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CN102862239A - Rotary floating cutting numerical control machine tool for silicon rod - Google Patents

Rotary floating cutting numerical control machine tool for silicon rod Download PDF

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Publication number
CN102862239A
CN102862239A CN2012103601487A CN201210360148A CN102862239A CN 102862239 A CN102862239 A CN 102862239A CN 2012103601487 A CN2012103601487 A CN 2012103601487A CN 201210360148 A CN201210360148 A CN 201210360148A CN 102862239 A CN102862239 A CN 102862239A
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China
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silicon rod
cutting
floating
machine tool
rotation support
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CN2012103601487A
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CN102862239B (en
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刘鸿彬
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Individual
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Abstract

The invention discloses a rotary floating cutting numerical control machine tool for a silicon rod, and relates to a numerical control machine tool, in particular to a numerical control cutting machine for cutting the silicon rod. The rotary floating cutting numerical control machine tool comprises a numerical control box, a machine tool body, a transmission mechanism, and a cutting mechanism and a silicon rod clamping mechanism which are arranged on the machine tool body, and is characterized in that the silicon rod clamping mechanism comprises a driving rotation support wheel which clamps the silicon rod in a matching manner in the vertical direction, and a floating rotary pressing wheel; the floating rotary pressing wheel is connected with an elastic pressing device which drives the floating rotary pressing wheel to tightly press the silicon rod; and the transmission mechanism is connected with a shaft of the driving rotation support wheel. The rotary floating cutting numerical control machine tool can realize the non-concentric axial rotation floating radius cutting of polycrystalline silicon rods which have the characteristics that the material texture density is sparse, workpieces are bent in the axial direction, ovality exists in the diameter direction, the diameters are different, the appearances are not irregular, the breaking phenomenon is easy to generate, and the like in the floating rotation state, and is novel and capable of realizing the automatic radius cutting.

Description

The silicon rod rotation is floated and is cut Digit Control Machine Tool
Technical field
The present invention relates to a kind of Digit Control Machine Tool, relate in particular to a kind of numerical control cutting machine for silicon rod is cut.
Background technology
In at present domestic polysilicon industry production producer, all need the silicon rod of the 2--8 inch diameter that will restore to carry out radially scale cutting, for product inspection with meet different subsequent processing need of productions.
The patent No. is 200920287130.2, open day for the Chinese patent of 2010.12.22 " list/polycrystalline silicon rod cutting machine ", a kind of silicon rod cutting machine is disclosed, this cutting machine comprises the crystal bar fixture, diced system and cooling system, described crystal bar fixture comprises some frocks that fix to clamp, fixing to clamp frock is located on workbench, fix to clamp the left and right sides that frock is located at respectively grinding wheel, workbench is provided with dust cover and rule in addition, this utility model is mainly to utilize that to fix to clamp frock fixing respectively by part to be cut and cut-out, reliable to reach location, cut lengths are stable, solve the purpose that moves and collapse the problems such as limit in the crystal bar cutting process.
The patent No. is 201120383908.7, open day for the Chinese patent of 2012.5.30 " a kind of improved silicon rod cutting device ", a kind of silicon rod cutting device is disclosed, it comprises home roll, gauze and main body feed unit clamp mechanism, main body feed unit clamp mechanism comprises two groups of the left and right clamping unit that is positioned at the gauze top, clamping unit is included in the silicon rod work plate and work plate is installed, set up steel disc between silicon rod work plate and installation work plate, by artificially forcing down in advance the silicon rod inside height, inside and outside making while having cut, the both sides depth of cut is consistent, and then reach the purpose that reduces fragment.
The cutting mode of above-mentioned two patents all adopts full diameter cutting mode, thereby its vibration is larger, and cut direction can't be vertical with the axial maintenance of silicon rod bending, and cut part is easily broken.
The patent No. is 200820223950.0, open day for the Chinese patent of 2009.10.21 " silicon rod taper or cylindrical numerical control grinder ", a kind of silicon rod numerically control grinder is disclosed, comprise frame and numerical control box, also comprise by numerical control box and control reciprocating workbench, be provided with the rack of place work piece and control by numerical control box the workpiece driven on rack and make the transmission device that concentric circles rotates on frame, being provided with at least one and being controlled the emery wheel coordinated with workpiece end to be ground by numerical control box on workbench.Its goal of the invention is that the silicon core rod end is ground into to the high cylinder of concentricity or cone, and silicon plug one end is clamped by transmission device, and the other end lies in a horizontal plane on rack, its objective is that allowing the silicon plug do concentric circles on workbench rotates.
In reality is produced, due to the specific reasons of production technology, that the polycrystalline silicon rod lattice that is reduced is out organized usually is comparatively loose, intensity is poor; Can't guarantee axiality in 2.8 meters scopes of total length, all bending be arranged; Generally produce the ovality differed in size at the sectional area line of vision; In the different length scope, the not first-class multiple appearance irregular status of diameter generally appears.This silicon rod to be cut, using old-fashioned digital controlled cutting machine to silicon rod employing single-point forced draught formula location, while with the cutterhead instrument, carrying out radially full diameter cutting, silicon rod itself is subject to very big bang, and cut direction can't be vertical with the axial maintenance of silicon rod bending, cut part is very easily broken, is difficult to cut out finished product.This traditional cutting technique and equipment, the production of cause larger economic loss, incuring loss through delay again subsequent processing, significantly rise enterprise's production cost.
Summary of the invention
In order to overcome the defect of above-mentioned prior art, the invention provides the unsteady cutting of a kind of silicon rod rotation Digit Control Machine Tool, this Digit Control Machine Tool can overcome the multiple irregular status that the silicon rod appearance has fully, can be more sparse to material structure density, workpiece has axial bending, diametric(al) has ovality, the appearances such as diameter is inconsistent are irregular, breakable polycrystalline silicon rod is when the floating rotating state, realize the rotational automatic radius cutting of non-concentric, axial, and in the process of cutting silicon rod, cut direction is all the time perpendicular to the axle center of the non-Concentric rotation of silicon rod, be that the present invention can adjust the axially overall concentricity of silicon rod automatically, can automatically adjust the ovality because of silicon rod, flexibility, the drawback that the cylindrical object that not isometrical reason causes can't rotate.
In order to solve the problems of the technologies described above, the technical solution used in the present invention is:
A kind of silicon rod rotation is floated and is cut Digit Control Machine Tool, comprise numerical control box, lathe bed, transmission mechanism, be arranged on cutting mechanism and silicon rod clamping device on lathe bed, it is characterized in that: described silicon rod clamping device comprises that vertical direction coordinates active rotation support roller and the floating rotating pinch roller of clamping silicon rod; Described active rotation support roller drives silicon rod under the compression of floating rotating pinch roller, does non-concentric, axial rotation on the horizontal level of active rotation support roller and driven support roller .
Described floating rotating pinch roller vertically is positioned at the top of silicon rod, and is connected with elastic squeezing unit, and elastic squeezing unit drives the floating rotating pinch roller to press silicon rod around the shape of silicon rod cylindrical in good time.
Described active rotation support roller is positioned at the below of silicon rod, with transmission mechanism, is connected, and transmission mechanism drives the silicon rod rotation by the active rotation support roller.
Described active rotation support roller is two, and two active rotation supporting-roller shaft are to be arrangeding in parallel, and silicon rod is placed on two active rotation supporting-roller shaft in the groove formed.
On each of described silicon rod section, have at least one group to be formed by active rotation support roller and floating rotating pinch roller and the corresponding silicon rod clamping device arranged, has one group at least by driven rotation support roller and the corresponding silicon rod clamping device arranged of floating rotating pinch roller, and the rotation support roller of respectively organizing in the silicon rod clamping device is positioned on the same level position, top is provided with the elastic squeezing unit to the silicon rod clamping.
Described elastic squeezing unit is floating cylinder, be provided with piston in described floating cylinder, piston connects a driving shaft, the other end of driving shaft connects cross bar, the two ends of cross bar connect respectively the floating rotating pinch roller, floating cylinder drives driving shaft to press down, and the floating rotating pinch roller that drives the cross bar two ends presses silicon rod cylindrical position around the shape of silicon rod cylindrical in good time.
Described elastic squeezing unit is the spring compacting device, establish spring in described spring compacting device and connect a driving shaft, the other end of driving shaft connects cross bar, the two ends of cross bar connect respectively the floating rotating pinch roller, the spring compacting device drives driving shaft to press down, and the floating rotating pinch roller that drives the cross bar two ends presses silicon rod cylindrical position around the shape of silicon rod cylindrical in good time.
Described active rotation support roller is coaxial is provided with two groups, and two groups form locating slot between axially.On described silicon rod, cover has cutting scale ring, and cutting scale ring is placed in the locating slot of active rotation support roller or is positioned at a side of active rotation support roller, and cutting scale ring is with the equidirectional rotation of silicon rod.
Described transmission mechanism comprises drive sprocket, driving chain fixing on silicon rod electric rotating machine, driving belt, reductor, reductor turning cylinder, is arranged on the driven sprocket on the active rotation supporting-roller shaft, the silicon rod electric rotating machine is connected with reductor by driving belt, and drive sprocket is connected with driven sprocket by driving chain.
Described cutting mechanism comprises number controlcutting working platform, the below of described cutting working platform is provided with servo drive motor, ball-screw, linear slide rail, cutting working platform is positioned on linear slide rail, and the ball-screw connecting wire stem nut of described driven by servomotor drives the Numerical control cutting workbench and moves reciprocatingly on linear slide rail; The top of described cutting working platform is provided with cutting motor, motor-driven belt, cutting main shaft, cut workpiece cutter, and described cutting motor is connected with the cutting main shaft by the motor-driven belt, and the cut workpiece cutter is connected on the cutting main shaft.
Operation principle of the present invention and process are as follows:
The silicon rod of preparing to cut off is (the longest 2.8 meters, φ 200--40 millimeter) safe through being positioned at the cutting scale ring 13 in locating slot between the active rotation support roller, be placed in that the active rotation support roller be comprised of two parastates of level and two parastates form driven rotation support roller between concave surface on, the stainless steel ruler be fixed on lathe bed of take is standard, determine three screws that need on Cutting Length fastening cutting scale ring circumference, press the system hand switch, start floating cylinder (or spring assembly), utilize air pressure to make the floating rotating pinch roller be pressed in the cylindrical of silicon rod, with the irregular silicon rod of profile, can freely rotate, and can by the floating rotating pinch roller, it not broken as standard by excessive air pressure, the silicon rod of different-diameter need be adjusted different air pressures and cutting scale ring.Install the transparent watertight plate, start digital control system, system can bring into operation according to processing request, shining the numerical control program woven:
At first: start the silicon rod electric rotating machine and drive driving belt, reductor, driven the two section of the active rotation support roller rotation of drive sprocket, driving chain, driven sprocket, active rotation supporting-roller shaft, drive excellent elasticity by the output shaft on reductor.Cutting scale ring is fixed on silicon rod in the middle part locating slot of the two section of active rotation support roller, makes the irregular silicon rod of profile start to carry out non-concentric circles rotation under the floating pressure of two cover floating rotating pinch rollers.
Secondly: start cutting motor, drive the cutting main shaft through the motor-driven belt and drive again the rotation that the cut workpiece cutter starts high linear speed.
The the 3rd: start the cooling water magnetic valve, make cooling water be sprayed at the outward flange position of cut workpiece cutter by water nozzle.Start servo drive motor and drive ball-screw, drive Numerical control cutting workbench property along the line slide rail toward the operation of silicon rod direction by the feed screw nut, and silicon rod is cut, when reaching, penetraction depth is greater than silicon rod along two of non-concentric circles rotating diameter/for the moment, cut silicon rod falls into blank and connects dish.
Cut completely, according to the work of program stopped silicon rod electric rotating machine, the silicon rod driven by silicon rod electric rotating machine 1 power stops the rotation.The Numerical control cutting workbench that the cut workpiece cutter is housed is return original position automatically according to program property along the line slide rail, and the cooling water magnetic valve cuts out automatically, stops water spray, and the cut workpiece cutter stops operating.
Remove transparent water fender, press the system hand switch, unclamp floating cylinder and drive floating rotating pinch roller disengaging silicon rod.Taking-up is cut off silicon rod, again adjusts silicon rod and needs Cutting Length, repeats above-mentioned action, can enter next circular process.
The present invention has following technique effect:
1, the air that the present invention takes full advantage of in cylinder has the operation principle of compressibility or spring, make the irregular silicon rod of profile can be under air pressure (or spring) clamping position between the two section of a set of active rotation support rollers, a set of driven rotation pinch roller, can carry out non-concentric circles axial-rotation motion, cutting mechanism changes the radius cutting into by the full diameter cutting to workpiece originally, the excellent body vibration that cutting tool causes silicon rod like this reduces, controlled greatly the fragmentation of silicon rod, reduced clipping time, reduced production costs.
2, old-fashioned digital controlled cutting machine adopts single-point forced draught formula location, makes silicon rod produce very large internal stress silicon rod, due to polycrystalline silicon rod properties of materials (extremely crisp, easily broken, inflexibility), therefore it is broken very easily to make silicon rod produce when cutting.The present invention adopts the silicon rod rotation cutting mode that floats, and has overcome the drawback of old-fashioned Digit Control Machine Tool fully, makes that profile is irregular, the silicon rod of tissue looseness is cut into reality, can enhance productivity to a great extent and reduce production costs.
3, work piece cut scale ring of the present invention is be fixed on floating rotating workpiece to be cut and make it in the fit clearance of the two section of active rotation support roller interfix groove, with floating rotating workpiece synchronous rotary to be cut, use due to work piece cut scale ring, make the silicon rod scale cutting accurately in the floating rotating cutting process, length accuracy can reach 0.1MM, can meet easily every production technology index request.
4, lathe bed of the present invention is connected with support, support is provided with two driven rotation support rollers, the axis of described two driven rotation support rollers is parallel to each other, described driven rotation support roller revolves two sections with active and asks wheel on same level, and the axle of active rotation supporting-roller shaft and driven rotation support roller is respectively on same axis; Make silicon rod to place more steady, under air pressure (or spring) clamping position between the two section of a set of active rotation support roller, a set of driven rotation support roller and the driven rotation pinch roller of two covers, carry out non-concentric circles axial float rotation, make that workpiece is carried out to the radius cutting more accurate, minimizing at double clipping time, can significantly reduce production costs.
5, automaticity of the present invention is very high, and whole operations such as silicon rod rotatablely moves, Pneumatic clamping, radius cutting, by the numerical control box programme-control, except loading and unloading, can realize full-automatic CR production, can alleviate staff labor intensity.
The accompanying drawing explanation
Fig. 1 is constructional device front view of the present invention (without silicon rod 10);
Fig. 2 is floating rotating cutter sweep partial elevation view (silicon rod 10 is arranged);
Fig. 3 is constructional device right view of the present invention (silicon rod 10 is arranged);
Fig. 4 is constructional device left view of the present invention (silicon rod 10 is arranged);
Fig. 5 is constructional device top view of the present invention (without silicon rod 10);
Fig. 6 is that elastic squeezing unit of the present invention is the structural representation of floating cylinder
Fig. 7 is that elastic squeezing unit of the present invention is the structural representation of spring compacting device
Mark 1, silicon rod electric rotating machine in figure; 2, driving belt; 3, reductor; 4 drive sprockets; 5 driving chains; 6, driven sprocket; 7, active rotation supporting-roller shaft; 8, active rotation support roller; 9, driven rotation support roller; 10, silicon rod; 11, floating rotating pinch roller; 12, elastic pressuring clamping device; 13, work piece cut scale ring; 14, numerical control box; 15, servo drive motor; 16, cutting motor; 17, Numerical control cutting workbench; 18, motor-driven belt; 19, cutting main shaft; 20, cut workpiece cutter; 21, lathe bed; 22, support; 23, ball-screw; 24, linear slide rail; 25, cylinder block; 26, piston; 27, driving shaft; 28, cross bar, 29, spring; 30, driving shaft; 31, cross bar, 32, groove;
The specific embodiment
Embodiment 1
A kind of silicon rod rotation is floated and is cut Digit Control Machine Tool, comprise numerical control box, lathe bed, transmission mechanism, be arranged on cutting mechanism and silicon rod clamping device on lathe bed, it is characterized in that: described silicon rod clamping device comprises that vertical direction coordinates active rotation support roller 8 and the floating rotating pinch roller 11 of clamping silicon rod 10; Described active rotation support roller 8 drives silicon rod 10 under the compression of floating rotating pinch roller 11, does non-concentric, axial rotation on the horizontal level of active rotation support roller 8 and driven support roller 9
Described floating rotating pinch roller 11 vertically is positioned at the top of silicon rod 10, and is connected with elastic squeezing unit 12, and elastic squeezing unit 12 drives floating rotating pinch roller 11 shapes around the silicon rod cylindrical to press silicon rod 10 in good time.
Described active rotation support roller 8 is positioned at the below of silicon rod 10, with transmission mechanism, is connected, and transmission mechanism drives silicon rod 10 rotations by active rotation support roller 8.
Described active rotation support roller 8 is two, two active rotation support roller 8 axially parallel settings, and silicon rod 10 is placed in the axial groove 32 formed of two active rotation support rollers 8.
On each section of described silicon rod 10, in the scope of silicon rod 10 overall lengths, has one group at least by active rotation support roller 8 and the corresponding silicon rod clamping device arranged of floating rotating pinch roller 11, has one group at least by driven rotation support roller 9 and the corresponding silicon rod clamping device arranged of floating rotating pinch roller 11, and the rotation support roller in the silicon rod clamping device 8,9 is positioned on the same level position, top is provided with the elastic squeezing unit 12 to silicon rod 10 clampings.
Described elastic squeezing unit 12 is floating cylinders, be provided with piston in described floating cylinder, piston connects a driving shaft, the other end of driving shaft connects cross bar, the two ends of cross bar connect respectively floating rotating pinch roller 11, floating cylinder 12 drives driving shaft to press down, and the floating rotating pinch roller 11 that drives the cross bar two ends presses silicon rod 10 cylindrical positions around the shape of silicon rod cylindrical in good time.
On described silicon rod 10, cover has cutting scale ring 13, and cutting scale ring 13 is arranged in active rotation support roller 8, and cutting scale ring 13 is with silicon rod 10 rotating in same directions.
Described transmission mechanism comprises drive sprocket 4 fixing on silicon rod electric rotating machine 1, driving belt 2, reductor 3, reductor turning cylinder, driving chain 5, is arranged on the driven sprocket 6 on active rotation supporting-roller shaft 7, silicon rod electric rotating machine 1 is connected with reductor 3 by driving belt 2, and drive sprocket 4 is connected with driven sprocket 6 by driving chain 5.
Described cutting mechanism comprises Numerical control cutting workbench 17, the below of described cutting working platform 17 is provided with servo drive motor 15, ball-screw 23, linear slide rail 24, cutting working platform 17 is positioned on linear slide rail 24, and the ball-screw 23 connecting wire stem nuts that described servomotor 15 drives drive Numerical control cutting workbench 17 and move reciprocatingly on linear slide rail 24; The top of described cutting working platform 17 is provided with cutting motor 16, motor-driven belt 18, cutting main shaft 19, cut workpiece cutter 20, described cutting motor 16 is connected with cutting main shaft 19 by motor-driven belt 18, and cut workpiece cutter 20 is connected on cutting main shaft 19.
Embodiment 2
As shown in Figure 1 and Figure 2, a kind of silicon rod rotation is floated and is cut Digit Control Machine Tool, comprise on numerical control box 14, lathe bed 21, transmission mechanism, lathe bed and be respectively equipped with cutting mechanism and silicon rod clamping device, silicon rod clamping device structure comprises that vertical direction coordinates active rotation support roller 8 and the floating rotating pinch roller 11 of clamping silicon rod 10; The floating rotating pinch roller connects floating cylinder, the gas-powered air cylinder driven axle of floating cylinder 12, the air cylinder driven axle connects floating rotating pinch roller 11, open floating cylinder 12, the air cylinder driven axle drives floating rotating pinch roller 11 to press silicon rod 10 cylindricals, and floating rotating pinch roller 11 is realized moving up and down with the fluctuating of the cylindrical of silicon rod 10;
Described transmission mechanism and active rotation support roller 8 are rotationally connected, and transmission mechanism drives active rotation support roller 8 and rotarily drives silicon rod 10 reverse rotations, and silicon rod rotation 10 drives 11 reverse rotations of floating rotating pinch roller.
Active rotation support roller 8 is along the active rotation supporting-roller shaft to being arranged with two in parallel, and silicon rod 10 is placed between two active rotation support rollers; The perpendicular top floating rotating pinch roller 11 of silicon rod 10 is two, the air cylinder driven axle is connected with two floating rotating pinch rollers 11, open floating cylinder 12, the air cylinder driven axle drives two floating rotating pinch rollers 11 to press the cylindrical of silicon rod 10, and two floating rotating pinch rollers 11 are realized fluctuating with the fluctuating of the cylindrical of silicon rod 10;
Special because the external peripheral surface of silicon rod 10 is irregular, floating rotating pinch roller 11 is realized fluctuating pressing in its surface, thereby needs to use air cylinder driven side or Spring driving mode, and can not adopt oil pressure or hydraulic driving mode.
More accurate in order to realize silicon rod 10 cutting, be arranged side by side two active rotation support rollers (8) on the above-mentioned same water surface, coaxially be provided with two groups, two groups form locating slot between axially, the irregular floating rotating of profile workpiece 10 to be cut is placed on it, cutting scale ring 13 is fixed on the cylindrical of the irregular floating rotating of profile workpiece 10 to be cut, and be placed in the locating slot of two groups of active rotation support roller 8 middle parts, (two groups form in locating slot between axially, ) will prepare the silicon rod 10 cut off, through the cutting scale ring 13 be positioned in the two section of active rotation support roller 8 medial launders, be placed in level, the active rotation formed by 2 parastates two section support rollers 8 and 2 parastates form the concave surface of driven rotation support roller 9 on, the stainless steel ruler be fixed on lathe bed of take is standard, after measuring the good silicon rod length that needs to cut, and three screws on fastening cutting scale ring 13 circumference, floating rotating pinch roller 11 presses on the cylindrical of silicon rod 10, cutting scale ring is with silicon rod rotating in same direction (shown in Fig. 2), cutting mechanism carries out the radius cutting to silicon rod.
Steady when cutting for realizing silicon rod 10, avoid rocking or being moved, lathe bed 21 is connected with support 22, be provided with two driven rotation support rollers 9 (as shown in Figure 1 and Figure 2) on support 22, two driven rotation support roller 9 two axial lines are parallel to each other, that is to say that two driven rotation support rollers 9 be arranged in parallel side by side, and driven rotation support roller 9 with initiatively revolve two sections and ask wheel 8 on same level, the axle of active rotation supporting-roller shaft 7 and driven rotation support roller 9 is respectively on same axis; Be provided with equally floating cylinder 12 above driven rotation support roller 9 is vertical, floating cylinder 12 belows connect two floating rotating pinch rollers 11, when floating cylinder 12 drives, floating rotating pinch roller 11 vertically presses down, and presses the cylindrical of silicon rod 10, makes silicon rod 10 in the vertical direction two ends all by the clamping of floating.But move under two groups of floating rotating pinch roller 11 in the vertical directions.
The cylindrical of described two active rotation support rollers drives silicon rod 10 rotations, and silicon rod 10 rotarily drives the reverse rotation of floating rotating pinch roller.
Be provided with piston in described floating cylinder 12, piston connects a driving shaft, the other end of driving shaft connects cross bar, the two ends of cross bar connect respectively floating rotating pinch roller 11, open floating cylinder 12, gas compression drives driving shaft to press down, and the floating rotating pinch roller 11 that drives the cross bar two ends presses the cylindrical of silicon rod 10 reverse rotation thereupon, controls 20 pairs of silicon rods 10 by work piece cut scale ring 13 scales of cut workpiece cutter by numerical control box 14 and carries out radial cuts.
In the present invention, transmission device comprises that controlling by numerical control box 14 the silicon rod electric rotating machine 1 that is arranged on lathe bed inside drives driving belt 2, reductor 3, is driven active rotation support roller 8 rotations of drive sprocket 4, driving chain 5, driven sprocket 6, active rotation supporting-roller shaft 7, drive excellent elasticity by the output shaft on reductor 3.Cutting scale ring 13 is fixed on floating rotating workpiece 10 to be cut in the locating slot of active rotation support roller 8, makes the irregular floating rotating of profile workpiece 10 to be cut start to carry out non-concentric circles rotation under the floating pressure of two cover floating rotating pinch rollers 11.
As shown in Figure 4, Figure 5, cutting mechanism also is installed on lathe bed, cutting mechanism comprises Numerical control cutting workbench 17, and described cutting working platform 17 is provided with servo drive motor 15, ball-screw 23, linear slide rail 24, and cutting working platform 17 is positioned on linear slide rail 24; The ball-screw 23 connecting wire stem nuts that servomotor 15 drives drive Numerical control cutting workbench 17 and move reciprocatingly on linear slide rail 24;
Numerical control table, NC table 17 is provided with cutting motor 16, motor-driven belt 18, cutting main shaft 19, cut workpiece cutter 20, cutting motor 16 is connected with cutting main shaft 19 by motor-driven belt 18, cut workpiece cutter 20 is connected on cutting main shaft 19, and cutting motor belt 18 rotates the transmission of power of cutting motor 16 floating rotating workpiece 10 to be cut to cutting main shaft 19, irregular, the non-concentric circles of 20 pairs of profiles of drive cut workpiece cutter carries out radial cuts.
The present invention also comprises that oil pump, lighting lamp for work, electric cabinet, work warning lamp, waterway electromagnetic valve, cooling water pipeline and nozzle, compressed air line and air pressure regulator, air-operated solenoid valve, positioning rule, silicon rod blank connect the accessory system that the annexes such as dish, machine tool outer casing, transparent water fender form and be the well-known category system architecture, in this diagram, does not list in detail item by item.
Embodiment 3
The same reason, described elastic squeezing unit 12 is spring compacting devices, establish spring 29 in described spring compacting device (Fig. 7) and connect a driving shaft 30, the other end of driving shaft 30 connects cross bar 31, the two ends of cross bar 31 connect respectively floating rotating pinch roller 11, spring 29 drives driving shaft 30 to press down, and the floating rotating pinch roller (11) that drives cross bar 31 two ends presses silicon rod 10 cylindrical positions around the shape of silicon rod cylindrical in good time.
Described active rotation support roller 8 is coaxial is provided with two groups, and two groups form locating slot 32 between axially; On described silicon rod 10, cover has cutting scale ring 13, and cutting scale ring 13 is arranged in locating slot, and cutting scale ring 13 is with silicon rod 10 rotating in same directions.
The present invention also comprises that oil pump, lighting lamp for work, electric cabinet, work warning lamp, waterway electromagnetic valve, cooling water pipeline and nozzle, compressed air line and air pressure regulator, air-operated solenoid valve, positioning rule, silicon rod blank connect the accessory system that the annexes such as dish, machine tool outer casing, transparent water fender form and be the well-known category system architecture, in this diagram, does not list in detail item by item.
Above-described is only the preferred embodiments of the invention.Should be understood that.For the person of ordinary skill of the art; under the premise without departing from the principles of the invention; without the technical characterictic that just can associate through creative work; can also make some distortion and improvement; these variations obviously all should be considered as equivalent feature, within still belonging to the protection domain of patent of the present invention.

Claims (10)

1. a silicon rod rotation is floated and is cut Digit Control Machine Tool, comprise numerical control box, lathe bed, transmission mechanism, be arranged on cutting mechanism and silicon rod clamping device on lathe bed, it is characterized in that: described silicon rod clamping device comprises that vertical direction coordinates active rotation support roller (8) and the floating rotating pinch roller (11) of clamping silicon rod (10); Described active rotation support roller (8) drives silicon rod (10) under the compression of floating rotating pinch roller (11), does non-concentric, axial rotation on the horizontal level of active rotation support roller (8) and driven support roller (9).
2. a kind of silicon rod rotation according to claim 1 is floated and is cut Digit Control Machine Tool, it is characterized in that: described floating rotating pinch roller (11) vertically is positioned at the top of silicon rod (10), and with elastic pressuring clamping device (12), be connected, elastic pressuring clamping device (12) drives floating rotating pinch roller (11) to press silicon rod (10) around the shape of silicon rod cylindrical in good time.
3. silicon rod rotation according to claim 1 is floated and is cut Digit Control Machine Tool, it is characterized in that: described active rotation support roller (8) is positioned at the below of silicon rod (10), with transmission mechanism, be connected, transmission mechanism drives silicon rod (10) rotation by active rotation support roller (8).
4. according to claim 1 or 3, described silicon rod rotation is floated and is cut Digit Control Machine Tool, it is characterized in that: described active rotation support roller (8) is two, two active rotation support roller (8) axially parallel settings, silicon rod (10) is placed in the axial groove (32) formed of two active rotation support rollers (8).
5. a kind of silicon rod rotation according to claim 1 is floated and is cut Digit Control Machine Tool, it is characterized in that: have one group on each section of described silicon rod (10) at least by active rotation support roller (8) and the corresponding silicon rod clamping device arranged of floating rotating pinch roller (11), has one group at least by driven rotation support roller (9) and the corresponding silicon rod clamping device arranged of floating rotating pinch roller (11), and the rotation support roller in the silicon rod clamping device (8,9) is positioned on the same level position, top is provided with the elastic squeezing unit (12) to silicon rod (10) clamping.
6. a kind of silicon rod rotation according to claim 2 is floated and is cut Digit Control Machine Tool, it is characterized in that: described elastic squeezing unit (12) is floating cylinder, be provided with piston (26) in described floating cylinder (25), piston (26) connects a driving shaft (27), the other end of driving shaft (27) connects cross bar (28), the two ends of cross bar (28) connect respectively floating rotating pinch roller (11), floating cylinder (25) drives driving shaft (27) to press down, the floating rotating pinch roller (11) that drives cross bar (28) two ends presses silicon rod (10) cylindrical position around the shape of silicon rod cylindrical in good time.
7. a kind of silicon rod rotation according to claim 2 is floated and is cut Digit Control Machine Tool, it is characterized in that: described elastic squeezing unit (12) is the spring pressurizing unit, establish spring (29) in described spring attachment and connect a driving shaft (30), the other end of driving shaft (30) connects cross bar (31), the two ends of cross bar (31) connect respectively floating rotating pinch roller (11), spring attachment (12) drives driving shaft (30) to press down, and the floating rotating pinch roller (11) at drive cross bar (31) two ends compresses silicon rod (10) cylindrical position around the shape of silicon rod cylindrical in good time.
8. silicon rod rotation according to claim 2 is floated and is cut Digit Control Machine Tool, it is characterized in that: described active rotation support roller (8) is coaxial is provided with two groups, two groups form locating slot between axially, the upper cover of described silicon rod (10) has cutting scale ring (13), cutting scale ring (13) is placed in the locating slot of active rotation support roller (8) or is positioned at a side of active rotation support roller (8)
Cutting scale ring (13) is with the equidirectional rotation of silicon rod (10).
9. silicon rod rotation according to claim 6 is floated and is cut Digit Control Machine Tool, it is characterized in that: described transmission mechanism comprises drive sprocket (4) fixing on silicon rod electric rotating machine (1), driving belt (2), reductor (3), reductor turning cylinder, driving chain (5), is arranged on the driven sprocket (6) on active rotation supporting-roller shaft (7), silicon rod electric rotating machine (1) is connected with reductor (3) by driving belt (2), and drive sprocket (4) is connected with driven sprocket (6) by driving chain (5).
10. silicon rod rotation according to claim 7 is floated and is cut Digit Control Machine Tool, it is characterized in that: described cutting mechanism comprises Numerical control cutting workbench (17), the below of described cutting working platform (17) is provided with servo drive motor (15), ball-screw (23), linear slide rail (24), it is upper that cutting working platform (17) is positioned at linear slide rail (24), and ball-screw (23) the connecting wire stem nut that described servomotor (15) drives drives Numerical control cutting workbench (17) and moves reciprocatingly on linear slide rail (24); The top of described cutting working platform (17) is provided with cutting motor (16), motor-driven belt (18), cutting main shaft (19), cut workpiece cutter (20), described cutting motor (16) is connected with cutting main shaft (19) by motor-driven belt (18), and cut workpiece cutter (20) is connected on cutting main shaft (19).
CN201210360148.7A 2012-09-25 2012-09-25 Silicon rod rotates the cutting Digit Control Machine Tool that floats Expired - Fee Related CN102862239B (en)

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CN103552166A (en) * 2013-09-30 2014-02-05 洛阳鸿泰半导体有限公司 Device for adjusting crystal-orientation deviation degree of silicon rod
CN104743780A (en) * 2015-01-16 2015-07-01 中天科技精密材料有限公司 Continuous high-temperature extension and uninterrupted glass rod cutting method and device thereof
CN105058594A (en) * 2015-08-20 2015-11-18 无锡中强电碳有限公司 Multifunctional hole forming and cleaning device for carbon rod
CN105058596A (en) * 2015-08-20 2015-11-18 无锡中强电碳有限公司 Carbon rod perforating cleaning machine
CN105856029A (en) * 2016-02-02 2016-08-17 上海日进机床有限公司 Crystal bar machining equipment and crystal bar positioning mechanism and machining method used for crystal bar machining equipment
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CN106927094A (en) * 2017-03-09 2017-07-07 亚洲硅业(青海)有限公司 The automatic packing apparatus and packing method of polycrystalline silicon rod
CN107042600A (en) * 2017-06-14 2017-08-15 安徽省中阳管业有限公司 A kind of anti-pipe bending device of corrugation forming machine
CN107214607A (en) * 2017-05-24 2017-09-29 浙江好亚能源股份有限公司 The accurate end face abrasive cutoff machine of monocrystalline silicon piece
CN108437246A (en) * 2018-04-03 2018-08-24 江阴市瑞尔嘉新能源科技有限公司 A kind of method and apparatus of silicon core flaw-piece cutting finished silicon core
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CN103506685A (en) * 2013-08-23 2014-01-15 山西泫氏实业集团有限公司 Fixed-length cutting system
CN103506685B (en) * 2013-08-23 2015-09-09 山西泫氏实业集团有限公司 Cut-to-length sizes machine with functions
CN103552166A (en) * 2013-09-30 2014-02-05 洛阳鸿泰半导体有限公司 Device for adjusting crystal-orientation deviation degree of silicon rod
CN104743780A (en) * 2015-01-16 2015-07-01 中天科技精密材料有限公司 Continuous high-temperature extension and uninterrupted glass rod cutting method and device thereof
CN105058594A (en) * 2015-08-20 2015-11-18 无锡中强电碳有限公司 Multifunctional hole forming and cleaning device for carbon rod
CN105058596A (en) * 2015-08-20 2015-11-18 无锡中强电碳有限公司 Carbon rod perforating cleaning machine
CN105856029B (en) * 2016-02-02 2019-01-29 天通日进精密技术有限公司 Crystal bar process equipment and crystal bar positioning mechanism and processing method for the equipment
CN105856029A (en) * 2016-02-02 2016-08-17 上海日进机床有限公司 Crystal bar machining equipment and crystal bar positioning mechanism and machining method used for crystal bar machining equipment
CN105538524B (en) * 2016-02-02 2017-07-04 上海日进机床有限公司 Afterbody hold-down mechanism, silicon ingot evolution cutting equipment and silicon ingot evolution cutting method
CN106927094A (en) * 2017-03-09 2017-07-07 亚洲硅业(青海)有限公司 The automatic packing apparatus and packing method of polycrystalline silicon rod
CN108687637A (en) * 2017-04-07 2018-10-23 江苏美特林科特殊合金股份有限公司 Alloy bar material sizing cutting device
CN108687637B (en) * 2017-04-07 2024-02-27 江苏美特林科特殊合金股份有限公司 Alloy rod material fixed-length cutting device
CN107214607A (en) * 2017-05-24 2017-09-29 浙江好亚能源股份有限公司 The accurate end face abrasive cutoff machine of monocrystalline silicon piece
CN107042600A (en) * 2017-06-14 2017-08-15 安徽省中阳管业有限公司 A kind of anti-pipe bending device of corrugation forming machine
CN107042600B (en) * 2017-06-14 2018-10-30 安徽省中阳管业有限公司 A kind of anti-pipe bending device of corrugation forming machine
CN108437246A (en) * 2018-04-03 2018-08-24 江阴市瑞尔嘉新能源科技有限公司 A kind of method and apparatus of silicon core flaw-piece cutting finished silicon core
CN109175546A (en) * 2018-09-26 2019-01-11 嘉兴正野新材料有限公司 A kind of fixed device of motor gear polishing
CN109291270A (en) * 2018-10-10 2019-02-01 唐燕 A kind of cutter device of the Silicon Wafer for chip manufacturing
CN109483385A (en) * 2018-11-19 2019-03-19 西安近代化学研究所 A kind of powder column outer wall surface self-adaption grinding device
CN110065171A (en) * 2019-04-25 2019-07-30 西安奕斯伟硅片技术有限公司 A kind of cutting method of cutter device and crystal bar
CN111230516A (en) * 2020-02-25 2020-06-05 米伦医疗科技(苏州)有限公司 Jig with clamping and rotating walking aid accessories
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CN115008223A (en) * 2022-06-15 2022-09-06 吉林圆方机械集团有限公司 Double-spline half shaft milling device

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