CN103365266A - Agent-based distributed intelligent photoetching equipment - Google Patents
Agent-based distributed intelligent photoetching equipment Download PDFInfo
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Abstract
The invention provides an Agent-based distributed intelligent photoetching device which needs to be integrated into various photoetching devices for use. When the device is actually used, the local workstation accesses a technical parameter library in a remote server through an Internet remote access technology, retrieves all parameters meeting technical indexes, downloads and automatically loads the parameters into the device, and realizes control over photoetching; the equipment can also record various indexes of the machine in operation in real time through the sensor, the indexes are transmitted to a local workstation through WIFI, the best matching parameters are retrieved, the matching result is transmitted to embedded equipment distributed in the machines, and the equipment performs corresponding operation according to the received data. The invention can effectively avoid the mutual influence and restriction among all photoetching steps, ensure the optimal photoetching effect, stabilize the photoetching effect, realize the quick matching of parameter indexes of new technology, share data and maximize the resource utilization, and has high intelligent degree and very convenient and quick use.
Description
Technical field
The present invention relates to the embedded intelligence lithographic equipment, particularly relates to a kind of distributed intelligence lithographic equipment of Agent-base, belongs to the nano-device manufacturing technology field in VLSI (very large scale integrated circuit) manufacturing and the optics Micrometer-Nanometer Processing Technology.
Background technology
Microelectronic industry has now become affects national income, the key factor of national defense safety.A most important link is the photoetching flow process in the microelectronic chip manufacturing process, this flow process is by even glue, exposure, three the large steps of developing form, each step is carried out in order successively, the technical parameter in each step all can have influence on last lithographic results, and the technical parameter in each step can restrict or be limited by the technical parameters in other each step and choose, so the Rational choice of technical parameter just becomes a very important problem.
Have between this, every generation microelectronics production line all needs to spend almost 1/3 expense choosing for technological parameter.Existing various lithographic equipments are fully independent, each lithography step independently carries out, cause choosing fully by experience and groping of technological parameter, a large amount of human and material resources and the financial resources of whole process waste, and the process of choosing of technological parameter to operating personnel require high;
In addition, if change photoetching technique, former technical parameter will all lose efficacy, operating personnel need expensive manpower to test, and find out the technological parameter that meets new technology, the time-consuming length of whole process, and can't guarantee that the result who obtains at last is best, have a strong impact on efficient and the effect of photoetching.
Summary of the invention
The technology of the present invention is dealt with problems: overcome the expensive and inefficient shortcoming of prior art, a kind of distributed intelligence lithographic equipment of Agent-base is provided, this equipment can effectively be avoided influencing each other and restricting between each lithography step, guarantee best lithographic results, make lithographic results stable, realize the parameter index Rapid matching of new technology, data sharing, utilization of resources maximization, and this device intelligence degree is high, very easy to use quick.
The technology of the present invention solution: a kind of distributed intelligence lithographic equipment of Agent-base comprises: embedded device, WIFI, local work station and a plurality of lithographic equipment; Embedded device is by the Internet remote access technology and two system's executed in parallel of LAN data transmission technology, complementally completing technology parameter matching task;
Described technical parameter matching process is:
Step S01: database and parameter model that local work station obtains upgrading by the Internet remote access technology;
Step S02: local work station transfers to the process parameter models that upgrades embedded device and automatically is loaded into program by WIFI;
Step S03: the process parameter models that built-in equipment operation upgrades, carry out the real-time parameter coupling by the LAN data transmission technology to the lithography step of each lithographic equipment;
Step S04: matching parameter is transferred in real time the embedded device that is distributed in each lithographic equipment;
Step S05: embedded device carries out corresponding true-time operation according to the data that receive to each lithographic equipment.
The Internet remote access technology step is as follows among the described step S01:
(1.1) user fills in the new technology parameter index form that carries in the embedded device;
(1.2) by the built-in algorithm of embedded device the data form of filling in is generated the basic parameter data target automatically;
(1.3) transfer to local work station by WIFI, and search for therein;
(1.4) if there is the technological parameter of coupling, forward (1.7) to, otherwise local work station can automatically link to far-end server by the Internet, and the basic parameter data target that generates is transferred to remote server;
(1.5) remote server carries out data retrieval with the parameter that the data preparation that receives becomes searching database to need according to parameter;
(1.6) be the transmission of data with the data preparation that retrieves, by the Internet with data transmission to local work station;
(1.7) local work station by WIFI with data transmission to the embedded device that is distributed in the various machines, this embedded device is loaded into the data that receive in the program automatically, the program of upgrading by operation realizes the control to photoetching.
LAN data transmission technology step is as follows among the described step S03:
(3.1) system starts, local work station and this embedded device initialization, and the sensor on this embedded device detects the operational factor of machine in real time in the whole service process afterwards;
(3.2) integration algorithm that is built on this embedded device is analyzed the parameter that detect in real time in a large number and put in order, and its arrangement is key parameter;
(3.3) key parameter is transferred to local work station by WIFI;
(3.4) local work station is according to key parameter, utilize data retrieval to carry out parameter matching, if there is not the matching value of this parameter in the indigenous technique parameter library, then at first access far-end server and carry out parameter search, if there is not the coupling of this parameter in the far-end server yet, then local work station utilizes built-in interpolation algorithm that parameter is mated, and provides recommended value;
(3.5) the local work station final matching parameter arrangement that will obtain is the transmission of data, by WIFI with data transmission to the embedded device that is distributed in each machine;
(3.6) in program, program is sent action command to each hardware to this embedded device with the Data Integration that receives, realizes the control to individual machine;
Wherein, the hardware design of this equipment comprises:
A) the built-in (SuSE) Linux OS of microprocessor is with core board bus transmitted in both directions;
B) can match 7 cun four-wire ohm touch-screen, with feature board bus transmitted in both directions;
C) the configuration standard serial ports is one, is used for program debug, with feature board bus transmitted in both directions;
D) four USB main interfaces, control chip is AU925A21, with feature board bus transmitted in both directions;
E) USB is used for program debug and download from interface, is one-way transmitted to the feature board bus;
F) integrating WIFI module is used for realizing the LAN data transmission, with feature board bus transmitted in both directions;
G) adopt Special reset chip MAX811 that system is resetted, be one-way transmitted to the feature board bus;
H) integrated temperature sensor, speed pickup, humidity sensor, acceleration transducer, the several standard transducers of pressure transducer are one-way transmitted to the feature board bus;
I) be furnished with the SD draw-in groove, be used for Memory Extension, with feature board bus transmitted in both directions;
J) the feature board bus is connected by system bus with the core board bus;
The present invention's beneficial effect compared with prior art is:
(1) the present invention can effectively avoid influencing each other and restricting between each lithography step, guarantee best lithographic results, make lithographic results stable, realize the parameter index Rapid matching of new technology, data sharing, utilization of resources maximization, and this device intelligence degree is high, very easy to use quick.
(2) the present invention can guarantee that each lithographic results is best, and lithographic results is not because of the people; Can mate timely and effectively other technological parameters when deviation appears in the machine operation, fault-tolerant power is extremely strong; This equipment makes this photoetching full automation, reduces the error that manual operation causes; Intelligent degree is high, has greatly improved the convenience of this equipment.
(3) the present invention can be when technology innovation, and with prestissimo remote access remote server, search technological parameter storehouse operated as long as once have similarly, and equipment can match the required technical parameter of improvement technology; This equipment can be automatically revised the user or the new technology parameter of adding is uploaded to remote server simultaneously, makes things convenient for other users to use, whole process implementation data sharing, utilization of resources maximization.
In a word, the present invention has realized automatic transmission and the coupling of technical parameter between each step by network technology, the calculating of every optimal processing parameter value, and parameter value can be loaded into this embedded device automatically; After the change technology, this embedded device can go out with the fastest speeds match the required various technological parameters of new technology.This embedded device can guarantee that each lithographic results is best, lithographic results is not because of the people, match the required technical parameter of improvement technology with prestissimo, realize data sharing, utilization of resources maximization, and this equipment development compatibility is good, with low cost, travelling speed is fast, and intelligent degree is high, have high operational efficiency, be easy to use quick.
Description of drawings
Fig. 1 is general structure schematic diagram of the present invention;
Fig. 2 is the structural drawing of embedded device hardware configuration among the present invention;
Fig. 3 is general steps schematic diagram of the present invention;
Fig. 4 is access to the Internet step schematic diagram among the present invention;
Fig. 5 is LAN data transmission technology step schematic diagram among the present invention.
Wherein:
1 embedded device, 2WIFI, 3 local work stations, 4 the Internets, 5 remote servers, 6 microprocessors, 7DDR2,8NorFlash, 9NandFlash, 10USB module, 11 debug serial ports, 12 touch screen modules, 13 humidity sensors, the 14SD card module, 15 speed pickups, 16 temperature sensors, 17 pressure transducers, 18 acceleration transducers, 19 real-time clock modules.
Embodiment
For making the present invention easier to understand, the present invention is further elaborated in conjunction with an example, but this embodiment does not consist of any limitation of the invention.
As shown in Figure 1, the present invention is based on the distributed intelligence lithographic equipment of Agent, comprise embedded device 1, WIFI2, local work station 3 and a plurality of lithographic equipment; Parameter matching work relies on the Internet remote access technology and LAN data transmission technology to realize.Wherein, the Internet remote access technology is responsible for finishing to the renewal of the local data base in the local work station 3 and is replenished; The LAN data transmission technology is responsible for finishing between each embedded device 1 and the transmission of the supplemental characteristic between embedded device 1 and the local work station 3.
As shown in Figure 3: implementation step of the present invention is as follows:
Step S01: the data that local work station 3 is manually inputted according to the user generate standard list form, be the supplemental characteristic that meets the J2EE agreement with the parameter extraction in the standard list by integration algorithm, by remote access technology access remote server 5, automatically retrieve the parameters index that meets new technology in the technical parameter storehouse in remote server, then download to local work station
Step S02: local work station 3 carries out decompress(ion) with the packet that receives, isolate the data of upgrading local data base and the process parameter models that need to be loaded in the embedded device 1, use the data of upgrading local data base that local data base is upgraded, need are loaded into the data that process parameter models in the embedded device 1 is converted to the XML form, transfer to embedded device by WIFI2, embedded device 1 carries out decompress(ion) and installation after receiving the transmission of data, make the data of renewal be loaded into program;
Step S03: embedded device 1 operation fuel charge has the program of new technology parameter model, the sensor 13-18 that starts on the embedded device carries out Real-Time Monitoring to every photoetching parameter index, and the data transmission that every enforcement is monitored by the LAN data transmission technology is to local work station 3, and the lithography step to each lithographic equipment in the station 3 that works in this locality carries out the real-time parameter coupling;
Step S04: local work station 3 is converted to the matching parameter that retrieves the data of XML form, transfers in real time the embedded device 1 that is distributed in each lithographic equipment by WIFI2;
Step S05: after embedded device 1 receives matching parameter, in conjunction with executed step, analyze by built-in process parameter models, the parameters that to carry out step is made amendment and upgraded in time, carry out data transmission by serial ports again and can carry out corresponding true-time operation to each lithographic equipment.
As shown in Figure 2: embedded hardware structure of the present invention is as follows:
A) the S5PV210 chip of main control chip 6 employing Samsungs is as microprocessor, and built-in (SuSE) Linux OS is with core board bus transmitted in both directions;
B) can match 7 cun four-wire ohm touch-screen, the resolving power of demonstration is 800*600, adopts 40 pin FFC soft arranging wires to connect, with feature board bus transmitted in both directions;
C) the configuration standard serial ports is 11 1, is used for program debug, with feature board bus transmitted in both directions;
D) four USB10 main interfaces, one of them is used for and Control card carries out data communication, and all the other four are used for expansion board clamping, direct integrated data collecting card based on various sensors, control chip is AU925A21, with feature board bus transmitted in both directions;
E) USB0 is used for program debug and download from interface, is one-way transmitted to the feature board bus;
F) integrating WIFI module is used for realizing the LAN data transmission, with feature board bus transmitted in both directions;
G) adopt Special reset chip MAX811 that system is resetted, be one-way transmitted to the feature board bus;
H) integrated temperature sensor 16, speed pickup 15, and humidity sensor 13, acceleration transducer 18, pressure transducer 17 several standard transducers are one-way transmitted to the feature board bus, if the user also needs other sensors, can be undertaken integrated by USB interface;
I) be furnished with SD draw-in groove 14, the maximum SD card of supporting 4G is used for Memory Extension, with feature board bus transmitted in both directions;
J) the feature board bus is connected by system bus with the core board bus;
Remote access technology in step S01 is a major issue of renewal and shared data bank, and here, the present invention has adopted the network communication mode based on the J2EE agreement, and as shown in Figure 4, the specific implementation step is as follows:
(1.1) when technology innovation occurring, the basic underlying parameter index of user's new technology that system for filling carries on embedded device 1 form, wherein important parameter must be filled in for the user, and all the other non-important parameters can use the default value of system or adopt the parameter of generally using;
(1.2) by embedded device 1 built-in algorithm the basic underlying parameter index of the new technology of filling in form is extracted as the basic parameter achievement data, use afterwards built-in integration algorithm the basic parameter achievement data to be converted into the data layout that meets the J2EE agreement, the data communication device based on the J2EE agreement that then will generate is crossed LAN (Local Area Network) and is transferred to local work station 3;
(1.3) local work station 3 becomes the data preparation based on J2EE that receives the parameter of searching database needs after finishing receiving, and carries out data retrieval according to parameter in database;
(1.4) if there is the technological parameter of coupling, forward (1.7) to, otherwise local work station 3 can automatically link to far-end server 4 by the Internet 4, and will cross LAN (Local Area Network) based on the data communication device of J2EE agreement and transfer to remote server 5;
(1.5) local work station 3 is after finishing receiving, and then the parameter that the data preparation based on J2EE that at first will receive becomes searching database to need retrieves matching parameter in the remote server 5;
(1.6) last far-end server 5 for the transmission of data based on J2EE, is back to local work station 3 by the Internet 4 with data with the data preparation that retrieves;
(1.7) local work station 3 is loaded into data in the program automatically, calculate the optimum value of parameters, command string is transferred to the equipment 1 that is distributed in each machine by WIFI2, equipment 1 is brought parameter in the algorithm into, the program that operation is upgraded drives hardware, realizes the control to photoetching;
LAN data transmission technology in step S03 is to realize that lithographic equipment intercoms mutually and an important difficult problem of Based Intelligent Control, and here, the present invention has adopted the distributed intelligence control method of Agent-base, and as shown in Figure 5, the specific implementation step is as follows:
(3.1) embedded device 1 need to be built in the various lithographic equipments, and can control lithographic equipment by serial ports or other communication modes.Realize the dialogue of equipment room between each embedded device 1 by WIFI2, and carry out data communication by WIFI2 and local work station 3, local work station 3 can be coordinated the various device in the whole photoetching flow process.When system starts, local work station 3 and the embedded device initialization that is built in each machine;
(3.2) after initialization is finished, allow the user to operate, carrying out along with the photoetching flow process, embedded device 1 beginning is monitored every machine operational factor in real time, in Monitoring Data, the parameter that embedded device 1 needs to have monitored is analyzed and is put in order, is several key parameters with a large amount of real-time data reductions, afterwards these several key parameters is converted into the transmitted data on network of XML form;
(3.3) embedded device transfers to local work station 3 with the transmitted data on network of XML form by WIFI;
(3.4) local work station 3 is selected a kind of processing parameter matching of carrying out in three kinds of methods (retrieval local data base, access and retrieval remote server 5 use difference arithmetic) according to the transmitted data on network that receives, and obtains matching parameter;
Here, choosing a kind of method from three kinds of methods, to carry out the system of selection of processing parameter matching as follows: local work station 3 is according to behind the transmitted data on network that receive, at first utilize built-in algorithm in local data base, to carry out parameter search, if do not have matching parameter in the built-in database of local work station, the line parameter retrieval of going forward side by side of 3 of local work stations access remote server 5, if there is not the match information of this parameter in the parameter database of far-end server 5 yet, 3 of local work stations utilize interpolation algorithm that parameter is mated, obtain the most at last matching parameter, the process flow diagram of selection can be referring to 3.4 among Fig. 5;
(3.5) the local work station 3 final matching parameter arrangement that will obtain be the transmitted data on network of XML form, transfers data to the embedded device 1 that is distributed in each machine by WIFI2, realization integrated scheduling and control;
(3.6) transmitted data on network of the XML form that receives of 1 pair of embedded device carries out format conversion and installation, and technological parameter is incorporated in the program, sends action command by program implementation to each hardware, realizes the control to various lithographic equipments 1.
The content that the present invention does not elaborate adopts the known technology of this area.
Although the above is described the illustrative embodiment of the present invention; so that the technician of present technique neck understands the present invention; but should be clear; the invention is not restricted to the scope of embodiment; to those skilled in the art; as long as various variations appended claim limit and the spirit and scope of the present invention determined in, these variations are apparent, all utilize innovation and creation that the present invention conceives all at the row of protection.
Claims (4)
1. the distributed intelligence lithographic equipment of an Agent-base is characterized in that comprising: embedded device, WIFI, local work station and a plurality of lithographic equipment; Embedded device is by the Internet remote access technology and two system's executed in parallel of LAN data transmission technology, complementally completing technology parameter matching task; Described technical parameter matching process is:
Step S01: database and parameter model that local work station obtains upgrading by the Internet remote access technology;
Step S02: local work station transfers to the process parameter models that upgrades embedded device and automatically is loaded into program by WIFI;
Step S03: the process parameter models that built-in equipment operation upgrades, carry out the real-time parameter coupling by the LAN data transmission technology to the lithography step of each lithographic equipment;
Step S04: matching parameter is transferred in real time the embedded device that is distributed in each lithographic equipment;
Step S05: embedded device carries out corresponding true-time operation according to the data that receive to each lithographic equipment.
2. the distributed intelligence lithographic equipment of Agent-base according to claim 1, it is characterized in that: the Internet remote access technology is achieved as follows among the described step S01:
(1.1) user fills in the new technology parameter index form that carries in the embedded device;
(1.2) by the built-in algorithm of embedded device the data form of filling in is generated the basic parameter data target automatically;
(1.3) transfer to local work station by WIFI, and search for therein;
(1.4) if there is the technological parameter of coupling, forward (1.7) to, otherwise local work station can automatically link to far-end server by the Internet, and the basic parameter data target that generates is transferred to remote server;
(1.5) remote server carries out data retrieval with the parameter that the data preparation that receives becomes searching database to need according to parameter;
(1.6) be the transmission of data with the data preparation that retrieves, by the Internet with data transmission to local work station;
(1.7) local work station by WIFI with data transmission to the embedded device that is distributed in the various machines, this embedded device is loaded into the data that receive in the program automatically, the program of upgrading by operation realizes the control to photoetching.
3. the distributed intelligence lithographic equipment of Agent-base according to claim 1, it is characterized in that: the LAN data transmission technology is achieved as follows among the described step S03:
(3.1) system starts, local work station and this embedded device (1) initialization, and the sensor on this embedded device detects the operational factor of machine in real time in the whole service process afterwards;
(3.2) integration algorithm that is built on this embedded device is analyzed the parameter that detect in real time in a large number and put in order, and its arrangement is key parameter;
(3.3) key parameter is transferred to local work station by WIFI;
(3.4) local work station is according to key parameter, utilize data retrieval to carry out parameter matching, if there is not the matching value of this parameter in the indigenous technique parameter library, then at first access far-end server and carry out parameter search, if there is not the coupling of this parameter in the far-end server yet, then local work station utilizes built-in interpolation algorithm that parameter is mated, and provides recommended value;
(3.5) the local work station final matching parameter arrangement that will obtain is the transmission of data, by WIFI with data transmission to the embedded device that is distributed in each machine;
(3.6) in program, program is sent action command to each hardware to this embedded device with the Data Integration that receives, realizes the control to individual machine.
4. the distributed intelligence lithographic equipment of Agent-base according to claim 1, it is characterized in that: the hardware configuration of described embedded device (1) comprising:
Microprocessor is with core board bus transmitted in both directions;
Electric resistance touch screen is with feature board bus transmitted in both directions;
Debug serial port is used for program debug, with feature board bus transmitted in both directions;
Four USB main interfaces, be respectively applied to integrated circuit board expansion with the communicating by letter of Control card, with feature board bus transmitted in both directions;
A USB is used for program debug and download from interface, is one-way transmitted to the feature board bus;
Adopt professional reset chip MAX811 that motherboard is resetted, be one-way transmitted to the feature board bus;
Built-in WIFI module is used for the LAN data transmission, with core board bus transmitted in both directions;
Integrated temperature sensor, speed pickup, humidity sensor, acceleration transducer and pressure power sensor are one-way transmitted to the feature board bus;
Is furnished with the SD draw-in groove, with feature board bus transmitted in both directions;
The feature board bus is connected by system bus with the core board bus.
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| CN110062274A (en) * | 2019-04-30 | 2019-07-26 | 深圳市迅雷网络技术有限公司 | A kind of video file caching method, device, equipment and readable storage medium storing program for executing |
| CN115740786A (en) * | 2022-12-13 | 2023-03-07 | 深圳智赛机器人有限公司 | Cutting process correction method based on dicing saw online detection data |
| CN115740786B (en) * | 2022-12-13 | 2024-09-03 | 深圳智赛精密装备有限公司 | Cutting process correction method based on online detection data of dicing saw |
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