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CN103196628A - Vacuum degree on-line detecting system - Google Patents

Vacuum degree on-line detecting system Download PDF

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Publication number
CN103196628A
CN103196628A CN2013100749877A CN201310074987A CN103196628A CN 103196628 A CN103196628 A CN 103196628A CN 2013100749877 A CN2013100749877 A CN 2013100749877A CN 201310074987 A CN201310074987 A CN 201310074987A CN 103196628 A CN103196628 A CN 103196628A
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CN
China
Prior art keywords
vacuum
vacuum tightness
online detection
data
line detecting
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Pending
Application number
CN2013100749877A
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Chinese (zh)
Inventor
郑文宸
钟骁
段宇麟
明长友
罗存益
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Chengdu Brilliant Science & Technology Co Ltd
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Chengdu Brilliant Science & Technology Co Ltd
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Priority to CN2013100749877A priority Critical patent/CN103196628A/en
Publication of CN103196628A publication Critical patent/CN103196628A/en
Priority to PCT/CN2014/070039 priority patent/WO2014134972A1/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/10Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/14Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured using thermocouples

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

The invention discloses a vacuum degree on-line detecting system which comprises a display module, a data collection terminal, a vacuum degree on-line detecting module and a vacuum on-line detecting sealing plug, wherein the vacuum on-line detecting sealing plug is used for obtaining vacuum data of vacuum equipment, the vacuum degree on-line detecting module is used for processing the vacuum data obtained by the vacuum on-line detecting sealing plug so that the vacuum degree of a vacuum layer of the vacuum equipment is obtained, and the data collecting terminal is used for obtaining vacuum degree data which is sent by at least one vacuum degree on-line detecting module and conducting alarm notification and / or outputting a signal which can control the vacuum equipment to be shut down according to a comparing result of the vacuum degree data and the preset vacuum degree parameter. The vacuum degree on-line detecting system has the advantages of achieving on-line detection of the vacuum degree of the vacuum equipment, detecting a plurality of targets, effectively playing a role in preventing safety hazard, reducing the rate of vacuum leaking and accidents of the equipment, and guaranteeing the using safety.

Description

The vacuum tightness on-line detecting system
Technical field
The present invention relates to vacuum equipment vacuum tightness detection range, be specifically related to the vacuum tightness on-line detecting system of a kind of vacuum tube or vacuum tank, there is the online detection of vacuum tube or vacuum tank in the place that is specially adapted to stand.
Background technology
Vacuum tube or vacuum tank through the production technology link to vacuum interlayer finish vacuumize after, in product preservation and use, or problems such as degasification is insufficient in the machining process, installation is improper all can cause the reduction of vacuum layer vacuum tightness because material itself is exitted.Vacuum layer reduces the heat preservation and insulation that the back directly influences vacuum pipe, the reduction of heat preservation and insulation directly causes energy resource consumption in the vacuum pipe, in use vacuum tightness can since the problem of material own or since problems such as processing technology, mounting process cause can not be long-term preservation, vacuum tightness can be gradually decline, if just lost the heat-insulation and heat-preservation effect after vacuum tightness drops to a certain degree, cause seepage, will cause the consumption that the energy is unnecessary and bring potential safety hazard.
At present the vacuum tightness that vacuum tube or vacuum tank in use can not online detection vacuum layer change and to the vacuum tightness of vacuum layer give warning in advance, information such as warning.Can only judge vacuum layer vacuum tightness by the visual inspection experience, or by the whether frosting and hang spontaneous phenomenon such as water and judge whether current vacuum layer vacuum tightness has descended of pipe surface or hold-up vessel surface, can not accurately obtain the value of the vacuum tightness of vacuum layer.
Summary of the invention
The objective of the invention is to overcome existing above-mentioned deficiency in the prior art, the vacuum tightness on-line detecting system of a kind of real time automatic detection vacuum tube or vacuum tank vacuum tightness situation of change is provided.
In order to realize the foregoing invention purpose, the invention provides following technical scheme:
A kind of vacuum tightness on-line detecting system comprises data disaply moudle, data collection station, the online detection module of vacuum tightness, the online detection sealing-plug of vacuum; Described data disaply moudle connects described data collection station, and described data collection station connects the online detection module of at least one vacuum tightness, and the online detection module of described vacuum tightness connects the online detection sealing-plug of vacuum; Wherein, the online detection sealing-plug of described vacuum is used for obtaining the vacuum data in the vacuum equipment; The online detection module of described vacuum tightness is used for the vacuum data that the online detection sealing-plug of vacuum obtains are handled the vacuum tightness that obtains the vacuum equipment vacuum layer; Described data collection station is used for obtaining the vacuum tightness data that the online detection module of at least one vacuum tightness is sent here, and carry out alarm and/or output control vacuum equipment shutdown signal according to the comparative result of these vacuum tightness data and default vacuum tightness parameter, or preserve the vacuum tightness data and provide progressive and analyze or for data comparative analysis from now on or tabulate statistics; Described data disaply moudle is used for the vacuum tightness data of one or more vacuum equipments of described data collection station collection are shown in real time.
Described data collection station also with preserving the vacuum tightness historical data, is analyzed variant vacuum equipment vacuum tightness.
Described data collection station comprises microprocessor, and described microprocessor comprises the switching value output port, and described microprocessor is connected with DC/DC insulating power supply, display keyboard interface module, parameter memory module, warning indicating module and communication module.
The sealing-plug of the online detection of described vacuum comprises ceramic matrix, described ceramic matrix below connects described thermopair and regulates, described thermopair regulate be embedded in described ceramic matrix in first lead be connected, the described first lead two ends stretch out in up and down two ends of described ceramic matrix; Described first lead connects the online detection module of described vacuum tightness.
Further, described ceramic matrix below also is provided with the temperature sensor for detection of the temperature in the vacuum plant; Described temperature sensor second lead interior with being embedded in described ceramic matrix is connected; Described second lead connects the online detection module of described vacuum tightness.
Preferably, described ceramic matrix is cylindric, and its outer surface is provided with seal groove.
 
The online detection module of described vacuum tightness comprises microcontroller, and described microcontroller is connected with communicating circuit and power circuit; The online detection sealing-plug of described vacuum is connected with described microcontroller by constant current circuit; The online detection sealing-plug of described vacuum is connected with described microcontroller by current sampling circuit, an A/D change-over circuit successively; The online detection sealing-plug of described vacuum also is connected with microcontroller by differential amplifier circuit, the 2nd A/D change-over circuit successively.
The online detection module of described vacuum tightness and data collection station communicate to connect by inner separately communicating circuit and communication module.
Compared with prior art, beneficial effect of the present invention:
Vacuum tightness on-line detecting system of the present invention is realized the vacuum tightness of vacuum tube or vacuum tank is carried out online detection, can detect a plurality of targets, accurately obtain detecting the vacuum tightness of vacuum tube or vacuum tank, effectively play the potential safety hazard preventive effect, reduce vacuum leak rate and accident rate, ensure and use safety.
Description of drawings:
Fig. 1 is vacuum tightness on-line detecting system block diagram of the present invention.
Fig. 2 is the circuit block diagram of the data collection station among Fig. 1.
Fig. 3 is the circuit block diagram of the online detection module of vacuum tightness among Fig. 1.
Fig. 4 is the structural representation of the online detection vacuum stopper of the vacuum tightness among Fig. 1.
Fig. 5 be the online detection vacuum stopper of the vacuum tightness among the present invention scheme of installation.
Embodiment
The present invention is described in further detail below in conjunction with testing example and embodiment.But this should be interpreted as that the scope of the above-mentioned theme of the present invention only limits to following embodiment, all technology that realizes based on content of the present invention all belong to scope of the present invention.
As shown in Figure 1, vacuum tightness on-line detecting system of the present invention comprises data disaply moudle, data collection station, the online detection module of vacuum tightness, the online detection sealing-plug of vacuum; Described data disaply moudle connects described data collection station, and described data collection station connects the online detection module of at least one vacuum tightness (1-n), and the online detection module of described vacuum tightness connects the online detection sealing-plug of vacuum; Wherein, the online detection sealing-plug of described vacuum is used for obtaining the vacuum data in the vacuum equipment; The online detection module of described vacuum tightness is used for the vacuum data that the online detection sealing-plug of vacuum obtains are handled the vacuum tightness that obtains the vacuum equipment vacuum layer; Described data collection station is used for obtaining the vacuum tightness data that the online detection module of at least one vacuum tightness is sent here, and carry out alarm and/or output control vacuum equipment shutdown signal according to the comparative result of these vacuum tightness data and default vacuum tightness parameter, or preserve the vacuum tightness data and provide progressive and analyze or for data comparative analysis from now on or tabulate statistics; Described data disaply moudle is used for the vacuum tightness data of one or more vacuum equipments of described data collection station collection are shown in real time.The present invention realizes the vacuum tightness of vacuum tube or vacuum tank is carried out online detection, can detect one or more target, accurately obtains the vacuum tightness of vacuum tube or vacuum tank, effectively plays the potential safety hazard preventive effect.
Described data collection station also with preserving the vacuum tightness historical data, is analyzed variant vacuum equipment vacuum tightness.The target vacuum degrees of data is gathered by the internet upload server by institute, for the real time inspection subordinate of Surveillance center vacuum equipment ruuning situation.
Concrete, referring to Fig. 2-Fig. 4, described data collection station comprises microprocessor, and described microprocessor comprises the switching value output port, and described microprocessor is connected with DC/DC insulating power supply, display keyboard interface module, parameter memory module, warning indicating module and communication module.Wherein, described warning indicating module is LED lamp and hummer combination.Described communication module is the data communication bus.Described display keyboard interface module is connected with keyboard.
The sealing-plug of the online detection of described vacuum comprises ceramic matrix 1, described ceramic matrix 1 below connects described thermopair and regulates 4, described thermopair regulate 4 be embedded in described ceramic matrix 1 in first lead be connected, the described first lead two ends stretch out in described ceramic matrix, and about in the of 1 two ends.Concrete, described first lead has four, and the part that four leads 2 stretch out in described ceramic matrix 1 lower end connects described thermopair and regulates 4.Described ceramic matrix 1 below also is provided with the temperature sensor 3 for detection of the temperature in the vacuum plant, and temperature sensor 3 adopts thermistor in the present embodiment.Described temperature sensor 3(thermistor) be embedded in described ceramic matrix 1 in second lead be connected.Described second lead has two, and the part that two leads 2 stretch out in described ceramic matrix 1 lower end connects described temperature sensor 3.Preferably, described ceramic matrix 1 is cylindric, and its outer surface is provided with seal groove 5.Described ceramic matrix 1 top is provided with round boss 11, and described first lead and second lead are positioned at described round boss 11 and stretch out in this round boss 11.Be embedded with wiring protective cover (not shown) on the described round boss 11.Concrete, ceramic matrix 1 can adapt to the high and low temperature environment as the carrier of vacuum detecting, and insulate in detecting data transmission procedure, and is noiseless to data-signal.Web member when working as the sealing-plug of vacuum detecting, round boss 11 is installed, is dismantled, the first embedded lead and second lead are as the conductor that detects data transmission, by first lead vacuum plant inner vacuum data are derived, by second lead vacuum plant internal temperature data is derived, by the online detection module of described vacuum tightness derived data is handled the acquisition vacuum values, the temperature data of collection can be used for revising vacuum values.Ceramic matrix 1 adopts existing pottery and metal integration technology encapsulation process with embedded first lead and second lead, and making between two materials does not have gas leak phenomenon, guarantees the impermeability of vacuum stopper.Thermopair regulates 4 for detecting the detecting element of vacuum values, is in the vacuum plant vacuum layer, is used as and detects vacuum values, and by the first embedded lead vacuum values data are derived.Temperature sensor 3(thermistor) is the detecting element of detected temperatures, is in the vacuum layer, be used as and detect vacuum plant vacuum layer temperature, and by the second embedded lead detected temperatures data are derived, and then obtain the vacuum layer temperature data.Be in thermopair in the vacuum layer regulate 4 and thermistor 3 on be equipped with element protection cover (not shown).The main body of sealing-plug adopts stupalith, adapting to the working environment of ultralow temperature, high temperature, and signal is realized noiseless collection and derivation.
Consult Fig. 5, the sealing plug is mounted on the vacuum pumping port 9 that is welded in advance on vacuum plant 10 outer walls.Under vacuum environment, utilize round boss that the sealing plug is installed on the vacuum pumping port 9 after exhausting vacuum, exhaust the vacuum final vacuum device 10 inside and outside Negative Pressure Difference that form, utilize air to the atmospheric pressure that sealing-plug applies, sealing-plug is seal-installed on the vacuum pumping port 9.Carry out three layers of enhanced leaktightness by O-ring seal 6 and O-ring seal 7 being installed respectively in the seal groove 5 on ceramic matrix 1 and O-ring seal 8 being set during installation under ceramic matrix 1 flange.Described O-ring seal is adopted as " O " shape silicone rubber O-ring.
The online detection module of described vacuum tightness comprises microcontroller, and described microcontroller is connected with communicating circuit and power circuit; The online detection sealing-plug of described vacuum is connected with described microcontroller by constant current circuit; The online detection sealing-plug of described vacuum is connected with described microcontroller by current sampling circuit, an A/D change-over circuit successively; The online detection sealing-plug of described vacuum also is connected with microcontroller by differential amplifier circuit, the 2nd A/D change-over circuit successively.The online detection module of described vacuum tightness and data collection station communicate to connect (can be wireless or wire communication mode) by inner separately communicating circuit and communication module.Wherein, described power circuit is the DC/DC power supply, and the operating voltage of 5V is provided.Be connected with the communication buffer circuit between described communicating circuit and the microcontroller,, improve interference free performance.Described communicating circuit is the data communication bus, preferred data industry communication bus commonly used.Described microcontroller also is connected with system indicator, when vacuum tightness is lower than setting value, can point out warning.Described constant current circuit is connected with voltage reference circuit, for constant current circuit provides work required 2.5V reference voltage, guarantees the stability and reliability of constant current circuit work.Described microcontroller also is connected with alarm switch.Wherein, described each circuit module is existing ripe circuit component, chip or integrated circuit formation.
Concrete, referring again to Fig. 2-4, the online detection module of described vacuum layer directly is installed on the sealing-plug top.Sealing vacuum detection component beyond the Great Wall is positioned at the vacuum equipment vacuum layer, and the online detection module of vacuum directly carries out the integral type installation with sealing-plug.During work, the microcontroller in the online detection module of vacuum layer is by the working current of thermocouple rule fulgurite 4 in the constant current circuit calibration sealing-plug.Thermocouple rule fulgurite 4 utilizes the hot conduction phenomenon of gas molecule to obtain the thermoelectrical potential of current vacuum layer, and microcontroller obtains the vacuum tightness of current vacuum layer by the proportional relation algorithm between thermoelectrical potential and the vacuum tightness.Described constant current circuit is connected with the lead that described thermocouple rule fulgurite 4 links to each other, and described current sampling circuit is connected with described microcontroller by an A/D sample conversion circuit, is used for detecting in real time the sealing-plug heating current.The thermopair that described differential amplifier circuit connects in the sealing-plug is regulated test side and temperature sensor end (connecting respectively by lead 2), differential amplifier circuit is connected with described microcontroller by the 2nd A/D sample conversion circuit, regulate the thermoelectrical potential obtained and the temperature value in the vacuum plant for detection of thermopair, namely regulate by the thermopair of sealing-plug inside and carry out data acquisition.Described detection data are converted to the discernible digital signal of microcontroller by the 2nd A/D change-over circuit after differential amplifier circuit amplifies, microcontroller calculates the vacuum tightness value by the algorithm that concerns that detects between data and the vacuum tightness, and the temperature data of collection can be used for revising the vacuum tightness value.Microcontroller can directly carry out remote transmission by data line with the vacuum tightness data of calculating, and is convenient to real-time detection.In the online detection module installation of vacuum shell, alarm switch is set, after breaking, vacuum equipment (vacuum tube or vacuum tank) will directly trigger described alarm switch, the online detection module of vacuum obtains this alarm condition and directly carries out remote transmission, and the display alarm pilot lamp.
In addition, the switching value output port of this data collection station is connected with the PLC switch board that is used for pipe-line equipment control.This data collection station is connected with the online detection module communication of a plurality of vacuum tightnesss by its communication module.During this system works, microprocessor in the data collection station receives the vacuum tightness data of the online detection module transmission of a plurality of vacuum tightnesss by communication module and is stored in the memory module, if the vacuum tightness of the online detection module transmission of some vacuum tightness is lower than early warning value, can report to the police by the warning indicating module, and by display keyboard interface output demonstration, be convenient to problematic vacuum tube is handled the automaticity height.If the vacuum tube of transporting low temperature liquid breaks or leaks, sealing-plug triggers online detection module alarm switch.When microprocessor receives the alerting signal that online detection module sends here, export the switching value signal to the PLC switch board that is used for pipe-line equipment control from the switching value output port, warning and valve-off stop to carry liquid, improve security, the reliability and stability of cryogenic liquid conveyance conduit.
Wherein, data collection station is visited the online detection module of each vacuum tightness in the mode of poll, refresh the vacuum values of the online detection module of each vacuum tightness in real time, the data disaply moudle that is connected with data collection station (LCD display) shows information such as vacuum values in real time.Data collection station compares each module vacuum tightness and predefined vacuum tightness drop-out value, if meet the demands, then prompting is reported to the police.If detect the online detection module output alarm signal of vacuum tightness, at this moment data collection station will be exported the switching value signal to the PLC switch board that is used for pipe-line equipment control, warning and valve-off stop to carry liquid, and data collection station can pass through the real-time online detection module information of all vacuum tightnesss of sampling of external keyboard button or the relevant information of the online detection module of certain vacuum tightness.
Vacuum tightness on-line detecting system of the present invention is realized the vacuum tightness of vacuum tube and vacuum tank in the various environment is carried out online detection, can detect one or more targets, accurately, obtain the vacuum tightness of target vacuum pipe and vacuum tank in real time, effectively play the potential safety hazard preventive effect, reduce vacuum tank vacuum leak rate and accident rate, ensure and use safety.
The above only is preferred embodiment of the present invention, not in order to limiting the present invention, all any modifications of doing within the spirit and principles in the present invention, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.

Claims (8)

1. a vacuum tightness on-line detecting system is characterized in that, comprises data disaply moudle, data collection station, the online detection module of vacuum tightness, the online detection sealing-plug of vacuum; Described data disaply moudle connects described data collection station, and described data collection station connects the online detection module of at least one vacuum tightness, and the online detection module of described vacuum tightness connects the online detection sealing-plug of vacuum; Wherein, the online detection sealing-plug of described vacuum is used for obtaining the vacuum data in the vacuum equipment; The online detection module of described vacuum tightness is used for the vacuum data that the online detection sealing-plug of vacuum obtains are handled the vacuum tightness that obtains the vacuum equipment vacuum layer; Described data collection station is used for obtaining the vacuum tightness data that the online detection module of at least one vacuum tightness is sent here, and carry out alarm and/or output control vacuum equipment shutdown signal according to the comparative result of these vacuum tightness data and default vacuum tightness parameter, or preserve the vacuum tightness data and provide progressive and analyze or for data comparative analysis from now on or tabulate statistics; Described data disaply moudle is used for the vacuum tightness data of one or more vacuum equipments of described data collection station collection are shown in real time.
2. vacuum tightness on-line detecting system according to claim 1 is characterized in that, described data collection station also with preserving the vacuum tightness historical data, is analyzed variant vacuum equipment vacuum tightness.
3. vacuum tightness on-line detecting system according to claim 1 and 2, it is characterized in that, described data collection station comprises microprocessor, described microprocessor comprises the switching value output port, and described microprocessor is connected with DC/DC insulating power supply, display keyboard interface module, parameter memory module, warning indicating module and communication module.
4. vacuum tightness on-line detecting system according to claim 3, it is characterized in that, the sealing-plug of the online detection of described vacuum comprises ceramic matrix, described ceramic matrix below connects described thermopair and regulates, described thermopair regulate be embedded in described ceramic matrix in first lead be connected, the described first lead two ends stretch out in up and down two ends of described ceramic matrix; Described first lead connects the online detection module of described vacuum tightness.
5. vacuum tightness on-line detecting system according to claim 4 is characterized in that, described ceramic matrix below also is provided with the temperature sensor for detection of the temperature in the vacuum plant; Described temperature sensor second lead interior with being embedded in described ceramic matrix is connected; Described second lead connects the online detection module of described vacuum tightness.
6. according to claim 4 or 5 described vacuum tightness on-line detecting systems, it is characterized in that described ceramic matrix is cylindric, its outer surface is provided with seal groove.
7. vacuum tightness on-line detecting system according to claim 4 is characterized in that, the online detection module of described vacuum tightness comprises microcontroller, and described microcontroller is connected with communicating circuit and power circuit; The online detection sealing-plug of described vacuum is connected with described microcontroller by constant current circuit; The online detection sealing-plug of described vacuum is connected with described microcontroller by current sampling circuit, an A/D change-over circuit successively; The online detection sealing-plug of described vacuum also is connected with microcontroller by differential amplifier circuit, the 2nd A/D change-over circuit successively.
8. vacuum tightness on-line detecting system according to claim 7 is characterized in that, the online detection module of described vacuum tightness and data collection station communicate to connect by inner separately communicating circuit and communication module.
CN2013100749877A 2013-03-08 2013-03-08 Vacuum degree on-line detecting system Pending CN103196628A (en)

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PCT/CN2014/070039 WO2014134972A1 (en) 2013-03-08 2014-01-02 Vacuum degree on-line detection system

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WO2014134972A1 (en) * 2013-03-08 2014-09-12 成都科瑞尔低温设备有限公司 Vacuum degree on-line detection system
CN105403355A (en) * 2015-12-10 2016-03-16 东文高压电源(天津)股份有限公司 High-precision vacuum tube vacuum degree tester and test method
CN106768610A (en) * 2016-12-19 2017-05-31 广州市真量纯科技有限公司 A kind of workpiece vacuum automatic testing method
CN107560786A (en) * 2017-09-08 2018-01-09 成都倍特科技有限责任公司 Vacuum on-line checking and its compensation system
CN108331742A (en) * 2017-05-10 2018-07-27 浙江飞越机电有限公司 One kind vacuumizing detecting and controlling system and method
CN109341947A (en) * 2018-12-06 2019-02-15 北京东方计量测试研究所 A kind of vacuum system field calibration method based on wireless transmission
CN110291325A (en) * 2017-01-16 2019-09-27 克里奥塞尔特有限责任公司 Device and method for determining the insulation quality of double walled vacuum thermally insulated container
CN110957178A (en) * 2019-12-13 2020-04-03 四川新能电力有限公司 Vacuum switch online detection method
CN111982393A (en) * 2020-08-27 2020-11-24 天津科技大学 Real-time monitoring vacuum instrument
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WO2014134972A1 (en) * 2013-03-08 2014-09-12 成都科瑞尔低温设备有限公司 Vacuum degree on-line detection system
CN105403355A (en) * 2015-12-10 2016-03-16 东文高压电源(天津)股份有限公司 High-precision vacuum tube vacuum degree tester and test method
CN105403355B (en) * 2015-12-10 2017-12-22 东文高压电源(天津)股份有限公司 A kind of high-precision vacuum tube vacuum-degree tester and method of testing
CN106768610B (en) * 2016-12-19 2019-02-22 广州市真量纯科技有限公司 A kind of workpiece vacuum degree automatic testing method
CN106768610A (en) * 2016-12-19 2017-05-31 广州市真量纯科技有限公司 A kind of workpiece vacuum automatic testing method
CN110291325A (en) * 2017-01-16 2019-09-27 克里奥塞尔特有限责任公司 Device and method for determining the insulation quality of double walled vacuum thermally insulated container
CN108331742A (en) * 2017-05-10 2018-07-27 浙江飞越机电有限公司 One kind vacuumizing detecting and controlling system and method
CN107560786B (en) * 2017-09-08 2019-12-31 成都倍特科技有限责任公司 Vacuum degree on-line detection and compensation system thereof
CN107560786A (en) * 2017-09-08 2018-01-09 成都倍特科技有限责任公司 Vacuum on-line checking and its compensation system
CN109341947A (en) * 2018-12-06 2019-02-15 北京东方计量测试研究所 A kind of vacuum system field calibration method based on wireless transmission
CN110957178A (en) * 2019-12-13 2020-04-03 四川新能电力有限公司 Vacuum switch online detection method
CN111982393A (en) * 2020-08-27 2020-11-24 天津科技大学 Real-time monitoring vacuum instrument
CN111982393B (en) * 2020-08-27 2021-11-19 天津科技大学 Real-time monitoring vacuum instrument
CN114812924A (en) * 2022-04-12 2022-07-29 兰州空间技术物理研究所 High-precision data acquisition and display interaction equipment for vacuum gauge

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