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CN102879858A - Single-fiber three-way multiplexer with grating - Google Patents

Single-fiber three-way multiplexer with grating Download PDF

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CN102879858A
CN102879858A CN201210419042XA CN201210419042A CN102879858A CN 102879858 A CN102879858 A CN 102879858A CN 201210419042X A CN201210419042X A CN 201210419042XA CN 201210419042 A CN201210419042 A CN 201210419042A CN 102879858 A CN102879858 A CN 102879858A
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waveguide
grating
wavelength
fiber
output
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CN102879858B (en
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盛振
凌伟
甘甫烷
武爱民
王曦
邹世昌
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Shanghai Institute of Microsystem and Information Technology of CAS
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NANTONG OPTO-ELECTRONICS ENGINEERING CENTER CHINESE ACADEMY OF SCIENCES
Jiangsu Sunfy Optoelectronics Technology Co ltd
Shanghai Institute of Microsystem and Information Technology of CAS
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Abstract

The invention provides a single-fiber three-way multiplexer with a grating. The single-fiber three-way multiplexer with the grating at least comprises an input waveguide used for being connected with an optical wave signal with a first wavelength and a second wavelength, an uploading waveguide used for being connected with an optical wave signal with a third wavelength, a first output waveguide, a second output waveguide and a multi-mode waveguide coupler, wherein the multi-mode waveguide coupler is used for separating a first wavelength signal and a second wavelength signal; the first wavelength signal and the second wavelength signal are output through the first output waveguide and the second output waveguide respectively; and in addition, the grating of the multi-mode waveguide coupler can reflect the optical wave signal with the third wavelength; the optical wave signal is output by the input waveguide; and preferably, the input waveguide, the uploading waveguide, the first output waveguide, the second output waveguide and the multi-mode waveguide coupler are formed by etching a semiconductor substrate. The single-fiber three-way multiplexer has the advantages of being compact and small in structure, completely compatible with the manufacturing process and a complementary metal oxide semiconductor (CMOS) process, free from a complex process, and low in processing cost.

Description

Single-fiber three-way multiplexer with grating
Technical field
The present invention relates to Optical Access Network network field, particularly relate to a kind of single-fiber three-way multiplexer with grating.
Background technology
Considerable progress along with Optical Access Network network technology, and the increase of the portfolios such as IPTV, video request program and online game, the user further increases the demand of access bandwidth, require more and more higher to the Optical Access Network network, technology that Fiber to the home (FTTH) has become the main technical schemes of Optical Access Network network, and EPON (PON) technology is the mainstream technology of FTTH, and it can realize video, voice, data unification of three nets.In the PON technology that is used for FTTH, realize that the core devices of communicating by letter between optical line terminal (OLT) and the terminal user is exactly single-fiber three-way multiplexer, work out the actual demand that the single-fiber three-way multiplexer that satisfies communication bandwidth requirement, low cost, miniaturization is application, therefore have very important significance.These actual requirements also are the key factors of restriction FTTH Technique Popularizing.
The major function of single-fiber three-way multiplexer, that the voice signal of the wavelength 1490nm of OLT output and the vision signal of wavelength 1550nm and the wavelength 1310nm signal multiplexing that the user uploads are advanced an optical fiber, the user can receive respectively by receiver the vision signal of voice signal and the wavelength 1550nm of wavelength 1490nm, and by uploading waveguide local data is uploaded to OLT.The single-fiber three-way multiplexer of at present practical application is made of discrete device, has the encapsulation of being not easy to, the large and high in cost of production shortcoming of coupling loss; And another kind is very little owing to the refringence between sandwich layer and the covering based on the triplexer of Planar Lightwave Circuit Technology (PLC), causes its device size still larger.In addition, often use the mode of multimode waveguide coupling mechanism (MMI) and the mutual cascade of array waveguide grating (AWG) to realize multiplexing function based on the triplexer of PLC, so that the structure of device is compact not.
Along with the development of semiconductor technology, Si and SiO 2Height refraction poor (2.0) provide possibility for the integrated optical wave guide device of realization nano optical wave guide and extra small yardstick.And the CMOS technique of using in the manufacturing process of Si Nanowire Waveguides and the existing electronics industry can be fully compatible, is low cost, and large batch of production provides possibility.Therefore with respect to traditional triplexer, how to provide a kind of low cost, small size, the triplexer of high integration has become the technical task that those skilled in the art need to solve.
Summary of the invention
The shortcoming of prior art the object of the present invention is to provide the low single-fiber three-way multiplexer with grating of a kind of compact conformation cost in view of the above.
Reach for achieving the above object other relevant purposes, the invention provides a kind of single-fiber three-way multiplexer with grating, it comprises at least:
The input waveguide that is used for the lightwave signal of access the first wavelength and second wave length;
The waveguide of uploading for the lightwave signal that accesses three-wavelength;
The first output waveguide;
The second output waveguide;
By port connect respectively described input waveguide, upload waveguide, the multimode waveguide coupling mechanism of the first output waveguide and the second output waveguide, for separating of described the first wavelength signals and second wave length signal, and make both respectively by the first output waveguide and the output of the second output waveguide, described multimode waveguide coupling mechanism also has grating, described grating can reflect the lightwave signal of described three-wavelength, and makes this lightwave signal export OLT to by input waveguide.
Preferably, described input waveguide, upload waveguide, the first output waveguide, the second output waveguide and multimode waveguide coupling mechanism and all form by the etching to semiconductor base; More preferably, form by the top layer silicon etching to silicon-on-insulator.
Preferably, described input waveguide, upload waveguide, the first output waveguide, and the second output waveguide be Nanowire Waveguides.
Preferably, described input waveguide, upload waveguide, the first output waveguide, and the second output waveguide all tapered.
Preferably, described grating loses to form by the light engraving to described semiconductor base.
Preferably, described grating comprises Bragg grating.
As mentioned above, the single-fiber three-way multiplexer with grating of the present invention has following beneficial effect: grating is embedded on the multimode waveguide coupling mechanism to realize the multiplexing function of three wavelength, so that the structure of device is extremely compact; Si Nanowire Waveguides processing technology and CMOS technique based on silicon-on-insulator are fully compatible, need not complicated technology, and processing cost is low; Based on the Si Nanowire Waveguides, for huge refringence is provided between sandwich layer and the covering, can reduce greatly the size of device, increase substantially integrated level.
Description of drawings
Fig. 1 is shown as the two-dimensional structure synoptic diagram with single-fiber three-way multiplexer of grating of the present invention.
Fig. 2 is shown as the three-dimensional structure synoptic diagram with single-fiber three-way multiplexer of grating of the present invention.
The element numbers explanation
Figure BDA0000231661631
Embodiment
Below by particular specific embodiment explanation embodiments of the present invention, person skilled in the art scholar can understand other advantages of the present invention and effect easily by the disclosed content of this instructions.
See also Fig. 1 to Fig. 2.Notice, the appended graphic structure that illustrates of this instructions, ratio, size etc., equal contents in order to cooperate instructions to disclose only, understand and reading for person skilled in the art scholar, be not to limit the enforceable qualifications of the present invention, so technical essential meaning of tool not, the adjustment of the modification of any structure, the change of proportionate relationship or size, under the prerequisite that does not affect the effect that the present invention can produce and the purpose that can reach, all should still drop in the covering scope of disclosed technology contents.Simultaneously, quote in this instructions as " on ", D score, " left side ", " right side ", " centre " reach the term of " " etc., also only for ease of understanding of narrating, but not in order to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, under without essence change technology contents, when also being considered as the enforceable category of the present invention.
As shown in the figure, the invention provides a kind of single-fiber three-way multiplexer with grating.Described single-fiber three-way multiplexer 1 comprises at least: input waveguide 11, upload waveguide 12, the first output waveguide 13, the second output waveguide 14 and multimode waveguide coupling mechanism 15.
Described input waveguide 11 is used for the lightwave signal of access the first wavelength and second wave length.
Wherein, the lightwave signal of the first wavelength and second wave length comprises the lightwave signal of any wavelength, and preferably, the lightwave signal of the first wavelength and second wave length is respectively voice signal and vision signal, for example, the lightwave signal of the first wavelength is the voice signal of wavelength 1490nm; The lightwave signal of second wave length is the vision signal of wavelength 1550nm.
Described input waveguide 11 can form by the etching to semiconductor base, for example, as shown in Figure 2, the top layer silicon 21 of 11 pairs of silicon-on-insulators 2 of input waveguide is carried out etching, form 4 Si Nanowire Waveguides, wherein a Si Nanowire Waveguides in left side is as input waveguide 11.
In addition, can further the Si Nanowire Waveguides as input waveguide 11 be etched into taper, for example, taper as shown in Figure 1 reduces loss thus.
Describedly upload the lightwave signal that waveguide 12 is used for the access three-wavelength.
Wherein, the three-wavelength signal comprises the lightwave signal that is different from arbitrarily the first wavelength and second wave length, and preferably, the three-wavelength signal is uploaded signal for the user, for example, is the lightwave signal of wavelength 1310nm.
Describedly upload waveguide 12 and also can form by the etching to semiconductor base, for example, as shown in Figure 2, a Si Nanowire Waveguides in left side is as uploading waveguide 12.
In addition, also can further the Si Nanowire Waveguides as uploading waveguide 12 shown in Figure 2 be etched into taper, for example, taper as shown in Figure 1 reduces loss thus.
Described the first output waveguide 13 is used for the output light-wave signal, and it also can form by the etching to semiconductor base, and for example, as shown in Figure 2, a Si Nanowire Waveguides on right side is as the first output waveguide 13.
In addition, also can further the Si Nanowire Waveguides as the first output waveguide 13 shown in Figure 2 be etched into taper, for example, taper as shown in Figure 1 reduces loss thus.
Described the second output waveguide 14 is used for the output light-wave signal, and it also can form by the etching to semiconductor base, and for example, as shown in Figure 2, a Si Nanowire Waveguides on right side is as the second output waveguide 14.
In addition, also can further the Si Nanowire Waveguides as the second output waveguide 14 shown in Figure 2 be etched into taper, for example, taper as shown in Figure 1 reduces loss thus.
Described multimode waveguide coupling mechanism 15 has 4 port (not shown)s, and these 4 ports connect respectively input waveguide 11, upload waveguide 12, the first output waveguide 13 and the second output waveguide 14; Described multimode waveguide coupling mechanism 15 also has grating 151, as shown in Figure 1.
Described multimode waveguide coupling mechanism 15 also can form by the etching to semiconductor base, and for example, as shown in Figure 2, wherein, described grating 151 loses to form by the light engraving to top layer silicon 21.
Wherein, described grating 151 comprises the lightwave signal of the described three-wavelength of any energy reflection, and makes this lightwave signal by the grating of input waveguide output, preferably, includes but not limited to Bragg grating etc.
As seen from Figure 1, this multimode waveguide coupling mechanism 15 with the lightwave signal of the wavelength 1490nm of input waveguide 11 access and 1550nm separately, and from the lightwave signal of the first output waveguide 13 output wavelength 1490nm, from the lightwave signal of the second output waveguide 14 output wavelength 1550nm; The lightwave signal of the wavelength 1310nm of waveguide 12 accesses is uploaded in simultaneously grating 151 reflections of this multimode waveguide coupling mechanism 15, make the lightwave signal of wavelength 1310nm by input waveguide 11 outputs, do not affect the lightwave signal of input waveguide 11 transmission wavelength 1490nm and 1550nm simultaneously.
In sum, what the single-fiber three-way multiplexer with grating of the present invention was taked is that the method for etching is made on silicon-on-insulator, Si Nanowire Waveguides and SiO 2Refringence huge between the substrate will reduce the size of device greatly, and fully compatible based on Si Nanowire Waveguides processing technology and the CMOS technique of silicon-on-insulator, need not complicated technology, and processing cost is low; In addition, the Bragg grating with the light engraving erosion is embedded on the multimode waveguide coupling mechanism to realize the multiplexing function of three wavelength, so that the structure of device is extremely compact.So the present invention has effectively overcome various shortcoming of the prior art, thereby has high industrial utilization.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not is used for restriction the present invention.Any person skilled in the art scholar all can be under spirit of the present invention and category, and above-described embodiment is modified or changed.Therefore, have in the technical field under such as and know that usually the knowledgeable modifies or changes not breaking away from all equivalences of finishing under disclosed spirit and the technological thought, must be contained by claim of the present invention.

Claims (8)

1. the single-fiber three-way multiplexer with grating is characterized in that, described single-fiber three-way multiplexer with grating comprises at least:
The input waveguide that is used for the lightwave signal of access the first wavelength and second wave length;
The waveguide of uploading for the lightwave signal that accesses three-wavelength;
The first output waveguide;
The second output waveguide;
By port connect respectively described input waveguide, upload waveguide, the multimode waveguide coupling mechanism of the first output waveguide and the second output waveguide, for separating of described the first wavelength signals and second wave length signal, and make both respectively by the first output waveguide and the output of the second output waveguide, described multimode waveguide coupling mechanism also has grating, described grating can reflect the lightwave signal of described three-wavelength, and this lightwave signal is exported by input waveguide.
2. the single-fiber three-way multiplexer with grating according to claim 1 is characterized in that: described input waveguide, upload waveguide, the first output waveguide, the second output waveguide and multimode waveguide coupling mechanism and all form by the etching to semiconductor base.
3. the single-fiber three-way multiplexer with grating according to claim 1 and 2 is characterized in that: described input waveguide, upload waveguide, the first output waveguide, and the second output waveguide be Nanowire Waveguides.
4. the single-fiber three-way multiplexer with grating according to claim 2, it is characterized in that: described semiconductor base comprises silicon-on-insulator.
5. the single-fiber three-way multiplexer with grating according to claim 2, it is characterized in that: described grating loses to form by the light engraving to described semiconductor base.
6. the single-fiber three-way multiplexer with grating according to claim 1 is characterized in that: described input waveguide, upload waveguide, the first output waveguide, and the second output waveguide all tapered.
7. the single-fiber three-way multiplexer with grating according to claim 5, it is characterized in that: described grating comprises Bragg grating.
8. the single-fiber three-way multiplexer with grating according to claim 1, it is characterized in that: the lightwave signal of the first wavelength and second wave length is respectively voice signal and vision signal; The three-wavelength signal is uploaded signal for the user.
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104426604A (en) * 2013-09-10 2015-03-18 中国电信股份有限公司 Single-fiber three-way multiplexer for optical network unit and monolithic integrated reflector
CN105572796A (en) * 2016-03-07 2016-05-11 龙岩学院 Add/drop filter based on antisymmetric multimode Bragg waveguide grating
CN106950659A (en) * 2017-05-11 2017-07-14 青岛海信宽带多媒体技术有限公司 Optical module
CN110637245A (en) * 2017-06-16 2019-12-31 华为技术有限公司 Optical add drop multiplexer
CN111239895A (en) * 2020-02-26 2020-06-05 北京邮电大学 Waveguide coupling structure and light emitter system
CN117008249A (en) * 2023-10-07 2023-11-07 之江实验室 Lithium niobate wavelength division multiplexer and optical signal multiplexing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1719754A (en) * 2005-07-14 2006-01-11 四川飞阳科技有限公司 Plane integrated single fibre three-directional optical signal processing chip device
CN101464540A (en) * 2007-12-19 2009-06-24 中国科学院半导体研究所 Mixed integral single fibre three-way device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1719754A (en) * 2005-07-14 2006-01-11 四川飞阳科技有限公司 Plane integrated single fibre three-directional optical signal processing chip device
CN101464540A (en) * 2007-12-19 2009-06-24 中国科学院半导体研究所 Mixed integral single fibre three-way device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
《光电子˙激光》 20100831 安俊明,等 基于Si纳米线AWG的超紧凑单纤三向滤波器设计 1115-1118 3 第21卷, 第8期 *
安俊明,等: "基于Si纳米线AWG的超紧凑单纤三向滤波器设计", 《光电子˙激光》 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104426604A (en) * 2013-09-10 2015-03-18 中国电信股份有限公司 Single-fiber three-way multiplexer for optical network unit and monolithic integrated reflector
CN104426604B (en) * 2013-09-10 2017-02-08 中国电信股份有限公司 Single-fiber three-way multiplexer for optical network unit and monolithic integrated reflector
CN105572796A (en) * 2016-03-07 2016-05-11 龙岩学院 Add/drop filter based on antisymmetric multimode Bragg waveguide grating
CN105572796B (en) * 2016-03-07 2018-08-21 龙岩学院 A kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating
CN106950659A (en) * 2017-05-11 2017-07-14 青岛海信宽带多媒体技术有限公司 Optical module
CN110637245A (en) * 2017-06-16 2019-12-31 华为技术有限公司 Optical add drop multiplexer
US10871615B2 (en) 2017-06-16 2020-12-22 Huawei Technologies Co., Ltd. Optical add/drop multiplexer
CN111239895A (en) * 2020-02-26 2020-06-05 北京邮电大学 Waveguide coupling structure and light emitter system
CN117008249A (en) * 2023-10-07 2023-11-07 之江实验室 Lithium niobate wavelength division multiplexer and optical signal multiplexing method
CN117008249B (en) * 2023-10-07 2024-04-02 之江实验室 Lithium niobate wavelength division multiplexer and optical signal multiplexing method

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