CN103691350A - Stirring device for silicon wafer grinding liquid - Google Patents
Stirring device for silicon wafer grinding liquid Download PDFInfo
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- CN103691350A CN103691350A CN201310751641.6A CN201310751641A CN103691350A CN 103691350 A CN103691350 A CN 103691350A CN 201310751641 A CN201310751641 A CN 201310751641A CN 103691350 A CN103691350 A CN 103691350A
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- stirring
- agitator
- shaft
- liquid
- transfer
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Abstract
The invention relates to a novel stirring device for a silicon wafer grinding liquid. The stirring device comprises stirring blades, a stirring shaft, a stirring bucket, a timing device, a steering device and a motor. As the stirring device is provided with the timing device and the steering device, the stirring time and the stirring direction can be controlled to enable the stirring to be more uniform, so that the quality of the grinding liquid is improved. A filter plate and a liquid storage tank are arranged at the lower part of the stirring bucket, and the liquid storage tank is arranged at the lower part of the filter plate; a liquid outlet is formed in the bottom of the stirring bucket; the filter plate is used for filtering large particles remained by nonuniform stirring; the liquid storage tank is used for enabling the fully stirred grinding liquid to flow to the liquid outlet so as to obtain high-quality grinding liquid.
Description
Technical field
The present invention relates to a kind of agitating device, be specifically related to a kind of agitating device of grinding fluid for silicon chip.
Background technology
In silicon chip working process, in order to guarantee the designing requirement of silicon chip, require silicon chip to grind.Now process needed lapping liquid, general employing by hand stirred.The method makes inefficiency, and stirs inhomogeneous.And while stirring, adopt unidirectional stirring, make to stir thorough not.
Summary of the invention
Technical problem to be solved by this invention is that a kind of agitating device of grinding fluid for silicon chip is provided for above drawback, and this apparatus structure is simple, stirs, and has improved the quality of lapping liquid.
For solving the problems of the technologies described above, technical scheme of the present invention is:
A kind of agitating device of Novel silicon slice lapping liquid comprises paddle, shaft, agitator, timing means, transfer, motor, in wherein said agitator, be provided with shaft, described shaft is provided with two paddles, described top is provided with transfer, and timing means is arranged at transfer top, and timing means top is provided with motor.The rotating shaft of described motor one end by timing means and transfer is connected and is arranged at the top of agitator; Described shaft is vertically set on the middle part of agitator, and described paddle is vertically fixed on the lower end of shaft, and described paddle is spiral paddle.
The agitating device of above-mentioned a kind of Novel silicon slice lapping liquid, wherein said agitator bottom is provided with filter, reservoir, described reservoir is positioned at the bottom of filter; Described agitator bottom is provided with liquid outlet.Described filter is used for filtering and does not fully stir left large particle; Described reservoir, the lapping liquid that is used for allowing stirring fully complete flows to liquid outlet.
During work, press the timer in timing means, set mixing time; When being stirred to after a period of time clockwise, then transfer is set, just can stirs a period of time counterclockwise.Two-way stirring can, so that stir more evenly, and then improve the quality of lapping liquid like this.
Beneficial effect of the present invention: because described agitating device is provided with timing means and transfer, thereby can control mixing time and mixing direction, thereby can so that stir more even, thereby improved the quality of lapping liquid.Described agitator bottom is provided with filter, reservoir, and described reservoir is positioned at the bottom of filter; Described agitator bottom is provided with liquid outlet.Described filter is used for filtering and does not fully stir left large particle; Described reservoir, the lapping liquid that is used for allowing stirring fully complete flows to liquid outlet, thereby obtains high-quality lapping liquid
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention
The specific embodiment
A kind of agitating device of Novel silicon slice lapping liquid comprises paddle 1, shaft 2, agitator 3, timing means 4 as shown in the figure, transfer 5, motor 6, in wherein said agitator 3, be provided with shaft 2, described shaft is provided with two paddles 1, described top is provided with transfer 5, and timing means 4 is arranged at transfer 5 tops, and timing means 4 tops are provided with motor 6.The rotating shaft of described motor 6 one end by timing means 4 and transfer 5 is connected and is arranged at the top of agitator 3; Described shaft 2 is vertically set on the middle part of agitator 3, and described paddle 1 is vertically fixed on the lower end of shaft 2, and described paddle 1 is spirality paddle 1.
Described agitator 3 bottoms are provided with filter 6, reservoir 7, and described reservoir 7 is positioned at the bottom of filter; Described agitator 3 bottoms are provided with liquid outlet 8.Described filter 6 is used for filtering and does not fully stir left large particle; Described reservoir 7, the lapping liquid that is used for allowing stirring fully complete flows to liquid outlet 8.
During work, can set mixing time and mixing direction by timing means 4 and transfer 5, after stirring moved in the direction of the clock after a period of time, and transfer is set, just can stir a period of time counterclockwise.Two-way stirring can, so that stir more evenly, and then improve the quality of lapping liquid like this.Described agitator 3 bottoms are provided with filter 6, reservoir 7, and described reservoir 7 is positioned at the bottom of filter; Described agitator 3 bottoms are provided with liquid outlet 8.Thereby obtain high-quality lapping liquid.
Here description of the invention and application is illustrative, not wants that therefore, the present invention is not subject to the restriction of the present embodiment by scope restriction of the present invention in the above-described embodiments, and the technical scheme that any employing equivalence replacement obtains is all in the scope of protection of the invention.
Claims (2)
1. the agitating device of a Novel silicon slice lapping liquid comprises paddle, shaft, agitator, timing means, transfer, motor, in wherein said agitator, be provided with shaft, described shaft is provided with two paddles, described top is provided with transfer, and timing means is arranged at transfer top, and timing means top is provided with motor; The rotating shaft of described motor one end by timing means and transfer is connected and is arranged at the top of agitator; Described shaft is vertically set on the middle part of agitator, and described paddle is vertically fixed on the lower end of shaft, and described paddle is spiral paddle.
2. the agitating device of a kind of Novel silicon slice lapping liquid as claimed in claim 1 is characterized in that described agitator bottom is provided with filter, reservoir, and described reservoir is positioned at the bottom of filter; Described agitator bottom is provided with liquid outlet; Described filter is used for filtering and does not fully stir left large particle; Described reservoir, the lapping liquid that is used for allowing stirring fully complete flows to liquid outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310751641.6A CN103691350A (en) | 2013-12-31 | 2013-12-31 | Stirring device for silicon wafer grinding liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310751641.6A CN103691350A (en) | 2013-12-31 | 2013-12-31 | Stirring device for silicon wafer grinding liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103691350A true CN103691350A (en) | 2014-04-02 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310751641.6A Pending CN103691350A (en) | 2013-12-31 | 2013-12-31 | Stirring device for silicon wafer grinding liquid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103691350A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106000178A (en) * | 2016-06-15 | 2016-10-12 | 安徽扬子化工有限公司 | Liquid filtering and treating device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201182981Y (en) * | 2008-03-19 | 2009-01-21 | 华中农业大学 | Turning cavity type uniaxle paddle batch type mixer |
| CN101352671A (en) * | 2008-09-10 | 2009-01-28 | 中南大学 | Reaction and solid-liquid separation integrated device |
| WO2011025725A1 (en) * | 2009-08-31 | 2011-03-03 | Dow Global Technologies Inc. | Mixing device and dynamic mixing method |
| CN203285691U (en) * | 2013-05-11 | 2013-11-13 | 安徽繁华建材有限公司 | Conveying and stirring integrated machine |
| CN203816550U (en) * | 2013-12-31 | 2014-09-10 | 镇江市港南电子有限公司 | Stirring device of silicon slice grinding fluid |
-
2013
- 2013-12-31 CN CN201310751641.6A patent/CN103691350A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201182981Y (en) * | 2008-03-19 | 2009-01-21 | 华中农业大学 | Turning cavity type uniaxle paddle batch type mixer |
| CN101352671A (en) * | 2008-09-10 | 2009-01-28 | 中南大学 | Reaction and solid-liquid separation integrated device |
| WO2011025725A1 (en) * | 2009-08-31 | 2011-03-03 | Dow Global Technologies Inc. | Mixing device and dynamic mixing method |
| CN203285691U (en) * | 2013-05-11 | 2013-11-13 | 安徽繁华建材有限公司 | Conveying and stirring integrated machine |
| CN203816550U (en) * | 2013-12-31 | 2014-09-10 | 镇江市港南电子有限公司 | Stirring device of silicon slice grinding fluid |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106000178A (en) * | 2016-06-15 | 2016-10-12 | 安徽扬子化工有限公司 | Liquid filtering and treating device |
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Application publication date: 20140402 |