CN103887211B - Equipment between the control method of exhaust valve and device and dry section between a kind of dry section - Google Patents
Equipment between the control method of exhaust valve and device and dry section between a kind of dry section Download PDFInfo
- Publication number
- CN103887211B CN103887211B CN201410081087.XA CN201410081087A CN103887211B CN 103887211 B CN103887211 B CN 103887211B CN 201410081087 A CN201410081087 A CN 201410081087A CN 103887211 B CN103887211 B CN 103887211B
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- China
- Prior art keywords
- valve
- dry section
- exhaust valve
- dry
- linkage
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention provides control method and device and the dry place equipment of exhaust valve between a kind of dry section, comprise: between dry section and between process cavity, controlled valve is set, between dry section, exhaust valve place arranges linkage valve, according to linkage valve described in the state control of described controlled valve, make described controlled valve and described linkage valve meet interlocked relationship. The embodiment of the present invention effectively reduces the pollution level between dry section, has reduced the incidence of glass substrate back pollution thing, has improved convenience and the product quality of plant maintenance.
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to the control of exhaust valve between a kind of dry sectionEquipment between method and apparatus processed and dry section.
Background technology
At TFT (ThinFilmTransistor, TFT)-liquid crystal displayIn (LiquidCrystalDisplay, LCD) manufacturing industry, process cavity (ProcessChamber)The problem of being polluted by liquid steam between front dry section is perplexing wet etching always and peeling off establishesStandby. Between dry section, the effect of exhaust valve is for the air in holding area is dried, still,In structure in Fig. 1, when between dry section 1 and process cavity 2 between valve 5 open, liquidSteam is in the time that self-desiccation interval, path shown in solid arrow 1 enters process cavity 2, due to dry sectionBetween exhaust valve 3 and process cavity exhaust valve 4 be opening, a part of liquid steam can be oppositelySuck between dry section in 1, as Fig. 1 dotted line institute through the controlled valve 5 interval exhaust valve 3 that is driedShow. Now, between dry section, the liquid in 1 inner liquid medicine steam can be met and coldly be condensed between dry section 1Cylinder and chamber wall on, easily form crystallization or pollutant. For example, stripper condenses and can make glassGlass substrate produces the wire Mura vestige mating with cylinder width, and is not easy to wash off macroscopic viewThe pollutant schematic diagram of observation as shown in Figure 2.
In the prior art, generally adopt following two kinds of methods to reduce or to avoid pollutant as far as possibleAppearance: a kind of method is the pressure that increases process cavity exhaust valve, makes it be far longer than dry sectionBetween the pressure of exhaust valve; Another kind method is the exhaust valve of removing between dry section. But, onStating two kinds of methods all cannot achieve the goal preferably: pollute now although first method can reduceResemble but and can not avoid completely, and increase very large processing pressure can to exhaust-gas treatment linkAnd processing cost; And second method can cause entering on a small quantity the contaminative liquid medicine steaming between dry sectionVapour or steam cannot be discharged, and long time integration still can make between dry section slowly contaminated.
Summary of the invention
(1) technical problem that will solve
The invention provides between the control method of exhaust valve between dry section and device and a kind of dry section and establishStandby, easily pollute the technical problem between dry section to solve prior art herb liquid steam.
(2) technical scheme
For solving the problems of the technologies described above, the invention provides the controlling party of exhaust valve between a kind of dry sectionMethod, comprising:
Between dry section and between process cavity, controlled valve is set, exhaust valve place between dry sectionLinkage valve is set, according to linkage valve described in the state control of described controlled valve, makes instituteState controlled valve and described linkage valve meets interlocked relationship.
Further, described interlocked relationship is:
In the time that described controlled valve is opened, control described linkage valve and close exhaust valve between dry section;In the time that described controlled valve is closed, control described linkage valve and open exhaust valve between dry section.
On the other hand, the present invention also provides the control device of exhaust valve between a kind of dry section, comprising:
Controlled valve, between dry section and between process cavity, for controlling air flow direction;
Linkage valve, is arranged at exhaust valve place between dry section, for controlling exhaust valve between dry sectionOpening and closing;
Interlock, is connected with described linkage valve with described controlled valve, described in controllingClosing valve and described linkage valve meet interlocked relationship.
Further,
Described linkage valve is positioned at cavity inner side between the dry section of exhaust valve between dry section.
Further, described interlocked relationship is:
In the time that described controlled valve is opened, control described linkage valve and close exhaust valve between dry section;In the time that described controlled valve is closed, control described linkage valve and open exhaust valve between dry section.
On the one hand, the present invention also provides equipment between a kind of dry section again: comprise that above-mentioned any one is dryThe control device of dry interval exhaust valve.
(3) beneficial effect
Visible, between a kind of dry section proposing in the present invention the control method of exhaust valve and device andBetween dry section, in equipment, between dry section, the cavity of exhaust valve inner side is provided with and the switch valve couplet on the doorA moving linkage valve, closes exhaust valve to control linkage valve in the time that controlled valve is opened,In the time that controlled valve is closed, linkage valve is opened exhaust valve. In the time that controlled valve is opened, liquid medicine steamingVapour enters process cavity by controlled valve drying interval, and now linkage valve is closed, dry sectionBetween exhaust valve closing, liquid steam is difficult for returning between dry section because of exhaust valve effect suck-back between dry sectionIn; And in the time that controlled valve is closed, linkage valve is opened, exhauxt valve opens between dry section is fewLiquid steam or steam that amount is deposited in dry section can be discharged with exhaust valve between dry section, makeNot have liquid medicine contamination in dry section residual. The present invention effectively reduces the dirt between dry sectionDye degree, reduced the incidence of glass substrate back pollution thing, improved plant maintenance justProfit and product quality.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, belowTo the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described, aobviousAnd easy insight, the accompanying drawing in the following describes is some embodiments of the present invention, general for this areaLogical technical staff, is not paying under the prerequisite of creative work, can also be attached according to theseFigure obtains other accompanying drawing.
Fig. 1 is the liquid steam air-flow schematic diagram between dry section and between process cavity in prior art;
Fig. 2 is the roller pollutant schematic diagram that in prior art, between dry section, macroscopic view is observed;
Fig. 3 be in the embodiment of the present invention in the time that controlled valve is opened, the control of exhaust valve between dry sectionDevice schematic diagram processed;
Fig. 4 be in the embodiment of the present invention in the time that controlled valve is closed, the control of exhaust valve between dry sectionDevice schematic diagram processed;
In figure: 1, between dry section; 2, process cavity; 3, exhaust valve between dry section; 4, techniqueChamber exhaust valve; 5, controlled valve; 6, linkage valve; 7, interlock.
Detailed description of the invention
For making object, technical scheme and the advantage of the embodiment of the present invention clearer, will tie belowClose the accompanying drawing in the embodiment of the present invention, to the technical scheme in the embodiment of the present invention carry out clear,Intactly describe, obviously, described embodiment is the present invention's part embodiment, instead ofWhole embodiment. Based on the embodiment in the present invention, those of ordinary skill in the art are not havingMake the every other embodiment obtaining under creative work prerequisite, all belong to the present invention's protectionScope.
First the embodiment of the present invention provides the control method of exhaust valve between a kind of dry section, comprising:
Between dry section and between process cavity, controlled valve is set, exhaust valve place between dry sectionLinkage valve is set, according to linkage valve described in the state control of described controlled valve, makes instituteState controlled valve and described linkage valve meets interlocked relationship.
Wherein interlocked relationship, in the time that controlled valve is opened, is controlled linkage valve and is closed between dry sectionExhaust valve; In the time that controlled valve is closed, control linkage valve and open exhaust valve between dry section.
Visible, between a kind of dry section proposing in the embodiment of the present invention in the control method of exhaust valve,Between dry section, exhaust valve place is provided with the linkage valve linking with controlled valve, to controlControlled valve and linkage valve interlocking. In the time that controlled valve is opened, liquid steam passes through switch valveDoor drying interval enters process cavity, and now linkage valve is closed, exhaust valve closing between dry section,Liquid steam is difficult for returning in dry section because of exhaust valve effect suck-back between dry section; And work as switch valveWhen door is closed, linkage valve is opened, and exhauxt valve opens between dry section, is deposited in dry section on a small quantityIn liquid steam or steam can discharge with exhaust valve between dry section, make in dry section notHave liquid medicine contamination residual. The embodiment of the present invention effectively reduces the pollution level between dry section,The incidence that has reduced glass substrate back pollution thing, has improved convenience and the product of plant maintenanceProduct quality.
Preferably, controlled valve and linkage valve meet interlocked relationship and comprise: when controlled valve is openedQi Shi, controls linkage valve and closes exhaust valve between dry section; In the time that controlled valve is closed, controlLinkage valve is opened exhaust valve between dry section.
The embodiment of the present invention also provides the control device of exhaust valve between a kind of dry section, referring to Fig. 3,Fig. 4, comprising:
Controlled valve 5, between dry section 1 and process cavity 2 between, for controlling air flow direction;
Linkage valve 6, is arranged at exhaust valve 3 places between dry section, for controlling exhaust between dry sectionThe opening and closing of door 3;
Interlock 7, is connected with linkage valve 6 with controlled valve 5, for gauge tap valve5 and linkage valve 6 meet interlocked relationship.
Preferably, linkage valve 6 can be positioned at 1 chamber between the dry section of exhaust valve 3 between dry sectionBody inner side.
Preferably, interlocked relationship is specially: in the time that controlled valve 5 is opened, control linkage valve 6Close exhaust valve 3 between dry section; In the time that controlled valve 5 is closed, control linkage valve 6 and open dryDry interval exhaust valve 3.
Fig. 3 represents the air flow direction schematic diagram in the time that controlled valve 5 is opened. Controlled valve 5 is openedQi Shi, controls liquid steam air-flow self-desiccation interval 1 and flows to process cavity 2, now, and interlock7 control linkage valve 6 closes, and also closes exhaust valve 3 between dry section, and air-flow can self-desiccationInterval 1 to process cavity 2 along dotted line direction one-way flow, and can be by resorption between dry section 1In.
Fig. 4 represents the air flow direction schematic diagram in the time that controlled valve 5 is closed. Controlled valve 5 closesWhile closing, interlock 7 is controlled linkage valve 6 and is opened, and has also opened exhaust valve 3 between dry section,The liquid steam or the steam that are now deposited on a small quantity between dry section in 1 can be with exhaust valves between dry section3 discharge, and see airflow direction shown in dotted line, make not have in dry section liquid medicine contamination residual.
The embodiment of the present invention also provides equipment between a kind of dry section, comprises as above exhaust between dry sectionThe control device of door.
Visible, the embodiment of the present invention has following beneficial effect:
Control method and device and the one of exhaust valve between the dry section proposing in the embodiment of the present inventionBetween dry section, in equipment, between dry section, exhaust valve place is provided with one that links with controlled valveLinkage valve, effectively reduces the incidence of glass substrate back side Roller vestige, has improved productProduct quality, has also reduced contaminated degree between dry section simultaneously, like this can raising equipment dimensionThe convenience protecting, facilitates periodic maintenance and cleaning pollutant.
Finally it should be noted that: above embodiment is only in order to technical scheme of the present invention to be described, andNon-to its restriction; Although the present invention is had been described in detail with reference to previous embodiment, abilityThe those of ordinary skill in territory is to be understood that: the skill that it still can be recorded aforementioned each embodimentArt scheme is modified, or part technical characterictic is wherein equal to replacement; And these are repaiiedChange or replace, not making the essence of appropriate technical solution depart from various embodiments of the present invention technical sideThe spirit and scope of case.
Claims (6)
1. a control method for exhaust valve between dry section, is characterized in that, comprising:
Between dry section and between process cavity, controlled valve is set, exhaust valve place between dry sectionLinkage valve is set, according to linkage valve described in the state control of described controlled valve, makes instituteState controlled valve and described linkage valve meets interlocked relationship.
2. the control method of exhaust valve between dry section according to claim 1, its feature existsIn, described interlocked relationship is:
In the time that described controlled valve is opened, control described linkage valve and close exhaust valve between dry section;In the time that described controlled valve is closed, control described linkage valve and open exhaust valve between dry section.
3. a control device for exhaust valve between dry section, is characterized in that, comprising:
Controlled valve, between dry section and between process cavity, for controlling air flow direction;
Linkage valve, is arranged at exhaust valve place between dry section, for controlling exhaust valve between dry sectionOpening and closing;
Interlock, is connected with described linkage valve with described controlled valve, described in controllingControlled valve and described linkage valve meet interlocked relationship.
4. the control device of exhaust valve between dry section according to claim 3, its feature existsIn:
Described linkage valve is positioned at cavity inner side between the dry section of exhaust valve between dry section.
5. according to the control device of exhaust valve between the dry section described in claim 3 or 4, its spyLevy and be, described interlocked relationship is:
In the time that described controlled valve is opened, control described linkage valve and close exhaust valve between dry section;In the time that described controlled valve is closed, control described linkage valve and open exhaust valve between dry section.
6. an equipment between dry section, is characterized in that: comprise as appointed in claim 3 to 5The control device of exhaust valve between the dry section described in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410081087.XA CN103887211B (en) | 2014-03-06 | 2014-03-06 | Equipment between the control method of exhaust valve and device and dry section between a kind of dry section |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410081087.XA CN103887211B (en) | 2014-03-06 | 2014-03-06 | Equipment between the control method of exhaust valve and device and dry section between a kind of dry section |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103887211A CN103887211A (en) | 2014-06-25 |
| CN103887211B true CN103887211B (en) | 2016-05-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410081087.XA Expired - Fee Related CN103887211B (en) | 2014-03-06 | 2014-03-06 | Equipment between the control method of exhaust valve and device and dry section between a kind of dry section |
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| Country | Link |
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| CN (1) | CN103887211B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105043091A (en) * | 2015-07-24 | 2015-11-11 | 浙江华展工程研究设计院有限公司 | Humidity detection and intervention device for industry dryer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1808704A (en) * | 2004-12-06 | 2006-07-26 | K.C.科技株式会社 | Substrate disposing device and method |
| CN102347260A (en) * | 2010-08-02 | 2012-02-08 | 北京中科信电子装备有限公司 | Interlocking linkage control method and device in wafer transfer system |
| CN102891094A (en) * | 2011-07-22 | 2013-01-23 | 东京毅力科创株式会社 | Substrate processing device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040194806A1 (en) * | 2003-04-02 | 2004-10-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | IPA concentration interlock detector for substrate dryer |
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2014
- 2014-03-06 CN CN201410081087.XA patent/CN103887211B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1808704A (en) * | 2004-12-06 | 2006-07-26 | K.C.科技株式会社 | Substrate disposing device and method |
| CN102347260A (en) * | 2010-08-02 | 2012-02-08 | 北京中科信电子装备有限公司 | Interlocking linkage control method and device in wafer transfer system |
| CN102891094A (en) * | 2011-07-22 | 2013-01-23 | 东京毅力科创株式会社 | Substrate processing device |
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| Publication number | Publication date |
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| CN103887211A (en) | 2014-06-25 |
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Granted publication date: 20160525 Termination date: 20200306 |