CN102694081B - 发光二极管制造方法 - Google Patents
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
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- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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Abstract
一种发光二极管制造方法,包括步骤:提供基板,该基板相对两侧分别具有第一金属层及第二金属层;开设贯穿第一金属层及基板并暴露出第二金属层的凹槽;形成在基板相对两侧之间延伸的导通层,导通层与暴露在凹槽内的第二金属层电绝缘;在凹槽内固定发光芯片,使发光芯片与第二金属层热导性连接;将发光芯片电连接至第二金属层及导通层;形成覆盖发光芯片的封装层。该制造方法可提升发光二极管的散热效率,并减少制造成本。
Description
技术领域
本发明涉及一种二极管制造方法,特别是指一种发光二极管制造方法。
背景技术
发光二极管作为一种新兴的光源,目前已广泛应用于多种场合之中,并大有取代传统光源的趋势。
现有的发光二极管的制造方法通常是先在一块型材上固定多个发光芯片,然后通过封装体同时封装所有的发光芯片,最后再经由切割形成多个独立的发光二极管。
为使发光芯片能与外界保持电气连接,型材的正反两面会分别设置二金属层,发光芯片置于其中一面的金属层上并通过金线或其他方式与该面的金属层连接,另外一面的金属层则通过贯穿型材的导通层与相对的金属层连接。发光二极管发出的热量经由同一面的金属层及型材传输至另一面的金属层上。然而,现有的型材通常是由玻璃环氧化物、BT树脂(Bismaleimide Triazine Resin)等绝缘的材料制成,其导热效率低下。因此,发光芯片发出的热量难以得到及时、快速的散发,给发光二极管的正常发光带来不良影响。
发明内容
因此,有必要提供一种散热性能较佳的发光二极管的制造方法。
一种发光二极管制造方法,包括步骤:
提供基板,该基板相对两侧分别具有第一金属层及第二金属层;
形成贯穿第一金属层及基板并暴露出第二金属层的凹槽;
形成在基板的相对两侧之间延伸的导通层,该导通层与暴露在凹槽内的第二金属层电绝缘;
在凹槽内固定发光芯片,使发光芯片与第二金属层热导性连接;
将发光芯片电连接至暴露在凹槽内的第二金属层及导通层;及
形成覆盖发光芯片的封装层。
本方法制造的发光二极管由于其发光芯片与第二金属层热导性连接,二者之间省略了热阻系数相对较高的基板,因此发光芯片工作时产生的热量可经由第二金属层传递至外界,从而快速地进行散热。
下面参照附图,结合具体实施例对本发明作进一步的描述。
附图说明
图1为本发明发光二极管制造方法的第一个步骤。
图2为本发明发光二极管制造方法的第二个步骤。
图3为本发明发光二极管制造方法的第三个步骤。
图4以俯视的角度示出了图3中的制造步骤。
图5以仰视的角度示出了图3中的制造步骤。
图6示出了本发明发光二极管制造方法的第四个步骤。
图7示出了本发明发光二极管制造方法的第五个步骤。
图8示出了本发明发光二极管制造方法的第六个步骤。
图9示出了本发明发光二极管制造方法的第七个步骤。
图10示出了本发明发光二极管制造方法的第八个步骤。
图11示出了本发明发光二极管制造方法的第九个步骤。
图12示出了制造完成的发光二极管。
主要元件符号说明
10 | 基板 |
100 | 凹槽 |
102 | 穿孔 |
20 | 第一金属层 |
200 | 第一槽道 |
202 | 第二槽道 |
204 | 第三槽道 |
206 | 开孔 |
22 | 第一区域 |
220 | 第一导电层 |
222 | 第二导电层 |
24 | 第二区域 |
30 | 第二金属层 |
300 | 第四槽道 |
302 | 第五槽道 |
306 | 开孔 |
32 | 第三区域 |
34 | 第四区域 |
40 | 导通层 |
50 | 金属覆盖层 |
60 | 发光芯片 |
70 | 金线 |
80 | 封装层 |
如下具体实施方式将结合上述附图进一步说明本发明。
具体实施方式
请参阅图1-12,示出了制造本发明发光二极管的方法,其主要包括如下步骤:
首先,如图1所示提供一基板10。该基板10呈一平坦的矩形,其可由环氧树脂、玻璃环氧化物、BT树脂(Bismaleimide Triazine Resin)、陶瓷等绝缘材料制成。
然后,如图2所示在基板10的上下表面分别形成一第一金属层20及一第二金属层30。该第一金属层20及第二金属层30分别完全覆盖基板10的上表面及下表面。该第一金属层20及第二金属层30可通过粘结、蒸镀、溅镀等方式结合至基板10上,本实施中优选为粘结。该第一金属层20与第二金属层30可由导热性较佳的金属材料制成,如铜、银、铝、金等。
随后,如图3-5所示蚀刻第一金属层20及第二金属层30。第一金属层20被蚀刻而形成若干第一区域22及第二区域24,其中每一第二区域24与二相邻的第一区域22之间通过一第一槽道200及一第二槽道202隔开。同时,每一第一区域22经由蚀刻还形成有一第三槽道204,每一第二区域24经由蚀刻还形成有多个间隔设置的开孔206。每一第一区域22被第三槽道204分割为一第一导电部220及一第二导电部222。第一槽道200、第二槽道202及第三槽道204均呈矩形的纵长结构,且均从基板10的一侧面延伸至基板10的相对另一侧面。这些第一槽道200、第二槽道202、第三槽道204及开孔206均贯穿第一金属层20以暴露出基板10的上表面。第二金属层30被蚀刻而形成若干第三区域32及第四区域34,其中每一第四区域34与相邻的二第三区域32通过一第四槽道300及一第五槽道302隔开。每一第三区域32对应一第一区域22,每一第四区域34对应一第二区域24。每一第四区域34还同时形成有多个间隔设置的开孔306,其中这些第二金属层30的开孔306与第一金属层20的开孔206一一对应。这些第四槽道300及第五槽道302也均呈矩形,并从基板10的一侧面延伸至基板10的相对另一侧面。每一第四槽道300与相应的第一槽道200正对,每一第五槽道302与相应的第二槽道202正对。这些第四槽道300、第五槽道302及开孔306均贯穿第二金属层30以暴露出基板10的底面。
之后,如图6所示在暴露于各第三槽道204内的基板10顶面上形成若干凹陷(图未标)。每一凹陷与相应的第三槽道204连通而共同形成一凹槽100。每一凹槽100呈上宽下窄的截锥形,其贯穿基板10并暴露出第二金属层30的第三区域32的顶面。同时,基板10内还形成有贯穿各第二区域24及与第二区域24正对的第四区域34的多个穿孔102。每一穿孔102均与第一金属层20及第二金属层30正对的二开孔206、306连通,并与各槽道200、202、204、300、302隔开。这些凹陷及穿孔102可通过机械钻孔、蚀刻以及激光照射等方式形成。
然后,在如图7所示在各穿孔102内填充导电材料而形成导通层40。每一导通层40均连接相邻的第二区域24及第四区域34,从而导通第二区域24及第四区域34。导通层40的顶面与第二区域24的顶面齐平,导通层40的底面与第四区域34的底面齐平。该导通层40可由金属通过电镀的方式镀设填充在穿孔102内,或者由导电胶通过喷注的方式填充在穿孔102内。
然后,如图8所示在除暴露在第一槽道200及第二槽道202内的基板10顶面及暴露在第四槽道300及第五槽道302内的基板10底面之外的位置处形成一金属覆盖层50。该金属覆盖层50覆盖住第一区域32、第二区域34及导通层40的顶部并覆盖住凹槽100的内侧壁面及底面,同时还覆盖住第三区域32及第四区域34及导通层40的底部。金属覆盖层50连通第一金属层20的第一区域22及第二金属层30的第三区域32而共同形成一第一引脚,金属覆盖层50还连通第一金属层20的第二区域24及第二金属层30的第四区域34而共同形成一第二引脚。由于金属覆盖层50在第一槽道200及第四槽道300处断开,因此第一引脚与第二引脚可保持电绝缘,从而防止相互短接的情况出现。该金属覆盖层50可为铝、铜、银等材料制成,其可通过电镀或化学镀的方式形成在相应的位置处。优选地,为提升凹槽100内的光利用率,金属覆盖层50可采用反射率较高的银作为其材料。此外,为进一步提升金属覆盖层50与第一金属层20及第二金属层30的接合力,金属覆盖层50与相应的第一金属层20及第二金属层30之间还可设置一接合层(图未示)。该接合层的材质优选为镍,以达到与第一金属层20及第二金属层30紧密接合的效果。
随后,如图9所示在各凹槽100底部固定一发光芯片60并对发光芯片60进行打线。该发光芯片60可以为氮化镓、氮化铟镓、氮化铝铟镓、磷化砷等半导体发光材料制成,其可在电流的激发下辐射出特定的光谱。发光芯片60可通过银胶或其他类型的导热胶(图未示)固定在凹槽100底部的金属覆盖层50上,或者通过共晶的方式与金属覆盖层50结合。发光芯片60的高度优选大于凹槽100的深度,以避免被凹槽100的内侧壁面所阻挡,从而输出照射范围较大的光场。本实施例中发光芯片60为一横向结构,其电极(图未示)位于同侧位置,因此发光芯片60的二电极分别通过二金线70连接至第一导电部220及第二区域24。可以理解地,发光芯片30还可以为二电极位于相反两侧的垂直结构,其位于底部的电极可直接与凹槽100底部的金属覆盖层50接合,顶部的电极则通过一金线70连接至第二区域24。相比横向结构的发光芯片60,垂直结构的发光芯片60可减少一根金线70,从而降低在后续封装过程中损坏金线70的几率,从而提升产品良率。另外,由于导通层40的结构强度相对较低,为防止导通层40承受过大压力而出现凹陷,打线的位置应当避开导通层40,优选在第二区域24靠近第一槽道200的位置处。
之后,如图10所示形成覆盖住各发光芯片60的封装层80。该封装层80填满凹槽100并完全覆盖住发光芯片60及金线70。封装层80还填充第一槽道200及第二槽道202,以加强与基板10之间的接合力。该封装层80的材料包括但不限于环氧树脂、硅胶、聚碳酸酯等透光性优良的材料。封装层80内还可进一步掺杂荧光粉(图未示),以改变发光芯片60的颜色。荧光粉的材料可选自硅酸盐、氮化物、氮氧化物、石榴石等荧光材料,具体取决于实际的颜色要求。
最后,如图11所示,沿各第五槽道302切割基板10,使之分割为如图12所示的多个独立的发光二极管。
由于发光芯片60是直接通过金属覆盖层50固定于第二金属层30上,因此其工作时所发出的热量可快速地经由金属覆盖层50及第二金属层30传输至外界环境当中,从而确保发光二极管的正常运作。并且,由于并未在基板10上形成尺寸较大的开缝,因此本方法对于基板10的板材利用率较高,不会造成浪费。另外,本发明的制造方法制程相对简单,可减少制造工序,节省制造成本。
Claims (8)
1.一种发光二极管制造方法,包括步骤:
提供基板,该基板相对两侧分别具有第一金属层及第二金属层;
蚀刻第一金属层及第二金属层,其中第一金属层被蚀刻形成间隔断开的第一区域及第二区域,每一第二区域与相邻的第一区域之间通过一第一、第二槽道隔开,第二金属层被蚀刻形成间隔断开的第三区域及第四区域,每一第四区域与相邻的二第三区域通过一第四、第五槽道隔开,第一区域与第三区域相对,第二区域与第四区域相对;
开设贯穿第一金属层及基板并暴露出第二金属层的凹槽;
形成在基板相对两侧之间延伸的导通层,导通层与暴露在凹槽内的第二金属层电绝缘;
形成一金属覆盖层,该金属覆盖层覆盖住第一区域、第二区域及导通层的顶部并覆盖住凹槽的内侧壁及底面,同时覆盖住第三区域及第四区域及导通层的底部,所述金属覆盖层连通第一金属层的第一区域及第二金属层的第三区域而共同形成一第一引脚,金属覆盖层连通第一金属层的第二区域及第二金属层的第四区域而共同形成一第二引脚,金属覆盖层在第一槽道及第四槽道处断开;
在凹槽内固定发光芯片,使发光芯片与第二金属层热导性连接;
将发光芯片电连接至暴露在凹槽内的第二金属层及导通层;及形成覆盖发光芯片的封装层。
2.如权利要求1所述的发光二极管制造方法,其特征在于:凹槽开设于第一区域内,第三区域暴露在凹槽内。
3.如权利要求1所述的发光二极管制造方法,其特征在于:导通层连接第二区域及第四区域。
4.如权利要求1所述的发光二极管制造方法,其特征在于:发光芯片通过金线连接至金属覆盖层。
5.如权利要求4所述的发光二极管制造方法,其特征在于:金线固定于第二区域上的金属覆盖层并避开导通层。
6.如权利要求1所述的发光二极管制造方法,其特征在于:金属覆盖层与第一金属层以及金属覆盖层与第二金属层之间设有金属接合层。
7.如权利要求1至3任一项所述的发光二极管制造方法,其特征在于:发光芯片的高度大于凹槽的深度。
8.如权利要求1至3任一项所述的发光二极管制造方法,其特征在于:导通层是通过在基板上形成穿孔并在穿孔内填充导电材料所形成的。
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2012061183A2 (en) * | 2010-11-03 | 2012-05-10 | 3M Innovative Properties Company | Flexible led device for thermal management and method of making |
US9642566B2 (en) * | 2013-10-04 | 2017-05-09 | General Electric Company | Flexible embedded sensor arrays and methods of making the same |
CN104051603B (zh) * | 2014-03-20 | 2017-06-09 | 苏州东山精密制造股份有限公司 | 一种双面发光的led灯条的制造工艺 |
JP7072045B2 (ja) * | 2018-02-16 | 2022-05-19 | 京セラ株式会社 | 多数個取り素子収納用パッケージおよび多数個取り光半導体装置 |
US10686105B2 (en) * | 2018-06-18 | 2020-06-16 | Advanced Semiconductor Engineering, Inc. | Optical package device |
DE102018128570A1 (de) * | 2018-11-14 | 2020-05-14 | Osram Opto Semiconductors Gmbh | Verfahren zur herstellung einer vielzahl strahlungsemittierender bauelemente, strahlungsemittierendes bauelement, verfahren zur herstellung eines verbindungsträgers und verbindungsträger |
US12002898B2 (en) * | 2020-06-22 | 2024-06-04 | Stmicroelectronics Pte Ltd | Embedded wafer level optical sensor packaging |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1967888A (zh) * | 2005-11-02 | 2007-05-23 | 株式会社托里昂 | 发光二极管安装基板 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2589629B1 (fr) * | 1985-11-05 | 1987-12-18 | Radiotechnique Compelec | Composant opto-electronique pour montage en surface et son procede de fabrication |
US6214525B1 (en) * | 1996-09-06 | 2001-04-10 | International Business Machines Corp. | Printed circuit board with circuitized cavity and methods of producing same |
US6614103B1 (en) * | 2000-09-01 | 2003-09-02 | General Electric Company | Plastic packaging of LED arrays |
US6949771B2 (en) * | 2001-04-25 | 2005-09-27 | Agilent Technologies, Inc. | Light source |
US6531328B1 (en) * | 2001-10-11 | 2003-03-11 | Solidlite Corporation | Packaging of light-emitting diode |
WO2004049462A1 (en) * | 2002-11-26 | 2004-06-10 | Stockeryale, (Irl), Limited | An illuminator and production method |
JP5128047B2 (ja) * | 2004-10-07 | 2013-01-23 | Towa株式会社 | 光デバイス及び光デバイスの生産方法 |
TWI239670B (en) * | 2004-12-29 | 2005-09-11 | Ind Tech Res Inst | Package structure of light emitting diode and its manufacture method |
US7411225B2 (en) * | 2005-03-21 | 2008-08-12 | Lg Electronics Inc. | Light source apparatus |
US7719099B2 (en) * | 2005-10-21 | 2010-05-18 | Advanced Optoelectronic Technology Inc. | Package structure for solid-state lighting devices and method of fabricating the same |
KR100782798B1 (ko) * | 2006-02-22 | 2007-12-05 | 삼성전기주식회사 | 기판 패키지 및 그 제조 방법 |
TWI302758B (en) * | 2006-04-21 | 2008-11-01 | Silicon Base Dev Inc | Package base structure of photo diode and manufacturing method of the same |
KR100854328B1 (ko) * | 2006-07-07 | 2008-08-28 | 엘지전자 주식회사 | 발광 소자 패키지 및 그 제조방법 |
TW200849638A (en) * | 2007-06-01 | 2008-12-16 | Lite On Technology Corp | Light emitting diode package |
US7791096B2 (en) * | 2007-06-08 | 2010-09-07 | Koninklijke Philips Electronics N.V. | Mount for a semiconductor light emitting device |
TWI355050B (en) * | 2007-06-22 | 2011-12-21 | Light Ocean Technology Corp | Thin double-sided package substrate and manufactur |
JP2009021426A (ja) * | 2007-07-12 | 2009-01-29 | Sharp Corp | チップ部品型led及びその製造方法 |
US7985980B2 (en) * | 2007-10-31 | 2011-07-26 | Sharp Kabushiki Kaisha | Chip-type LED and method for manufacturing the same |
KR100956888B1 (ko) * | 2008-01-24 | 2010-05-11 | 삼성전기주식회사 | 발광 다이오드 패키지 및 그 제조 방법 |
US8314438B2 (en) * | 2008-03-25 | 2012-11-20 | Bridge Semiconductor Corporation | Semiconductor chip assembly with bump/base heat spreader and cavity in bump |
KR100992778B1 (ko) * | 2008-05-23 | 2010-11-05 | 엘지이노텍 주식회사 | 발광소자 패키지 및 그 제조방법 |
JP5238366B2 (ja) * | 2008-06-09 | 2013-07-17 | スタンレー電気株式会社 | 半導体発光装置 |
TW201114003A (en) * | 2008-12-11 | 2011-04-16 | Xintec Inc | Chip package structure and method for fabricating the same |
KR101047801B1 (ko) * | 2008-12-29 | 2011-07-07 | 엘지이노텍 주식회사 | 발광 디바이스 패키지 및 그 제조방법 |
KR100939304B1 (ko) * | 2009-06-18 | 2010-01-28 | 유트로닉스주식회사 | Led어레이모듈 및 그 제조방법 |
JP2011029433A (ja) * | 2009-07-27 | 2011-02-10 | Kantatsu Co Ltd | Ledパッケージ |
JP5659519B2 (ja) * | 2009-11-19 | 2015-01-28 | 豊田合成株式会社 | 発光装置、発光装置の製造方法、発光装置の実装方法及び光源装置 |
US20110284887A1 (en) * | 2010-05-21 | 2011-11-24 | Shang-Yi Wu | Light emitting chip package and method for forming the same |
-
2011
- 2011-03-21 CN CN201110067219.XA patent/CN102694081B/zh not_active Expired - Fee Related
- 2011-03-30 TW TW100110873A patent/TWI416773B/zh not_active IP Right Cessation
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Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1967888A (zh) * | 2005-11-02 | 2007-05-23 | 株式会社托里昂 | 发光二极管安装基板 |
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