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CN103996661B - Method for generating SRAM layout - Google Patents

Method for generating SRAM layout Download PDF

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Publication number
CN103996661B
CN103996661B CN201410253555.7A CN201410253555A CN103996661B CN 103996661 B CN103996661 B CN 103996661B CN 201410253555 A CN201410253555 A CN 201410253555A CN 103996661 B CN103996661 B CN 103996661B
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unit
sram
nmos
size
shape
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CN103996661A (en
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马杰
刘梅
崔丛丛
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Shanghai Huali Microelectronics Corp
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/10Integrated device layouts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • H10B10/12Static random access memory [SRAM] devices comprising a MOSFET load element

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  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

本发明提出了一种SRAM版图的生成方法,先形成第一单元,然后复制第一单元形成第二单元,连接第一单元和第二单元构成SRAM,把SRAM中相同的参数归类,可以实现SRAM版图的自动生成,从而能够高效完成不同尺寸大小SRAM版图的实现,简化SRAM版图的设计,从而降低人工设计版图过程中产生的错误率,并缩短SRAM版图实现时间。

The invention proposes a method for generating an SRAM layout, first forming the first unit, then duplicating the first unit to form the second unit, connecting the first unit and the second unit to form an SRAM, and classifying the same parameters in the SRAM, which can realize The automatic generation of SRAM layout can efficiently complete the realization of SRAM layout of different sizes, simplify the design of SRAM layout, thereby reducing the error rate generated in the process of manual layout design, and shorten the time for SRAM layout realization.

Description

SRAM版图的生成方法SRAM layout generation method

技术领域technical field

本发明涉及半导体制造领域,尤其涉及一种SRAM版图的生成方法。The invention relates to the field of semiconductor manufacturing, in particular to a method for generating an SRAM layout.

背景技术Background technique

SRAM(Static Random Access Memory,静态随机存储记忆体)是一种只要供电就保持数据的半导体存储器。SRAM具有低功耗、数据存取速度快且与CMOS逻辑工艺兼容等优点,广泛应用于各种电子器件中。因此,SRAM是任何一个半导体逻辑制程都不可缺少的部分。SRAM (Static Random Access Memory, Static Random Access Memory) is a semiconductor memory that retains data as long as it is powered. SRAM has the advantages of low power consumption, fast data access speed and compatibility with CMOS logic technology, and is widely used in various electronic devices. Therefore, SRAM is an indispensable part of any semiconductor logic process.

基本的SRAM单元由两个交叉耦合的反相器和两个存取晶体管(通常为NMOS晶体管)构成,属于一个典型的六晶体管SRAM(6T SRAM)。具体的,SRAM可划分为第一反相器(Inverter)、第二反相器和两个NMOS晶体管(简称为NPASS),其中第一反相器由第一PMOS晶体管和第一NMOS晶体管组成,第二反相器由第二PMOS晶体管和第二NMOS晶体管组成,加上两个NMOS晶体管一共由六个晶体管(Transistor)组成。A basic SRAM cell consists of two cross-coupled inverters and two access transistors (usually NMOS transistors), which is a typical six-transistor SRAM (6T SRAM). Specifically, the SRAM can be divided into a first inverter (Inverter), a second inverter and two NMOS transistors (abbreviated as NPASS), wherein the first inverter is composed of a first PMOS transistor and a first NMOS transistor, The second inverter is composed of a second PMOS transistor and a second NMOS transistor, plus two NMOS transistors are composed of six transistors (Transistor) in total.

传统SRAM版图的生成方法是通过软件分别对每一个晶体管进行生成,然后组合成SRAM。虽然传统SRAM版图的生成方法可以满足目前SRAM版图的设计要求,但是由于SRAM中有6个晶体管,并且每个晶体管均有多个尺寸需要定义,例如栅极尺寸、有源区尺寸、以及注入层和阱层的尺寸均需要定义,因此,传统的SRAM版图的生成方法效率不高,尤其当SRAM需要对尺寸进行修改的时候,需要改动的尺寸较多,这样人为操作经常会对SRAM版图的生成产生不必要的错误,并且耗费大量的时间和精力。The traditional SRAM layout generation method is to generate each transistor separately through software, and then combine them into SRAM. Although the generation method of the traditional SRAM layout can meet the design requirements of the current SRAM layout, since there are 6 transistors in the SRAM, and each transistor has multiple dimensions that need to be defined, such as gate size, active area size, and injection layer The size of the well layer and the well layer need to be defined. Therefore, the traditional SRAM layout generation method is not efficient, especially when the size of the SRAM needs to be modified, there are many sizes that need to be changed, so human operations often affect the generation of the SRAM layout. Unnecessary errors are made and a lot of time and effort is wasted.

发明内容Contents of the invention

本发明的目的在于提供一种SRAM版图的生成方法,能够归类相同的参数,实现SRAM版图的自动生成,提高效率。The purpose of the present invention is to provide a method for generating SRAM layout, which can classify the same parameters, realize automatic generation of SRAM layout, and improve efficiency.

为了实现上述目的,本发明提出了一种SRAM版图的生成方法,包括步骤:In order to achieve the above object, the present invention proposes a method for generating an SRAM layout, comprising steps:

定义第一反相器栅极的形状和尺寸;defining the shape and size of the gate of the first inverter;

由所述第一反相器栅极的形状和尺寸定义出第一反相器中的第一PMOS晶体管和第一NMOS晶体管有源区的形状和尺寸;The shape and size of the active region of the first PMOS transistor and the first NMOS transistor in the first inverter are defined by the shape and size of the gate of the first inverter;

定义第一输入端NMOS栅极的形状和尺寸;defining the shape and size of the NMOS gate at the first input terminal;

以所述第一输入端NMOS栅极的形状和尺寸定义出所述第一输入端NMOS有源区的形状和尺寸;The shape and size of the first input NMOS active region are defined by the shape and size of the first input NMOS gate;

以所述第一输入端NMOS有源区的形状和尺寸定义出第一注入层和第一阱层的形状和尺寸;The shape and size of the first injection layer and the first well layer are defined by the shape and size of the first input NMOS active region;

使所述第一PMOS晶体管和第一NMOS晶体管的漏极连接在一起,使所述第一输入端NMOS和第一NMOS晶体管的有源区连接在一起,并且使所述第一输入端NMOS和第一NMOS晶体管的漏极也连接在一起,从而构成第一单元;Connecting the drains of the first PMOS transistor and the first NMOS transistor together, connecting the first input terminal NMOS and the active region of the first NMOS transistor together, and connecting the first input terminal NMOS and the first NMOS transistor together The drains of the first NMOS transistors are also connected together, thereby constituting the first unit;

复制所述第一单元,旋转180度,形成第二单元;Duplicate the first unit and rotate it by 180 degrees to form the second unit;

使所述第一单元中的第一PMOS晶体管漏极和第二单元中的第二反相器栅极相连,使所述第二单元中的第二PMOS晶体管漏极和第一单元中的第一反相器栅极相连,从而生成SRAM版图。The drain of the first PMOS transistor in the first unit is connected to the gate of the second inverter in the second unit, and the drain of the second PMOS transistor in the second unit is connected to the gate of the second inverter in the first unit. An inverter gate is connected to generate the SRAM layout.

进一步的,所述第一PMOS晶体管和第一NMOS晶体管的漏极通过通孔连线和金属连线连接在一起。Further, the drains of the first PMOS transistor and the first NMOS transistor are connected together through a via connection and a metal connection.

进一步的,所述第一输入端NMOS和第一NMOS晶体管的漏极通过通孔连线连接在一起。Further, the first input terminal NMOS and the drain of the first NMOS transistor are connected together through a via hole.

进一步的,所述第一单元中的第一PMOS晶体管漏极和第二单元中的第二反相器栅极通过通孔连线相连。Further, the drain of the first PMOS transistor in the first unit is connected to the gate of the second inverter in the second unit through a via.

进一步的,所述第二单元中的第二PMOS晶体管漏极和第一单元中的第一反相器栅极通过通孔连线相连。Further, the drain of the second PMOS transistor in the second unit is connected to the gate of the first inverter in the first unit through a via hole.

进一步的,所述通孔连线均通过金属连线引出。Further, the through-hole connections are all led out through metal connections.

与现有技术相比,本发明的有益效果主要体现在:先形成第一单元,然后复制第一单元形成第二单元,连接第一单元和第二单元构成SRAM,把SRAM中相同的参数归类,可以实现SRAM版图的自动生成,从而能够高效完成不同尺寸大小SRAM版图的实现,简化SRAM版图的设计,从而降低人工设计版图过程中产生的错误率,并缩短SRAM版图实现时间。Compared with the prior art, the beneficial effects of the present invention are mainly reflected in: first forming the first unit, then duplicating the first unit to form the second unit, connecting the first unit and the second unit to form an SRAM, and returning the same parameters in the SRAM to class, which can realize the automatic generation of SRAM layout, so that the realization of SRAM layout of different sizes can be efficiently completed, the design of SRAM layout can be simplified, thereby reducing the error rate generated in the process of manual layout design, and shortening the implementation time of SRAM layout.

附图说明Description of drawings

图1为本发明一实施例中SRAM版图的生成方法的流程图;Fig. 1 is the flowchart of the generation method of SRAM layout in an embodiment of the present invention;

图2为本发明一实施例中第一单元的结构示意图;Fig. 2 is a schematic structural diagram of the first unit in an embodiment of the present invention;

图3为本发明一实施例中SRAM版图的结构示意图。FIG. 3 is a schematic structural diagram of an SRAM layout in an embodiment of the present invention.

具体实施方式detailed description

下面将结合示意图对本发明的SRAM版图的生成方法进行更详细的描述,其中表示了本发明的优选实施例,应该理解本领域技术人员可以修改在此描述的本发明,而仍然实现本发明的有利效果。因此,下列描述应当被理解为对于本领域技术人员的广泛知道,而并不作为对本发明的限制。The method for generating the SRAM layout of the present invention will be described in more detail below in conjunction with the schematic diagram, wherein a preferred embodiment of the present invention is shown, and it should be understood that those skilled in the art can modify the present invention described here, while still realizing the advantages of the present invention Effect. Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.

为了清楚,不描述实际实施例的全部特征。在下列描述中,不详细描述公知的功能和结构,因为它们会使本发明由于不必要的细节而混乱。应当认为在任何实际实施例的开发中,必须做出大量实施细节以实现开发者的特定目标,例如按照有关系统或有关商业的限制,由一个实施例改变为另一个实施例。另外,应当认为这种开发工作可能是复杂和耗费时间的,但是对于本领域技术人员来说仅仅是常规工作。In the interest of clarity, not all features of an actual implementation are described. In the following description, well-known functions and constructions are not described in detail since they would obscure the invention with unnecessary detail. It should be appreciated that in the development of any actual embodiment, numerous implementation details must be worked out to achieve the developer's specific goals, such as changing from one embodiment to another in accordance with system-related or business-related constraints. Additionally, it should be recognized that such a development effort might be complex and time consuming, but would nevertheless be merely a routine undertaking for those skilled in the art.

在下列段落中参照附图以举例方式更具体地描述本发明。根据下面说明和权利要求书,本发明的优点和特征将更清楚。需说明的是,附图均采用非常简化的形式且均使用非精准的比例,仅用以方便、明晰地辅助说明本发明实施例的目的。In the following paragraphs the invention is described more specifically by way of example with reference to the accompanying drawings. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

本发明的核心思想是,由于6T SRAM具有第一反相器、第一输入端NMOS、第二反相器以及第二输入端NMOS组成,并且第一反相器中第一NMOS晶体管、第一PMOS晶体管分别和第二反相器中中的第二NMOS晶体管、第二PMOS晶体管参数完全相同,并且第一输入端NMOS和第二输入端NMOS的参数也完全相同,因此可以将具有大量相同的参数进行归类,形成第一单元,然后复制第一单元进行旋转获得第二单元,将第一单元和第二单元进行连接即可以获得6T SRAM版图。The core idea of the present invention is that since the 6T SRAM has a first inverter, a first input terminal NMOS, a second inverter and a second input terminal NMOS, and in the first inverter, the first NMOS transistor, the first The parameters of the PMOS transistor and the second NMOS transistor and the second PMOS transistor in the second inverter are exactly the same, and the parameters of the first input terminal NMOS and the second input terminal NMOS are also completely the same, so it is possible to have a large number of identical The parameters are classified to form the first unit, then the first unit is copied and rotated to obtain the second unit, and the first unit and the second unit are connected to obtain the 6T SRAM layout.

具体的,请参考图1、图2和图3,图1为本发明一实施例中SRAM版图的生成方法的流程图,图2为本发明一实施例中第一单元的结构示意图,图3为本发明一实施例中SRAM版图的结构示意图;在本实施例中,提出的SRAM版图的生成方法,包括步骤:Specifically, please refer to FIG. 1, FIG. 2 and FIG. 3. FIG. 1 is a flowchart of a method for generating an SRAM layout in an embodiment of the present invention. FIG. 2 is a schematic structural diagram of the first unit in an embodiment of the present invention. FIG. 3 It is a schematic structural diagram of the SRAM layout in an embodiment of the present invention; in this embodiment, the method for generating the proposed SRAM layout includes steps:

S100:定义第一反相器栅极61的形状和尺寸;S100: Define the shape and size of the first inverter gate 61;

在步骤S100中,第一反相器栅极61的形状和尺寸可以根据具体的工艺要求来决定,不同的栅极61尺寸可以获得不同尺寸的SRAM版图。In step S100 , the shape and size of the first inverter gate 61 can be determined according to specific process requirements, and different sizes of the gate 61 can obtain SRAM layouts of different sizes.

S200:由所述第一反相器栅极61的形状和尺寸定义出第一反相器10中的第一PMOS晶体管12和第一NMOS晶体管11有源区的形状和尺寸;S200: Define the shape and size of the active regions of the first PMOS transistor 12 and the first NMOS transistor 11 in the first inverter 10 according to the shape and size of the first inverter gate 61;

S300:定义第一输入端NMOS栅极62的形状和尺寸;S300: Define the shape and size of the NMOS gate 62 at the first input terminal;

同样的,在步骤S300中,第一输入端NMOS栅极62的形状和尺寸可以根据具体的工艺要求来决定,不同的第一输入端NMOS栅极62尺寸可以获得不同尺寸的SRAM版图。Similarly, in step S300 , the shape and size of the NMOS gate 62 at the first input terminal can be determined according to specific process requirements, and different sizes of the NMOS gate 62 at the first input terminal can obtain SRAM layouts of different sizes.

S400:以所述第一输入端NMOS栅极62的形状和尺寸定义出所述第一输入端NMOS30有源区的形状和尺寸;S400: Define the shape and size of the active region of the first input NMOS 30 according to the shape and size of the first input NMOS gate 62;

S500:以所述第一输入端NMOS30有源区的形状和尺寸定义出第一注入层13和第一阱层14的形状和尺寸;S500: Define the shape and size of the first injection layer 13 and the first well layer 14 according to the shape and size of the active region of the first input NMOS 30;

S600:使所述第一PMOS晶体管12和第一NMOS晶体管11的漏极连接在一起,使所述第一输入端NMOS30和第一NMOS晶体管11的有源区连接在一起,并且使所述第一输入端NMOS30和第一NMOS晶体管11的漏极也连接在一起,从而构成第一单元,如图2所示;S600: Connect the drains of the first PMOS transistor 12 and the first NMOS transistor 11 together, connect the first input terminal NMOS30 and the active region of the first NMOS transistor 11 together, and connect the first NMOS transistor 11 An input terminal NMOS30 and the drain of the first NMOS transistor 11 are also connected together to form a first unit, as shown in FIG. 2 ;

S700:复制所述第一单元,旋转180度,形成第二单元;S700: Duplicating the first unit and rotating it by 180 degrees to form a second unit;

其中,所述第二单元中包括第二反相器20、第二输入端NMOS40、第二注入层和第二阱层,所述第二反相器20中包括第二反相器栅极63、第一PMOS晶体管22和第一NMOS晶体管21,所述第二输入端NMOS40包括第二输入端NMOS栅极64,如图3所示,在此,为了附图的简洁,图3中省略了第一注入层13、第一阱层14、第二注入层、第二阱层以及部分金属连线。Wherein, the second unit includes a second inverter 20, a second input terminal NMOS40, a second injection layer and a second well layer, and the second inverter 20 includes a second inverter gate 63 , the first PMOS transistor 22 and the first NMOS transistor 21, the second input terminal NMOS40 includes a second input terminal NMOS gate 64, as shown in FIG. The first injection layer 13 , the first well layer 14 , the second injection layer, the second well layer and some metal wirings.

S800:使所述第一单元中的第一PMOS晶体管12漏极和第二单元中的第二反相器栅极63相连,使所述第二单元中的第二PMOS晶体管22漏极和第一单元中的第一反相器栅极61相连,从而生成SRAM版图。S800: Connect the drain of the first PMOS transistor 12 in the first unit to the gate 63 of the second inverter in the second unit, and connect the drain of the second PMOS transistor 22 in the second unit to the second inverter gate 63 in the second unit. The gates 61 of the first inverters in a cell are connected to create an SRAM layout.

在本实施例中,所述第一PMOS晶体管12和第一NMOS晶体管11的漏极通过通孔连线50和金属连线70连接在一起;所述第一输入端NMOS30和第一NMOS晶体管11的漏极通过通孔连线50连接在一起;所述第一单元中的第一PMOS晶体管12漏极和第二单元中的第二反相器栅极63通过通孔连线50相连;所述第二单元中的第二PMOS晶体管漏极22和第一单元中的第一反相器栅极61通过通孔连线50相连;实际生产中,所述通孔连线50均通过金属连线70引出,以方便外接电路。In this embodiment, the drains of the first PMOS transistor 12 and the first NMOS transistor 11 are connected together through a via connection 50 and a metal connection 70; the first input terminal NMOS30 and the first NMOS transistor 11 The drains of the drains are connected together through the through-hole connection 50; the drain of the first PMOS transistor 12 in the first unit is connected with the second inverter gate 63 in the second unit through the through-hole connection 50; The second PMOS transistor drain 22 in the second unit is connected to the first inverter gate 61 in the first unit through a through-hole connection 50; in actual production, the through-hole connection 50 is connected through a metal connection. Line 70 leads out to facilitate external circuit connection.

采用本实施例提出的SRAM版图生成方法,采用SMARTCELL软件进行实现,无需针对每一个晶体管进行尺寸的修改和定义,只需要修改较少的自变量,如第一反相器栅极的形状和尺寸、第一输入端NMOS栅极的形状和尺寸即可实现对6个晶体管的全部形状和尺寸的修改。因此,可以较快捷的获得不同尺寸的SRAM,降低了人工修改较多参数可能出现的错误概率。Using the SRAM layout generation method proposed in this embodiment and using SMARTCELL software for implementation, there is no need to modify and define the size of each transistor, and only need to modify fewer independent variables, such as the shape and size of the first inverter gate 1. The shape and size of the NMOS gate at the first input terminal can realize the modification of all the shapes and sizes of the six transistors. Therefore, SRAMs of different sizes can be obtained more quickly, reducing the probability of errors that may occur when manually modifying many parameters.

综上,在本发明实施例提供的SRAM版图的生成方法中,先形成第一单元,然后复制第一单元形成第二单元,连接第一单元和第二单元构成SRAM,把SRAM中相同的参数归类,可以实现SRAM版图的自动生成,从而能够高效完成不同尺寸大小SRAM版图的实现,简化SRAM版图的设计,从而降低人工设计版图过程中产生的错误率,并缩短SRAM版图实现时间。To sum up, in the SRAM layout generation method provided by the embodiment of the present invention, the first unit is first formed, then the first unit is copied to form the second unit, the first unit and the second unit are connected to form the SRAM, and the same parameters in the SRAM are Classification can realize the automatic generation of SRAM layout, so that the realization of SRAM layout of different sizes can be completed efficiently, the design of SRAM layout can be simplified, thereby reducing the error rate generated in the process of manual layout design, and shortening the realization time of SRAM layout.

上述仅为本发明的优选实施例而已,并不对本发明起到任何限制作用。任何所属技术领域的技术人员,在不脱离本发明的技术方案的范围内,对本发明揭露的技术方案和技术内容做任何形式的等同替换或修改等变动,均属未脱离本发明的技术方案的内容,仍属于本发明的保护范围之内。The foregoing are only preferred embodiments of the present invention, and do not limit the present invention in any way. Any person skilled in the technical field, within the scope of the technical solution of the present invention, makes any form of equivalent replacement or modification to the technical solution and technical content disclosed in the present invention, which does not depart from the technical solution of the present invention. The content still belongs to the protection scope of the present invention.

Claims (6)

1. a kind of generation method of SRAM domain, including step:
Define the shape and size of the first inverter gate;
Define the first PMOS transistor and first in the first phase inverter by the shape and size of described first inverter gate The shape and size of nmos pass transistor active area;
Define the shape and size of first input end NMOS gate;
Define the shape of described first input end NMOS active area with the shape and size of described first input end NMOS gate And size;
With the shape and size of described first input end NMOS active area define the first implanted layer and the first well layer shape and Size;
So that the drain electrode of described first PMOS transistor and the drain electrode of the first nmos pass transistor is linked together, make described first input The active area of the active area of end NMOS and the first nmos pass transistor links together, and makes the leakage of described first input end NMOS The drain electrode of pole and the first nmos pass transistor also links together, thus constituting first module;
Replicate described first module, rotate 180 degree, form second unit;
So that the first PMOS transistor drain electrode in described first module is connected with the second inverter gate in second unit, make institute The the second PMOS transistor drain electrode stated in second unit is connected with the first inverter gate in first module, thus generating SRAM Domain.
2. the generation method of SRAM domain as claimed in claim 1 is it is characterised in that the drain electrode of described first PMOS transistor Drain electrode with the first nmos pass transistor is linked together by through hole line and metal connecting line.
3. the generation method of SRAM domain as claimed in claim 2 is it is characterised in that the drain electrode of described first input end NMOS Drain electrode with the first nmos pass transistor is linked together by through hole line.
4. the generation method of SRAM domain as claimed in claim 3 is it is characterised in that a PMOS in described first module Transistor drain is connected by through hole line with the second inverter gate in second unit.
5. the generation method of SRAM domain as claimed in claim 4 is it is characterised in that the 2nd PMOS in described second unit Transistor drain is connected by through hole line with the first inverter gate in first module.
6. the generation method of SRAM domain as claimed in claim 5 is it is characterised in that described through hole line is all connected by metal Line is drawn.
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