CN103557268A - Semi-active vibration isolation system - Google Patents
Semi-active vibration isolation system Download PDFInfo
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- CN103557268A CN103557268A CN201310576246.9A CN201310576246A CN103557268A CN 103557268 A CN103557268 A CN 103557268A CN 201310576246 A CN201310576246 A CN 201310576246A CN 103557268 A CN103557268 A CN 103557268A
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Abstract
The invention relates to a semi-active vibration isolation system. The semi-active vibration isolation system comprises a basal disc and an upper working table, wherein a vibration isolation mechanism is arranged between the basal disc and the upper working table, and comprises a spring and a buffer device; the buffer device is connected with a sensor placed on the upper working table through a controller. The semi-active vibration isolation system is characterized in that the adjustable buffer device is adopted; the integral vibration isolation system is formed by the adjustable buffer device, the controller, the sensor and the spring. The semi-active vibration isolation system has the benefits that the semi-active vibration isolation system is communicated with the controller through a pressure sensor and the sensor, resonant frequency can be avoided more actively, the vibration convey rate can be improved, the pressure variation and altitude variation caused by movement of upper loads can be responded actively, and the vibration time can be greatly reduced. The semi-active vibration isolation system has the effects that the resonant frequency is reduced actively, and frequencies beyond the resonant frequency can obtain relatively high vibration convey rate.
Description
Technical field
The invention belongs to except vibrating system, relate in particular to a kind of half active vibrating system that removes.
Background technique
Conventionally vibration eliminating device is weaker than the equipment of vibration for accurate testing equipment or LCD manufacturing equipment, semiconductor manufacturing equipment etc.External vibration likely reduces the proper property of these equipments, is therefore necessary to use vibration eliminating device, prevents that external vibration is communicated to these equipments.As shown in Fig. 9-1, Fig. 9-2, prior art except vibrating system, its main way is the mode of utilizing spring and buffer.Although this mode cost of production is low, its defect is: except the performance of shaking has narrow limitation, there is no to realize the better additional means except the performance of shaking.Removing vibrating system with passive-type compares, the active vibrating system that removes is also provided with vibration transducer and final controlling element, and the control gear that both are controlled, perception is except the mobile status of vibrating system upper load, according to the vibration values of perception, utilize final controlling element to remove to shake.Although this device is outstanding except the performance of shaking, owing to using sensor and the final controlling element of high price, its price except vibrating system is very high, and internal structure is also very complicated.
Recently, along with manufacturing mechanism/instrument improves the performance requirement except vibrating system, not only require it to remove the performance of shaking more outstanding, also require load to swerve the weight while changing except the time of vibrating system reply steady state is shorter.Because this is conducive to enhance productivity.
The passive-type of prior art, except vibrating system exists narrow limitation from technological layer, cannot fundamentally meet these requirements.For addressing this problem propose active except the technology of shaking, in order to reduce vibration and to maintain level, use independently final controlling element to remove and shake.But its product price is too high, structure is also very complicated, is difficult to be applied to production scene.(application number: 99109006.3) a kind of vibration eliminating device is disclosed, it is characterized in that being included in above-below direction separated by a certain interval except shaking, between object and basal disc part, set a plurality of with should be except shaking object and this basal disc partial fixing is connected and will be fixedly connected with from this should being transformed to the displacement converter of substantially horizontal displacement except the above-below direction Relative Displacement of shake object and this basal disc part and being fixedly connected on respectively this displacement converter and these displacement converter being interconnected and the displacement transfer unit of the described substantially horizontal displacement of mutual transmission between each displacement converter of part transmission.Described displacement converter is by being formed except the upper and lower stacked a pair of sheet material that shakes between object and described basal disc part described, and the vibration damper that described displacement converter is used by spring or lamination rubber or absorption horizontal vibration forms.Its defect has narrow limitation except the performance of shaking exactly, is not suitable with on accurate testing equipment or LCD manufacturing equipment, semiconductor manufacturing equipment and uses.Especially along with the generally application of mechanism hand in industrial automation, when moving load is moved with mechanism hand, while requiring load to move the time of returning position the smaller the better, otherwise cause manufacturing efficiency to decline.
Summary of the invention
The object of the invention is to overcome the deficiency of above-mentioned technology, a kind of half active vibrating system that removes is provided, solved and have shortened resonant frequency problem and resetting time problem.Minimizing, due to mobile the rocking of producing except vibrating system upper load, reduces resetting time to greatest extent.
The present invention for achieving the above object, by the following technical solutions: a kind of half active vibrating system that removes, comprise basal disc and upper table, between described basal disc and upper table, be provided with Chu Zhen mechanism, described Chu Zhen mechanism comprises spring and damping device, described damping device is connected with the sensor that is placed in upper table by controller, it is characterized in that: described damping device adopts regulation type damping device, and forms whole except vibrating system with controller, sensor and spring.
Described Chu Zhen mechanism comprises elastic module body, described elastic module body consists of buffer cavity and the spring chamber of hollow, described spring chamber top is provided with diaphragm of rubber, described diaphragm of rubber and spring chamber form whole, its cross-section area shape is spill, between described buffer cavity and spring chamber, be provided with dividing plate, described dividing plate central authorities are provided with the vent of buffer cavity and spring chamber UNICOM, described buffer cavity sidewall is provided with inlet hole, described inlet hole is connected with control valve and pneumatics flexible pipe, described buffer cavity sidewall is provided with exhaust port, described exhaust port is connected with outlet valve and pneumatics flexible pipe, described elastic module body top is provided with sensor.
Described spring chamber sidewall is provided with pneumatics port, and described pneumatics port is connected with pressure transducer, and described pressure transducer is communicated with controller by signaling line, and described controller is communicated with proximity detector by signaling line.
The described control valve adoption rate control valve being connected with inlet hole.
Described sensor adopts Non-Contact Proximity Sensor or direct perceptive type proximity detector or touch sensor.
Beneficial effect: the present invention is communicated with controller by pressure transducer and sensor, can avoid more on one's own initiative occurring resonant frequency, not only can improve vibration reception and registration rate, can also respond actively the pressure being brought by moving of upper load and change and variable height, can significantly reduce jitter time.Compare except vibrating system with existing high price is active, price is very cheap, and its function higher than the passive type of prior art except vibrating system, can improve the manufacturing efficiency of production scene.Effect is to reduce on one's own initiative resonant frequency, for the frequency beyond resonant frequency, also can obtain higher vibration reception and registration rate.
Accompanying drawing explanation
Fig. 1 is the half active structural representation except vibrating system;
Fig. 2 is the structural representation of elastic module Shi Chuzhen mechanism;
Fig. 3 is the half active structural representation except vibrating system with controller;
Fig. 4 is the half active structural representation except vibrating system that adopts touch sensor;
Fig. 5-1, Fig. 5-2nd, prior art and the present invention vibrate the schematic diagram of reception and registration rate;
Fig. 6-1, Fig. 6-2nd, to the module variable height form schematic diagram except the moving load of vibrating system top;
Fig. 7-1, Fig. 7-2nd, except the comparison schematic diagram of vibrating system worktable jitter time;
Fig. 8 is the half active initial setting up flow chart except vibrating system;
Fig. 9-1, Fig. 9-2nd, known passive-type is except vibrating system and the active structural representation except vibrating system.
In figure: 200, elastic module body, 201, inlet hole, 202, exhaust port, 203, buffer cavity, 204, spring chamber, 205, dividing plate central aperture, 206, dividing plate, 207, barrier film, 208, proportional control valve, 209, pneumatics flexible pipe, 210, outlet valve, 211, pneumatics flexible pipe, 212, sensor, 213, detected object, 214, pressure transducer, 215, control device, 217, signaling line, 218, pneumatics port, 220, upper load; 221, moving load, 222, guide rail;
301, spring, 302, damping device, 303, sensor, 304, controller, 305, final controlling element, 306, regulation type damping device, 320, upper table, 321, basal disc.
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment, describe the specific embodiment of the present invention in detail.
A kind of half active vibrating system that removes, comprise basal disc and upper table, between described basal disc 321 and upper table 320, be provided with Chu Zhen mechanism, described Chu Zhen mechanism comprises spring 301 and damping device, described damping device is connected with the sensor 303 that is placed in upper table by controller 304, described damping device adopts regulation type damping device 306, and forms whole except vibrating system with controller, sensor and spring.Described Chu Zhen mechanism comprises elastic module body 200, described elastic module body consists of buffer cavity 203 and the spring chamber 204 of hollow, described spring chamber top is provided with diaphragm of rubber 207, it is whole that described diaphragm of rubber and spring chamber form spring chamber, spring chamber overall cross sectional area shape is spill, between described buffer cavity and spring chamber, be provided with dividing plate 206, described dividing plate central authorities are provided with the dividing plate central aperture 205 of buffer cavity and spring chamber UNICOM, described buffer cavity sidewall is provided with inlet hole 201, described inlet hole is connected with proportional control valve 208 and pneumatics flexible pipe 209, described buffer cavity 203 sidewalls are provided with exhaust port 202, described exhaust port is connected with outlet valve 210 and pneumatics flexible pipe 211, described elastic module body top is provided with sensor.Described spring chamber sidewall is provided with pneumatics port 218, and described pneumatics port is connected with pressure transducer 214, and described pressure transducer is communicated with controller by signaling line, and described controller is communicated with proximity detector by signaling line.The described control valve adoption rate control valve being connected with inlet hole.Described sensor adopts Non-Contact Proximity Sensor or direct perceptive type proximity detector or touch sensor.Regulation type damping device can adopt the general commodity of currently available technology.
Working procedure
Refer to accompanying drawing 1, half active except the form of vibrating system for the technology of compromise Fig. 9-1, Fig. 9-2.That is, continue to use existing passive-type except the original spring 301 of vibrating system, and original damping device is changed into variable damping device 302, be provided with controller 304 simultaneously, compare except vibrating system with active, price is very low, except shake Performance Ratio passive-type except vibrating system good.
Refer to Fig. 2, Fig. 3, the half active basic module system architecture except vibrating system comprises module body 200 and each parts as follows.That is, can in the mode of adjustable air amount, inject to inlet hole 201 or discharge the proportional control valve 208 of air from it, and the pneumatics flexible pipe 209 being attached thereto, the outlet valve 210 that the air of exhaust port 202 is discharged and the pneumatics flexible pipe 211 being attached thereto.The aperture 205 that the air that enters buffer cavity 203 flows through dividing plate 206 central authorities enters spring chamber 204.The barrier film made from rubber material 207 of spring chamber 204 can be flexible by the air pressure size of spring chamber 204, its movement direction Vertical direction as shown by arrows.The pneumatics port 218 of spring chamber 204 is connected with pressure transducer 214.Pressure in pressure transducer 214 perception spring chambers 204 changes, by signaling line 217 sending pressure signals.Below upper load 220, be provided with cordless and detect the accurate proximity detector 212 that fine distance changes, the detected object 213 of proximity detector sticks on upper load 220.Press the kind of proximity detector 212, also can adopt the direct perceptive type proximity detector that detected object 213 needn't be set.
Fig. 3 is the schematic diagram of additional control system on the modular system of Fig. 2.That is, on the spring chamber 204 of module body 200, be connected with pressure transducer 214, the pressure change of perception spring chamber 204, is communicated to controller 215 by signaling line 217 signal.And the change in location of proximity detector 212 perception upper loads 220 is communicated to controller 215 by signaling line 217 signal.And receive signal, the accurate basic data of controlling resonant frequency, upper load position of controller 215 will be become.Controller 215 is according to the small air pressure relevant to the changes in weight of upper load 220, the variable quantity of height and position value, to the proportional control valve 208 being connected with buffer cavity 203, sending resonant frequency reduces and upper load reset desired signal, to buffer cavity 203, inject air or discharge air from buffer cavity 203, the air pressure of whole system is carried out to meticulous, suitable control.The fine movement of proportional control valve 208 can avoid occurring resonant frequency, can suitably tackle the variable height of upper load 220.In order to protect whole system, the pressure short time of spring chamber 204 has to go to the toilet when sharp increase adds or the distance value of proximity detector perception sharply increases, and to outlet valve 210 transmitted signals, discharges rapidly the air of buffer cavity 203, can protect whole except vibrating system.
Fig. 4 is with accurate another embodiment's schematic diagram that detects feeler perception upper load 220 variable height of distance of the direct way of contact.Substitute proximity detector, applicable feeler.
As found out in accompanying drawing 5-1, Fig. 5-2, compare with the existing vibrating system that removes, the present invention is provided with proportional control valve 208 and apart from detecting sensor 212, controller 215, can avoid more on one's own initiative occurring resonant frequency, not only can improve vibration reception and registration rate, can also respond actively the pressure that the moving load by upper load 220 brings and change and variable height, can significantly reduce jitter time.Effect is to reduce on one's own initiative resonant frequency, and the frequency beyond resonant frequency also can obtain higher vibration reception and registration rate.This structure, compares except vibrating system with existing high price is active, and price is very cheap, and its function higher than the passive type of prior art except vibrating system, can improve the manufacturing efficiency of production scene.
As found out in accompanying drawing 6-1, Fig. 6-2, common except the schematic diagram of vibrating system while being useful in industry work on the spot platform 220.As shown in accompanying drawing 6-1, moving load 221 is along guide rail 222 when direction moves to the left, and as shown in Fig. 6-2, the variable height of module 200 appears in the short time, and the whole phenomenon of sharply rocking by Vertical direction of can occurring of worktable 220 at this moment.The present invention can significantly reduce shaking amplitude and the event of this worktable 220, and reduces jitter time and enhance productivity close dependency relation.Its experimental result is as shown in Fig. 7-1, Fig. 7-2.
As shown in Figure 8, ability is weak except shaking for the resonance frequency domain of solution prior art, jitter time length etc. removes the defect that vibrating system shows in production scene, pressure transducer 201 is set and apart from sensors such as detecting sensors 212,225, as final controlling element usage ratio control valve 208, the spring chamber 204 pressure variations that perception is caused by upper load 220 and the variable height of upper load 220, and calculated according to the value of these perception by controller 215, passing ratio control valve 208, suitably controls the air pressure of buffer cavity 203.
After the initial setting up of Fig. 8 finishes, controller 215 carries out control action by control sequence.
In order to control, respectively by the signal that is arranged on the pressure signal that sends except the pressure transducer 214 of module 200 of shaking and is sent by the proximity detector 212 of perception upper load height.The structure of these signals is divided into 6 kinds of basic status conditions as shown in the control sequence table of controller, continue with arrange the initial pressure criteria value determining during except vibrating system and highly reference value compare, using sending to proportional control valve 208 with the corresponding controlling value of difference as actuating signal.
The function of proportional control valve 208 is that existing module 200 internal damping value c and the spring constant value k not having except vibrating system changed on one's own initiative, can reduce resonant frequency, improves vibration reception and registration rate.Controller 215 can continue to carry out as above process.
The control sequence table of controller of the present invention
The above, be only preferred embodiment of the present invention, not structure of the present invention done to any pro forma restriction.Any simple modification, equivalent variations and modification that every foundation technical spirit of the present invention is done above embodiment, all still belong in the scope of technological scheme of the present invention.
Claims (5)
1. one and half is active except vibrating system, comprise basal disc and upper table, between described basal disc and upper table, be provided with Chu Zhen mechanism, described Chu Zhen mechanism comprises spring and damping device, described damping device is connected with the sensor that is placed in upper table by controller, it is characterized in that: described damping device adopts regulation type damping device, and form whole except vibrating system with controller, sensor and spring.
2. according to claim 1 half active except vibrating system, it is characterized in that: described Chu Zhen mechanism comprises elastic module body, described elastic module body consists of buffer cavity and the spring chamber of hollow, described spring chamber top is provided with diaphragm of rubber, described diaphragm of rubber and spring chamber form whole, its cross-section area shape is spill, between described buffer cavity and spring chamber, be provided with dividing plate, described dividing plate central authorities are provided with the vent of buffer cavity and spring chamber UNICOM, described buffer cavity sidewall is provided with inlet hole, described inlet hole is connected with control valve and pneumatics flexible pipe, described buffer cavity sidewall is provided with exhaust port, described exhaust port is connected with outlet valve and pneumatics flexible pipe, described elastic module body top is provided with sensor.
3. according to claim 1 half active except vibrating system, it is characterized in that: described spring chamber sidewall is provided with pneumatics port, described pneumatics port is connected with pressure transducer, and described pressure transducer is communicated with controller by signaling line, and described controller is communicated with proximity detector by signaling line.
4. the half active vibrating system that removes according to claim 1, is characterized in that: the described control valve adoption rate control valve being connected with inlet hole.
5. the half active vibrating system that removes according to claim 1, is characterized in that: described sensor adopts Non-Contact Proximity Sensor or direct perceptive type proximity detector or touch sensor.
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| CN201310576246.9A CN103557268A (en) | 2013-11-14 | 2013-11-14 | Semi-active vibration isolation system |
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| CN201310576246.9A CN103557268A (en) | 2013-11-14 | 2013-11-14 | Semi-active vibration isolation system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106556460A (en) * | 2015-09-30 | 2017-04-05 | 仓敷化工株式会社 | Actively go vibrating device and this actively go vibrating device vibrating sensor method to set up |
| CN110806221A (en) * | 2018-08-06 | 2020-02-18 | 厦门雅迅网络股份有限公司 | MEMS sensor capable of defending resonance and resonance defending method thereof |
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| JPS5888242A (en) * | 1981-11-18 | 1983-05-26 | Showa Electric Wire & Cable Co Ltd | Control method for vibro-isolating table |
| JPH0226334A (en) * | 1988-07-15 | 1990-01-29 | Showa Electric Wire & Cable Co Ltd | Precision damping method |
| CN101469754A (en) * | 2007-12-28 | 2009-07-01 | 东洋橡胶工业株式会社 | Air suspension |
| CN103322105A (en) * | 2013-07-02 | 2013-09-25 | 山东大学 | Bionic air spring system |
| CN203272572U (en) * | 2013-05-07 | 2013-11-06 | 李杨 | Air spring vibration damper |
| CN203685974U (en) * | 2013-11-14 | 2014-07-02 | 高乐（天津）科技发展有限公司 | Semi-active vibration removal system |
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2013
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5888242A (en) * | 1981-11-18 | 1983-05-26 | Showa Electric Wire & Cable Co Ltd | Control method for vibro-isolating table |
| JPH0226334A (en) * | 1988-07-15 | 1990-01-29 | Showa Electric Wire & Cable Co Ltd | Precision damping method |
| CN101469754A (en) * | 2007-12-28 | 2009-07-01 | 东洋橡胶工业株式会社 | Air suspension |
| CN203272572U (en) * | 2013-05-07 | 2013-11-06 | 李杨 | Air spring vibration damper |
| CN103322105A (en) * | 2013-07-02 | 2013-09-25 | 山东大学 | Bionic air spring system |
| CN203685974U (en) * | 2013-11-14 | 2014-07-02 | 高乐（天津）科技发展有限公司 | Semi-active vibration removal system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106556460A (en) * | 2015-09-30 | 2017-04-05 | 仓敷化工株式会社 | Actively go vibrating device and this actively go vibrating device vibrating sensor method to set up |
| CN110806221A (en) * | 2018-08-06 | 2020-02-18 | 厦门雅迅网络股份有限公司 | MEMS sensor capable of defending resonance and resonance defending method thereof |
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Application publication date: 20140205 |