CN102590577B - Full-optical fiber heterodyning current sensor - Google Patents
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Abstract
一种全光纤外差电流传感器,包括一个半导体激光器光源、一个普通光纤偏振控制器、一个光纤电流感应单元、一段端面有亚波长金属光栅的光纤和第一、第二两个光功率计、第一和第二两个光纤环路器,其中半导体激光器光源输出端通过光纤偏振控制器接第一光纤环路器后再连接光纤电流感应单元;第一光纤环路器第三端并联第二光纤环路器的第一端口,第二光纤环路器的第二端设有端面金属光栅和第一光功率计,第二光纤环路器的第三端接第二光功率计。采用基于光纤端面纳米金属线栅的全光纤光路,电流传感器在灵敏度、稳定性、及器件本身简化方面都有很大提高。
An all-fiber heterodyne current sensor, including a semiconductor laser light source, a common optical fiber polarization controller, an optical fiber current sensing unit, a section of optical fiber with a sub-wavelength metal grating on the end face, and the first and second optical power meters, the first The first and the second two optical fiber circulators, wherein the output end of the semiconductor laser light source is connected to the first optical fiber circulator through the optical fiber polarization controller and then connected to the optical fiber current sensing unit; the third end of the first optical fiber circulator is connected to the second optical fiber in parallel The first port of the circulator, the second end of the second optical fiber circulator are provided with an end face metal grating and the first optical power meter, and the third end of the second optical fiber circulator is connected with the second optical power meter. Using the all-fiber optical path based on the nano-metal wire grid at the end of the fiber, the current sensor has greatly improved in terms of sensitivity, stability, and simplification of the device itself.
Description
技术领域 technical field
本发明属于光电子技术领域,具体涉及光学量的测量方法和金属线栅的偏振选择特性,及基于此的一种在全光纤条件下实现外差电流测量的光纤电流传感器的制作方法和应用。The invention belongs to the field of optoelectronic technology, and in particular relates to a method for measuring optical quantities and the polarization selection characteristics of metal wire grids, and a manufacturing method and application of an optical fiber current sensor for realizing heterodyne current measurement under the condition of all optical fibers.
背景技术 Background technique
现有工业化应用的电流传感采用的以电磁感应原理为基础的常规电流互感技术,暴露出一系列问题:充油互感器在超高压环境有被击穿发生爆炸的危险、存在磁饱和与磁滞效应的不利效应、体积重量大、价格昂贵、易受电磁干扰影响等,难以满足新一代智能电网电力系统发展的需要。而相比较而言,光纤传感技术具有以下显著优势:绝缘介质材料抗干扰能力强、可以在极端恶劣环境下工作、体积小重量轻且可以自由布局、测量范围大线性度好、容易与光纤通信系统衔接组合。所以,将光纤传感技术引入到电流检测中的光纤电流传感器成为应用于的新一代智能电网电力系统的很好方法。The conventional current mutual induction technology based on the principle of electromagnetic induction used in current industrial applications has exposed a series of problems: oil-filled transformers may be broken down and explode in ultra-high voltage environments, and there are magnetic saturation and magnetic The adverse effects of the hysteresis effect, large volume and weight, high price, and susceptibility to electromagnetic interference, etc., are difficult to meet the needs of the development of the new generation of smart grid power system. In comparison, optical fiber sensing technology has the following significant advantages: insulating dielectric materials have strong anti-interference ability, can work in extremely harsh environments, small size, light weight and free layout, large measurement range and good linearity, easy to integrate with optical fiber Combination of communication systems. Therefore, the fiber optic current sensor that introduces the fiber optic sensing technology into the current detection becomes a good method to be applied to the new generation smart grid power system.
光纤式电流互感器是一种新型光机电一体化设备,可广泛应用于智能电网多个领域。但由于温度、应力等对测量性能影响难以计算,产品制造工艺难度大,部件一致性差,制造成本居高不下,至今光纤式电流互感器仍难以大规模应用。我们研制的基于金属纳米线栅的全光纤电流传感器采用全光纤传感光路,旨在提高光纤传感的稳定性和精度,并且大幅降低产品成本。Fiber-optic current transformer is a new type of optical-mechanical-electrical integration equipment, which can be widely used in many fields of smart grid. However, due to the difficulty in calculating the influence of temperature and stress on measurement performance, the difficulty of product manufacturing process, poor consistency of components, and high manufacturing costs, it is still difficult to apply fiber optic current transformers on a large scale. The all-fiber current sensor based on metal nanowire grids developed by us adopts all-fiber sensing optical path, which aims to improve the stability and accuracy of optical fiber sensing and greatly reduce product costs.
随着日本这次核电站泄露事件的影响,中国暂停了部分新核电项目的审批。再加上国家于“十二五”期间对特高压电网建设的投资将达5000亿元,智能电网的发展势必将迎来春天。基于智能电网技术的特高压电网将是数字化电站技术、基于光纤通讯的控制系统、智能传感等新技术应用的大舞台。而传统的电流互感已难以满足新一代智能电网电力系统在线检测、高精度故障诊断、高干扰下作业、大电流测量、电力数字网等发展的需要。将光纤传感技术引入到电流检测中的光纤电流传感器成为解决上述难题的最好方法。With the influence of Japan's nuclear power plant leakage incident, China has suspended the approval of some new nuclear power projects. In addition, the country will invest 500 billion yuan in the construction of UHV power grids during the "Twelfth Five-Year Plan" period, and the development of smart grids is bound to usher in spring. The UHV power grid based on smart grid technology will be a big stage for the application of new technologies such as digital power station technology, control systems based on optical fiber communication, and intelligent sensing. The traditional current mutual inductance has been difficult to meet the development needs of the new generation of smart grid power system on-line detection, high-precision fault diagnosis, operation under high interference, large current measurement, and power digital network. The fiber optic current sensor that introduces fiber optic sensing technology into current detection is the best way to solve the above problems.
预计用于下一代特高压智能电网系统中的光电互感器价值将超过百亿元,其中引领技术发展趋势的光纤电流传感器势必将占据很大的份额。所以,面向智能电网的光纤电流传感器市场前景极其乐观。It is estimated that the value of photoelectric transformers used in the next-generation UHV smart grid system will exceed 10 billion yuan, and the fiber optic current sensor that leads the technology development trend is bound to occupy a large share. Therefore, the market prospect of fiber optic current sensors for smart grids is extremely optimistic.
综合国内外所有研究来看,光纤技术电流传感器主要分为以下两大类:Based on all the research at home and abroad, the optical fiber technology current sensor is mainly divided into the following two categories:
第一大类是基于电流发热效应的温度等效传感,如基于光纤布拉格光栅的分布式电流传感器,这类技术的优点在于其基础温度传感技术众多,而与此相对的很大缺点在于温度传感反应时间缓慢、易受环境条件影响等,这很大程度限制了其工业应用。The first category is temperature equivalent sensing based on current heating effects, such as distributed current sensors based on fiber Bragg gratings. The advantage of this type of technology is that there are many basic temperature sensing technologies. Temperature sensing has a slow response time and is easily affected by environmental conditions, which greatly limits its industrial application.
第二大类是基于光纤介质法拉第磁光效应的电流传感,优点在于传感精确、反应时间快,缺点在于光纤环中存在不利的线性双折射,且光纤介质的范德尔系数(磁光系数)小,以至传感灵敏度偏低。The second category is current sensing based on the Faraday magneto-optic effect of fiber optic media. The advantages are accurate sensing and fast response time. ) is small, so that the sensing sensitivity is low.
本作品所阐述的光纤电流传感器正是基于反射式光纤光路的磁光效应电流传感。国际上基于这种技术的光纤电流传感研究也有不少,但是所有的研究几乎都是在传感头(如引入微光纤环、谐振腔技术)、或者传感光路(如利用Sagnac干涉光路)做改进,还没有研究做到在偏振检测端引入全光纤外差技术。外差技术在传感中为提高测量精度起到关键作用,现有的做法是在光检测端使用独立的晶体状分光棱镜,而分立元件的引入造成与上述使用磁光晶体同样的缺点,即对于器件的小型化、性能可靠性造成了很大的影响。而本作品除了具有光纤电流传感的一般优点外,其独特优势还在于引用了光纤金属纳米线栅的检偏技术,得以第一次实现无任何分立元件的全光纤外差电流传感系统,有利于器件的小型化、低成本化,而外差法的引入还可以很大程度上提高器件稳定性,在光源大幅波动、温度大幅波动等极端条件下也可正常工作。The optical fiber current sensor described in this work is based on the magneto-optical effect current sensing of the reflective optical fiber optical path. There are also many researches on fiber optic current sensing based on this technology in the world, but almost all the research is on the sensing head (such as the introduction of micro-fiber ring, resonant cavity technology), or the sensing optical path (such as using Sagnac interference optical path) For improvement, there is no research to introduce all-fiber heterodyne technology at the polarization detection end. Heterodyne technology plays a key role in improving measurement accuracy in sensing. The existing practice is to use an independent crystal-like beamsplitter prism at the light detection end, and the introduction of discrete components causes the same disadvantages as the above-mentioned use of magneto-optic crystals, namely It has a great impact on the miniaturization and performance reliability of the device. In addition to the general advantages of optical fiber current sensing, this work also has the unique advantage of citing the polarization analysis technology of optical fiber metal nanowire grids, which enables the first realization of an all-fiber heterodyne current sensing system without any discrete components. It is conducive to the miniaturization and cost reduction of the device, and the introduction of the heterodyne method can also greatly improve the stability of the device, and it can also work normally under extreme conditions such as large fluctuations in light source and temperature.
发明内容 Contents of the invention
本发明目的是:利用光纤端面的金属线栅的光信号检偏技术,制备出一种新型的全光纤外差电流传感器及全光纤外差电流传感方法。The purpose of the present invention is to prepare a novel all-optical fiber heterodyne current sensor and an all-fiber heterodyne current sensing method by using the optical signal polarization detection technology of the metal wire grid on the end face of the optical fiber.
本发明的技术方案是:一种全光纤外差电流传感器,包括一个半导体激光器光源输入端,一个光纤偏振控制器,一个光纤电流感应单元,一段端面有亚波长金属光栅的光纤和第一、第二两个光功率计,第一第二两个光纤环路器,其中半导体激光器光源输入端通过光纤偏振控制器接第一光纤环路器后再连接光纤电流感应单元;第一光纤环路器第三端并联第二光纤环路器的第一端口,第二光纤环路器的第二端设有端面金属光栅和第一光功率计、第二光纤环路器的第二端接第二光功率计。The technical scheme of the present invention is: an all-fiber heterodyne current sensor, including a semiconductor laser light source input end, a fiber optic polarization controller, a fiber optic current sensing unit, a section of optical fiber with a subwavelength metal grating on the end face and the first and second Two optical power meters, the first and the second two optical fiber circulators, in which the input end of the semiconductor laser light source is connected to the first optical fiber circulator through the optical fiber polarization controller and then connected to the optical fiber current sensing unit; the first optical fiber circulator The third end is connected in parallel with the first port of the second optical fiber circulator, the second end of the second optical fiber circulator is provided with an end face metal grating and the first optical power meter, and the second end of the second optical fiber circulator is connected to the second Optical power meter.
所述光纤电流感应单元采用光纤环与电流环互绕的结构,光纤环的一端接法拉第旋转镜面,光纤环的另一端接第一光纤环路器输出端交互光信号的输入与输出,电流环接入待测电流感应单元的电流电路;从电流感应单元反射回来的信号光通过第一环路器入射到第二环路器的第一端口。The optical fiber current sensing unit adopts a structure in which an optical fiber ring and a current ring are intertwined. One end of the optical fiber ring is connected to a Faraday rotating mirror, and the other end of the optical fiber ring is connected to the output end of the first optical fiber circulator to exchange optical signals. The input and output of the current ring The current circuit of the current sensing unit to be tested is connected; the signal light reflected from the current sensing unit enters the first port of the second circulator through the first circulator.
端面金属光栅为亚波长金属光栅,实现对该光纤端面不同偏振态入射光的透射率和偏振率的控制的全光纤光偏振控制器。The metal grating on the end face is a sub-wavelength metal grating, which is an all-fiber optical polarization controller that controls the transmittance and polarization rate of incident light with different polarization states on the end face of the fiber.
采用全光纤条件下实现外差测量的方法,设置光路特征为:半导体激光器光源输入端的入射光通过所述的全光纤光偏振控制器时,透射光通过光功率计测量光强It,反射光通过一个光纤环路器引入另一段光纤测量光强Ir,经过信号处理得到外差结果外差结果入射光到光纤环形器1的第一端口,环形器1第三端口通过光纤直接连接第二光功率计,入射光通过环形器第一端口至光纤环形器的第二端口和全光纤光偏振控制器的透射光通过一个光纤耦光V形槽耦合入一段光纤到第一光功率计测量光强;透射光通过一个光纤耦光V形槽耦合入一段光纤测量光强It,反射光通过一个光纤环路器引入另一段光纤测量光强Ir,透射光光强It=I0sin2(δ/2),反射光光强Ir=I0cos2(δ/2),其中δ为相位差,I0为入射偏振光的光强;透射光与反射光强的结果只与由于电流变化引起的光相位差δ有关,与电流传感无关的诸如光源波动、环境温度变化、微弱机械振动等不利因素皆可排除。Adopt the method that realizes heterodyne measurement under the condition of all-optical fiber, set optical path characteristic as: when the incident light of semiconductor laser light source input end passes through described all-fiber optical polarization controller, transmitted light is measured light intensity I t by optical power meter, reflected light Introduce another section of optical fiber through an optical fiber circulator to measure the light intensity I r , and obtain the heterodyne result after signal processing The incident light goes to the first port of the fiber circulator 1, the third port of the circulator 1 is directly connected to the second optical power meter through the optical fiber, and the incident light passes through the first port of the circulator to the second port of the fiber circulator and the full-fiber optical polarization control The transmitted light of the device is coupled into a section of optical fiber through a fiber coupling V-shaped groove to measure the light intensity of the first optical power meter; the transmitted light is coupled into a section of optical fiber through a fiber coupling V-shaped groove to measure the light intensity I t , and the reflected light passes through a The optical fiber circulator introduces another section of optical fiber to measure the light intensity I r , the transmitted light intensity I t =I 0 sin 2 (δ/2), the reflected light intensity I r =I 0 cos 2 (δ/2), where δ is the phase difference, and I 0 is the light intensity of incident polarized light; the results of transmitted light and reflected light intensity are only related to the light phase difference δ caused by current changes, and have nothing to do with current sensing, such as light source fluctuations, ambient temperature changes, weak Unfavorable factors such as mechanical vibration can be excluded.
使用环路器1将光源,电流感应单元和全光纤外差光路连接起来;光源包括半导体激光器光源和普通光纤偏振控制器。A circulator 1 is used to connect the light source, the current sensing unit and the all-fiber heterodyne optical path; the light source includes a semiconductor laser light source and an ordinary optical fiber polarization controller.
利用微加工技术直接或间接的在光纤端面制备金属线栅,利用金属线栅对特定偏振光的选择性反射或透射效应,实现对特定光波段的反射或透射光的偏振性控制。The metal wire grid is directly or indirectly prepared on the end face of the optical fiber by micro-processing technology, and the selective reflection or transmission effect of the metal wire grid on specific polarized light is used to realize the polarization control of the reflected or transmitted light of a specific optical band.
本发明光纤电流传感器所使用基本传感原理是法拉第磁光效应。平面偏振光在某些有磁场作用的非旋光物质中传播时,若传播方向沿磁场作用方向,则光波的偏振面将发生旋转,其转角正比于磁场强度和所穿过的介质的长度,β=γ∫Hdl,其中γ为磁光系数(范德尔系数),H为磁场强度,l为磁光效应相互作用的空间长度,β为偏振光的方位角偏振角度。在本发明中光纤既作为信号光的传输载体,又作为产生法拉第磁光效应的传感性物质,即法拉第传感效应直接发生在信号光在光纤中的传输过程中。The basic sensing principle used by the optical fiber current sensor of the present invention is the Faraday magneto-optical effect. When plane polarized light propagates in some non-optical substances with magnetic field action, if the propagation direction is along the direction of magnetic field action, the polarization plane of the light wave will rotate, and the rotation angle is proportional to the strength of the magnetic field and the length of the medium it passes through, β =γ∫Hdl, where γ is the magneto-optical coefficient (Vander coefficient), H is the magnetic field strength, l is the space length of the magneto-optical effect interaction, and β is the azimuth polarization angle of polarized light. In the present invention, the optical fiber is used not only as the transmission carrier of the signal light, but also as the sensing substance that produces the Faraday magneto-optical effect, that is, the Faraday sensing effect occurs directly during the transmission process of the signal light in the optical fiber.
图1所示为本发明的导线、光纤相互绕制的结构示意图。多圈光纤平行紧密绕制在一个中心有空洞的圆柱体上(图中深色部分),导线绕着圆柱体的内外壁均匀螺旋装绕制(图中标有电流I的直线),则此结构电流产生的磁场方向沿着圆柱体壁的圆周方向(即光在光纤中的传输方向),由此可直接在光纤环中利用图1所示的法拉第磁光效应来测量导线中电流的变化。Fig. 1 is a schematic diagram showing the structure of wires and optical fibers wound with each other according to the present invention. Multiple coils of optical fiber are parallel and tightly wound on a cylinder with a hollow in the center (the dark part in the figure), and the wires are evenly spirally wound around the inner and outer walls of the cylinder (the straight line marked with current I in the figure), then this structure The direction of the magnetic field generated by the current is along the circumferential direction of the cylinder wall (that is, the transmission direction of light in the optical fiber), so that the Faraday magneto-optic effect shown in Figure 1 can be used directly in the optical fiber ring to measure the change of the current in the wire.
在偏振型光纤传感系统中,偏振光的检偏技术在整体传感系统起到关键作用。本发明中使用全新的基于金属纳米线栅的偏振光检偏器,它有体积小、测量精度高、易于与光纤系统结合构建全光纤系统的优势。In the polarization optical fiber sensing system, the polarization analysis technology of polarized light plays a key role in the overall sensing system. In the present invention, a brand-new polarized light analyzer based on metal nanowire grid is used, which has the advantages of small size, high measurement accuracy, and easy combination with optical fiber system to construct an all-fiber system.
金属纳米线栅的结构如图2所示,一维无限长的条状金属(如金、银等)与条状空气机构周期性间隔排列在衬底(如二氧化硅)上,入射光垂直于线栅表面入射。根据有效介质理论,当光栅的周期(纳米量级)远小于入射光的光波长时,该光栅可等效为整体双折射材料,偏振平行于线栅方向的入射光近乎全部被反射,而偏振垂直于线栅方向的入射光近乎全部能透射。由此形成对于入射偏振光的检偏功能。The structure of the metal nanowire grid is shown in Figure 2. One-dimensional infinitely long strips of metal (such as gold, silver, etc.) and strips of air are periodically arranged on the substrate (such as silicon dioxide), and the incident light is vertical incident on the surface of the wire grid. According to the effective medium theory, when the period of the grating (on the order of nanometers) is much smaller than the wavelength of the incident light, the grating can be equivalent to an overall birefringent material, and the incident light whose polarization is parallel to the direction of the wire grid is almost completely reflected, while the polarization Almost all incident light perpendicular to the direction of the wire grid can be transmitted. Thus, an analyzer function for incident polarized light is formed.
光外差的方法对于提高偏振检测精度起到了很大的作用。常规的光信号偏振检测方法是在信号光待检测的出射端加上一个分光棱镜(由多块双折射晶体组成),把出射光分成两束(或者多束),各束二级出射光之间存在由分光棱镜决定的固定相位差,分别用光功率计(或光谱仪)收集各束光的光强、频率和相位等信息,然后再利用数学运算得到排除外界干扰的纯传感信号。可以排除的外界干扰因素一般包括光源强度的波动、环境温度的扰动、测量光路的微弱机械振动等。但是这种外差技术存在的明显缺点是所使用的分束棱镜都是体块晶体材料,而体块材料的引用就不可避免地使得测量需要在自由光路中进行,于是就丧失了全光纤器件体积小、重量轻、机械稳定性好的优点。The method of optical heterodyne has played a great role in improving the precision of polarization detection. The conventional optical signal polarization detection method is to add a splitter prism (composed of multiple birefringent crystals) at the output end of the signal light to be detected, and divide the outgoing light into two beams (or multiple beams). There is a fixed phase difference determined by the beam-splitting prism, and the optical power meter (or spectrometer) is used to collect information such as the light intensity, frequency and phase of each beam of light, and then use mathematical operations to obtain pure sensing signals that exclude external interference. External interference factors that can be excluded generally include fluctuations in light source intensity, disturbances in ambient temperature, and weak mechanical vibrations in the measurement optical path. However, the obvious disadvantage of this heterodyne technique is that the beam splitting prisms used are all bulk crystal materials, and the reference of bulk materials inevitably makes the measurement need to be carried out in the free optical path, thus losing the all-fiber device Small size, light weight, good mechanical stability advantages.
本发明的有益效果是:The beneficial effects of the present invention are:
(1)本发明中采用基于光纤端面纳米金属线栅的光路偏振检偏技术,得以实现全光纤外差数据采集,大幅度提高器件稳定性,可以在光源大幅波动、温度大幅波动等极端条件下正常工作。(1) In the present invention, the optical path polarization analysis technology based on the nano-metal wire grid at the end face of the optical fiber is used to realize the acquisition of all-fiber heterodyne data, greatly improve the stability of the device, and can be used under extreme conditions such as large fluctuations in light sources and large temperature fluctuations. normal work.
(2)本发明是第一次实现了无任何分立元件的全光纤电流传感,系统可靠性得以提高,器件小型化,更利于实际智能电网中灵活布局。(2) The present invention realizes all-optical current sensing without any discrete components for the first time, improves system reliability, miniaturizes devices, and is more conducive to flexible layout in actual smart grids.
(3)该电流传感器所使用的关键部件——光纤纳米金属线栅可使用纳米压印技术批量生产,产品成本可以控制到十分低。(3) The key component used in the current sensor—fiber nanometal wire grid can be mass-produced by nanoimprinting technology, and the product cost can be controlled to be very low.
附图说明 Description of drawings
图1感应单元中导线、光纤相互绕制的结构示意图;Fig. 1 Schematic diagram of the structure of the mutual winding of wires and optical fibers in the induction unit;
图2金属线栅偏振器的工作原理:入射的TE光被反射,TM光透射;Figure 2 The working principle of the metal wire grid polarizer: the incident TE light is reflected, and the TM light is transmitted;
图3基于光纤端面金属线栅的全光纤外差测量光路;Figure 3 is an all-fiber heterodyne measurement optical path based on a metal wire grid at an optical fiber end face;
图4全光纤外差电流传感器的结构设置与工作原理;The structural setting and working principle of the all-fiber heterodyne current sensor of Fig. 4;
图5利用FIB方式,在光纤截面纤芯处得到的金属光栅结构。图5(a)为金属光栅的照片;图5(b)为纤芯处有线栅结构的光纤截面照片;Fig. 5 is the metal grating structure obtained at the core of the fiber section by using the FIB method. Figure 5(a) is a photo of a metal grating; Figure 5(b) is a photo of a cross-section of an optical fiber with a wire grid structure at the core;
图6为实施例2中光信号电流传感测量结果和外差计算结果;Fig. 6 is the optical signal current sensing measurement result and the heterodyne calculation result in embodiment 2;
图7所示为外差法测量与普通测量的对比测量曲线。图7(a)中所示的曲线是光源纯在强度不稳情况下的透射信号;图7(b)中所示的曲线是光源纯在强度不稳情况下的反射信号(光功率计2信号)测量结果;图7(c)所示的是综合透射、反射信号进过外差处理后的测量曲线。Figure 7 shows the comparative measurement curves of heterodyne measurement and common measurement. The curve shown in Figure 7(a) is the transmission signal of the light source under the condition of pure intensity instability; the curve shown in Figure 7(b) is the reflection signal of the light source under the condition of pure intensity instability (optical power meter 2 Signal) measurement results; Figure 7(c) shows the measurement curve of the integrated transmission and reflection signals after heterodyne processing.
具体实施方式 Detailed ways
下面通过实施例来进一步阐明本发明方法及应用,而不是要用这些实施例来限制本发明。The method and application of the present invention will be further illustrated by the following examples, but these examples are not intended to limit the present invention.
基于光纤端面金属线栅的全光纤外差电流传感器包括:All-fiber heterodyne current sensors based on fiber-optic wire grids include:
(1)光纤端面金属线栅的制作。利用微纳加工技术,通过直接或间接的方法在光纤表面制作金属线栅。直接法包括聚焦离子束刻蚀(FIB),微纳遮挡板定向沉积技术,及软模板打印(金属);间接法包括纳米压印、光刻技术、全息干涉及电子束直写(EBL)。具体说明:直接法中的聚焦离子束刻蚀技术为利用聚焦镓离子束溅射掉光纤端面目标区域的金属膜层,得到金属线栅结构;微纳遮挡板定向沉积技术为利用遮挡板的空间遮挡效应,直接在光纤端面定向沉积金属线栅;软模板打印技术为在软模板的微纳结构表面沉积金属膜层,打印转移金属线栅至光纤端面。间接法还可以分为两类,一是在光纤端面沉积的金属膜层上利用微纳加工技术制备结构挡层,并以此为阻挡利用湿法刻蚀或干法刻蚀刻蚀掉凹槽处的金属,最终洗脱掉挡层,得到金属线栅结构;另一种方案是先制备微结构挡层,再沉积金属,然后洗脱掉挡层及沉积其上的金属,即得到目标金属线栅结构。(1) Fabrication of the metal wire grid at the end face of the optical fiber. Using micro-nano processing technology, metal wire grids are fabricated on the surface of optical fibers by direct or indirect methods. Direct methods include focused ion beam etching (FIB), micro-nano shield directional deposition technology, and soft template printing (metal); indirect methods include nanoimprinting, photolithography, holographic interference, and electron beam direct writing (EBL). Specifically: the focused ion beam etching technology in the direct method is to use the focused gallium ion beam to sputter off the metal film layer in the target area of the fiber end face to obtain a metal wire grid structure; the directional deposition technology of the micro-nano shield is to use the space of the shield Shielding effect, direct deposition of metal wire grids on the end faces of optical fibers; soft template printing technology deposits metal film layers on the surface of micro-nano structures of soft templates, and prints transfer metal wire grids to the end faces of optical fibers. The indirect method can also be divided into two categories. One is to use micro-nano processing technology to prepare a structural barrier layer on the metal film layer deposited on the end face of the optical fiber, and use this as a barrier to etch the groove by wet etching or dry etching. Finally, the barrier layer is eluted to obtain a metal wire grid structure; another solution is to prepare a microstructure barrier layer first, then deposit the metal, and then elute the barrier layer and the metal deposited on it to obtain the target metal wire grid structure.
本发明中使用的光纤端面金属光栅做成偏振控制器可以很方便地消除这些缺点,实现全光纤条件下电流传感的目的,因为它具有天生的外光纤外差优势,方法如图3所示。图2中所示的金属纳米线栅制作光纤端面,实现对该光纤端面不同偏振态入射光的透射率和偏振率的控制,即为一种全光纤光偏振控制器。The optical fiber end metal grating used in the present invention is made into a polarization controller, which can easily eliminate these shortcomings and realize the purpose of current sensing under the condition of all optical fibers, because it has the inherent advantage of external optical fiber heterodyne, the method is shown in Figure 3 . The metal nanowire grid shown in Fig. 2 is used to make the fiber end face to control the transmittance and polarization rate of the incident light with different polarization states on the fiber end face, which is an all-fiber optical polarization controller.
图4所示为该全光纤外差电流传感器工作原理图,具体说明如下:首先半导体激光光源产生单波长(如波长为1550纳米的红外)信号光输入到普通单模光纤中,该信号光经过在线式的光纤偏振控制器调整输入光的偏振特性,然后输入到导线环/光纤环绕制的电流传感头,反射端加入法拉第旋转镜面使反射光相对于入射光轴向旋转90度,以消除光纤环中的固有双折射、应力双折射等不利因素。环路器1用于收集由传感头端反射而来的信号光,再输入环路器2。信号光经过环路器2入射到光纤端面的金属纳米线栅上,线栅透射光由光功率计1测量,线栅反射光由环路器2收集再输入到光功率计2上测量。两个光功率计的测量值进行外差计算。当感应单元上导线中的电流发生变化时,引起光纤周围磁场的变化,从而再引起光纤中传输光偏振态的变化,偏振态的变化在光纤端面金属纳米线栅上得到全光纤外差检偏。Figure 4 shows the working principle diagram of the all-fiber heterodyne current sensor, and the specific description is as follows: first, the semiconductor laser light source generates a single-wavelength (such as infrared with a wavelength of 1550 nanometers) signal light that is input into an ordinary single-mode optical fiber, and the signal light passes through The online fiber optic polarization controller adjusts the polarization characteristics of the input light, and then inputs it to the current sensing head made of wire loop/fiber surround, and a Faraday rotating mirror is added to the reflection end to rotate the reflected light by 90 degrees relative to the incident light axis to eliminate Unfavorable factors such as inherent birefringence and stress birefringence in fiber optic rings. The circulator 1 is used to collect the signal light reflected from the sensor head, and then input into the circulator 2 . The signal light is incident on the metal nanowire grid on the end face of the optical fiber through the circulator 2, the transmitted light of the wire grid is measured by the optical power meter 1, and the reflected light of the wire grid is collected by the circulator 2 and then input to the optical power meter 2 for measurement. The measured values of the two optical power meters are heterodyned. When the current in the wire on the sensing unit changes, it causes a change in the magnetic field around the fiber, which in turn causes a change in the polarization state of the transmitted light in the fiber. The change in the polarization state is obtained on the metal nanowire grid at the fiber end face. .
间接法第一种方案的一般操作步骤如下:The general operation steps of the first scheme of the indirect method are as follows:
(a)在光纤端面沉积一层金属膜(膜厚0.01-2微米)。(a) Deposit a layer of metal film (film thickness 0.01-2 microns) on the end face of the optical fiber.
(b)在该光纤端面涂上光刻胶或抗蚀层(b) Coating photoresist or resist layer on the end face of the optical fiber
(c)利用微纳加工技术对光刻胶或抗蚀层图案化(c) Patterning photoresist or resist layer using micro-nano processing technology
(d)显影去胶或去除残留(d) Develop and remove glue or remove residue
(e)利用湿法刻蚀或干法刻蚀刻蚀掉上方没有光刻胶覆盖的金属(e) Use wet etching or dry etching to etch away the metal that is not covered by photoresist
(f)用溶剂溶解去除剩余的光刻胶层,即可获得所需的光栅结构(f) Dissolve and remove the remaining photoresist layer with a solvent to obtain the desired grating structure
间接法第二种方案的操作步骤包括:The operation steps of the second option of the indirect method include:
(a)在光纤端面涂上光刻胶或抗蚀层(a) Coating photoresist or resist layer on the fiber end face
(b)利用微纳加工技术对光刻胶或抗蚀层图案化(b) Patterning photoresist or resist layer using micro-nano processing technology
(c)显影去胶或去除残留(c) Develop and remove glue or remove residue
(d)在图案表面沉积特定厚度(0.01-2微米)的金属膜(d) Deposit a metal film with a specific thickness (0.01-2 microns) on the surface of the pattern
(e)用溶剂溶解去除光刻胶层,即可获得所需的光栅结构(e) Remove the photoresist layer by dissolving with a solvent to obtain the desired grating structure
金属线栅周期为0.05-50微米,占空比为0-1之间的任意值,金属膜厚为0.01-2微米。The period of the metal wire grid is 0.05-50 microns, the duty cycle is any value between 0-1, and the metal film thickness is 0.01-2 microns.
(2)全光纤条件下的外差电流传感光路的设置。利用上述方法制得的光纤端面金属光栅,构建如图1所示的光纤条件下的外差测量光路。光纤中传输光受到感应单元电流大小变化的影响,使得入射到检测端的光偏振态发生变化,则光纤端面金属光栅的透射光和反射光的光强会相应地发生变化。透射光通过一个光纤耦光V形槽耦合入一段光纤测量光强It,反射光通过一个光纤环形器引入另一段光纤测量光强Ir,经过信号处理得到外差结果从而在全光纤的条件下实现了经典的外差测量方法,外差结果可以剔除如光源强度的波动、环境温度的扰动、测量光路的微弱机械振动等与特定传感无关外界因素。(2) The setting of the heterodyne current sensing optical path under the condition of all-fiber. Using the optical fiber end-face metal grating prepared by the above method, construct the heterodyne measurement optical path under the condition of optical fiber as shown in Fig. 1 . The light transmitted in the optical fiber is affected by the change of the current of the sensing unit, so that the polarization state of the light incident on the detection end changes, and the light intensity of the transmitted light and reflected light of the metal grating at the end of the fiber will change accordingly. The transmitted light is coupled into a section of optical fiber through a fiber coupling V-groove to measure the light intensity I t , the reflected light is introduced into another section of optical fiber through a fiber circulator to measure the light intensity I r , and the heterodyne result is obtained after signal processing Thus, the classic heterodyne measurement method is realized under the condition of all-fiber, and the heterodyne results can eliminate external factors such as fluctuations in light source intensity, disturbances in ambient temperature, and weak mechanical vibrations in the measurement optical path that are not related to specific sensing.
实施例1Example 1
用光纤切割刀切割单模光纤以获得平整的光纤端面,并用溅射法在光纤端面镀0.07微米厚的金膜。利用聚焦离子束刻蚀系统(Strata FIB 201,FEI公司,30keV镓离子源),7pA束流的条件下,用聚焦镓离子束溅射掉光纤端面目标区域的金属膜层,从而在光纤的纤芯处获得面积为10微米×10微米,周期为0.2微米,占空比为0.5的金线栅,如图5所示。The single-mode fiber was cut with a fiber cleaver to obtain a flat fiber end face, and a 0.07 μm thick gold film was plated on the fiber end face by sputtering. Using the focused ion beam etching system (Strata FIB 201, FEI company, 30keV gallium ion source), under the condition of 7pA beam current, use the focused gallium ion beam to sputter off the metal film layer in the target area of the fiber end face, so that A gold wire grid with an area of 10 μm×10 μm, a period of 0.2 μm, and a duty ratio of 0.5 is obtained at the core, as shown in FIG. 5 .
实施例2Example 2
如图4所示的全光纤外差电流传感器,应用实施例1中制得的光纤端面金属线栅,与环路器2、光功率计1、光功率计2共同组成全光纤外差传感光路。感应单元中光纤环420圈,导线环60圈,光纤中电流变化范围为0到10A,所以等效电流变化范围为0-600A。图6所示为电流传感曲线,检测灵敏度达到0.528degree/A,最小检测精度0.5mA,由于光纤传感与电流并不直接接触所以传感器本身没有最大测量上限(只受传导电流的导线限制)。图7所示为外差法测量与普通测量的对比测量曲线。当测量系统中存在光源不稳、机械扰动、环境温度变化等不利因素时,非外差法测量得到的结果就会不准确。图7(a)中所示的曲线是光源纯在强度不稳情况下的透射信号(光功率计1信号)测量结果,图7(b)中所示的曲线是光源纯在强度不稳情况下的反射信号(光功率计2信号)测量结果,它们均受到外界不利因素影响导致线性度很差。而图7(c)所示的是综合透射、反射信号进过外差处理后的测量曲线,消除了外界因素对于测量曲线的影响。As shown in Figure 4, the all-fiber heterodyne current sensor uses the metal wire grid on the end face of the fiber made in Example 1, together with the circulator 2, the optical power meter 1, and the optical power meter 2 to form an all-fiber heterodyne sensor light path. In the induction unit, there are 420 rings of optical fiber and 60 rings of wire. The current range in the optical fiber is 0 to 10A, so the equivalent current range is 0-600A. Figure 6 shows the current sensing curve, the detection sensitivity reaches 0.528degree/A, and the minimum detection accuracy is 0.5mA. Since the optical fiber sensing is not in direct contact with the current, the sensor itself has no maximum measurement limit (only limited by the wire that conducts the current) . Figure 7 shows the comparative measurement curves of heterodyne measurement and common measurement. When there are unfavorable factors such as light source instability, mechanical disturbance, and environmental temperature changes in the measurement system, the results obtained by non-heterodyne measurement will be inaccurate. The curve shown in Figure 7(a) is the measurement result of the transmitted signal (signal of optical power meter 1) when the light source is purely unstable in intensity, and the curve shown in Figure 7(b) is the measurement result of the light source purely in the case of unstable intensity The measurement results of the reflected signal (optical power meter 2 signal) below are all affected by external adverse factors, resulting in poor linearity. Figure 7(c) shows the measurement curve of the integrated transmission and reflection signals after heterodyne processing, which eliminates the influence of external factors on the measurement curve.
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