CN103940348B - A kind of device and method of working table movement error multiple degrees of freedom detection - Google Patents
A kind of device and method of working table movement error multiple degrees of freedom detection Download PDFInfo
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Abstract
The invention discloses the device and method of a kind of working table movement error multiple degrees of freedom detection, the reflection light of the present invention adjusts reflecting mirror through light path and reflexes on fixing thrihedral reflector on the table, after the reflection successively of thrihedral reflector, return to light path and adjust reflecting mirror, and reflex on the second light splitting piece, after the reflection of the second light splitting piece, enter beam expanding lens, project on detector；Transmission light, after the transmission of the second light splitting piece, enters beam expanding lens, projects on detector.Two-beam produces to interfere on the detector, the measurement to the adjustment of the shape of interference fringe with phase shift, it is possible to realize the measurement of the deflection to workbench and moving displacement；The present invention can be used on the synchronous real-time measurement of the angle of oscillation to workbench, the angle of pitch and axially-movable displacement, thus can carrying out real-Time Compensation by measurement result, eliminating the impact of kinematic error, thus improving certainty of measurement and the accuracy of manufacture.The measurement scope of angle, within the scope of ± 3mrad, meets the measurement requirement of workbench.
Description
Technical field
The present invention relates to a kind of workbench multiple degrees of freedom detecting device, this device can realize the synchro measure of workbench angle of oscillation, the angle of pitch and rectilinear motion displacement.
Background technology
Precision stage is measuring surface form and precision machined critical component, and its kinematic accuracy directly decides certainty of measurement and machining accuracy, thus research and design are significant to inclined and that line the is inclined real-time online measuring method of work corner of table.
At present in the measuring method to working table movement error, high-precision measuring method, measured degree of freedom maybe can only carry out single-degree-of-freedom measurement less；In multi-degree of freedom measurement method, certainty of measurement is relatively low, or adopts knockdown metering system certainty of measurement high, but cost is high, bulky.
Existing working table movement error measurement method mainly has several: one is adopt laser interferance method, namely based on the interferometric method of laser interference principle, the various combinations on the table of Application Optics element, by to the reflection of laser and refraction etc., form the optical path difference relevant to working table movement error, the calculating of the phase contrast then optical path difference caused, obtains the kinematic error of workbench.Due to optical maser wavelength for standard, so certainty of measurement can reach high requirement, but generally can only meeting the requirement of single-degree-of-freedom, when requiring to carry out multi-degree of freedom measurement, it is necessary to adopt multiple similar laser interferometer, this causes that system structure is excessively huge simultaneously.Two are based on laser alignment principle measures two dimension angular, directly utilizes 4 quadrant detector or CCD obtains hot spot center of gravity, guide rail or workbench linearity are measured.The method, except needing laser beam carries out strict collimation process, due to the impact of the Stimulated Light hot spot angle of divergence Yu beam drift, is extremely difficult to high-precision requirement；Three is the method that other multi sensor combinations are measured, including adopting the sensor such as electric capacity, grating, workbench different parts is measured, thus calculating its kinematic error, general this method structure is complicated, is suitable only for the research and analysis that special workbench carries out kinematic error.And installation requirement is significantly high, the requirement of environment is also very strict, relatively costly.
Summary of the invention
In order to solve above-mentioned technical problem, the invention provides the device and method of a kind of working table movement error multiple degrees of freedom detection, for the synchronous detecting of precision stage kinematic error.
Assembly of the invention be the technical scheme is that the device that a kind of working table movement error multiple degrees of freedom detects, and passes through PC control；It is characterized in that: include LASER Light Source unit, laser optical path direction adjusts and measures target surface unit and opto-electronic receiver and converting unit with interference modulations unit, thrihedral reflector；The laser part that described LASER Light Source unit produces passes straight through described laser optical path direction as reference path light and adjusts and after interference modulations unit, project in described opto-electronic receiver and converting unit, another part one adjusts and interference modulations unit once described laser optical path direction respectively as optical path light, thrihedral reflector measures target surface unit, laser optical path direction adjusts after reflecting with interference modulations sequence of unit, project in described opto-electronic receiver and converting unit, described optical path light and reference path light produce to interfere in described opto-electronic receiver with converting unit；Described host computer adjusts respectively at described laser optical path direction and is connected with converting unit with interference modulations unit and opto-electronic receiver, for controlling described laser optical path direction adjustment and interference modulations unit and opto-electronic receiver and converting unit；Described thrihedral reflector is measured target surface unit and is fixed on described workbench, motion and deflection with workbench, change light path light path and direction, simultaneously described laser optical path direction adjusts with interference modulations unit according to interferometric fringe signal shape, adjust optical path direction in real time, ensure to have relatively-stationary angle between optical path and reference path, thus ensureing that interferometric fringe signal shape is basicly stable；Described opto-electronic receiver and converting unit have been used for the opto-electronic receiver of interferometric fringe signal, fringe count and shape of stripes identification, and adjusted and interference modulations unit by the output control laser optical path direction identified, host computer also completes laser optical path direction and adjusts the modulation driving control and optical path difference with interference modulations unit simultaneously, it is achieved the multivariant measurement of workbench.
As preferably, described LASER Light Source unit includes high frequency stabilized carbon dioxide laser and beam-expanding collimation device, and the laser that described high frequency stabilized carbon dioxide laser produces is input to described laser optical path direction after described beam-expanding collimation device and adjusts and in interference modulations unit；Thus it is long to ensure that laser has high frequency stabilization feature, coherence length, the hot spot angle of divergence of beam-expanding collimation device output is little, and should ensure that spot diameter is more than 5mm, meets the requirement of sufficiently wide interference fringe.
As preferably, described laser optical path direction adjustment and interference modulations unit include the first light splitting piece, second light splitting piece, the PZT device of Three Degree Of Freedom, light path adjusts reflecting mirror or beat mirror, beam expanding lens and yaw drive, described yaw drive one end is connected with described host computer, the other end is connected with the PZT device of described Three Degree Of Freedom, PZT device for controlling described Three Degree Of Freedom performs Three Degree Of Freedom adjustment, the laser part that described LASER Light Source unit produces passes straight through the first described light splitting piece as reference path, project in described opto-electronic receiver and converting unit after second light splitting piece and beam expanding lens, another part distinguishes one once the first described light splitting piece as optical path, light path adjusts reflecting mirror or beat mirror, thrihedral reflector measures target surface unit, after light path adjusts reflecting mirror or beat mirror and the second light splitting piece order-reflected, project after described beam expanding lens in described opto-electronic receiver and converting unit.The PZT device of Three Degree Of Freedom, it is possible to completeθ x ,θ y With z to adjustment, adjusting range respectively ± 3mrad, ± 3mrad and 30 μm.
As preferably, the PZT device of described Three Degree Of Freedom is moved device formed by two dimension beat and one dimension displacement.Two dimension beat realizes the waving of light path, luffing angle adjustment, it is ensured that in measurement process, input path direction overlaps with intermediate mirrors normal；One dimension displacement drives along reflecting mirror normal direction, is used for modulating optical path difference, it is simple to the collection of dynamic interference fringe.
As preferably, described thrihedral reflector is measured target surface unit and is formed by three combination plane mirrow, mid-plane mirror is 120 ° with both sides incidence or exit plane mirror angle, described optical path light, after three plane mirrors reflect successively, projects described laser optical path direction and adjusts and in interference modulations unit；And in measurement process, it is desirable to intermediate mirrors normal overlaps with light path.Thrihedral reflector is fixing on the table as target surface, it is placed in the measurement arm light path of laser interference system, when workbench produces to wave pitching with axially-movable, there is corresponding change in the optical path beam direction returned, make the shape of interference fringe and phase shift also change with optical path difference simultaneously.Method through thrihedral reflector reflected light path, it is different from the method for reflection of conventional corner cube, it remains the deflection information of workbench, avoid the problem adopting monoplane mirror reflection tailing edge original optical path to return simultaneously, make measurement system need not light every when, it is to avoid the feedback phenomenon of laser.
As preferably, described opto-electronic receiver and converting unit include detector, photoelectric switching circuit, A/D sample circuit and shaping and segmentation sensing circuit, after described A/D sample circuit and shaping are connected with segmentation sensing circuit in parallel, with described host computer, detector and photoelectric switching circuit are connected in series, adjust and the light of interference modulations unit projection for receiving described laser optical path direction, and carry out opto-electronic conversion post-sampling, the signal of sampling is through difference shaping, carry out the subdivision and count of interference fringe, application ellipse fitting or trigonometric function method realize the identification of shape of interference fringe.
As preferably, described detector adopts symmetrical ' matrix pattern ' 4 quadrant detector.
As preferably, described photoelectric switching circuit is completed by four NPN audions and four resistance, utilize audion that four amplifications are consistent and the identical resistance of four sizes, completed by the mode of Current amplifier, it is ensured that detector signal has identical amplification.
As preferably, described shaping is made up of difference channel, comparison circuit and segmentation sensing circuit with segmentation sensing circuit, and the counting completing interference fringe processes, and obtains Z-direction displacement.
As preferably, described A/D sample circuit is made up of high-speed synchronous A/D change-over circuit, and synchronizing speed reaches more than 100k.
The method of the present invention be the technical scheme is that a kind of method that working table movement error multiple degrees of freedom detects, it is characterised in that comprises the following steps:
Step 1: before measurement, the device that debugging is described, ensure that optical path incident ray is parallel to emergent ray, namely incident ray is parallel to the intermediate mirror normal of thrihedral reflector measurement target surface unit, then adjust described laser optical path direction to adjust and interference modulations unit, ensure to measure and between light and reference ray, form an only small angle, there is suitable interference fringe in opto-electronic receiver and converting unit, making the difference of differential signal of interference fringe close proximity to 90 °, the segmentation sensing being so easy to interferometric fringe signal processes with counting；
Step 2: start described workbench, start to measure, drive laser optical path direction to adjust to move with interference modulations unit Z-direction in a wavelength, while carrying out interference modulations, the photosignal that opto-electronic receiver and converting unit detect carries out difference processing on the one hand, obtains the primary signal for counting；Calculate signal phase difference accurately by ellipse fitting or sin cos functions multiplication algorithm on the other hand, adjust the calculating of parameter for optical path direction deflection angle；
Step 3: by the phase contrast calculated and deflection angle parameter, shows deflection angle on the one hand, controls laser optical path direction on the other hand and adjusts and interference modulations unit, adjusts angle, makes the size of interference fringe not by the impact of working table movement error.
Present invention is characterized in that
(1) according to thrihedral reflector with the deflection of workbench, the motion impact on beam direction Yu light path, the principle of shape of interference fringe and phase shift variations is caused, it is achieved to the multivariant measurement of workbench；
(2) through the method for thrihedral reflector reflected light path, it is different from the method for reflection of conventional corner cube, it remains the deflection information of workbench, avoid the problem adopting monoplane mirror reflection tailing edge original optical path to return simultaneously, make measurement system need not light every when, it is to avoid the feedback phenomenon of laser；
(3) utilize two dimension deflection device, the shape feedback processing according to interference fringe, adjust light path in real time, it is ensured that shape of interference fringe is basicly stable, do not affect the synchro measure of grand movement displacement；
(4) adopt piezoelectric actuator to realize the modulation of optical path difference, improve the precision to stripe signal phase extraction；
(5) the symmetrical 4 quadrant detector of application carries out stripe signal reception, it is achieved the extraction of stripe signal shape, and its sampling and processing speed are far superior to sampling and the processing speed of CCD.
Relative to prior art, the present invention can be used on precision surface and measures and in Precision Machining, synchronous real-time measurement to the angle of oscillation of workbench, the angle of pitch and axially-movable displacement, thus can carry out real-Time Compensation by measurement result, eliminate the impact of kinematic error, thus improving certainty of measurement and the accuracy of manufacture, the measurement scope of angle of the present invention, within the scope of ± 3mrad, meets the measurement requirement of workbench.
Accompanying drawing explanation
Fig. 1: for the structure drawing of device of the embodiment of the present invention.
Fig. 2: for the method flow diagram of the embodiment of the present invention.
Detailed description of the invention
Understand for the ease of those of ordinary skill in the art and implement the present invention, below in conjunction with drawings and Examples, the present invention is described in further detail, should be appreciated that enforcement example described herein is merely to illustrate and explains the present invention, be not intended to limit the present invention.
Asking for an interview Fig. 1, assembly of the invention be the technical scheme is that the device that a kind of working table movement error multiple degrees of freedom detects, and passes through PC control；Adjust and measure target surface unit 3 and opto-electronic receiver and converting unit 4 including LASER Light Source unit 1, laser optical path direction with interference modulations unit 2, thrihedral reflector；LASER Light Source unit 1 includes high frequency stabilized carbon dioxide laser 101 and beam-expanding collimation device 102, the adjustment of laser optical path direction and interference modulations unit 2 include the first light splitting piece 201, second light splitting piece 202, the PZT device 203 of Three Degree Of Freedom, light path adjusts reflecting mirror or beat mirror 204, beam expanding lens 205 and yaw drive 206, yaw drive 206 one end is connected with host computer, the other end is connected with the PZT device 203 of Three Degree Of Freedom, PZT device 203 for controlling Three Degree Of Freedom performs Three Degree Of Freedom adjustment, the PZT device 203 of Three Degree Of Freedom is moved device formed by two dimension beat and one dimension displacement, thrihedral reflector is measured target surface unit 3 and is formed by three combination plane mirrow, mid-plane mirror is 120 ° with both sides incidence or exit plane mirror angle, opto-electronic receiver and converting unit 4 include detector 401, photoelectric switching circuit 402, A/D sample circuit 403 and shaping and segmentation sensing circuit 404；The laser that high frequency stabilized carbon dioxide laser 101 produces is after beam-expanding collimation device 102, a part projects in detector 401 after passing straight through first light splitting piece the 201, second light splitting piece 202 and beam expanding lens 205 as reference path, another part, projects in detector 401 as optical path difference one after the first light splitting piece 201, light path adjust reflecting mirror or beat mirror 204, thrihedral reflector measurement three plane mirrors of target surface unit 3, light path adjustment reflecting mirror or beat mirror 204 and the second light splitting piece 202 order-reflected after beam expanding lens 205；After A/D sample circuit 403 and shaping and segmentation sensing circuit 404 are connected in parallel, it is connected in series with host computer, detector 401 and photoelectric switching circuit 402, for receiving the light of beam expanding lens 205 projection, and carry out opto-electronic conversion post-sampling, the signal of sampling is through difference shaping, carrying out the subdivision and count of interference fringe, application ellipse fitting or trigonometric function method realize the identification of shape of interference fringe.
The detector 401 of the present embodiment adopts ' matrix pattern ' 4 quadrant detector of symmetry, photoelectric switching circuit 402 is completed by four NPN audions and four resistance, utilize audion that four amplifications are consistent and the identical resistance of four sizes, completed by the mode of Current amplifier, ensure that detector 401 signal has identical amplification, shaping and segmentation sensing circuit 404 are by difference channel, comparison circuit is constituted with segmentation sensing circuit, the counting completing interference fringe processes, obtain Z-direction displacement, A/D sample circuit 403 is made up of high-speed synchronous A/D change-over circuit, synchronizing speed reaches more than 100k.
The method of the present invention be the technical scheme is that a kind of method that working table movement error multiple degrees of freedom detects, and comprises the following steps:
Step 1: before formal measurement, ensures that optical path incident ray is parallel to emergent ray as far as possible, and namely incident ray is parallel to the normal of three measurement in a closed series intermediate mirror as far as possible.Then the angle of the second light splitting piece 202 is adjusted, ensure to measure and between light and reference ray, form an only small angle, occurring suitable interference fringe on detector, make the difference of differential signal of interference fringe close proximity to 90 °, the segmentation sensing being so easy to stripe signal processes with counting；
Step 2: start workbench, starts to measure.The Z-direction motion in a wavelength of the PZT device 203 of driving Three Degree Of Freedom, while carrying out interference modulations.The photosignal of 4 quadrant detector 401 detection is sent into shaping on the one hand and is carried out difference processing with the difference channel segmenting sensing circuit 404, obtains the primary signal for counting；Send into the high-speed synchronous A/D change-over circuit of A/D sample circuit 403 on the other hand, calculate signal phase difference accurately by ellipse fitting or sin cos functions multiplication algorithm, adjust the calculating of parameter for optical path direction deflection angle；
Step 3: by the phase contrast calculated and deflection angle parameter, shows deflection angle on the one hand, controls the PZT device 203 of Three Degree Of Freedom on the other hand, adjusts beat mirror angle, makes the size of interference fringe not by the impact of working table movement error.
Although more employing LASER Light Source unit 1 herein, laser optical path direction adjusts and interference modulations unit 2, thrihedral reflector measures target surface unit 3, opto-electronic receiver and converting unit 4, high frequency stabilized carbon dioxide laser 101, beam-expanding collimation device 102, first light splitting piece 201, second light splitting piece 202, the PZT device 203 of Three Degree Of Freedom, light path adjusts reflecting mirror or beat mirror 204, beam expanding lens 205, yaw drive 206, detector 401, photoelectric switching circuit 402, A/D sample circuit 403 and the term such as shaping and segmentation sensing circuit 404, but it is not precluded from using the probability of other terms.Using these terms to be only used to describe more easily the essence of the present invention, it is all contrary with spirit of the present invention for being construed as any additional restriction.
Should be understood that; the above-mentioned description for preferred embodiment is comparatively detailed; therefore the restriction to scope of patent protection of the present invention can not be thought; those of ordinary skill in the art is under the enlightenment of the present invention; under the ambit protected without departing from the claims in the present invention; can also making replacement or deformation, each fall within protection scope of the present invention, the scope that is claimed of the present invention should be as the criterion with claims.
Claims (11)
1. a device for working table movement error multiple degrees of freedom detection, passes through PC control；It is characterized in that: include LASER Light Source unit (1), laser optical path direction adjusts and measures target surface unit (3) and opto-electronic receiver and converting unit (4) with interference modulations unit (2), thrihedral reflector；The laser part that described LASER Light Source unit (1) produces passes straight through described laser optical path direction as reference path light and adjusts and after interference modulations unit (2), project in described opto-electronic receiver and converting unit (4), another part one adjusts and interference modulations unit (2) once described laser optical path direction respectively as optical path light, thrihedral reflector measures target surface unit (3), laser optical path direction adjusts and after interference modulations unit (2) order-reflected, project in described opto-electronic receiver and converting unit (4), described optical path light and reference path light produce to interfere in described opto-electronic receiver with converting unit (4)；Described host computer adjusts respectively at described laser optical path direction and is connected with converting unit (4) with interference modulations unit (2) and opto-electronic receiver, for controlling described laser optical path direction adjustment and interference modulations unit (2) and opto-electronic receiver and converting unit (4)；Described thrihedral reflector is measured target surface unit (3) and is fixed on described workbench, motion and deflection with workbench, change light path light path and direction, simultaneously described laser optical path direction adjusts with interference modulations unit (2) according to interferometric fringe signal shape, adjust optical path direction in real time, ensure to have relatively-stationary angle between optical path and reference path, thus ensureing that interferometric fringe signal shape is basicly stable；Described opto-electronic receiver and converting unit (4) have been used for the opto-electronic receiver of interferometric fringe signal, fringe count and shape of stripes identification, and adjusted and interference modulations unit (2) by the output control laser optical path direction identified, host computer also completes laser optical path direction and adjusts the modulation driving control and optical path difference with interference modulations unit (2) simultaneously, it is achieved the multivariant measurement of workbench.
2. the device of working table movement error multiple degrees of freedom according to claim 1 detection, it is characterized in that: described LASER Light Source unit (1) includes high frequency stabilized carbon dioxide laser (101) and beam-expanding collimation device (102), the laser that described high frequency stabilized carbon dioxide laser (101) produces is input to described laser optical path direction after described beam-expanding collimation device (102) and adjusts and in interference modulations unit (2).
3. the device of working table movement error multiple degrees of freedom according to claim 1 detection, it is characterized in that: described laser optical path direction adjusts and includes the first light splitting piece (201) with interference modulations unit (2), second light splitting piece (202), the PZT device (203) of Three Degree Of Freedom, light path adjusts reflecting mirror or beat mirror (204), beam expanding lens (205) and yaw drive (206), described yaw drive (206) one end is connected with described host computer, the other end is connected with the PZT device (203) of described Three Degree Of Freedom, PZT device (203) for controlling described Three Degree Of Freedom performs Three Degree Of Freedom adjustment, the laser part that described LASER Light Source unit (1) produces passes straight through described the first light splitting piece (201) as reference path, project in described opto-electronic receiver and converting unit (4) after second light splitting piece (202) and beam expanding lens (205), another part distinguishes one once described the first light splitting piece (201) as optical path, light path adjusts reflecting mirror or beat mirror (204), thrihedral reflector measures target surface unit (3), after light path adjusts reflecting mirror or beat mirror (204) and the second light splitting piece (202) order-reflected, project after described beam expanding lens (205) in described opto-electronic receiver and converting unit (4).
4. the device of working table movement error multiple degrees of freedom according to claim 3 detection, it is characterised in that: the PZT device (203) of described Three Degree Of Freedom is moved device formed by two dimension beat and one dimension displacement.
5. the device and method of working table movement error multiple degrees of freedom according to claim 1 detection, it is characterized in that: described thrihedral reflector is measured target surface unit (3) and formed by three combination plane mirrow, mid-plane mirror is 120 ° with both sides incidence or exit plane mirror angle, described optical path light, after three plane mirrors reflect successively, projects described laser optical path direction and adjusts and in interference modulations unit (2).
6. the device of working table movement error multiple degrees of freedom according to claim 1 detection, it is characterized in that: described opto-electronic receiver and converting unit (4) include detector (401), photoelectric switching circuit (402), A/D sample circuit (403) and shaping and segmentation sensing circuit (404), after described A/D sample circuit (403) and shaping and segmentation sensing circuit (404) are connected in parallel, with described host computer, detector (401) and photoelectric switching circuit (402) are connected in series, the light projected with interference modulations unit (2) for receiving described laser optical path direction to adjust, and carry out opto-electronic conversion post-sampling, the signal of sampling is through difference shaping, carry out the subdivision and count of interference fringe, application ellipse fitting or trigonometric function method realize the identification of shape of interference fringe.
7. the device of working table movement error multiple degrees of freedom according to claim 6 detection, it is characterised in that: described detector (401) adopts symmetrical ' matrix pattern ' 4 quadrant detector.
8. the device of working table movement error multiple degrees of freedom according to claim 6 detection, it is characterized in that: described photoelectric switching circuit (402) is completed by four NPN audions and four resistance, utilize audion that four amplifications are consistent and the identical resistance of four sizes, completed by the mode of Current amplifier, it is ensured that detector (401) signal has identical amplification.
9. the device of working table movement error multiple degrees of freedom according to claim 6 detection, it is characterized in that: described shaping is made up of difference channel, comparison circuit and segmentation sensing circuit with segmentation sensing circuit (404), the counting completing interference fringe processes, and obtains Z-direction displacement.
10. the device of working table movement error multiple degrees of freedom according to claim 6 detection, it is characterised in that: described A/D sample circuit (403) is made up of high-speed synchronous A/D change-over circuit, and synchronizing speed reaches more than 100k.
11. the method that the device of the working table movement error multiple degrees of freedom detection that a kind utilizes described in claim 1 is operated the detection of platform kinematic error multiple degrees of freedom, it is characterised in that comprise the following steps:
Step 1: before measurement, the device that debugging is described, ensure that optical path incident ray is parallel to emergent ray, namely incident ray is parallel to the intermediate mirror normal of thrihedral reflector measurement target surface unit (3), then adjust described laser optical path direction to adjust and interference modulations unit (2), ensure to measure and between light and reference ray, form an only small angle, opto-electronic receiver is upper with converting unit (4) there is suitable interference fringe, making the difference of differential signal of interference fringe close proximity to 90 °, the segmentation sensing being so easy to interferometric fringe signal processes with counting；
Step 2: start described workbench, start to measure, drive laser optical path direction to adjust to move with the interference modulations unit (2) Z-direction in a wavelength, while carrying out interference modulations, the photosignal that opto-electronic receiver and converting unit (4) detect carries out difference processing on the one hand, obtains the primary signal for counting；Calculate signal phase difference accurately by ellipse fitting or sin cos functions multiplication algorithm on the other hand, adjust the calculating of parameter for optical path direction deflection angle；
Step 3: by the phase contrast calculated and deflection angle parameter, shows deflection angle on the one hand, controls laser optical path direction on the other hand and adjusts and interference modulations unit (2), adjusts angle, makes the size of interference fringe not by the impact of working table movement error.
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