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CN102956499A - Preparation method of polysilicon film - Google Patents

Preparation method of polysilicon film Download PDF

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Publication number
CN102956499A
CN102956499A CN2011103519844A CN201110351984A CN102956499A CN 102956499 A CN102956499 A CN 102956499A CN 2011103519844 A CN2011103519844 A CN 2011103519844A CN 201110351984 A CN201110351984 A CN 201110351984A CN 102956499 A CN102956499 A CN 102956499A
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nickel
amorphous silicon
crystallization
silicon
layer
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赵淑云
郭海成
王文
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GUANGDONG ZHONGXIAN TECHNOLOGY Co Ltd
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GUANGDONG ZHONGXIAN TECHNOLOGY Co Ltd
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Abstract

The invention provides a preparation method of a mask metal induced crystallization polysilicon film, and the preparation method comprises the following steps of: (1) carrying out plasma chemical vapor depositionm on silicon dioxide to a glass substrate, and then carrying out low-pressure chemical vapor depositionm on amorphous silicon; (2) forming a nanometer silicon dioxide layer on the surface of the amorphous silicon, forming induction windows through a photoetching process, and forming thin chemical oxidation layers on induction lines; (3) spluttering thin nickel-silicon oxide layers on the nanometer silicon dioxide layer and the chemical oxidation layers, and totally crystallizing the amorphous silicon through high-temperature annealing.

Description

The preparation method of polysilicon membrane
Technical field
The present invention relates to the polysilicon technology, more specifically, relate to a kind of preparation method of polysilicon membrane.
Background technology
Beginning in 2006, MIC (SMIC) technique that has occurred based on solwution method is made multi-crystal TFT, in the method, by the adsorption process of control nickel, obtains and is of a size of the residual polysilicon of low nickel that the tens dish shape crystal grain that arrive the hundreds of micron form.Fig. 1 shows the optical microscope photograph by the SMIC polysilicon membrane of TMAH corrosion.The method can solve because glass substrate shrinks the mask plate contraposition that causes is forbidden problem.
Yet the nucleus that distributes arbitrarily causes annealing time longer, makes it well to be applied to large-sized glass substrate.In order to address this problem, propose one before the application's the applicant to be positioned to the epipole solution as the metal-induced crystallization on basis, the method combines based on nucleating point (NS) and auxiliary point (SS).In the revulsive crystallization process, consumption induce metallic nickel to pass through auxiliary point (SS) to provide, rather than nucleating point (NS) can reduce like this gathering at the nickel of nucleating point (NS) position, and then obtain inducing the residual not high zone of metallic nickel.Fig. 2 (a) and 2 (b) illustrate respectively honeycomb after TMAH corrosion and the optical microscope photograph of unidirectional DG-SMIC low-temperature polysilicon film.As shown in Figure 2, profile and measure-alike crystal grain can be realized by the position distribution of design NS and SS; And this scheme can realize the accurate controlling crystallizing time, and the crystallization time in the time of 590 ℃ can foreshorten to 2 hours.
The TFT that the polysilicon membrane that uses is made the P raceway groove as semiconductor layer demonstrates very high performance, but the major defect of this technology is uniformity and the less stable of film.Nitrate solution (Ni (the NO of the nickel that uses 3) 2/ NH 4The OH mixed solution) pH value is 8, thereby in crystallization process, being exposed to can be by slight corrosion, so that the polysilicon surface of crystallization is not very smooth in the mentioned solution on amorphous silicon film surface (referring to that silicon is in NS and SS zone).Fig. 3 is respectively the grained polysilicon 3-D AFM picture that is defined of the inside and outside of NS or SS, and as shown in Figure 3, inside refers to that this regional film has exposed (the NO through Ni 3) 2/ NH 4The mixed solution of OH, and outside this film that refers to is subjected to the protection of photoresist and exposes this solution of process, inside and outside surface roughness is respectively 0.364nm and 0.189nm, and the uniformity of visible film is relatively poor.
Summary of the invention
Be the uniformity that overcomes polysilicon membrane and the defective of less stable, the present invention proposes a kind of polysilicon membrane and thin-film transistor and corresponding preparation method.
An aspect according to the application, a kind of polysilicon membrane of mask metal-induced crystallization is provided, comprises: glass substrate is positioned at the Si oxide on the glass substrate, be positioned at the polysilicon layer of the whole crystallization above the Si oxide, be positioned at the nanometer titanium dioxide silicon layer on the polysilicon layer; Etch a plurality of windows of inducing on the nanometer titanium dioxide silicon layer, a plurality of inducing is coated with chemical oxide layer on the window; The nisiloy oxide skin(coating) is arranged in sputter on this nanometer titanium dioxide silicon layer and the chemical oxide layer.
According to another aspect of the present invention, provide a kind of preparation method of polysilicon membrane of mask metal-induced crystallization, comprising: step 1), with plasma activated chemical vapour deposition silicon dioxide on glass substrate, again with the low-pressure chemical vapor deposition amorphous silicon; Step 2), amorphous silicon surfaces forms the nanometer titanium dioxide silicon layer, forms by photoetching process and induces window, induces the line place to form thin chemical oxide layer; Step 3), the thin nisiloy oxide of sputter one deck on silicon dioxide layer and the chemical oxide layer, high annealing is with the whole crystallization of amorphous silicon.
According to another aspect of the invention, provide a kind of polycrystalline SiTFT of mask metal-induced crystallization, comprising: the polysilicon membrane in continuous transverse zone is etched into active silicon island; The deposition low temperature oxide is as gate insulator; Form gate electrode, with boron with 4 * 10 15/ cm 2Metering Implantation source electrode and drain electrode; The oxide of deposition 500nm is opened the electrode contact hole as insulating barrier and in grid, source electrode and drain region.
According to another aspect of the invention, a kind of preparation method of polycrystalline SiTFT of mask metal-induced crystallization is provided, comprise: the polysilicon membrane in continuous transverse zone becomes active silicon island with Freckle etching liquid wet etching, by the heavy method of low pressure chemical gas phase at the low temperature oxide of 425 ℃ of deposit 50 nanometer thickness as gate insulator; Form gate electrode, with boron with 4 * 10 15/ cm 2Metering Implantation source electrode and drain electrode; Oxide with the method for LPCVD deposition 500nm is opened the electrode contact hole as insulating barrier and in grid, source electrode and drain region; The aluminium photoetching that contains 1%Si of sputter 700 nanometer thickness forms test electrode, and 420 ℃ of lower sintering 30 minutes are to form good ohmic contact, the while dopant activation in the forming gas of hydrogen and nitrogen.
The application's method is used for preparing high-quality and high uniformity polysilicon membrane and thin-film transistor, wherein, and the position that nanometer level Si oxide facial mask can pre-defined crystallization nucleation.Polysilicon membrane is comprised of the continuous broadwise territory (CZD) of identical width, and obtains under optimal conditions.The TFT performance is extensively compared, prove that grained region is not subjected to the device performance significant impact.Compare with large crystal grain or little crystal grain MIC TFTs, MIC TFTs has better device uniformity than large crystal grain MIC TFTs.
Description of drawings
Fig. 1 is the optical microscope photograph by the large crystal grain SMIC polysilicon membrane of TMAH corrosion;
Fig. 2 is that wherein, Fig. 2 a is dish shape crystal grain by the polysilicon membrane optical microscope photograph of TMAH corrosion, and Fig. 2 b is unidirectional;
Fig. 3 is the AFM 3-D image of the DG-SMIC polysilicon membrane of whole crystallization;
Fig. 4 is the structural representation by the polysilicon membrane of MMIC method preparation;
Fig. 5 is the cross sectional representation of the polysilicon membrane structure of the MMIC preparation of amplifying;
Fig. 6 is MMIC polysilicon optical microscope photograph, and wherein T is respectively 3nm (Fig. 6 a), 4nm (Fig. 6 b), 5nm (Fig. 6 c) and 6nm (Fig. 6 d);
Fig. 7 is MMIC polysilicon optical microscope photograph, and the line width of inducing of upper figure below is respectively 1 μ m and 3 μ m;
Fig. 8 is MMIC polysilicon optical microscope photograph, and the Ni-Si oxide thickness is respectively
Figure BSA00000608962900041
(Fig. 8 a), (Fig. 8 b) and (Fig. 8 c);
Fig. 9 is MMIC (a), and MILC (b) and GGS (c) process schematic diagram;
Figure 10 be by (a) GGS technology and (b) the CZD technology under 590 ℃ of nitrogen atmospheres to the amorphous silicon annealing optical microscope photograph after 1 hour;
Figure 11 be under 590 ℃ of annealing conditions GGS and CZD technology to the crystallization area proportion of large tracts of land substrate and the graph of a relation of crystallization time;
Figure 12 be S IMS nickel content degree of depth overview (Figure 12 a), the 2-D image that in (Figure 12 b), MILC polysilicon (Figure 12 c) CZD polysilicon membrane, distributes of the nickel that tracks of SIMS;
Figure 13 is top grid CZD multi-crystal TFT structure cross sectional representation;
Figure 14 (a), (b), (c), (d) and (e) be 5 kinds of different designs layouts (f) are that the MMIC polysilicon is through the optical microscope photograph of TMAH corrosion;
Figure 15 is Ion, Ioff and the GIDL Distribution Statistics schematic diagram of CZD, GGS (large crystal grain) and cotton-shaped (little crystal grain) MIC TFTs;
Figure 16 is the V of CZD, GGS (dish shape/large crystal grain) and cotton-shaped (little crystal grain) MIC TFTs ThWith S Distribution Statistics schematic diagram;
Figure 17 is field-effect mobility (cm2/Vs) the Distribution Statistics schematic diagram of CZD, GGS (dish shape/large crystal grain) and cotton-shaped (little crystal grain) MIC TFTs;
Figure 18 is bigrid CZD TFT s (a) threshold voltage (Vth) and (b) field-effect mobility (μ on 4 inches wafers FE)Histogram.
As shown in the figure, in order clearly to realize the structure of embodiments of the invention, specific structure and device have been marked in the drawings, but this only needs for signal, be not that intention limits the invention in this ad hoc structure, device and the environment, according to concrete needs, those of ordinary skill in the art can adjust these devices and environment or revise, and the adjustment of carrying out or modification still are included in the scope of accompanying claim.
Embodiment
Describe a kind of polysilicon membrane and thin-film transistor and corresponding preparation method in detail below by the drawings and specific embodiments.In the following description, a plurality of different aspects of the present invention will be described, yet, for those skilled in the art, can only utilize more of the present invention or entire infrastructure or flow process are implemented the present invention.For the definition of explaining, set forth specific number, configuration and order, but clearly, in the situation that there are not these specific detail can implement the present invention yet.In other cases, in order not obscure the present invention, will no longer be described in detail for some well-known features.
In order to reduce nickel content residual in the polysilicon membrane, provide a kind of and replace pure nickel as the scheme of inducing source metal with the nisiloy oxide, compared to the pure nickel induced crystallized polycrystalline silicon, in polysilicon membrane, induce metal residual to be greatly diminished after the crystallization.Therefore, the leakage current of multi-crystal TFT also reduces thereupon.Adopt the SR-Ni/Si oxide as inducing source metal, a more wide in range processing range can be provided, and can prevent the impact that the technological parameter difference between different batches produces polysilicon membrane.Yet the residual and concentration defective of higher nickel is present in induces row district and LLGB, reduces TFT performance and uniformity.Therefore, the design of TFT will be avoided above two zones, but this is for being very difficult with large-area glass as substrate, because glass can contraction distortion in the Annealing Crystallization process.
As previously described, be another useful technology based on the MIC of solwution method, can reduce the nickel that remains in the polycrystalline and eliminate MILC and solve the MIUC technology and cause the mask plate problem of misalignment in annealing process.Yet the random distribution of the nuclei of crystallization can cause the annealing time grown and inhomogeneous polysilicon membrane.DG-SMIC can guarantee that crystallization process repeatably and lower nickel are residual, but can sacrifice the planarization of a part of region surface.
So in this application, as inducing the source, as the cover layer, both combine and form mask metal-induced crystallization method (MMIC) with the nanometer layer silicon dioxide that is used for defining the nucleus position with the nisiloy oxide.Induce window by the nanometer titanium dioxide silicon layer formation of photoetching process on amorphous silicon membrane, wherein, induce the width of window, the thickness of inducing the outside silicon dioxide of window and nickel to induce vectorial regional concentration all can be on the impact of the MMIC polysilicon membrane pattern of gained.Under the condition of optimum, continuous transverse zone (CZD) polysilicon membrane is comprised of the domain of identical width.And induce hole and head-on collision crystal boundary also can exert an influence for the TFT device performance.
Preparation MMIC polysilicon
The preparation process of MMIC polysilicon membrane
On the glass substrate that preparation process starts from covering with the silicon dioxide of plasma activated chemical vapour deposition 300nm, this glass substrate can be hawk 2000 glass substrate.Again with the method for the low-pressure chemical vapor deposition amorphous silicon at 550 ℃ of deposit 45nm.Samples of amorphous silicon is immersed the natural oxidizing layer that removed the surface in the solution that contains 1% hydrofluoric acid in 1 minute.
Subsequently, the nanometer titanium dioxide silicon layer that 4nm is thick is formed at amorphous silicon surfaces.Induce window by photoetching process formation, photoresist is removed under 120 ℃ of conditions by the mixed solution of sulfuric acid and hydrogen peroxide.Meanwhile, a very thin chemical oxide layer is formed at induces the line place, and approximately 1-2nm is thick.
The very thin nisiloy oxide of sputter one deck is on this body structure surface.Fig. 4 is the schematic diagram of MMIC structure.The whole crystallization of amorphous silicon after 590 ℃ of lower annealing several hours.Be the polysilicon grain pattern that research generates, the polysilicon membrane that the MMIC method is made corrodes with tetramethyl hydrogenation ammonium (TMAH).
The MMIC crystallization process is analyzed
Fig. 5 illustrates the schematic diagram of the MMIC structure cross section of amplification.The thickness T 1 of nanoscale oxide and T2 are covered in amorphous silicon membrane top, and adjacent to induce linear distance be D and induce line width W all to affect the crystallization effect.After forming this structure, the method by sputter is at its surface sputtering one deck nisiloy oxide, and the research crystallization induces the varied in thickness of medium on the impact of MMIC crystallization.
The impact of A:T1 oxide thickness
Fig. 6 has showed the optical microscope photograph of the etching MMIC polysilicon membrane of TMAH, induces line (T1) to locate in addition silicon dioxide thickness and is respectively 3 nanometers, 4 nanometers, 5 nanometers and 6 nanometers.The oxide of inducing the line place is chemical oxide, and it immerses H by the amorphous silicon with surface cleaning 2SO 4And H 2O 2Mixed solution formed in 10 minutes 120 ℃ of lower immersions.The thickness of T2 is about 2 nanometers.All samples induced line width unanimously to be 2 microns, and the nisiloy oxide thickness is consistent, 590 degrees centigrade of lower annealing 2 hours.We find that the equal self-induction line of all samples begins crystallization, but along with the increase crystallization velocity of T1 thickness reduces.When Si oxide was 6 nanometer, MMIC polysilicon crystallization zone was dish.We find, if the silica in inducing line and the silica thin of inducing outside the window induce the line can not pre-defined nucleus position.In this case, nucleus generates in amorphous silicon at random.
B: the impact of inducing window width (W)
Fig. 7 has showed and induces line width (W) on the impact of MMIC polysilicon pattern.Induce line width to be respectively 1 micron and 3 microns.Inducing the outer silicon oxide thickness of line is 3 nanometers, and the nisiloy oxide thickness is 10 dusts.When the width of inducing window is 1 micron, polysilicon is formed continuous banded structure (CZD) in identical width, and this just means does not have little crystal grain in inducing line.Metal-induced crystallization occurs in the discontinuous zone, and the amorphous silicon crystallization starts from inducing in the line round isolated atomic nucleus along radial direction, and is then online outer along radially or cross growth.When inducing line width to be 3 microns, in inducing line, there is little crystal grain to form.
C: the impact of nisiloy oxide thickness
Fig. 8 has showed that the nisiloy oxide thickness is respectively 7 dusts, the optical microscope photograph of the MMI C polysilicon membrane of 10 dusts and 14 dusts, and inducing the outer SiOx thickness of line is 4 nanometers, and inducing line width is 2 microns, and sample was 590 ℃ of lower annealing 30 minutes.When the nisiloy oxide thickness was 7 dust, many isolated nucleus formed in inducing line, then metal inducement recrystallized amorphous silicon radially carrying out along these isolated nucleus.When the nisiloy oxide thickness was 10 nanometer, more isolated epipole formed in inducing line, and then metal inducement amorphous silicon crystallization is carried out along radial direction (MIRC) or the horizontal direction (MILC) of these isolated epipoles.When the nisiloy oxide thickness was 14 nanometer, some nuclei of crystallization formed inducing outside the crystallization scope of line and MILC, the non-homogeneous territory that the MMIC polysilicon that therefore causes forms, and this will cause electric property heterogeneous.
Discuss
Metal inducement amorphous silicon crystallization uses nickel as catalyst, nickel-silicon compound (NiSi when thermal annealing 2) result from first the intersection of nickel and silicon.NiSi 2After forming the needle-like polysilicon, move in the amorphous silicon.For MMIC, nickel need to pass through nanometer layer SiO 2Cover layer is diffused in the amorphous silicon, and the diffusing capacity of the nickel by silicon dioxide cover layer can draw by Fick's second law.
C ( x , t ) = C s × erfc { x 2 × ( D × t ) 1 / 2 } - - - ( 1 )
Wherein C (x, t) and Cs are respectively the nickel concentrations at silicon dioxide bottom and top, and D is diffusion coefficient, and x is SiO 2Thickness, t is the Annealing Crystallization time.Formula (1) shows, compares SiO in inducing line with the amorphous silicon outside inducing line 2That can reach early that the thresholding concentration because induce of revulsive crystallization covers in the line with amorphous silicon interface nickel concentration is thinner SiO 2Layer.That is to say NiSi 2(in other words nucleus) is formed on the earliest and induces in the line.This is nanometer SiO 2The cover layer can be pre-aligned the position of crystallization nucleation, what need silicon dioxide induces enough thick reasons of the outer cover layer of line.
Grain density depends on quantity and the distribution of nickel, and this also is subjected to area density (nisiloy oxidated layer thickness), the SiO of nickel medium 2Thickness, induce the impact of the width of line.Be dispersed in amorphous silicon surfaces and can form many isolated nucleus if the content of nickel is very low or nickel medium is random.In this case, will form (such as Fig. 7 a or 8a) CZD polysilicon or large regional dish shape polycrystalline.Thin silicon dioxide film is to the filter effect of nickel, and the nucleus that is conducive to isolate forms.Therefore, think and induce ultra-thin Si O in the line 2Layer forms one of key factor of CZD polysilicon.
Nickel is by thick SiO outside inducing line 2Gradually to diffusion all around.Think, when nickel density is lower than the required threshold value of metal inducement recrystallized amorphous silicon, their constantly add the mobile forward that induces, and the nickel that consumes in the complementary induction crystallization process also improves crystalline rate.Along with SiO 2The area density of the increase of thickness and minimizing nickel accelerant passes through SiO 2The amount of the nickel of diffusion reduces, and causes crystallization velocity to reduce (shown in Fig. 6, Fig. 8 a and Fig. 8 b).Yet when the density of nickel was higher than the required threshold value of metal inducement amorphous silicon crystallization, many nucleus formed and surmount MIRC or MILC border, and the result forms polysilicon and forms mixed and disorderly zone (shown in Fig. 8 a).
By the crystallization process of the nano silicon cover layer that designs, induce the width of line, the thickness of line external oxidation silicon layer, the thickness of nisiloy oxide skin(coating) all can affect the pattern of MMIC polysilicon.Nano silicon oxide cover layer can pre-aligned crystallization nucleation the position.Under the process conditions of the best, can obtain transverse crystallization zone (CZD) and form the identical polysilicon membrane of identical width.
Contrast with GGS and MILC
Fig. 9 (a), (b), (c) have showed respectively the cross sectional representation of MMIC commonly used, MILC and GGS structure.For general MILC structure, nucleus is formed on the MIC zone at first, and then transverse crystallizing forms high-quality MILC zone.As known to, to have some nickel to remain in the polysilicon membrane when nickel-silicon compound advances in amorphous silicon membrane, therefore, the density of locating nickel the crystallization forward can continue further to reduce with the transverse crystallization process, thereby reduces the transverse crystallizing speed under fixed temperature.For general MILC, all nickel is from MIC district diffusion, so that MIC goes to have very high nickel is residual, is not suitable as the TFT active layer.That is to say that the TFT passage can only be positioned at the MILC district.
In order to realize the GGS polysilicon membrane, between nickel and amorphous silicon, form one deck SiO 2Or the barrier layer of SiNx.Like this, nickel to amorphous silicon surfaces, means that some nickel are shunted in the barrier layer simultaneously by barrier layer diffusion.The concentration that can effectively control the nickel that enters amorphous silicon by this layer barrier layer reduces the concentration of nickel in amorphous silicon layer simultaneously, and then obtains high-quality GGS polysilicon layer.Yet, this technique or some defective, such as the random distribution of nucleus, thereby cause crystal grain the uneven distribution needs on amorphous silicon film surface longer the Annealing Crystallization time.
For MMIC, the thickness of nickel-silicon compound induces the oxide thickness T2 in the line to form continuous band-shaped polysilicon membrane with inducing line oxide thickness T1 outward to be optimized.Thinner oxide in inducing line is so that this regional amorphous silicon has higher nickel concentration.So when nickel concentration reached the threshold value that makes the amorphous silicon crystallization, the polysilicon crystallization in this zone can early than the part of inducing outside the line, at this moment induce the concentration of nickel in the outer amorphous silicon of line to be lower than the required threshold concentration of MIC.In case the amorphous silicon crystallization in inducing line, transverse crystallization also will begin.Its nickel that consumes obtains continuous supplementation with the nickel of the diffusion of the oxide areas outside inducing line, so do not need from inducing the long-range diffusion of carrying out in the line to replenish.This means that nickel concentration required in inducing line only need start the MILC process, this is to require required much lower threshold densities than normal MILC.In other words, by the MMIC technology, can reduce the nickel concentration ratio between MIC and the MILC area, make whole polysilicon membrane go for the TFT active layer, this means, the problem that the glass substrate that the MILC process causes shrinks the misalignment that causes can be overcome.
A: crystallization process relatively
Induce line can obtain the identical CZD metal induced crystallization poly-crystalline Si film of width film by setting in advance at nano silicon oxide cover layer.After the crystallization, the All Ranges of polysilicon layer can be as the active layer of high performance thin film transistor (TFTs), can overcome that the contraction of glass substrate causes to the version problem of misalignment.All transverse crystallization zones have accurate equal length and width, thus crystallization process can be controlled accurately and also at 590 ℃ of lower annealing times less than 1 hour.Figure 10 has showed respectively the optical microscope photograph of the silicon thin film that GGS and CZD technology were annealed 1 hour under 590 ℃ of nitrogen atmospheres.By tetramethyl hydrogenation ammonium to thin film corrosive, so that better observe.Figure 10 has showed the whole crystallization of CZD film and the GGS film still has most of zone non-crystallized.
Figure 11 has showed that GGS and CZD technology are to the crystallization area proportion of large tracts of land substrate and the relation of crystallization time under 590 ℃ of annealing conditions.CZD technology crystallization can be finished 100% crystallization in 60 minutes, and the GGS technology is only finished 50% crystallization.
The nickel retention analysis of B:SIMS
In order relatively to use after CZD method and metal induced longitudinal crystallization method (MILC) crystallization residual nickel concentration in the polysilicon membrane, content and the distribution of using Tof-SIMS to measure nickel in CZD and MILC gained polysilicon.Nickel content in the CZD film is than lack 2 orders of magnitude (Figure 12 (a)) in the MILC film.Figure 12 (b) and shown respectively that (c) 2 dimensions (2D) of in CZD and MILC gained polysilicon membrane residual nickel distribute.In 2 dimension figure, mark nickel and/or nickel silicide with bright spot.(Figure 12 (b), the bright post of both sides are MIC zones to MILC polysilicon membrane in 2 dimension images, and middle dim lines are 2 crystal boundaries that the head-on collision of MILC zone forms.This nickel content that shows the crystal boundary that clashes is relatively higher, and the MIC zone is then very high.
(Figure 12 (c)) is similar to the MIC zone in the MILC film in the 2D of CZD polysilicon membrane image, in the nucleation area distribution more nickel.But transverse metal is induced in the thin-film technique, and the content of nickel residual metal is more a lot of than nickeliferous ratio height of measuring one's own ability in nucleation zone and the transverse crystallization zone of wanting in the CZD polysilicon membrane in the polysilicon membrane in MIC and MILC zone.This means that not having the zone in the CZD polysilicon is the nickel that contains high concentration.Whole polysilicon membrane can be made the active layer of TFT.The nickel concentration that this means the CZD polysilicon membrane is lower, and uniformity is higher.
3.6CZDTFT manufacture process
Prepare typical top grid TFTS with the CZD polysilicon layer.The CZD polysilicon membrane becomes active silicon island with Freckle etching liquid wet etching, by the heavy method (LPCVD) of low pressure chemical gas phase at the low temperature oxide (LTO) of 425 ℃ of deposit 50 nanometer thickness as gate insulator.Form gate electrode, with boron with 4 * 10 15/ cm 2Metering Implantation source electrode and drain electrode.Oxide with the method for LPCVD deposition 500nm is opened the electrode contact hole as insulating barrier and in grid, source electrode and drain region.Subsequently, the aluminium photoetching that contains 1%Si of sputter 700 nanometer thickness forms test electrode.420 ℃ of lower sintering 30 minutes to be to form good ohmic contact in the forming gas of hydrogen and nitrogen, simultaneously dopant activation.What Figure 13 showed is the cross sectional representation of P type CZD multi-crystal TFT.
3.7TFT the impact of active channel position
In order to study the uniformity of CZD TFT, designed 5 kinds of layouts, wherein the MIC nucleus of CZD zone and MILC/MILC crystal boundary (LLGB) lay respectively at the zoness of different such as source electrode, drain electrode and channel region of TFT.They are done following description, and such as Figure 14, wherein (A) nucleation zone is positioned in the middle of the channel region, and LLGB is positioned at outside source electrode and drain electrode (S/D) node simultaneously; (B) MIC nucleus zone is outside source electrode or drain electrode (S/D) node and LLGBs is positioned in the middle of the channel region; (C) MIC nucleus zone is not that the MILC/MILC crystal boundary is positioned at outside source electrode and the drain node zone the drain node place is overlapping exactly at source electrode; (D) to be positioned at the outer and MILC/MILC crystal boundary zone of source electrode or drain node be not to be exactly overlapping at the drain node place at source electrode in MIC nucleus zone; (E) MIC nucleus zone and LLGBs zone are outside source electrode or drain node and active channel zone.Wherein, the W/L size of all TFT can be 30 μ m/10 μ m, and the nucleation peak width is about 2 μ m.
The electric property of CZD multi-crystal TFT is measured by HP4156 type analyzing parameters of semiconductor instrument.Threshold voltage (Vth) can produce into Id=W/L * 10 when being defined in Vds=-0.1V -8Vg during A.Field-effect mobility (μ FE) when low drain voltage, pass through Provide.
W and L are width and the length of channel region, and gm is mutual conductance, and Cox is the specific capacitance on the grid gate insulation layer, and Vds is voltage between source electrode and drain electrode, the greatest measurement of the field-effect mobility that provides in the report.Table 1 has been listed the more detailed comparison of important parameter.For better research, every kind of model TFTS measures 3, with 1,2,3 as its numbering.
Threshold voltage (the V of table 15 kind of diverse location CZD TFTs Th), sub-threshold slope (S Sub), field-effect mobility (μ FE) and grid induction drain leakage (GIDL)
Figure BSA00000608962900132
Figure BSA00000608962900141
By above comparison, find that the parameter of TFTS is basic identical.The electric property of the TFT of E model is slightly good, has more uniform threshold V T H, subthreshold amplitude of oscillation S, field-effect mobility, and has lower leakage current when high Vds.This is because both do not have MIC nucleus zone also not have LLGBS at channel layer and S/D Nodes.E type TFT has lower leakage current and shows that the nickel in its zone is residual lower and defective is also less.A type TFT nucleation zone is positioned in the middle of the channel layer and LLGBS performance source electrode and drain node outside is compared E type TFT and do not had clearly decline, this with regard to indirect proof the nucleation crystallization region the same good with the crystalline quality in transverse crystallization district.The LLGBs of Type B TFT is positioned in the middle of the channel layer and MIC nucleus zone and is positioned at source electrode or drain node and has the subthreshold amplitude of oscillation (S) more than or equal to 0.473V/dec outward, be higher than E type TFT-0.436V/dec.This illustrates that the adjacent formed head-on collision crystal boundary LLGBs in nucleus zone has larger defect concentration compared to other zone of CZD polysilicon membrane, and this is difficult to avoid for polysilicon membrane that all better crystal grain form.
Figure 15 has showed I On, I Off, and GIDL is for P type raceway groove CZD, the Distribution Statistics of GGS (dish shape/large crystal grain) and cotton-shaped (little crystal grain) MIC TFTs.Show for GIDL and I in the distribution Off, CZD TFTS slightly is better than GGS TFTS, that is to say the I of CZD-TFTs OffBetter with the uniformity of GIDL.
Figure 16 has showed V ThWith S for P type raceway groove CZD, the Distribution Statistics of GGS (dish shape/large crystal grain) and cotton-shaped (little crystal grain) MIC TFTs.Show for V in the distribution ThAnd S, CZD TFTS slightly is better than GGS TFTS, that is to say the V of CZD-TFTs ThBetter with the S uniformity.Figure 17 has showed field-effect mobility (μ FE) for P type raceway groove CZD, the Distribution Statistics of GGS (dish shape/large crystal grain) and cotton-shaped (little crystal grain) MIC TFTs.But the result shows that field-effect mobility that CZD-TFTs compares GGS-TFTs is slightly low has better uniformity.
By above all statisticses, we can find, all reduced parameters have for cotton-shaped (little crystal grain) MIC TFTs and more are evenly distributed in three among the multi-crystal TFT s, but its performance parameter is lower than CZD and GGS TFTs.
Figure 18 (a) and Figure 18 (b) have shown respectively the threshold voltage that is distributed in CZD TFTS on 4 inches wafers and the histogram of field-effect mobility, W/L=30 μ m/2 * 5 μ m.Threshold voltage V ThMean value and standard deviation be respectively-what 0.143V of 3.72V field-effect mobility μ FEMean value and standard deviation be respectively 56.15cm 2/ Vs and 4.59cm 2/ Vs.
It should be noted that at last, above embodiment is only in order to describe technical scheme of the present invention rather than the present technique method is limited, the present invention can extend to other modification, variation, application and embodiment on using, and therefore thinks that all such modifications, variation, application, embodiment are in spirit of the present invention and teachings.

Claims (10)

1. the preparation method of the polysilicon membrane of a mask metal-induced crystallization comprises:
Step 1), with plasma activated chemical vapour deposition silicon dioxide on glass substrate, again with the low-pressure chemical vapor deposition amorphous silicon;
Step 2), amorphous silicon surfaces forms the nanometer titanium dioxide silicon layer, forms by photoetching process and induces window, induces the line place to form thin chemical oxide layer;
Step 3), the thin nisiloy oxide of sputter one deck on silicon dioxide layer and the chemical oxide layer, high annealing is with the whole crystallization of amorphous silicon.
2. method according to claim 1, wherein, step 3 also comprises: when 590 ℃ of lower annealing are a plurality of with the whole crystallization of amorphous silicon.
3. method according to claim 1 wherein, in the step 1, with the amorphous silicon of low-pressure chemical vapor deposition at 550 ℃ of deposit 45nm, immerses the natural oxidizing layer that removes the surface in the solution that contains 1% hydrofluoric acid.
4. method according to claim 1 wherein, is induced and is located silicon dioxide thickness beyond the line and be respectively 3 nanometers, 4 nanometers, 5 nanometers or 6 nanometers; The oxide of inducing the line place is chemical oxide, and thickness is 1-2nm, immerses H by the amorphous silicon with surface cleaning 2SO 4And H 2O 2Mixed solution formed in 10 minutes 120 ℃ of lower immersions.
5. method according to claim 1 wherein, induces the width of window to be respectively in 1 micron, 3 microns or the 1-3 micron one, and polysilicon layer forms continuous banded structure, and the nisiloy oxide thickness is consistent.
6. method according to claim 1, wherein, the width of inducing window is 1 micron, polysilicon is formed continuous banded structure in identical width, does not have little crystal grain in inducing line.
7. method according to claim 1, wherein, the nisiloy oxide thickness is respectively a thickness between 7 dusts, 10 dusts, 14 dusts or this three; Isolated nucleus forms in inducing line, then the metal inducement recrystallized amorphous silicon along these isolated nucleus radially or horizontal direction carry out.
8. method according to claim 1, wherein, metal inducement amorphous silicon crystallization uses nickel as catalyst, nickel-silicon compound results from the inducing in the line of intersection of nickel and silicon at first when thermal annealing, nickel-silicon compound moves in the amorphous silicon after forming the needle-like polysilicon, and nickel need to pass through nanometer layer SiO 2The cover layer is diffused in the amorphous silicon.
9. method according to claim 1, wherein, nickel is by thick SiO outside inducing line 2To diffusion all around, when nickel density is lower than the required threshold value of metal inducement recrystallized amorphous silicon, constantly add the mobile forward that induces gradually, the nickel that consumes in the complementary induction crystallization process also improves crystalline rate.
10. method according to claim 8, wherein, in case the amorphous silicon crystallization in inducing line, transverse crystallization also will begin, and the nickel that consumes obtains continuous supplementation with the nickel of the diffusion of the oxide areas outside inducing line.
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