CN102760448B - Method and device for testing high-temperature resistance of magnetic head - Google Patents
Method and device for testing high-temperature resistance of magnetic head Download PDFInfo
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Abstract
本发明公开一种测试磁头耐高温性能的方法,所述磁头包括空气承载面及两屏蔽层,所述方法包括:以第一方向向所述磁头施加多个不同强度的第一磁场,并测量第一输出参数曲线;以第二方向向所述磁头施加多个不同强度的第二磁场,并测量第二输出参数曲线;以及判断所述第一输出参数曲线和所述第二输出参数曲线中是否存在超出容许值的变化,从而筛选出不良磁头,其中,所述第一方向垂直于所述磁头的空气承载面,所述第二方向与所述空气承载面成一角度地穿过所述空气承载面,所述角度的绝对值为锐角。本发明能够在不对磁头加热的情况下高精度地筛选出具有不佳的耐高温性能的不良磁头。
The present invention discloses a method for testing the high temperature resistance performance of a magnetic head, wherein the magnetic head comprises an air bearing surface and two shielding layers, and the method comprises: applying a plurality of first magnetic fields of different strengths to the magnetic head in a first direction, and measuring a first output parameter curve; applying a plurality of second magnetic fields of different strengths to the magnetic head in a second direction, and measuring a second output parameter curve; and judging whether there is a change exceeding an allowable value in the first output parameter curve and the second output parameter curve, so as to screen out a bad magnetic head, wherein the first direction is perpendicular to the air bearing surface of the magnetic head, and the second direction passes through the air bearing surface at an angle with the air bearing surface, and the absolute value of the angle is an acute angle. The present invention can screen out a bad magnetic head with poor high temperature resistance performance with high precision without heating the magnetic head.
Description
技术领域 technical field
本发明涉及一种测试磁头性能的方法,尤其涉及一种测试磁头耐高温性能的方法。而且,本发明涉及一种测试磁头性能的装置,尤其涉及一种测试磁头耐高温性能的装置。The invention relates to a method for testing the performance of a magnetic head, in particular to a method for testing the high temperature resistance of the magnetic head. Moreover, the present invention relates to a device for testing the performance of the magnetic head, in particular to a device for testing the high temperature resistance performance of the magnetic head.
背景技术 Background technique
包含多个旋转磁盘的硬盘驱动器被普遍用来将数据存储在其磁盘表面的磁性媒介上,而包含读传感器的可移动磁头用作从磁盘表面的磁轨上读取数据。A hard disk drive containing multiple spinning platters is commonly used to store data on magnetic media on its platter surfaces, while a movable head containing a read sensor is used to read data from the magnetic tracks on the platter surfaces.
当前,磁阻(magnetoresistive,MR)读头由于其内嵌有一个更高灵敏度的MR元件而广泛应用在主流磁头中。磁头在使用前,必须进行一系列的性能测试,如耐高温性能、动态飞行高度(dynamic flying height,DFH)性能、信噪比(Signal-to-Noise Ratio,SNR)性能、可靠性、稳定性等。例如,一个具有较差的耐高温性能的磁头,其在高温环境下会产生大量的噪声。若磁头具有较差的SNR性能则会损害磁头的读取稳定性,最终影响磁头的读取性能,因此,磁头的性能测试显得十分重要和必要。Currently, a magnetoresistive (MR) read head is widely used in mainstream magnetic heads because it is embedded with a higher-sensitivity MR element. Before the magnetic head is used, a series of performance tests must be carried out, such as high temperature resistance performance, dynamic flying height (dynamic flying height, DFH) performance, signal-to-noise ratio (SNR) performance, reliability, stability Wait. For example, a magnetic head with poor high temperature resistance will generate a lot of noise in a high temperature environment. If the magnetic head has poor SNR performance, it will damage the reading stability of the magnetic head, and finally affect the reading performance of the magnetic head. Therefore, the performance test of the magnetic head is very important and necessary.
下述方法是一种测试MR读头的传统方法。如图1所示,该MR读头10包括两个硬磁112、层夹于两个硬磁112之间的MR元件114、以及放置于MR元件114和硬磁112两边的两个屏蔽层1116。为众所知,MR元件的电阻会随外部磁场的变化而变化,从而使MR读头的输出产生变化。施加一个具有平行于屏蔽层116并与MR读头10的空气承载面117(air bearing surface,ABS)成0°的方向19(下文称为“一般磁化方向”)的磁场,可以测出MR读头的输出电压,重复该种操作,继而计算出最高的输出电压和最低的输出电压之间的差值变化,该种差值变化用于估算输出变化是否在某一容许值之内。若输出变化在容许值之外,则该被测磁头被判定为不良磁头而被舍弃。更普遍地,现有技术中经常施加一个垂直于ABS 117的方向18的磁场,来测量磁头的输出电压,从中检测磁头的性能是否合格。The method described below is a traditional method for testing MR read heads. As shown in FIG. 1, the MR read head 10 includes two hard magnets 112, an MR element 114 sandwiched between the two hard magnets 112, and two shielding layers 1116 placed on both sides of the MR element 114 and the hard magnets 112. . It is well known that the resistance of the MR element will change with the change of the external magnetic field, so that the output of the MR read head will change. By applying a magnetic field with a direction 19 (hereinafter referred to as "general magnetization direction") parallel to the shielding layer 116 and at an angle of 0° to the air bearing surface 117 (air bearing surface, ABS) of the MR read head 10, the MR reading can be measured. The output voltage of the head, repeat this operation, and then calculate the difference change between the highest output voltage and the lowest output voltage, and this difference change is used to estimate whether the output change is within a certain allowable value. If the output variation is outside the allowable value, the tested magnetic head is judged as a bad magnetic head and discarded. More generally, in the prior art, a magnetic field perpendicular to the direction 18 of the ABS 117 is often applied to measure the output voltage of the magnetic head to detect whether the performance of the magnetic head is qualified.
上述施加一般磁化方向和垂直于ABS的磁场的测试方法被广泛应用于磁头的DFH性能测试、SNR性能测试和可靠性及稳定性测试。然而,由于磁头的性能要求越来越高,因此上述的磁化的测试方法受到限制。至于磁头的耐高温性能测试,耐高温性能对这种一般磁化方向的磁化却十分不敏感,因此,磁头的耐高温性能测试的方法仍在研究当中。The above test method of applying a general magnetization direction and a magnetic field perpendicular to the ABS is widely used in the DFH performance test, SNR performance test and reliability and stability test of the magnetic head. However, since the performance requirements of the magnetic head are getting higher and higher, the above magnetization testing method is limited. As for the high temperature resistance performance test of the magnetic head, the high temperature resistance performance is very insensitive to the magnetization in this general magnetization direction. Therefore, the method of the high temperature resistance performance test of the magnetic head is still under study.
美国专利公开No.20080049351A1揭露了一种测试磁头耐高温性能的方法。如图2所示,在磁头21的元件形成表面2101上设置一加热元件35,从而向磁头21的MR元件32施加热量和应力。具体地,当通电时,该加热元件35发热,此情况下,MR元件32及其周围的材料发生热膨胀,从而使MR元件32产生大量的内应力生,此外,MR元件32还会发生内部变形。从而,在此情况下,发生在MR元件32的输出的噪声值被测量出,进而识别出该被测磁头在高温环境下会产生潜在的形变从而产生噪声。US Patent Publication No. 20080049351A1 discloses a method for testing the high temperature resistance performance of a magnetic head. As shown in FIG. 2 , a heating element 35 is provided on the element forming surface 2101 of the magnetic head 21 so as to apply heat and stress to the MR element 32 of the magnetic head 21 . Specifically, when energized, the heating element 35 generates heat. In this case, the MR element 32 and its surrounding materials thermally expand, thereby causing a large amount of internal stress to be generated in the MR element 32. In addition, the MR element 32 also undergoes internal deformation. . Therefore, in this case, the noise value occurring at the output of the MR element 32 is measured, and then it is identified that the magnetic head under test may be potentially deformed in a high-temperature environment to generate noise.
然而,由于磁头需在多次变化的高温环境下重复测试,因此温度的选择和控制需要很精确。若温度太高,则会存在在测试的过程中将良品磁头损坏的可能。However, since the magnetic head needs to be repeatedly tested in a high-temperature environment with multiple changes, the selection and control of the temperature needs to be very precise. If the temperature is too high, there will be a possibility of damaging good-quality magnetic heads during the test.
再且,上述方法只适用于内嵌有加热元件的磁头,对于没有加热元件的磁头则无法采用该方法来进行耐高温性能测试。Moreover, the above-mentioned method is only applicable to the magnetic head embedded with the heating element, and this method cannot be used for the high-temperature performance test of the magnetic head without the heating element.
因此,亟待一种改进的测试磁头耐高温性能的方法,以及测试磁头性能的方法以克服上述缺陷。Therefore, there is an urgent need for an improved method for testing the high temperature resistance performance of the magnetic head and a method for testing the performance of the magnetic head to overcome the above-mentioned defects.
发明内容 Contents of the invention
本发明的一个目的在于提供一种测试磁头耐高温性能的方法,其能够在不对磁头加热的情况下筛选出具有不佳的耐高温性能的不良磁头。An object of the present invention is to provide a method for testing the high temperature resistance of a magnetic head, which can screen out defective magnetic heads with poor high temperature resistance without heating the magnetic heads.
本发明的另一个目的在于提供一种测试磁头性能的方法,其能够检测出采用一般磁化的传统方法无法完全检测的不良磁头。Another object of the present invention is to provide a method for testing the performance of a magnetic head, which can detect defective magnetic heads that cannot be completely detected by conventional methods of general magnetization.
本发明的再一个目的在于提供一种测试磁头耐高温性能的装置,其能够在不对磁头加热的情况下筛选出具有不佳的耐高温性能的不良磁头。Another object of the present invention is to provide a device for testing the high temperature resistance of magnetic heads, which can screen out defective magnetic heads with poor high temperature resistance without heating the magnetic heads.
本发明的又一个目的在于提供一种测试磁头性能的装置,其能够检测出采用一般磁化的传统方法无法完全检测的不良磁头。Another object of the present invention is to provide a device for testing the performance of a magnetic head, which can detect defective magnetic heads that cannot be completely detected by conventional methods of general magnetization.
为达到以上目的,本发明提供一种测试磁头耐高温性能的方法,所述磁头包括空气承载面及两屏蔽层,所述方法包括以第一方向向所述磁头施加多个不同强度的第一磁场,并测量第一输出参数曲线;以第二方向向所述磁头施加多个不同强度的第二磁场,并测量第二输出参数曲线;以及判断所述第一输出参数曲线和所述第二输出参数曲线中是否存在超出容许值的变化,从而筛选出不良磁头。其中,所述第一方向垂直于所述磁头的空气承载面,所述第二方向与所述空气承载面成一角度地穿过所述空气承载面,所述角度的绝对值为锐角。In order to achieve the above object, the present invention provides a method for testing the high temperature performance of the magnetic head, the magnetic head includes an air bearing surface and two shielding layers, the method includes applying a plurality of first to the magnetic head in a first direction with different intensities. magnetic field, and measure the first output parameter curve; apply a plurality of second magnetic fields with different intensities to the magnetic head in a second direction, and measure the second output parameter curve; and judge the first output parameter curve and the second Whether there is a change beyond the allowable value in the output parameter curve, so as to screen out bad heads. Wherein, the first direction is perpendicular to the air bearing surface of the magnetic head, the second direction passes through the air bearing surface at an angle to the air bearing surface, and the absolute value of the angle is an acute angle.
作为一个优选实施例,该方法还包括控制所述磁头,使得所述空气承载面平行于水平面,继而向所述磁头施加所述第二磁场。As a preferred embodiment, the method further includes controlling the magnetic head so that the air bearing surface is parallel to a horizontal plane, and then applying the second magnetic field to the magnetic head.
作为另一优选实施例,该方法还包括控制所述磁头,使得所述空气承载面与水平面成所述角度,继而向所述磁头施加所述第二磁场。As another preferred embodiment, the method further includes controlling the magnetic head so that the air bearing surface forms the angle with the horizontal plane, and then applying the second magnetic field to the magnetic head.
较佳地,所述角度的范围是-20°~20°,其中0°除外。Preferably, the angle ranges from -20° to 20°, except 0°.
较佳地,所述第一方向和所述第二方向穿入所述空气承载面和/或从所述空气承载面穿出。Preferably, said first direction and said second direction penetrate into and/or exit from said air bearing surface.
可选地,该方法还包括以第三方向向所述磁头施加第三磁场,所述第三方向平行于所述屏蔽层并与所述空气承载面成0°角。Optionally, the method further includes applying a third magnetic field to the magnetic head in a third direction, the third direction is parallel to the shielding layer and forms an angle of 0° with the air bearing surface.
较佳地,所述第一磁场的强度和所述第二磁场的强度的范围是-800Oe~800Oe。Preferably, the strength of the first magnetic field and the strength of the second magnetic field range from -800Oe to 800Oe.
较佳地,所述第一输出参数曲线和所述第二输出参数曲线由输出电压表示。Preferably, the first output parameter curve and the second output parameter curve are represented by output voltages.
可选地,所述第一输出参数曲线和所述第二输出参数曲线由信噪比表示。Optionally, the first output parameter curve and the second output parameter curve are represented by a signal-to-noise ratio.
较佳地,所述变化具有一个最大跃变,所述最大跃变具有跃变率,所述容许值的跃变率为8%。Preferably, the change has a maximum jump, the maximum jump has a jump rate, and the allowable value has a jump rate of 8%.
本发明提供一种测试磁头性能的方法,所述磁头包括空气承载面及两屏蔽层,所述方法包括以第二方向向所述磁头施加第二磁场,并测量所述磁头的输出参数,所述第二方向与所述空气承载面成一角度地穿过所述空气承载面,所述角度的绝对值为锐角;以及重复施加不同强度的第二磁场,并测量多次输出参数,从而测试所述磁头的性能。The present invention provides a method for testing the performance of a magnetic head. The magnetic head includes an air bearing surface and two shielding layers. The method includes applying a second magnetic field to the magnetic head in a second direction, and measuring the output parameters of the magnetic head. The second direction passes through the air-bearing surface at an angle to the air-bearing surface, and the absolute value of the angle is an acute angle; and repeatedly applying a second magnetic field of different strengths, and measuring output parameters multiple times, thereby testing the performance of the magnetic head.
作为一个优选实施例,该方法还包括控制所述磁头,使得所述空气承载面平行于水平面,继而向所述磁头施加所述第二磁场。As a preferred embodiment, the method further includes controlling the magnetic head so that the air bearing surface is parallel to a horizontal plane, and then applying the second magnetic field to the magnetic head.
作为另一优选实施例,该方法还包括控制所述磁头,使得所述空气承载面与水平面成所述角度,继而向所述磁头施加所述第二磁场。As another preferred embodiment, the method further includes controlling the magnetic head so that the air bearing surface forms the angle with the horizontal plane, and then applying the second magnetic field to the magnetic head.
较佳地,所述角度的范围是-20°~20°,其中0°除外。Preferably, the angle ranges from -20° to 20°, except 0°.
较佳地,所述第二方向穿入所述空气承载面和/或从所述空气承载面穿出。Preferably, said second direction penetrates into said air bearing surface and/or passes out of said air bearing surface.
可选地,该方法还包括以垂直于所述空气承载面的第一方向向所述磁头施加第一磁场。Optionally, the method further includes applying a first magnetic field to the magnetic head in a first direction perpendicular to the air bearing surface.
可选地,该方法还包括以第三方向向所述磁头施加第三磁场,所述第三方向平行于所述屏蔽层并与所述空气承载面成0°角。Optionally, the method further includes applying a third magnetic field to the magnetic head in a third direction, the third direction is parallel to the shielding layer and forms an angle of 0° with the air bearing surface.
较佳地,所述第二磁场的强度的范围是-800Oe~800Oe。Preferably, the strength of the second magnetic field ranges from -800Oe to 800Oe.
较佳地,所述输出参数由输出电压表示。Preferably, the output parameter is represented by an output voltage.
可选地,所述输出参数由信噪比表示。Optionally, the output parameter is represented by a signal-to-noise ratio.
较佳地,所述变化具有一个最大跃变,所述最大跃变具有跃变率,所述容许值的跃变率为8%。Preferably, the change has a maximum jump, the maximum jump has a jump rate, and the allowable value has a jump rate of 8%.
相应地,本发明提供一种测试磁头耐高温性能的装置,所述磁头包括空气承载面及两屏蔽层,所述装置包括第一磁场施加单元,用于以第一方向向所述磁头施加多个不同强度的第一磁场;第一测量单元,用于根据所述第一磁场测量第一输出参数曲线;第二磁场施加单元,用于以第二方向向所述磁头施加不同强度的第二磁场;第二测量单元,用于根据所述第二磁场测量第二输出参数曲线;以及判断单元,用于判断所述第一输出参数曲线和所述第二输出参数曲线中是否存在超出容许值的变化,从而筛选出不良磁头。其中,所述第一方向垂直于所述磁头的空气承载面,所述第二方向与所述空气承载面成一角度地穿过所述空气承载面,所述角度的绝对值为锐角。Correspondingly, the present invention provides a device for testing the high temperature resistance of a magnetic head, the magnetic head includes an air bearing surface and two shielding layers, and the device includes a first magnetic field applying unit for applying multiple magnetic fields to the magnetic head in a first direction. a first magnetic field of different strength; a first measuring unit, used for measuring a first output parameter curve according to the first magnetic field; a second magnetic field applying unit, used for applying a second magnetic field of different strength to the magnetic head in a second direction. A magnetic field; a second measuring unit, configured to measure a second output parameter curve according to the second magnetic field; and a judging unit, configured to judge whether there is an exceeding allowable value in the first output parameter curve and the second output parameter curve Changes, thus filtering out bad heads. Wherein, the first direction is perpendicular to the air bearing surface of the magnetic head, the second direction passes through the air bearing surface at an angle to the air bearing surface, and the absolute value of the angle is an acute angle.
本发明提供一种测试磁性能的装置,所述磁头包括空气承载面及两屏蔽层,所述装置包括第二磁场施加单元,用于以第二方向向所述磁头施加不同强度的第二磁场,所述第二方向与所述空气承载面成一角度地穿过所述空气承载面,所述角度的绝对值为锐角;以及测量单元,用于根据所述第二磁场测量所述磁头的输出参数,从而测试所述磁头的性能。The present invention provides a device for testing magnetic properties, the magnetic head includes an air bearing surface and two shielding layers, the device includes a second magnetic field applying unit for applying a second magnetic field of different strengths to the magnetic head in a second direction , the second direction passes through the air bearing surface at an angle to the air bearing surface, the absolute value of the angle is an acute angle; and a measuring unit is configured to measure the output of the magnetic head according to the second magnetic field parameters to test the performance of the magnetic head.
与现有技术相比,本发明向磁头以与ABS成一定角度地穿过ABS的方向施加第二磁场,该角度的绝对值为锐角,从而测量磁头的输出,多次重复此种磁化操作和测量操作,最终在多个输出曲线中筛选出不良磁头。本发明能够在不对磁头加热的情况下,在室温下则可检测出在高温环境下潜在产生大量噪声的不良磁头。因此相较现有技术,本发明的测试方法得以改善。再且,本发明能够检测出采用一般磁化的传统方法无法完全检测的不良磁头,检测精度可靠。Compared with the prior art, the present invention applies a second magnetic field to the magnetic head in a direction passing through the ABS at an angle with the ABS, the absolute value of which is an acute angle, thereby measuring the output of the magnetic head, repeating this magnetizing operation and Measurement operation, finally screen out bad heads among multiple output curves. The invention can detect bad magnetic heads that potentially generate a lot of noise in a high-temperature environment without heating the magnetic heads at room temperature. Therefore, compared with the prior art, the testing method of the present invention is improved. Moreover, the present invention can detect defective magnetic heads that cannot be completely detected by the traditional method of general magnetization, and the detection accuracy is reliable.
通过以下的描述并结合附图,本发明将变得更加清晰,这些附图用于解释本发明的实施例。The present invention will become clearer through the following description in conjunction with the accompanying drawings, which are used to explain the embodiments of the present invention.
附图说明 Description of drawings
图1为MR读头的简化的局部立体图,其展示了一般的磁化方向。Figure 1 is a simplified partial perspective view of an MR read head showing the general magnetization orientation.
图2为磁头的立体图,其展示了一种传统的测试方法。FIG. 2 is a perspective view of a magnetic head, which shows a conventional testing method.
图3a为本发明的磁头的立体图。Fig. 3a is a perspective view of the magnetic head of the present invention.
图3b为MR读头的简化的局部立体图,其展示了依照本发明的一个实施例向MR读头施加不同方向的磁场。Figure 3b is a simplified partial perspective view of an MR read head illustrating the application of magnetic fields in different directions to the MR read head in accordance with one embodiment of the present invention.
图4a依照本发明的第一实施例,展示了磁头的ABS平行于水平面,其施加的第二磁场与ABS成一锐角。Fig. 4a shows that the ABS of the magnetic head is parallel to the horizontal plane and the applied second magnetic field forms an acute angle with the ABS according to the first embodiment of the present invention.
图4b依照本发明的第二实施例,展示了磁头的ABS平行于水平面,其施加的第二磁场与ABS成一锐角。Fig. 4b shows that the ABS of the magnetic head is parallel to the horizontal plane, and the second magnetic field applied thereto forms an acute angle with the ABS, according to the second embodiment of the present invention.
图5a为图4a所示的磁头的MR读头的截面图。Fig. 5a is a cross-sectional view of the MR read head of the magnetic head shown in Fig. 4a.
图5b为图4b所示的磁头的MR读头的截面图。Fig. 5b is a cross-sectional view of the MR read head of the magnetic head shown in Fig. 4b.
图6为本发明测试磁头耐高温性能的方法的一个实施例的流程图。FIG. 6 is a flowchart of an embodiment of the method for testing the high temperature resistance performance of the magnetic head according to the present invention.
图7a~7c为第一个实际例子的测试曲线图,其分别展示了MR读头在第一方向和-9°、+9°的第二方向的磁场下的不同输出电压曲线。7a-7c are test curves of the first practical example, which respectively show different output voltage curves of the MR read head in the first direction and the magnetic field in the second direction of -9° and +9°.
图8a~8c为第二个实际例子的测试曲线图,其分别展示了MR读头在第一方向和-9°、+9°的第二方向的磁场下的不同输出电压曲线。8a-8c are test curves of the second practical example, which respectively show the different output voltage curves of the MR read head in the first direction and the magnetic field in the second direction of -9° and +9°.
图9展示了本发明的测试磁头耐高温性能的装置的一个实施例。FIG. 9 shows an embodiment of the device for testing the high temperature resistance performance of the magnetic head of the present invention.
图10展示了本发明的测试磁头性能的方法的一个实施例的流程图。FIG. 10 shows a flowchart of an embodiment of the method for testing the performance of the magnetic head of the present invention.
图11展示了本发明的测试磁头性能的装置的一个实施例。FIG. 11 shows an embodiment of the device for testing the performance of the magnetic head of the present invention.
具体实施方式 detailed description
下面将参考附图阐述本发明几个不同的最佳实施例,其中不同图中相同的标号代表相同的部件。如上所述,本发明的实质在于提供一种测试磁头耐高温性能的方法,其以与ABS成角度地穿过ABS的方向向磁头施加磁场,该角度的绝对值为锐角,从而筛选出在高温环境下使用时出现不良性能的缺陷磁头。Several different preferred embodiments of the present invention will now be described with reference to the accompanying drawings, wherein like reference numerals in different drawings represent like parts. As mentioned above, the essence of the present invention is to provide a method for testing the high temperature performance of the magnetic head, which applies a magnetic field to the magnetic head in a direction passing through the ABS at an angle to the ABS, and the absolute value of the angle is an acute angle, thereby screening out the magnetic field at high temperature. A defective magnetic head that exhibits poor performance when used in the environment.
传统的用于磁头滑块的磁头一般包括用于从磁盘读取数据的读头以及向磁盘写入数据的写头。读头通常由一个MR读头构成,例如有电流垂直平面型(CPP)、电流在平面内型(CIP)、TMR、GMR或AMR等读头。为便于理解,本发明只着重描述CPP-TMR读头。显然,本领域技术人员在阅读本说明书后,能够理解本发明在应用于其他读头的情况。A conventional magnetic head for a magnetic head slider generally includes a read head for reading data from a magnetic disk and a write head for writing data to the magnetic disk. The read head is usually constituted by an MR read head, for example, there are current vertical planar (CPP), current in-plane (CIP), TMR, GMR or AMR read heads. For ease of understanding, the present invention only focuses on describing the CPP-TMR read head. Apparently, those skilled in the art can understand the application of the present invention to other read heads after reading this description.
图3a展示了一个磁头200,其包括衬底体201、相对的ABS 202和底面204(如图4a所示)、以及相对的前边203和尾边(图未示)。该ABS 202被加工至合适的飞行高度。在前边203上设有MR读头210和写头220,具体地,如图3b所示,该MR读头210包括形成在一衬底(图未示)之上的第一屏蔽层211、第二屏蔽层212,以及层夹该第一、第二屏蔽层211、212之间的MR元件230。其中,在MR元件230的两侧设置有一对硬磁层240,该硬磁层240同样层夹于该第一、第二屏蔽层211、212之间。Figure 3a shows a magnetic head 200 comprising a substrate body 201, opposing ABS 202 and bottom surface 204 (shown in Figure 4a), and opposing leading edge 203 and trailing edge (not shown). The ABS 202 is machined to a suitable flying height. An MR read head 210 and a write head 220 are provided on the front side 203. Specifically, as shown in FIG. 3b, the MR read head 210 includes a first shielding layer 211, a second Two shielding layers 212 , and an MR element 230 sandwiched between the first and second shielding layers 211 and 212 . Wherein, a pair of hard magnetic layers 240 are disposed on both sides of the MR element 230 , and the hard magnetic layers 240 are also sandwiched between the first and second shielding layers 211 and 212 .
向MR读头210施加具有第一方向291的第一磁场,该第一方向291垂直于ABS 202,即第一磁场以与ABS 202成90°地穿过ABS 202,该第一方向291被称为“横向”。在本发明的构思下,可向MR读头201施加具有第二方向292的第二磁场,以测试MR读头210的性能和特性,该第二方向292穿过ABS 202,并与该ABS 202成一角度,该角度的绝对值为锐角。Applying a first magnetic field to the MR read head 210 has a first direction 291 perpendicular to the ABS 202, i.e. the first magnetic field passes through the ABS 202 at 90° to the ABS 202, the first direction 291 is called for "horizontal". Under the concept of the present invention, a second magnetic field with a second direction 292 can be applied to the MR read head 201 to test the performance and characteristics of the MR read head 210, the second direction 292 passes through the ABS 202 and is in contact with the ABS 202 form an angle whose absolute value is an acute angle.
特定地,该第二方向292包括两种情况:其一,第二方向292与ABS 202成一正角地倾斜;其二,第二方向292与ABS 202成一负角地倾斜,其中该正角和负角以象限来定义。具体地,该正角和负角的绝对值为锐角。Specifically, the second direction 292 includes two cases: one, the second direction 292 is inclined at a positive angle to the ABS 202; second, the second direction 292 is inclined at a negative angle to the ABS 202, wherein the positive angle and the negative angle Defined by quadrants. Specifically, the absolute value of the positive angle and the negative angle is an acute angle.
为更好地理解第二方向292,图4a和图4b分别展示了本发明的两个实施例,磁头200被设置为ABS 202平行于水平面,而施加的第二磁场与ABS 202成锐角地穿过ABS 202。其中,图4a展示了一个正角,图4b展示了一个负角。图5a和图5b分别为图4a和图4b的磁头的MR读头的横截面。如图5a~5b所示,其分别展示了一个正角α,一个负角β。For a better understanding of the second direction 292, Fig. 4a and Fig. 4b show two embodiments of the present invention respectively, the magnetic head 200 is set so that the ABS 202 is parallel to the horizontal plane, and the applied second magnetic field passes through the ABS 202 at an acute angle. Pass ABS 202. Among them, Figure 4a shows a positive angle, and Figure 4b shows a negative angle. Figures 5a and 5b are cross-sections of the MR read head of the magnetic head of Figures 4a and 4b, respectively. As shown in Figures 5a-5b, they respectively show a positive angle α and a negative angle β.
图6为本发明测试磁头耐高温性能的方法的一个实施例的流程图。该方法包括以下步骤:FIG. 6 is a flowchart of an embodiment of the method for testing the high temperature resistance performance of the magnetic head according to the present invention. The method includes the following steps:
步骤(601),以垂直于ABS的第一方向向磁头施加多个不同强度的第一磁场,并测量第一输出参数曲线;Step (601), applying a plurality of first magnetic fields of different intensities to the magnetic head in a first direction perpendicular to the ABS, and measuring a first output parameter curve;
步骤(602),以第二方向向磁头施加多个不同强度的第二磁场,并测量第二输出参数曲线,该第二方向与ABS成一角度地穿过ABS,该角度的绝对值为锐角;以及Step (602), applying a plurality of second magnetic fields of different intensities to the magnetic head in a second direction, and measuring a second output parameter curve, the second direction passes through the ABS at an angle to the ABS, and the absolute value of the angle is an acute angle; as well as
步骤(603),判断第一输出参数曲线和第二输出参数曲线中是否存在超出容许值的变化,从而筛选出不良磁头。Step (603), judging whether there is a change exceeding the allowable value in the first output parameter curve and the second output parameter curve, so as to screen out bad magnetic heads.
如上所述,执行步骤(602)的其中一种方式是控制该磁头使得ABS与水平面平行,继而以与ABS成一角度地穿过ABS施加第二磁场。亦即,该磁头与水平面平行,而第二磁场则相对于一垂线倾斜。As mentioned above, one way of performing step (602) is to control the head so that the ABS is parallel to the horizontal plane, and then apply a second magnetic field across the ABS at an angle to the ABS. That is, the magnetic head is parallel to the horizontal plane, and the second magnetic field is inclined relative to a vertical line.
执行步骤(602)的另一种方式是控制磁头使得ABS与水平面成一角度,该角度的绝对值为锐角,继而向磁头施加第二磁场,此时第二磁场以垂直于水平面的方向施加。亦即,该磁头相对水平面倾斜。Another way to perform step (602) is to control the magnetic head so that the ABS forms an angle with the horizontal plane, the absolute value of the angle is an acute angle, and then apply a second magnetic field to the magnetic head. At this time, the second magnetic field is applied in a direction perpendicular to the horizontal plane. That is, the magnetic head is inclined relative to the horizontal plane.
较佳地,该角度的范围为-20°~20°,其中0°除外。在本发明中,选取的较佳角度为-10,-9,-8,...-1,1,2,3,...10度。用于测试的倾斜角的数量按照实际需求可以是一个或多个,为保证测试精确度,至少选取两个角度来进行测试。Preferably, the angle ranges from -20° to 20°, except 0°. In the present invention, the preferred angles selected are -10, -9, -8, ... -1, 1, 2, 3, ... 10 degrees. The number of inclination angles used for testing may be one or more according to actual requirements. To ensure testing accuracy, at least two angles are selected for testing.
特定地,本发明中使用输出电压作为输出参数,当然在本发明的构思下,其他输出参数,如电阻、信噪比等也可使用。Specifically, the present invention uses the output voltage as the output parameter, of course, under the concept of the present invention, other output parameters, such as resistance, signal-to-noise ratio, etc., can also be used.
具体地,在步骤(603)中,若呈现在曲线上的变化在容许值的范围之外,则该被测的磁头被判定为在高温环境下显现不佳性能(如产生大量的噪声)的不良磁头,从而被舍弃;否则为合格品。作为一种表现形式,巨大的变化呈现出一个跃变率大于8%的最大跃变。换句话说,若输出曲线的最大跃变的跃变率大于8%,则该被测磁头为不良品。直观地,该不良品会在输出曲线上呈现剧烈的抖动。Specifically, in step (603), if the variation presented on the curve is outside the range of the allowable value, then the tested magnetic head is judged as showing poor performance (such as generating a large amount of noise) under high temperature environment Bad magnetic heads are discarded; otherwise, it is a qualified product. As a manifestation, large changes exhibit a maximum jump with a jump rate greater than 8%. In other words, if the maximum transition rate of the output curve is greater than 8%, the tested magnetic head is a defective product. Intuitively, the defective product will show severe jitter on the output curve.
较佳地,第一方向和第二方向均可穿入ABS和/或从ABS中穿出,而第一磁场和第二磁场的强度的范围为-800Oe~800Oe。Preferably, both the first direction and the second direction can penetrate into the ABS and/or pass out from the ABS, and the strengths of the first magnetic field and the second magnetic field range from -800Oe to 800Oe.
可选地,必要时,可向磁头以平行于屏蔽层并与ABS成0°角的方向施加第三磁场,以测量磁头的输出特性。Optionally, if necessary, a third magnetic field may be applied to the magnetic head in a direction parallel to the shield layer and at an angle of 0° to the ABS to measure the output characteristics of the magnetic head.
图7a~7c为采用本发明的方法对第一个实际例子进行测试的曲线图,其分别展示了MR读头在不同方向的磁场作用下的输出电压曲线。在该实施例中,在每一种施加磁场的情况下,磁化操作和测量输出电压的操作均进行两次。图7a~7c依次展示了三种不同磁场的测试曲线:以垂直于ABS的第一方向施加第一磁场;以与ABS成-9°地穿过ABS的第二方向施加第二磁场;以及以与ABS成+9°地穿过ABS的第二方向施加第二磁场。7a-7c are graphs of the first practical example tested by the method of the present invention, which respectively show the output voltage curves of the MR read head under the action of magnetic fields in different directions. In this embodiment, the magnetization operation and the operation of measuring the output voltage are performed twice for each application of the magnetic field. Figures 7a to 7c show the test curves of three different magnetic fields in sequence: the first magnetic field is applied in a first direction perpendicular to the ABS; the second magnetic field is applied in a second direction passing through the ABS at -9° with the ABS; and A second magnetic field is applied in a second direction across the ABS at +9° to the ABS.
第一磁场和第二磁场的强度的范围为-800Oe~800Oe。具体地,以垂直于ABS202的第一方向291向磁头210施加-800Oe~800Oe范围内的第一磁场,测量出第一输出电压曲线C1。具体地,该操作被循环两次,因此每一次测试的每一曲线图中都有两条曲线。The strengths of the first magnetic field and the second magnetic field range from -800Oe to 800Oe. Specifically, a first magnetic field in the range of -800Oe˜800Oe is applied to the magnetic head 210 in the first direction 291 perpendicular to the ABS 202 , and the first output voltage curve C1 is measured. Specifically, the operation is looped twice, so there are two curves in each graph for each test.
具体地,对于第二输出电压曲线,控制第二磁场和ABS之间的倾斜角为-9°,继而在此角度下施加多个在-800Oe~800Oe之间的第二磁场,从而测出第二输出电压曲线C2。类似地,在+9°的角度下测出第二输出电压曲线C3。Specifically, for the second output voltage curve, the inclination angle between the second magnetic field and the ABS is controlled to be -9°, and then multiple second magnetic fields between -800Oe and 800Oe are applied at this angle, so as to measure the first Two output voltage curve C2. Similarly, the second output voltage curve C3 is measured at an angle of +9°.
在上述曲线图中,横轴表示磁场强度(单位为Oe),而纵轴表示被测磁头在磁化之后的输出电压(单位为μV)。In the above graph, the horizontal axis represents the magnetic field intensity (unit: Oe), and the vertical axis represents the output voltage (unit: μV) of the measured magnetic head after magnetization.
在输出电压曲线C1~C3中可见,在C3中出现较大的跃变,其倾斜角为+9°。其中,C3中出现的最大跃变,经计算得知其跃变率为16.250%,远远大于容许值8%。因此,依此可判定该被测磁头为不良磁头,该不良磁头在高温环境下使用时会产生大量的噪声。It can be seen in the output voltage curves C1-C3 that a large jump occurs in C3, and its inclination angle is +9°. Among them, the maximum jump rate in C3 is calculated to be 16.250%, far greater than the allowable value of 8%. Therefore, based on this, it can be determined that the tested magnetic head is a bad magnetic head, and the bad magnetic head will generate a lot of noise when used in a high temperature environment.
图8a~8c为采用本发明的方法对第二个实际例子进行测试的曲线图,其分别展示了MR读头在不同方向的磁场作用下的输出电压曲线。同样地,图8a~8c依次展示了三种不同磁场的测试曲线:以垂直于ABS的第一方向施加第一磁场;以与ABS成-9°地穿过ABS的第二方向施加第二磁场;以及以与ABS成+9°地穿过ABS的第二方向施加第二磁场。8a-8c are graphs of the second practical example tested by the method of the present invention, which respectively show the output voltage curves of the MR read head under the action of magnetic fields in different directions. Similarly, Figures 8a to 8c show the test curves of three different magnetic fields in sequence: the first magnetic field is applied in the first direction perpendicular to the ABS; the second magnetic field is applied in the second direction passing through the ABS at -9° to the ABS ; and applying a second magnetic field in a second direction across the ABS at +9° to the ABS.
在本实施例中,在输出电压曲线C5和C6中出现较大的抖动,其倾斜角分别是-9°和+9°。具体地,C6中出现最大跃变,经计算得知其跃变率为18.281%,远远大于容许值8%。因此,依此可判定该被测磁头同样为不良磁头,其在高温环境下使用时会产生大量的噪声。In this embodiment, large jitters appear in the output voltage curves C5 and C6, whose inclination angles are -9° and +9°, respectively. Specifically, the largest jump occurs in C6, and its jump rate is calculated to be 18.281%, which is far greater than the allowable value of 8%. Therefore, based on this, it can be determined that the tested magnetic head is also a bad magnetic head, which will generate a lot of noise when used in a high temperature environment.
发明人采用本发明的测试方法对大量磁头采样进行过测试,发现本发明的测试方法的测试精度良好。在本发明中,仅仅列举两个典型的实施例。The inventor has tested a large number of magnetic head samples by using the testing method of the present invention, and found that the testing accuracy of the testing method of the present invention is good. In the present invention, only two typical embodiments are listed.
与现有技术相比,本发明向磁头以与ABS成一定角度地穿过ABS的方向施加第二磁场,该角度的绝对值为锐角,从而测量磁头的输出,多次重复此种磁化操作和测量操作,最终在多个输出曲线中筛选出不良磁头。本发明能够在不对磁头加热的情况下,在室温下则可检测出在高温环境下潜在产生大量噪声的不良磁头。因此相较现有技术,本发明的测试方法得以改善。再且,本发明能够检测出采用一般磁化的传统方法无法完全检测的不良磁头,检测精度可靠。Compared with the prior art, the present invention applies a second magnetic field to the magnetic head in a direction passing through the ABS at an angle with the ABS, the absolute value of which is an acute angle, thereby measuring the output of the magnetic head, repeating this magnetizing operation and Measurement operation, finally screen out bad heads among multiple output curves. The invention can detect bad magnetic heads that potentially generate a lot of noise in a high-temperature environment without heating the magnetic heads at room temperature. Therefore, compared with the prior art, the testing method of the present invention is improved. Moreover, the present invention can detect defective magnetic heads that cannot be completely detected by the traditional method of general magnetization, and the detection accuracy is reliable.
需要注意的是,上述实施例的第一方向和第二方向均穿入ABS,但并不限于此。在本发明的构思下,第一方向和第二方向也可从ABS穿出。It should be noted that both the first direction and the second direction in the above embodiment penetrate into the ABS, but it is not limited thereto. Under the concept of the present invention, the first direction and the second direction can also pass through the ABS.
相应地,图9展示了本发明测试磁头耐高温性能的装置的一个实施例。如图所示,该装置900包括第一磁场施加单元901,其用于以垂直于ABS的第一方向向磁头施加多个不同强度的第一磁场;第一测量单元902,其用于根据第一磁场测量第一输出参数曲线;第二磁场施加单元903,其用于以第二方向向磁头施加不同强度的第二磁场,该第二方向以与ABS成一角度地穿过ABS,该角度的绝对值为锐角;第二测量单元904,其用于根据第二磁场测量第二输出参数曲线;以及判断单元905,其用于判断第一输出参数曲线和第二输出参数曲线中是否存在超出容许值的变化,从而筛选出不良磁头。Correspondingly, FIG. 9 shows an embodiment of the device for testing the high temperature resistance performance of the magnetic head according to the present invention. As shown in the figure, the device 900 includes a first magnetic field applying unit 901, which is used to apply a plurality of first magnetic fields of different strengths to the magnetic head in a first direction perpendicular to the ABS; a first measuring unit 902, which is used for according to the first A magnetic field measures the first output parameter curve; the second magnetic field applying unit 903 is used to apply a second magnetic field of different strengths to the magnetic head in a second direction, and the second direction passes through the ABS at an angle with the ABS, and the angle of the The absolute value is an acute angle; the second measurement unit 904 is used to measure the second output parameter curve according to the second magnetic field; and the judging unit 905 is used to judge whether there is an exceeding tolerance in the first output parameter curve and the second output parameter curve The value changes to filter out bad heads.
具体地,该装置900进一步包括第一控制单元(图未示),用于控制磁头,使得ABS平行于水平面。Specifically, the device 900 further includes a first control unit (not shown in the figure), configured to control the magnetic head so that the ABS is parallel to the horizontal plane.
可选地,该装置900还包括第二控制单元(图未示),用于控制磁头,使得ABS与水平面成一角度,该角度的绝对值为锐角。Optionally, the device 900 further includes a second control unit (not shown in the figure), configured to control the magnetic head so that the ABS forms an angle with the horizontal plane, and the absolute value of the angle is an acute angle.
可选地,在磁头的多种准静态测试(Quasi-Static Test,QST)中,该装置900可包括第三磁场施加单元,其用于以第三方向向磁头施加第三磁场,该第三方向平行于屏蔽层并与ABS成0°角。Optionally, in various quasi-static tests (Quasi-Static Test, QST) of the magnetic head, the device 900 may include a third magnetic field applying unit for applying a third magnetic field to the magnetic head in a third direction, the third Oriented parallel to the shield and at an angle of 0° to the ABS.
该执行上述的测试方法的装置900,能够高精度筛选出在高温环境下使用出现较差性能的不良磁头。该装置900包括与上述测试方法对应的技术特征,并可获得在上述测试方法中所描述的所有优点。The device 900 for executing the above-mentioned testing method can screen out defective magnetic heads with poor performance when used in a high-temperature environment with high precision. The device 900 includes technical features corresponding to the above test method, and can obtain all the advantages described in the above test method.
图10展示了本发明测试磁头性能的一个实施例的流程图,其至少包括以下步骤:Fig. 10 has shown the flow chart of an embodiment of the present invention's test magnetic head performance, and it at least comprises the following steps:
步骤(1001),以第二方向向磁头施加第二磁场,并测量磁头的输出参数,该第二方向与ABS成一角度地穿过ABS,该角度的绝对值为锐角;Step (1001), applying a second magnetic field to the magnetic head in a second direction, and measuring the output parameters of the magnetic head, the second direction passes through the ABS at an angle to the ABS, and the absolute value of the angle is an acute angle;
步骤(1002),根据第二磁场测量磁头的输出参数;以及Step (1002), measuring the output parameters of the magnetic head according to the second magnetic field; and
步骤(1003),重复施加不同强度的第二磁场,并测量多次输出参数。Step (1003), repeatedly applying a second magnetic field with different strengths, and measuring output parameters for multiple times.
在本发明的构思下,执行步骤(1001)的其中一种方式是控制该磁头使得ABS与水平面平行,继而以与ABS成一角度地穿过ABS施加第二磁场。亦即,该磁头与水平面平行,而第二磁场则相对于一垂线倾斜。Under the conception of the present invention, one way of performing step (1001) is to control the magnetic head so that the ABS is parallel to the horizontal plane, and then apply a second magnetic field across the ABS at an angle to the ABS. That is, the magnetic head is parallel to the horizontal plane, and the second magnetic field is inclined relative to a vertical line.
执行步骤(1001)的另一种方式是控制磁头使得ABS与水平面成一角度,该角度的绝对值为锐角,继而向磁头施加第二磁场,此时,第二磁场以垂直于水平面的方向施加。亦即,该磁头相对水平面倾斜。Another way of performing step (1001) is to control the magnetic head so that the ABS forms an angle with the horizontal plane, the absolute value of the angle is an acute angle, and then apply a second magnetic field to the magnetic head. At this time, the second magnetic field is applied in a direction perpendicular to the horizontal plane. That is, the magnetic head is inclined relative to the horizontal plane.
必要时,在QST中,可以垂直于ABS的第一方向向磁头施加第一磁场,或以平行于屏蔽层并与ABS成0°角的第三方向施加第三磁场,从而测试磁头的输出特性。If necessary, in QST, a first magnetic field can be applied to the head in a first direction perpendicular to the ABS, or a third magnetic field can be applied in a third direction parallel to the shield layer and at an angle of 0° to the ABS, thereby testing the output characteristics of the head .
特定地,本发明中使用输出电压作为输出参数,当然在本发明的构思下,其他输出参数,如电阻、信噪比等也可使用。Specifically, the present invention uses the output voltage as the output parameter, of course, under the concept of the present invention, other output parameters, such as resistance, signal-to-noise ratio, etc., can also be used.
具体地,在步骤(603)中,若呈现在曲线上的变化在容许值的范围之外,则该被测的磁头被判定为在高温环境下显现不佳性能(如产生大量的噪声)的不良磁头,从而被舍弃;否则为合格品。作为一种表现形式,巨大的变化呈现出一个跃变率大于8%的最大跃变。换句话说,若输出曲线的最大跃变的跃变率大于8%,则该被测磁头为不良品。直观地,该不良品会在输出曲线上呈现剧烈的抖动。Specifically, in step (603), if the variation presented on the curve is outside the range of the allowable value, then the tested magnetic head is judged as showing poor performance (such as generating a large amount of noise) under high temperature environment Bad magnetic heads are discarded; otherwise, it is a qualified product. As a manifestation, large changes exhibit a maximum jump with a jump rate greater than 8%. In other words, if the maximum transition rate of the output curve is greater than 8%, the tested magnetic head is a defective product. Intuitively, the defective product will show severe jitter on the output curve.
较佳地,第一方向和第二方向均可穿入ABS和/或从ABS中穿出,而第一磁场和第二磁场的强度的范围为-800Oe~800Oe。Preferably, both the first direction and the second direction can penetrate into the ABS and/or pass out from the ABS, and the strengths of the first magnetic field and the second magnetic field range from -800Oe to 800Oe.
可选地,必要时,可向磁头以平行于屏蔽层并与ABS成0°角的方向施加第三磁场,以测量磁头的输出特性。Optionally, if necessary, a third magnetic field may be applied to the magnetic head in a direction parallel to the shield layer and at an angle of 0° to the ABS to measure the output characteristics of the magnetic head.
类似地,如上所示,依照实际测试,该第二方向可穿入ABS或从ABS穿出。对本领域的技术人员来说,按照上述的方法实施例描述,本实施例的方法可包括上述方法实施例的所有技术特征并可获得同样的优点,因此在此省略描述。Similarly, as indicated above, the second direction can pass into or out of the ABS according to actual testing. For those skilled in the art, according to the description of the above method embodiments, the method of this embodiment may include all the technical features of the above method embodiments and obtain the same advantages, so the description is omitted here.
相应地,图11展示了本发明测试磁头性能的装置的一个实施例。如图所示,该装置1100包括第二磁场施加单元1102,其用于以第二方向向磁头施加不同强度的第二磁场,该第二方向与ABS成一角度地穿过ABS,该角度的绝对值为锐角;以及测量单元1103,其用于根据第二磁场测量磁头的输出参数,从而测试磁头的性能。Correspondingly, FIG. 11 shows an embodiment of the device for testing the performance of the magnetic head of the present invention. As shown in the figure, the device 1100 includes a second magnetic field applying unit 1102, which is used to apply a second magnetic field of different strengths to the magnetic head in a second direction, the second direction passes through the ABS at an angle to the ABS, and the absolute value of the angle The value is an acute angle; and a measurement unit 1103, which is used to measure the output parameters of the magnetic head according to the second magnetic field, so as to test the performance of the magnetic head.
具体地,该装置1100进一步包括第一控制单元(图未示),其用于控制磁头,使得ABS平行于水平面。Specifically, the device 1100 further includes a first control unit (not shown in the figure), which is used to control the magnetic head so that the ABS is parallel to the horizontal plane.
可选地,该装置1100进一步包括第二控制单元(图未示),其用于控制磁头,使得ABS与水平面成一角度,该角度的绝对值为锐角。Optionally, the device 1100 further includes a second control unit (not shown in the figure), which is used to control the magnetic head so that the ABS forms an angle with the horizontal plane, and the absolute value of the angle is an acute angle.
可选地,在磁头的多种QST中,该装置1100可包括第一磁场施加单元(图未示),其用于以第一方向向磁头施加第一磁场,该第一方向垂直于ABS。Optionally, in various QSTs of the magnetic head, the apparatus 1100 may include a first magnetic field applying unit (not shown in the figure), which is used for applying a first magnetic field to the magnetic head in a first direction, and the first direction is perpendicular to the ABS.
必要时,可设置第三磁场施加单元(图未示),其用于以第三方向向磁头施加第三磁场,该第三方向平行于屏蔽层并与ABS成0°角。If necessary, a third magnetic field applying unit (not shown) may be provided for applying a third magnetic field to the magnetic head in a third direction parallel to the shielding layer and at an angle of 0° to the ABS.
该执行上述的测试方法的装置1100,能够高精度筛选出在高温环境下使用出现较差性能的不良磁头。对本领域的技术人员来说,按照上述方法实施例的描述,该装置1100可包括与上述方法相对应的功能单元,并获得相同的优点,在此省略描述。The apparatus 1100 for executing the above-mentioned testing method can screen out defective magnetic heads with poor performance when used in a high-temperature environment with high precision. For those skilled in the art, according to the description of the above method embodiment, the device 1100 may include functional units corresponding to the above method and obtain the same advantages, and the description is omitted here.
以上所揭露的仅为本发明的较佳实施例而已,当然不能以此来限定本发明之权利范围,因此依本发明申请专利范围所作的等同变化,仍属本发明所涵盖的范围。The above disclosures are only preferred embodiments of the present invention, and certainly cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made according to the patent scope of the present invention still fall within the scope of the present invention.
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