CN103336026A - Polymer piezoelectric gas sensor system for detecting gases - Google Patents
Polymer piezoelectric gas sensor system for detecting gases Download PDFInfo
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- CN103336026A CN103336026A CN2013102150719A CN201310215071A CN103336026A CN 103336026 A CN103336026 A CN 103336026A CN 2013102150719 A CN2013102150719 A CN 2013102150719A CN 201310215071 A CN201310215071 A CN 201310215071A CN 103336026 A CN103336026 A CN 103336026A
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Abstract
The invention provides a polymer piezoelectric gas sensor system for detecting gases. The system comprises a gas passing pipe, a magnetic valve, a filter, a thermostatic chamber, a gas sensor array, a micro-compressor, a frequency meter and a control computer. The gas passing pipe is connected with the magnetic valve, the thermostatic chamber and the micro-compressor successively. The magnetic valve is connected with the filter. The sensor array is arranged in the thermostatic chamber. The sensor array is connected with the frequency meter through a wire. The frequency meter is connected with the control computer. The polymer piezoelectric gas sensor system can detect complex gases, and is advantaged by small size, low power consumption, strong applicability for detecting different gases and good selectivity. By utilizing the electron beam scattering method, thin polymer films are deposited on a quartz wafer, and the thickness of thin films and the uniformity of surfaces of the thin films can be controlled accurately. The system has advantages of simple and rapid operations and wide applicability, detections are qualitative but not quantitative, and the system is suitable for large-scale primary screening.
Description
Technical field
The invention belongs to the gas sensor technical field, especially relate to a kind of polymer piezo gas sensor system that detects gas.
Background technology
Gas sensing detects at air environmental pollution, and fields such as inflammable, explosive, poisonous harmful gas detection, robot medical diagnosis on disease and military affairs all have broad application prospects.At present the gas of using passes that just to have got up mainly be that electricity is led control and done (having the body electricity to lead two kinds of control type and surface conductance control types), be the gas sensor of CN114655A as publication number, its structure mainly comprise layer of metal oxide gas sensory (as ZnO, SnO
2Deng) and a well heater, its principle be according to the oxidation-reduction quality of gas gas sensory surperficial betatopic character, realize the detection of gas content, this class gas sensor need be heated to about 300 ℃ of ability and guarantee carrying out smoothly of redox reaction.Therefore there is following drawback in this class gas sensor: one, need heating and temperature controlling device, and increased the volume of sensor, power consumption and complexity: inconvenience is made of existing microelectronic technique; Two, integrated level is not high, because higher heating-up temperature makes the difficulty that signal processing circuit and sensor are integrated in same substrate strengthen; Three, the most of organic gas more weak to oxidation-reduction quality, sensitivity is not high.Therefore, development is easy to integrated and produces in batches, and volume is little, need not to heat, low in energy consumption, the new polymers piezo gas sensor that can detect multiple organic gas, has realistic meanings.
The polymer piezo gas sensor can be widely used in the investigation of industrial production sector (as drinks, tobacco, cosmetics, food industry, petrochemical complex, grain storage and processing etc.) and danger (as explosive, drugs and other scarf article etc.), and its development is significant for effective development of domestic each industry of China.
Summary of the invention
The purpose of this invention is to provide a kind of polymer piezo gas sensor system that detects gas, sensor construction of the present invention is simple, volume is little, be easy to integrated and batch process, need not heating during work, low in energy consumption, need not professional's operation, and can detect multiple organic gas, detect qualitative and non-quantitative, be fit to extensive primary dcreening operation.
Realize a kind of polymer piezo gas sensor system that detects gas of the object of the invention, comprise gas siphunculus, solenoid valve, filtrator, constant temperature enclosure, gas sensor array, micro-compressor, frequency meter, control computing machine, wherein said gas siphunculus is connected with solenoid valve, constant temperature enclosure, micro-compressor successively, described solenoid valve is connected with filtrator, in the described constant temperature enclosure sensor array is set, described sensor array is connected by lead with described frequency meter, and described frequency meter connects the control computing machine.
Described sensor array is made up of 8 gas sensors that are coated with different thin polymer films.
Described gas sensor comprises matrix, twines lead around the described matrix, is connected with frequency meter, and described matrix upper and lower surface is coated with thin polymer film.
Described matrix is conglobate piezoelectric quartz substrate for radiotelegraphy AT cuts.
Described polymer thin film thickness is 0.01-100 μ m.
Described thin polymer film is by electron gun the electron beam of 500-2000 ev energy to be acted on polymkeric substance, utilizes vacuum electron beam chromatic dispersion coating technique with the upper and lower surface of polymkeric substance evaporation at described matrix.
Described 8 kinds of thin polymer films are respectively Polyvinylchloride, polyamide, tygon teflon, poly-trimethyl silicane-1-propine, dinonyl phthalate, tygon glycol, tetramethylene sulfone, silica gel material.
Adopt beneficial effect of the present invention: the present device microminiaturization, cheap, simple to operate, quick, widely applicable, need not the professional operate; Detect qualitative and non-quantitative, be fit to extensive primary dcreening operation.
Description of drawings
Fig. 1 is the synoptic diagram of the polymer piezo gas sensor system course of work of the present invention
Fig. 2 is the synoptic diagram of polymer piezo gas sensor system cleaning process of the present invention
Fig. 3 is the enlarged drawing of gas sensor
Fig. 4 is the side view of gas sensor
Embodiment
Specifically narrate technical scheme of the present invention below in conjunction with accompanying drawing:
As Fig. 1,2, be respectively the work of polymer piezo gas sensor system of the present invention and the synoptic diagram of cleaning process, comprise gas siphunculus 1, solenoid valve 2, filtrator 3, constant temperature enclosure 4, gas sensor array 5, micro-compressor 6, frequency meter 7, control computing machine 8, wherein said gas siphunculus 1 successively with solenoid valve 2, constant temperature enclosure 4, micro-compressor 6 connects, described solenoid valve 2 is connected with filtrator 3, in the described constant temperature enclosure 4 sensor array 5 is set, described sensor array 5 is connected by lead 9 with described frequency meter 7, and described frequency 7 connects control computing machine 8.
Described sensor array is made up of 8 gas sensors that are coated with different thin polymer films.
As Fig. 3,4, institute's gas sensor comprises matrix 11, and described matrix twines lead 9, is connected with frequency meter, and described matrix 11 upper and lower surfaces are coated with thin polymer film 12, and lead 9 is between thin polymer film 12 and matrix 11 among Fig. 3.
Described matrix is circular piezoelectric quartz substrate, forms by radiotelegraphy AT cutting, and this quartz substrate diameter is 8mm.Described 8 kinds of thin polymer films are respectively Polyvinylchloride, polyamide, tygon teflon, poly-trimethyl silicane-1-propine, dinonyl phthalate, tygon glycol, tetramethylene sulfone, silica gel material.By electron gun the electron beam of 1000 ev energies is acted on polymkeric substance, evaporations are in the upper and lower surface of 8 quartz substrates respectively with 8 kinds of polymkeric substance to utilize vacuum electron beam chromatic dispersion coating technique, and the polymer thin film thickness is 10 μ m in the present embodiment.Quartz substrate thickness is more little, and resonance frequency is more high, and sensitivity is more high, and thin polymer film affinity type reaction is more strong, and it is more accurate to detect, and selects for use different thin polymer films can detect gas without type.
Set up the correct mathematics identification model of measured matter then, adopt advanced algorithm for pattern recognition, for sensor is worked out out suitable work identification program.By intersecting recognition principle, make up array system, for system works out out suitable work identification program.
The thin polymer film that uses among the present invention can be selected for use variously has the polymeric material of compatible host response to specific gas, as the corresponding dinonyl phthalate of hydro carbons, silicone railway grease, " apiczon " railway grease etc.; Polarity, fragrance, oxidation, the corresponding tygon glycol of unsaturated compound, tygon glycol ether, tetramethylene sulfone, dinonyl phthalate, alkyl sulfonate; Water vapour corresponding silica gel, molecular filter, monox, polymeric adsorbant; The corresponding anthraquinone of sulfuration (two) hydrogen-separation sulfanilic acid, plumbous acetate; The corresponding mercury salt of organic phosphate.
The lead that twines around the quartz substrate of the present invention connects the frequency measurement meter, its principle of work is: utilize quartzy piezoelectric sensing equipment device to the susceptibility of quality, when containing respective substance in the sensor ambient gas, the sensor polymer film coating adsorbs these materials, thereby changes the resonant frequency of self.
In the present embodiment, when gas sensor is in the environment of tested gas, control computer control solenoid valve makes analytic target gas directly enter constant temperature enclosure through path (as Fig. 1), during gas process sensor, special component on the sensor in the adsorbable material absorption analysis object gas, cause sensor mass to change, cause the variation of the sensor natural frequency of vibration, calculate eight sensor frequency change procedures by the control computing machine, through the quantitative test to the frequency change process, can identify the composition that detects in the gas, reach the purpose of detection.About this process 1-2 minute.
Before detection finishes or detects, when system is cleaned, control computer control solenoid valve makes air gas enter filtrator through path (as Fig. 2), become fresh air, fresh air enters constant temperature enclosure through sensor array, take away the residuals that is retained in testing process last time on the sensor, finish the cleaning to sensor, enter in the atmosphere by compressor.General about one minute of this process elapsed-time standards.And no matter micro-compressor is cleaning process, or the course of work, all in running order, reaches to allow to detect gasometry by the effect of constant temperature enclosure, and namely the gas volume by constant temperature enclosure is constant in the unit interval.
Be core with two CME M5, add 8 road QCM Crystal and 1 tunnel calibration clock composition detection of gas module, 8 road QCM Crystal are in the box of sealing, use the PCI of craft of gilding to be connected on the mainboard of M5, the resonance frequency of 8 road QCM Crystal, change along with the difference of component in the current air, M5 can be after the order that receives Start Scan, go to gather simultaneously the original resonance frequency of the frequency deviation .QCM Crystal of this 8 road QCM Crystal and should select 10MHz, after 4 circuit-switched data that two M5 finish respectively to link to each other with oneself are gathered, be in the M5 of Slave Mode measured data, pass through spi bus, be sent to the M5 of Master Mode, after the data that the M5 that is in Master Mode finishes the Slave end receive, can be with the speed of per second 2 times, pass through RS232, the survey data are sent to host computer, analyze by the rear end working routine, thereby reach testing goal.
Among the present invention, quartz substrate thickness is more little, and resonance frequency is more high, and sensitivity is more high, and thin polymer film affinity type reaction is more strong, and it is more accurate to detect, and selects for use different thin polymer films can detect gas without type.
The polymer piezo gas sensor system of application invention, this gas sensor array is that several gas sensor units are integrated, the thin polymer film difference of adhering on the different sensor units, each sensor unit is individual inequality to the response of gas, utilize this gas sensor array can improve the selectivity of sensing, but and detection of complex gas, volume is little, and is low in energy consumption.Detection applicability to gas with various is strong, and selectivity is good.Adopt beam scatter method deposited polymer film on quartz wafer, can accurately control the thickness of film and the uniformity coefficient on surface; The present invention is simple to operate, quick, and is widely applicable, need not the professional operate; Detect qualitative and non-quantitative, be fit to extensive primary dcreening operation.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (7)
1. polymer piezo gas sensor system that detects gas, it is characterized in that, comprise gas siphunculus, solenoid valve, filtrator, constant temperature enclosure, gas sensor array, micro-compressor, frequency meter, control computing machine, wherein said gas siphunculus is connected with solenoid valve, constant temperature enclosure, micro-compressor successively, described solenoid valve is connected with filtrator, in the described constant temperature enclosure sensor array is set, described sensor array is connected by lead with described frequency meter, and described frequency meter connects the control computing machine.
2. a kind of polymer piezo gas sensor system that detects gas according to claim 1 is characterized in that described sensor array is made up of 8 gas sensors that are coated with different thin polymer films.
3. a kind of polymer piezo gas sensor system that detects gas according to claim 2, it is characterized in that described gas sensor comprises matrix, twine lead around the described matrix, be connected with frequency meter, described matrix upper and lower surface is coated with thin polymer film.
4. a kind of polymer piezo gas sensor system that detects gas according to claim 2 is characterized in that described matrix is conglobate piezoelectric quartz substrate for radiotelegraphy AT cuts.
5. a kind of polymer piezo gas sensor system that detects gas according to claim 2 is characterized in that, described polymer thin film thickness is 0.01-100 μ m.
6. a kind of polymer piezo gas sensor system that detects gas according to claim 2, it is characterized in that, described thin polymer film is by electron gun the electron beam of 500-2000 ev energy to be acted on polymkeric substance, utilizes vacuum electron beam chromatic dispersion coating technique with the upper and lower surface of polymkeric substance evaporation at described matrix.
7. a kind of polymer piezo gas sensor system that detects gas according to claim 2, it is characterized in that described 8 kinds of thin polymer films are respectively Polyvinylchloride, polyamide, tygon teflon, poly-trimethyl silicane-1-propine, dinonyl phthalate, tygon glycol, tetramethylene sulfone, silica gel material.
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| CN2013102150719A CN103336026A (en) | 2013-05-31 | 2013-05-31 | Polymer piezoelectric gas sensor system for detecting gases |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104267447A (en) * | 2014-08-15 | 2015-01-07 | 浙江工业大学 | Volatile hazardous article detection device for bus |
| WO2019022055A1 (en) * | 2017-07-28 | 2019-01-31 | 富士フイルム株式会社 | Resonant sensor |
| CN109387546A (en) * | 2018-11-01 | 2019-02-26 | 西安交通大学 | A kind of bearing grease failure monitor method based on quantum dot gas sensor |
| US11360013B2 (en) * | 2018-10-08 | 2022-06-14 | Southwest Petroleum University | Double-capillary viscometer for measuring viscosity of acid natural gas |
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| CN101034077A (en) * | 2006-11-29 | 2007-09-12 | 电子科技大学 | Piezocrystal gas sensor and method for making same |
| CN101482530A (en) * | 2008-08-20 | 2009-07-15 | 上海博物馆 | Piezoelectric crystal gas transducer and method for producing the same |
| CN201364330Y (en) * | 2009-05-26 | 2009-12-16 | 北京东宝亿通科技股份有限公司 | Electronic nose based on thin polymer film |
| US20100024533A1 (en) * | 2007-03-22 | 2010-02-04 | Shinshu University | Sensor |
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2013
- 2013-05-31 CN CN2013102150719A patent/CN103336026A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101034077A (en) * | 2006-11-29 | 2007-09-12 | 电子科技大学 | Piezocrystal gas sensor and method for making same |
| US20100024533A1 (en) * | 2007-03-22 | 2010-02-04 | Shinshu University | Sensor |
| CN101482530A (en) * | 2008-08-20 | 2009-07-15 | 上海博物馆 | Piezoelectric crystal gas transducer and method for producing the same |
| CN201364330Y (en) * | 2009-05-26 | 2009-12-16 | 北京东宝亿通科技股份有限公司 | Electronic nose based on thin polymer film |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104267447A (en) * | 2014-08-15 | 2015-01-07 | 浙江工业大学 | Volatile hazardous article detection device for bus |
| WO2019022055A1 (en) * | 2017-07-28 | 2019-01-31 | 富士フイルム株式会社 | Resonant sensor |
| CN110945341A (en) * | 2017-07-28 | 2020-03-31 | 富士胶片株式会社 | Resonant sensor |
| JPWO2019022055A1 (en) * | 2017-07-28 | 2020-07-09 | 富士フイルム株式会社 | Resonant sensor |
| US11428669B2 (en) | 2017-07-28 | 2022-08-30 | Fujifilm Corporation | Resonant sensor |
| US11360013B2 (en) * | 2018-10-08 | 2022-06-14 | Southwest Petroleum University | Double-capillary viscometer for measuring viscosity of acid natural gas |
| CN109387546A (en) * | 2018-11-01 | 2019-02-26 | 西安交通大学 | A kind of bearing grease failure monitor method based on quantum dot gas sensor |
| CN109387546B (en) * | 2018-11-01 | 2020-06-02 | 西安交通大学 | Bearing lubricating grease failure monitoring method based on quantum dot gas sensor |
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Application publication date: 20131002 |