CN102818636A - Radiometric calibration method for low-temperature measurement of thermal infrared imager - Google Patents
Radiometric calibration method for low-temperature measurement of thermal infrared imager Download PDFInfo
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Abstract
The invention belongs to the technical field of photoelectric detection and discloses a radiometric calibration method for low-temperature measurement of a thermal infrared imager, which is capable of extending a low temperature measurement range of the current thermal infrared imager to 100 DEG C below zero and also increasing temperature measurement precision to be within 1 DEG C. In order to increase precision of low-temperature radiometric calibration, the method is characterized that radiometric calibration data are collected in a vacuum and low temperature environment. The method comprises the steps of: heating a radiometric calibration plate (1) through a thin film heating plate in the vacuum and low-temperature environment, leading the radiometric calibration plate (1) to reach a calibration temperature and to enter thermal equilibrium, collecting 14-bit original grays of all radiometric calibration regions at calibration temperatures in a range from 100 DEG C below zero to 0 DEG C by the thermal infrared imager; processing radiometric calibration data, obtaining radiometric calibration gray through statistics; and finally, fitting an inversion function of infrared thermal imaging temperature according to the radiometric calibration gray and temperature. The method disclosed by the invention has the advantages that low temperature measurement range of the thermal infrared imager is extended effectively and temperature measurement precision of low-temperature targets is improved through reduction of radiometric calibration error.
Description
Technical field
The invention belongs to photoelectric detection technology field, relate to radiation calibration method and temperature retrieval method when the low temperature background of (100 ℃～0 ℃) and target carried out the thermometric based on infrared thermal imaging.
Background technology
The infrared thermal imaging thermometric is widely used in fields such as national defense safety guarantee, scientific investigation research, industrial nondestructive testing, electric power, the detection of building leakage heat, medical pathology detection with characteristics such as its non-contact measurement, fast, the directly perceived displays temperature field distribution of response, suitable big face battle array operations.Thermal infrared imager is high to the high-temperature targets responsiveness, good linearity, and thermometry is comparatively ripe.
Along with the infrared thermal imaging thermometric constantly extends to low temperature target measurement fields such as space flight, scientific researches, the temperature measurement accuracy under its low-temperature measurement scope, the low temperature background exists obviously not enough, in some environment like space industry, treats that the thermometric target temperature can reach-100 ℃.At present, the FLIR of the U.S., Fluke, the Sofradir of France, the target of above temperature that the thermal infrared imager nominal that top grade that domestic Zhejiang is upright greatly, Wuhan Gao De, Guangzhou sough is produced can right-20 ℃ (nominal-40 of part thermal imaging system ℃) is carried out thermometric.And in actual experiment, these thermal infrared imagers are excessive in the thermometric value error of-20 ℃～0 ℃ of section, even lose the temperature retrieval ability.
More than the deficiency of two aspects become and suppress the bottleneck that the infrared thermal imaging thermometry further develops in low temperature range.The present invention draws according to thermal infrared imager thermometric Analysis on Mechanism: cause that the reason of above problem is that thermal infrared imager is big in the radiation calibration error of low-temperature zone, aspect two of the radiation calibration scope less thaies.Based on this, the present invention has set forth gordian technique, method, the step of thermal infrared imager being carried out the low-temp radiating calibration, for the thermal infrared imager radiation calibration with low temperature environment and target temperature measurement demand as a reference.
Summary of the invention
The present invention is directed to existing thermal infrared imager low temperature target temperature-measuring range deficiency, the big problem of temperature measurement error; From thermal infrared imager thermometric mechanism; One cover low-temp radiating robot scaling equipment and corresponding low-temp radiating calibrating method, temperature retrieval function approximating method are provided; Can be with the low-temperature measurement range expansion that has thermal infrared imager now to below-100 ℃, in (100 ℃～0 ℃) scope, provide with the thermopair be benchmark, error limitation at ± 1 ℃ with interior temperature measurement accuracy.
The present invention has solved the not enough problem of existing thermal infrared imager low temperature target temperature-measuring range through the low-temp radiating calibration of thermal infrared imager, has also improved low temperature target temperature measurement accuracy simultaneously effectively.
The present invention is based on the infrared thermal imaging temperature-measurement principle, adopt vacuum (10
-5Pa), the controlled black matrix Target Board of blackbody chamber temperature inside of low temperature (190 ℃) carries out radiation calibration to thermal infrared imager; Through thermocouple measurement radiation calibration temperature; Through radiation calibration gray scale corresponding under this temperature of infrared heat image instrument measuring, carry out the temperature retrieval function match of thermal infrared imager according to radiation calibration temperature and radiation calibration gray scale at last.
The technical scheme of thermal infrared imager low temperature thermometric radiation calibration comprises:
But a) theoretical analysis of the cryogenic energy measurement capability of thermal infrared imager;
B) requirement and the design in radiation calibration plate black matrix face source;
C) in the radiation calibration experiment based on thermal infrared imager; Thermal infrared imager is 14 original gray scales to the image data of radiation calibration plate calibration temperature point: under vacuum, low temperature environment, thermal infrared imager is carried out the radiation calibration experiment; Gather calibration temperature point and go up 14 the original gray scales of (thermopair by sticking on the radiation calibration plate provides) thermal infrared imager, store as radiation calibration gray scale raw data to the imaging of radiation calibration plate;
D) handle based on the radiation calibration gradation data of thermal infrared imager data and calibration test data: the radiation calibration gradation data is handled: the raw data that will go up a step is analyzed, is handled; The elimination infra-red heat is disturbed, and counts each calibration temperature point and goes up corresponding radiation calibration gray scale.
E) inversion method of thermal infrared imager thermometric temperature and the match of temperature retrieval function: the radiation calibration temperature and the radiation calibration gray scale that measure more than inciting somebody to action are carried out the function match.The present invention adopts the piecewise linear function fitting process that infrared thermal imaging thermometric temperature retrieval function is carried out match.Calibration temperature point is provided with comparatively intensive; Temperature-gray scale the function that can be similar in the temperature section of thinking between two Temperature Scaling points is a linear relationship; Temperature value that respectively will high and low two end points of this section and gray-scale value carry out the temperature of black matrix target in this section and the linear mapping of thermal infrared imager response gray scale as maximal value, the minimum value of this section temperature value and gray-scale value.Its mapping method is: the temperature of supposing a temperature section is Temp, and temperature range is [T
EmpMin, T
EmpMax], corresponding respectively thermal imaging system response gray scale is Gray, tonal range is [G
RayMin, G
RayMax], the relation of temperature and gray scale can be expressed as in this temperature section:
Temp＝[(T
empMax-T
empMin)/(G
rayMax-G
rayMin)](G
ray-G
rayMin)+T
empMin (1)
Advantage of the present invention is:
1, the low-temperature measurement scope of continuation thermal infrared imager effectively minimumly can right target below-100 ℃ be carried out accurate thermometric;
2, in low temperature environment (190 ℃), carry out radiation calibration, prevent that background radiation from flooding faint low temperature target emanation signal, and effectively reduce the influence of environmental radiation the radiation calibration precision;
3, in vacuum environment (10
-5) in carry out radiation calibration, can prevent the low temperature target emanation signal that atmospheric effect is faint, simultaneously, carry out radiation calibration because of having adopted, so can improve the precision of radiation calibration without the actual emanations amount of crossing atmospheric effect.
Description of drawings
Fig. 1 is a radiation calibration black matrix plate image.
Wherein, evenly pitch-dark, the no occlusion area in the middle blue frame is the radiation calibration imaging region, and the distance during radiation calibration between adjustment thermal infrared imager and the calibration plate makes that the homogeneous area in the blue frame is full of the thermal infrared imager visual field.The radiation calibration edges of regions is pasted 4 thermopairs, and with the real time temperature of measuring radiation calibration plate, the radiation calibration panel edges is pasted the thermal uniformity of 8 thermocouple monitoring radiation calibration plates.
Fig. 2 is the measurement mechanism figure of thermal infrared imager radiation calibration temperature, gray scale.
Wherein, 1 is the radiation calibration plate, and 2 is the infrared thermal imagery instrument system, and 3 are the data acquisition host computer.
Fig. 3 is size, the location diagram in radiation calibration plate and radiation calibration zone.
Fig. 4 is the distributing position figure of thermopair on the radiation calibration plate.
Wherein 1～12 is 12 thermopairs.
Embodiment
Below in conjunction with accompanying drawing and instance the course of work of the present invention is further specified.
The present invention has at first carried out conscientiously studying and analysing in depth to the low temperature detectivity of existing thermal infrared imager, has proved infrared focal plane detector and has had the detectivity of low temperature target emanation.The present invention has set up thermal infrared imager carries out infrared imaging temperature measuring under vacuum, low temperature environment physical model through the Planck thermal radiation law; This radiation model is made up of extraterrestrial target radiation model, background fluctuations noise model, thermal infrared imager circuit system noise and thermonoise model; In theory the energy detectivity of the infrared thermal imaging temp measuring system in vacuum, the low temperature environment is analyzed; Calculate the minimum detectable temperature of the infrared eye of present employing; The minimum temperature that can satisfy vacuum, low temperature in theory is-190 ℃, has proved that thermal infrared imager carries out the feasibility that low temperature is surveyed in vacuum, low temperature environment.
The present invention has analyzed 14 signal raw data of not passing through any processing of thermal infrared imager output, inverting each gray values of pixel points on the output image planes.Through the gray-scale value that collects under the different target temperature is compared, find that the heat picture gray scale of-100 ℃ of targets and the heat picture gray scale of-0 ℃ of target differ 471 gray shade scales.Thus, can prove that thermal infrared imager can physically realize the temperature survey of low temperature target.
The vacuum of using in the invention, low temperature environment all spray emissivity by inwall and provide as the pitch-dark environment simulator of 0.93-0.96, have pertinent literature to prove the blackbody chamber characteristic of this environment simulator.Stipulate in-50 ℃ to+90 ℃ blackbody radiation source calibrating standards that China metering institute 2002 puts into effect " the blackbody radiation emissivity is the thermal infrared imager that uses under this this temperature of black matrix calibration capable of using greater than 0.92." therefore, the present invention uses emissivity to carry out radiation greater than 0.92 Controllable Temperature radiation target as black matrix face source in the blackbody chamber of environment simulator and demarcates foundation and feasible is arranged.
The design of radiation calibration plate:
1) according to thermal infrared imager field angle ω and thermal infrared imager to calculating radiation calibration zone length h=ltan ω/2 apart from l between the radiation calibration plate;
2) central area of radiation calibration plate is regional as radiation calibration, to guarantee its homogeneity, the size of radiation calibration plate is by the decision of radiation calibration zone, and its particular location as shown in Figure 3 concerns;
3) be the pitch-dark of 0.93-0.96 in the positive evenly spraying of radiation calibration plate emissivity;
4) paste whole piece film heating plate at radiation calibration plate reverse side the radiation calibration plate is carried out temperature control, guarantee that the film heating plate can cover the radiation calibration plate fully;
5) paste a thermopair respectively at the mid point on four limits, radiation calibration zone and carry out the real time temperature monitoring; Thermocouple measurements is the radiation calibration temperature; Four angles and four limit mid points at the radiation calibration plate are pasted the temperature homogeneity of a thermopair with monitoring radiation calibration plate respectively; Thermopair is as shown in Figure 4 respectively on the radiation calibration plate, and 1～12 is the paste position of thermopair.
The radiation calibration sampled grey:
For making thermal infrared imager radiation calibration data have universality, 2 that need guarantee before the collection of thermal infrared imager radiation calibration gradation data are:
A) aperture of thermal infrared imager optical system is fixed during the radiation calibration DATA REASONING, and consistent when in actual thermometric process, keeping aperture size with radiation calibration;
B) utilize untreated original gradation data to carry out radiation calibration (no longer consistent because of benchmark, as not have comparability) through the gradation data after grey scale mapping, the histogram equalization.
After satisfying above two conditions, can begin the radiation calibration experiment.Because thermal infrared imager is non-linear in the response of low-temperature zone; For guaranteeing measuring accuracy; The present invention adopts on average and whenever at a distance from 5 ℃ of methods that a radiation calibration point is set thermal infrared imager is carried out radiation calibration, gathers radiation calibration temperature data and 14 original gradation data on the radiation calibration point.
The concrete steps of data acquisition are:
1) setting up procedure: the relative position between adjustment thermal infrared imager and the radiation calibration plate makes the radiation calibration zone be full of the thermal infrared imager visual field.Connect thermal infrared imager and host computer, start upper computer software.Environment simulator is lowered the temperature, is vacuumized;
2) be warmed up to specific Temperature Scaling point through film heating plate control radiation calibration plate, treat that it gets into the data acquisition of carrying out radiation calibration temperature and 14 original response gray scales of thermal infrared imager behind thermal equilibrium state;
3) supply current of change film heating plate, the thermal equilibrium process that gets into next calibration temperature is accomplished data acquisition;
4) end step: cut off the electricity supply after the temperature of all scaling points, the equal finishing collecting of gradation data.
After 14 original gradation data finishing collecting to its carry out analysis of Uniformity, heat is disturbed and is subdued, and counts the radiation calibration gray scale, carries out next step temperature retrieval function match.Utilize above-mentioned radiation calibration method that the absolute value of absolute temperature measurement accuracy as shown in table 1 can be provided.Table 2 is the inverting temperature contrast table of target actual temperature and infrared thermal imaging Inversion Software of the present invention.
The temperature measurement accuracy that the radiation calibration method that table 1 adopts at present provides
Table 2 inverting temperature and actual temperature contrast table
Claims (6)
1. the radiation calibration method of a thermal infrared imager low temperature thermometric.This radiation calibration method is characterized in that:
But a) theoretical analysis of the cryogenic energy measurement capability of thermal infrared imager;
B) requirement and the design in radiation calibration plate black matrix face source;
C) in the radiation calibration experiment based on thermal infrared imager, thermal infrared imager is 14 original gray scales to the image data of radiation calibration plate calibration temperature point;
D) handle based on the radiation calibration gradation data of thermal infrared imager data and calibration test data;
E) inversion method of thermal infrared imager thermometric temperature and the match of temperature retrieval function.
2. the radiation calibration method of a kind of thermal infrared imager low temperature thermometric according to claim 1 is characterized in that:
But said thermal infrared imager focus planardetector low temperature measurement capability a); Set up thermal infrared imager carries out the infrared thermal imaging thermometric under vacuum, low temperature environment physical model through the Planck thermal radiation law, the minimum detectable temperature that calculates the infrared eye of present employing can satisfy the minimum temperature of spatial simulation environment in theory.And; 14 raw data of not passing through any processing through the thermal infrared imager imaging; Obtain the gray shade scale that the heat picture gray scale of heat picture gray scale and the normal temperature target of minimum temperature target differs, prove the temperature survey that can realize the low temperature target on this thermal infrared imager hardware.
3. the radiation calibration method of a kind of thermal infrared imager low temperature thermometric according to claim 1 is characterized in that:
Said radiation calibration plate b); Its emissivity is 0.93-0.96; Be placed on emissivity and be when carrying out radiation calibration in 0.95 the blackbody chamber, satisfy that " the blackbody radiation emissivity is the thermal infrared imager that uses under this this temperature of black matrix calibration capable of using greater than 0.92 in-50 ℃ to+90 ℃ blackbody radiation source calibrating standards that China metering institute 2002 puts into effect." regulation.
4. the radiation calibration method of a kind of thermal infrared imager low temperature thermometric according to claim 1 is characterized in that:
Said radiation calibration experiment c) in,, under vacuum, low temperature environment, carry out the radiation calibration experiment for improving the faint radiation detection precision of low temperature target.And; Because thermal infrared imager is non-linear in the responsiveness of low-temperature zone; Therefore; On average whenever a radiation calibration point is set at corresponding low temperature data segment thermal infrared imager is carried out radiation calibration, gather radiation calibration temperature data and undressed 14 original gradation data on the radiation calibration point at a distance from 5 ℃.Guarantee in the data acquisition that thermal infrared imager optical system aperture fixes.
5. the radiation calibration method of a kind of thermal infrared imager low temperature thermometric according to claim 1 is characterized in that:
Said radiation calibration gradation data is handled d) in; The heterogeneity δ of gradation data will be much smaller than the corresponding number of greyscale levels G of unit temperature, satisfy
at least with guarantee ± 1 ℃ with interior temperature measurement accuracy.
6. the radiation calibration method of a kind of thermal infrared imager low temperature thermometric according to claim 1 is characterized in that:
Said temperature retrieval method and temperature retrieval function match e) in; Based on thermal infrared imager to the corresponding dullness of different temperatures target; But nonlinear feature adopts segmented mode, and myopia thinks that corresponding gray scale of thermal infrared imager and target temperature are linear relationship in each temperature range; Utilize formula (1) to carrying out the match of temperature retrieval function, in the precision that is provided is ± 1 ℃.
Temp=[(T
empMax-T
empMin)/(G
rayMax-G
rayMin)](Gray-G
rayMin)+T
empMin （1）。
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