CN103901559B - Optical coupling device - Google Patents
Optical coupling device Download PDFInfo
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- CN103901559B CN103901559B CN201210582248.4A CN201210582248A CN103901559B CN 103901559 B CN103901559 B CN 103901559B CN 201210582248 A CN201210582248 A CN 201210582248A CN 103901559 B CN103901559 B CN 103901559B
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- raised line
- grating
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- rectangle raised
- medium
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Abstract
An optical coupling device comprises a substrate, a flat optical waveguide formed on the substrate and a medium grating film formed on the flat optical waveguide. The flat optical waveguide is used for butting with a laser light source so as to receive scattered laser beams sent by the laser light source. The medium grating film comprises a first medium grating and a second medium grating which is in interval arrangement with the first medium grating. The first medium grating is located at the emitting light path of the laser light source and is used for converging the scattered laser beams into parallel laser beams. The second medium grating is located at the emitting light path of the first medium grating and is used for converging the parallel laser beams and coupling the converged parallel laser beams to an optical element. Therefore, the medium grating film and the flat optical waveguide form a loaded-type optical waveguide for converging the laser beams emitted by the laser light source, thereby improving light utilization rate.
Description
Technical field
The present invention relates to integrated optical device, particularly to a kind of optically coupled device.
Background technology
In integrated optics, commonly used directionality preferably laser is as light source, but the light beam that laser sends still has one
The fixed angle of divergence, if directly allowing light source dock with optical element, the divergent rays in light beam will be unable to enter optical element, light
Utilization rate is low.Therefore, how by light source couples to optical element so that the light beam dissipating is aggregated into optical element to improve light profit
It is an important topic with rate.
Content of the invention
In view of this it is necessary to provide a kind of optically coupled device that can improve light utilization efficiency.
A kind of optically coupled device, it include a substrate, one be formed at described suprabasil planar light waveguide and one
It is formed at the dielectric grating film on described planar light waveguide.Described planar light waveguide is used for docking with a LASER Light Source to connect
Receive the laser beam dissipating that described LASER Light Source sends, described dielectric grating film include a first medium grating and one with
The second medium grating of described first medium grating spacings setting.Described first medium grating is located at the outgoing of described LASER Light Source
Light path simultaneously is used for the described laser beam convergence dissipating being parallel laser beam.Described second medium grating is located at described first Jie
The emitting light path of matter grating and for converge described collimated laser beam and will converge described collimated light beam be coupled to one optics unit
Part.
According to integrated optics theory, described first medium grating and second medium grating are for example all provided with being set to chirp grating
(chirped grating), further according to the relative position between described LASER Light Source and optical element, rationally arranges first
The structure of dielectric grating and second medium grating is so that the laser beam that LASER Light Source sends is coupled to described optical element.
Brief description
The structural representation of the optically coupled device that Fig. 1 provides for the present invention.
Fig. 2 is the generalized section of the optically coupled device II-II along the line of Fig. 1.
Fig. 3 is the floor map of the first medium grating in Fig. 1.
Main element symbol description
Optically coupled device 10
Substrate 110
Top surface 111
Side 112
Planar light waveguide 120
Dielectric grating film 130
First medium grating 131
First rectangle raised line 1311
Second rectangle raised line 1312
First symmetry axis O
Second medium grating 132
3rd rectangle raised line 1321
4th rectangle raised line 1322
Second symmetry axis A
Rectangular recess 133
LASER Light Source 20
Laser beam 21
Optical element 30
Following specific embodiment will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Specific embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail.
Refer to Fig. 1 and Fig. 2, the optically coupled device 10 that embodiment of the present invention provides includes 110, shape of a substrate
Planar light waveguide 120 in substrate 110 described in Cheng Yu and a dielectric grating film being formed on described planar light waveguide 120
130.
Described substrate 110 is substantially rectangular, and include a top surface 111 and one connected vertically with described top surface 111
Side 112.Spread the loaded lightguide that Titanium (simple substance) can form graded refractive index, therefore, institute in view of lithium niobate
The material stating substrate 110 adopts lithium columbate crystal.In other embodiments, described substrate 110 can also be pottery or plastics
Deng material, the semi-conducting material such as material such as silica, silicon is formed in the substrate 110 of pottery or plastics by manufacture of semiconductor
Thus the described planar light waveguide 120 being formed.
Described planar light waveguide 120 by described top surface 111 plate after Titanium high temperature Titanium is diffused into described
Substrate 110 and formed.In the present embodiment, the shape of corresponding described substrate 110, described planar light waveguide 120 is rectangle, institute
State the top surface that top surface 111 is described planar light waveguide 120, described side 112 is the side of described planar light waveguide 120.
Described planar light waveguide 120 is used for docking with a LASER Light Source 20 to receive the laser beam 21 that described LASER Light Source 20 sends.
Described dielectric grating film 130 passes through to pass through sputter coating, evaporation or coating one floor height folding on described top surface 111
Penetrate rate material membrane and formed, described high-index material can the mixture of silica, silica boron-doping or phosphorus or organise
Compound.In present embodiment, described dielectric grating film 130 is the organic compound coated on described top surface 111, and passes through
The dielectric grating film 130 of described organic compound adopt gold-tinted etching (gold-tinted lithographic) technique etch thus forming one
First medium grating 131 and a second medium grating 132 with the setting of described first medium grating spacings.
In present embodiment, described first medium grating 131 is a chirp grating.Described first medium grating 131 wraps
Include one to be located at the first middle rectangle raised line 1311 and multiple be symmetrically distributed in the of described first rectangle raised line 1311 both sides
Two rectangle raised lines 1312, the quantity sum of described first rectangle raised line 1311 and described second rectangle raised line 1312 is odd number, institute
State the first rectangle raised line 1311 and multiple second rectangle raised line 1312 interval setting parallel to each other, described first rectangle raised line 1311
Width be more than the width of each the second rectangle raised line 1312, and from described first rectangle raised line 1311 to away from described first square
The direction of shape raised line 1311, the width of the plurality of second rectangle raised line 1312 is less and less, and described second rectangle raised line
1312 and first gaps between rectangle raised line 1311 and two neighboring second rectangle raised line 1312 are also less and less.
Refer to Fig. 3, in present embodiment, described first rectangle raised line 1311 includes one and described planar light waveguide
120 opposite rectangular top surface.The rectangular top surface of this first rectangle raised line 1311 includes two long sides and two broadsides.With institute
The line of the central point of two broadsides stating the rectangular top surface of the first rectangle raised line 1311 as the first symmetry axis O, described
One dielectric grating 131 a wherein broadside of rectangular top surface bearing of trend be x-axis, described first symmetry axis O is in x-axis
Joining be initial point, arriving the direction away from described first symmetry axis O along described first symmetry axis O is that x-axis is positive, with described sharp
Phase difference at x and at initial point for the light beam 21 is y-axis, can be obtained according to planar light waveguide wave theory：Its
Middle x ＞ 0, then n-th border x of described first medium grating 131nMeet following condition：Wherein, n is
Positive integer, yn=n π, a and k are that constant is related to the focal length of diffraction type optical waveguide lens.So, can be derived from：And the situation of x ＜ 0, the i.e. side of the described first medium grating 1311 on the described first symmetry axis O left side
Boundary can be obtained by symmetry.
Referring to Fig. 1, described second medium grating 132 structure is complete with the structure of described first medium grating 131
Identical, also for a chirp grating and symmetrical with regard to a second symmetry axis A.Described second medium grating 132 includes a position
Convex in the 3rd middle rectangle raised line 1321 and multiple the 4th rectangle being symmetrically distributed in described 3rd rectangle raised line 1321 both sides
Bar 1322, the quantity sum of described 3rd rectangle raised line 1321 and described 4th rectangle raised line 1322 is odd number, described 3rd square
Shape raised line 1321 and multiple 4th rectangle raised line 1322 interval setting parallel to each other, the width of described 3rd rectangle raised line 1321 is big
In the width of each the 4th rectangle raised line 1322, and from described 3rd rectangle raised line 1321 to away from described 3rd rectangle raised line
1321 direction, the width of the plurality of 4th rectangle raised line 1322 is less and less, and described 4th rectangle raised line 1322 and
Gap between three rectangle raised lines 1321 and two neighboring 4th rectangle raised line 1322 is also less and less.
A rectangular recess 133 is offered between described first medium grating 131 and described second medium grating 132.Institute
The width stating rectangular recess 133 is the distance between described first medium grating 131 and described second medium grating 132.Described
First symmetry axis O is directed at described second symmetry axis A.The corresponding 4th rectangle raised line of each second rectangle raised line 1312 be aligned
1322.
Described LASER Light Source 20 adopts distributed feedback laser (distributed feedback laser, DFB), its
Belong to the semiconductor laser of side-emitted, (die bond) mode can be welded by chip and luminous side is directly welded
To on described side 112, and described in the central axial alignment of described LASER Light Source 20, first symmetry axis O is incident.Certainly, described laser
Light source 20 can also adopt other types LASER Light Source, and arranges by other means.Described first medium grating 131 is located at institute
State the emitting light path of LASER Light Source.The emitting light path of described 132 described first medium gratings 131 of second medium grating.
Described optically coupled device 10 still further comprises one and is arranged at the going out in light light path of described second medium grating 132
Described in optical element 30, the central shaft of the 3rd rectangle raised line 1321 described in the central axial alignment of described optical element 30, such institute
State the first rectangle raised line 1311, described second rectangle raised line 1312, described 3rd rectangle raised line 1321 and described 4th rectangle convex
Bar 1322 is arranged each parallel to the line of described LASER Light Source 20 and the central shaft of described optical element 30.Described optical element 30
Can be slab optical waveguide, optical fiber or optical splitter (splitter).In present embodiment, described optical element 30 is strip light
Waveguide.
During use, described LASER Light Source 20 sends the laser beam dissipating and the laser beam dissipating is invested described first medium
Grating 131.The described laser beam convergence dissipating is parallel laser beam by described first medium grating 131.Described second medium
132, grating converges described collimated laser beam and the described collimated light beam converging is coupled to described optical element 30.
Theoretical according to integrated optics, according to the relative position between described LASER Light Source 20 and optical element 30, rationally set
Put the structure of first medium grating 131 and second medium grating 132, described first medium grating 131 with respect to LASER Light Source 20
Position and second medium grating 132 with respect to described optical element 30 position so that LASER Light Source 20 send swash
Light beam coupling is to described optical element 30.
Although the present invention has disclosed as above in a preferred embodiment thereof, it is not limited to the present invention, in addition, this
Skilled person can also do other changes etc. in present invention spirit.Certainly, the change that these are done according to present invention spirit
Change, all should be included within scope of the present invention.
Claims (9)
1. a kind of optically coupled device, it include a substrate, one be formed at described suprabasil planar light waveguide and a shape
Dielectric grating film on planar light waveguide described in Cheng Yu；Described planar light waveguide is used for docking with a LASER Light Source to receive
The laser beam dissipating that described LASER Light Source sends, described dielectric grating film includes a first medium grating and one and institute
State the second medium grating of first medium grating spacings setting；Described first medium grating is located at the emergent light of described LASER Light Source
Road simultaneously is used for the described laser beam convergence dissipating being parallel laser beam；Described second medium grating is located at described first medium
The emitting light path of grating and for converge described parallel laser beam and will converge described collimated light beam be coupled to one optics unit
Part.
2. optically coupled device as claimed in claim 1 is it is characterised in that described first medium grating is a chirp grating,
Described first medium grating includes one and is located at the first middle rectangle raised line and multiple to be symmetrically distributed in described first rectangle convex
Second rectangle raised line of bar both sides, the quantity sum of described first rectangle raised line and described second rectangle raised line is odd number, described
First rectangle raised line is rectangle and is disposed in parallel relation to one another with multiple second rectangle raised lines, and the width of described first rectangle raised line is big
In the width of each the second rectangle raised line, and from described first rectangle raised line to the direction away from described first rectangle raised line, institute
The width stating multiple second rectangle raised lines is less and less, and described second rectangle raised line and the first rectangle raised line and two neighboring
Gap between two rectangle raised lines is also less and less.
3. optically coupled device as claimed in claim 2 it is characterised in that described first rectangle raised line include one flat with described
The opposite rectangular top surface of plate fiber waveguide, described rectangular top surface includes two long sides and two broadsides, with described rectangle upper table
The line of the central point of two broadsides in face as the first symmetry axis, with the extension of a wherein broadside of described rectangular top surface
Direction is x-axis, and the joining of described first symmetry axis and x-axis is initial point, along described first symmetry axis to right away from described first
The direction of axle is called that x-axis is positive, with phase difference at x-axis and at initial point for the described laser beam as y-axis, according to planar lightwave guided wave
Dynamic theory can obtain：Wherein x ＞ 0, then n-th border x of described first medium gratingnMeet as follows
Condition：Wherein, n is positive integer, yn=n π, a and k are constant.
4. optically coupled device as claimed in claim 3 is it is characterised in that the structure of described second medium grating and first medium
The structure of grating is identical and with regard to a second symmetrical axial symmetry, and described second medium grating includes one and is located at middle the 3rd
Rectangle raised line and multiple the 4th rectangle raised line being symmetrically distributed in described 3rd rectangle raised line both sides, described second symmetry axis be aligned
Described first symmetry axis setting.
5. optically coupled device as claimed in claim 4 is it is characterised in that described first rectangle raised line, described second rectangle are convex
Article, described 3rd rectangle raised line and described 4th rectangle raised line each parallel to described LASER Light Source and described optical element center
The line setting of axle.
6. optically coupled device as claimed in claim 1 is it is characterised in that described first medium grating and described second medium light
A rectangular recess is offered between grid.
7. optically coupled device as claimed in claim 1 is it is characterised in that the material of described substrate adopts lithium columbate crystal.
8. optically coupled device as claimed in claim 7 is it is characterised in that described substrate is rectangular, and include a top surface and
One with described top surface side connected vertically, described planar light waveguide is by plating after Titanium high temperature by gold to described top surface
Belong to titanium to diffuse into described substrate and formed, described planar light waveguide is rectangle, described top surface is the top of described planar light waveguide
Face, described side is the side of described planar light waveguide.
9. optically coupled device as claimed in claim 8 is it is characterised in that described dielectric grating film passes through from described flat board light
The top surface of waveguide is coated with last layer high-index material film and using the gold-tinted etch process described high-index material film of etching
Form described first medium grating and described second medium grating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210582248.4A CN103901559B (en) | 2012-12-28 | 2012-12-28 | Optical coupling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210582248.4A CN103901559B (en) | 2012-12-28 | 2012-12-28 | Optical coupling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103901559A CN103901559A (en) | 2014-07-02 |
| CN103901559B true CN103901559B (en) | 2017-02-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210582248.4A Expired - Fee Related CN103901559B (en) | 2012-12-28 | 2012-12-28 | Optical coupling device |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106154426A (en) * | 2016-06-30 | 2016-11-23 | 派尼尔科技（天津）有限公司 | A kind of coupled modes for LiNbO_3 film waveguide and its implementation |
| EP3612876A4 (en) * | 2017-04-19 | 2020-12-30 | Luxtera, Inc. | Method and system for two-dimensional mode-matching grating couplers |
| CN111458794B (en) * | 2020-04-28 | 2021-08-20 | 吉林大学 | Vertical coupling optical waveguide device and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5111447A (en) * | 1982-10-14 | 1992-05-05 | Omron Tateisi Electronics Co. | Integral pick up for an optical digital disc using saw deflection and lense |
| EP0632299A3 (en) * | 1993-07-03 | 1995-02-15 | Ant Nachrichtentech | Optoelectronical device with feedback grating. |
| CN1163000A (en) * | 1994-09-09 | 1997-10-22 | 狄肯研究公司 | Display panel with electrically-controlled waveguide-routing |
| WO2006045632A1 (en) * | 2004-10-26 | 2006-05-04 | Forschungsverbund Berlin E.V. | Dbr laser element with high order bragg grating and rib waveguide |
| CN101750671A (en) * | 2009-12-23 | 2010-06-23 | 南京大学 | Planar waveguide Bragg grating and laser thereof based on reconstruction-equivalent chirp and equivalent apodization |
-
2012
- 2012-12-28 CN CN201210582248.4A patent/CN103901559B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5111447A (en) * | 1982-10-14 | 1992-05-05 | Omron Tateisi Electronics Co. | Integral pick up for an optical digital disc using saw deflection and lense |
| EP0632299A3 (en) * | 1993-07-03 | 1995-02-15 | Ant Nachrichtentech | Optoelectronical device with feedback grating. |
| CN1163000A (en) * | 1994-09-09 | 1997-10-22 | 狄肯研究公司 | Display panel with electrically-controlled waveguide-routing |
| WO2006045632A1 (en) * | 2004-10-26 | 2006-05-04 | Forschungsverbund Berlin E.V. | Dbr laser element with high order bragg grating and rib waveguide |
| CN101750671A (en) * | 2009-12-23 | 2010-06-23 | 南京大学 | Planar waveguide Bragg grating and laser thereof based on reconstruction-equivalent chirp and equivalent apodization |
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| CN103901559A (en) | 2014-07-02 |
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