CN102794688A - Reconstructing few-shaft ultra-precise large-size optical mirror grinding system - Google Patents
Reconstructing few-shaft ultra-precise large-size optical mirror grinding system Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 48
- 230000033001 locomotion Effects 0.000 claims abstract description 36
- 238000005299 abrasion Methods 0.000 claims abstract description 28
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 230000003993 interaction Effects 0.000 claims abstract description 10
- 229910001651 emery Inorganic materials 0.000 claims description 137
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- 238000003754 machining Methods 0.000 claims description 19
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- 230000003746 surface roughness Effects 0.000 claims description 9
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Abstract
The invention relates to a reconstructing few-shaft ultra-precise large-size optical mirror grinding system which comprises a grinder parameter database module, a grinding technological database module, a man-machine interaction module, a constraint condition constructing module, a grinding wheel geometrical parameter reconstructing module, a virtual shaft generating module, a few-shaft track planning and local interference checking module, a grinding wheel abrasion forecasting and track correcting module, a few-shaft processing code generating module, a technology step and technological parameter generating module, a few-shaft ultra-precise numerical control grinder executing module, a mirror surface quality detection module and a grinding wheel reshaping sharpening module. In order to meet different processing demands, the parameters of a grinding technology, the geometrical parameters of a grinding wheel, the inclined angle of a spindle of a grinder, a motion track of the grinding wheel and a processing code are quickly reconstructed, and the abrasion of the grinding wheel is forecast and compensated. The reconstructing few-shaft ultra-precise large-size optical mirror grinding system provided by the invention has the characteristics of big to-be-processed aperture of an optical mirror surface, few shafts, reconstruction, high efficiency, high precision, excellent stability and strong adaptability.
Description
Technical field
The present invention relates to a kind of grinding system of optical mirror plane manufacture field, particularly relate to the few axle of a kind of restructural ultraprecise large optical mirror grinding system.
Background technology
In recent years, along with over the ground, to sky observation continuous increase to the large telescope demand, the optical mirror plane of making large scale, high surface figure accuracy, low sub-surface damage becomes urgent requirement.Off-axis aspheric surface is the principal mode of current optical mirror plane.For the grinding of ultraprecise large optical mirror, the bore of general optical mirror plane will be more than 1m, and the surface figure accuracy of processing back optical mirror plane is better than 10 microns.
At present, the form of ultraprecise off-axis aspheric surface grinding mainly contains five and decides contact point grinding and three and become the contact point grinding.Three become the contact point grinding and are also referred to as few grinding.It is comparatively simple to decide contact point grinding trajectory planning, but the machine tool structure that uses is complicated, poor rigidity; At the fixed contact point place, abrasion of grinding wheel is very serious; For hard brittle materials such as SiC, be difficult to processing.The grinding of few axle then can make lathe mechanism simple, reduces the faying face between the machine tool component, the rigidity and the damping that improve the grinding machine structure greatly.The wearing and tearing of few axle grinding medium plain emery wheel are even, thereby can prolong the service life of emery wheel.At present, the grinding of few axle also is not widely used.The most important characteristic that the ultraprecise grinding machine is possessed is high rigidity and big damping, and the characteristic of the high rigidity of grinding machine and big damping can effectively suppress vibration, and distortion etc. influences the unfavorable factor of machine tool accuracy.The restructural of grinding system is meant the different characteristic according to system's current states and workpiece to be processed; The structure of grinding machine, emery wheel geometric parameter, trajectory planning etc. are reset; To satisfy the feasibility of curve surface of workpiece processing, improve the working (machining) efficiency of curve surface of workpiece.
Find through the document retrieval; The Xavier Tonnellier of Britain Cranfield university is at its thesis for the doctorate " to the quick superfine grinding of making of massive optics " (Precision Grinding for Rapid Manufacturing of Large Optics; Xavier Tonnellier; Cranfield University; May 2009) a kind of typical three ultraprecise grinding machine-BOX have been described in the literary composition, the BOX grinding machine has adopted the collocation form of two shifting axles, one rotating shafts, and the grinding machine spindle angle of inclination is fixed.The shortcoming of BOX grinding machine is very high to the requirement of rotating shaft circular runout, causes the rotating shaft bearing element to be difficult to make, and can't satisfy the processing request of 2m bore space ultraprecise optical mirror plane.And its spindle tilt is fixed, and runs into different workpieces to be processed, can not change this angle to obtain best processing effect, does not have reconfigurability.The people such as Tsunemoto Kuriyagawa of Japan are at " a kind of new method for grinding of non-ball pottery minute surface " (Tsunemoto Kuriyagawa; Mohammad Saeed Sepasy Zahmaty, Katsuo Syoji, A new grinding method for aspheric ceramic mirrors; Journal of Materials Processing Technology62 (1996) 387-392) provided a kind of few axle grinding system in the literary composition; But this system only is fit to the processing of small-bore optical mirror plane, and its method for planning track can only be directed against specific lathe configuration, and workpiece must have symmetrical centre; And complex algorithm does not have versatility.
Summary of the invention
In view of this; The invention provides the few axle of a kind of restructural ultraprecise large optical mirror grinding system; Comprise grinding machine supplemental characteristic library module, grinding process DBM, human-computer interaction module, constraints constructing module; Emery wheel geometric parameter reconstructed module; The imaginary axis generation module, few track shaft planning and local interference checking module, abrasion of grinding wheel prediction and track correcting module, few axle machining code generation module, processing step and technological parameter generation module, few axle ultraprecise numerically control grinder Executive Module, mirror-quality detection module, emery wheel dressing dressing module.System of the present invention can be to the optical mirror plane of arbitrary surface form (comprising off-axis aspheric surface); Abrasion of grinding wheel is compensated; Through generating imaginary axis; Make full use of the flexibility of five travelling wheelhead roll grinders, brought into play the advantage of the big damping of the high rigidity of few travelling wheelhead roll grinder simultaneously, but big, the few axle of processing optical minute surface bore, restructural, calculate simple, precision is high, good stability, highly versatile.
The present invention realizes through following technical scheme: human-computer interaction module is accepted user's input; The constraints constructing module obtains the information of grinding machine parameter database and technological parameter database through database interface; In conjunction with the input of human-computer interaction module, tectonic system constraints; The system restriction condition that processing step and technological parameter generation module provide according to said constraints constructing module is confirmed the processing step and the technological parameter of grinding; The geometric parameter of the calculation of parameter emery wheel that emery wheel geometric parameter reconstructed module provides according to constraints constructing module, processing step and technological parameter generation module; Two virtual rotating shafts of the parametric configuration system that the imaginary axis generation module provides according to constraints constructing module and processing step and technological parameter generation module; Few track shaft planning generates the local wheel grinding motion path of interfering of nothing with the parameter that local interference checking module provides according to imaginary axis generation module, processing step and technological parameter generation module; Geometric parameter and profile varying and obtain the correction of grinding wheel movement track in the parameter prediction wheel grinding process that abrasion of grinding wheel prediction and track correcting module provide according to emery wheel geometric parameter reconstructed module, few track shaft planning and local interference checking module; Lack axle machining code generation module and plan that according to abrasion of grinding wheel prediction and track correcting module, processing step and technological parameter generation module, few track shaft the parameter that provides with local interference checking module generates the machining code of grinding machine digital control system; Few axle ultraprecise numerically control grinder Executive Module obtains machining code through numerical control system communication interface from few axle machining code generation module, accomplishes the processing of optical mirror plane; Emery wheel dressing dressing module is carried out shaping, dressing according to the emery wheel geometric parameter of emery wheel geometric parameter reconstructed module input to emery wheel, for few axle ultraprecise numerically control grinder Executive Module provides the emery wheel that satisfies size and technological requirement; The mirror-quality detection module detects the mirror-quality of few axle ultraprecise numerically control grinder Executive Module processing; Judge whether reach processing request; And this grinding process parameters is input to the grinding process DBM, the mirror-quality index is input to the abrasion of grinding wheel prediction improves abrasion of grinding wheel prediction accuracy next time with the track correcting module; The characteristic parameter of the few axle of grinding machine parameter database record ultraprecise numerically control grinder Executive Module.
Below the inventive method is further specified, particular content is following:
Human-computer interaction module, its effect are the intermediate object program of accepting user's input and display system operation.User's input comprise optical mirror plane blank material, size, optical mirror plane geometry mathematic(al) representation and machine back the minute surface surface figure accuracy and the surface roughness that will reach.The movement locus of the position, emery wheel that the intermediate object program of system operation comprises geometric parameter, the imaginary axis of emery wheel in the space, emery wheel profile are because of machining code, grinding process step and the technological parameter of the time dependent process of wearing and tearing, digital control system and the mathematic(al) representation of grinding process centre surface geometry shape.
Grinding machine supplemental characteristic library module; Its effect is the characteristic of the few axle of record ultraprecise numerically control grinder, comprises the physical dimension parameter of grinding machine, the extreme position of each motion, the highest and minimum operation speed of each and acceleration, the single order model frequency of grinding machine and the static rigidity of grinding machine.
Grinding process parameters DBM, its effect are record grinding condition, the technological parameter of use and the mirror-quality that reaches.Grinding condition refers to the attribute and the cooling fluid type of optical mirror plane blank material, emery wheel.The attribute of emery wheel is meant abrasive type, bond type, abrasive particle size and the concentration of emery wheel.Technological parameter is meant the grinding depth of the speed of mainshaft, grinding speed, emery wheel feed speed and emery wheel.Mirror-quality is meant the surface figure accuracy and the surface roughness of minute surface.
Constraints constructing module, its effect are to come tectonic system constraints according to human-computer interaction module, grinding process parameters DBM and grinding machine supplemental characteristic library module.The constraints constructing module is that emery wheel geometric parameter reconstructed module provides the system restriction condition, comprising: geometric expression formula, surface figure accuracy and the surface roughness of the model frequency of grinding machine, grinding linear velocity, optical mirror plane; The same or similar mirror base material that provides for processing step and technological parameter generation module, the technological parameter under the identical or close minute surface aimed quality condition; And the physical dimension parameter of the grinding machine that provides for the imaginary axis generation module and the extreme position of each motion.
Emery wheel geometric parameter reconstructed module, its effect are the parameters that provides according to constraints constructing module and processing step and technological parameter generation module, the geometric parameter of reconstruct emery wheel.Medium plain emery wheel of the present invention is from big Shape Classification; Be the anchor ring emery wheel; The emery wheel geometric parameter comprises grinding wheel diameter, emery wheel radius of clean-up, emery wheel rim angle and grinding wheel spindle inclination angle; The grinding wheel spindle inclination angle is identical with the machine tool chief axis inclination angle, and above-mentioned four geometric parameters can be confirmed the geometry of emery wheel fully.
The selection of grinding wheel diameter; Requirement according to grinding process; The linear velocity of emery wheel at the grinding points place is known, and the mode of lathe is also fixed, and the speed of machine tool chief axis is less than lathe single order model frequency; Can obtain good dynamic effect like this, the diameter of emery wheel just can be calculated by speed, linear velocity so.
The selection of emery wheel radius of clean-up, according to the hands-off requirement in part, the radius of clean-up of emery wheel is less than workpiece maximum curvature radius to be ground, requires the upper limit of restriction emery wheel radius of clean-up with this.The lower limit of emery wheel radius of clean-up is limited by the removing material clearance then.In the grinding, the removing material clearance must be worth greater than certain as an index.The removing material clearance increases along with the increase of radius of clean-up.The radius of clean-up of the emery wheel of selecting at last is as long as just can in the lower limit above that.
The selection at grinding wheel spindle inclination angle, the inclination angle of grinding wheel spindle is the inclination angle of grinding machine spindle just.The excursion at grinding wheel spindle inclination angle is 0 ° to 90 ° in theory, and for the workpiece to be processed of confirming, grinding wheel spindle inclination angle and the grinding points distribution angle on the emery wheel circumferencial direction has definite functional relation.The distribution angle of grinding points on the emery wheel circumferencial direction is wide more, and local possibility of interference is big more, but wearing and tearing are even more.Comprehensively interfere and both factor of wearing and tearing, the selected distribution angle of a grinding points on the emery wheel circumferencial direction can obtain the value at grinding wheel spindle inclination angle on the function relation figure of the distribution angle on the emery wheel circumferencial direction in grinding wheel spindle inclination angle and grinding points.
The selection of emery wheel rim angle is done Gauss Map simultaneously with emery wheel curved surface and workpiece to be processed curved surface, and the image field of the Gauss Map of assurance workpiece to be processed curved surface according to this condition, calculates the emery wheel rim angle in the image field of the Gauss Map of emery wheel curved surface.
The imaginary axis generation module; Outside three shifting axles of few axle ultraprecise grinding machine; The physical dimension parameter of the grinding machine that the emery wheel geometric parameter constraints constructing module that provides according to emery wheel geometric parameter reconstructed module provides and the extreme position of each motion; Fictionalize the rotating shaft that two geometric positions are confirmed, obtain virtual five travelling wheelhead roll grinders, of equal value from said virtual five travelling wheelhead roll grinders of kinematic angle and actual five travelling wheelhead roll grinders.
Few track shaft planning and interference checking module; On the basis of virtual five travelling wheelhead roll grinders that the imaginary axis generation module provides; The geometric properties of curved surface in the middle of the grinding process that provides according to processing step and technological parameter generation module; Confirm the form of cutter-contact point track on the surface of the work,, then select zigzag cutter-contact point track for use if curve surface of workpiece does not have axially symmetric structure.So-called zigzag cutter-contact point track is meant with a series of vertical parallel planes and workpiece to be processed and intersects, the track that a series of intersections of acquisition form.If curve surface of workpiece has axially symmetric structure, then select spiral cutter-contact point track for use.
The calculating of adjacent track line space on the surface of the work, for two corresponding points on the adjacent track, the ultimate range between them be between these 2 effectively cutting width with.Spirality cutter-contact point track adjacent track line space is exactly the above ultimate range, and zigzag cutter-contact point track adjacent track line space then is the minimum of a value of ultimate range between all corresponding points on the adjacent track.
The Coordinate Calculation of putting on the grinding wheel movement track on the basis of said virtual five travelling wheelhead roll grinders, according to the coordinate and the normal vector of cutter-contact point on the curve surface of workpiece, calculates each value of said virtual five travelling wheelhead roll grinders.The value of three shifting axles is on the grinding wheel movement track position of point under workpiece coordinate system, the value representation of two virtual rotating shafts the position of cutter-contact point on wheel face.
Local interference checking carries out local interference checking according to the deviation value of grinding points place emery wheel curved surface and workpiece to be processed curved surface.If the deviation along all directions in the common tangent plane of grinding points place emery wheel curved surface and curve surface of workpiece all is not less than zero, then local the interference do not exist, otherwise local the interference exists.
Abrasion of grinding wheel prediction and track correcting module; Its effect is on the basis of the emery wheel geometric parameter that emery wheel geometric parameter reconstructed module provides; The profile of prediction emery wheel and obtains the position correction amount that produces because of abrasion of grinding wheel over time according to the grinding wheel movement track that few track shaft planning and local interference checking module provide.The order of accuarcy of process medium plain emery wheel wearing and tearing prediction can be judged through the minute surface surface figure accuracy that the mirror-quality detection module provides.If prediction deviation is excessive, then, further improve the abrasion of grinding wheel prediction accuracy according to the parameter in the process of surface figure accuracy value correction abrasion of grinding wheel prediction.
Few axle machining code generation module, grinding wheel movement track and abrasion of grinding wheel prediction that few track shaft planning and local interference checking module are provided combine with the position correction amount that the track correcting module provides, and obtain revised grinding wheel movement track.The grinding wheel movement track adopts the expression-form of discrete point, and digital control system can't directly be utilized, so convert the discrete point track into G code that numerically control grinder is processed usefulness.The emery wheel feed speed in the G code and the speed of mainshaft are provided by processing step and technological parameter generation module.According to the type and the ability of digital control system, both can be converted into the G code of linear interpolation type, also can be converted into the G code of spline interpolation type.
Processing step and technological parameter generation module; Effect is the constraints that provides according to the constraints constructing module, confirms the processing step of this grinding and the technological parameter that each step adopts according to the existing technological parameter under same or similar mirror base material, the identical or close minute surface aimed quality condition.Processing step is meant roughing, semifinishing and accurately machined grinding order and the number sequence expression formula of the middle surface geometry shape that produced.Technological parameter will be confirmed respectively under roughing, semifinishing and the fine finishining.
Few axle ultraprecise numerically control grinder Executive Module adopts the configuration of three shifting axles, can avoid the run-out error that adopts rotating shaft to bring.Wherein the Y axle adopts arch twin beams form, can improve the integral rigidity of system greatly.Main shaft is between twin beams, and spindle tilt is adjustable, spindle tilt according to the different workpiece curved surface by system reconfiguration of the present invention.System of the present invention can process the ultraprecise optical mirror plane of maximum 2m bore.
Emery wheel dressing dressing module, its effect are the emery wheel geometric parameters that provides according to emery wheel geometric parameter reconstructed module, and emery wheel is carried out the shaping of profile, to reach the physical dimension of regulation, emery wheel are carried out dressing, make emery wheel sharper, improve the effect of cutting.If abrasion of grinding wheel is too serious, depart from when excessive with original profile, use emery wheel dressing dressing module to emery wheel shaping dressing again.
The mirror-quality detection module, its effect is the surface quality after the detection optical mirror finish, comprises surface figure accuracy and surface roughness.The result that mirror-quality detects is recorded the grinding process DBM with grinding condition, the grinding process parameters of this grinding, confirms to provide foundation for grinding process parameters later on.
The present invention compared with prior art; Provide a cover complete restructural ultraprecise large optical mirror grinding system, on few axle ultraprecise numerically control grinder of the present invention, to free form surface; The optical mirror plane of the maximum 2m of bore can carry out reconstruct to emery wheel geometric parameter and machine tool chief axis angle of inclination; To the character of curve surface of workpiece, can carry out reconstruct to the movement locus of emery wheel; To dissimilar digital control systems, can carry out reconstruct to the G code of processing usefulness.To the wearing and tearing in the wheel grinding process, can compensate the grinding wheel movement track.System of the present invention can be directed against any optical mirror plane, through generating imaginary axis, makes full use of the flexibility of five travelling wheelhead roll grinders, has brought into play the advantage of the big damping of the high rigidity of few travelling wheelhead roll grinder simultaneously, and possesses abrasion of grinding wheel prediction capability for correcting, has significantly improved machining accuracy.System of the present invention has, and but big, the few axle of processing optical minute surface bore, restructural, efficient height, precision are high, good stability, adaptable characteristics.
Description of drawings
Fig. 1 is the schematic block diagram of system of the present invention
Fig. 2 be few ultraprecise numerically control grinder Executive Module among the present invention few ultraprecise numerically control grinder structure and be installed in shaping dressing module and the mirror-quality detection module on this few axle ultraprecise numerically control grinder.
Fig. 3 is the toroidal wheel cross section of the emery wheel geometric parameter reconstructed module among the present invention, each geometric parameter of emery wheel and the imaginary axis in the imaginary axis generation module.
The specific embodiment
As shown in the figure, specify specific embodiments of the present invention below in conjunction with accompanying drawing.
Fig. 1 is the schematic block diagram of system of the present invention.101 is computer A among the figure, and 102 is computer B, and 200 is workstation computer.
At first the user specifies optical mirror plane blank material to be processed, size through Man Machine Interface, and the mathematic(al) representation of optical mirror plane geometry machines surface figure accuracy and surface roughness that the back minute surface will reach.In system's running,, check the intermediate object program of system's operation through Man Machine Interface; The geometric parameter that comprises emery wheel, the position of imaginary axis, the movement locus of emery wheel in the space; The emery wheel profile is because of the time dependent process of wearing and tearing; The machining code of digital control system, the mathematic(al) representation of surface geometry shape in the middle of grinding process step and the technological parameter, grinding process.
Grinding machine parameter database module records the characteristic of few ultraprecise numerically control grinder, comprise the physical dimension parameter of grinding machine, the extreme position of each motion, the highest, the minimum operation speed of each, acceleration, the single order model frequency of grinding machine, the static rigidity of grinding machine.
The grinding process parameters DBM has write down grinding condition, the technological parameter of use, the mirror-quality that reaches.Said grinding condition refers to the attribute of optical mirror plane blank material, emery wheel, the type of cooling fluid.The attribute of said emery wheel is meant abrasive type, bond type, abrasive particle size, the concentration of emery wheel.Said technological parameter is meant the grinding depth of the speed of mainshaft, grinding speed, emery wheel feed speed, emery wheel.Said mirror-quality is meant the surface figure accuracy and the surface roughness of minute surface.
Then in the constraints constructing module according to human-computer interaction module, grinding process parameters DBM, grinding machine parameter database module structure system restriction condition.Said system restriction condition is meant that the constraints that provides for emery wheel geometric parameter reconstructed module comprises model frequency, the grinding linear velocity of grinding machine, geometric expression formula, surface figure accuracy and the surface roughness of optical mirror plane; The same or similar mirror base material that provides for processing step and technological parameter generation module, the technological parameter under the identical or close minute surface aimed quality condition, the physical dimension parameter of the grinding machine that provides for the imaginary axis generation module, the extreme position of each motion.
The constraints that in processing step and technological parameter generation module, provides according to the constraints constructing module is then confirmed the processing step of this grinding and the technological parameter that each step adopts according to the existing technological parameter under same or similar mirror base material, the identical or close minute surface aimed quality condition.Said processing step is meant roughing, semifinishing and accurately machined grinding order and the mathematic(al) representation of the middle surface geometry shape that produced.Technological parameter is confirmed respectively under roughing, semifinishing and the fine finishining.
Then in emery wheel geometric parameter reconstructed module, according to the system restriction condition, realize functions of modules according to the following step, the first step limits the anchor ring that is shaped as of emery wheel; In second step, in the linear velocity of grinding points, calculate grinding wheel diameter according to the single order model frequency of grinding machine and emery wheel; The 3rd step, according to the material removing rate of grinding points require with workpiece on the maximum of radius of curvature, calculating emery wheel radius of clean-up; The 4th step, follow according to emery wheel and do not interfere the requirement with uniform wear, make the distribution angle of grinding points on the emery wheel circumferencial direction, calculate the grinding wheel spindle inclination angle; In the 5th step, in the image field of the Gauss Map of emery wheel curved surface, calculate the emery wheel rim angle according to the image field of the Gauss Map of machining curve surface of workpiece.
Then in the imaginary axis generation module; Except that three shifting axles of few axle ultraprecise grinding machine; The physical dimension parameter of the grinding machine that the emery wheel geometric parameter constraints constructing module that provides according to said emery wheel geometric parameter reconstructed module provides, the extreme position of each motion; Fictionalize the rotating shaft that two geometric positions are confirmed, obtain virtual five travelling wheelhead roll grinders, of equal value from said virtual five travelling wheelhead roll grinders of kinematic angle and actual five travelling wheelhead roll grinders.
In few track shaft planning and interference checking module, on the basis of virtual five travelling wheelhead roll grinders that said imaginary axis generation module provides, under said constraints, realize functions of modules then according to the following step:
The first step, the geometric properties of curved surface in the middle of the grinding process that provides according to said processing step and technological parameter generation module is confirmed the form of cutter-contact point track on the surface of the work, if curve surface of workpiece does not have axially symmetric structure, then selects zigzag cutter-contact point track for use.So-called zigzag cutter-contact point track is meant with a series of vertical parallel planes and workpiece to be processed and intersects, the track that a series of intersections of acquisition form.If curve surface of workpiece has axially symmetric structure, then select spiral cutter-contact point track for use.
Second step was calculated adjacent track line space on the surface of the work.For two corresponding points on the adjacent track, the ultimate range between them be between these 2 effectively cutting width with.Spirality cutter-contact point track adjacent track line space is exactly the above ultimate range, and zigzag cutter-contact point track adjacent track line space then is the minimum of a value of ultimate range between all corresponding points on the adjacent track.
In the 3rd step, on the basis of said virtual five travelling wheelhead roll grinders,, calculate each value of said virtual five travelling wheelhead roll grinders according to the coordinate and the normal vector of cutter-contact point on the curve surface of workpiece.The value of three shifting axles is on the grinding wheel movement track position of point under workpiece coordinate system, the value representation of two virtual rotating shafts the position of cutter-contact point on wheel face.
In the 4th step, carry out local interference checking according to the deviation value of grinding points place emery wheel curved surface and workpiece to be processed curved surface.Concrete grammar is that then local the interference do not exist if the deviation along all directions all is not less than zero in the public tangent plane of grinding points place emery wheel curved surface and curve surface of workpiece, otherwise local the interference exists.
Then in abrasion of grinding wheel prediction and track correcting module; On the basis of the emery wheel geometric parameter that said emery wheel geometric parameter reconstructed module provides; The profile of prediction emery wheel and obtains the position correction amount that produces because of abrasion of grinding wheel over time according to the grinding wheel movement track that said few track shaft planning and local interference checking module provide.The order of accuarcy of process medium plain emery wheel wearing and tearing prediction can be judged through the minute surface surface figure accuracy that the mirror-quality detection module provides.If prediction deviation is excessive, then, further improve the abrasion of grinding wheel prediction accuracy according to the parameter in the process of surface figure accuracy value correction abrasion of grinding wheel prediction.
Then in few axle machining code generation module; Grinding wheel movement track and the prediction of said abrasion of grinding wheel that said few track shaft planning and local interference checking module are provided combine with the position correction amount that the track correcting module provides, and obtain revised grinding wheel movement track.The grinding wheel movement track adopts the expression-form of discrete point, and digital control system can't directly be used, so convert the discrete point track into G code that numerically control grinder is processed usefulness.The emery wheel feed speed in the G code and the speed of mainshaft are provided by processing step and technological parameter generation module.According to the type and the ability of digital control system, both can be converted into the G code of linear interpolation type, also can be converted into the G code of spline interpolation type.
In few axle ultraprecise numerically control grinder Executive Module, few axle ultraprecise numerically control grinder adopts the configuration of three shifting axles, can avoid the run-out error that adopts rotating shaft to bring then.Wherein the Y axle adopts arch twin beams form, can improve the integral rigidity of system greatly.Main shaft is between twin beams, and spindle tilt is adjustable, spindle tilt according to the different workpiece curved surface by system reconfiguration of the present invention.System of the present invention can process the ultraprecise optical mirror plane of maximum 2m bore.
In emery wheel dressing dressing module, the emery wheel geometric parameter according to emery wheel geometric parameter reconstructed module provides carries out the shaping of profile to emery wheel then, to reach the physical dimension of regulation, emery wheel is carried out dressing, makes emery wheel sharper, improves the effect of cutting.If abrasion of grinding wheel is too serious, depart from when excessive with original profile, use emery wheel dressing dressing module to emery wheel shaping dressing again.
In the mirror-quality detection module, the surface quality after the detection optical mirror finish comprises surface figure accuracy and surface roughness at last.The result that mirror-quality detects records the grinding process DBM with grinding condition, the grinding process parameters of this grinding, confirms to provide foundation for grinding process parameters later on.
Fig. 2 be few ultraprecise numerically control grinder Executive Module among the present invention few ultraprecise numerically control grinder structure and be installed in shaping dressing module and the mirror-quality detection module on this few axle ultraprecise numerically control grinder.The grinding machine overall structure adopts the form of three shifting axles.Among Fig. 21,3,6 be respectively grinding machine X axle, Y axle, Z axle.The Y axle adopts the arch twin-spar construction.5 is grinding machine spindle among Fig. 2, and main shaft is between twin beams, and spindle tilt can be adjusted in the plane between twin beams.4 for to be installed in the emery wheel on the main shaft among Fig. 2, and 2 is emery wheel dressing dressing module, and 7 is the mirror-quality detection module.
Fig. 3 shows the cross section of toroidal wheel, each geometric parameter of emery wheel and the position of two imaginary axis.The angle β of figure medium plain emery wheel axis and vertical direction is the grinding wheel spindle inclination angle, just the inclination angle of grinding machine spindle.D
wThe diameter of expression emery wheel, R
cThen be the radius of clean-up of emery wheel, in Fig. 3 cross section, O
cBe R
cA center of circle.O
T-X
TY
TZ
TThe expression workpiece coordinate system, trajectory planning obtains series of discrete point and just is meant workpiece coordinate system initial point O among the present invention
TCoordinate.O
M-X
MY
MZ
MRefer to workpiece coordinate system, γ 1 and γ 2 are the rim angle of emery wheel.A
AxisWith B
AxisTwo virtual rotating shafts, wherein A for few travelling wheelhead roll grinder
AxisRotating shaft be the axis of emery wheel, B
AxisRotating shaft pass through O
cPoint, and perpendicular to Fig. 3 cross section, B
AxisBe fixed on A
AxisOn, with A
AxisMotion.A
AxisBe fixed on the Z axle, move with the Z axle.
Claims (9)
1. the few axle of a restructural ultraprecise large optical mirror grinding system is characterized in that, comprising:
Grinding machine supplemental characteristic library module is used to write down the parameter of few ultraprecise numerically control grinder;
The grinding process DBM is used to write down the technological parameter of grinding condition, use, accessible mirror-quality;
Human-computer interaction module is used to accept user's input and the intermediate object program that display system is moved;
The constraints constructing module is used for combining said human-computer interaction module and from said grinding machine parameter database and said grinding process database information recorded that database interface obtains, the system restriction condition of grinding system is provided;
Processing step and technological parameter generation module are used for confirming according to the system restriction condition processing step and the technological parameter of grinding;
Emery wheel geometric parameter reconstructed module is used for reconstruct emery wheel geometric parameter on the basis of said system restriction condition;
The imaginary axis generation module is used for according to emery wheel geometric parameter and system restriction condition, fictionalizes the rotating shaft that two geometric positions are confirmed;
Few track shaft planning and local interference checking module; The geometric properties of rotating shaft that is used for confirming and the grinding process centre curved surface that provides according to said processing step and technological parameter generation module in said geometric position that said imaginary axis generation module provides; The movement locus of reconstruct emery wheel, generating does not have local wheel grinding movement locus of interfering;
Abrasion of grinding wheel prediction and track correcting module; The grinding wheel movement track that the emery wheel geometric parameter that is used for providing according to said emery wheel geometric parameter reconstructed module and said few track shaft planning and local interference checking module provide, geometric parameter and profile varying and obtain the correction of grinding wheel movement track in the prediction wheel grinding process;
Few axle machining code generation module; Grinding machine spindle rotating speed and emery wheel feed speed that grinding wheel movement track correction that the grinding wheel movement track that is used for providing according to said few track shaft planning and local interference checking module, the prediction of said abrasion of grinding wheel and track correcting module provide and said processing step and technological parameter generation module provide, the machining code of generation grinding machine digital control system;
Few axle ultraprecise numerically control grinder Executive Module is used for through the said few machining code that the machining code generation module provides optical mirror plane being processed;
Emery wheel dressing dressing module is used for the emery wheel geometric parameter that provides according to said emery wheel geometric parameter reconstructed module, emery wheel is carried out the shaping of profile; And
The mirror-quality detection module; Be used for the track correcting module minute surface surface figure accuracy being provided for said abrasion of grinding wheel prediction in process; And after processing the surface quality of detection optical minute surface, and the result recorded said grinding process DBM with grinding condition and grinding process parameters when time grinding.
2. the few axle of restructural according to claim 1 ultraprecise large optical mirror grinding system; It is characterized in that; The grinding machine that said few axle ultraprecise numerically control grinder Executive Module has the three shifting axle forms of employing, it adopts arch twin beams form, and main shaft is between twin beams; The tilt adjustable of said main shaft, the maximum caliber that can process ultraprecise optical mirror plane is 2m; Said few axle ultraprecise numerically control grinder Executive Module obtains machining code so that optical mirror plane is processed through numerical control system communication interface from said few axle machining code generation module.
3. the few axle of restructural according to claim 1 and 2 ultraprecise large optical mirror grinding system; It is characterized in that said constraints constructing module comes tectonic system constraints according to said human-computer interaction module, said grinding process parameters DBM and said grinding machine supplemental characteristic library module; Said constraints constructing module is that said emery wheel geometric parameter reconstructed module provides the system restriction condition, comprising: geometric expression formula, surface figure accuracy and the surface roughness of the model frequency of grinding machine, grinding linear velocity, optical mirror plane; The same or similar mirror base material that provides for said processing step and technological parameter generation module, the technological parameter under the identical or close minute surface aimed quality condition; And the physical dimension parameter of grinding machine and the extreme position of each motion are provided for said imaginary axis generation module.
4. the few axle of restructural according to claim 1 ultraprecise large optical mirror grinding system; It is characterized in that; The system restriction condition that said processing step and technological parameter generation module provide according to said constraints constructing module is confirmed when the processing step of time grinding and the technological parameter of each step employing according to the existing technological parameter under same or similar mirror base material, the identical or close minute surface aimed quality condition.
5. the few axle of restructural according to claim 1 ultraprecise large optical mirror grinding system; Said emery wheel geometric parameter reconstructed module is used for reconstruct emery wheel geometric parameter; It is characterized in that:, obtain the diameter of emery wheel according to the definite grinding linear velocity of grinding process, the mode of lathe; Do not interfere the radius of clean-up of confirming emery wheel with the requirement of removing material clearance lower limit according to the part; According to distribution angle and the local hands-off requirement of grinding points on the emery wheel circumferencial direction, confirm the grinding wheel spindle inclination angle, the inclination angle of grinding wheel spindle promptly is the inclination angle of grinding machine spindle; According to the requirement of image field in the image field of the Gauss Map of emery wheel curved surface of the Gauss Map of workpiece to be processed curved surface, obtain the emery wheel rim angle.
6. the few axle of restructural according to claim 1 ultraprecise large optical mirror grinding system; It is characterized in that; Said imaginary axis generation module; The physical dimension parameter of the grinding machine that emery wheel geometric parameter that provides according to said emery wheel geometric parameter reconstructed module and said constraints constructing module provide, the extreme position of each motion; Fictionalize the rotating shaft that two geometric positions are confirmed, obtain virtual five travelling wheelhead roll grinders, from said virtual five travelling wheelhead roll grinders of kinematic angle and actual five travelling wheelhead roll grinders equivalence.
7. the few axle of restructural according to claim 1 ultraprecise large optical mirror grinding system; It is characterized in that said few track shaft planning is used for the geometric properties according to curve surface of workpiece with the interference checking module, the track of surface of the work cutter-contact point is selected zigzag or spirality for use; Effective polishing width according to the grinding points place; Confirm the line space of adjacent cutter-contact point track,, calculate position and emery wheel the coordinate in workpiece coordinate system of grinding points on the emery wheel curved surface according to virtual five travelling wheelhead roll grinders; According to the deviation value of the curve surface of workpiece and the emery wheel curved surface at grinding points place, judge whether local the interference.
8. the few axle of restructural according to claim 1 ultraprecise large optical mirror grinding system; It is characterized in that; Said abrasion of grinding wheel prediction correcting module is on the basis of the emery wheel geometric parameter that said emery wheel geometric parameter reconstructed module provides; The profile of prediction emery wheel and obtains the position correction amount that produces because of abrasion of grinding wheel over time according to the grinding wheel movement track that said few track shaft planning and local interference checking module provide; The order of accuarcy of process medium plain emery wheel wearing and tearing prediction can be judged through the minute surface surface figure accuracy that said mirror-quality detection module provides.
9. the few axle of restructural according to claim 1 ultraprecise large optical mirror grinding system; It is characterized in that; Said few axle machining code generation module combines grinding wheel movement track and the prediction of said abrasion of grinding wheel that said few track shaft planning and local interference checking module provide with the position correction amount that the track correcting module provides, obtain the grinding wheel movement track of revising; Said grinding wheel movement track adopts the expression-form of discrete point, the discrete point track is converted into the G code of numerically control grinder processing usefulness; The emery wheel feed speed in the G code and the speed of mainshaft are provided by said processing step and technological parameter generation module; According to the type and the ability of digital control system, both can be converted into the G code of linear interpolation type, also can be converted into the G code of spline interpolation type.
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| CN105290915A (en) * | 2015-09-02 | 2016-02-03 | 上海交通大学 | Large-aperture ultra-precise grinding machine integrated system |
| CN106271966A (en) * | 2016-08-02 | 2017-01-04 | 中国科学院长春光学精密机械与物理研究所 | Iterative super large caliber reflecting mirror grinding and milling processing method based on tool wear compensation |
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| CN110052916A (en) * | 2019-04-22 | 2019-07-26 | 中国工程物理研究院激光聚变研究中心 | Heavy caliber wedge optical element ultraprecise combined shaping grinding attachment and processing method |
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| CN114871886B (en) * | 2021-12-18 | 2024-02-02 | 华海清科股份有限公司 | Wafer processing method, system and terminal equipment |
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