CN103853397A - Capacitive touch screen and manufacturing method thereof - Google Patents
Capacitive touch screen and manufacturing method thereof Download PDFInfo
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- CN103853397A CN103853397A CN201210516938.XA CN201210516938A CN103853397A CN 103853397 A CN103853397 A CN 103853397A CN 201210516938 A CN201210516938 A CN 201210516938A CN 103853397 A CN103853397 A CN 103853397A
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Abstract
The invention discloses a capacitive touch screen and a manufacturing method thereof. The capacitive touch screen comprises a substrate, and a transparent electrode layer, insulating layers and metal bridges which are formed on the substrate in sequence; the transparent electrode layer comprises a plurality of first sensing electrodes which extend along a first direction, and a plurality of second sensing electrodes which extend along a second direction; the insulating layers cover the intersection positions between each first sensing electrode and the corresponding second sensing electrode; each metal bridge is positioned above the corresponding insulating layer; each of the first sensing electrodes is electrically connected with the corresponding second sensing electrode through the corresponding metal bridge, wherein at least one side, close to a display interface, of each metal bridge is a metal oxide layer. The reflectivity of the metal oxide is far smaller than that of a pure metal or an alloy, so that the metal oxide layer is arranged on one side close to the display interface; therefore, bright lines generated by the reflection of the pure metal or the alloy in a display image are reduced; the problem about the visual visibility of the bridges is solved; the display effect of the touch screen is improved.
Description
Technical field
The present invention relates to touch screen display technologies, particularly a kind of capacitive touch screen display technique.
Background technology
Along with the development of multimedia equipment, touch-screen is sturdy and durable because having, response speed fast, save space, be easy to many advantages such as interchange, is more and more applied to the various fields such as communication, industry, amusement, medical treatment.Principle of work based on different and the medium of transmission information, touch-screen can be divided into vector pressure sensing type touch-screen, resistive touch screen, capacitive touch screen, infrared-type touch-screen, surface acoustic wave touch screen.And capacitive touch screen is owing to having that the life-span is long, sensitivity is high, low in energy consumption, support the advantages such as multiple point touching, the touching technique that becomes main flow gradually.
Capacitive touch screen four limits all plate long and narrow electrode, form a low-voltage AC electric field in electric conductor.In the time of touch screen, due to people's bulk electric field, between finger and conductor layer, can form a coupling capacitance, the electric current that four limit electrodes send can flow to contact, be directly proportional to the distance of electrode to finger and electric current is strong and weak, be positioned at ratio and power that controller after touch screen just can calculate electric current, accurately calculate the position of touch point.In the structure of capacitive touch screen, as shown in Figure 1, conventionally adopt transparent electrode layer to form the first sensing electrode and the second sensing electrode; Wherein, one of the first sensing electrode and second sensing electrode are to arrange continuously, and another is arranged to some electrode patterns take the electrode arranging continuously as interval; Intervening portion at the first sensing electrode and the second sensing electrode is electrically connected adjacent electrode pattern by tin indium oxide (ITO) gap bridge or metal-gap-bridge.ITO bridge structure is due to manufacture process more complicated, and yield is low, and ITO passes a bridge and other deficient manufacturing procedures such as easily crack, and therefore metal-gap-bridge becomes conventional electrode pattern electric connection mode.Metal-gap-bridge conventionally adopts the composite structure of several simple metal and/or alloy, but because the reflectivity of metal material is higher, in display frame, because of simple metal or alloy is reflective easily causes by user visual as seen, is difficult to be accepted by user.
Summary of the invention
In view of this, the invention provides a kind of capacitive touch screen and manufacture method thereof, it can reduce the reflectivity of metal-gap-bridge in capacitance touch panel, eliminates the visual visible problem of metal-gap-bridge, improves the display effect of touch-screen.
For achieving the above object, the invention provides a kind of capacitive touch screen, comprising: substrate, is formed at transparent electrode layer, insulation course, metal-gap-bridge on described substrate successively; Described transparent electrode layer comprises multiple the first sensing electrodes that extend along first direction and multiple the second sensing electrodes that extend along second direction; Described insulation course covers the intervening portion of described the first sensing electrode and described the second sensing electrode; Described metal-gap-bridge is positioned at insulation course top, and described multiple the first sensing electrodes or multiple the second sensing electrode are electrically connected by described metal-gap-bridge; Wherein, described metal-gap-bridge is at least metal oxide layer near a side of display interface.
Preferably, described metal-gap-bridge is complex metal layer.
Preferably, the complex metal layer of described metal-gap-bridge can adopt the combination in any of molybdenum, aluminium, copper, nickel, chromium, thallium and alloy thereof and its oxidized metal.
Preferably, described metal-gap-bridge adopts three layers composite metal layer, as Mo-Al-MoO
x, MoO
x-Al-MoO
x.
Preferably, described metal-gap-bridge adopts four-layer composite metal layer, as Mo-Al-Mo-MoO
x.
Preferably, described metal-gap-bridge adopts five layers composite metal layer, as MoO
x-Mo-Al-Mo-MoO
x.Preferably, described Al tunic is thick is
mo tunic is thick is
moO
xtunic is thick is
Preferably, the width of described metal-gap-bridge is 6 μ m-12 μ m.
Preferably, the resistance value of described metal-gap-bridge is 0.25 Ω ~ 0.4 Ω.
Preferably, described the first sensing electrode and the second sensing electrode are rhombus, bar shaped, cruciform or snowflake type.
Preferably, described transparent electrode layer is tin indium oxide or indium zinc oxide.
Preferably, described insulation course is organic material.
Preferably, also comprise protective seam, make multiple described the first sensing electrodes, multiple the second sensing electrode and metal-gap-bridge and air insulation.
Preferably, described protective seam is organic material.
A method of manufacturing capacitive touch screen, comprises step:
Step 1 a: substrate is provided;
Step 2: deposit transparent electrode layer on described substrate, etching forms multiple the first sensing electrodes and multiple the second sensing electrode;
Step 3: the insulation course that forms the intervening portion that covers described the first sensing electrode and described the second sensing electrode;
Step 4: form metal-gap-bridge, by described multiple the first sensing electrodes and multiple the second sensing electrode electrical connection, wherein said metal-gap-bridge is metal oxide layer near a side of display interface.
Preferably, described step 4 comprises: sputter complex metal layer successively, at least during near a side metal level of display interface, pass into a certain proportion of oxygen in sputter, and form metal oxide layer.
Preferably, in described gas, the ratio of oxygen is 0 ~ 80%.
Preferably, described metal-gap-bridge adopts three layers composite metal layer, as Mo-Al-MoO
x, MoO
x-Al-MoO
x
Preferably, described metal-gap-bridge adopts four-layer composite metal layer, as Mo-Al-Mo-MoO
x.
Preferably, described metal-gap-bridge adopts five layers composite metal layer, as MoO
x-Mo-Al-Mo-MoO
x.
Preferably, described Al tunic is thick is
mo tunic is thick is
moO
xtunic is thick is
Preferably, also comprise step 5: coating protective seam, makes multiple described the first sensing electrodes, multiple the second sensing electrode and metal-gap-bridge and air insulation.
Compared with prior art, the present invention has the following advantages:
Capacitive touch screen provided by the invention, by being at least metal oxide layer near a side of display interface at metal-gap-bridge.Because the reflectivity of metal oxide layer is much smaller than the reflectivity of simple metal or alloy, therefore near display interface one side, metal oxide layer is being set, reduce the metal bright line because of simple metal or the reflective generation of alloy in display frame, eliminate the visual visible problem of metal-gap-bridge, improve the display effect of touch-screen.
Simultaneously, a kind of manufacture method of manufacturing described capacitive touch screen provided by the invention, in the manufacturing technology steps of existing capacitive touch screen, only need be in the time that splash-proofing sputtering metal be passed a bridge, pass into appropriate oxygen and form metal oxide layer, not needing change or not needing to increase under the prerequisite of additional technical steps, improve the display effect of touch-screen.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of prior art capacitive touch screen;
Fig. 2 is the sectional view of touch-screen in the embodiment mono-of capacitive touch screen of the present invention;
Fig. 3 is the sectional view of touch-screen in the embodiment bis-of capacitive touch screen of the present invention;
Fig. 4 is the sectional view of touch-screen in the embodiment tri-of capacitive touch screen of the present invention;
Fig. 5 is the sectional view of touch-screen in the embodiment tetra-of capacitive touch screen of the present invention;
Fig. 6 is amount of oxygen (O in capacitive touch screen manufacture method
2) with reflectivity (R%) curve map of metal-gap-bridge 120 resistance values (Rs/ Ω), complex metal layer.
Embodiment
The problem to be solved in the present invention is to reduce the reflectivity of metal-gap-bridge, eliminates the visual visible problem of metal-gap-bridge, improves the display effect of touch-screen.
For addressing this problem, the invention provides a kind of capacitive touch screen, comprising: substrate, is formed at transparent electrode layer, insulation course, metal-gap-bridge, protective seam on described substrate successively; Described transparent electrode layer comprises multiple the first sensing electrodes that extend along first direction and multiple the second sensing electrodes that extend along second direction; Described insulation course covers the intervening portion of described the first sensing electrode and described the second sensing electrode; Described metal-gap-bridge is positioned at insulation course top, and described multiple the first sensing electrodes or multiple the second sensing electrode are electrically connected by described metal-gap-bridge; Wherein, described metal-gap-bridge is at least metal oxide layer near a side of display interface.Because the reflectivity of metal oxide layer is much smaller than the reflectivity of simple metal or alloy, therefore near display interface one side, metal oxide layer is being set, reduce the bright line because of simple metal or the reflective generation of alloy in display frame, eliminated the visual visible problem of metal-gap-bridge, improved the display effect of touch-screen.
In addition, a kind of manufacture method of manufacturing described capacitive touch screen that the present invention provides simultaneously, comprising: step 1: a substrate is provided; Step 2: deposit transparent electrode layer on described substrate, etching forms multiple the first sensing electrodes and multiple the second sensing electrode; Step 3: coating patterned insulation layer; Step 4: form described metal-gap-bridge, by described multiple the first sensing electrodes or multiple the second sensing electrode electrical connection, wherein said metal-gap-bridge is metal oxide layer near a side of display interface.In the manufacturing technology steps of existing capacitive touch screen, only need be in the time that splash-proofing sputtering metal be passed a bridge, pass into appropriate oxygen and form metal oxide layer, do not increasing under the prerequisite of additional technical steps, eliminate the visual visible problem of metal-gap-bridge, improve the display effect of touch-screen.Finally, coating protective seam, makes multiple the first sensing electrodes, multiple the second sensing electrode and metal-gap-bridge and air insulation.
In order to make object of the present invention, technical scheme and advantage are clearer, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on the embodiment in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
Fig. 2 is the sectional view of touch-screen in the embodiment mono-of capacitive touch screen of the present invention, as shown in Figure 2, capacitive touch screen comprises a substrate 100, on described substrate 100, form layer of transparent electrode layer, described transparent electrode layer comprises multiple the first sensing electrodes 102 that extend along first direction and multiple the second sensing electrodes 103 that extend along second direction, the first sensing electrode 102 is to arrange continuously and interconnected rhombus electrode, and the second 103 of sensing electrodes are arranged to some independently rhombus electrodes take the first sensing electrode 102 arranging continuously as interval.Originally be that in embodiment, first direction is vertical direction, second direction is horizontal direction, also can be oblique direction for first direction and second direction in other embodiments.Insulation course 110 covers on the intervening portion of described the first sensing electrode 102 and the second sensing electrode 103, and metal-gap-bridge 120 is electrically connected the second adjacent sensing electrode 103, and the width of described metal-gap-bridge 120 is 6 μ m-12 μ m.Described metal-gap-bridge 120 adopts three layers composite metal layer, if display interface is the side away from described insulation course 110, described metal-gap-bridge 120 is followed successively by from the bottom to top molybdenum layer 121, aluminium lamination 122, molybdenum oxide layer 123(and is called for short Mo-Al-MoO
x); If display interface is the side near described insulation course 110, described metal-gap-bridge 120 is followed successively by molybdenum oxide layer 123, aluminium lamination 122, molybdenum layer 121 from the bottom to top.Wherein, aluminium lamination 122 thickness are
molybdenum thickness is
molybdenum oxide layer 123 thickness are
after tested, described metal-gap-bridge 120Mo-Al-MoO
xresistance value between 0.25 Ω ~ 0.4 Ω, meet the normal demonstration requirement of capacitive touch screen.Described capacitive touch screen also comprises protective seam, makes described the first sensing electrode, the second sensing electrode and metal-gap-bridge and air insulation.Described protective seam adopts organic material.Described capacitive touch screen is when being input to the first sensing electrode 102 and the second sensing electrode 103 by the electric signal of characteristic frequency, in the time that finger contact arrives touch screen surface, the first sensing electrode 102 and the second sensing electrode 103 form stray capacitance, part signal from then on stray capacitance is directly inputted to human body, by detecting the signal intensity on these two sensing electrodes, can find the particular location of finger touch.Because the reflectivity of metal oxide layer is much smaller than the reflectivity of simple metal or alloy, therefore near display interface one side, metal oxide layer is being set, reduce the bright line because of simple metal or the reflective generation of alloy in display frame, eliminated the visual visible problem of metal-gap-bridge, improved the display effect of touch-screen.
It should be noted that, described the first sensing electrode 102 and the second sensing electrode 103 can also be bar shaped, cruciform or snowflake type etc.Also the second sensing electrode 103 can be arranged continuously and is connected to each other together, the first sensing electrode 102 is for being arranged to several independently electrode patterns in interval.Described transparent electrode layer can adopt tin indium oxide or indium zinc oxide.The complex metal layer of described metal-gap-bridge, except above-mentioned molybdenum, aluminium and the combination of its oxidized metal, can also adopt the metal material of other low-resistivities and the combination in any of its oxidized metal, as copper, nickel, chromium, thallium and alloy thereof.
Fig. 3 is the sectional view of touch-screen in the embodiment bis-of capacitive touch screen of the present invention, as shown in Figure 3, with be with the difference of embodiment mono-in the present embodiment, metal-gap-bridge 120 is by three layers composite metal layer, comprising two-layer metal oxide layer, if display interface be away from or near a side of described insulation course 110, described metal-gap-bridge 120 is followed successively by from the bottom to top molybdenum oxide layer 123, aluminium lamination 122, molybdenum oxide layer 123(and is called for short MoO
x-Al-MoO
x), wherein, aluminium lamination 122 thickness are
molybdenum thickness is
molybdenum oxide layer 123 thickness are
after tested, described metal-gap-bridge 120(MoO
x-Al-MoO
x) resistance value between 0.25 Ω ~ 0.4 Ω, meet the normal demonstration requirement of capacitive touch screen.Because the reflectivity of metal oxide layer is much smaller than the reflectivity of simple metal or alloy, therefore near display interface one side, metal oxide layer is being set, reduce the bright line because of simple metal or the reflective generation of alloy in display frame, eliminated the visual visible problem of metal-gap-bridge, improved the display effect of touch-screen.Fig. 4 is the sectional view of touch-screen in the embodiment tri-of capacitive touch screen of the present invention, as shown in Figure 4, with be with the difference of embodiment mono-in the present embodiment, metal-gap-bridge 120 is by four-layer composite metal layer, if display interface is the side away from described insulation course 110, described metal-gap-bridge 120 is followed successively by from the bottom to top molybdenum layer 121, aluminium lamination 122, molybdenum layer 121, molybdenum oxide layer 123(and is called for short Mo-Al-Mo-MoO
x); If display interface is the side near described insulation course 110, described metal-gap-bridge 120 is followed successively by from the bottom to top molybdenum oxide layer 123, molybdenum layer 121, aluminium lamination 122, molybdenum layer 121(and is called for short MoO
x-Mo-Al-Mo).Wherein, aluminium lamination 122 thickness are
molybdenum thickness is
molybdenum oxide layer 123 thickness are
after tested, described metal-gap-bridge 120(Mo-Al-Mo-MoO
x) resistance value between 0.25 Ω ~ 0.4 Ω, meet the normal demonstration requirement of capacitive touch screen.Because the reflectivity of metal oxide layer is much smaller than the reflectivity of simple metal or alloy, therefore in display interface one side, metal oxide layer is set, reduce the bright line because of simple metal or the reflective generation of alloy in display frame, eliminated the visual visible problem of metal-gap-bridge, improved the display effect of touch-screen.
Fig. 5 is the sectional view of touch-screen in the embodiment tetra-of capacitive touch screen of the present invention, as shown in Figure 5, with be with the difference of embodiment mono-in the present embodiment, metal-gap-bridge 120 is by five layers composite metal layer, if display interface be away from or near a side of described insulation course 110, described metal-gap-bridge 120 is followed successively by from the bottom to top oxidation molybdenum oxide layer 123, molybdenum layer 121, aluminium lamination 122, molybdenum layer 121, molybdenum oxide layer 123(and is called for short MoO
x-Mo-Al-Mo-MoO
x), wherein, aluminium lamination 122 thickness are
molybdenum thickness is
molybdenum oxide layer 123 thickness are
after tested, described metal-gap-bridge 120(MoO
x-Mo-Al-Mo-MoO
x) resistance value between 0.25 Ω ~ 0.4 Ω, meet the normal demonstration requirement of capacitive touch screen.Because the reflectivity of metal oxide layer is much smaller than the reflectivity of simple metal or alloy, therefore in display interface one side, metal oxide layer is set, reduce the bright line because of simple metal or the reflective generation of alloy in display frame, eliminated the visual visible problem of metal-gap-bridge, improved the display effect of touch-screen.
The invention provides a kind of manufacture method of capacitive touch screen, with reference to figure 2, comprise: a substrate 100 is provided, clean after described substrate 100, sputter layer of transparent electrode layer on described substrate 100, apply afterwards photoresist, through exposure, develop, described in wet etching, transparent electrode layer forms multiple the first sensing electrodes 102 that extend along first direction and multiple the second sensing electrodes 103 that extend along second direction, the rhombus electrode of the first sensing 102 for arranging and interconnect continuously, the second 103 of sensing electrodes arrange and form several independently rhombus electrodes with the first sensing electrode 102 intervals that arrange continuously.Also the second sensing electrode 103 can be arranged continuously and interconnects in other embodiments, the first sensing electrode 102 is arranged to several independently electrode patterns take the second sensing electrode 103 arranging continuously as interval.Originally be that in embodiment, first direction is vertical direction, second direction is horizontal direction, also can be oblique direction for first direction and second direction in other embodiments.Described transparent electrode layer can adopt tin indium oxide or indium zinc oxide.Described the first sensing electrode 102 and the second sensing electrode 103 can also be bar shaped, cruciform or snowflake type etc.
Then, coating whole insulation course of patterning on described glass substrate, the first sensing electrode and the second sensing electrode, form the insulation course 110 on the intervening portion that covers described the first sensing electrode 102 and the second sensing electrode 103; Afterwards, form metal-gap-bridge 120, described multiple independently the second sensing electrodes 103 are electrically connected mutually.Wherein, described metal-gap-bridge 120 is complex metal layer, and sputter multiple layer metal layer successively, applies photoresist afterwards, and through exposure, develop, complex metal layer forms metal-gap-bridge 120 described in wet etching.Wherein, at least, as molybdenum layer 121, pass into a certain proportion of oxygen and form molybdena (MoO during near display interface one side metal level in sputter
x).In other embodiments, if multiple the second sensing electrodes are the rhombus electrode that arranges continuously and interconnect, multiple the first sensing electrodes arrange and form several independently rhombus electrodes with the second sensing electrode interval arranging continuously, on insulation course, form so metal-gap-bridge, and described metal-gap-bridge is electrically connected described multiple independently the first sensing electrodes mutually.
Fig. 6 is amount of oxygen (O in capacitive touch screen manufacture method
2) with reflectivity (R%) curve map of metal-gap-bridge 120 resistance values (Rs/ Ω), complex metal layer.We wish the reflectivity of the complex metal layer that reduces metal-gap-bridge employing, and then the visible problem of elimination metal-gap-bridge, wish that metal-gap-bridge 120 has smaller resistance value simultaneously, higher signaling rate, as shown in Figure 6, in the time that to pass into the amount of oxygen be total gas content in 80%, the resistance value of metal-gap-bridge 120 is less than 0.32 Ω, meets the demonstration requirement of general capacitive touch screen.Simultaneously, after tested, in the time passing into the amount of oxygen and account for overall gas content and rise to 80% from 0%, the reflectivity of described metal-gap-bridge 120 drops to 42% from 59%, reduce thus the bright line because of simple metal or the reflective generation of alloy in display frame, eliminated the visible problem of metal-gap-bridge., in the manufacturing technology steps of existing capacitive touch screen, only need pass a bridge 120 o'clock at splash-proofing sputtering metal meanwhile, pass into appropriate oxygen and form metal oxide layer, not changing or increasing under the prerequisite of additional technical steps, improve the display effect of touch-screen.
With reference to figure 2, described metal-gap-bridge 120 can adopt three layers composite metal layer, if display interface is the side away from described insulation course 110, described metal-gap-bridge 120 is followed successively by from the bottom to top molybdenum layer 121, aluminium lamination 122, molybdenum oxide layer 123(and is called for short Mo-Al-MoO
x); If display interface is the side near described insulation course 110, described metal-gap-bridge 120 is followed successively by molybdenum oxide layer 123, aluminium lamination 122, molybdenum layer 121 from the bottom to top.
With reference to figure 3, metal-gap-bridge 120 also can be by three layers composite metal layer, comprising two-layer metal oxide layer, is followed successively by from the bottom to top molybdenum oxide layer 123, aluminium lamination 122, molybdenum oxide layer 123(and is called for short MoO
x-Al-MoO
x).
With reference to figure 4, metal-gap-bridge 120 also can be by four-layer composite metal layer, if display interface is the side away from described insulation course 110, described metal-gap-bridge 120 is followed successively by from the bottom to top molybdenum oxide layer 123, aluminium lamination 122, molybdenum layer 121, molybdenum oxide layer 123(and is called for short Mo-Al-Mo-MoO
x), if display interface is the side near described insulation course 110, described metal-gap-bridge 120 is followed successively by molybdenum oxide layer 123, molybdenum layer 121, aluminium lamination 122, molybdenum layer 121 from the bottom to top.
With reference to figure 5, metal-gap-bridge 120 also can be by five layers composite metal layer, if display interface is the side away from described insulation course 110, described metal-gap-bridge 120 is followed successively by oxidation molybdenum oxide layer 123, molybdenum layer 121, aluminium lamination 122, molybdenum layer 121 from the bottom to top, molybdenum oxide layer 123(is called for short MoO
x-Mo-Al-Mo-MoO
x).Wherein, aluminium lamination 122 thickness are
molybdenum thickness is
molybdenum oxide layer 123 thickness are
after tested, the resistance value of described metal-gap-bridge 120 all, between 0.25 Ω ~ 0.4 Ω, meets the normal demonstration requirement of capacitive touch screen.
In sum, described metal-gap-bridge 120 is metal oxide layer near a side of display interface.Finally, on all elements, be coated with protective seam, make the first sensing electrode 102, the second sensing electrode 103 and metal-gap-bridge 120 and air insulation.
It should be noted that, described the first sensing electrode 102 and the second sensing electrode 103 can also be bar shaped, cruciform or snowflake type etc.Also the second sensing electrode 103 can be arranged continuously and is connected to each other together, the first sensing electrode 102 is for being arranged to several independently electrode patterns in interval.Described transparent electrode layer can adopt tin indium oxide or indium zinc oxide.The complex metal layer of described metal-gap-bridge, except above-mentioned molybdenum, aluminium and the combination of its oxidized metal, can also adopt the metal material of other low-resistivities and the combination in any of its oxidized metal, as copper, nickel, chromium, thallium and alloy thereof.
The capacitive touch screen and the manufacture method thereof that above the embodiment of the present invention are provided are described in detail, applied specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment is just for helping to understand method of the present invention and core concept thereof; , for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention meanwhile.
Claims (23)
1. a capacitive touch screen, comprising: substrate, is formed at transparent electrode layer, insulation course, metal-gap-bridge on described substrate successively; Described transparent electrode layer comprises multiple the first sensing electrodes that extend along first direction and multiple the second sensing electrodes that extend along second direction; Described insulation course covers the intervening portion of described the first sensing electrode and described the second sensing electrode; Described multiple the first sensing electrode or multiple the second sensing electrode are electrically connected by described metal-gap-bridge; It is characterized in that, described metal-gap-bridge is at least metal oxide layer near a side of display interface.
2. capacitive touch screen according to claim 1, is characterized in that, described metal-gap-bridge is complex metal layer.
3. capacitive touch screen according to claim 2, is characterized in that, described complex metal layer can adopt the combination in any of molybdenum, aluminium, copper, nickel, chromium, thallium and alloy thereof and its oxidized metal.
4. capacitive touch screen according to claim 2, is characterized in that, described metal-gap-bridge adopts three layers composite metal layer, as Mo-Al-MoO
x, MoO
x-Al-MoO
x.
5. capacitive touch screen according to claim 2, is characterized in that, described metal-gap-bridge adopts four-layer composite metal layer, as Mo-Al-Mo-MoO
x.
6. capacitive touch screen according to claim 2, is characterized in that, described metal-gap-bridge adopts five layers composite metal layer, as MoO
x-Mo-Al-Mo-MoO
x.
7. according to the capacitive touch screen described in any one in claim 4 to 6, it is characterized in that, described Al tunic is thick is
mo tunic is thick is
moO
xtunic is thick is
8. according to the capacitive touch screen described in any one in claim 4 to 6, it is characterized in that, the width of described metal-gap-bridge is 6 μ m-2 μ m.
9. according to the capacitive touch screen described in any one in claim 4 to 6, it is characterized in that, the resistance value of described metal-gap-bridge is 0.25 Ω ~ 0.4 Ω.
10. capacitive touch screen according to claim 1, is characterized in that, described the first sensing electrode and the second sensing electrode are rhombus, bar shaped, cruciform or snowflake type.
11. capacitive touch screens according to claim 1, is characterized in that, described transparent electrode layer is tin indium oxide or indium zinc oxide.
12. capacitive touch screens according to claim 1, is characterized in that, described insulation course is organic film.
13. capacitive touch screens according to claim 1, is characterized in that, also comprise protective seam, make described the first sensing electrode, the second sensing electrode and metal-gap-bridge and air insulation.
14. capacitive touch screens according to claim 13, is characterized in that, described protective seam is organic material.
Manufacture the method for capacitive touch screen, comprise step for 15. 1 kinds:
Step 1 a: substrate is provided;
Step 2: deposit transparent electrode layer on described substrate, etching forms multiple the first sensing electrodes and multiple the second sensing electrode;
Step 3: the insulation course that forms the intervening portion that covers described the first sensing electrode and described the second sensing electrode;
Step 4: form metal-gap-bridge, be electrically connected by described multiple the first sensing electrodes that extend at first direction or at multiple second sensing electrodes of second direction extension, wherein said metal-gap-bridge is at least metal oxide layer near a side of display interface.
The manufacture method of 16. capacitive touch screens according to claim 15, it is characterized in that, described step 4 comprises: sputter complex metal layer successively, at least in sputter during near a side metal level of display interface, pass into a certain proportion of oxygen, form metal oxide layer.
The manufacture method of 17. capacitive touch screens according to claim 16, is characterized in that, in described gas, the ratio of oxygen is 0 ~ 80%.
The manufacture method of 18. capacitive touch screens according to claim 16, is characterized in that, described complex metal layer can adopt the combination in any of molybdenum, aluminium, copper, nickel, chromium, thallium and alloy thereof and its oxidized metal.
The manufacture method of 19. capacitive touch screens according to claim 15, is characterized in that, described metal-gap-bridge adopts three layers composite metal layer, as Mo-Al-MoO
x, MoOx-Al-MoO
x.
The manufacture method of 20. capacitive touch screens according to claim 15, is characterized in that, described metal-gap-bridge adopts four-layer composite metal layer, as Mo-Al-Mo-MoO
x.
The manufacture method of 21. capacitive touch screens according to claim 15, is characterized in that, described metal-gap-bridge adopts five layers composite metal layer, as MoO
x-Mo-Al-Mo-MoO
x.
22. manufacture methods according to claim 19 to the capacitive touch screen described in any one in 21, is characterized in that, described Al tunic is thick is
mo tunic is thick is
moO
xtunic is thick is
The manufacture method of 23. capacitive touch screens according to claim 15, is characterized in that, also comprises step 5: coating protective seam, makes described the first sensing electrode, described the second sensing electrode and metal-gap-bridge and air insulation.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111796707A (en) * | 2020-06-01 | 2020-10-20 | 宜昌南玻显示器件有限公司 | Metal bridge structure with shadow eliminating effect and touch screen comprising same |
| CN114510167A (en) * | 2020-11-17 | 2022-05-17 | 瀚宇彩晶股份有限公司 | Touch sensing panel |
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| CN114510167B (en) * | 2020-11-17 | 2024-04-12 | 瀚宇彩晶股份有限公司 | Touch sensing panel |
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Application publication date: 20140611 |