CN102809671B - Single chip closed loop integrated circuit of acceleration transducer - Google Patents
Single chip closed loop integrated circuit of acceleration transducer Download PDFInfo
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- CN102809671B CN102809671B CN201210296117.XA CN201210296117A CN102809671B CN 102809671 B CN102809671 B CN 102809671B CN 201210296117 A CN201210296117 A CN 201210296117A CN 102809671 B CN102809671 B CN 102809671B
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Abstract
The invention relates to a single chip closed loop integrated circuit of an acceleration transducer, which comprises a charge amplifier, a rectifier, low pass filters, a buffer, a PID circuit and a high voltage driving circuit, wherein the charge amplifier is connected with the output end of the acceleration transducer; the rectifier is connected with the output end of the charge amplifier; the low pass filters are connected with the output end of the rectifier; the buffer is connected with the output ends of the low pass filters; the PID circuit is connected with the output end of the buffer; the input end of the high voltage driving circuit is connected with the output end of the PID circuit, and the output end of the high voltage driving circuit is connected with the sensitive structure of the acceleration transducer. The single chip closed loop provided by the invention is suitable for the acceleration transducer, and can well ameliorate nonlinearity and frequency characteristics of the capacitance change of the acceleration transducer.
Description
Technical field
The present invention relates to a kind of closed loop integrated circuit so that its signal is processed in acceleration transducer that is applied to.
Background technology
Accelerometer is the electric signal measurement device that becomes certain funtcional relationship in order to impression output with carrier movement acceleration (or specific force), being the primary element of determining bearer rate, position in inertial navigation system loop and exceeding the navigational parameters such as distance, is also the indispensable part of implementation platform initial alignment.Its principle of work is taking Newton classic mechanics as basis, so accelerometer is also inertance element.
At present, based on manufacture method, accelerometer can be divided into two large classes: the micro mechanical device that body materials processing obtains and surface film are processed the micro mechanical device obtaining.Body capacitance formula accelerometer has higher sensitivity and lower noise than surface film capacitive accelerometer.But the advantage of surface micro technology is relatively low manufacturing cost, the monolithic that also can easily realize MEMS and signal deteching circuit is simultaneously integrated.Nowadays the acceleration detection technology of main flow has: capacitance detecting technology, pressure drag detection technique and tunnel(l)ing current detection technique.Than latter two technology, what time capacitance detecting is having below outstanding advantage: low temperature coefficient, low-power consumption, good noiseproof feature, low manufacturing cost and can with existing VLSI technical compatibility.This series of advantage makes there is huge market potential based on capacitance detecting technology accelerometer, also makes the research of this respect become focus.At present, only there is very few company can produce the general capacitance detecting translation circuit of this class both at home and abroad.Conventional micro-machine acceleration transducer special interface circuit, a part is electric capacity digital conversion circuit, and its power consumption is low, but frequency range is narrower, and the application that is not suitable for high-frequency high-speed aspect is guided as shell.And another part interface reference circuit, itself and sensor can only form an open loop circuit, and its shortcoming is the non-linear that can not change capacitance variations, and in addition, its frequency range is also limited by the mechanical response frequency of sensor.In order to address this problem, need to adopt closed loop circuit.And also do not have in the market closed loop special interface circuit to sell.
Summary of the invention
The object of this invention is to provide a kind of be for acceleration transducer, can improve the monolithic closed loop integrated circuit of the non-linear and frequency characteristic of the capacitance variations of acceleration transducer.
For achieving the above object, the technical solution used in the present invention is:
A monolithic closed loop integrated circuit for acceleration transducer, is applied in acceleration transducer so that it is carried out to signal processing, and it comprises
Charge amplifier, described charge amplifier is connected with the output terminal of described acceleration transducer, and completes electric charge-voltage transitions;
Rectifier, described rectifier is connected with the output terminal of described charge amplifier, and described rectifier changes the output signal of described charge amplifier into forward output signal;
Low-pass filter, described low-pass filter is connected with the output terminal of described rectifier, and described low-pass filter is to the carrier signal filtering in described forward output signal;
Impact damper, described impact damper is connected with the output terminal of described low-pass filter, and described impact damper is by the output signal Buffer output of described low-pass filter;
PID circuit, described PID circuit is connected with the output terminal of described impact damper, and described PID circuit carries out the open loop signal of described impact damper output ratio, integration, differentiates;
High-voltage driving circuit, the input end of described high-voltage driving circuit is connected with the output terminal of described PID circuit, and the output terminal of described high-voltage driving circuit is connected with the sensitive structure of described acceleration transducer; Described high drive the output signal of described PID circuit is processed after to drive the sensitive structure of described acceleration transducer.
Preferably, described low-pass filter comprises the first wave filter and the second wave filter that are connected successively.
Preferably, described PID circuit comprises the first amplifier, the second amplifier, the 3rd amplifier, four high guaily unit, the first resistance, variable resistor, the 3rd resistance, the 4th resistance, the 5th resistance, the first electric capacity, the second electric capacity, the 3rd electric capacity;
The output terminal of the output terminal of the output terminal of the first described amplifier, the second described amplifier, the 3rd described amplifier is all connected with the reverse input end of described four high guaily unit; One end of the first described resistance is connected with the input end of described PID circuit, and the other end of the first described resistance is connected with the reverse input end of the first described amplifier; Described variable-resistance one end is connected with the reverse input end of the first described amplifier, and the described variable-resistance other end is connected with the output terminal of the first described amplifier; One end of the 3rd described resistance is connected with the input end of described PID circuit, and the other end of the 3rd described resistance is connected with the reverse input end of the second described amplifier; One end of the 4th described resistance is connected with the input end of described PID circuit, and the other end of the 4th described resistance is connected with the reverse input end of the 3rd described amplifier; One end of the 5th described resistance is connected with the reverse input end of described four high guaily unit, and the other end of the 5th described resistance is connected with the output terminal of described four high guaily unit; The first described electric capacity one end be connected with the reverse input end of described the second amplifier, the other end of the first described electric capacity is connected with the output terminal of the second described amplifier; The input end of the second described electric capacity is connected with the input end of described PID circuit, and the output terminal of the second described electric capacity is connected with the reverse input end of the 3rd described amplifier; One end of the 3rd described electric capacity is connected with the reverse input end of the 3rd described amplifier, and the other end of the 3rd described electric capacity is connected with the output terminal of the 3rd described amplifier; The output terminal of described four high guaily unit is the output terminal of described PID circuit.
Preferably, described variable resistor adopts coding-control.
Because technique scheme is used, the present invention compared with prior art has following advantages: monolithic closed loop integrated circuit of the present invention is applicable to acceleration transducer, be particularly useful for the acceleration sensor system of high-frequency high-speed, non-linear and the frequency characteristic that it can well improve the capacitance variations of acceleration transducer, has overcome the defect of existing sensor interface circuitry.
Brief description of the drawings
The circuit diagram of the monolithic closed loop integrated circuit that accompanying drawing 1 is acceleration transducer of the present invention.
The circuit diagram of the PID circuit of the monolithic closed loop integrated circuit that accompanying drawing 2 is acceleration transducer of the present invention.
Embodiment
Below in conjunction with embodiment shown in the drawings, the invention will be further described.
Embodiment mono-: shown in accompanying drawing 1.
A monolithic closed loop integrated circuit for acceleration transducer, is applied in acceleration transducer so that it is carried out to signal processing, and it comprises charge amplifier, rectifier, low-pass filter, impact damper, PID circuit, high-voltage driving circuit.
Charge amplifier is connected with the output terminal of acceleration transducer, for completing electric charge-voltage (C-V) conversion.Rectifier is connected with the output terminal of charge amplifier, and rectifier changes the output signal of charge amplifier into forward output signal.Low-pass filter is connected with the output terminal of rectifier, and it comprises the first wave filter and the second wave filter that are connected successively, and low-pass filter is to the carrier signal filtering in forward output signal.Impact damper is connected with the output terminal of low-pass filter, and impact damper is by the output signal Buffer output of low-pass filter.PID circuit is connected with the output terminal of impact damper, and PID circuit carries out the open loop signal of impact damper output ratio, integration, differentiates.The input end of high-voltage driving circuit is connected with the output end vo ut of PID circuit, and the output terminal of high-voltage driving circuit is connected with the sensitive structure of acceleration transducer; High drive the output signal of PID circuit is processed after to drive the sensitive structure of acceleration transducer.
Shown in accompanying drawing 2.PID circuit comprises the first amplifier OP1, the second amplifier OP2, the 3rd amplifier OP3, four high guaily unit OP4, the first resistance R 1, variable resistor R2, the 3rd resistance R 3, the 4th resistance R 4, the 5th resistance R 5, the first capacitor C 1, the second capacitor C 2, the 3rd capacitor C 3.
The output terminal of the output terminal of the first amplifier OP1, the output terminal of the second amplifier OP2, the 3rd amplifier OP3 is all connected with the reverse input end of four high guaily unit OP4.One end of the first resistance R 1 is connected with the input end Vin of PID circuit, and the other end of the first resistance R 1 is connected with the reverse input end of the first amplifier OP1.Variable resistor R2 adopts coding-control, and one end of variable resistor R2 is connected with the reverse input end of the first amplifier OP1, and the other end of variable resistor R2 is connected with the output terminal of the first amplifier OP1.One end of the 3rd resistance R 3 is connected with the input end Vin of PID circuit, and the other end of the 3rd resistance R 3 is connected with the reverse input end of the second amplifier OP2.One end of the 4th resistance R 4 is connected with the input end Vin of PID circuit, and the other end of the 4th resistance R 4 is connected with the reverse input end of the 3rd amplifier OP3.One end of the 5th resistance R 5 is connected with the reverse input end of four high guaily unit OP4, and the other end of the 5th resistance R 5 is connected with the output terminal of four high guaily unit OP4.The first capacitor C 1 one end be connected with the reverse input end of the second amplifier OP2, the other end of the first capacitor C 1 is connected with the output terminal of the second amplifier OP2.The input end of the second capacitor C 2 is connected with the input end Vin of PID circuit, and the output terminal of the second capacitor C 2 is connected with the reverse input end of the 3rd amplifier OP3.One end of the 3rd capacitor C 3 is connected with the reverse input end of the 3rd amplifier OP3, and the other end of the 3rd capacitor C 3 is connected with the output terminal of the 3rd amplifier OP3.The output terminal of four high guaily unit OP4 is the output end vo ut of PID circuit.
Above-described embodiment is only explanation technical conceive of the present invention and feature, and its object is to allow person skilled in the art can understand content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences that Spirit Essence is done according to the present invention change or modify, within all should being encompassed in protection scope of the present invention.
Claims (2)
1. a monolithic closed loop integrated circuit for acceleration transducer, is applied in acceleration transducer so that it is carried out to signal processing, it is characterized in that: it comprises
Charge amplifier, described charge amplifier is connected with the output terminal of described acceleration transducer, and completes electric charge-voltage transitions;
Rectifier, described rectifier is connected with the output terminal of described charge amplifier, and described rectifier changes the output signal of described charge amplifier into forward output signal;
Low-pass filter, described low-pass filter is connected with the output terminal of described rectifier, described low-pass filter comprises the first wave filter and the second wave filter that are connected successively, and described low-pass filter is to the carrier signal filtering in described forward output signal;
Impact damper, described impact damper is connected with the output terminal of described low-pass filter, and described impact damper is by the output signal Buffer output of described low-pass filter;
PID circuit, described PID circuit is connected with the output terminal of described impact damper, and described PID circuit carries out the open loop signal of described impact damper output ratio, integration, differentiates;
High-voltage driving circuit, the input end of described high-voltage driving circuit is connected with the output terminal of described PID circuit, and the output terminal of described high-voltage driving circuit is connected with the sensitive structure of described acceleration transducer; Described high-voltage driving circuit the output signal of described PID circuit is processed after to drive the sensitive structure of described acceleration transducer;
Described PID circuit comprises the first amplifier, the second amplifier, the 3rd amplifier, four high guaily unit, the first resistance, variable resistor, the 3rd resistance, the 4th resistance, the 5th resistance, the first electric capacity, the second electric capacity, the 3rd electric capacity;
The output terminal of the output terminal of the output terminal of the first described amplifier, the second described amplifier, the 3rd described amplifier is all connected with the reverse input end of described four high guaily unit; One end of the first described resistance is connected with the input end of described PID circuit, and the other end of the first described resistance is connected with the reverse input end of the first described amplifier; Described variable-resistance one end is connected with the reverse input end of the first described amplifier, and the described variable-resistance other end is connected with the output terminal of the first described amplifier; One end of the 3rd described resistance is connected with the input end of described PID circuit, and the other end of the 3rd described resistance is connected with the reverse input end of the second described amplifier; One end of the 4th described resistance is connected with the input end of described PID circuit, and the other end of the 4th described resistance is connected with the reverse input end of the 3rd described amplifier; One end of the 5th described resistance is connected with the reverse input end of described four high guaily unit, and the other end of the 5th described resistance is connected with the output terminal of described four high guaily unit; The first described electric capacity one end be connected with the reverse input end of described the second amplifier, the other end of the first described electric capacity is connected with the output terminal of the second described amplifier; The input end of the second described electric capacity is connected with the input end of described PID circuit, and the output terminal of the second described electric capacity is connected with the reverse input end of the 3rd described amplifier; One end of the 3rd described electric capacity is connected with the reverse input end of the 3rd described amplifier, and the other end of the 3rd described electric capacity is connected with the output terminal of the 3rd described amplifier; The output terminal of described four high guaily unit is the output terminal of described PID circuit.
2. the monolithic closed loop integrated circuit of acceleration transducer according to claim 1, is characterized in that: described variable resistor adopts coding-control.
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| CN201210296117.XA CN102809671B (en) | 2012-08-20 | 2012-08-20 | Single chip closed loop integrated circuit of acceleration transducer |
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| CN201210296117.XA CN102809671B (en) | 2012-08-20 | 2012-08-20 | Single chip closed loop integrated circuit of acceleration transducer |
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| CN102809671A CN102809671A (en) | 2012-12-05 |
| CN102809671B true CN102809671B (en) | 2014-07-30 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103558417A (en) * | 2013-11-08 | 2014-02-05 | 中国工程物理研究院电子工程研究所 | Detection method and device thereof for charge balance type micro-accelerometer gauge head differential capacitor |
| CN103954795B (en) * | 2014-04-30 | 2016-04-13 | 中国科学院地质与地球物理研究所 | A kind of can the mems accelerometer of through engineering approaches |
| CN104714051B (en) * | 2015-03-27 | 2019-04-16 | 嘉兴市纳杰微电子技术有限公司 | A kind of mems accelerometer reading circuit |
| CN106160671B (en) * | 2015-04-10 | 2019-03-15 | 无锡华润上华科技有限公司 | Signal amplification circuit |
| JP7040253B2 (en) * | 2018-04-20 | 2022-03-23 | セイコーエプソン株式会社 | Physical quantity sensor module, inclinometer, inertial measurement unit, structure monitoring device, and moving object |
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| EP1857826A2 (en) * | 2004-05-14 | 2007-11-21 | Fujitsu Ltd. | Capacitance difference detecting circuit and mems sensor |
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Effective date of registration: 20180822 Address after: 233030 2016 Tang He road, Bengbu, Anhui Patentee after: Huadong Photoelectric Integrated Device Research Institute Address before: 215163 No. 89 Longshan Road, hi tech Zone, Suzhou, Jiangsu Patentee before: China North Industries Group Corporation No.214 Research Institute Suzhou R&D Center |
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