CN103743336A - Method and device of heterodyne interferometry of incident light and laser at opposite angles based on rectangular prism - Google Patents
Method and device of heterodyne interferometry of incident light and laser at opposite angles based on rectangular prism Download PDFInfo
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- CN103743336A CN103743336A CN201310745960.6A CN201310745960A CN103743336A CN 103743336 A CN103743336 A CN 103743336A CN 201310745960 A CN201310745960 A CN 201310745960A CN 103743336 A CN103743336 A CN 103743336A
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Abstract
The invention discloses a method and a device of heterodyne interferometry of incident light and laser at opposite angles based on a rectangular prism, and belongs to the technical field of laser application. The method adopts two beams of spatial isolation parallel light with different frequencies, incidence points of the two parallel beams on a non-polarization splitting prism are located on a diagonal of an incidence surface and are symmetrical about a central point of the incidence surface, and the rectangular prism is taken as a reference prism and a measuring prism; interferometry is carried out by generating two interferometry signals with opposite Doppler frequency shifts finally. According to the method and the device, the frequency aliasing phenomenon in an interferometer can be eliminated, the measuring precision of heterodyne interferometry is improved, and meanwhile, the resolution of heterodyne interferometry is doubled.
Description
Technical field
The invention belongs to laser application technique field, relate generally to a kind of diagonal angle incident light laser heterodyne interference measuring method and device based on right-angle prism.
Background technology
Because it has, antijamming capability is strong, measurement range is large, signal to noise ratio (S/N ratio) is high and be easy to realize the features such as high precision is widely used in the fields such as ultraprecise processing, litho machine and three coordinate measuring machine in laser heterodyne interference measurement.Along with the development of ultraprecise engineering, machining precision is proposed to more and more higher requirement; Also the measuring accuracy of difference interference measuring and resolution have all been proposed to new challenge simultaneously.
In laser heterodyne interference is measured, nonlinearity erron has seriously limited the further raising of measuring accuracy and resolution, and Chinese scholars has been carried out a large amount of research to laser heterodyne interference nonlinearity erron.Nonlinearity erron comes from the optics aliasing in optical interference circuit, and traditional interferometer measuration system cannot be avoided the optics aliasing in interferometry, has limited the raising of its measuring accuracy and resolution.
T.L.Schmitz and J.F.Beckwith have proposed a kind of method (Ascousto-optic displacement-measureing interferometer:a new heterodyne interferometer with Anstromlevel periodic error.Journal of Modern Optics49, pages2105-2114) of interferometer transformation.Compared to traditional measuring method, the method, using acousto-optic frequency shifters as spectroscope, is carried out separated by measuring beam with reference beam.The method can reduce reference light and measure light frequency aliasing, is conducive to reduce the nonlinearity erron of measurement, thereby improves measuring accuracy and resolution.But this apparatus structure is complicated and special, in cannot being widely used in ultraprecise processing and measuring.
Ki-Nam Joo etc. has developed a kind of new pattern laser interferometry structure (Simple heterodyne laser interferometer with subnanometer periodic errors.Optics Letters/Vol.34, No.3/Fe bruary1,2009).This structure is that reference beam is spatially separated with measuring beam, has eliminated the frequency alias in interferometry, eliminates nonlinearity erron completely, thereby improves measuring accuracy and Measurement Resolution.In addition, this apparatus structure is simple, and cost is low, compared to front a kind of measuring method, is more conducive to the application in ultra precise measurement field.But the method optical texture is asymmetric, be subject to the impact of environment temperature.
In sum, existing laser heterodyne interference measuring method all cannot meet the requirement of ultraprecise in-process measurement to the high precision of interferometer and resolution, has seriously limited the development in ultraprecise in-process measurement field.
Summary of the invention
Object of the present invention is exactly for above-mentioned deficiency, has proposed a kind of diagonal angle incident light laser heterodyne interference measuring method and device based on right-angle prism, reaches and improves the measuring accuracy of laser heterodyne interference and the object of Measurement Resolution.
Object of the present invention is achieved through the following technical solutions:
Diagonal angle incident light laser heterodyne interference measuring method based on right-angle prism, the method is:
(1) frequency is respectively f
1, f
2and two bundle parallel beams of space separation incide unpolarized Amici prism;
(2) described two bundle directional lights incide the diagonal position that incidence point on unpolarized Amici prism is positioned at the plane of incidence;
(3) frequency is f
1light beam by unpolarized Amici prism, be divided into reference beam and measuring beam two parts, simultaneously frequency is f
2light beam also by unpolarized Amici prism, be divided into reference beam and measuring beam two parts;
(4) frequency is respectively f
1, f
2two bundle reference beams incide with reference to right-angle prism, and be reflected back toward unpolarized Amici prism; Frequency is respectively f simultaneously
1, f
2two bundle measuring beams incide destination end right-angle prism, and be reflected back toward unpolarized Amici prism;
(5) regulate with reference to right-angle prism and destination end right-angle prism, making frequency is f
1reference beam and frequency be f
2measuring beam overlap and produce interference signal I
m1; Making frequency is f
2reference beam and frequency be f
1measuring beam overlap and produce interference signal I
m2; According to two interference signal I
m1, I
m2calculate the displacement of destination end right-angle prism.
Diagonal angle incident light laser heterodyne interference measurement mechanism based on right-angle prism, comprises unpolarized Amici prism, with reference to right-angle prism, photodetector A, photodetector B, describedly with reference to right-angle prism, is positioned at unpolarized Amici prism reflected light output terminal; Described unpolarized Amici prism output two-way interferometric beams, photodetector A on a road measured interference light beam optical path therein, photodetector B on another road measured interference light beam optical path; This device also comprises destination end right-angle prism, and described destination end right-angle prism is positioned at the transmitted light output terminal of unpolarized Amici prism.
The present invention has following characteristics and beneficial effect:
(1) in the present invention, reference beam is spatially separated with measuring beam, before arriving detector, does not occur lap over, has eliminated the root of the nonlinearity erron generation of interferometer.
(2) in conventional interference instrument, adopt polarization splitting prism to carry out beam separation, interference mirror group adjusting difficulty and processing cost are high; In the present invention, use common unpolarized Amici prism instead and replace polarization splitting prism, because of its polarization state to LASER Light Source change insensitive, thereby greatly reduce the adjusting difficulty of interference mirror group, meanwhile, use unpolarized Amici prism can reduce interferometer cost.
(3) in the present invention, two measuring-signals that interferometer produces have the Doppler shift that size is identical, symbol is contrary, by two measuring-signals being carried out to difference, process and the resolution of interferometer can be doubled.
(4) in the present invention, the structure of laser interferometer is full symmetric on reference path and optical path, eliminates the temperature drift that variation of ambient temperature is introduced, and has improved the measuring accuracy of laser interferometer.
Accompanying drawing explanation
Fig. 1 is the structural upright schematic diagram of the diagonal angle incident light laser heterodyne interference measurement mechanism based on right-angle prism
Fig. 2 is the diagonal angle incident light laser heterodyne interference measurement mechanism structural representation based on right-angle prism
Fig. 3 is the left view of Fig. 2
Piece number explanation in figure: 1 unpolarized Amici prism, 2 is f with reference to right-angle prism, 3 destination end right-angle prisms, 4 photodetector A, 5 photodetector B, 6 frequencies
1incident beam, 7 frequencies be f
2incident beam.
Embodiment
Below in conjunction with accompanying drawing, example of the present invention is described in detail.
A kind of diagonal angle incident light laser heterodyne interference measurement mechanism based on right-angle prism, this device comprises unpolarized Amici prism 1, with reference to right-angle prism 2, photodetector A4, photodetector B5, describedly with reference to right-angle prism 2, be positioned at unpolarized Amici prism 1 reflected light output terminal; Described unpolarized Amici prism 1 output two-way interferometric beams, photodetector A4 on a road measured interference light beam optical path therein, photodetector B5 on another road measured interference light beam optical path; This device also comprises destination end right-angle prism 3, and described destination end right-angle prism 3 is positioned at the transmitted light output terminal of unpolarized Amici prism 1.
A diagonal angle incident light laser heterodyne interference measuring method based on right-angle prism, the method is:
(1) frequency is respectively f
1, f
2and two bundle parallel beams of space separation incide unpolarized Amici prism;
(2) described two bundle directional lights incide the diagonal position that incidence point on unpolarized Amici prism is positioned at the plane of incidence, as shown in Figure 3;
(3) frequency is f
1light beam by unpolarized Amici prism, be divided into reference beam and measuring beam two parts, simultaneously frequency is f
2light beam also by unpolarized Amici prism, be divided into reference beam and measuring beam two parts;
(4) frequency is respectively f
1, f
2two bundle reference beams incide with reference to right-angle prism, and be reflected back toward unpolarized Amici prism; Frequency is respectively f simultaneously
1, f
2two bundle measuring beams incide destination end right-angle prism, and be reflected back toward unpolarized Amici prism;
(5) regulate with reference to right-angle prism and destination end right-angle prism, making frequency is f
1reference beam and frequency be f
2measuring beam overlap and produce interference signal I
m1; Making frequency is f
2reference beam and frequency be f
1measuring beam overlap and produce interference signal I
m2; According to two interference signal I
m1, I
m2calculate the displacement of destination end right-angle prism.
Claims (2)
1. the diagonal angle incident light laser heterodyne interference measuring method based on right-angle prism, the method is:
(1) frequency is respectively f
1, f
2and two bundle parallel beams of space separation incide unpolarized Amici prism;
It is characterized in that:
(2) described two bundle directional lights incide the diagonal position that incidence point on unpolarized Amici prism is positioned at the plane of incidence;
(3) frequency is f
1light beam by unpolarized Amici prism, be divided into reference beam and measuring beam two parts, simultaneously frequency is f
2light beam also by unpolarized Amici prism, be divided into reference beam and measuring beam two parts;
(4) frequency is respectively f
1, f
2two bundle reference beams incide with reference to right-angle prism, and be reflected back toward unpolarized Amici prism; Frequency is respectively f simultaneously
1, f
2two bundle measuring beams incide destination end right-angle prism, and be reflected back toward unpolarized Amici prism;
(5) regulate with reference to right-angle prism and destination end right-angle prism, making frequency is f
1reference beam and frequency be f
2measuring beam overlap and produce interference signal I
m1; Making frequency is f
2reference beam and frequency be f
1measuring beam overlap and produce interference signal I
m2; According to two interference signal I
m1, I
m2calculate the displacement of destination end right-angle prism.
2. the diagonal angle incident light laser heterodyne interference measurement mechanism based on right-angle prism, this device comprises unpolarized Amici prism (1), with reference to right-angle prism (2), photodetector A (4), photodetector B (5), describedly with reference to right-angle prism (2), be positioned at unpolarized Amici prism (1) reflected light output terminal; Described unpolarized Amici prism (1) output two-way interferometric beams, photodetector A (4) on a road measured interference light beam optical path therein, photodetector B (5) on another road measured interference light beam optical path; It is characterized in that this device also comprises destination end right-angle prism (3), described destination end right-angle prism (3) is positioned at the transmitted light output terminal of unpolarized Amici prism (1).
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|---|---|---|---|
| CN201310745960.6A CN103743336B (en) | 2013-12-23 | 2013-12-23 | Based on diagonal angle incident light laser heterodyne interference measurement method and the device of right-angle prism |
| PCT/CN2014/072819 WO2015096279A1 (en) | 2013-12-23 | 2014-03-03 | High resolution heterodyne interferometric method and system |
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| CN201310745960.6A CN103743336B (en) | 2013-12-23 | 2013-12-23 | Based on diagonal angle incident light laser heterodyne interference measurement method and the device of right-angle prism |
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| CN103743336B CN103743336B (en) | 2016-04-06 |
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| CN104316158A (en) * | 2014-10-21 | 2015-01-28 | 四川大学 | Heterodyne interferometer vibration measurer based on laser doppler effect |
| CN104697443A (en) * | 2015-03-30 | 2015-06-10 | 北方民族大学 | Motion-compensated cascade stepped reflection mirror laser interferometer and measurement method |
| CN106352985A (en) * | 2016-09-30 | 2017-01-25 | 中国科学院光电技术研究所 | Asymmetric spatial heterodyne spectrometer structure |
| WO2019210734A1 (en) * | 2018-05-02 | 2019-11-07 | 中国计量科学研究院 | Laser heterodyne interference measuring device and method based on plane mirror reflection |
| CN111061064A (en) * | 2019-12-30 | 2020-04-24 | 浙江大学 | Double-beam optical trap beam auxiliary alignment device and method |
| CN111442715A (en) * | 2020-03-02 | 2020-07-24 | 哈尔滨工业大学 | Heterodyne laser interferometer based on integral secondary light splitting component |
| CN117553676A (en) * | 2023-11-17 | 2024-02-13 | 哈尔滨工业大学 | Heterodyne interferometer based on multi-target opposite displacement measurement and measurement method |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104316158A (en) * | 2014-10-21 | 2015-01-28 | 四川大学 | Heterodyne interferometer vibration measurer based on laser doppler effect |
| CN104697443A (en) * | 2015-03-30 | 2015-06-10 | 北方民族大学 | Motion-compensated cascade stepped reflection mirror laser interferometer and measurement method |
| CN104697443B (en) * | 2015-03-30 | 2017-07-28 | 北方民族大学 | A kind of stepped corner reflector laser interferometer of motion compensation formula cascade and measuring method |
| CN106352985A (en) * | 2016-09-30 | 2017-01-25 | 中国科学院光电技术研究所 | Asymmetric spatial heterodyne spectrometer structure |
| WO2019210734A1 (en) * | 2018-05-02 | 2019-11-07 | 中国计量科学研究院 | Laser heterodyne interference measuring device and method based on plane mirror reflection |
| US10907950B1 (en) | 2018-05-02 | 2021-02-02 | National Institute Of Metrology | Laser heterodyne interferometric apparatus and method based on plane mirror reflection |
| CN111061064A (en) * | 2019-12-30 | 2020-04-24 | 浙江大学 | Double-beam optical trap beam auxiliary alignment device and method |
| CN111442715A (en) * | 2020-03-02 | 2020-07-24 | 哈尔滨工业大学 | Heterodyne laser interferometer based on integral secondary light splitting component |
| CN111442715B (en) * | 2020-03-02 | 2021-09-07 | 哈尔滨工业大学 | Heterodyne laser interferometer based on integral secondary light splitting component |
| CN117553676A (en) * | 2023-11-17 | 2024-02-13 | 哈尔滨工业大学 | Heterodyne interferometer based on multi-target opposite displacement measurement and measurement method |
| CN117553676B (en) * | 2023-11-17 | 2024-05-14 | 哈尔滨工业大学 | Heterodyne interferometer based on multi-target opposite displacement measurement and measurement method |
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