CN103573593A - Piezoelectric flexible diaphragm pump - Google Patents
Piezoelectric flexible diaphragm pump Download PDFInfo
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- CN103573593A CN103573593A CN201310531523.4A CN201310531523A CN103573593A CN 103573593 A CN103573593 A CN 103573593A CN 201310531523 A CN201310531523 A CN 201310531523A CN 103573593 A CN103573593 A CN 103573593A
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- liquid storage
- liquid
- storage cylinder
- piezoelectric
- flexible partition
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- 239000007788 liquid Substances 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000005192 partition Methods 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 239000013013 elastic material Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 abstract description 10
- 230000006835 compression Effects 0.000 abstract description 7
- 238000007906 compression Methods 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 8
- 239000012530 fluid Substances 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000006664 bond formation reaction Methods 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
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Abstract
The invention relates to a piezoelectric flexible diaphragm pump which comprises a piezoelectric ceramic, a vibration substrate, a liquid storage cavity, a driving hole, a driving liquid, a flexible diaphragm, a pump cavity, an inlet check valve, an outlet check valve, an inlet and an outlet, wherein the piezoelectric ceramic and the vibration substrate are bonded to form a piezoelectric vibrator; the piezoelectric vibrator is arranged at the upper part or the lower part of the liquid storage cavity; the driving hole communicated with the liquid storage cavity is formed in the upper part or the lower part of the liquid storage cavity; the flexible diaphragm is arranged at the driving hole and separates the driving liquid from the pump cavity; the piezoelectric vibrator, the liquid storage cavity and the flexible diaphragm jointly form sealed space, and the space is filled with the driving liquid; and the inlet check valve and the outlet check valve are mounted at the inlet and the outlet of the pump cavity respectively. According to the piezoelectric flexible diaphragm pump, the flexible diaphragm is indirectly driven to move by liquid power, so that the overall deformation of the piezoelectric vibrator can be fully used, and a high pump cavity compression ratio can be realized; and the piezoelectric flexible diaphragm pump has the advantages of good self-sucking performance and high bubble discharge performance and output pressure.
Description
Technical field
The present invention relates to a kind of piezoelectric pump, particularly a kind of piezoelectricity flexible partition pump.
Background technique
Miniature diaphragm pump is the power unit in microfluidic control system.The kind of Miniature diaphragm pump is a lot, by the difference of driving mode, can be divided into piezoelectricity diaphragm pump, heating power diaphragm pump, static membrane valve, solenoid diaphragm valve, marmem membrane valve etc.Piezoelectricity diaphragm pump all disclosed in numerous design proposals, CN1378041A for example, CN1743670A, CN 1743671A, CN 101328879A.Utilize different piezoelectric vibrator as the direct driving fluid work of barrier film, can make the structure of piezoelectric pump compacter, be easy to realize microminiaturized, but because piezoelectric ceramic distortion is small, only utilized again in the course of the work the local deformation of piezoelectric ceramic, caused pump chamber dead volume larger, compression ratio is difficult to improve, structure piezoelectricity diaphragm pump poor from absorption, easily by bubble, clogged, be not easy to realize high delivery pressure simultaneously.In order to make piezoelectric ceramic obtain larger distortion, improve pump chamber compression ratio, often need to strengthen driving voltage, thereby cause the operating life of piezoelectric pump to reduce.
Summary of the invention
The invention provides a kind of piezoelectricity flexible partition pump, object is to guarantee under the prerequisite of piezoelectricity flexible partition pump volume microminiaturization, by what improve that pump chamber compression ratio makes piezoelectricity diaphragm pump, from absorption, row's bubbling ability and delivery pressure, obtains General Promotion.
Piezoelectricity flexible partition pump of the present invention is by piezoelectric constant, vibration substrate, liquid storage cylinder, drive hole, drive liquid, flexible partition, pump chamber, inlet one-way valve, outlet one-way valve, entrance and exit forms, wherein piezoelectric constant and vibration substrate bonding form piezoelectric vibrator, piezoelectric vibrator is located at top or the bottom of liquid storage cylinder, the top of liquid storage cylinder or bottom offer the drive hole being connected with liquid storage cylinder, flexible partition is located on drive hole and by driving liquid and pump chamber and separates, vibration substrate, the common space that forms a sealing of liquid storage cylinder and flexible partition, inside is full of driving liquid, inlet one-way valve and outlet one-way valve are arranged on respectively entrance and the outlet port of pump chamber.
Piezoelectric vibrator is provided with one or several, by piezoelectric ceramic and vibration substrate bonding, is formed.
Liquid storage cylinder is provided with one or several, and while being provided with several liquid storage cylinder, several liquid storage cylinder stacks arrange, and the inner chamber of each liquid storage cylinder connects.
Flexible partition is plane, cambered surface or wave structure, and material is the elastic material that flexibility is larger.
working principle of the present invention:
Refer to shown in Fig. 1, Fig. 2 and Fig. 3:
Fig. 1 is the schematic diagram of flexible partition when static;
Fig. 2 is that flexible partition shrinks in liquid storage cylinder, and fluid enters the schematic diagram of pump chamber;
Fig. 3 be flexible partition to pump chamber intramedullary expansion, the schematic diagram of fluid expulsion pump chamber;
In liquid storage cylinder, be full of driving liquid, during encapsulation, guaranteeing has certain initial pressure in liquid storage cylinder, make flexible partition when not working in tensioning state.When the polarised direction of applied voltage and piezoelectric ceramic is consistent, piezoelectric vibrator produces distortion, driving liquid in liquid storage cylinder is stretched, force flexible partition to shrink in liquid storage cylinder, now piezoelectric ceramic is by driving liquid that the effect of all distortion is all reflected on flexible partition, if the cross-section area that piezoelectric vibrator contacts with liquid is n with the ratio that connects liquid cross-section area of flexible partition, owing to driving the incompressibility of liquid, the n that flexible partition shrinkage amplitude is now approximately the average displacement that piezoelectric vibrator produces doubly, the flexible partition significantly shrinking makes pump chamber pressure decreased, pump chamber forms negative pressure mutually to external world, now export one-way valve closes under the effect of pump chamber negative pressure, inlet one-way valve is opened, fluid flows into pump chamber from entrance.When the polarised direction of applied voltage and piezoelectric ceramic is contrary, drive liquid compressed, now flexible partition is significantly expanded in pump chamber, makes pump chamber form to external world malleation mutually, and now inlet one-way valve is closed under the effect of pump chamber malleation, outlet one-way valve is opened, and fluid flows out pump chamber from outlet.When piezoelectric ceramic is under alternating voltage effect during double vibrations, flexible partition gets final product alternating movement, thereby form in pump chamber, goes out continuously stream.
The present invention utilizes fluid power indirectly to drive the motion of flexible partition, can make full use of the bulk deformation of piezoelectric vibrator, the displacement of flexible partition is increased considerably, if the now constancy of volume of pump chamber, compression ratio will improve, so the self-priming performance power of piezoelectricity flexible partition pump can strengthen with row's bubbling ability.And after compression ratio improves, even if the sealing of one-way valve is undesirable, the leakage producing is also little on the delivery pressure impact of piezoelectricity flexible partition pump, so piezoelectricity flexible partition pump more easily obtains large delivery pressure.
accompanying drawing explanation
Fig. 1 is the schematic diagram of flexible partition when static;
Fig. 2 is that flexible partition shrinks in liquid storage cylinder, and fluid enters the schematic diagram of pump chamber;
Fig. 3 be flexible partition to pump chamber intramedullary expansion, the schematic diagram of fluid expulsion pump chamber;
Fig. 4 is embodiment's two schematic diagram.
Fig. 5 is corrugated flexible partition schematic diagram.
1, piezoelectric constant 2, vibration substrate 3, liquid storage cylinder 4, driving liquid 5, drive hole 6, flexible partition 7, pump chamber 8, inlet one-way valve 9, entrance 10, outlet one-way valve 11, outlet
Embodiment
Embodiment one, refer to shown in Fig. 1, Fig. 2 and Fig. 3:
Piezoelectricity flexible partition pump of the present invention is by piezoelectric constant 1, vibration substrate 2, liquid storage cylinder 3, drive liquid 4, drive hole 5, planar flexible barrier film 6, pump chamber 7, inlet one-way valve 8, entrance 9, outlet one-way valve 10 and outlet 11 form, wherein piezoelectric constant 1 and the bonding formation piezoelectric vibrator of vibration substrate 2, piezoelectric vibrator is located at the top of liquid storage cylinder 3, the bottom of liquid storage cylinder 3 offers the drive hole 5 being connected with liquid storage cylinder 3, flexible partition 6 is located on drive hole 4 and by driving liquid 4 and pump chamber 7 and separates, vibrate basic 2, liquid storage cylinder 3 and the common space that forms a sealing of flexible partition 6, inside is full of and drives liquid 4, entrance single valve 8 and unidirectional 10 valves of outlet are arranged on respectively the entrance 9 and outlet 11 places of pump chamber 7.
Embodiment two, refer to shown in Fig. 4:
Piezoelectricity flexible partition pump of the present invention is by piezoelectric constant 1, vibration substrate 2, liquid storage cylinder 3, drive liquid 4, drive hole 5, planar flexible barrier film 6, pump chamber 7, inlet one-way valve 8, entrance 9, outlet one-way valve 10 and outlet 11 form, wherein piezoelectric constant 1 and the bonding formation piezoelectric vibrator of vibration substrate 2, liquid storage cylinder 3 is provided with two, stack arranges up and down, the inner chamber of two liquid storage cylinders 3 connects, piezoelectric vibrator is provided with two, the top of one of them liquid storage cylinder 3 located in the above, another piezoelectric vibrator is located at the bottom of liquid storage cylinder 3 below, the bottom of liquid storage cylinder 3 offers the drive hole 5 with this liquid storage cylinder 3 intracavity inter-connections above, flexible partition 6 is located on drive hole 5 and by driving liquid 4 and pump chamber 7 and separates, vibration substrate 2, liquid storage cylinder 2 and the common space that forms a sealing of flexible partition 6, inside is full of and drives liquid 4, inlet one-way valve 8 and unidirectional 10 valves of outlet are arranged on respectively the entrance 9 and outlet 11 places of pump chamber 7.
In above-mentioned all embodiments, the structure of flexible partition and material are the keys that the present invention is implemented, if flexible partition has good elasticity, the membrane shape retention time is long, barrier film internal loss is little, transmission efficiency is high; The starting resistor of the larger piezoelectricity flexible partition pump of the present invention of flexibility of flexible partition is lower.In order to reduce barrier film flexibility, flexible partition can be made to different shapes.In addition the non-planar structure of flexible partition also can reduce the quiet volume of pump chamber, further increases compression ratio.Flexible partition in embodiment one is plane, and the flexible partition in embodiment two is cambered surface, and also to can be made into the sectional shape shown in Fig. 5 be undulatory structure to flexible partition in addition.In the process of implementing, technician should be according to working condition requirement, the material of choose reasonable flexible partition, and the scope of alternative material includes but not limited to metal or high molecular polymer film.
Should be understood that, although describe the present invention in detail with particular reference to these preferred embodiments, but the present invention is not only confined to this, in the situation that not departing from marrow of the present invention, various modification and improvement are apparent for person of ordinary skill in the field.
Claims (4)
1. a piezoelectricity diaphragm pump, it is characterized in that: be by piezoelectric constant, vibration substrate, liquid storage cylinder, drive hole, drive liquid, flexible partition, pump chamber, inlet one-way valve, outlet one-way valve, entrance and exit forms, wherein piezoelectric constant and vibration substrate bonding form piezoelectric vibrator, piezoelectric vibrator is located at top or the bottom of liquid storage cylinder, the top of liquid storage cylinder or bottom offer the drive hole being connected with liquid storage cylinder, flexible partition is located on drive hole and by driving liquid and pump chamber and separates, vibration substrate, the common space that forms a sealing of liquid storage cylinder and flexible partition, inside is full of driving liquid, inlet one-way valve and outlet one-way valve are arranged on respectively entrance and the outlet port of pump chamber.
2. piezoelectricity diaphragm pump according to claim 1, is characterized in that: the cross-section area that flexible partition contacts with liquid is less than the cross-section area that piezoelectric vibrator contacts with liquid.
3. piezoelectricity diaphragm pump according to claim 1, is characterized in that: described liquid storage cylinder is provided with one or several, and while being provided with several liquid storage cylinder, top or the bottom of each liquid storage cylinder are equipped with piezoelectric vibrator, and the inner chamber of each liquid storage cylinder connects.
4. piezoelectricity diaphragm pump according to claim 1, is characterized in that: described flexible partition is plane, cambered surface or wave structure, and material is the elastic material that flexibility is larger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310531523.4A CN103573593B (en) | 2013-11-01 | 2013-11-01 | Piezoelectric flexible diaphragm pump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310531523.4A CN103573593B (en) | 2013-11-01 | 2013-11-01 | Piezoelectric flexible diaphragm pump |
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| Publication Number | Publication Date |
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| CN103573593A true CN103573593A (en) | 2014-02-12 |
| CN103573593B CN103573593B (en) | 2015-11-11 |
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| CN201310531523.4A Active CN103573593B (en) | 2013-11-01 | 2013-11-01 | Piezoelectric flexible diaphragm pump |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103997254A (en) * | 2014-05-28 | 2014-08-20 | 吉林大学 | Piezoelectric driving type software displacement driver |
| CN108096664A (en) * | 2017-12-25 | 2018-06-01 | 浙江师范大学 | A kind of new separable piezoelectricity medical infusion pump |
| CN109695562A (en) * | 2018-05-25 | 2019-04-30 | 常州威图流体科技有限公司 | A kind of fluid pump and exciting element |
| CN109763966A (en) * | 2019-03-03 | 2019-05-17 | 浙江师范大学 | A kind of indirect type medicine delivery pump for cavity Piezoelectric Driving of connecting |
| CN109838367A (en) * | 2019-04-04 | 2019-06-04 | 常州威图流体科技有限公司 | A kind of high-performance micro piezoelectric pump |
| CN110005596A (en) * | 2019-04-26 | 2019-07-12 | 燕山大学 | A kind of drive-type piezoelectricity membrane pump |
| CN110131141A (en) * | 2019-03-03 | 2019-08-16 | 浙江师范大学 | A kind of self-interacting type piezoelectricity medicine delivery pump easy to maintain |
| CN110639075A (en) * | 2019-09-20 | 2020-01-03 | 浙江师范大学 | Piezoelectric peristaltic pump for blood conveying |
| CN114382682A (en) * | 2022-01-24 | 2022-04-22 | 枣庄学院 | Double-resonance plunger pump |
| CN115492746A (en) * | 2022-08-31 | 2022-12-20 | 吉林大学 | Memory alloy wire counter-type driving double-acting continuous output micro pump |
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| US6203291B1 (en) * | 1993-02-23 | 2001-03-20 | Erik Stemme | Displacement pump of the diaphragm type having fixed geometry flow control means |
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| CN103334907A (en) * | 2013-07-08 | 2013-10-02 | 吉林大学 | Cantilever-type piezoelectric diaphragm pump |
| CN203548139U (en) * | 2013-11-01 | 2014-04-16 | 刘勇 | Piezoelectric flexible diaphragm pump |
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2013
- 2013-11-01 CN CN201310531523.4A patent/CN103573593B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6203291B1 (en) * | 1993-02-23 | 2001-03-20 | Erik Stemme | Displacement pump of the diaphragm type having fixed geometry flow control means |
| CN1378041A (en) * | 2002-05-20 | 2002-11-06 | 张建辉 | High frequency valve piezoelectric pump and its pump chamber design method |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103997254A (en) * | 2014-05-28 | 2014-08-20 | 吉林大学 | Piezoelectric driving type software displacement driver |
| CN108096664A (en) * | 2017-12-25 | 2018-06-01 | 浙江师范大学 | A kind of new separable piezoelectricity medical infusion pump |
| CN108096664B (en) * | 2017-12-25 | 2024-01-26 | 浙江师范大学 | Novel separable piezoelectric medical infusion pump |
| CN109695562A (en) * | 2018-05-25 | 2019-04-30 | 常州威图流体科技有限公司 | A kind of fluid pump and exciting element |
| CN109763966A (en) * | 2019-03-03 | 2019-05-17 | 浙江师范大学 | A kind of indirect type medicine delivery pump for cavity Piezoelectric Driving of connecting |
| CN110131141A (en) * | 2019-03-03 | 2019-08-16 | 浙江师范大学 | A kind of self-interacting type piezoelectricity medicine delivery pump easy to maintain |
| CN109838367A (en) * | 2019-04-04 | 2019-06-04 | 常州威图流体科技有限公司 | A kind of high-performance micro piezoelectric pump |
| CN110005596A (en) * | 2019-04-26 | 2019-07-12 | 燕山大学 | A kind of drive-type piezoelectricity membrane pump |
| CN110639075A (en) * | 2019-09-20 | 2020-01-03 | 浙江师范大学 | Piezoelectric peristaltic pump for blood conveying |
| CN114382682A (en) * | 2022-01-24 | 2022-04-22 | 枣庄学院 | Double-resonance plunger pump |
| CN115492746A (en) * | 2022-08-31 | 2022-12-20 | 吉林大学 | Memory alloy wire counter-type driving double-acting continuous output micro pump |
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| CN103573593B (en) | 2015-11-11 |
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Effective date of registration: 20180604 Address after: 213164 room 2521, North Tower, Hui Yan building, Changzhou science and Education Town, 18 Wujin Road, Wujin, Changzhou. Patentee after: Changzhou Weitu Fluid Technology Co. Ltd. Address before: 130025 5988 people's street, Nanguan District, Changchun, Jilin Patentee before: Liu Yong |
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