CN102848637A - Composite multilayer film infrared absorption layer - Google Patents
Composite multilayer film infrared absorption layer Download PDFInfo
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- CN102848637A CN102848637A CN2012103125372A CN201210312537A CN102848637A CN 102848637 A CN102848637 A CN 102848637A CN 2012103125372 A CN2012103125372 A CN 2012103125372A CN 201210312537 A CN201210312537 A CN 201210312537A CN 102848637 A CN102848637 A CN 102848637A
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Abstract
The invention relates to the technical field of optical instrument surface film plating, and concretely relates to a composite multilayer film infrared absorption layer. The infrared absorption layer sequentially comprises a substrate (1), an adhesion layer (2), a reflection layer (3), a first dielectric layer (4), a nickel-chromium alloy layer (5) and a second dielectric layer (6) from bottom to top, wherein the adhesion layer (2) is plated on the substrate (1) through vacuum plating; the reflection layer (3) grows on the adhesion layer (2) through the vacuum plating; the first dielectric layer (4) is coated on the reflection layer (3) through rotational gluing; the nickel-chromium alloy layer (5) is plated on the first dielectric layer (4) through the vacuum plating; and the second dielectric layer (6) is coated on the nickel-chromium alloy layer (5) through the rotational gluing. The infrared absorption layer has a simple manufacturing technology, and the absorption rate in the whole infrared band is greater than 99%.
Description
Technical field
The present invention relates to optical instrument surface coating technical field, be specifically related to a kind of composite multilayer membrane infrared absorption layer.
Background technology
In the contemporary optics instrument, the reflectivity of the parts surfaces such as the camera lens of lowering apparatus is a vital technology, and the use of this technology can improve the contrast of imaging or the efficient of instrument greatly.Such as, in telescope, reduce to reflect and can eliminate the contrast decline problem that veiling glare brings; In Infrared Detectors, reduce reflectivity and can make more infrared light enter detector inside, greatly improve the utilization ratio of infrared light, make detector have higher sensitivity.Increase absorptivity, can be by the method for plated film, by select suitable material, accurately control thickness, the parameters such as quality that improve rete reduce reflectivity; Also can be by to do the anti-reflection structure layer at device surface, the shape of choose reasonable structure and size etc. also can reduce reflectivity.But the latter's cost of manufacture is high, and manufacture difficulty is also large, only considers to use the method for plated film here.Bibliographical information is arranged, nickel chromium triangle (NiCr) can be used as the absorbing material of Infrared Detectors, but its absorptivity is less than 80%, also there is a big difference apart from ideal for such transformation efficiency, but concrete list of references " S. Bauer; S. Bauer-Gogonea; W. Becker, R. Fettig, B. Ploss; W. Ruppel; ' Thin metal films as absorbers for infrared sensors ', Sensors and Actuators A:Physical, Volumes 37 – 38; June – August 1993, Pages 497 – 501 ".Also have some other methods to do absorbed layer, such as the gold that adopts the thermal evaporation preparation black be exactly a kind of good absorbing material, but be subjected to the restriction of technique etc., should use relatively difficulty.Therefore, make absorption efficiency high, the simple and cheap absorbed layer of preparation method has very high realistic meaning.
Summary of the invention
The purpose of this invention is to provide a kind of composite multilayer membrane infrared absorption layer, it makes simple, and the infrared waveband absorbing rate is better than 99%.
To achieve these goals, the technical scheme taked of the present invention is as follows:
A kind of composite multilayer membrane infrared absorption layer comprises substrate, adhesion layer, reflecting layer, first medium layer, nichrome layer and second medium layer from bottom to up successively; Adhesion layer adopts the method for vacuum coating to be plated in the substrate, the reflecting layer adopts the method for vacuum coating to be grown on the adhesion layer, the first medium layer adopts the method for spin coating to be coated on the reflecting layer, the nichrome layer adopts the method for vacuum coating to be plated on the first medium layer, and the second medium layer adopts the method for spin coating to be coated on the nichrome layer.
The invention has the beneficial effects as follows: adopted the method for vacuum coating and spin coating, experimental technique is simple; By controlling the thickness of each tunic, realized the height of infrared band is absorbed, and absorptivity is not less than 99%.
Description of drawings
Fig. 1 is the structural representation of composite multilayer membrane infrared absorption layer of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is described in further details.
As shown in Figure 1, composite multilayer membrane infrared absorption layer of the present invention comprises substrate 1, adhesion layer 2, reflecting layer 3, first medium layer 4, nichrome layer 5 and second medium layer 6 from bottom to up successively; Adhesion layer 2 adopts the method for vacuum coating to be plated in the substrate 1, reflecting layer 3 adopts the method for vacuum coating to be grown on the adhesion layer 2, first medium layer 4 adopts the method for spin coating to be coated on the reflecting layer 3, nichrome layer 5 adopts the method for vacuum coating to be plated on the first medium layer 4, and second medium layer 6 adopts the method for spin coating to be coated on the nichrome layer 5.
In order to increase the adhesion between reflecting layer 3 and the substrate 1 at the adhesion layer 2 in the substrate 1, there is very high reflectivity in reflecting layer 3 at infrared band, the preparation of metal film is to finish by the method for vacuum coating, can be thermal evaporation, electron beam evaporation, magnetron sputtering etc.; First medium layer 4 and second medium layer 6 are realized by the method for spin coating.
The preparation method of composite multilayer membrane infrared absorption layer of the present invention is as follows:
1, the layer of metal thin layer of adhesion layer 2 plating in substrate (such as, potsherd) 1 that is methods of adopting vacuum coating, this metal level can be chromium, titanium, titanium-tungsten etc., the effect of this metal level is the adhesion of strengthening between substrate 1 and the reflecting layer 3;
2, reflecting layer 3 is the layer of metal film that adopt the method for vacuum coating to grow at adhesion layer 2, and what this metal film adopted is that the effect of reflecting layer 3 in whole absorbed layer is reflects infrared light at materials such as the high gold of infrared band reflectivity, copper, aluminium;
3, first medium layer 4 is close on the reflecting layer 3, can use the materials such as polyimides, lead fluoride, realizes the thickness that needs with the method for spin coating, and infrared light can horizontal transmission in this layer;
4, nichrome layer 5 is plated on the first medium layer 4 by the method for vacuum coating;
5, uppermost second medium layer 6 is to adopt the method for spin coating to be coated on the nichrome layer 5.
The absorbed layer of making according to the method described above, its absorptivity to infrared band is not less than 99%.
Claims (8)
1. a composite multilayer membrane infrared absorption layer is characterized in that, this infrared absorption layer comprises substrate (1), adhesion layer (2), reflecting layer (3), first medium layer (4), nichrome layer (5) and second medium layer (6) from bottom to up successively; Adhesion layer (2) adopts the method for vacuum coating to be plated in the substrate (1), reflecting layer (3) adopts the method for vacuum coating to be grown on the adhesion layer (2), first medium layer (4) adopts the method for spin coating to be coated on the reflecting layer (3), nichrome layer (5) adopts the method for vacuum coating to be plated on the first medium layer (4), and second medium layer (6) adopts the method for spin coating to be coated on the nichrome layer (5).
2. a kind of composite multilayer membrane infrared absorption layer as claimed in claim 1 is characterized in that, described reflecting layer (3) are for there being the metal film layer of high reflectance at infrared band.
3. a kind of composite multilayer membrane infrared absorption layer as claimed in claim 2 is characterized in that, described metallic film is gold thin film or copper film or aluminium film.
4. a kind of composite multilayer membrane infrared absorption layer as claimed in claim 1 is characterized in that, described reflecting layer (3), first medium layer (4), nichrome layer (5) consist of absorbing cavity.
5. such as claim 1 or 4 described a kind of composite multilayer membrane infrared absorption layers, it is characterized in that, the material of described first medium layer (4) is polyimides or lead fluoride.
6. a kind of composite multilayer membrane infrared absorption layer as claimed in claim 1 is characterized in that, described nichrome layer (5) absorption also sees through infrared light.
7. a kind of composite multilayer membrane infrared absorption layer as claimed in claim 1 is characterized in that, described second medium layer (6) is for the protection of nichrome layer (5), and makes the absorptivity of absorbed layer be not less than 99%.
8. such as claim 1 or 7 described a kind of composite multilayer membrane infrared absorption layers, it is characterized in that, the material of described second medium layer (6) is polyimides or lead fluoride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2012103125372A CN102848637A (en) | 2012-08-29 | 2012-08-29 | Composite multilayer film infrared absorption layer |
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| CN2012103125372A CN102848637A (en) | 2012-08-29 | 2012-08-29 | Composite multilayer film infrared absorption layer |
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| CN102848637A true CN102848637A (en) | 2013-01-02 |
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| CN2012103125372A Pending CN102848637A (en) | 2012-08-29 | 2012-08-29 | Composite multilayer film infrared absorption layer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103367931A (en) * | 2013-07-05 | 2013-10-23 | 西北工业大学 | Infrared multi-wavelength absorber |
| CN103852171A (en) * | 2014-01-17 | 2014-06-11 | 中国科学院上海技术物理研究所 | Absorbing layer structure for non-refrigeration long-wave infrared detector |
| CN105810773A (en) * | 2016-05-05 | 2016-07-27 | 电子科技大学 | Resonant reinforced pyroelectric infrared detector |
| CN107765490A (en) * | 2017-11-27 | 2018-03-06 | 怡通科技有限公司 | A kind of heat-insulated intelligent fenestrated membrane of flexible electrochromism and its preparation technology |
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| US4122239A (en) * | 1976-01-19 | 1978-10-24 | Centre National D'etudes Spatiales | Solar absorbers with layers of nickel/chromium alloy and dielectric material |
| JP2007509315A (en) * | 2003-10-09 | 2007-04-12 | オカス コーポレーション | Two-layer bolometer-type infrared sensor and method for manufacturing the same |
| CN101881666A (en) * | 2009-05-08 | 2010-11-10 | 世纪晶源科技有限公司 | Film-type pyroelectric infrared sensor and preparation method thereof |
| CN102530843A (en) * | 2012-01-20 | 2012-07-04 | 中国科学院上海技术物理研究所 | Method for preparing loosened polyimide infrared absorption film |
| CN202329818U (en) * | 2011-11-18 | 2012-07-11 | 华中科技大学 | Uncooled infrared detection device |
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2012
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| US4122239A (en) * | 1976-01-19 | 1978-10-24 | Centre National D'etudes Spatiales | Solar absorbers with layers of nickel/chromium alloy and dielectric material |
| JP2007509315A (en) * | 2003-10-09 | 2007-04-12 | オカス コーポレーション | Two-layer bolometer-type infrared sensor and method for manufacturing the same |
| CN101881666A (en) * | 2009-05-08 | 2010-11-10 | 世纪晶源科技有限公司 | Film-type pyroelectric infrared sensor and preparation method thereof |
| CN202329818U (en) * | 2011-11-18 | 2012-07-11 | 华中科技大学 | Uncooled infrared detection device |
| CN102530843A (en) * | 2012-01-20 | 2012-07-04 | 中国科学院上海技术物理研究所 | Method for preparing loosened polyimide infrared absorption film |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103367931A (en) * | 2013-07-05 | 2013-10-23 | 西北工业大学 | Infrared multi-wavelength absorber |
| CN103367931B (en) * | 2013-07-05 | 2015-07-01 | 西北工业大学 | Infrared multi-wavelength absorber |
| CN103852171A (en) * | 2014-01-17 | 2014-06-11 | 中国科学院上海技术物理研究所 | Absorbing layer structure for non-refrigeration long-wave infrared detector |
| CN105810773A (en) * | 2016-05-05 | 2016-07-27 | 电子科技大学 | Resonant reinforced pyroelectric infrared detector |
| CN107765490A (en) * | 2017-11-27 | 2018-03-06 | 怡通科技有限公司 | A kind of heat-insulated intelligent fenestrated membrane of flexible electrochromism and its preparation technology |
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Application publication date: 20130102 |