CN102636137B - REVO (Resident Encrypted Variable Output) measuring head position posture calibrating method in joint arm type coordinate measuring machine - Google Patents
REVO (Resident Encrypted Variable Output) measuring head position posture calibrating method in joint arm type coordinate measuring machine Download PDFInfo
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Abstract
The invention belongs to the field of testing technology and instrument and provides a calibrating method of a joint arm type coordinate measuring machine which can improve the measuring precision. According to the technical scheme adopted by the invention, an REVO (Resident Encrypted Variable Output) measuring head position posture calibrating method in the joint arm type coordinate measuring machine is carried out on a measuring machine device and the method comprises the following steps of: establishing a coordinate system, wherein an X axis is parallel to an x-directional movement axis of the REVO measuring head and a Z axis is parallel to a z-directional movement axis of the REVO measuring head; calibrating the parallelism depth of a B axis of the REVO measuring head and the z-directional movement axis: in order to determine a parallelism depth error on an xoy coordinate plane of the A axis of the Revo measuring head corresponding to the x-directional movement axis, vertically placing the other plane on a standard plane which is vertically placed and carrying out measurement. The REVO measuring head position posture calibrating method in the joint arm type coordinate measuring machine is mainly used for measuring.
Description
Technical field
The invention belongs to measuring technology and instrument field, specifically, relate to REVO probe location attitude scaling method in articulated arm coordinate measuring machine.
Background technology
The development of national economy and national defence is more and more higher for the accuracy requirement of product, and the shared proportion of various complex-shaped parts is increasing.These high precision complex parts long processing times, processing charges are high, and the loss that unacceptable product brings is large.In machining process, adopt suitable pick-up unit, in time detect various sizes, shape, the location parameter of workpiece, for improving machining precision, guarantee product quality, prevent or reduce waste product, significant.
Due to the impact of the factors such as processing, alignment error, there are a lot of systematic errors in coordinate measuring machine, as length, the zero point etc. of the depth of parallelism of each kinematic axis, web joint, the size of their reality and the theoretical value of design differ greatly, must be by the method for demarcating, the concrete numerical value that obtains each systematic error, then carries out correction-compensation to measurement model, just can make measuring machine have higher precision.
Articulated arm coordinate measuring machine shown in Fig. 1 is one to be exclusively used in the instrument of the online in site measurement such as blisk of engine, large gear, large-size box, this measuring machine always has 5 kinematic axiss, be x to the rotatablely moving of tangential movement, joint arm, z to vertical motion, REVO gauge head solid of revolution rotatablely move around its A axle and B axle, by the motion of these five degree of freedom, object under test is measured.Wherein, the turning axle of REVO gauge head solid of revolution in surface level is A axle, and the turning axle in vertical plane is B axle, as shown in Figure 2.Due to the existence of processing alignment error, there is parallelism error to axis of movement, B axle and z to axis of movement in A axle and x.Therefore need two parallelism errors to demarcate, measure mathematical model thereby set up.Not relevant record in prior art, thereby measurement result precision is not high.
Summary of the invention
The present invention is intended to solution and overcomes the deficiencies in the prior art, a kind of articulated arm coordinate measuring machine scaling method that can improve measuring accuracy is provided, for achieving the above object, the technical scheme that the present invention takes is, REVO probe location attitude scaling method in articulated arm coordinate measuring machine carries out in following apparatus:
Device is by being made up of to moving component, error compensation system and data processing and control computing machine, motor to moving component, x joint arm, REVO gauge head, z;
Joint arm adopts the carbon fibre that proportion is little, elastic modulus is large to make; The front end of joint arm is provided with REVO gauge head, on joint arm is sleeved on precision bearing system radially little with axially-movable error, that angle swing kinematic error is little, precision bearing system end is provided with motor, driven by motor precision bearing system and joint arm rotate, and the precision angle system that the angle turning over is fastened by axle records.
Z is made up of to slide plate, track base z to moving component, the seat of precision bearing system is fixed on z on slide plate, z forms linear motion guide rail pair to the precise guide rail on two slide blocks and guide's z rail chair on slide plate, z is equipped with respectively grating scale and read head on slide plate and guide's z rail chair, utilize grating scale and read head read z to slide plate the amount of movement with respect to guide's z rail chair, under computer control, motor drives z to move to desired location to slide plate through its reducer casing and leading screw;
X is made up of to slide plate x to moving component, guide's z rail chair is fixed on x on slide plate, x forms linear motion guide rail pair to the slide block on slide plate and the precise guide rail on lathe base, x is equipped with respectively grating scale and read head on slide plate and pedestal, utilize this grating scale and read head read x to slide plate the amount of moving on to respect to pedestal; Under computer control, the 3rd motor drives x to move to desired location to slide plate through its reducer casing and leading screw;
Described method comprises the following steps:
Set up coordinate system, x axle is parallel to axis of movement with REVO gauge head x, and z axle is parallel to axis of movement with REVO gauge head z, and y axle is perpendicular to x axle and z axle;
Demarcate as follows the B axle of REVO gauge head and the z depth of parallelism to axis of movement:
First, allow REVO gauge head rotate around B axle, a circular arc line on the standard flat of gauge head measurement horizontal positioned, obtains the inclination information of plane with respect to B axle axis: on circular arc line, get representational A, B, C at 3, REVO gauge head indicating value respective coordinates is respectively (x
a, y
a, z
a), (x
b, y
b, z
b), (x
c, y
c, z
c), D point is the mid point of line segment BC, D point coordinate (x
d, y
d, z
d), it is desirable establishing plane, there is no error, or its error is compensated, plane with respect to B axle axis the degree of tilt θ around x axle
1can be expressed as:
θ
1＝(z
B-z
C)/(y
B-y
C) (1)
Plane is the degree of tilt θ around y axle with respect to B axle axis
2can be expressed as:
θ
2＝(z
A-z
D)/(x
A-x
D)＝[z
A-(z
B+z
C)/2]/[x
A-(x
B+x
C)/2] (2)
Then, mobile x is to slide plate, and the straight line EF in REVO gauge head measurement standard plane establishes E, F two point coordinate values are respectively (x
e, y
e, z
e), (x
f, y
f, z
f), plane with respect to x the degree of tilt θ to axis of movement
3can be expressed as:
θ
3＝(z
E-z
F)/(x
E-x
F) (3)
Formula (2) and formula (3) be respectively plane with respect to B axle axis and x the degree of tilt to axis of movement, B axle axis with respect to x the error of perpendicularity ε to axis of movement
1can be expressed as:
ε
1＝θ
3-θ
2＝(z
E-z
F)/(x
E-x
F)-[z
A-(z
B+z
C)/2]/[x
A-(x
B+x
C)/2] (4)
Z can think desirable to the error of perpendicularity of axis of movement with respect to x to axis of movement, or demarcated in advance, its error of perpendicularity is ε
2thereby, can obtain B axle axis with respect to z to the parallelism error μ of motion on xoz coordinate plane
1:
μ
1＝ε
1-ε
2＝(z
E-z
F)/(x
E-x
F)-[z
A-(z
B+z
C)/2]/[x
A-(x
B+x
C)/2]-ε
2(5)
On the standard flat of existing horizontal positioned, vertically place again a standard flat, carry out the measurement of z to motion, according to changing in z REVO gauge head indicating value in y direction when passing by unit distance, can determine plane with respect to z the degree of tilt θ to axis of movement
4thereby, calculate B axle axis with respect to z to axis of movement the parallelism error μ on yoz coordinate plane
2:
μ
2＝θ
4-θ
1＝θ
4-(z
B-z
C)/(y
B-y
C) (6)
The A axle of REVO gauge head and x are to the demarcation of the depth of parallelism of axis of movement: allow gauge head rotate around A axle, measure the vertical circular arc line on a standard flat of placing, get A ', B ', C ' on circular arc line at 3, its coordinate is respectively (x
a ', y
a ', z
a '), (x
b ', y
b ', z
b '), (x
c ', y
c ', z
c '), the mid point that D ' point is line segment B ' C ', D ' point coordinate (x
d ', y
d ', z
d '), plane with respect to REVO gauge head A axle axis the degree of tilt η around z axle
1be expressed as:
η
1＝(x
B‘-x
C’)/(y
B‘-y
C’) (7)
Plane is the degree of tilt η around y axle with respect to REVO gauge head A axle axis
2be expressed as:
η
2＝(x
A‘-x
D’)/(z
A‘-z
D’)＝[x
A‘-(x
B‘+x
C’)/2]/[z
A‘-(z
B‘+z
C’)/2] (8)
Then, mobile z is to slide plate, a straight line E ' F ' on REVO gauge head measurement plane, and E ', F ' two point coordinate are respectively (x
e ', y
e ', z
e '), (x
f ', y
f ', z
f '), plane with respect to z the degree of tilt η to axis of movement
3be expressed as:
η
3＝(x
E‘-x
F’)/(z
E‘-z
F’) (9)
REVO gauge head A axle with respect to z to motion error of perpendicularity ε
3be expressed as:
ε
3＝η
3-η
2＝(x
E‘-x
F’)/(z
E‘-z
F’)-[x
A‘-(x
B‘+x
C’)/2]/[z
A‘-(z
B‘+z
C’)/2] (10)
Thereby can obtain A axle axis with respect to x to axis of movement the parallelism error μ on xoz coordinate plane
3be expressed as:
μ
3＝ε
3-ε
2＝(x
E‘-x
F’)/(z
E‘-z
F’)-[x
A‘-(x
B‘+x
C’)/2]/[z
A‘-(z
B‘+z
C’)/2]-ε
2(11)
For determine Revo gauge head A axle with respect to x to axis of movement the parallelism error on xoy coordinate plane, need to be in existing vertical vertical another plane of placing on a standard flat of placing, mobile x is to skateboarding, REVO gauge head is measured the deviation of another plane in y direction, according to changing in the indicating value of x REVO gauge head when passing by unit distance, determine existing vertical place a standard flat with respect to x the degree of tilt η to axis of movement
4thereby, the A axle that calculates REVO gauge head with respect to x to motion the parallelism error μ on xoy coordinate plane
4
μ
4＝η
4-η
1＝η
4-(x
B‘-x
C’)/(y
B‘-y
C’) (12)
Described standard flat is marble plane.
Technical characterstic of the present invention and effect:
B axle and z that the present invention demarcates respectively REVO gauge head demarcate to the depth of parallelism of axis of movement to the depth of parallelism demarcation of axis of movement, A axle and the x of REVO gauge head, thereby the present invention completed the demarcation of REVO probe location attitude in articulated arm coordinate measuring machine, overall measurement accuracy is improved.
Accompanying drawing explanation
Fig. 1 is articulated arm coordinate measuring machine structural representation.
Fig. 2 is REVO measuring head structure schematic diagram.
Fig. 3 is REVO gauge head circular arc line schematic diagram on B axle rotation measuring standard flat.
Fig. 4 is circular arc line schematic diagram on the standard flat of horizontal positioned.(x in figure
a, y
a, z
a), (x
b, y
b, z
b), (x
c, y
c, z
c), (x
d, y
d, z
d) be the REVO gauge head indicating value coordinate that corresponding A, B, C, D are ordered respectively.
Fig. 5 is along x to traverse measurement machine slide plate, a straight line schematic diagram in REVO gauge head measurement standard plane.
Fig. 6 is along z to traverse measurement machine slide plate, and measurement standard plane and z are to the degree of tilt schematic diagram of motion.
Fig. 7 is REVO measuring probe circular arc line schematic diagram on A axle rotation measuring standard flat.
Fig. 8 is circular arc line schematic diagram on the standard flat of vertically placing.(x in figure
a ', y
a ', z
a '), (x
b ', y
b ', z
b '), (x
c ', y
c ', z
c '), (x
d ', y
d ', z
d ') be respectively corresponding A of REVO gauge head indicating value ', the coordinate of B ', C ', D ' point.
Fig. 9 is along x to traverse measurement machine slide plate, and REVO gauge head measurement standard plane and x are to the degree of tilt schematic diagram of motion.
Embodiment
The invention provides a kind of scaling method of REVO probe location attitude, demarcate and comprise two aspects: the B axle of the one, REVO gauge head and z demarcate to the depth of parallelism of axis of movement, the A axle of the 2nd, REVO gauge head and x demarcate to the depth of parallelism of axis of movement.
For convenience of explanation, set up coordinate system as shown in Figure 1, x axle is parallel to axis of movement with x, and z axle is parallel to axis of movement with z, and y axle is perpendicular to x axle and z axle.The B axle of REVO gauge head and z demarcate and can be divided into two aspects to the depth of parallelism of axis of movement, and the one, B axle and z be the demarcation of the depth of parallelism in xoz coordinate plane to axis of movement, and the 2nd, B axle and z be the demarcation of the depth of parallelism in yoz coordinate plane to axis of movement.In like manner, the A axle of REVO gauge head and x demarcate and also need to demarcate at xoz coordinate plane and xoy coordinate plane respectively to the depth of parallelism of axis of movement.
The B axle and the z that demarcate REVO gauge head are as follows to the depth of parallelism principle of axis of movement:
First, allow REVO gauge head rotate around B axle, a circular arc line on the standard flat of gauge head measurement horizontal positioned, as shown in Figure 3.By data processing, obtain the inclination information of plane with respect to B axle axis.For convenience of explanation, get representational A, B, C on circular arc line at 3, as shown in Figure 4, its coordinate figure is respectively (x
a, y
a, z
a), (x
b, y
b, z
b), (x
c, y
c, z
c), D point is the mid point of line segment BC, D point coordinate is (x
d, y
d, z
d).Here think that plane is desirable, there is no error, or its error is compensated.Plane with respect to B axle axis the degree of tilt θ around x axle
1can be expressed as
θ
1＝(z
B-z
C)/(y
B-y
C) (1)
Plane is the degree of tilt θ around y axle with respect to B axle axis
2can be expressed as:
θ
2＝(z
A-z
D)/(x
A-x
D)＝[z
A-(z
B+z
C)/2]/[x
A-(x
B+x
C)/2] (2)
Then, traverse measurement machine slide in the x-direction, the straight line EF in REVO gauge head measurement standard plane, as shown in Figure 5.If E, F two point coordinate values are respectively (x
e, y
e, z
e), (x
f, y
f, z
f), plane with respect to x the degree of tilt θ to axis of movement
3can be expressed as
θ
3＝(z
E-z
F)/(x
E-x
F) (3)
Formula (2) and formula (3) be respectively plane with respect to B axle axis and x to the degree of tilt of axis of movement, by introducing a standard flat, B axle axis and x are linked together to axis of movement like this.B axle axis with respect to x the error of perpendicularity ε to axis of movement
1can be expressed as:
ε
1＝θ
3-θ
2＝(z
E-z
F)/(x
E-x
F)-[z
A-(z
B+z
C)/2]/[x
A-(x
B+x
C)/2] (4)
Z can think desirable to the error of perpendicularity of axis of movement with respect to x to axis of movement, or demarcated in advance, its error of perpendicularity is ε
2thereby, can obtain B axle axis with respect to z to the parallelism error μ of motion on xoz coordinate plane
1:
μ
1＝ε
1-ε
2＝(z
E-z
F)/(x
E-x
F)-[z
A-(z
B+z
C)/2]/[x
A-(x
B+x
C)/2]-ε
2 (5)
Finally, because measuring machine does not have y to motion, so cannot utilize y to motion directly measure B axle axis with respect to z to axis of movement the parallelism error on yoz coordinate plane.For determine B axle axis with respect to z to axis of movement the parallelism error on yoz coordinate plane, need on existing standard flat, vertically place again a standard flat, carry out the measurement of z to motion, as shown in Figure 6.Z is to moving coordinate machine slide plate, according to changing in z REVO gauge head indicating value in y direction when passing by unit distance, can determine plane with respect to z the degree of tilt θ to axis of movement
4thereby, calculate B axle axis with respect to z to axis of movement the parallelism error μ on yoz coordinate plane
2:
μ
2＝θ
4-θ
1＝θ
4-(z
B-z
C)/(y
B-y
C) (6)
More than the B axle of REVO gauge head and the principle that z demarcates to the depth of parallelism of axis of movement, the A axle of REVO gauge head and x are substantially the same to the calibration principle of the depth of parallelism of axis of movement, and difference is that standard flat is vertically placed, and allow gauge head rotate around A axle, a circular arc line on measurement plane, as shown in Figure 7.On circular arc line, get A ', B ', C ' at 3, as shown in Figure 8, its x to indicating value be respectively (x
a ', y
a ', z
a '), (x
b ', y
b ', z
b '), (x
c ', y
c ', z
c '), the mid point that D ' point is line segment B ' C ', D ' point coordinate is (x
d ', y
d ', z
d ').Plane with respect to REVO gauge head A axle axis the degree of tilt η around z axle
1can be expressed as
η
1＝(x
B‘-x
C’)/(y
B‘-y
C’) (7)
Plane is the degree of tilt η around y axle with respect to REVO gauge head A axle axis
2can be expressed as:
η
2＝(x
A‘-x
D’)/(z
A‘-z
D’)＝[x
A‘-(x
B‘+x
C’)/2]/[z
A‘-(z
B‘+z
C’)/2] (8)
Then, along z to traverse measurement machine balladeur train, a straight line E ' F ' on REVO gauge head measurement plane, the indicating value that E ', F ' are 2 is respectively (x
e ', y
e ', z
e '), (x
f ', y
f ', z
f '), plane with respect to z the degree of tilt η to axis of movement
3can be expressed as
η
3＝(x
E‘-x
F’)/(z
E‘-z
F’) (9)
REVO gauge head A axle with respect to z to motion error of perpendicularity ε
3can be expressed as
ε
3＝η
3-η
2＝(x
E‘-x
F’)/(z
E‘-z
F’)-[x
A‘-(x
B‘+x
C’)/2]/[z
A‘-(z
B‘+z
C’)/2] (10)
Z can think desirable to the error of perpendicularity of axis of movement with respect to x to axis of movement, or demarcated in advance, its error of perpendicularity is ε
2thereby, can obtain A axle axis with respect to x to axis of movement the parallelism error μ on xoz coordinate plane
3can be expressed as
μ
3＝ε
3-ε
2＝(x
E‘-x
F’)/(z
E‘-z
F’)-[x
A‘-(x
B‘+x
C’)/2]/[z
A‘-(z
B‘+z
C’)/2]-ε
2(11)
Finally, because measuring machine does not have y to motion, so cannot utilize y to motion directly measure A axle axis with respect to x to axis of movement the parallelism error on xoy coordinate plane.For determine the A axle of Revo gauge head with respect to x to axis of movement the parallelism error on xoy coordinate plane, need to be on existing standard flat vertical another plane of placing, as shown in Figure 9.Allow measuring machine balladeur train along x to moving, REVO gauge head is measured the deviation of second plane in y direction.According to changing in the indicating value of x REVO gauge head when passing by unit distance, can determine first plane with respect to x the degree of tilt η to axis of movement
4thereby, the A axle that calculates REVO gauge head with respect to x to motion the parallelism error μ on xoy coordinate plane
4
μ
4＝η
4-η
1＝η
4-(x
B‘-x
C’)/(y
B‘-y
C’) (12)
Further describe the present invention below in conjunction with the drawings and specific embodiments.
Demarcation is to carry out on as lower device:
Device is by being made up of to moving component, error compensation system and data processing and control computing machine, motor to moving component, x joint arm, REVO gauge head, z;
Joint arm adopts the carbon fibre that proportion is little, elastic modulus is large to make; The front end of joint arm is provided with REVO gauge head, on joint arm is sleeved on precision bearing system radially little with axially-movable error, that angle swing kinematic error is little, changing axle into is that end is provided with motor, driven by motor precision bearing system and joint arm rotate, and the precision angle system that the angle turning over is fastened by axle records.
Z is made up of to slide plate, track base z to moving component, the seat of precision bearing system is fixed on z on slide plate, z forms linear motion guide rail pair to the precise guide rail on two slide blocks and guide's z rail chair on slide plate, z is equipped with respectively grating scale and read head on slide plate and guide's z rail chair, utilize grating scale and read head read z to slide plate the amount of movement with respect to guide's z rail chair, under computer control, motor drives z to move to desired location to slide plate through its reducer casing and leading screw;
X is made up of to slide plate x to moving component, guide's z rail chair is fixed on x on slide plate, x forms linear motion guide rail pair to the slide block on slide plate and the precise guide rail on lathe base, x is equipped with respectively grating scale and read head on slide plate and pedestal, utilize this grating scale and read head read x to slide plate the amount of moving on to respect to pedestal; Under computer control, the 3rd motor drives x to move to desired location to slide plate through its reducer casing and leading screw.
The object of the invention is to propose a kind of scaling method of REVO probe location attitude, to improve the precision of follow-up measurement.Concrete steps are as follows:
1. the B axle of demarcation REVO gauge head and z are to the depth of parallelism of axis of movement
1) by dull and stereotyped marble horizontal positioned, allow REVO gauge head rotate around its B axle, a circular arc line on measurement plane, as shown in Figure 3.Choose A, B, C 3 points, as shown in Figure 4, record three point coordinate value (x
a, y
b, z
a), (x
b, y
b, z
b), (x
c, y
c, z
c).Dull and stereotyped with respect to REVO gauge head B axle axis the degree of tilt θ around x axle
1available (1) formula represents, dull and stereotyped with respect to REVO gauge head B axle the degree of tilt θ around y axle
2available (2) formula represents.
2) traverse measurement machine slide in the x-direction, REVO gauge head is measured the straight line EF on flat board, as shown in Figure 5.Record the coordinate figure (x of 2 of E, F
e, y
e, z
e), (x
f, y
f, z
f).Dull and stereotyped with respect to x the degree of tilt θ to motion
3available (3) formula represents, the axis of REVO gauge head B axle is the error of perpendicularity ε to axis of movement with respect to x
1available (4) formula represents, because z is to the error of perpendicularity ε to motion with respect to x that moves
2record, thus B axle axis with respect to z to axis of movement the parallelism error μ on xoz coordinate plane
1available (5) formula represents.
3) on flat board, place a standard square chest, along z to traverse measurement machine slide, as shown in Figure 6.Record z REVO gauge head indicating value in y direction when passing by unit distance and change θ
4, flat board is θ with respect to z to the degree of tilt of motion
4, B axle axis with respect to z to axis of movement the parallelism error μ on yoz coordinate plane
2available (6) formula represents.
2. the A axle of demarcation REVO gauge head and x are to the depth of parallelism of axis of movement
1) vertically place dull and stereotyped a marble, allow REVO gauge head rotate around its A axle, measure a circular arc line on flat board, as shown in Figure 7.Choose A ', B ', C ' 3 points, as shown in Figure 8, record the coordinate figure (x of 3
a ', y
a ', z
a '), (x
b ', y
b ', z
b '), (x
c ', y
c ', z
c ').Dull and stereotyped with respect to A axle axis the degree of tilt η around z axle
1available (7) formula represents, dull and stereotyped with respect to REVO gauge head A axle axis the degree of tilt η around y axle
2available (8) formula represents.
2) traverse measurement machine balladeur train in the z-direction, REVO gauge head is measured straight line E ' F ', records E ', F ' two point coordinate value (x
e ', y
e ', z
e '), (x
f ', y
f ', z
f '), dull and stereotyped with respect to z the degree of tilt η to axis of movement
3available (9) formula represents.REVO gauge head A axle is the error of perpendicularity ε to axis of movement with respect to z
3available (10) formula represents, thus REVO gauge head A axle axis with respect to x to axis of movement the parallelism error μ on xoz coordinate plane
3available (11) formula represents.
3) on flat board, place a standard square chest, as shown in Figure 9.Allow measuring machine balladeur train along x to moving, REVO gauge head is measured the deviation of square chest in y direction.Record in the indicating value of x REVO gauge head when passing by unit distance and change η
4, flat board is η with respect to x to the degree of tilt of motion
4therefore, the A axle of REVO gauge head with respect to x to the parallelism error μ of motion on xoy coordinate plane
4available (12) formula represents.
Claims (2)
1. a REVO probe location attitude scaling method in articulated arm coordinate measuring machine, is characterized in that, demarcation is to carry out on as lower device:
Device is by being made up of to moving component, error compensation system and data processing and control computing machine, motor to moving component, x joint arm, REVO gauge head, z;
Joint arm adopts the carbon fibre that proportion is little, elastic modulus is large to make; The front end of joint arm is provided with REVO gauge head, on joint arm is sleeved on precision bearing system radially little with axially-movable error, that angle swing kinematic error is little, precision bearing system end is provided with motor, driven by motor precision bearing system and joint arm rotate, and the precision angle system that the angle turning over is fastened by axle records;
Z is made up of to slide plate, track base z to moving component, the seat of precision bearing system is fixed on z on slide plate, z forms linear motion guide rail pair to the precise guide rail on two slide blocks and guide's z rail chair on slide plate, z is equipped with respectively grating scale and read head on slide plate and guide's z rail chair, utilize grating scale and read head read z to slide plate the amount of movement with respect to guide's z rail chair, under computer control, motor drives z to move to desired location to slide plate through its reducer casing and leading screw;
X is made up of to slide plate x to moving component, guide's z rail chair is fixed on x on slide plate, x forms linear motion guide rail pair to the slide block on slide plate and the precise guide rail on lathe base, x is equipped with respectively grating scale and read head on slide plate and pedestal, utilize this grating scale and read head read x to slide plate the amount of moving on to respect to pedestal; Under computer control, the 3rd motor drives x to move to desired location to slide plate through its reducer casing and leading screw;
Described method comprises the following steps:
Set up coordinate system, x axle is parallel to axis of movement with REVO gauge head x, and z axle is parallel to axis of movement with REVO gauge head z, and y axle is perpendicular to x axle and z axle;
Demarcate as follows the B axle of REVO gauge head and the z depth of parallelism to axis of movement:
First, allow REVO gauge head rotate around B axle, a circular arc line on the standard flat of gauge head measurement horizontal positioned, obtains the inclination information of plane with respect to B axle axis: on circular arc line, get representational A, B, C at 3, REVO gauge head indicating value respective coordinates is respectively (x
a, y
a, z
a), (x
b, y
b, z
b), (x
c, y
c, z
c), D point is the mid point of line segment BC, D point coordinate (x
d, y
d, z
d), it is desirable establishing plane, there is no error, or its error is compensated, plane with respect to B axle axis the degree of tilt θ around x axle
1can be expressed as:
θ
1＝(z
B-z
C)/(y
B-y
C) (1)
Plane is the degree of tilt θ around y axle with respect to B axle axis
2can be expressed as:
θ
2＝(z
A-z
D)/(x
A-x
D)＝[z
A-(z
B+z
C)/2]/[x
A-(x
B+x
C)/2] (2)
Then, mobile x is to slide plate, and the straight line EF in REVO gauge head measurement standard plane establishes E, F two point coordinate values are respectively (x
e, y
e, z
e), (x
f, y
f, z
f), plane with respect to x the degree of tilt θ to axis of movement
3can be expressed as:
θ
3＝(z
E-z
F)/(x
E-x
F) (3)
Formula (2) and formula (3) be respectively plane with respect to B axle axis and x the degree of tilt to axis of movement, B axle axis with respect to x the error of perpendicularity ε to axis of movement
1can be expressed as:
ε
1＝θ
3-θ
2＝(z
E-z
F)/(x
E-x
F)-[z
A-(z
B+z
C)/2]/[x
A-(x
B+x
C)/2] (4)
Z can think desirable to the error of perpendicularity of axis of movement with respect to x to axis of movement, or demarcated in advance, its error of perpendicularity is ε
2thereby, can obtain B axle axis with respect to z to the parallelism error μ of motion on xoz coordinate plane
1:
μ
1＝ε
1-ε
2＝(z
E-z
F)/(x
E-x
F)-[z
A-(z
B+z
C)/2]/[x
A-(x
B+x
C)/2]-ε
2 (5)
On the standard flat of existing horizontal positioned, vertically place again a standard flat, carry out the measurement of z to motion, according to changing in z REVO gauge head indicating value in y direction when passing by unit distance, can determine plane with respect to z the degree of tilt θ to axis of movement
4thereby, calculate B axle axis with respect to z to axis of movement the parallelism error μ on yoz coordinate plane
2:
μ
2＝θ
4-θ
1＝θ
4-(z
B-z
C)/(y
B-y
C) (6)
The A axle of REVO gauge head and x are to the demarcation of the depth of parallelism of axis of movement: allow gauge head rotate around A axle, measure the vertical circular arc line on a standard flat of placing, get representational A ', B ', C ' on circular arc line at 3, its coordinate is respectively (x
a ', y
a ', z
a '), (x
b ', y
b ', z
b '), (x
c ', y
c ', z
c '), the mid point that D ' point is line segment B ' C ', D ' point coordinate (x
d ', y
d ', z
d '), plane with respect to REVO gauge head A axle axis the degree of tilt η around z axle
1be expressed as:
η
1＝(x
B’-x
C’)/(y
B’-y
C’) (7)
Plane is the degree of tilt η around y axle with respect to REVO gauge head A axle axis
2be expressed as:
η
2＝(x
A’-x
D’)/(z
A’-z
D’)＝[x
A’-(x
B’+x
C’)/2]/[z
A’-(z
B’+z
C’)/2] (8)
Then, mobile z is to slide plate, a straight line E ' F ' on REVO gauge head measurement plane, and E ', F ' two point coordinate are respectively (x
b ', y
e ', z
e '), (x
f ', y
f ', z
f '), plane with respect to z the degree of tilt η to axis of movement
3be expressed as:
η
3＝(x
E’-x
F’)/(z
E’-z
F’) (9)
REVO gauge head A axle with respect to z to motion error of perpendicularity ε
3be expressed as:
ε
3＝η
3-η
2＝(x
E’-x
F’)/(z
E’-z
F’)-[x
A’-(x
B’+x
C’)/2]/[z
A’-(z
B’+z
C’)/2] (10)
Thereby can obtain A axle axis with respect to x to axis of movement the parallelism error μ on xoz coordinate plane
3be expressed as:
μ
3＝ε
3-ε
2＝(x
E’-x
F’)/(z
E’-z
F’)-[x
A’-(x
B’+x
C’)/2]/[z
A’-(z
B’+z
C’)/2]-ε
2 (11)
For determine Revo gauge head A axle with respect to x to axis of movement the parallelism error on xoy coordinate plane, need to be in existing vertical vertical another plane of placing on a standard flat of placing, mobile x is to skateboarding, REVO gauge head is measured the deviation of another plane in y direction, according to changing in the indicating value of x REVO gauge head when passing by unit distance, determine existing vertical place a standard flat with respect to x the degree of tilt η to axis of movement
4thereby, the A axle that calculates REVO gauge head with respect to x to motion the parallelism error μ on xoy coordinate plane
4
μ
4＝η
4-η
1＝η
4-(x
B’-x
C’)/(y
B’-y
C’) (12)。
2. the method for claim 1, is characterized in that, described standard flat is marble plane.
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| CN105444709A (en) * | 2016-01-07 | 2016-03-30 | 常州机电职业技术学院 | Injection mold measuring method and system based on ROMER articulated arm measuring machine |
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| CN109269456B (en) * | 2018-10-12 | 2020-03-20 | 太原理工大学 | Calibration method for perpendicularity error of AB axis of REVO measuring head |
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| CN115446667A (en) * | 2022-09-14 | 2022-12-09 | 北京工研精机股份有限公司 | Auxiliary tool for detecting swing angle of five-axis horizontal machining center with 45-degree oblique swing head |
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