CN102962683B - Two-degree of freedom translational parallel high-bandwidth micro-motion platform - Google Patents
Two-degree of freedom translational parallel high-bandwidth micro-motion platform Download PDFInfo
- Publication number
- CN102962683B CN102962683B CN201210477575.3A CN201210477575A CN102962683B CN 102962683 B CN102962683 B CN 102962683B CN 201210477575 A CN201210477575 A CN 201210477575A CN 102962683 B CN102962683 B CN 102962683B
- Authority
- CN
- China
- Prior art keywords
- side chain
- level
- motion platform
- micro
- degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 21
- 238000006073 displacement reaction Methods 0.000 abstract description 16
- 238000013519 translation Methods 0.000 abstract description 4
- 230000003071 parasitic effect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000006978 adaptation Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
Landscapes
- Micromachines (AREA)
Abstract
The invention relates to a two-degree of freedom translational parallel high-bandwidth micro-motion platform, which is a micro-motion platform based on piezoelectric ceramic drivers and flexible joints. The micro-motion platform comprises the piezoelectric ceramic drivers, a micro-motion platform body, a sensor fixture and non-contact capacitive sensors, the micro-motion platform body comprises driving support joints, auxiliary support joints corresponding to the driving support joints, an operating platform and a fixed bed, wherein the two driving support joints and the auxiliary support joints corresponding to the driving support joints are symmetrically distributed in pairs around the operating platform. Because the micro-motion platform adopts two parallel four-bar structures and symmetrical constraining structures, the parasitic displacement and accumulated errors of the micro-motion platform are reduced. Because the joint structure of the micro-motion platform is improved, i.e., a rectangular module is added at the middle of the primary driving support joint, the structural rigidity is greatly enhanced, so that the system has high inherent frequency, and thereby the micro-motion platform has the characteristic of two-dimensional high-bandwidth translation.
Description
Technical field
What the present invention relates to is that a kind of micro-nano is measured and the device of processing technique field, specifically a kind of two-degree of freedom translation high bandwidth parallel micromotion platform based on piezoelectric ceramic actuator and flexible hinge.
Background technology
The two degrees of freedom micromotion platform of piezoelectric ceramic actuator and flexible hinge is adopted to have the advantages such as high accuracy, high-resolution, two dimensional motion, thus more and more extensive in micro & nano technology field application such as MEMS, ultra precise measurement, micro-nano processing, scanning probe microscopy, Optical element manufacturing and biomedical engineerings.And the processes such as current most nano measurement, nanometer manufacture are more and more higher for rate request, such as, for the scan frequency of AFM, require to reach a few kHz; For another example in large-scale nanometer manufacture process, the requirement for process velocity and efficiency improves constantly, and the motion frequency of micropositioner requires to reach several kHz.Therefore, invention has high accuracy, high-resolution, and the two degrees of freedom micromotion platform again with high bandwidth characteristic simultaneously has great importance.
The low intrinsic frequency of micromotion platform frame for movement is the key factor of restriction closed-loop control bandwidth, and the intrinsic frequency therefore improving micromotion platform has greater significance for realizing high bandwidth micromotion platform.At present at home, there is some scholars doing the research work of micromotion platform, but all do not propose the micromotion platform with high bandwidth characteristic.Such as Chinese application number 200510023219.4, publication number CN1644329A, the patent application that name is called " small two-dimensional de-coupling platforms ", disclose a kind of small two-dimensional de-coupling platforms, but the intrinsic frequency of this micromotion platform is lower, and configuration is complicated, and processing cost is higher; For another example Chinese application number 200710114743.1, publication number CN101176995A, name is called the patent application of " a kind of two translationa movement and jogging platform with redundancy branched chain ", provide a kind of two translationa movement and jogging platform with redundancy branched chain, but the rigidity due to flexible hinge in this structure is less, therefore also unavoidably create the lower shortcoming of intrinsic frequency.
Summary of the invention
The present invention is directed to prior art above shortcomings, provide a kind of Two-degree of freedom translational parallel high-bandwidth micro-motion platform, based on piezoelectric ceramic actuator and flexible hinge micromotion platform, the special adaptations relying on the rectangular module added in hinge reaches high rigidity characteristic thus achieves the characteristic of the high natural frequency of motion platform.Rely on the guide function of two parallel hinges and integrally-built symmetry simultaneously, reach the basic function eliminating diaxon coupling and parasitic displacement, achieve the two-dimensional translation of motion platform.
The present invention is achieved by the following technical solutions, the present invention includes: piezoelectric ceramic actuator, micromotion platform main body, clamp of sensor, non-contact capacitive sensor, micromotion platform main body comprises the driving side chain of both direction, auxiliary side chain, workbench and fixed frame, wherein in the driving side chain of both direction and the auxiliary side chain X-direction that is symmetrically distributed in workbench surrounding between two and Y-direction.
Described driving side chain comprises: one-level drives side chain, secondary drive side chain, wherein: one-level drives side chain two ends and fixed frame to be connected, secondary drive side chain comprises the flexible hinge that two ends add chamfering, one end and one-level drive side chain to drive the rectangular module of side chain intermediate projections to be connected by one-level, and the other end and workbench are connected.
Described auxiliary side chain comprises: one-level assists side chain, secondary assists side chain, wherein: one-level assists side chain two ends and fixed frame to be connected, the flexible hinge that secondary assists side chain to comprise two ends to add chamfering, one end and one-level assist side chain to assist the rectangular module of side chain intermediate projections to be connected by one-level, and the other end and workbench are connected.
Described workbench four direction assists side chain to be connected with the secondary drive side chain of X, Y both direction and secondary respectively.
Described fixed frame drives side chain and one-level to assist side chain to be connected with the one-level of X, Y both direction respectively.
Described driving side chain, auxiliary side chain, workbench and frame etc. are all adopt integral structure, namely in one piece of sheet of metallic material, adopt Advanced to process, without the need to assembling, compact conformation, volume is little, effectively prevent the generation of rigging error, meet high-precision requirement.
Described piezoelectric ceramic actuator is embedded in the mounting groove of micromotion platform main body, and head and one-level drive the middle section contacts of side chain, and applying power acts directly on and drives on side chain, and is connected by screw thread with fixed frame bottom it and installs.
Described non-contact capacitive sensor is arranged in the installing hole of clamp of sensor, and fastening by cone pin.
Described clamp of sensor is connected by screw thread and is arranged on the fixed frame of micromotion platform, to make the displacement of non-contact displacement transducer testing platform.
The present invention carries out work in the following manner: for X-direction motion, piezoelectric ceramic actuator applies power and drives side chain in X-direction one-level, it is made to move to X-direction, because X is larger to secondary drive side chain axial rigidity, thus drive workbench, Y-direction secondary drive side chain, Y-direction secondary to assist side chain and X to assist side chain together towards X-direction motion to secondary, wherein Y-direction secondary drive side chain and Y-direction secondary assist side chain to produce compatible deformation; Because X assists the axial rigidity of side chain comparatively large to secondary, X is thus driven to assist side chain to produce compatible deformation to one-level.Because X drives side chain and one-level to assist side chain axial rigidity comparatively large to one-level, thus the basic output displacement with piezoelectric ceramic actuator of the displacement of workbench and X-direction one-level drive the displacement of side chain intermediate rectangular module substantially equal.
The present invention compared with prior art, has following beneficial effect:
(1), the present invention makes special adaptations for hinge, and one-level drives side chain and one-level to assist in the middle of side chain to add rectangular module, increased substantially the rigidity of hinge; And by reducing the quality of workbench, make micromotion platform intrinsic frequency be greatly improved, front two rank intrinsic frequencies all reach 8.2KHz.Relative to the micromotion platform of prior art, this micromotion platform intrinsic frequency improves several times.
(2), the present invention adopted two parallel hinges, and improve the rigidity of one-level hinge by the special adaptations of hinge, utilizes integrally-built symmetry, essentially eliminates diaxon coupling and parasitic displacement.
(3), the present invention has high rigidity, without accumulated error, the advantage such as two directional dynamics characteristics are identical, compact conformation, volume are little relative to serial mechanism.The present invention has the advantages such as control algolithm is simple, dynamic characteristic is good simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of Two-degree of freedom translational parallel high-bandwidth micro-motion platform of the present invention;
Fig. 2 is micromotion platform X-direction deformation principle schematic;
Fig. 3 is micromotion platform, piezoelectric ceramics, capacitance sensor and clamp of sensor thereof assembling schematic diagram;
Fig. 4 is the first six rank mode schematic diagram of micromotion platform.
Detailed description of the invention
Elaborate to embodiments of the invention below, the present embodiment is implemented under premised on technical solution of the present invention, give detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1,2, shown in 3, the embodiment of the present invention comprises: piezoelectric ceramic actuator 24, micromotion platform main body 26, clamp of sensor 27, non-contact capacitive sensor 28, micromotion platform main body 26 comprises two identical driving side chains 1 and 3 and corresponding two identical auxiliary side chains 5 and 7, workbench 6 and fixed frame 9, wherein the driving side chain 1 and 3 of both direction, the auxiliary side chain 5 and 7 of both direction are symmetrically distributed in the surrounding of workbench between two.
Described driving side chain 1 comprises: one-level drives side chain 11, secondary drive side chain 10, wherein: one-level drives side chain 11 two ends and fixed frame 9 to be connected, secondary drive side chain 10 comprises the flexible hinge 13 and 14 that two ends add chamfering, 13 drive side chain 11 to drive the rectangular module 12 of side chain 11 intermediate projections to be connected by one-level with 14 one end and one-level, and the other end and workbench 6 are connected.
Described auxiliary side chain 5 comprises: one-level assists side chain 18, secondary assists side chain 17, wherein: one-level assists side chain 18 two ends and fixed frame 9 to be connected, the flexible hinge 20 and 21 that secondary assists side chain 17 to comprise two ends to add chamfering, secondary assists side chain 17 one end and one-level to assist side chain 18 to assist the rectangular module 19 of side chain 18 intermediate projections to be connected by one-level, and the other end and workbench 6 are connected.
Described workbench 6 four direction assists side chain 17 and 22 to be connected with the secondary drive side chain 10 and 15 of X, Y both direction and secondary respectively.
Described fixed frame 9 drives side chain 11 and 16 and one-level to assist side chain 18 and 23 to be connected respectively with the one-level of X, Y both direction.
Described driving side chain 1 and 3, auxiliary side chain 5 and 7, workbench 6 and fixed frame 9 etc. are all adopt integral structure, namely in one piece of sheet of metallic material, employing Advanced processes, without the need to assembling, compact conformation, volume is little, effectively prevent the generation of rigging error, meets high-precision requirement.
Described piezoelectric ceramic actuator 24 is embedded in the mounting groove of micromotion platform main body 26, and head and one-level drive the middle section contacts of side chain 11, and applying power acts directly on and drives on side chain, and is connected by screw thread with fixed frame 9 bottom it and installs.
Described non-contact capacitive sensor 28 is arranged in the installing hole of clamp of sensor 27, and fastening by cone pin 25.
Described clamp of sensor 27 is connected by screw thread 2,4,8 and is arranged on the fixed frame 9 of micromotion platform, to make the displacement of non-contact displacement transducer 28 testing platform 6.
As Fig. 1, shown in 2, this example carries out work in the following manner: for X-direction, piezoelectric ceramic actuator 24 applies power and drives side chain 11 in X-direction one-level, because the axial rigidity of X-direction secondary drive side chain 10 is larger, thus drive workbench 6, Y-direction secondary drive side chain 15, Y-direction secondary to assist side chain 22 and X to assist side chain 17 together towards X-direction motion to secondary, wherein Y-direction secondary drive side chain 15 and Y-direction secondary assist side chain 22 to produce compatible deformation; Because X assists the axial rigidity of side chain 17 comparatively large to secondary, X is thus driven to assist side chain 18 to produce compatible deformation to one-level.Because X assists side chain 17 axial rigidity larger to secondary drive side chain 10 and secondary, thus the displacement of workbench 6 substantially drives the displacement of side chain intermediate rectangular module 12 substantially equal with the output displacement of piezoelectric ceramic actuator 24 and X-direction one-level, in such cases, workbench 6 produces X-direction displacement.
As Fig. 1, shown in 2, when only having the piezoelectric ceramic actuator 24 of X-direction to produce displacement, because system adopts the linkage 11 and 18 of two parallelogram lindage 15 and 22, special adaptations, and integrally-built symmetry, so workbench no-output coupling displacement in the Y direction.Again because one-level driving side chain 16 and one-level assist side chain 23 mid portion to add rectangular module in the Y direction, therefore one-level is made to drive side chain 16 and one-level to assist the rigidity of side chain 23 greatly to increase, and the rigidity of side chain 22 is assisted much larger than Y-direction secondary drive side chain 15 and secondary, thus when secondary drive side chain in X-direction Piezoelectric Ceramic situation 15 assists side chain 22 to produce compatible deformation with secondary, one-level drives side chain 16 and one-level to assist side chain 23 substantially without being out of shape, therefore greatly reduce the piezoelectric ceramics acting on one-level driving side chain 16 mid portion and bear moment of flexure or side force, avoid the damage of piezoelectric ceramic actuator.What simultaneously one-level drove side chain 16 and one-level to assist side chain 23 also makes X-direction greatly reduce with being coupled of Y-direction without being out of shape substantially.
As Fig. 1, shown in 4, micromotion platform adopts and drives side chain 11,16 and one-level to assist side chain 18,23 mid portion to add rectangular module in one-level, and widen one-level and drive side chain 11,16 and one-level to assist side chain 18,23, its rigidity is increased greatly, side chain 17,22 is assisted far away higher than secondary drive side chain 10,15 and secondary, and by controlling the quality of workbench 6, the intrinsic frequency of micromotion platform is made to be in high value: as shown in (a), (b) in Fig. 4, front two rank intrinsic frequency reflection planes internal characteristics, are respectively 8269Hz and 8281Hz; Characteristic outside the intrinsic frequency reflection planes of rear several rank, wherein the 3rd rank are reflected in the vibration characteristics of Z axis, in Fig. 4 shown in (c), for 10551Hz, in Fig. 4, shown in (d), (e), (f), quadravalence, the 5th rank and the 6th rank intrinsic frequency reflect that micromotion platform is around X respectively, Y, Z axis revolving property, is respectively 20558Hz, 20571Hz, 21031Hz.Out-of-plane high natural frequency makes micromotion platform operationally, and workbench 6 keeps good translation characteristic, can not have rotational angle.Thus micromotion platform has higher dynamic characteristic, is convenient to control.
Claims (8)
1. a Two-degree of freedom translational parallel high-bandwidth micro-motion platform, comprise micromotion platform main body, be arranged on piezoelectric ceramic actuator in micromotion platform main body and clamp of sensor, be arranged on the non-contact capacitive sensor on clamp of sensor, it is characterized in that, described micromotion platform main body comprises workbench, fixed frame and the two-stage of two two-stage drive side chains being symmetrically distributed in the orthogonal X of workbench surrounding, Y-direction and correspondence thereof assists side chain, and the auxiliary side chain of described driving side chain and correspondence thereof distributes in opposite directions;
Described two-stage drive side chain is that one-level drives side chain and secondary drive side chain, wherein: one-level drives side chain two ends and fixed frame to be connected, secondary drive side chain comprises the flexible hinge that two ends add chamfering, described flexible hinge one end and one-level drive side chain to drive the rectangular module of side chain intermediate projections to be connected by one-level, and the other end and workbench are connected;
Described two-stage assists side chain to be that one-level assists side chain and secondary to assist side chain;
Described one-level drives side chain to promote to produce distortion in the X direction along with described piezoelectric ceramic actuator, thus makes the one-level in X-direction assist the secondary drive side chain in side chain, Y-direction and the secondary in Y-direction to assist side chain to produce compatible deformation.
2. Two-degree of freedom translational parallel high-bandwidth micro-motion platform according to claim 1, it is characterized in that, one-level assists side chain two ends and fixed frame to be connected, the flexible hinge that secondary assists side chain to comprise two ends to add chamfering, described flexible hinge one end and one-level assist side chain to assist the rectangular module of side chain intermediate projections to be connected by one-level, and the other end and workbench are connected.
3. Two-degree of freedom translational parallel high-bandwidth micro-motion platform according to claim 1, is characterized in that, described workbench X, Y both direction assists side chain to be connected with the secondary drive side chain of correspondence direction and secondary respectively.
4. Two-degree of freedom translational parallel high-bandwidth micro-motion platform according to claim 1, is characterized in that, described fixed frame drives side chain and one-level to assist side chain to be connected with the one-level of X, Y both direction respectively.
5. Two-degree of freedom translational parallel high-bandwidth micro-motion platform according to claim 1, it is characterized in that, described piezoelectric ceramic actuator is embedded in the mounting groove of micromotion platform main body, head and one-level drive the middle section contacts of side chain, applying power acts directly on and drives on side chain, and is connected by screw thread with fixed frame bottom it and installs.
6. Two-degree of freedom translational parallel high-bandwidth micro-motion platform according to claim 1, is characterized in that, described non-contact capacitive sensor is arranged in the installing hole of clamp of sensor, and fastening by cone pin.
7. Two-degree of freedom translational parallel high-bandwidth micro-motion platform according to claim 1, is characterized in that, described clamp of sensor is connected by screw thread and is arranged on the fixed frame of micromotion platform.
8. Two-degree of freedom translational parallel high-bandwidth micro-motion platform according to claim 1, is characterized in that, described driving side chain, auxiliary side chain, workbench and fixed frame adopt integral structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210477575.3A CN102962683B (en) | 2012-11-22 | 2012-11-22 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210477575.3A CN102962683B (en) | 2012-11-22 | 2012-11-22 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102962683A CN102962683A (en) | 2013-03-13 |
| CN102962683B true CN102962683B (en) | 2015-03-11 |
Family
ID=47793272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210477575.3A Expired - Fee Related CN102962683B (en) | 2012-11-22 | 2012-11-22 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102962683B (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103331588B (en) * | 2013-06-18 | 2016-01-20 | 北京航空航天大学 | A kind of micro-clamp device with clamping and rubbing function |
| CN103568005B (en) * | 2013-11-18 | 2015-07-15 | 山东理工大学 | Dual-translation orthogonal decoupling parallel micro-positioning platform |
| CN105006254B (en) * | 2014-04-23 | 2017-05-03 | 东北大学 | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification |
| CN104766634B (en) * | 2015-03-18 | 2017-05-31 | 苏州大学 | Piezoelectric type two dimension series connection small size workbench |
| CN105244061B (en) * | 2015-10-13 | 2017-10-17 | 天津大学 | The big stroke mini positioning platform of the pressure controllable driven based on stick-slip |
| CN106393169B (en) * | 2016-12-19 | 2018-10-26 | 上海交通大学 | Two direction discrete state movable joints |
| CN107356190B (en) * | 2017-07-20 | 2019-06-18 | 北京航天控制仪器研究所 | A kind of two degrees of freedom micro-displacement |
| CN108278971B (en) * | 2018-02-06 | 2024-04-19 | 杨锦堂 | Ultra-precise detection platform |
| CN108400722B (en) * | 2018-04-18 | 2019-11-08 | 哈尔滨工业大学 | A kind of two-freedom Piexoelectric actuator and its motivational techniques |
| CN108742847B (en) * | 2018-06-12 | 2021-04-27 | 天津大学 | Four-degree-of-freedom flexible needle puncture platform combining macro motion and micro motion |
| CN109493913B (en) * | 2018-12-26 | 2021-05-11 | 杭州电子科技大学 | Two-degree-of-freedom micro-nano positioning platform |
| CN110082904B (en) * | 2019-05-31 | 2021-03-30 | 中国科学院国家天文台南京天文光学技术研究所 | High-precision and stable swing mirror device suitable for space environment and working method thereof |
| CN111377397A (en) * | 2020-03-23 | 2020-07-07 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-nano machining system and control method |
| CN114526419B (en) * | 2022-01-12 | 2022-11-25 | 山东大学 | Single-degree-of-freedom deflection platform |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2733219B1 (en) * | 1996-11-01 | 1998-03-30 | 工業技術院長 | 3-DOF micromanipulator |
| CN201109120Y (en) * | 2007-11-02 | 2008-09-03 | 山东理工大学 | Microposition platform for 2dof parallel structure |
| CN101770182A (en) * | 2010-01-22 | 2010-07-07 | 天津大学 | Three-degree of freedom flexible precision positioning workbench |
| CN102182899A (en) * | 2011-03-07 | 2011-09-14 | 中国矿业大学 | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof |
| CN102328311A (en) * | 2011-08-03 | 2012-01-25 | 河北工业大学 | Two-finger flexible micro clamper |
| CN102496391A (en) * | 2011-11-18 | 2012-06-13 | 江苏大学 | Assembled two-dimensional micro-displacement platform |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN102623070A (en) * | 2012-03-30 | 2012-08-01 | 中国科学院长春光学精密机械与物理研究所 | Precise two-degree of freedom micro-displacement positioning device |
| CN102664045A (en) * | 2012-05-17 | 2012-09-12 | 合肥工业大学 | 16-bartwo-dimensional no-coupling micro displacement worktable |
| CN202474045U (en) * | 2012-03-20 | 2012-10-03 | 哈尔滨芯明天科技有限公司 | Two-dimensional decoupling micro-motion micro-scanning platform utilizing piezoceramics to achieve motion |
-
2012
- 2012-11-22 CN CN201210477575.3A patent/CN102962683B/en not_active Expired - Fee Related
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2733219B1 (en) * | 1996-11-01 | 1998-03-30 | 工業技術院長 | 3-DOF micromanipulator |
| CN201109120Y (en) * | 2007-11-02 | 2008-09-03 | 山东理工大学 | Microposition platform for 2dof parallel structure |
| CN101770182A (en) * | 2010-01-22 | 2010-07-07 | 天津大学 | Three-degree of freedom flexible precision positioning workbench |
| CN102182899A (en) * | 2011-03-07 | 2011-09-14 | 中国矿业大学 | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof |
| CN102328311A (en) * | 2011-08-03 | 2012-01-25 | 河北工业大学 | Two-finger flexible micro clamper |
| CN102496391A (en) * | 2011-11-18 | 2012-06-13 | 江苏大学 | Assembled two-dimensional micro-displacement platform |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN202474045U (en) * | 2012-03-20 | 2012-10-03 | 哈尔滨芯明天科技有限公司 | Two-dimensional decoupling micro-motion micro-scanning platform utilizing piezoceramics to achieve motion |
| CN102623070A (en) * | 2012-03-30 | 2012-08-01 | 中国科学院长春光学精密机械与物理研究所 | Precise two-degree of freedom micro-displacement positioning device |
| CN102664045A (en) * | 2012-05-17 | 2012-09-12 | 合肥工业大学 | 16-bartwo-dimensional no-coupling micro displacement worktable |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102962683A (en) | 2013-03-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102962683B (en) | Two-degree of freedom translational parallel high-bandwidth micro-motion platform | |
| CN101862966B (en) | Two freedom-degree translational parallel decoupling micromotion platform | |
| CN102328311B (en) | Two-finger flexible micromotion clamper | |
| CN106195541B (en) | A kind of Three Degree Of Freedom Piezoelectric Driving micro-nano locating platform | |
| CN102543217A (en) | Macro-micro driven bidimensional integrated micro positioning platform | |
| CN2576434Y (en) | Six-freedom precision paralleled robot | |
| CN109256174B (en) | High-precision space translation micro-positioning platform | |
| CN105006254A (en) | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification | |
| CN102581854A (en) | Piezoelectric driving micro gripper | |
| CN102623070A (en) | Precise two-degree of freedom micro-displacement positioning device | |
| US11159103B2 (en) | Six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform | |
| CN202565197U (en) | Asymmetric piezoelectric inertial driver | |
| CN102054933A (en) | Parallel piezoelectric micromotion platform | |
| CN103486413A (en) | Three-freedom-degree decoupling large-stroke micro-positioning platform | |
| CN107834895B (en) | Piezoelectricity-electromagnetism combination drive XY θ z three-degree of freedom flexible actuator and method | |
| CN100340378C (en) | Six-freedom-degree precision positioning workbench | |
| CN103056867B (en) | Flexible micro-moving manipulator | |
| CN110010190B (en) | Three-dimensional constant force parallel flexible micro-positioning platform | |
| CN202185917U (en) | Micro-gripper based on flexible hinge | |
| CN111917328B (en) | Nanometer scanning platform of diamond micro-displacement amplifying mechanism | |
| CN202406060U (en) | Multi-freedom-degree micro-operator driven by multi-polarized type piezoelectric driver | |
| CN106229012A (en) | A kind of big displacement high frequency sound Three Degree Of Freedom Piezoelectric Driving precisely locating platform | |
| CN2782326Y (en) | Six-freedom-degree precision positioning workbench | |
| CN206036546U (en) | Three degree of freedom precision positioning platforms on XY theta plane | |
| CN109650329B (en) | Two-rotation one-translation large-stroke coupling-free parallel piezoelectric micromotion platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150311 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |