CN103592466A - Automatic lot sizing static rolling testing device for MEMS acceleration sensor - Google Patents
Automatic lot sizing static rolling testing device for MEMS acceleration sensor Download PDFInfo
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Abstract
The invention relates to the technology of the calibration and the correction of MEMS acceleration sensors, in particular to an automatic lot sizing static rolling testing device for an MEMS acceleration sensor. The automatic lot sizing static rolling testing device for the MEMS acceleration sensor solves the problems that an existing static rolling testing device for the MEMS acceleration sensor is much in consumed time for the calibration and the correction and low in calibration and correction efficiency and is limited in calibration and correction capacity. The automatic lot sizing static rolling testing device for the MEMS acceleration sensor comprises an automatic loading platform, a feedback type automatic rolling platform, a control system and a data collecting system. The automatic loading platform comprises a vertical loading platform, a horizontal loading platform and a trough-type base. The vertical loading platform comprises a left vertical motor, a left vertical lead screw pair, left vertical guide rail pairs, a left L-type base plate, a right vertical motor, a right vertical lead screw pair, right vertical guide rail pairs and a right L-type base plate. The feedback type automatic rolling platform comprises semi-closed trough-type platform decks and inclined angle sensors. The automatic lot sizing static rolling testing device for the MEMS acceleration sensor is suitable for the calibration and the correction of the MEMS acceleration sensors.
Description
Technical field
The present invention relates to the demarcation collimation technique of MEMS acceleration transducer, specifically the static tumbling test device of a kind of automatic batch MEMS acceleration transducer.
Background technology
MEMS acceleration transducer has the series of advantages such as volume is little, lightweight, cost is low, good reliability, low in energy consumption, measurement range is large because of it, and is widely used in the fields such as automotive electronics, radio communication, biomedicine, Aero-Space, industry, agricultural.No matter MEMS acceleration transducer afterwards or before using, all needs to carry out the demarcation calibration of performance parameter, to guarantee MEMS acceleration transducer precision in actual applications in development.According to different demarcation alignment requirementses, MEMS acceleration transducer will carry out mechanical test, environmental test and long stability and replica test conventionally.Wherein, mechanical test is divided into again statics test and dynamic test.Statics test is divided into again the static tumbling test of gravity field, centrifugal test etc.The static tumbling test of gravity field refers to: using acceleration of gravity at the component of MEMS acceleration transducer input shaft as input quantity, and by the multiple spot rolling program or the acceleration increment linear program that utilize equal angles to cut apart, demarcate the test of every static properties parameter of calibration MEMS acceleration transducer.Under prior art condition, the static tumbling test of the gravity field of MEMS acceleration transducer is mainly realized by various static demarcating testing apparatuss such as optical dividing head, hydro-extractor, precise rotating platforms.Practice shows, various static demarcating testing apparatuss are limit because of himself structure above, there are the following problems: one, when carrying out the static tumbling test of gravity field, existing MEMS acceleration transducer static demarcating testing apparatus is that MEMS acceleration transducer is installed on and on weighted platform, carries out static test.If need to carry out dynamic test, also need manually MEMS acceleration transducer and weighted platform to be carried out separated, cause thus complex operation, thus cause demarcating calibration consuming time many, demarcation calibration efficiency is low.They are two years old, when carrying out the static tumbling test of gravity field, existing MEMS acceleration transducer static demarcating testing apparatus can only carry out manually demarcating calibration to single-piece MEMS acceleration transducer, and cannot carry out automatic Calibration calibration to batch MEMS acceleration transducer, cause equally thus demarcating calibration consuming time many, demarcation calibration efficiency is low.They are three years old, because the volume of existing MEMS acceleration transducer static demarcating testing apparatus is larger, cause it to MEMS acceleration transducer, to demarcate calibration at normal temperatures, and cannot under the variable environment of humiture, to MEMS acceleration transducer, demarcate calibration, thereby it is limited to cause demarcating rated capacity.Based on this, be necessary to invent a kind of brand-new MEMS acceleration transducer static demarcating testing apparatus, with solve existing MEMS acceleration transducer static demarcating testing apparatus demarcate calibration consuming time many, demarcate the low and limited problem of demarcation rated capacity of calibration efficiency.
Summary of the invention
The present invention for solve existing MEMS acceleration transducer static demarcating testing apparatus demarcate calibration consuming time many, to demarcate calibration efficiency low and demarcate the limited problem of rated capacity, and a kind of automatic batch MEMS acceleration transducer static state tumbling test device is provided.
The present invention adopts following technical scheme to realize: the static tumbling test device of automatic batch MEMS acceleration transducer, comprises automatic weighted platform, reaction type automatic turning rolling platform, control system, data acquisition system (DAS); Described automatic weighted platform comprises vertical weighted platform, horizontal weighted platform, grooved base; Described vertical weighted platform comprises left vertically motor, left vertical lead screw pair, left upright guide rail pair, left L-type base plate, right vertically motor, right vertically lead screw pair, right upright guide rail pair, right L-type base plate; Described horizontal weighted platform comprises left horizontal motor, left horizontal screw lead pair, left horizontal guide rail pair, left web member, stepper motor, left bearing pin, right horizontal motor, right horizontal screw lead pair, right horizontal guide rail pair, right web member, right bearing pin; Described reaction type automatic turning rolling platform comprises semiclosed grooved microscope carrier, obliquity sensor; Described control system comprises PLC, computing machine; Described data acquisition system (DAS) comprises data collecting card; Wherein, the left vertically support of motor is fixed on the left side internal groove side wall of grooved base; The leading screw upper end of left vertically lead screw pair is connected with the left vertically output shaft of motor; The guide rail of left upright guide rail pair is vertically fixed on the left side internal groove side wall of grooved base; The vertical plate lateral wall of left L-type base plate is fixed with the nut outer right wall of the vertical lead screw pair in a left side and the slide block right side wall of left upright guide rail pair respectively; The right vertically support of motor is fixed on the right side internal groove side wall of grooved base; The leading screw upper end of right vertically lead screw pair is connected with the right vertically output shaft of motor; The guide rail of right upright guide rail pair is vertically fixed on the right side internal groove side wall of grooved base; The vertical plate lateral wall of right L-type base plate is fixed with the nut left side outer wall of the vertical lead screw pair in the right side and the slide block left side wall of right upright guide rail pair respectively; The support of left horizontal motor is fixed on the vertical plate madial wall of left L-type base plate; The leading screw left end of left horizontal screw lead pair is connected with the output shaft of left horizontal motor; The guide rail level of left horizontal guide rail pair is fixed on the leveling board madial wall of left L-type base plate; The slide block upper side wall of the lower wall of left web member and left horizontal guide rail pair is fixed; On left web member, level connects and offers left connecting hole and motor mounting hole; The nut socket of left horizontal screw lead pair is fixed in left connecting hole; The support of stepper motor is fixed by socket in motor mounting hole; The left end of left bearing pin is connected with the output shaft of stepper motor; The support of right horizontal motor is fixed on the vertical plate madial wall of right L-type base plate; The leading screw right-hand member of right horizontal screw lead pair is connected with the output shaft of right horizontal motor; The guide rail level of right horizontal guide rail pair is fixed on the leveling board madial wall of right L-type base plate; The slide block upper side wall of the lower wall of right web member and right horizontal guide rail pair is fixed; On right web member, level connects and offers right connecting hole; The nut lateral wall of right horizontal screw lead pair is fixed by socket in right connecting hole; The right side of right bearing pin and the left side wall of right web member are fixed; The left side cell wall of semiclosed grooved microscope carrier connects and offers left pin-and-hole; Left pin-and-hole and left bearing pin position over against; The right side cell wall of semiclosed grooved microscope carrier connects and offers right pin-and-hole; Right pin-and-hole and right bearing pin position over against; Obliquity sensor is fixed on the inner side end wall of semiclosed grooved microscope carrier; The signal output part of PLC is connected with the signal input part of the vertical motor in a left side, the right vertically signal input part of motor, the signal input part of the signal input part of left horizontal motor, stepper motor, the signal input part of right horizontal motor respectively; The signal output part of computing machine is connected with the signal input part of PLC; The signal input part of data collecting card is connected with the signal output part of obliquity sensor; The signal output part of data collecting card is connected with the signal input part of computing machine.
During work, MEMS acceleration transducer is fixed in batches to the internal groove bottom of semiclosed grooved microscope carrier, the signal input part of data collecting card is connected with the signal output part of MEMS acceleration transducer.Specific works process is as follows: first, computing machine sends demarcation calibration command to PLC, according to demarcating, calibration command is controlled left horizontal motor to PLC and right horizontal motor starts simultaneously, left horizontal motor drives left web member to move right along left horizontal guide rail pair by left horizontal screw lead is secondary, left web member drives stepper motor and left bearing pin to move right, right horizontal motor drives right web member to be moved to the left along right horizontal guide rail pair by right horizontal screw lead is secondary simultaneously, and right web member drives right bearing pin to be moved to the left.In left bearing pin inserts left pin-and-hole to the right, right bearing pin is while inserting in right pin-and-hole left, PLC controls left horizontal motor and right horizontal motor stops simultaneously.Then, PLC controls left vertically motor and right vertically motor starts simultaneously, left vertically motor drives left L-type base plate to move up along left upright guide rail pair by the vertical lead screw pair in a left side, left L-type base plate drives semiclosed grooved microscope carrier to move up by left bearing pin, right vertically motor drives right L-type base plate to move up along right upright guide rail pair by the vertical lead screw pair in the right side simultaneously, and right L-type base plate drives semiclosed grooved microscope carrier to move up by right bearing pin.When semiclosed grooved microscope carrier is moved upward to certain altitude, PLC controls left vertically motor and right vertically motor stops simultaneously.Subsequently, PLC control step electric motor starting, stepper motor drives semiclosed grooved microscope carrier to carry out free to tumble by left bearing pin, and semiclosed grooved microscope carrier drives MEMS acceleration transducer to carry out free to tumble, and right bearing pin carries out radially spacing to semienclosed slot type microscope carrier simultaneously.Meanwhile, the measured data of data collecting card Real-time Collection MEMS acceleration transducer in rolling process, and the measured data collecting is sent to computing machine in real time.Finally, computing machine is demarcated calibration according to measured data to every static properties parameter of MEMS acceleration transducer (comprise static sensitivity, zero partially, constant multiplier, nonlinearity etc.), completes thus the gravity field static state tumbling test of MEMS acceleration transducer.After the static tumbling test of gravity field completes, the measured data of data collecting card Real-time Collection obliquity sensor, and the measured data collecting is processed and steering order is sent to PLC in real time.PLC is according to steering order control step electric machine rotation, and stepper motor drives semiclosed grooved microscope carrier to roll by left bearing pin.Until semiclosed grooved microscope carrier, roll to initial position, PLC control step motor stops, and finishes thus the static tumbling test of gravity field of MEMS acceleration transducer.
Based on said process, compare with existing MEMS acceleration transducer static demarcating testing apparatus, the static tumbling test device of automatic batch MEMS acceleration transducer of the present invention tool has the following advantages: one, when carrying out the static tumbling test of gravity field, if need to carry out dynamic test to MEMS acceleration transducer, the static tumbling test device of automatic batch MEMS acceleration transducer of the present invention can carry out separated by rolling platform with weighted platform automatically, and without manually MEMS acceleration transducer being carried out separated with weighted platform, effectively simplified thus operation, thereby it is consuming time effectively to have reduced demarcation calibration, effectively improved demarcation calibration efficiency.They are two years old, when carrying out the static tumbling test of gravity field, the static tumbling test device of automatic batch MEMS acceleration transducer of the present invention can carry out automatic Calibration calibration to batch MEMS acceleration transducer, has equally effectively reduced thus and has demarcated consuming time, the effective demarcation calibration efficiency that improved of calibration.They are three years old, the small volume of the static tumbling test device of automatic batch MEMS acceleration transducer of the present invention, therefore it not only can demarcate calibration to MEMS acceleration transducer at normal temperatures, and can under the variable environment of humiture, to MEMS acceleration transducer, demarcate calibration, thereby effectively improved demarcation rated capacity.In sum, the static tumbling test device of automatic batch MEMS acceleration transducer of the present invention is by adopting brand new, efficiently solve existing MEMS acceleration transducer static demarcating testing apparatus demarcate calibration consuming time many, demarcate the low and limited problem of demarcation rated capacity of calibration efficiency.
The present invention is rational in infrastructure, it is ingenious to design, efficiently solve existing MEMS acceleration transducer static demarcating testing apparatus demarcate calibration consuming time many, to demarcate calibration efficiency low and demarcate the limited problem of rated capacity, the demarcation that is applicable to MEMS acceleration transducer is calibrated.
Accompanying drawing explanation
Fig. 1 is the structural representation of automatic weighted platform of the present invention and reaction type automatic turning rolling platform.
Fig. 2 is the structural representation of reaction type automatic turning rolling platform of the present invention.
Fig. 3 is the structural representation of control system of the present invention and data acquisition system (DAS).
In figure: 1-grooved base, the left vertically motor of 2-, the left vertically lead screw pair of 3-, the left upright guide rail of 4-is secondary, the left L-type base plate of 5-, the right vertically motor of 6-, the right vertically lead screw pair of 7-, the right upright guide rail of 8-is secondary, the right L-type base plate of 9-, the left horizontal motor of 10-, the left horizontal screw lead of 11-is secondary, the left horizontal guide rail of 12-is secondary, the left web member of 13-, 14-stepper motor, the left bearing pin of 15-, the right horizontal motor of 16-, the right horizontal screw lead of 17-is secondary, the right horizontal guide rail of 18-is secondary, the right web member of 19-, the right bearing pin of 20-, the semiclosed grooved microscope carrier of 21-, 22-obliquity sensor, 23-PLC, 24-computing machine, 25-data collecting card, 26-MEMS acceleration transducer, 27-display, 28-printer.
Embodiment
The static tumbling test device of automatic batch MEMS acceleration transducer, comprises automatic weighted platform, reaction type automatic turning rolling platform, control system, data acquisition system (DAS);
Described automatic weighted platform comprises vertical weighted platform, horizontal weighted platform, grooved base 1;
Described vertical weighted platform comprises left vertically motor 2, left vertically lead screw pair 3, left upright guide rail pair 4, left L-type base plate 5, right vertically motor 6, right vertically lead screw pair 7, right upright guide rail pair 8, right L-type base plate 9;
Described horizontal weighted platform comprises left horizontal motor 10, left horizontal screw lead pair 11, left horizontal guide rail pair 12, left web member 13, stepper motor 14, left bearing pin 15, right horizontal motor 16, right horizontal screw lead pair 17, right horizontal guide rail pair 18, right web member 19, right bearing pin 20;
Described reaction type automatic turning rolling platform comprises semiclosed grooved microscope carrier 21, obliquity sensor 22;
Described control system comprises PLC23, computing machine 24;
Described data acquisition system (DAS) comprises data collecting card 25;
Wherein, the left vertically support of motor 2 is fixed on the left side internal groove side wall of grooved base 1; The leading screw upper end of left vertically lead screw pair 3 is connected with the left vertically output shaft of motor 2; The guide rail of left upright guide rail pair 4 is vertically fixed on the left side internal groove side wall of grooved base 1; The vertical plate lateral wall of left L-type base plate 5 is fixed with the nut outer right wall of the vertical lead screw pair 3 in a left side and the slide block right side wall of left upright guide rail pair 4 respectively; The right vertically support of motor 6 is fixed on the right side internal groove side wall of grooved base 1; The leading screw upper end of right vertically lead screw pair 7 is connected with the right vertically output shaft of motor 6; The guide rail of right upright guide rail pair 8 is vertically fixed on the right side internal groove side wall of grooved base 1; The vertical plate lateral wall of right L-type base plate 9 is fixed with the nut left side outer wall of the vertical lead screw pair 7 in the right side and the slide block left side wall of right upright guide rail pair 8 respectively;
The support of left horizontal motor 10 is fixed on the vertical plate madial wall of left L-type base plate 5; The leading screw left end of left horizontal screw lead pair 11 is connected with the output shaft of left horizontal motor 10; The guide rail level of left horizontal guide rail pair 12 is fixed on the leveling board madial wall of left L-type base plate 5; The slide block upper side wall of the lower wall of left web member 13 and left horizontal guide rail pair 12 is fixed; On left web member 13, level connects and offers left connecting hole and motor mounting hole; The nut socket of left horizontal screw lead pair 11 is fixed in left connecting hole; The support of stepper motor 14 is fixed by socket in motor mounting hole; The left end of left bearing pin 15 is connected with the output shaft of stepper motor 14; The support of right horizontal motor 16 is fixed on the vertical plate madial wall of right L-type base plate 9; The leading screw right-hand member of right horizontal screw lead pair 17 is connected with the output shaft of right horizontal motor 16; The guide rail level of right horizontal guide rail pair 18 is fixed on the leveling board madial wall of right L-type base plate 9; The slide block upper side wall of the lower wall of right web member 19 and right horizontal guide rail pair 18 is fixed; On right web member 19, level connects and offers right connecting hole; The nut lateral wall of right horizontal screw lead pair 17 is fixed by socket in right connecting hole; The left side wall of the right side of right bearing pin 20 and right web member 19 is fixed;
The left side cell wall of semiclosed grooved microscope carrier 21 connects and offers left pin-and-hole; Left pin-and-hole and left bearing pin 15 positions over against; The right side cell wall of semiclosed grooved microscope carrier 21 connects and offers right pin-and-hole; Right pin-and-hole and right bearing pin 20 positions over against; Obliquity sensor 22 is fixed on the inner side end wall of semiclosed grooved microscope carrier 21;
The signal output part of PLC23 is connected with the signal input part of the vertical motor 2 in a left side, the right vertically signal input part of motor 6, the signal input part of the signal input part of left horizontal motor 10, stepper motor 14, the signal input part of right horizontal motor 16 respectively; The signal output part of computing machine 24 is connected with the signal input part of PLC23;
The signal input part of data collecting card 25 is connected with the signal output part of obliquity sensor 22; The signal output part of data collecting card 25 is connected with the signal input part of computing machine 24.
The number of the number of the number of the number of the number of the number of the number of the number of described left upright guide rail pair 4, right upright guide rail pair 8, left horizontal guide rail pair 12, stepper motor 14, left bearing pin 15, right horizontal guide rail pair 18, right bearing pin 20, semiclosed grooved microscope carrier 21 is two; The position of the position of the position of the position of the position of the position of the position of the position of described two left upright guide rail pairs 4, two right upright guide rail pairs 8, two left horizontal guide rail pairs 12, two stepper motors 14, two left bearing pins 15, two right horizontal guide rail pairs 18, two right bearing pins 20, two semiclosed grooved microscope carriers 21 is symmetrical mutually.
Described left bearing pin 15 is square bearing pin; Described left pin-and-hole is square pin-and-hole; Described right bearing pin 20 is circular bearing pin; Described right pin-and-hole is circular pin hole.During work, between square bearing pin and square pin-and-hole, can achieve a butt joint more easily, circular bearing pin and circular pin hole can play radially spacing effect better.
During concrete enforcement, the vertical lead screw pair 3 in a described left side, left upright guide rail pair 4, right vertically lead screw pair 7, right upright guide rail pair 8, left horizontal screw lead pair 11, left horizontal guide rail pair 12, right horizontal screw lead pair 17, the secondary 18 available hydraulic supports of right horizontal guide rail substitute.Described obliquity sensor 22 adopts high-precision tilt angle sensor.Described data collecting card 25 adopts high-precision multi-path data collecting card.The signal output part of described computing machine 24 is connected with display 27 and printer 28.
Claims (3)
1. the static tumbling test device of automatic batch MEMS acceleration transducer, is characterized in that: comprise automatic weighted platform, reaction type automatic turning rolling platform, control system, data acquisition system (DAS);
Described automatic weighted platform comprises vertical weighted platform, horizontal weighted platform, grooved base (1);
Described vertical weighted platform comprises left vertically motor (2), left vertically lead screw pair (3), left upright guide rail secondary (4), left L-type base plate (5), right vertically motor (6), right vertically lead screw pair (7), right upright guide rail secondary (8), right L-type base plate (9);
Described horizontal weighted platform comprises left horizontal motor (10), left horizontal screw lead secondary (11), left horizontal guide rail secondary (12), left web member (13), stepper motor (14), left bearing pin (15), right horizontal motor (16), right horizontal screw lead secondary (17), right horizontal guide rail secondary (18), right web member (19), right bearing pin (20);
Described reaction type automatic turning rolling platform comprises semiclosed grooved microscope carrier (21), obliquity sensor (22);
Described control system comprises PLC(23), computing machine (24);
Described data acquisition system (DAS) comprises data collecting card (25);
Wherein, the left vertically support of motor (2) is fixed on the left side internal groove side wall of grooved base (1); The leading screw upper end of left vertically lead screw pair (3) is connected with the left vertically output shaft of motor (2); The guide rail of left upright guide rail secondary (4) is vertically fixed on the left side internal groove side wall of grooved base (1); The vertical plate lateral wall of left L-type base plate (5) is fixed with the nut outer right wall of the vertical lead screw pair in a left side (3) and the slide block right side wall of left upright guide rail secondary (4) respectively; The right vertically support of motor (6) is fixed on the right side internal groove side wall of grooved base (1); The leading screw upper end of right vertically lead screw pair (7) is connected with the right vertically output shaft of motor (6); The guide rail of right upright guide rail secondary (8) is vertically fixed on the right side internal groove side wall of grooved base (1); The vertical plate lateral wall of right L-type base plate (9) is fixed with the nut left side outer wall of the vertical lead screw pair in the right side (7) and the slide block left side wall of right upright guide rail secondary (8) respectively;
The support of left horizontal motor (10) is fixed on the vertical plate madial wall of left L-type base plate (5); The leading screw left end of left horizontal screw lead secondary (11) is connected with the output shaft of left horizontal motor (10); The guide rail level of left horizontal guide rail secondary (12) is fixed on the leveling board madial wall of left L-type base plate (5); The slide block upper side wall of the lower wall of left web member (13) and left horizontal guide rail secondary (12) is fixed; The upper level of left web member (13) connects and offers left connecting hole and motor mounting hole; The nut socket of left horizontal screw lead secondary (11) is fixed in left connecting hole; The support of stepper motor (14) is fixed by socket in motor mounting hole; The left end of left bearing pin (15) is connected with the output shaft of stepper motor (14); The support of right horizontal motor (16) is fixed on the vertical plate madial wall of right L-type base plate (9); The leading screw right-hand member of right horizontal screw lead secondary (17) is connected with the output shaft of right horizontal motor (16); The guide rail level of right horizontal guide rail secondary (18) is fixed on the leveling board madial wall of right L-type base plate (9); The slide block upper side wall of the lower wall of right web member (19) and right horizontal guide rail secondary (18) is fixed; The upper level of right web member (19) connects and offers right connecting hole; The nut lateral wall of right horizontal screw lead secondary (17) is fixed by socket in right connecting hole; The left side wall of the right side of right bearing pin (20) and right web member (19) is fixed;
The left side cell wall of semiclosed grooved microscope carrier (21) connects and offers left pin-and-hole; Left pin-and-hole and left bearing pin (15) position over against; The right side cell wall of semiclosed grooved microscope carrier (21) connects and offers right pin-and-hole; Right pin-and-hole and right bearing pin (20) position over against; Obliquity sensor (22) is fixed on the inner side end wall of semiclosed grooved microscope carrier (21);
PLC(23) signal output part is connected with the signal input part of the vertical motor in a left side (2), the right vertically signal input part of motor (6), the signal input part of the signal input part of left horizontal motor (10), stepper motor (14), the signal input part of right horizontal motor (16) respectively; The signal output part and PLC(23 of computing machine (24)) signal input part be connected;
The signal input part of data collecting card (25) is connected with the signal output part of obliquity sensor (22); The signal output part of data collecting card (25) is connected with the signal input part of computing machine (24).
2. the static tumbling test device of automatic batch MEMS acceleration transducer according to claim 1, is characterized in that: the number of described left upright guide rail secondary (4), the number of right upright guide rail secondary (8), the number of left horizontal guide rail secondary (12), the number of stepper motor (14), the number of left bearing pin (15), the secondary number of (18) of right horizontal guide rail are, the number of the number of right bearing pin (20), semiclosed grooved microscope carrier (21) is two; The position of the position of described two left upright guide rails secondary (4), two right upright guide rails secondary (8), two secondary positions of (12) of left horizontal guide rail, the position of the position of two stepper motors (14), two left bearing pins (15), two secondary positions of (18) of right horizontal guide rail are, the position of the position of two right bearing pins (20), two semiclosed grooved microscope carriers (21) is symmetrical mutually.
3. the static tumbling test device of automatic batch MEMS acceleration transducer according to claim 1, is characterized in that: described left bearing pin (15) is square bearing pin; Described left pin-and-hole is square pin-and-hole; Described right bearing pin (20) is circular bearing pin; Described right pin-and-hole is circular pin hole.
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| CN201310637072.2A CN103592466B (en) | 2013-12-03 | 2013-12-03 | Automatic lot sizing static rolling testing device for MEMS acceleration sensor |
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| CN201310637072.2A CN103592466B (en) | 2013-12-03 | 2013-12-03 | Automatic lot sizing static rolling testing device for MEMS acceleration sensor |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104440696A (en) * | 2014-12-10 | 2015-03-25 | 苏州中盛纳米科技有限公司 | Automatic locking device for batched MEMS (micro-electro-mechanical systems) acceleration sensors |
| CN104501837A (en) * | 2015-01-15 | 2015-04-08 | 大连楼兰科技股份有限公司 | Vehicle-mounted OBD (On Board Diagnostic) device internally arranged inertia assembly parallel calibration and detection method and system thereof |
| CN104535798A (en) * | 2014-12-29 | 2015-04-22 | 苏州中盛纳米科技有限公司 | Acceleration sensor batch rolling platform control system and method |
| CN105203799A (en) * | 2015-09-11 | 2015-12-30 | 中国电子科技集团公司第四十九研究所 | Acceleration three-axis thermal-sensitivity testing device |
| CN106052741A (en) * | 2016-07-04 | 2016-10-26 | 苏州光之翼智能科技有限公司 | Batch calibration apparatus and method for temperatures of multi-axis aircraft sensors |
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2013
- 2013-12-03 CN CN201310637072.2A patent/CN103592466B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104440696A (en) * | 2014-12-10 | 2015-03-25 | 苏州中盛纳米科技有限公司 | Automatic locking device for batched MEMS (micro-electro-mechanical systems) acceleration sensors |
| CN104535798A (en) * | 2014-12-29 | 2015-04-22 | 苏州中盛纳米科技有限公司 | Acceleration sensor batch rolling platform control system and method |
| CN104501837A (en) * | 2015-01-15 | 2015-04-08 | 大连楼兰科技股份有限公司 | Vehicle-mounted OBD (On Board Diagnostic) device internally arranged inertia assembly parallel calibration and detection method and system thereof |
| CN105203799A (en) * | 2015-09-11 | 2015-12-30 | 中国电子科技集团公司第四十九研究所 | Acceleration three-axis thermal-sensitivity testing device |
| CN105203799B (en) * | 2015-09-11 | 2018-07-06 | 中国电子科技集团公司第四十九研究所 | A kind of three axis heat sensitivity test device of acceleration |
| CN106052741A (en) * | 2016-07-04 | 2016-10-26 | 苏州光之翼智能科技有限公司 | Batch calibration apparatus and method for temperatures of multi-axis aircraft sensors |
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| Publication number | Publication date |
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| CN103592466B (en) | 2015-05-20 |
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