CN103808967B - A kind of imaging system of the atomic force microscope based on quartz tuning-fork probe - Google Patents
A kind of imaging system of the atomic force microscope based on quartz tuning-fork probe Download PDFInfo
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- CN103808967B CN103808967B CN201410060481.5A CN201410060481A CN103808967B CN 103808967 B CN103808967 B CN 103808967B CN 201410060481 A CN201410060481 A CN 201410060481A CN 103808967 B CN103808967 B CN 103808967B
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Abstract
The invention discloses a kind of imaging system of the atomic force microscope based on quartz tuning-fork probe, AFM controller in this system is connected respectively by the driving circuit of cable and graphic alphanumeric display, piezoelectric ceramics tube scanner, stepper motor, feedback signal testing circuit and scan control signal treatment circuit, realizes the transmission of electric signal; Sample stage is provided with probe limit base; Circular mounting platform above probe limit base, circuit install bin circular mounting platform being provided with piezoelectric ceramics tube scanner, displacement adjusting part and being supported by four support columns.Designed system of the present invention can allow student recognize the basic functional principle of AFM and the operation steps of imaging system, and uses imaging system to observe the micromechanism of sample.In experimentation, student is by the measurement to the ratio of damping of the power sensing element-quartz tuning-fork probe of imaging system, and the observation to wake vortex, can deepen the understanding to AFM power mechanism of action and optimum configurations further.
Description
Technical field
The present invention relates to a kind of experimental apparatus, more particularly, refer to a kind of imaging system of the atomic force microscope based on quartz tuning-fork probe.
Background technology
1986, Binnig and Quate invented atomic force microscope (AtomicForceMicroscope, AFM).Atomic force microscope utilizes a superfine needle point pointwise detection sample surfaces, when the distance of needle point and sample surfaces reaches nanoscale, probe can be subject to the interaction force that sample produces it, by obtaining the topographical information of sample to the detection of this acting force.By the combination with various modern technology, atomic force microscope not only becomes one of microscope that resolution is the highest in the world, and be in vacuum, air and liquid environment, nanometer resolution imaging can be carried out to sample, possess nano-manipulation with assembling ability, the little strong microcosmic surface analytical instrument of one to pN magnitude acting force can be measured.At present, atomic force microscope is widely used in material science, the hot fields such as biotechnology and survey of deep space.
The experimental apparatus of existing atomic force microscope mostly only has illustrative experiment content, and the operation more complicated of business atomic force microscope instrument, expensive.Student needs to train the longer time just can carry out independent operation, is difficult to allow the principle of work of student's fast understanding atomic force microscope, and experimental cost is also higher.Based on the vacancy in AFM experiments, and in order to allow student learn further atomic force microscope principle, to understand and grasp, student is made to observe sample micromechanism by practical operation experimental facilities, and conveniently student's operation, reduction experimental cost etc., need to improve the experiment instrument of existing atomic force microscope.
At number of patent application CN201110358206.8, on November 11 2013 applying date, disclose denomination of invention for a kind of based on the microscopical fifth overtone imaging system of Tapping Mode Automatic Force.Shown in Figure 1, this system includes AFM controller 1, graphic alphanumeric display 2, scanner 3, sample stage 4, cantilever 5, needle point 51, AFM probe excitation device 6, laser instrument 7, photoelectricity four-quadrant receiver 8, lock-in amplifier 11, second function generator 12 and the first function generator 13.
Summary of the invention
The object of this invention is to provide a kind of imaging system of the atomic force microscope based on quartz tuning-fork probe, the imaging system of this atomic force microscope is by changing structure and the scanner scan mode of probe, eliminate the driver unit to probe, photoelectricity four-quadrant receiver, laser instrument, thus reduce the complexity of the imaging system of the atomic force microscope of the present invention's design.
The present invention is a kind of imaging system of the atomic force microscope based on quartz tuning-fork probe, and this system includes AFM controller (1), graphic alphanumeric display (2), piezoelectric ceramics tube scanner (3), sample stage (4), quartz tuning-fork probe (5); It is characterized in that: also include feedback signal testing circuit (61), scan control signal treatment circuit (62) and displacement adjusting part;
Displacement adjusting part includes stepper motor (51), stepper motor driving circuit, circuit install bin (52), driving member (53), support member (54), probe limit base (55), the first keeper (57A), the second keeper (57B), circular mounting platform (58); Stepper motor driving circuit, feedback signal testing circuit (61), scan control signal treatment circuit (62) are installed in circuit install bin (52);
First keeper (57A) includes the first leading screw (57A1), the first screw set (57A2), the first snap ring (57A3) and the first point cantact spheroid (57A4).First screw set (57A2) is socketed on the first leading screw (57A1), and the first snap ring (57A3) is threaded in the outside of the first screw set (57A2), has inserted the first point cantact spheroid (57A4) in the counter sink of the bottom of the first leading screw (57A1).First screw set (57A2) is arranged in the first countersunk head through hole (55D) of probe limit base (55), and the first snap ring (57A3) is positioned at the below of circular mounting platform (58).
Second keeper (57B) includes the second leading screw (57B1), the second screw set (57B2), the second snap ring (57B3) contact spheroid (57B4) with second point.Second screw set (57B2) is socketed on the second leading screw (57B1), and the second snap ring 57B3 is threaded in the outside of the second screw set (57B2), has inserted second point contact spheroid (57B4) in the counter sink of the bottom of the second leading screw (57B1).Second screw set (57B2) is arranged in the second countersunk head through hole (55D) of probe limit base (55), and the second snap ring (57B3) is positioned at the below of circular mounting platform (58).
Circular mounting platform (58) is provided with the 4th countersunk head through hole (58A), the 5th countersunk head through hole (58B), view window (58C), the first positioning chamber (58D), the second positioning chamber (58F), threaded hole (58H).The center of the first positioning chamber (58D) is provided with the first through hole (58E).The center of the second positioning chamber (58F) is provided with the second through hole (58G).View window (58C) is provided with glass.The lower end of the outer sleeve (53A) in driving member (53) is installed in the first positioning chamber (58D), the 3rd screw set (53B) in driving member (53) is installed in first through hole (58E) of the first positioning chamber (58D).Second positioning chamber (58F) is provided with piezoelectric ceramics tube scanner (3), and the output terminal of piezoelectric ceramics tube scanner (3) is connected with upper end ceramic body (3A) afterwards through the second through hole (58G).The first screw set (57A2) in first keeper (57A) is installed in the 4th countersunk head through hole (58A), the second screw set (57B2) in the second keeper (57B) is installed in the 5th countersunk head through hole (58B).4 threaded holes (58H) are connected with one end of support member (54).Driving member (53) is for driving circular mounting platform (58) in the adjustment of Z-direction.
Driving member (53) includes outer sleeve (53A), the 3rd screw set (53B), the 3rd snap ring (53C), thirdly contacts spheroid (53D), the 3rd leading screw (53E), inner sleeve (53F), pin (53G).
Leading screw (53E) is provided with leading screw section (53E1) and joint (53E2), the bottom of leading screw (53E) is provided with countersunk head circular hole, this countersunk head circular hole is used for set-point contact spheroid (53D), leading screw section (53E1) is moved thereon for screw set (53B), joint (53E2) is provided with through hole (53E3), this through hole (53E3) passes for pin (53G), one end through the pin (53G) after through hole (53E3) is placed in the first fluting (53F1) of inner sleeve (53F), the other end through the pin (53G) after through hole (53E3) is placed in the second fluting (53F2) of inner sleeve (53F).
The upper end of inner sleeve (53F) is provided with counter sink and through hole, this counter sink is for placing the output shaft of stepper motor (52), through hole is used for pressing closer nail (53H) and passes, the one end pressing closer nail (53H) holds out against on the output shaft of stepper motor (52), realizes the locking of the output shaft of inner sleeve (53F) and stepper motor (52) by pressing closer nail (53H).The cylindrical shell of inner sleeve (53F) is provided with the first fluting (53F1) and the second fluting (53F2), and the first fluting (53F1) is for placing one end of pin (53G), and the second fluting (53F2) is for placing the other end of pin (53G).
Probe limit base (55) is provided with the first blind hole (55A), the second blind hole (55B), the 3rd blind hole (55C), the first countersunk head through hole (55D), the second countersunk head through hole (55E), the 3rd countersunk head through hole (55F), opening spacing hole (55G).First blind hole (55A) is for placing the first keeper (57A), and the second blind hole (55B) is for placing the second keeper (57B), and the 3rd blind hole (55C) is for placing the thirdly contact spheroid (53D) in driving member (53).Opening spacing hole (55G) place is used for inserting quartz tuning-fork probe (5), limits by opening spacing hole (55G) range of movement that piezoelectric ceramics tube scanner (3) drives quartz tuning-fork probe (5).Place screw to realize the installation of probe limit base (55) with sample stage (4) at the first countersunk head through hole (55D), the second countersunk head through hole (55E), the 3rd countersunk head through hole (55F) respectively.
The advantage that the present invention is based on the imaging system of the atomic force microscope of quartz tuning-fork probe is:
1. adopt quartz tuning-fork probe not only eliminate exciting bank but also no longer need additional pick-up unit, reduce the complexity of system.
2. the imaging system of the present invention's design decreases the application of device, laser instrument, photoelectricity four-quadrant receiver.
3. adopt four points of piezoelectric ceramic tubes as three-dimensional scanner, have that volume is little, the large and advantage that resonant frequency is high of sweep limit.
4. scanner is placed in the geometry symmetrical structure design of probe geometric center, probe thermal drift can be reduced on the impact of scanner.
5. probe adopts supported at three point location, can reduce the requirement to processing technology, can avoid again the mechanical drift caused because of design itself or manufacturing deficiency.
6. adopt circuit form to realize detecting from perception of spacing between needle point and sample, structure be simple, volume is little, low in energy consumption.
7. by the controller of full digital closed loop control System's composition atomic force microscope, the reliability of system is ensured.
8. by the combining with teaching of soft and hardware, instruction cost is significantly reduced.
Accompanying drawing explanation
Fig. 1 is the disclosed structural drawing based on the microscopical fifth overtone imaging system of Tapping Mode Automatic Force.
Fig. 2 is the structural drawing of the imaging system of a kind of atomic force microscope based on quartz tuning-fork probe that the present invention designs.
Fig. 3 is the structural drawing of the probe mechanism part that the present invention designs.
Fig. 3 A be Fig. 3 face structural drawing.
Fig. 3 B is the structural drawing at another visual angle of probe mechanism part that the present invention designs.
Fig. 3 C is piezoelectric ceramics tube scanner and motor-driven structural drawing in the probe mechanism part that designs of the present invention.
Fig. 3 D is the structural drawing of piezoelectric ceramics tube scanner and Piezoelectric Ceramic in the probe mechanism part that designs of the present invention.
Fig. 3 E is the structural drawing of Piezoelectric Ceramic and quartz tuning-fork probe in the probe mechanism part that designs of the present invention.
Fig. 3 F is another viewing angle constructions figure of Piezoelectric Ceramic and quartz tuning-fork probe in the probe mechanism part that designs of the present invention.
Fig. 3 G is the structural drawing of circular mounting platform in the probe mechanism part that designs of the present invention.
Fig. 3 H is the structural drawing of driving member in the probe mechanism part that designs of the present invention.
Fig. 3 I is the exploded view of driving member in the probe mechanism part that designs of the present invention.
Fig. 3 J is the structural drawing of the first keeper in the probe mechanism part that designs of the present invention.
Fig. 3 K is the structural drawing of the second keeper in the probe mechanism part that designs of the present invention.
Fig. 4 is the imaging interfaces being applicable to atomic force microscope.
Fig. 5 A is the schematic diagram of stepper motor driving circuit of the present invention.
Fig. 5 B is the circuit theory diagrams of feedback signal testing circuit of the present invention.
Fig. 5 C is X-axis control section circuit theory diagrams in scan control signal treatment circuit of the present invention.
Fig. 5 D is Y-axis control section circuit theory diagrams in scan control signal treatment circuit of the present invention.
Fig. 5 E is Z axis control section circuit theory diagrams in scan control signal treatment circuit of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
The imaging system of the atomic force microscope based on quartz tuning-fork probe of the present invention's design is to allow the ultimate principle of students atomic force microscope and application, improve student experimenting manipulative ability simultaneously, and Enhancement test effect and the instruments used for education that design.The imaging system of the atomic force microscope based on quartz tuning-fork probe that student is designed by practical operation the present invention, can scan the surface topography map of the sample 4A obtained on sample stage 4.Surface structure and character that atomic force microscope is characterizing material play an important role, and student is very helpful to scientific research study from now on by this experiment.
Shown in Figure 2, the imaging system of a kind of atomic force microscope based on quartz tuning-fork probe of the present invention's design, this system includes AFM controller 1, graphic alphanumeric display 2, piezoelectric ceramics tube scanner 3, sample stage 4, quartz tuning-fork probe 5, feedback signal testing circuit 61, scan control signal treatment circuit 62 and displacement adjusting part.
(1) AFM controller 1
Shown in Figure 2, AFM controller 1 first aspect output drive signal M
1be applied to after on piezoelectric ceramics tube scanner 3 and stepper motor, indirectly-acting, in quartz probe 5, makes quartz probe 5 vibrate under resonant frequency; The topographical information electric signal D that second aspect receiving feedback signals testing circuit 61 exports
61; The third aspect is according to topographical information electric signal D
61carry out PID arithmetic, obtain motion state drive singal FM
1, this motion state drive singal FM
1after scanner control signal treatment circuit 62, scanner control signal treatment circuit 62 will control the X-axis of piezoelectric ceramics tube scanner 3, Y-axis, Z axis respectively, namely exports X-axis drive singal MX, Y-axis drive singal MY, Z axis drive singal MZ; Fourth aspect in a cyclic process, by topographical information electric signal D
61be converted to graphical information to show in real time in graphic alphanumeric display 2.
In the present invention, that AFM controller 1 adopts is the PC104 single board computer 104-1541CLDN (B) of Yanxiang Intelligent Technology Co., Ltd and the data collecting card PM511PU of Beijing Zhong Taiyanchuan Science and Technology Ltd..104-1541CLDN (B) plate carries GX1CPU, dominant frequency 300MHZ, supports 256MBSDRAM internal memory, with VGA display interface.PM511PU has 16 road A/D ALT-CH alternate channels, 4 road D/A passages, 24 road programmable switch amount input and output and No. 3 counter passages.
(2) graphic alphanumeric display 2
In the present invention, graphic alphanumeric display 2 is for being shown as the result of picture.In the present invention, what graphic alphanumeric display 2 adopted is the OPTIPLEX desktop computer of DELL company.As shown in Figure 4, software program is general conventional image-processing software at the software program interface demonstrated in graphic alphanumeric display 2.
(3) piezoelectric ceramics tube scanner 3
In the present invention, the outer cover 3C of piezoelectric ceramics tube scanner 3 is arranged in the second positioning chamber 58F of circular mounting platform 58.The X-axis of piezoelectric ceramics tube scanner 3 is the length direction of sample stage 4, and the Y-axis of piezoelectric ceramics tube scanner 3 is the Width of sample stage 4, and the Z axis of piezoelectric ceramics tube scanner 3 is the thickness direction of sample stage 4, and is also the direction of needle point and sample contacts.The bottom ceramic body 3B of piezoelectric ceramics tube scanner 3 is vertically installed with the web member 5A of quartz tuning-fork probe 5.
In the present invention, the piezoelectric actuator of the P-153.10H model that piezoelectric ceramics tube scanner 3 adopts PI Corp. to produce.
(4) sample stage 4
In the present invention, sample stage 4 is for carrying sample 4A.In order to prevent conduction, the corner bottom sample stage 4 is separately installed with rubber footing 41.
(5) displacement adjusting part
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, displacement adjusting part includes stepper motor 51, stepper motor driving circuit, circuit install bin 52, driving member 53, support member 54, probe limit base 55, first keeper 57A, the second keeper 57B, circular mounting platform 58.
The PG20S-020 type permanent-magnetic electric machine of Japanese NMB company selected by stepper motor 51.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, stepper motor driving circuit, feedback signal testing circuit 61 and scan control signal treatment circuit 62 are arranged in circuit install bin 52.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, circuit install bin 52 is hollow box body structure, is provided with feedback signal testing circuit 61 and scan control signal treatment circuit 62 in case.The base plate of circuit install bin 52 is supported by 4 support members 54, and makes the base plate of circuit install bin 52 and circular mounting platform 58 keep certain spacing.One end of 4 support members 54 is arranged on the base plate of circuit install bin 52, and the other end of 4 support members 54 is arranged on circular mounting platform 58.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 C, Fig. 3 J, the first keeper 57A includes the first leading screw 57A1, the first screw set 57A2, the first snap ring 57A3 and the first point cantact spheroid 57A4.First screw set 57A2 is socketed on the first leading screw 57A1, and the first snap ring 57A3 is threaded in the outside of the first screw set 57A2, has inserted the first point cantact spheroid 57A4 in the counter sink of the bottom of the first leading screw 57A1.First screw set 57A2 is arranged in the first countersunk head through hole 55D of probe limit base 55, and the first snap ring 57A3 is positioned at the below of circular mounting platform 58.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 C, Fig. 3 K, the second keeper 57B includes the second leading screw 57B1, the second screw set 57B2, the second snap ring 57B3 contacts spheroid 57B4 with second point.Second screw set 57B2 is socketed on the second leading screw 57B1, and the second snap ring 57B3 is threaded in the outside of the second screw set 57B2, has inserted second point contact spheroid 57B4 in the counter sink of the bottom of the second leading screw 57B1.Second screw set 57B2 is arranged in the second countersunk head through hole 55D of probe limit base 55, and the second snap ring 57B3 is positioned at the below of circular mounting platform 58.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 C, Fig. 3 G, circular mounting platform 58 is provided with the 4th countersunk head through hole 58A, the 5th countersunk head through hole 58B, view window 58C, the first positioning chamber 58D, the second positioning chamber 58F, threaded hole 58H.The center of the first positioning chamber 58D is provided with the first through hole 58E.The center of the second positioning chamber 58F is provided with the second through hole 58G.View window 58C is provided with glass.The lower end of the outer sleeve 53A in driving member 53 is installed in first positioning chamber 58D, the 3rd screw set 53B in driving member 53 is installed in the first through hole 58E of the first positioning chamber 58D.Second positioning chamber 58F is provided with piezoelectric ceramics tube scanner 3, and the output terminal of piezoelectric ceramics tube scanner 3 is connected with upper end ceramic body 3A through after the second through hole 58G.The first screw set 57A2 in first keeper 57A is installed in the 4th countersunk head through hole 58A, the second screw set 57B2 in the second keeper 57B is installed in the 5th countersunk head through hole 58B.4 threaded hole 58H are connected with one end of support member 54.Driving member 53 is for driving circular mounting platform 58 in the adjustment of Z-direction.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 H, Fig. 3 I, driving member 53 includes outer sleeve 53A, the 3rd screw set 53B, the 3rd snap ring 53C, thirdly contacts spheroid 53D, the 3rd leading screw 53E, inner sleeve 53F, pin 53G.
Leading screw 53E is provided with leading screw section 53E1 and joint 53E2, the bottom of leading screw 53E is provided with countersunk head circular hole, this countersunk head circular hole is used for set-point contact spheroid 53D, leading screw section 53E1 is used for screw set 53B and moves thereon, joint 53E2 is provided with through hole 53E3, this through hole 53E3 is used for pin 53G and passes, and the one end through the pin 53G after through hole 53E3 is placed in the first fluting 53F1 of inner sleeve 53F, and the other end through the pin 53G after through hole 53E3 is placed in the second fluting 53F2 of inner sleeve 53F.
The upper end of inner sleeve 53F is provided with counter sink and through hole, this counter sink is for placing the output shaft of stepper motor 52, through hole is used for pressing closer nail 53H and passes, the one end pressing closer nail 53H holds out against on the output shaft of stepper motor 52, realizes the locking of the output shaft of inner sleeve 53F and stepper motor 52 by pressing closer nail 53H.The cylindrical shell of inner sleeve 53F is provided with the first fluting 53F1 and second fluting 53F2, and the first fluting 53F1 is for placing one end of pin 53G, and the second fluting 53F2 is for placing the other end of pin 53G.
Being assembled into of driving member 53: the output shaft of stepper motor 52 is connected with the upper end of inner sleeve 53F by pressing closer nail 53H, pin 53G is through after the through hole 53E3 on leading screw 53E, and leading screw 53E is placed in inner sleeve 53F, and the two ends of pin 53G are placed in the first fluting 53F1 and second fluting 53F2, screw set 53B is socketed on leading screw section 53E1, the outside of screw set 53B with snap ring 53C for being threaded, snap ring 53C is placed in the below of circular mounting platform 58, and outer sleeve 53A is socketed in the outside of inner sleeve 53F.One end of outer sleeve 53A is connected with the housing of stepper motor 52, the other end of outer sleeve 53A be arranged in the first positioning chamber 58D of circular mounting platform 58, in the first through hole 58E of circular mounting platform 58, screw set 53B is installed.One end of point cantact spheroid 53D is placed in the second blind hole 55C of probe limit base 55, and the other end of point cantact spheroid 53D is placed in the countersunk head circular hole of the bottom of leading screw 53E.
The drive connection of driving member 53 is: under the driving of stepper motor 52, inner sleeve 53F rotates, leading screw 53E is servo-actuated simultaneously, then screw set 53B moves along Z-direction (i.e. the thickness direction of sample) on leading screw 53E, because screw set 53B is fixedly mounted in the first through hole 58E of circular mounting platform 58, then circular mounting platform 58 moves along Z-direction (i.e. the thickness direction of sample).
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 C, Fig. 3 D, probe limit base 55 is provided with the first blind hole 55A, the second blind hole 55B, the 3rd blind hole 55C, the first countersunk head through hole 55D, the second countersunk head through hole 55E, the 3rd countersunk head through hole 55F, opening spacing hole 55G.First blind hole 55A is for placing the first keeper 57A, and the second blind hole 55B is for placing the second keeper 57B, and the 3rd blind hole 55C is for placing the thirdly contact spheroid 53D in driving member 53.Opening spacing hole 55G place is used for inserting quartz tuning-fork probe 5, limits by opening spacing hole 55G the range of movement that piezoelectric ceramics tube scanner 3 drives quartz tuning-fork probe 5.Place screw to realize the installation of probe limit base 55 with sample stage 4 at the first countersunk head through hole 55D, the second countersunk head through hole 55E, the 3rd countersunk head through hole 55F respectively.
In the present invention, manually regulate the first keeper 57A, the second keeper 57B lifts or put down circular mounting platform 58, realize the coarse adjustment of quartz tuning-fork probe 5 apart from sample 4A displacement in the Z-axis direction.Lift or put down circular mounting platform 58 by stepper motor 51 with coordinating of driving member 53, realize the accurate adjustment of quartz tuning-fork probe 5 apart from sample 4A displacement in the Z-axis direction.
(6) quartz tuning-fork probe 5
Shown in Fig. 3 D, Fig. 3 E, Fig. 3 F, both arms quartz tuning-fork selected by quartz tuning-fork probe 5, K-3 × 8 that Kai Qing Dongguang, Beijing electronics corporation produces or K-2 × 6 wire type crystal resonator.Be provided with needle point 5D in the end of the upper cantilever 5B of quartz tuning-fork probe 5, and the tip of upper needle point 5D upwards, the end of the lower cantalever 5C of quartz tuning-fork probe 5 is provided with lower needle point 5E, and the tip of lower needle point 5E is downward.The link 5A of quartz tuning-fork probe 5 is bonded on the bottom ceramic body 3B of piezoelectric ceramics tube scanner 3.
Needle point (upper needle point 5D, lower needle point 5E) can be designed to pyramidal structure.The end of needle point and sample contacts.Needle point material selection tungsten filament.
In the present invention, quartz tuning-fork probe 5 is for the topographical information of perception sample to be scanned, and this topographical information detects through feedback signal testing circuit 61, thus topographical information is converted to electric signal.Quartz tuning-fork probe is adopted to be used for probe excitation and shape changing detection as force snesor, detection signal amplifies through feedback signal testing circuit and passes to feedback controller after demodulation, and to carry out alignment error signal minimum as far as possible by adjusting piezoelectric ceramic tube in real time for feedback controller.
(7) feedback signal testing circuit 61
Shown in Fig. 5 B, in the present invention, feedback signal testing circuit 61 includes electric current changing voltage unit, signal amplification unit and root mean square arithmetic element; From the topographical information Sensitive Current signal M that quartz tuning-fork probe 5 exports
5enter 2 pin of U11 chip (OPA27 operational amplifier chip), topographical information Sensitive Current signal M
5be connected with 6 pin through resistance R12, topographical information Sensitive Current signal M
5be connected with 6 pin through electric capacity C32,4 pin of U11 chip connect-5V power supply, and 7 pin of U11 chip connect+5V power supply, 6 pin output voltage signal VM of U11 chip
5.6 pin of U11 chip are connected with 2 pin of U12 chip (OPA27 operational amplifier chip) through resistance R13.
Voltage signal VM
5be connected with 6 pin through resistance R13, electric capacity C33, voltage signal VM
5be connected with 6 pin through resistance R13, resistance R15,3 pin of U12 chip are through resistance R14 ground connection, and 4 pin of U12 chip connect-5V power supply, and 7 pin of U12 chip connect+5V power supply, and 6 pin of U12 chip export amplification voltage signal AM
5.6 pin of U12 chip are connected with 15 pin of U10 chip (AD637 root mean square direct current conversion chip).
1 foot meridian capacitor C20 ground connection of U10 chip, 1 pin of U10 chip is connected with 11 pin through variable resistor R16,3 pin, 4 pin ground connection, 6 pin are connected with 11 pin, 10 foot meridian capacitor C17 are connected with 11 pin, and 12 pin connect-5V power supply, and 13 pin connect+5V power supply, 15 pin are connected with 6 pin of U12 chip, and 16 pin are connected with AFM controller 1.
In the present invention, the topographical information of to be scanned sample of feedback signal testing circuit 61 first aspect for receiving quartz probe 5 sensitivity and arriving; Second aspect be by sensitivity to the topographical information of sample to be scanned carry out amplifying, asking root-mean-square value, export topographical information electric signal D
61.
(8) scan control signal treatment circuit 62
In the present invention, scan control signal treatment circuit 62 includes X-axis member control circuit, Y-axis member control circuit and Z axis member control circuit.
Shown in Fig. 5 C, the X-axis signal X_IN that X-axis member control circuit AFM controller exports is connected to 3 pin of U1A chip (OP470 four-way operational amplifier chip) through resistance R8, 3 foot meridian capacitor C3 ground connection of U1A chip, 2 pin are through resistance R5 ground connection, 2 pin are connected with 1 pin through resistance R1, 4 pin connect+15V power supply, 4 foot meridian capacitor C1 ground connection, 11 pin connect-15V power supply, 11 foot meridian capacitor C6 ground connection, 1 pin is connected with 13 pin of U1D chip (OP470 four-way operational amplifier chip) through resistance R6, 13 pin are connected with 14 pin through resistance R4, 12 pin are through resistance R9 ground connection, 14 pin are connected with 1 pin of U2 chip (PA240 high voltage operational amplifier chip) through resistance R7, 1 pin is connected with 5 pin through resistance R2, 2 pin are through resistance R11 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C2 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C7 ground connection, 6 foot meridian capacitor C4 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R10, 1 pin pin of U1A chip is connected with 1 pin of U3 chip (PA240 high voltage operational amplifier chip) through resistance R14,1 pin is connected with 5 pin through resistance R12,2 pin are through resistance R16 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C8 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C11 ground connection, 6 foot meridian capacitor C9 are connected with 7 pin, and 5 pin are connected on piezoelectric ceramics tube scanner after resistance R15.
Shown in Fig. 5 D, the Y-axis signal Y_IN that Y-axis member control circuit AFM controller exports is connected to 5 pin of U1B chip (OP470 four-way operational amplifier chip) through resistance R24, 5 foot meridian capacitor C13 ground connection of U1B chip, 6 pin are through resistance R21 ground connection, 6 pin are connected with 7 pin through resistance R17, 7 pin are connected with 9 pin of U1C chip (OP470 four-way operational amplifier chip) through resistance R22, 9 pin are connected with 8 pin through resistance R20, 10 pin are through resistance R25 ground connection, 8 pin are connected with 1 pin of U4 chip (PA240 high voltage operational amplifier chip) through resistance R23, 1 pin is connected with 5 pin through resistance R18, 2 pin are through resistance R27 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C12 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C16 ground connection, 6 foot meridian capacitor C14 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R26, 7 pin of U1B chip are connected with 1 pin of U5 chip (PA240 high voltage operational amplifier chip) through resistance R30,1 pin is connected with 5 pin through resistance R28,2 pin are through resistance R32 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C17 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C20 ground connection, 6 foot meridian capacitor C18 are connected with 7 pin, and 5 pin are connected on piezoelectric ceramics tube scanner after resistance R31.
Shown in Fig. 5 E, Z axis member control circuit Z axis signal Z_IN is connected to 3 pin of U7 chip (OP37 operational amplifier chip) through resistance R38, 2 pin are through resistance R36 ground connection, 2 pin are connected with 6 pin through resistance R33, 7 pin connect+15V power supply, 7 foot meridian capacitor C21 ground connection, 4 pin connect-15V power supply, 4 foot meridian capacitor C25 ground connection, 6 pin are connected with 1 pin of U6 chip (PA240 high voltage operational amplifier chip) through resistance R37, 1 pin is connected with 5 pin through resistance R34, 2 pin are through resistance R40 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C22 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C26 ground connection, 6 foot meridian capacitor C23 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R39.
(9) stepper motor driving circuit
Shown in Fig. 5 A, stepper motor wire is connected to motor drive ic U14(A3967 stepper motor driver chip) 16, 21, 9, on 4 pin, 1 pin of motor drive ic U14 connects+5V power supply after variable resistor R21, 1 pin is through variable resistor R21, resistance R22 ground connection, 10 pin, 11 pin, 3 pin are connected with AFM controller 1, 22 pin connect+5V power supply, 12 pin are connected with 2 pin of jumper terminal P2, 12 pin connect+5V power supply through resistance R23, 13 pin are connected with 4 pin of jumper terminal P2, 13 pin connect+5V power supply through resistance R24, 1 pin of jumper terminal P2 and 3 pin ground connection, 15 pin of motor drive ic U14 connect digitally, 24 pin connect+5V power supply, 23 pin are through resistance R17 ground connection, 23 foot meridian capacitor C2 ground connection, 2 pin are through resistance R18 ground connection, 2 foot meridian capacitor C21 ground connection, 6 pin, 7 pin, 18 pin connect digitally, 19 pin ground connection, 8 pin connect digitally through resistance R20, 17 pin connect digitally through resistance R19, 5 pin connect+15V power supply, 5 foot meridian capacitor C28 ground connection, 5 foot meridian capacitor C29 ground connection, 20 pin connect+15V power supply, 20 foot meridian capacitor C28 ground connection, 20 foot meridian capacitor C29 ground connection, 14 pin connect+5V power supply, 14 foot meridian capacitor C23 ground connection, 14 foot meridian capacitor C22 ground connection.
The installation of the imaging system of a kind of atomic force microscope based on quartz tuning-fork probe of the present invention's design is closed and is: AFM controller 1 is connected respectively by the driving circuit of cable and graphic alphanumeric display 2, piezoelectric ceramics tube scanner 3, stepper motor, feedback signal testing circuit 61 and scan control signal treatment circuit 62, realizes the transmission of electric signal;
Four angles bottom sample stage 4 are separately installed with rubber footing 41, sample stage 4 are provided with probe limit base 55; Be circular mounting platform 58 above probe limit base 55, circular mounting platform 58 be provided with piezoelectric ceramics tube scanner 3, displacement adjusting part; Circuit install bin 52 is arranged on the top of circular mounting platform 58 by four support columns, is provided with the driving circuit of feedback signal testing circuit 61, scan control signal treatment circuit 62 and stepper motor in circuit install bin 52.
The operating process of the imaging system of a kind of atomic force microscope based on quartz tuning-fork probe of the present invention's design is as follows:
1, check quartz tuning-fork probe 5, whether tip portion is lost;
2, sample is placed on the correct position on sample stage 4;
3, coarse adjustment needle point displacement, the spacing namely between needle point and sample at 0.5 centimetre to 1 centimetre, manual adjustments first keeper 57A and the second keeper 57B;
4, turn on the power switch, make piezoelectric ceramics tube scanner 3 and driving member 53 enter duty;
5, open graphic alphanumeric display 2, the display interface (as shown in Figure 4) of reference experiment application program, arrange range of scanned frequencies (about 19kHz to 21kHz), frequency sweep obtains frequency sweep curve.
6, observe frequency sweep curve, frequency of operation is arranged on the right side of the resonance peak of frequency sweep curve;
Working point (reference value namely described in bistable state part, less by about 1/3 than current AD value) 7, is set;
8, accurate adjustment needle point displacement, arranges the step-length of stepper motor, makes needle point and sample contacts;
9, piezoelectric ceramics tube scanner 3 starts scanning, obtains sample surfaces height shape appearance figure.
Claims (6)
1., based on an imaging system for the atomic force microscope of quartz tuning-fork probe, this system includes AFM controller (1), graphic alphanumeric display (2), piezoelectric ceramics tube scanner (3), sample stage (4), quartz tuning-fork probe (5); It is characterized in that: also include feedback signal testing circuit (61), scan control signal treatment circuit (62) and displacement adjusting part;
Displacement adjusting part includes stepper motor (51), stepper motor driving circuit, circuit install bin (52), driving member (53), support member (54), probe limit base (55), the first keeper (57A), the second keeper (57B), circular mounting platform (58); Stepper motor driving circuit, feedback signal testing circuit (61), scan control signal treatment circuit (62) are installed in circuit install bin (52);
First keeper (57A) includes the first leading screw (57A1), the first screw set (57A2), the first snap ring (57A3) and the first point cantact spheroid (57A4); First screw set (57A2) is socketed on the first leading screw (57A1), first snap ring (57A3) is threaded in the outside of the first screw set (57A2), has inserted the first point cantact spheroid (57A4) in the counter sink of the bottom of the first leading screw (57A1); First screw set (57A2) is arranged in the first countersunk head through hole (55D) of probe limit base (55), and the first snap ring (57A3) is positioned at the below of circular mounting platform (58);
Second keeper (57B) includes the second leading screw (57B1), the second screw set (57B2), the second snap ring (57B3) contact spheroid (57B4) with second point; Second screw set (57B2) is socketed on the second leading screw (57B1), second snap ring 57B3 is threaded in the outside of the second screw set (57B2), has inserted second point contact spheroid (57B4) in the counter sink of the bottom of the second leading screw (57B1); Second screw set (57B2) is arranged in the second countersunk head through hole (55D) of probe limit base (55), and the second snap ring (57B3) is positioned at the below of circular mounting platform (58);
Circular mounting platform (58) is provided with the 4th countersunk head through hole (58A), the 5th countersunk head through hole (58B), view window (58C), the first positioning chamber (58D), the second positioning chamber (58F), threaded hole (58H); The center of the first positioning chamber (58D) is provided with the first through hole (58E); The center of the second positioning chamber (58F) is provided with the second through hole (58G); View window (58C) is provided with glass; The lower end of the outer sleeve (53A) in driving member (53) is installed in the first positioning chamber (58D), the 3rd screw set (53B) in driving member (53) is installed in first through hole (58E) of the first positioning chamber (58D); Second positioning chamber (58F) is provided with piezoelectric ceramics tube scanner (3), and the output terminal of piezoelectric ceramics tube scanner (3) is connected with upper end ceramic body (3A) afterwards through the second through hole (58G); The first screw set (57A2) in first keeper (57A) is installed in the 4th countersunk head through hole (58A), the second screw set (57B2) in the second keeper (57B) is installed in the 5th countersunk head through hole (58B); 4 threaded holes (58H) are connected with one end of support member (54); Driving member (53) is for driving circular mounting platform (58) in the adjustment of Z-direction;
Driving member (53) includes outer sleeve (53A), the 3rd screw set (53B), the 3rd snap ring (53C), thirdly contacts spheroid (53D), the 3rd leading screw (53E), inner sleeve (53F), pin (53G);
Leading screw (53E) is provided with leading screw section (53E1) and joint (53E2), the bottom of leading screw (53E) is provided with countersunk head circular hole, this countersunk head circular hole is used for set-point contact spheroid (53D), leading screw section (53E1) is moved thereon for screw set (53B), joint (53E2) is provided with through hole (53E3), this through hole (53E3) passes for pin (53G), one end through the pin (53G) after through hole (53E3) is placed in the first fluting (53F1) of inner sleeve (53F), the other end through the pin (53G) after through hole (53E3) is placed in the second fluting (53F2) of inner sleeve (53F),
The upper end of inner sleeve (53F) is provided with counter sink and through hole, this counter sink is for placing the output shaft of stepper motor (51), through hole is used for pressing closer nail (53H) and passes, the one end pressing closer nail (53H) holds out against on the output shaft of stepper motor (51), realizes the locking of the output shaft of inner sleeve (53F) and stepper motor (51) by pressing closer nail (53H); The cylindrical shell of inner sleeve (53F) is provided with the first fluting (53F1) and the second fluting (53F2), first fluting (53F1) is for placing one end of pin (53G), and the second fluting (53F2) is for placing the other end of pin (53G);
Probe limit base (55) is provided with the first blind hole (55A), the second blind hole (55B), the 3rd blind hole (55C), the first countersunk head through hole (55D), the second countersunk head through hole (55E), the 3rd countersunk head through hole (55F), opening spacing hole (55G); First blind hole (55A) is for placing the first keeper (57A), second blind hole (55B) is for placing the second keeper (57B), and the 3rd blind hole (55C) is for placing the thirdly contact spheroid (53D) in driving member (53); Opening spacing hole (55G) place is used for inserting quartz tuning-fork probe (5), limits by opening spacing hole (55G) range of movement that piezoelectric ceramics tube scanner (3) drives quartz tuning-fork probe (5); Place screw to realize the installation of probe limit base (55) with sample stage (4) at the first countersunk head through hole (55D), the second countersunk head through hole (55E), the 3rd countersunk head through hole (55F) respectively.
2. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, it is characterized in that: manually regulate the first keeper (57A), the second keeper (57B) lifts or put down circular mounting platform (58), realize the coarse adjustment of quartz tuning-fork probe (5) distance sample (4A) displacement in the Z-axis direction; Lift or put down circular mounting platform (58) by stepper motor (51) with coordinating of driving member (53), realize the accurate adjustment of quartz tuning-fork probe (5) distance sample (4A) displacement in the Z-axis direction.
3. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, is characterized in that the circuit principle structure of feedback signal testing circuit (61) is: the topographical information Sensitive Current signal M exported from quartz tuning-fork probe (5)
5enter 2 pin of U11 chip, topographical information Sensitive Current signal M
5be connected with 6 pin through resistance R12, topographical information Sensitive Current signal M
5be connected with 6 pin through electric capacity C32,4 pin of U11 chip connect-5V power supply, and 7 pin of U11 chip connect+5V power supply, 6 pin output voltage signal VM of U11 chip
5; 6 pin of U11 chip are connected with 2 pin of U12 chip through resistance R13; U11 chip is OPA27 operational amplifier chip; U12 chip is OPA27 operational amplifier chip;
Voltage signal VM
5be connected with 6 pin through resistance R13, electric capacity C33, voltage signal VM
5be connected with 6 pin through resistance R13, resistance R15,3 pin of U12 chip are through resistance R14 ground connection, and 4 pin of U12 chip connect-5V power supply, and 7 pin of U12 chip connect+5V power supply, and 6 pin of U12 chip export amplification voltage signal AM
5; 6 pin of U12 chip are connected with 15 pin of U10 chip; U10 chip is AD637 root mean square direct current conversion chip;
1 foot meridian capacitor C20 ground connection of U10 chip, 1 pin of U10 chip is connected with 11 pin through variable resistor R16,3 pin, 4 pin ground connection, 6 pin are connected with 11 pin, 10 foot meridian capacitor C17 are connected with 11 pin, and 12 pin connect-5V power supply, and 13 pin connect+5V power supply, 15 pin are connected with 6 pin of U12 chip, and 16 pin are connected with AFM controller 1.
4. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, is characterized in that the circuit principle structure of scan control signal treatment circuit (62) is: include X-axis member control circuit, Y-axis member control circuit and Z axis member control circuit;
The X-axis signal X_IN that X-axis member control circuit AFM controller exports is connected to 3 pin of the U1A chip of OP470 four-way operational amplifier chip through resistance R8, 3 foot meridian capacitor C3 ground connection of U1A chip, 2 pin are through resistance R5 ground connection, 2 pin are connected with 1 pin through resistance R1, 4 pin connect+15V power supply, 4 foot meridian capacitor C1 ground connection, 11 pin connect-15V power supply, 11 foot meridian capacitor C6 ground connection, 1 pin is connected with 13 pin of the U1D chip of OP470 four-way operational amplifier chip through resistance R6, 13 pin are connected with 14 pin through resistance R4, 12 pin are through resistance R9 ground connection, 14 pin are connected with 1 pin of U2 chip through resistance R7, 1 pin is connected with 5 pin through resistance R2, 2 pin are through resistance R11 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C2 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C7 ground connection, 6 foot meridian capacitor C4 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R10, 1 pin pin of U1A chip is connected with 1 pin of U3 chip through resistance R14,1 pin is connected with 5 pin through resistance R12,2 pin are through resistance R16 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C8 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C11 ground connection, 6 foot meridian capacitor C9 are connected with 7 pin, and 5 pin are connected on piezoelectric ceramics tube scanner after resistance R15, U2 chip is PA240 high voltage operational amplifier chip, U3 chip is PA240 high voltage operational amplifier chip,
The Y-axis signal Y_IN that Y-axis member control circuit AFM controller exports is connected to 5 pin of the U1B chip of OP470 four-way operational amplifier chip through resistance R24, 5 foot meridian capacitor C13 ground connection of U1B chip, 6 pin are through resistance R21 ground connection, 6 pin are connected with 7 pin through resistance R17, 7 pin are connected with 9 pin of the U1C chip of OP470 four-way operational amplifier chip through resistance R22, 9 pin are connected with 8 pin through resistance R20, 10 pin are through resistance R25 ground connection, 8 pin are connected with 1 pin of U4 chip through resistance R23, 1 pin is connected with 5 pin through resistance R18, 2 pin are through resistance R27 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C12 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C16 ground connection, 6 foot meridian capacitor C14 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R26, 7 pin of U1B chip are connected with 1 pin of U5 chip through resistance R30,1 pin is connected with 5 pin through resistance R28,2 pin are through resistance R32 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C17 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C20 ground connection, 6 foot meridian capacitor C18 are connected with 7 pin, and 5 pin are connected on piezoelectric ceramics tube scanner after resistance R31, U4 chip is PA240 high voltage operational amplifier chip,
Z axis member control circuit Z axis signal Z_IN is connected to 3 pin of U7 chip through resistance R38, 2 pin are through resistance R36 ground connection, 2 pin are connected with 6 pin through resistance R33, 7 pin connect+15V power supply, 7 foot meridian capacitor C21 ground connection, 4 pin connect-15V power supply, 4 foot meridian capacitor C25 ground connection, 6 pin are connected with 1 pin of U6 chip through resistance R37, 1 pin is connected with 5 pin through resistance R34, 2 pin are through resistance R40 ground connection, 3 pin connect+150V power supply, 3 foot meridian capacitor C22 ground connection, 4 pin connect-150V power supply, 4 foot meridian capacitor C26 ground connection, 6 foot meridian capacitor C23 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R39, U7 chip is OP37 operational amplifier chip, U6 chip is PA240 high voltage operational amplifier chip.
5. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, it is characterized in that the circuit principle structure of stepper motor driving circuit is: stepper motor wire is connected to 16 of motor drive ic U14, 21, 9, on 4 pin, 1 pin of motor drive ic U14 connects+5V power supply after variable resistor R21, 1 pin is through variable resistor R21, resistance R22 ground connection, 10 pin, 11 pin, 3 pin are connected with AFM controller 1, 22 pin connect+5V power supply, 12 pin are connected with 2 pin of jumper terminal P2, 12 pin connect+5V power supply through resistance R23, 13 pin are connected with 4 pin of jumper terminal P2, 13 pin connect+5V power supply through resistance R24, 1 pin of jumper terminal P2 and 3 pin ground connection, 15 pin of motor drive ic U14 connect digitally, 24 pin connect+5V power supply, 23 pin are through resistance R17 ground connection, 23 foot meridian capacitor C2 ground connection, 2 pin are through resistance R18 ground connection, 2 foot meridian capacitor C21 ground connection, 6 pin, 7 pin, 18 pin connect digitally, 19 pin ground connection, 8 pin connect digitally through resistance R20, 17 pin connect digitally through resistance R19, 5 pin connect+15V power supply, 5 foot meridian capacitor C28 ground connection, 5 foot meridian capacitor C29 ground connection, 20 pin connect+15V power supply, 20 foot meridian capacitor C28 ground connection, 20 foot meridian capacitor C29 ground connection, 14 pin connect+5V power supply, 14 foot meridian capacitor C23 ground connection, 14 foot meridian capacitor C22 ground connection, U14 chip is A3967 stepper motor driver chip.
6. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, it is characterized in that: adopt quartz tuning-fork probe to be used for probe excitation and shape changing detection as force snesor, detection signal amplifies through feedback signal testing circuit and passes to feedback controller after demodulation, and to carry out alignment error signal minimum as far as possible by adjusting piezoelectric ceramic tube in real time for feedback controller.
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| CN108803680A (en) * | 2018-07-25 | 2018-11-13 | 方焕辉 | A kind of control device and method of MEMS sensor |
| CN112017523A (en) * | 2019-05-30 | 2020-12-01 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Atomic force microscopic teaching aid for science popularization and working method thereof |
| CN111028734B (en) * | 2019-12-26 | 2021-11-26 | 深圳市美何广告有限公司 | Self-cleaning display type board |
| CN111398283A (en) * | 2020-04-28 | 2020-07-10 | 中北大学 | System for automatically adjusting laser reflection light path |
| CN111896776B (en) * | 2020-06-30 | 2021-10-22 | 中山大学 | Atomic force microscope probe and manufacturing method thereof |
| CN111811939B (en) * | 2020-07-21 | 2022-08-02 | 上海交通大学 | High-precision nano-mechanics detection system in ultralow temperature environment |
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