CN103469155B - High-purity high-density WO 3the preparation method of/S Core-shell Structure Nanoparticles - Google Patents
High-purity high-density WO 3the preparation method of/S Core-shell Structure Nanoparticles Download PDFInfo
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- CN103469155B CN103469155B CN201310422712.8A CN201310422712A CN103469155B CN 103469155 B CN103469155 B CN 103469155B CN 201310422712 A CN201310422712 A CN 201310422712A CN 103469155 B CN103469155 B CN 103469155B
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Abstract
The present invention relates to a kind of high-purity high-density WO
3the preparation method of/S Core-shell Structure Nanoparticles, belongs to technical field of material.The present invention adopts vacuum tube furnace, and with Tungsten oxide 99.999 and sulphur powder for evaporation source, by the method for thermal evaporation, under carrier gas protection, on surfacing, bright and clean silicon chip, gallium arsenide film, sapphire sheet or single-crystal silicon carbide sheet, one-step synthesis deposition obtains highdensity WO
3/ S Core-shell Structure Nanoparticles, its kernel is monocrystalline WO
3, shell is amorphous simple substance S.The method have mode of deposition strictly controlled, equipment and process is simple, output is large, low cost and other advantages.The nanostructure product purity obtained is high, and the diameter Distribution of its kernel and shell is even, and granular size is controlled; This nano particle is in voltage dependent resistor, and the aspect such as gas sensor and catalyzer has wide practical use.
Description
Technical field
The present invention relates to a kind of high-purity high-density WO
3the preparation method of/S Core-shell Structure Nanoparticles, belongs to technical field of material.
Background technology
Tungsten oxide 99.999 is with a wide range of applications in electrochromism, gas detection and chemical catalysis etc. as a kind of function ceramics.Meanwhile, as voltage dependent resistor, Tungsten oxide 99.999 pottery has the feature such as low voltage, low current, is expected to be applied at microelectronics domain.But cause its electric property unstable owing to there is multiphase coexistence phenomenon in Tungsten oxide 99.999 crystal, its application potential is fully developed far away.There are some researches show, mostly present monocrystalline state when scantling is little to during nanometer scale, therefore prepare tungsten oxide nanometer monocrystalline and be expected to solve the shortcomings such as its structural phase transition is many, electric property is unstable.
On the other hand, in order to improve the performance of material, the application of expansion material, the performance of the nano-heterogeneous structure energy strongthener that the compound of two or more materials or hydridization are formed or show the characteristic that independent constituent materials do not have, causes the extensive concern of people.Wherein, nucleocapsid structure is widely used in the compound of the electricity of material, magnetics, optics, catalysis, mechanics and chemical property as a kind of important heterojunction structure.Such as, WO
3/ TiO
2nucleocapsid structure is because combine WO
3and TiO
2excellent in performance and shown more excellent catalytic performance and more excellent electrochromism rate of dyeing (VuongNM, KimD, KimH.ElectrochromicpropertiesofporousWO
3-TiO
2core-shellnanowires.J.Mater.Chem.C, 2013,1 (21): 3399-3407), and relevant WO
3the research of/S nucleocapsid structure have not been reported.
At present, nanometer nuclear shell nano-structure generally adopts chemical method to prepare.Compared to the complexity of chemical reaction and restive, as thermal evaporation has, cost is low, preparation process simple, processing parameter controllability is strong and prepare material mostly is the features such as crystal to physical vapor deposition.The present invention utilizes thermal evaporation techniques high yield to prepare high purity, high-density first, the WO of good uniformity
3/ S Core-shell Structure Nanoparticles, is expected to be widely used in catalyzer, electrochomeric glass, battery terminal, gas sensor and voltage dependent resistor.
Summary of the invention
The object of the invention is to propose a kind of high-purity high-density WO
3the preparation method of/S Core-shell Structure Nanoparticles; The method adopts vacuum tube furnace, with Tungsten oxide 99.999 (WO
3) and sulphur (S) as evaporation source, by the method for thermal evaporation, carrier gas protection under, on surfacing, bright and clean silicon chip, gallium arsenide film, sapphire sheet or single-crystal silicon carbide sheet, one-step synthesis deposition obtain highdensity WO
3/ S Core-shell Structure Nanoparticles, its kernel of this particle is monocrystalline WO
3, shell is amorphous simple substance S.The method have mode of deposition strictly controlled, equipment and process is simple, output is large, low cost and other advantages.The Core-shell Structure Nanoparticles product purity obtained is high, and the diameter Distribution of its kernel and shell is even, and granular size is controlled.
The WO that the present invention proposes
3/ S Core-shell Structure Nanoparticles preparation method, is characterized in that, described method synthesizes WO by thermal evaporation Tungsten oxide 99.999 and sulphur on surfacing, bright and clean substrate
3/ S Core-shell Structure Nanoparticles, comprises the following steps:
(1) in vacuum tube furnace, respectively WO will be housed
3the alumina ceramic crucible of powder and S powder or WO is housed
3be placed on the heating region of stove central authorities with the alumina ceramic crucible of S powder mix, in its airflow downstream distance, WO be housed
3substrate is placed in the region that the crucible 20-30mm place temperature of powder is lower.
(2) before heating, first whole system is vacuumized, then in system, pass into high-purity inert carrier gas, and repeatedly, with the air in removal system.Then with 15-30 DEG C/min ramp to maximum heating temperature, and be incubated a few hours.In heat-processed, keep carrier gas flux to be 100-300 sccm (sccm), and whole heat-processed completes under inert carrier gas protection, last Temperature fall, to room temperature, can obtain high purity, high-density WO on substrate
3/ S Core-shell Structure Nanoparticles.
In above-mentioned preparation method, the evaporation source in described step (1) is commercially available analytical pure WO
3powder and sulphur powder.
In above-mentioned preparation method, in described step (1), if will WO be equipped with
3the alumina ceramic crucible of powder and S powder is placed on different heating region respectively and heats, then WO will be housed
3the alumina ceramic crucible of powder is placed on the highest heating region of the centralised temperature of stove, in its air-flow upstream or downstream distance, WO is housed
3the alumina ceramic crucible that S powder is housed is placed in the region that the crucible 10-15mm place Heating temperature of powder is lower.
In above-mentioned preparation method, in described step (1), if will WO be equipped with
3the heating region being placed on stove central authorities with the alumina ceramic crucible of S powder mix heats, then wherein WO
3the mass ratio of powder and S powder controls between 10:1 to 100:1.
In above-mentioned preparation method, the substrate in described step (1) is the one among silicon chip, gallium arsenide film, sapphire sheet, single-crystal silicon carbide sheet, and surfacing, smooth finish is good.
In above-mentioned preparation method, in described step (2), high-purity inert carrier gas is the one among argon gas, nitrogen.
In above-mentioned preparation method, the inert carrier gas in described step (2) is high-purity gas, and purity is at more than 99.99vol.%.
In above-mentioned preparation method, the maximum heating temperature in described step (2) is 900-1100 DEG C.
In above-mentioned preparation method, in described step (2), under maximum heating temperature, soaking time is 2-4 hour.
This technology is adopted to prepare WO
3/ S Core-shell Structure Nanoparticles, has the features such as equipment and process is simple, output is large, cost is low, the WO obtained
3/ S Core-shell Structure Nanoparticles purity is high, kernel well-crystallized, grain diameter uniform, controllable, and the diameter Distribution of its kernel and shell is even, and core, thickness of the shell are controlled.
Accompanying drawing explanation
Fig. 1 is the WO obtained by the embodiment of the present invention 1
3the stereoscan photograph of/S Core-shell Structure Nanoparticles
Fig. 2 be obtained by the embodiment of the present invention 1 WO
3the transmission electron microscope photo of/S Core-shell Structure Nanoparticles
Embodiment
Below in conjunction with embodiment, technical scheme of the present invention is described further.
The present invention proposes a kind of high-purity high-density WO
3the preparation method of/S Core-shell Structure Nanoparticles, is characterized in that, described method adopts vacuum tube furnace, with Tungsten oxide 99.999 (WO
3) and sulphur (S) as evaporation source, by the method for thermal evaporation, carrier gas protection under, on surfacing, bright and clean silicon chip, gallium arsenide film, sapphire sheet or single-crystal silicon carbide sheet, one-step synthesis deposition obtain highdensity WO
3/ S Core-shell Structure Nanoparticles, and comprise the steps and content:
(1) evaporation source adopted is commercially available analytically pure WO
3powder and sulphur powder.
(2) substrate adopted is the one among silicon chip, gallium arsenide film, sapphire sheet, single-crystal silicon carbide sheet, and surfacing, smooth finish is good.
(3) in vacuum tube furnace, respectively WO will be housed
3the alumina ceramic crucible of powder and S powder or WO is housed
3be placed on the heating region of stove central authorities with the alumina ceramic crucible of S powder mix, in its airflow downstream distance, WO be housed
3substrate is placed in the region that the crucible 20-30mm place temperature of powder is lower.
(4) in evaporation source put procedure, if will WO be equipped with
3the alumina ceramic crucible of powder and S powder is placed on different heating region respectively and heats, then WO will be housed
3the alumina ceramic crucible of powder is placed on the highest heating region of the centralised temperature of stove, in its air-flow upstream or downstream distance, WO is housed
3the alumina ceramic crucible that S powder is housed is placed in the region that the crucible 10-15mm place Heating temperature of powder is lower.
(5) in evaporation source put procedure, if will WO be equipped with
3the heating region being placed on stove central authorities with the alumina ceramic crucible of S powder mix heats, then wherein WO
3the mass ratio of powder and S powder controls between 10:1 to 100:1.
(6) before heating, first whole system is vacuumized, then in system, pass into high-purity inert carrier gas, and repeatedly, with the air in removal system.Then with 15-30 DEG C/min ramp to maximum heating temperature, and be incubated a few hours.In heat-processed, keep carrier gas flux to be 100-300 sccm (sccm), and whole heat-processed completes under inert carrier gas protection, last Temperature fall, to room temperature, can obtain high purity, high-density WO on substrate
3/ S Core-shell Structure Nanoparticles.
(7) testing inert carrier gas used is high-purity argon gas or nitrogen, and whole experiment heat-processed completes under carrier gas protection.
(8) maximum heating temperature of testing is 900-1100 DEG C, and soaking time is 2-4 hour.
Institute obtains WO
3/ S Core-shell Structure Nanoparticles is yellow-green colour film in appearance.
Under a scanning electron microscope, a large amount of nano particles can be observed, even particle size distribution.TEM (transmission electron microscope) analysis shows, this nano particle is WO
3/ S nucleocapsid structure, its kernel is monocrystalline WO
3, shell is amorphous simple substance S.
Embodiment 1: 0.2g analytical pure WO will be housed
3the alumina ceramic crucible of powder is placed on the central heating zone of vacuum tube furnace, in its airflow downstream distance, WO is housed
3the alumina ceramic crucible that 0.01g analytical pure S powder is housed is placed at the crucible 14mm place of powder, in its airflow downstream distance, WO is housed
3silicon chip is placed at the crucible 22mm place of powder.
Before heating, first whole system is vacuumized, then in system, pass into high-purity argon gas, and repeat 2 times, with the air in removal system.Then with 15 DEG C/min ramp to 950 DEG C, insulation 3h.In heat-processed, keep carrier gas flux to be 300 sccm (sccm), last Temperature fall, to room temperature, can obtain a large amount of WO on substrate
3/ S Core-shell Structure Nanoparticles.
Synthesized grain diameter is even, and density is high, output is large (see Fig. 1).Can observe nucleocapsid structure under transmission electron microscope, external diameter 100-150nm, internal diameter is 50-100nm (see Fig. 2), and its kernel is monocrystalline WO
3, shell is amorphous simple substance S.
Claims (2)
1. high-purity high-density WO
3the preparation method of/S Core-shell Structure Nanoparticles, is characterized in that: described Core-shell Structure Nanoparticles kernel is monocrystalline WO
3, shell is amorphous simple substance S; Described method is by thermal evaporation WO
3powder and S powder are at deposition on substrate WO
3/ S Core-shell Structure Nanoparticles, comprises the following steps:
(1) in vacuum tube furnace, respectively WO will be housed
3the alumina ceramic crucible of powder and S powder or WO is housed
3the heating region of stove central authorities is placed on, WO when wherein evaporating respectively with the alumina ceramic crucible of S powder mix
3powder is placed on Lu Zhong heat district and S powder is placed on Lu Zhong low-temperature heat district and the two is at a distance of 10-15mm, and during mixing evaporation, then needs WO
3the mass ratio of powder and S powder controls between 10: 1 to 100: 1; In its airflow downstream distance, WO is housed
3substrate is placed in the region that the crucible 20-30mm place temperature of powder is lower;
(2) before heating, first whole system is vacuumized, then in system, pass into high-purity inert carrier gas, and repeatedly, with the air in removal system; Then with 15-30 DEG C/min ramp to 900-1100 DEG C, and be incubated 2-4 hour; In heat-processed, keep carrier gas flux to be 100-300 sccm, and whole heat-processed completes under inert carrier gas protection, last Temperature fall, to room temperature, can obtain high purity, high-density WO on substrate
3/ S Core-shell Structure Nanoparticles.
2. according to preparation method according to claim 1, it is characterized in that: WO in described step (1)
3the heating evaporation method of powder and S powder is evaporation respectively or mixing evaporation, WO when wherein evaporating respectively
3powder is placed on Lu Zhong heat district and S powder is placed on Lu Zhong low-temperature heat district, and the two is at a distance of 10-15mm; And during mixing evaporation, then need WO
3the mass ratio of powder and S powder controls between 10: 1 to 100: 1; Substrate in described step (1) is the one among silicon chip, gallium arsenide film, sapphire sheet, single-crystal silicon carbide sheet, and surfacing, smooth finish is good; In described step (2), maximum heating temperature is 900-1100 DEG C, soaking time 2-4 hour.
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CN104071847B (en) * | 2014-07-02 | 2016-03-02 | 中国地质大学(北京) | The preparation method of high yield high-density Tungsten oxide 99.999 nanometer micrometer structure positive impedance humidity-sensitive material |
CN104934584B (en) * | 2015-05-13 | 2017-04-05 | 陕西科技大学 | A kind of porous hollow shell WO3/WS2Nano material and preparation method thereof |
CN105019029B (en) * | 2015-06-30 | 2018-05-04 | 中国地质大学(北京) | High-purity, high yield prepare WS2The method of lamellar nanostructured |
CN105543972B (en) * | 2016-02-24 | 2018-03-27 | 中国地质大学(北京) | High-purity high-density MoO2The preparation method of lamellar nanostructured |
CN106315548B (en) * | 2016-07-28 | 2018-08-31 | 中国地质大学(北京) | A kind of bis- selenizing molybdenum nanometer sheet core-shell structures of carbon fiber@and preparation method thereof |
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