CN103454068A - X-ray combination refractor focusing performance test device based on CCD detection - Google Patents

Abstract

The invention discloses an X-ray combination refractor focusing performance test device based on CCD detection. The X-ray combination refractor focusing performance test device based on CCD detection comprises a base guide rail, an X-ray light tube, a laser device and an X-ray CCD, wherein the base guide rail, the laser device and the X-ray CCD are longitudinally located on the base guide rail. An adjustment table is located on one side of the base guide rail, the optical axis of the X-ray light tube and the optical axis of the laser device are longitudinally arranged, and the X-ray light tube and the laser device can be transversely and movably installed on the adjustment table; an X-ray combination refractor to be detected is located in the middle of the base guide rail, and the optical axis of the X-ray combination refractor to be detected is longitudinally arranged; the X-ray CCD is located on the other side of the base guide rail, and the optical axis of the X-ray CCD and the optical axis of the X-ray combination refractor are on the same straight line; the exit end of the X-ray light tube or the exit end of the laser device and the incidence end of the X-ray combination refractor to be detected are oppositely arranged, and the exit end of the X-ray combination refractor to be detected and the X-ray CCD are oppositely arranged. The X-ray combination refractor focusing performance test device based on CCD detection is simplified in structure, greatly reduces cost and is good in practicability.

Description

X-ray Combination Refractive Lens Focusing Performance Test Device Based on CCD Detection

technical field

The invention relates to the field of X-ray detection and imaging, in particular to a device capable of measuring the focusing performance of an X-ray combined refraction lens.

Background technique

The X-ray combined refraction lens is a new type of X-ray focusing device based on the refraction effect. Its theoretical focus spot size can reach the nanometer level. The actual test focus spot size is usually several microns, and it has small size, simple manufacturing process, The advantages of good robustness and batch processing are suitable for X-ray detection and imaging systems with high detection resolution; secondly, the X-ray combined refraction lens covers a very wide range of photon energies, so X-ray detection and imaging systems based on it are suitable for In a variety of applications; finally, because it is based on the refraction effect, it does not need to bend the optical path when focusing the X-ray beam, so the formed detection device is compact in structure, small in size and light in weight. In view of the above advantages, X-ray combined refracting lens is expected to be used in many X-ray detection and imaging devices (including X-ray microscope, X-ray microprobe, X-ray diffractometer, X-ray scattering instrument, X-ray reflectometer, X-ray tomography , X-ray projection lithography devices, etc.) have been applied. The focusing performance of the X-ray combined refractor lens is the most important performance as the core device of the X-ray detection and imaging system, so it is extremely important to invent a method and device for measuring the focusing performance of the X-ray combined refractor lens.

Because the X-ray combined refracting lens is a new type of X-ray optical device, so far, there is no special device for testing its focusing performance, and the developer of the device generally tests its focusing performance on a synchrotron radiation beam. Experimental research and verification (Le Zichun, Liang Jingqiu, Dong Wen, et al., Experimental Results of Focusing Performance of High Energy X-ray Combined Lens, Acta Optics Sinica, 2006, 26(2):317-320), but synchrotron radiation is a super-large scientific device , the operation and maintenance cost is extremely expensive, and the machine time is very scarce compared with the demand, which cannot meet the actual test demand.

Contents of the invention

In order to overcome the deficiencies of the existing X-ray composite refraction lens focusing performance testing methods, which are complex in mechanism, expensive in operation and maintenance, and poor in practicability, the present invention provides an X-ray composite refraction lens with simplified structure, reduced cost and good practicability Focus performance testing device.

The technical solution adopted by the present invention to solve its technical problems is:

A CCD detection-based X-ray combination refraction lens focusing performance testing device, including a base guide rail, an X-ray light tube positioned on the base guide rail, a laser and an X-ray CCD, and the base guide rail is longitudinally arranged;

The adjustment table is located on one side of the guide rail of the base, the optical axes of the X-ray light tube and the laser are arranged longitudinally, and the X-ray light tube and the laser are mounted on the adjustment table in a laterally movable manner; The combined ray refracting lens is located in the middle of the base guide rail, and the optical axis of the X-ray combined refracting lens to be detected is arranged longitudinally; the X-ray CCD is located on the other side of the base guide rail, and the light of the X-ray CCD axis and the optical axis of the X-ray combined refracting lens are on the same straight line; the exit end of the X-ray light pipe or laser is opposite to the incident end of the X-ray combined refracting lens to be detected, and the X-ray to be detected The exit end of the ray combination refracting lens is opposite to the X-ray CCD.

Further, the laser is a visible light band laser. For example, He-Ne lasers that emit red light, etc.

The adjustment table is a multi-dimensional precision adjustment table for moving the X-ray light tube and the laser into and out of the optical path.

A first bracket is installed on one side of the base guide rail, and the adjustment platform is installed on the first bracket, and the middle part of the base guide rail is installed to place a second bracket for placing the combined X-ray refracting lens to be detected. The other side of the third support is installed, and the X-ray CCD is installed on the third support.

The first bracket, the second bracket and the third bracket are mounted on the base guide rail in a longitudinally movable manner.

The surface of the X-ray combined refracting lens to be detected is provided with a mark indicating the optical axis.

In the present invention, the longitudinal movement control of the first support on the base guide rail, the lateral movement control of the X-ray light tube and the laser on the adjustment table, and the longitudinal movement control of the second support on the base guide rail , the longitudinal movement control of the third bracket on the guide rail of the base; the above various motion controls can be controlled manually, or by motor control or other driving methods.

In the present invention, the X-ray light tube is used as the light source to construct the test device of the X-ray combined refracting lens, which can not only meet the actual test requirements, but also can explore and develop various X-ray combined refracting lenses based on the X-ray light tube as the light source. A new type of detection and imaging system, so it is of great significance.

The beneficial effects of the present invention are mainly manifested in: 1. Invented a kind of X-ray combination refraction lens focusing performance testing device whose light source is X-ray light pipe, can test the focusing performance of X-ray combination refraction lens conveniently; 2, because The detection light source is a miniaturized X-ray light tube, which can also provide a technical basis for the development of an X-ray detection and imaging system based on the X-ray light tube; 3. The entire device is compact in structure, small in size, light in weight, and easy to use.

Description of drawings

Fig. 1 is the schematic diagram of the present invention based on the X-ray combination refraction lens focusing performance test device of CCD detection, wherein, 1 is X-ray light tube, 2 is laser, 3 is multi-dimensional precision adjustment stage, 4 is X-ray combination refraction lens, 5 Is base guide rail, 6 is X-ray CCD.

Figures 2-1 and 2-2 are the front view and top view of the two-dimensional focusing X-ray combined refractive lens.

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings.

With reference to Fig. 1 and Fig. 2, a kind of X-ray combination refraction lens focusing performance testing device based on CCD detection, comprises base rail 5, X-ray light tube 1 that is positioned on described base rail 5, laser 2 and X-ray CCD6, all The base guide rail 5 is arranged longitudinally;

The adjustment table 3 is located on one side of the base guide rail 5, the optical axes of the X-ray light tube 1 and the laser 2 are arranged longitudinally, and the X-ray light tube 1 and the laser 2 are installed on the adjustment table so that they can move laterally. On the stage 3; the combined X-ray refracting lens 4 to be detected is located in the middle part of the base guide rail 5, and the optical axis of the X-ray combined refracting lens 4 to be detected is arranged longitudinally; the X-ray CCD6 is located on the base guide rail 5 On the other side, the optical axis of the X-ray CCD 6 is on the same straight line as the optical axis of the X-ray combined refracting lens 4; the exit end of the X-ray light tube 1 or laser 2 is combined with the X-ray to be detected The incident end of the refracting lens 4 is arranged oppositely, and the outgoing end of the combined X-ray refracting lens 4 to be detected is arranged oppositely to the X-ray CCD 6 .

Further, the laser 2 is a visible light band laser. For example, He-Ne lasers that emit red light, etc.

The adjustment table 3 is a multi-dimensional precision adjustment table for moving the X-ray light tube and the laser into and out of the optical path.

The first support is installed on one side of the base guide rail 5, the adjustment table 3 is installed on the first support, and the middle part of the base guide rail 5 is installed for placing the second support of the combined X-ray refracting lens 4 to be detected, The other side of the base guide rail 5 is installed with a third support, and an X-ray CCD6 is installed on the third support.

The first bracket, the second bracket and the third bracket are mounted on the base guide rail 5 in a longitudinally movable manner.

The surface of the X-ray combined refracting lens 4 to be detected is provided with a mark indicating the optical axis.

In the present invention, the longitudinal movement control of the first support on the base guide rail, the lateral movement control of the X-ray light tube and the laser on the adjustment table, and the longitudinal movement control of the second support on the base guide rail , the longitudinal movement control of the third bracket on the guide rail of the base; the above various motion controls can be controlled manually, or by motor control or other driving methods.

In this embodiment, the X-ray light tube 1 is used as a light source for emitting X-ray radiation, and the emitted X-ray light is invisible.

The laser 2, as the optical path calibration light source of the present invention, needs to select a laser in the visible light band (such as a He-Ne laser emitting red light), which is used when calibrating the coaxiality of the X-ray light tube, the X-ray combined refracting lens and the X-ray CCD.

The multi-dimensional precision adjustment table 3 is used as a mechanical operation and adjustment mechanism to ensure that the X-ray light tube and the laser are accurately moved in and out of the optical path.

The X-ray light tube 1 and the laser 2 are assembled on the multi-dimensional precision adjustment table 3, and through precise mechanical adjustment, the X-ray light tube and the laser are alternately entered into the optical path. When the laser moves into the optical path, it is in a calibrated state. Utilize visible light to calibrate the optical axis of the X-ray combined refractor lens to coincide with the optical axis of the test device of the present invention; when the X-ray light tube is moved into the optical path, it is in a test state, and the focusing performance of the X-ray combined refractor lens is tested.

The X-ray combined refracting lens 4 is the object to be inspected in the present invention, and its focusing performance is mainly inspected.

The X-ray CCD6 is used for image recording of the light spot, and through computer programming, the recorded light spot image is image-processed to obtain the change curve of the light spot intensity with the number of pixels, and the change curve is the light intensity distribution, light intensity The full width at half maximum (FWHM, fullwidth at half maximum) of the distribution is the size of the spot. Based on this, the focusing performance of the X-ray combined refracting lens is obtained.

The base guide rail 5 is equipped with a plurality of brackets that can translate along the guide rail, and the brackets are used to fix the multi-dimensional precision adjustment table, X-ray combined refracting lens, and X-ray CCD.

The optical axis of the X-ray combined refracting lens 4 to be detected needs to be demarcated in advance, and a mark is made on the surface of the X-ray combined refracting lens along its optical axis. axis.

The X-ray light tube 1 and the laser 2 need to be pre-assembled on the multi-dimensional precision adjustment table, and through the adjustment of two gears, it is ensured that the X-ray light tube and the laser device alternately enter the detection optical path, and the multi-dimensional precision adjustment table It also has the function of fine-tuning the displacement and angle of the X-ray light tube and the laser respectively.

The third support for fixing the X-ray CCD6 has the function of precise translation along the long axis direction of the guide rail, and the translation step length is 0.2-5 mm. The X-ray CCD6 is used for image recording, and the light spot intensity is obtained by image processing the recorded image to obtain the light intensity variation curve with the number of pixels, and the light spot size is obtained by measuring the full width at half maximum of the curve to realize focusing performance detection.

Claims (6)

1. a kind of X-ray combination refraction lens focusing performance testing device based on CCD detection, it is characterized in that: described focusing performance testing device comprises base guide rail, X-ray light tube being positioned at described base guide rail, laser and X-ray CCD, The base rails are arranged longitudinally; The adjustment table is located on one side of the guide rail of the base, the optical axes of the X-ray light tube and the laser are arranged longitudinally, and the X-ray light tube and the laser are mounted on the adjustment table in a laterally movable manner; The combined ray refracting lens is located in the middle of the base guide rail, and the optical axis of the X-ray combined refracting lens to be detected is arranged longitudinally; the X-ray CCD is located on the other side of the base guide rail, and the light of the X-ray CCD axis and the optical axis of the X-ray combined refracting lens are on the same straight line; the exit end of the X-ray light pipe or laser is opposite to the incident end of the X-ray combined refracting lens to be detected, and the X-ray to be detected The exit end of the ray combination refracting lens is opposite to the X-ray CCD. 2. The device for testing the focusing performance of X-ray combined refraction lens based on CCD detection according to claim 1, characterized in that: the laser is a visible light band laser. 3. The X-ray combination refraction lens focusing performance testing device based on CCD detection as claimed in claim 1 or 2, characterized in that: the adjustment table is a multi-dimensional precision adjustment for moving the X-ray light tube and the laser into and out of the optical path tower. 4. The X-ray combined refraction lens focusing performance testing device based on CCD detection as claimed in claim 1 or 2, is characterized in that: a first support is installed on one side of the base rail, and the first support is installed on the first support. An adjustment platform, the middle part of the base guide rail is installed with a second bracket for placing the X-ray combined refracting lens to be detected, and a third bracket is installed on the other side of the base guide rail, and an X-ray CCD is installed on the third bracket. 5. The X-ray combined refraction lens focusing performance testing device based on CCD detection as claimed in claim 1 or 2, characterized in that: the first support, the second support and the third support are longitudinally movable and installed on the on the base rail. 6. The device for testing the focusing performance of X-ray composite refraction lens based on CCD detection according to claim 1 or 2, characterized in that: the surface of the X-ray composite refraction lens to be tested is provided with a mark indicating the optical axis.

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