CN103398686A - Z-axis counterweight device of precision testing platform for large-aperture aspheric optical component - Google Patents
Z-axis counterweight device of precision testing platform for large-aperture aspheric optical component Download PDFInfo
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- CN103398686A CN103398686A CN2013103659637A CN201310365963A CN103398686A CN 103398686 A CN103398686 A CN 103398686A CN 2013103659637 A CN2013103659637 A CN 2013103659637A CN 201310365963 A CN201310365963 A CN 201310365963A CN 103398686 A CN103398686 A CN 103398686A
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Abstract
The invention provides a Z-axis counterweight device of a precision testing platform for a large-aperture aspheric optical component, and relates to a three-coordinate measuring machine. The Z-axis counterweight device comprises a connecting support plate, a guide rail, a slide block, a Z-axis movement component, a measuring head, stay wires, measuring components, a concave slide rail, counterweight components and a control circuit, wherein the guide rail is arranged on the left side of the connecting support plate; the Z-axis movement component is connected with the slide block; the measuring head is arranged on the Z-axis movement component which is connected with the lower ends of the measuring components through a first stay wire; the measuring components are located on the left side of the connecting support plate and comprise a casing, a sensor pressure part and a piezoelectric sensor; the concave slide rail is arranged at the upper end of the connecting support plate; the counterweight components comprise a magnetorheological fluid container, a magnetorheological fluid and a mass block, the magnetorheological fluid container is arranged on the right side of the connecting support plate, the magnetorheological fluid is contained in the magnetorheological fluid container, the mass block is soaked in the magnetorheological fluid, and the upper end of the mass block is connected with the upper end of the casing of the measuring components through a second stay wire which is in slide fit with the concave guide rail; and the control circuit comprises a signal conversion device and an electrode.
Description
Technical field
The present invention relates to three coordinate measuring machine, especially relate to the accurate detection platform Z axis of a kind of aperture aspherical optical elements counter weight device.
Background technology
In three coordinate measuring machine, Z axis often is fixed in vertical direction.For avoiding the Z axis moving component to break gauge head because falling voluntarily, while guaranteeing simultaneously that moving component moves up and down light steadily, reliable and stablize while stopping, needing to add identical with moving component weight, a reverse opposite balance device in the Z-axis mechanism design.In the design of balance device, must guarantee the Z axis moving component when any working position, that the size and Orientation of equilibrant should remain is constant (1, Zhang Guoxiong. three coordinate measuring machine [M], publishing house of University Of Tianjin, 1999,71-76).
Three coordinate measuring machine is in measuring process, the inconsistent steel wire two ends counterweight imbalance that causes of acceleration that Z axis motion assembly when working need to move up and down and produce due to the dissimilar measurement mechanism of replacing or detection platform, make linear electric motors power down on Z axis motion assembly, affected measurement efficiency and the precision of three coordinate measuring machine.In order to guarantee to detect stability and precision, need Real-time Balancing to act on the pulling force at steel wire two ends, thereby reduce to be carried in the power on the dull and stereotyped linear electric motors of Z axis, prevent the appearance of power-down conditions.
Magnetic flow liquid is by high magnetic permeability, the small soft magnetic particles of low magnetic hysteresis and the suspended matter that non-magnetic liquid mixes, and belongs to controlled fluid.Magnetic flow liquid presents low viscous Newtonian fluid characteristic under zero magnetic field condition; When externally-applied magnetic field, originally had the suspending liquid of mobility with " curing "---be fluid viscosity moment change, when magnetic field was large, viscosity was large, and when magnetic field is little, viscosity is little.This character changes and can realize between millisecond, and is reversible, can be applicable to three coordinate measuring machine, realizes the self-adaptation counterweight.
Have not yet to see the relevant accurate detection platform Z axis of the aperture aspherical optical elements counter weight device that utilizes the magnetic flow liquid regulation and control to realize the self-adaptation counterweight.
Summary of the invention
The purpose of this invention is to provide a kind of three coordinate measuring machine that is mainly used in, when the Z axis moving-member during in any working position, can realize Z axis counterweight adaptive equalization, prevent linear electric motors power down on Z axis motion assembly, guarantee to detect the accurate detection platform Z axis of the aperture aspherical optical elements counter weight device of stability and precision.
The present invention is provided with and connects support plate, guide rail, slide block, Z axis motion assembly, gauge head, the first bracing wire, measurement assembly, spill slide rail, balance weight assembly, the second bracing wire and control circuit;
guide rail is located at and is connected the support plate left side, slide block and guide rail are slidably matched, Z axis motion assembly is connected with slide block, gauge head is located on Z axis motion assembly, Z axis motion assembly is connected by the first bracing wire with measuring between the assembly lower end, measure assembly and be positioned at connection support plate left side, measure assembly and comprise housing, cell pressure spare and piezoelectric sensor, cell pressure spare and piezoelectric sensor all are located in housing, cell pressure spare exposes housing and with housing is movable, coordinates, the pressure head of cell pressure spare is pressed on piezoelectric sensor, the spill slide rail is located at and is connected the support plate upper end, balance weight assembly comprises the magnetic flow liquid container, magnetic flow liquid and mass, the magnetic flow liquid container is placed in and connects the support plate right side, magnetic flow liquid is contained in the magnetic flow liquid container, mass immerses in magnetic flow liquid, the mass upper end is connected with the housing upper end of measuring assembly by the second bracing wire, the second bracing wire and spill slide rail are slidably matched, control circuit comprises chromacoder and electrode, the chromacoder input end is electrically connected to piezoelectric sensor, the chromacoder output terminal is electrically connected to electrode, electrode is located at two ends, up and down in the magnetic flow liquid container.
Described the first bracing wire and the second bracing wire preferably are steel wire.
Described chromacoder can comprise A/D converter, single-chip microcomputer, D/A converter and power amplifier; A/D converter input termination piezoelectric sensor output terminal, the A/D converter output terminal connects the single-chip microcomputer input end, single-chip microcomputer output termination D/A converter input end, D/A converter output termination power amplifier input end, power amplifier output terminal receiving electrode.
Compared with the prior art, beneficial effect of the present invention is as follows:
During use, the accurate detection platform Z axis of aperture aspherical optical elements is in vertical direction, Z axis motion assembly is connected with mass by steel wire, added a reverse equilibrant identical with Z axis motion platform weight, guarantee when parts move up and down light steady, reliably stablize while stopping, avoiding main shaft to fall voluntarily and break gauge head.Steel wire slides in concave tracks.The inconsistent steel wire two ends counterweight imbalance that causes of acceleration that Z axis motion assembly when working need to move up and down and produce due to the dissimilar measurement mechanism of replacing or detection platform, make linear electric motors power down on Z axis motion assembly, use the stable mass of gravity can not realize the self-adaptation adjustment that steel wire Z axis motion assembly end power is changed, cause the power that acts on the dull and stereotyped linear electric motors of detection platform Z axis unstable, cause the motor power down, efficiency and precision are measured in impact.For this problem, the present invention proposes is used for the accurate detection platform Z axis of aperture aspherical optical elements counter weight device, can meet the Z axis moving-member when any working position, the power that acts on the dull and stereotyped linear electric motors of Z axis is constant, guarantees the easy motion of not power down of detection platform and Z axis.the present invention comprises sensor and detects, Real-time Feedback, mass is controlled three partial functions, according to the measuring-signal that is connected to piezoelectric sensor between the first and second steel wires, measuring-signal is through the needed voltage signal of chromacoder output electrode, change the magnetic field size by the regulation voltage size, regulate in real time the viscosity of magnetic flow liquid to mass in magnetic flow liquid, utilize magnetic flow liquid viscosity to mass in different magnetic field different, change the stressing conditions of mass in magnetic flow liquid, thereby according to equilibrium of forces, change the acting force of mass to steel wire, balance Z axis motion assembly is because the power of mass change and the indefinite generation of motion brief acceleration changes, thereby reaching the power of control action on the dull and stereotyped linear electric motors of Z axis is constant force, guarantee the easy motion of not power down of detection platform and Z axis.
Description of drawings
Fig. 1 is the surface structure schematic diagram of the embodiment of the present invention.
Fig. 2 is the measurement modular construction schematic diagram of the embodiment of the present invention.
Fig. 3 is the weighted member structures schematic diagram of the embodiment of the present invention.
Fig. 4 is the circuit block diagram of piezoelectric sensor, chromacoder and the electrode of the embodiment of the present invention.
Mark in Fig. 1～4 represents:
The 1-guide rail; The 2-gauge head; 3-Z axle motion assembly; The 4-slide block; The 5-screw; 6-the first steel wire; 7-cell pressure spare; The 8-housing; 9-the second steel wire; 10-spill slide rail; The 11-chromacoder; 12-magnetic flow liquid container cover; 13-magnetic flow liquid container; 14-connects support plate; The 15-piezoelectric sensor; 16-measuring piece lid; The 17-battery lead plate; The 18-magnetic flow liquid; The 19-mass; The 20-A/D converter; The 21-single-chip microcomputer; The 22-D/A converter; The 23-power amplifier.
Embodiment
Referring to Fig. 1～3, the present embodiment is provided with and connects support plate 14, guide rail 1, slide block 4, Z axis motion assembly 3, gauge head 2, the first steel wire 6, measurement assembly, spill slide rail 10, balance weight assembly, the second steel wire 9 and control circuit.
guide rail 1 is located at and is connected support plate 14 left sides, slide block 4 is slidably matched with guide rail 1, Z axis motion assembly 3 is connected with slide block 4, gauge head 2 is located on Z axis motion assembly 3, Z axis motion assembly 3 is connected by the first steel wire 6 with measuring between the assembly lower end, measure assembly and be positioned at connection support plate 14 left sides, measure assembly and comprise housing 8, cell pressure spare 7 and piezoelectric sensor 15, cell pressure spare 7 and piezoelectric sensor 15 all are located in housing 8, cell pressure spare 7 exposes housing 8 and with housing 8 is up and down, coordinates, the pressure head of cell pressure spare 7 is pressed on piezoelectric sensor 15, spill slide rail 10 is located at and is connected support plate 14 upper ends, balance weight assembly comprises magnetic flow liquid container 13, magnetic flow liquid 18 and mass 19, magnetic flow liquid container 13 is located at and is connected support plate 14 right sides, magnetic flow liquid 18 is contained in magnetic flow liquid container 13, mass 19 immerses in magnetic flow liquid 18, mass 19 upper ends are connected with housing 8 upper ends of measuring assembly by the second steel wire 9, the second steel wire 9 is slidably matched with spill slide rail 10, control circuit comprises chromacoder 11 and electrode 17, chromacoder 11 input ends are electrically connected to piezoelectric sensor 15, chromacoder 11 output terminals are electrically connected to electrode 17, electrode 17 is located at two ends, the interior up and down of magnetic flow liquid container 13.
Referring to Fig. 4, described chromacoder 11 comprises A/D converter 20, single-chip microcomputer 21, D/A converter 22 and power amplifier 23; A/D converter 20 input termination piezoelectric sensor 15 output terminals, A/D converter 20 output terminals connect single-chip microcomputer 21 input ends, single-chip microcomputer 21 output termination D/A converter 22 input ends, D/A converter 22 output termination power amplifier 23 input ends, power amplifier 23 output terminal receiving electrodes 17.Mark 5 in Fig. 1 is screw, and mark 12 is the magnetic flow liquid container cover.
the gauge head 2 of the accurate detection platform Z axis of aperture aspherical optical elements self-adaptation counter weight device is contained on Z axis motion assembly 3, and the first steel wire 6 two ends connect respectively Z axis motion assembly 3 and cell pressure parts 15, the second steel wire 9 two ends connect respectively the mass 19 of measuring piece lid 16 and magnetic flow liquid container 13 inside, cell pressure spare 7 acts on piezoelectric sensor 15, mass 19 is immersed in magnetic flow liquid 18, electrode 17 is installed on the two ends up and down of magnetic flow liquid container 13, the second steel wire 9 slides in spill slide rail 10, guarantee that the second steel wire 9 slides more steady, in indefinite or Z axis motion assembly 3 motion processes of gauge head 2 quality on Z axis motion assembly 3, acceleration of motion changes the variation that causes the first steel wire 6 acting forces, acting force changes easily makes the power on Z axis exercise stress linear electric motors that acts on go beyond the scope, cause the motor power down, affect accuracy of detection, apparatus of the present invention are by the force signals of piezoelectric sensor 15 Real-time Collection Z axis motion assemblies, by chromacoder 11, force signals is converted to voltage signal V, real-time regulation output signal controlling electrode both end voltage V, thereby control the magnetic field at magnetic flow liquid container 13 interior battery lead plate 17 two ends, magnetic fields is in magnetic flow liquid 18, present low viscous Newtonian fluid characteristic under zero magnetic field condition, when magnetic field is large, viscosity is large, when magnetic field is little, viscosity is little, utilize magnetic flow liquid 18 viscosity to mass 19 in different magnetic field different, change the stressing conditions of mass 19 in magnetic flow liquid 18, thereby change the acting force of 19 pairs of the second steel wires 9 of mass according to equilibrium of forces, balance Z axis motion assembly 3 is because the power of mass change and the indefinite generation of motion brief acceleration changes, guarantee that the power of final control action on Z axis exercise stress linear electric motors is constant force.Sensor is piezoelectric transducer 15, by chromacoder 11(as shown in Figure 4), wherein piezoelectric sensor 15 is output as voltage signal V, process and be converted into digital signal through A/D converter 20, be input to single-chip microcomputer 21, simultaneously single-chip microcomputer 21 outputs are with input signal, being the output digit signals of specific function relation, through D/A converter 22, output signal is converted into analog voltage signal, operational amplifier 23 exports analog voltage signal V to battery lead plate 17.Chromacoder 11 is fixed in web joint 14 tops; The relationship between quality of mass 19 and Z axis motion assembly 3 and gauge head 2 need be considered friction, buoyancy and second steel wire 9 force of sliding friction on spill slide rail 10 of magnetic flow liquid under zero magnetic field between guide rail and slide block, steel wire movement on spill slideway 10 can guarantee that steel wire is stressed steadily, improves and measures accuracy of detection; The character of magnetic flow liquid 18 changes and can realize between millisecond, and be reversible, namely this instantaneity and reversibility are applied to the accurate detection platform Z axis of aperture aspherical optical elements self-adaptation counter weight device, realize no matter the accurate detection platform Z axis of aperture aspherical optical elements moving-member is when any working position, change mass 19 acts on the power on the second steel wire 9 in real time, thereby guarantee that the power on the dull and stereotyped linear electric motors of Z axis is constant force, reach in the adaptive equalization of the accurate detection platform Z axis of aperture aspherical optical elements counter weight device.
Claims (3)
1. the accurate detection platform Z axis of aperture aspherical optical elements counter weight device, it is characterized in that, be provided with and connect support plate, guide rail, slide block, Z axis motion assembly, gauge head, the first bracing wire, measurement assembly, spill slide rail, balance weight assembly, the second bracing wire and control circuit;
guide rail is located at and is connected the support plate left side, slide block and guide rail are slidably matched, Z axis motion assembly is connected with slide block, gauge head is located on Z axis motion assembly, Z axis motion assembly is connected by the first bracing wire with measuring between the assembly lower end, measure assembly and be positioned at connection support plate left side, measure assembly and comprise housing, cell pressure spare and piezoelectric sensor, cell pressure spare and piezoelectric sensor all are located in housing, cell pressure spare exposes housing and with housing is movable, coordinates, the pressure head of cell pressure spare is pressed on piezoelectric sensor, the spill slide rail is located at and is connected the support plate upper end, balance weight assembly comprises the magnetic flow liquid container, magnetic flow liquid and mass, the magnetic flow liquid container is placed in and connects the support plate right side, magnetic flow liquid is contained in the magnetic flow liquid container, mass immerses in magnetic flow liquid, the mass upper end is connected with the housing upper end of measuring assembly by the second bracing wire, the second bracing wire and spill slide rail are slidably matched, control circuit comprises chromacoder and electrode, the chromacoder input end is electrically connected to piezoelectric sensor, the chromacoder output terminal is electrically connected to electrode, electrode is located at two ends, up and down in the magnetic flow liquid container.
2. the accurate detection platform Z axis of a kind of aperture aspherical optical elements as claimed in claim 1 counter weight device, is characterized in that, described the first bracing wire and the second bracing wire are steel wire.
3. the accurate detection platform Z axis of a kind of aperture aspherical optical elements as claimed in claim 1 counter weight device, is characterized in that, described chromacoder comprises A/D converter, single-chip microcomputer, D/A converter and power amplifier; A/D converter input termination piezoelectric sensor output terminal, the A/D converter output terminal connects the single-chip microcomputer input end, single-chip microcomputer output termination D/A converter input end, D/A converter output termination power amplifier input end, power amplifier output terminal receiving electrode.
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| CN201310365963.7A CN103398686B (en) | 2013-08-20 | 2013-08-20 | A kind of aperture aspherical optical elements Precision measurement platform Z axis counter weight device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107491094A (en) * | 2017-07-04 | 2017-12-19 | 苏州博众精工科技有限公司 | A kind of method of real-time accurate balance Z axis weight |
| CN107543511A (en) * | 2016-06-29 | 2018-01-05 | 大族激光科技产业集团股份有限公司 | The flatness detecting system and its method of a kind of PCB equipment workbench |
| CN111324089A (en) * | 2020-03-04 | 2020-06-23 | 河源市凯航自动化科技有限公司 | Numerical control program converter of three-coordinate measuring machine |
| CN113785194A (en) * | 2019-04-23 | 2021-12-10 | 诺沃皮尼奥内技术股份有限公司 | Sensor arrangement and method for measuring fouling and/or erosion and machine for monitoring fouling and/or erosion |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107543511A (en) * | 2016-06-29 | 2018-01-05 | 大族激光科技产业集团股份有限公司 | The flatness detecting system and its method of a kind of PCB equipment workbench |
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| CN113785194A (en) * | 2019-04-23 | 2021-12-10 | 诺沃皮尼奥内技术股份有限公司 | Sensor arrangement and method for measuring fouling and/or erosion and machine for monitoring fouling and/or erosion |
| CN113785194B (en) * | 2019-04-23 | 2023-11-17 | 诺沃皮尼奥内技术股份有限公司 | Sensor arrangement and method for measuring scale and/or corrosion and machine for monitoring scale and/or corrosion |
| CN111324089A (en) * | 2020-03-04 | 2020-06-23 | 河源市凯航自动化科技有限公司 | Numerical control program converter of three-coordinate measuring machine |
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