CN103335610B - Detection system for large-caliber high-order convex aspheric surface - Google Patents
Detection system for large-caliber high-order convex aspheric surface Download PDFInfo
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- CN103335610B CN103335610B CN201310303322.9A CN201310303322A CN103335610B CN 103335610 B CN103335610 B CN 103335610B CN 201310303322 A CN201310303322 A CN 201310303322A CN 103335610 B CN103335610 B CN 103335610B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
- G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
- G01B9/02085—Combining two or more images of different regions
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention relates to a detection system of a large-caliber convex high-order aspheric surface, which comprises a phase-shifting interferometer, an auxiliary spherical reflector, a calculation hologram and a computer, wherein the computer is connected with the phase-shifting interferometer, the front focus of an optical system consisting of the calculation hologram and the convex high-order aspheric surface is coincided with the light wave focus emitted by the phase-shifting interferometer, the back focus is coincided with the sphere center of the auxiliary spherical reflector, the light wave emitted by the phase-shifting interferometer passes through the calculation hologram, after being reflected by the convex high-order aspheric mirror, the standard spherical wave is converted into standard spherical wave, and after being reflected by the auxiliary spherical reflector, the standard spherical wave returns to the phase-shifting interferometer in the original path, realizing the sub-aperture zero detection of the corresponding area of the convex high-order aspheric surface, obtaining sub-areas with mutually overlapped areas on the convex high-order aspheric surface by a phase-shift interferometer, and processing the sub-area data by a data processing unit in a computer to obtain the full-aperture surface shape distribution information of the convex high-order aspheric surface; the invention also provides a detection device of the convex spherical mirror or the convex aspherical mirror.
Description
Technical field
The invention belongs to advanced optics manufacture and detection field, relate to optical detecting method, particularly large-caliber convex high order aspheric surface detection method.
Technical background
Compared with traditional optical sphere, aspheric surface has very large advantage in rectification aberration, often one piece of aspheric mirror can substitute the effect of polylith spherical mirror, substantially reduce the quantity and weight of whole optical system unit, the such as U.S. is in " national portfire " NIF (NationalIgnitionFacility) that propose the beginning of this century, and aperture aspherical has larger application percentage; The development of the subject such as space optics, astronomy, more and more depend on large-aperture optical equipment, and aperture aspherical element has become passive critical component.Along with the convex high order aspheric surface aperture of mirror of development needed for it of science and technology and contemporary optics system is increasing.The manufacture of large-caliber convex high order aspheric surface mirror needs corresponding detection technique, but, high-precision quantitative detection is carried out to heavy caliber and the convex high order aspheric surface of super large caliber and still there is huge challenge.
In the rough polishing stage of large-caliber convex high order aspheric surface, because surface figure accuracy is not high, adopt existing three coordinate measuring machine and other detection system to detect, in the finishing polish process segment, conventional detection method has incident compensator method and scanning method etc.Incident compensator is owned by France in aspheric normal aberration compensation tests, and it has spherical-aberration compensator group by design one group, and the spherical aberration making it produce and aspheric normal aberration just in time equal and opposite in direction, symbol is contrary.The bore of required compensator group is slightly larger than convex high order aspheric surface, and this proposes higher requirement to the homogeneity of compensator group material, and heavy caliber compensator group exists larger difficulty in actual manufacture, is difficult to especially realize when bore is greater than 1m.Scanning method is similar to three-dimensional and detects, and in test process, test beams scans whole test surfaces, obtains the consecutive variations at surperficial pitch angle, finally calculates the height change value that there emerged a test point, obtains the face shape information of tested minute surface.
The main compensator detection method adopted comprises both at home and abroad at present: back sphere Process, reflection compensation device method, aspheric surface template method and calculation holographic method.Along with tested large-caliber convex high order aspheric surface bore increases, the back rigors of sphere Process to material homogeneity is difficult to realize, reflection compensation device method needs to manufacture bigbore High-precision aspheric catoptron, aspheric surface template method needs to manufacture the High-precision aspheric lens suitable with tested convex high order aspheric surface bore, and calculation holographic plate method needs large-scale laser direct writing equipment delineation holographic plate; And debug precision to compensator in compensator detection method to it is also proposed with high requirement, make these detection techniques there is certain difficulty when detecting large-caliber convex high order aspheric surface, its application receives certain restriction.
The aspheric surface template method that adopts France Reosc detects large-caliber convex high order aspheric surface mirror.Aspheric surface template method realizes null check by manufacture one piece of bore slightly larger than the aspheric surface model of tested convex high order aspheric surface aperture of mirror, because test light will transmitted through aspheric surface model in the method, so require very high to the material homogeneity of model, manufacture simultaneously and demarcate such aspheric surface model and also there is sizable challenge.Because German Schott can provide the optical material of large scale high uniformity to France, the Reosc of France has high precision process equipment and very strong non-spherical lens working ability simultaneously, and this is the essential condition that France successfully can use this detection method.But use the method detection difficulty sharply to increase for the convex high order aspheric surface of bore more than 1 meter.
U.S. SOML laboratory adopts holographic template method to detect large-caliber convex high order aspheric surface mirror, and the calculation holographic plate bore used in detection is slightly larger than tested secondary mirror, and calculation holographic plate is near tested secondary mirror thus realize null check.The making of the calculation holographic plate in this detection method will be inscribed in detection wavefront consistent with tested high order aspheric surface face shape with generation on sphere computed hologram by straight write device by special large laser, needs one piece of large-caliber aspheric surface primary mirror and sphere secondary mirror to form illuminator simultaneously.Manufacture so large calculation holographic degree-of-difficulty factor very high.
U.S. SOML considers in laboratory the difficulty that heavy caliber calculation holographic version and asymmetric holographic version manufacture, sub-aperture stitching method is proposed to be incorporated in the detection of convex aspheric surface, the basis of antidetonation Feisuo type interferometer is expanded the antivibration Feisuo type interferometer of the composition of the auxiliary optics with aspheric surface model bore 1 meter level, the regional area of one-time detection secondary mirror shape, obtains secondary mirror unified shape information finally by splicing.The method will manufacture as compensation of aperture aspherical lens equally, and compensator can only detect the aspheric surface of a type substantially, and testing cost is high.
Zhang Mengwei, the people such as Chen Hongbin (inquire into by heavy caliber high order aspheric surface high-precision surface shape detection method, photoelectric project, 26 (supplementary issues), 1-6,1999) propose to use light pencil interference testing method to detect large-caliber convex high order aspheric surface, in test macro, optical head is fixed on test macro pedestal, adopts pentaprism to carry out the scanning to surface to be measured along guide rail movement.The p-test beams of optical head outgoing two-way light pencil to correction light beam pair.Test beams, to through catoptron and scanning pentaprism, along measured surface sweep test: correct light beam by the fixing pentaprism of guide rail front end, vertically to be invested and the reference mirror settled on the same turntable in surface to be measured.During test, scanning pentaprism moves around between centre of surface to be measured and cylindrical, carry out a series of scanning, long grating sensor on displacement scanning guide rail provides, and computer control system reads fringe position on ccd sensor, after completing the scanning of a sweep trace according to sampling interval given in advance correspondence, computing machine controls test table and rotates a given angle, scanning pentaprism continues scanning, carries out the test of lower scan line, until whole minute surface is completed.According to test data, obtain the line drawing on whole surface to be measured; The theory calculate data on test data and surface to be measured are analyzed calculating, can provide the error result on surface to be measured.In this test macro, the many measuring accuracies of error source are not high.
Summary of the invention
The technical problem to be solved in the present invention: the deficiency overcoming existing detection technique, a kind of large-caliber convex high order aspheric surface detection system based on calculation holographic and auxiliary spherical surface catoptron is proposed, the standard spherical reflector that this detection system utilizes easily processing to realize and small-bore calculation holographic sheet, effectively can solve the problems such as auxiliary element manufactures difficulty, cost is high, material homogeneity is high in other detection system, structure of the present invention is relatively simple, and testing cost is low.
The technical solution adopted for the present invention to solve the technical problems: the detection system of large-caliber convex high order aspheric surface, comprise phase shifting interferometer, auxiliary spherical surface catoptron, calculation holographic sheet and computing machine, the measured optical unit is the optical element of large-caliber convex high order aspheric surface, computing machine is connected with phase shifting interferometer, the front focus of the optical system that calculation holographic sheet and tested large-caliber convex high order aspheric surface are formed overlaps with the light wave focus that phase shifting interferometer sends, back focus overlaps with the centre of sphere of auxiliary spherical surface catoptron, the light wave that phase shifting interferometer sends is after calculation holographic sheet, standard ball ground roll is become after being reflected by tested large-caliber convex high order aspheric surface, standard ball ground roll is after the reflection of auxiliary spherical surface catoptron, the former road of standard ball ground roll is back in phase shifting interferometer, realize detecting the sub-aperture zero of tested large-caliber convex high order aspheric surface corresponding region, by adjusting tested large-caliber convex high order aspheric surface and auxiliary spherical surface catoptron, phase shifting interferometer is made to obtain the subregion tested large-caliber convex high order aspheric surface having overlapped region, data processing unit in last computing machine processes obtained subregion data, obtain unified shape distributed intelligence of tested large-caliber convex high order aspheric surface.
The present invention's advantage is compared with prior art:
(1) the auxiliary spherical surface catoptron using usual optics handling ease to manufacture in system of the present invention and small-bore calculation holographic sheet, calculation holographic sheet is for generation of test light wave, generation registration mark, for reducing the complexity of optics positions adjustment in system, thus reduce testing cost;
(2) the present invention adopts reflected light path layout, without the need to manufacturing the huge transmission compensator of bore, avoids the rigors to optical material homogeneity;
(3) in the inventive method, calculation holographic adopts the method for combination holograms, not only can produce test light wave, and can produce registration mark, reduces the complexity of optics positions adjustment in system;
(4) structure of the present invention is simple, is easy to operation, is mainly used in manufacture process and the final error surface testing of large-caliber convex high order aspheric surface;
(5) overlapping region existed between adjacent two sub-aperture detected with phase shifting interferometer, in order to realize stable data splicing.
(6) the inventive method is not only applicable to convex high order aspheric surface, is equally applicable to convex spherical and convex aspheric surface;
(7) the present invention balances detection system performance and testing cost preferably.
Accompanying drawing explanation
Fig. 1 is System's composition schematic diagram;
Fig. 2 is detection system index path;
The sample distribution schematic diagram of sub-aperture data when Fig. 3 is one-time detection;
Fig. 4 is the sub-aperture data sampling distribution schematic diagram covering territory, tested large-caliber convex high order aspheric surface unified transparent zone;
The flow chart of data processing figure of Fig. 5 involved by test macro.
Symbol description is marked in figure:
1 is phase shifting interferometer, and 2 is auxiliary spherical surface catoptron, and 3 is calculation holographic sheet,
4 is tested convex high order aspheric surface, and 5 is computing machine.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Shown in Fig. 1, the convex high order aspheric surface detection method in a kind of heavy caliber footpath of the present embodiment comprises phase shifting interferometer 1, auxiliary spherical surface catoptron 2, calculation holographic sheet 3 and computer system 5, the measured optical unit is the optical element of large-caliber convex high order aspheric surface 4, computing machine 5 is connected with phase shifting interferometer 1, the front focus of the optical system that calculation holographic sheet 3 and tested large-caliber convex high order aspheric surface 4 are formed overlaps with the light wave focus that phase shifting interferometer 1 sends, back focus overlaps with the centre of sphere of auxiliary spherical surface catoptron 2, the light wave that phase shifting interferometer 1 sends is after calculation holographic sheet 3, standard ball ground roll is become after being reflected by tested large-caliber convex high order aspheric surface 4, standard ball ground roll is after auxiliary spherical surface catoptron 2 reflects, the former road of standard ball ground roll is back in phase shifting interferometer 1, realize detecting the sub-aperture zero of tested large-caliber convex high order aspheric surface 4 corresponding region, by adjusting tested large-caliber convex high order aspheric surface 4 and auxiliary spherical surface catoptron 2, phase shifting interferometer 1 is made to obtain the subregion tested large-caliber convex high order aspheric surface 4 having overlapped region, data processing unit in last computing machine 5 processes obtained subregion data, obtain unified shape distributed intelligence of tested large-caliber convex high order aspheric surface 4.
Wherein, phase shifting interferometer 1 is utilized to detect the overlapping region existed between adjacent two sub-aperture of the tested large-caliber convex high order aspheric surface 4 obtained, in order to realize data splicing.
Wherein, calculation holographic sheet 3 for generation of test light wave, produce registration mark, for reducing in system optics positions adjustment complexity.
Wherein, according to the bore of tested large-caliber convex high order aspheric surface 4 and the basic corresponding relation of parameter of auxiliary spherical surface mirror catoptron 2, large-caliber convex high order aspheric surface 4 is divided into an endless belt or plural endless belt detects.
Wherein, described basic corresponding relation is
r and D is radius-of-curvature and the bore of auxiliary spherical surface catoptron respectively, f and d is the back focal length of tested large-caliber convex high order aspheric surface and tested bore respectively.
Wherein, the light wave set through the reflection of auxiliary spherical surface catoptron can cover tested large-caliber convex high order aspheric surface mirror completely, and tested large-caliber convex high order aspheric surface mirror disposablely can carry out unified shape infomation detection.
Wherein, after light wave reflection is become standard flat ripple by tested convex high order aspheric surface, auxiliary spherical surface catoptron becomes auxiliary plane mirror.
The course of work and the detecting step of present system are as follows:
The first step: as shown in Figure 1, auxiliary spherical surface catoptron 2 is in the side of optical axis, calculation holographic sheet 3 is on the optical axis near phase shifting interferometer 1 focus, Fig. 2 is the index path under this state, and auxiliary spherical surface catoptron 2 meets its sub-aperture region and can cover convex high order aspheric surface central obscuration and detect to the sub-aperture of external margin.According in calculation holographic sheet 3 to quasi-holographic determination auxiliary spherical surface catoptron 2 and calculation holographic sheet 3 relative position relation with the convex high order aspheric surface 4 of tested large mouth, make the surveyed area of auxiliary spherical surface catoptron 2 correspondence on interferometer, form the interference fringe that can be resolved, Fig. 3 is corresponding sub-aperture data acquisition distribution schematic diagram.
Second step: preserve the sub-aperture data obtained by phase shifting interferometer 1, the convex high order aspheric surface 4 of tested large mouth is rotated around optical axis, regulate the relative position relation of itself and auxiliary spherical surface catoptron 2, ensure to there is enough overlapping regions between adjacent sub-aperture, stop when the whole tested large-caliber convex high order aspheric surface mirror 4 of the sub-aperture area covers recorded.Fig. 4 is that sub-aperture detects the upper sample distribution schematic diagram of data at tested large-caliber convex high order aspheric surface 4.
3rd step: sub-aperture data splicing, flow chart of data processing involved by measuring system is as shown in Figure 5: due to the impact of alignment error when each sub-aperture is measured, make in measurement data, mainly to comprise alignment error information and face shape error information, the core of data splicing is separated face shape error information exactly from sub-aperture metrical information, and concrete step is as follows:
Step S1: first computing machine 5 reads in all sub-aperture and detects data;
Step S2: according to adjusting mechanism shift position or minute surface gauge point, the overlapping region data that interpretation is all, extract overlapping region data;
Step S3: the data of overlapping region are carried out homogenizing Error processing, obtains system of linear equations;
Step S4: calculate system of linear equations, obtains the splicing parameter with global optimization;
Step S5: according to the splicing parameter of global optimization, data are detected to all sub-aperture and correct, make it have identical normative reference; Zernike fitting of a polynomial is carried out to the unified data of having spliced, obtains the low frequency face shape information of full mouth data;
Step S6: the impact of the unified data of having spliced being removed to wavefront alignment error, calculates face shape error evaluating: trough value (PV) and root-mean-square value (RMS), obtains unified the shape information removing alignment error;
Step S7: face shape hum pattern and the three-dimensional plot of drawing out tested large-caliber convex high order aspheric surface 4 according to the unified information of having spliced; The full aperture wavefront information of the face shape error reflecting tested large-caliber convex high order aspheric surface 4 can be obtained.
In the present invention: if auxiliary spherical surface catoptron 2 is enough large, tested large-caliber convex high order aspheric surface 4 disposablely can carry out unified shape infomation detection, need not carry out splicing; If the light wave sent from phase shifting interferometer 1 is after tested large-caliber convex high order aspheric surface 4 reflects, become standard flat ripple, auxiliary spherical surface catoptron 2 can become auxiliary plane mirror.
Convex spherical mirror or the convex aspheric surface mirror pick-up unit of large-caliber convex high order aspheric surface detection system can be utilized in the present invention, if tested large-caliber convex high order aspheric surface 4 changes into as convex spherical mirror and convex aspheric surface mirror, as long as the optical system of calculation holographic sheet 3 and convex spherical mirror or convex aspheric surface mirror formation meets after the light wave that phase shifting interferometer 1 is sent reflects on convex spherical mirror or convex aspheric surface mirror become standard flat ripple or standard ball ground roll, this detection method can detect convex spherical mirror or convex aspheric surface mirror.
The above; be only the embodiment in the present invention, but protection scope of the present invention is not limited thereto, any people being familiar with this technology is in the technical scope disclosed by the present invention; the conversion or replacement expected can be understood, all should be encompassed in of the present invention comprising within scope.
Claims (8)
1. the detection system of a large-caliber convex high order aspheric surface optical element, it is characterized in that: comprise phase shifting interferometer, auxiliary spherical surface catoptron, calculation holographic sheet and computing machine, the measured optical unit is the optical element of large-caliber convex high order aspheric surface, computing machine is connected with phase shifting interferometer, the front focus of the optical system that calculation holographic sheet and tested large-caliber convex high order aspheric surface are formed overlaps with the light wave focus that phase shifting interferometer sends, back focus overlaps with the centre of sphere of auxiliary spherical surface catoptron, the light wave that phase shifting interferometer sends is after calculation holographic sheet, standard ball ground roll is become after being reflected by tested large-caliber convex high order aspheric surface, standard ball ground roll is after the reflection of auxiliary spherical surface catoptron, the former road of standard ball ground roll is back in interferometer, realize detecting the sub-aperture zero of tested large-caliber convex high order aspheric surface corresponding region, by adjusting tested large-caliber convex high order aspheric surface and auxiliary spherical surface catoptron, phase shifting interferometer is made to obtain the subregion tested large-caliber convex high order aspheric surface having overlapped region, data processing unit in last computing machine processes obtained subregion data, obtain unified shape distributed intelligence of tested large-caliber convex high order aspheric surface.
2. the detection system of large-caliber convex high order aspheric surface optical element as claimed in claim 1, it is characterized in that: utilize phase shifting interferometer to detect the overlapping region obtaining existing between adjacent two sub-aperture of tested large-caliber convex high order aspheric surface, in order to realize data splicing.
3. the detection system of large-caliber convex high order aspheric surface optical element as claimed in claim 1, is characterized in that: calculation holographic sheet is for generation of test light wave, generation registration mark.
4. the detection system of large-caliber convex high order aspheric surface optical element as claimed in claim 1, it is characterized in that: according to the bore of tested large-caliber convex high order aspheric surface and the basic corresponding relation of parameter of auxiliary spherical surface mirror catoptron, large-caliber convex high order aspheric surface is divided into an endless belt or plural endless belt detects.
5. the detection system of large-caliber convex high order aspheric surface optical element as claimed in claim 4, is characterized in that: described basic corresponding relation is
r and D is radius-of-curvature and the bore of auxiliary spherical surface catoptron respectively, f and d is the back focal length of tested large-caliber convex high order aspheric surface and tested bore respectively.
6. the detection system of large-caliber convex high order aspheric surface optical element as claimed in claim 1, it is characterized in that: the light wave set through the reflection of auxiliary spherical surface catoptron can cover tested large-caliber convex high order aspheric surface mirror completely, and tested large-caliber convex high order aspheric surface mirror disposablely can carry out unified shape infomation detection.
7. the detection system of large-caliber convex high order aspheric surface optical element as claimed in claim 1, is characterized in that: after light wave reflection is become standard flat ripple by tested convex high order aspheric surface, auxiliary spherical surface catoptron becomes auxiliary plane mirror.
8. one kind uses the convex spherical mirror of detection system or the pick-up unit of convex aspheric surface mirror of the large-caliber convex high order aspheric surface optical element described in claim 1, it is characterized in that: comprise phase shifting interferometer, auxiliary spherical surface catoptron, calculation holographic sheet and computing machine, when the measured optical unit be convex spherical mirror or convex aspheric surface mirror time, the optical system of calculation holographic sheet and convex spherical mirror or convex aspheric surface mirror formation is met after the light wave that phase shifting interferometer is sent reflects on convex spherical mirror or convex aspheric surface mirror and becomes standard flat ripple or standard ball ground roll, for realizing, convex spherical mirror or convex aspheric surface mirror are detected.
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| CN101419062A (en) * | 2008-12-04 | 2009-04-29 | 中国科学院光电技术研究所 | Large-caliber hyperboloid secondary mirror detection system |
| CN102374851A (en) * | 2011-09-22 | 2012-03-14 | 西安工业大学 | Real-time partial zero compensation optical aspheric surface profile detection method |
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