at 80 ℃ for 1 hour. The remaining rate (% by mass) was calculated from the mass of the test piece after 1 hour by the following formula, using the mass before immersion as a reference.
Residual ratio (% by mass) is (mass (g) after immersion)/mass (g) before immersion) x 100
[ Table 1]
Figure BDA0003430260350000171
Figure BDA0003430260350000181
As shown in table 1, the cured product of the sealing resin composition containing an active ester compound as a curing agent had a lower dielectric loss tangent value than the sealing resin composition of comparative example 1 containing no active ester compound as a curing agent.
The sealing resin composition of the example containing an active ester compound as a curing agent and having an equivalent ratio of the active ester compound to the epoxy resin of 0.9 or less was superior in chemical resistance to a cured product thereof, compared to the sealing resin composition of comparative example 2 having an equivalent ratio of the active ester compound to the epoxy resin of 1.0
The disclosure of japanese patent application No. 2019-118699 is incorporated by reference in its entirety into this specification.
All documents, patent applications and technical standards cited in the present specification are cited and incorporated in the present specification to the same extent as if each document, patent application and technical standard was specifically and individually described to be incorporated by reference.

Claims (5)

1. A resin composition for sealing, which contains an epoxy resin and a curing agent containing an active ester compound, wherein the equivalent ratio of the active ester compound to the epoxy resin (active ester compound/epoxy resin) is 0.9 or less.
2. The sealing resin composition according to claim 1, wherein an equivalent ratio of the active ester compound to the epoxy resin (active ester compound/epoxy resin) is 0.5 or more.
3. The sealing resin composition according to claim 1 or 2, wherein an equivalent ratio of the entire hardener to the epoxy resin (entire hardener/epoxy resin) is 0.5 to 1.2.
4. An electronic part device comprising: a support member, a device disposed on the support member, and a cured product of the sealing resin composition according to any one of claims 1 to 3 sealing the device.
5. A method for manufacturing an electronic component device includes: a step of disposing an element on a support member, and a step of sealing the element with the sealing resin composition according to any one of claims 1 to 3.
CN202080046323.8A 2019-06-26 2020-06-26 Resin composition for sealing, electronic component device, and method for manufacturing electronic component device Pending CN114008105A (en)

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