CN102539311A - Trace corrosive gas environmental test box - Google Patents
Trace corrosive gas environmental test box Download PDFInfo
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- CN102539311A CN102539311A CN2012100098301A CN201210009830A CN102539311A CN 102539311 A CN102539311 A CN 102539311A CN 2012100098301 A CN2012100098301 A CN 2012100098301A CN 201210009830 A CN201210009830 A CN 201210009830A CN 102539311 A CN102539311 A CN 102539311A
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- corrosive gas
- mass flowmeter
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- 238000012360 testing method Methods 0.000 title claims abstract description 23
- 230000007613 environmental effect Effects 0.000 title claims abstract description 12
- 230000007797 corrosion Effects 0.000 claims abstract description 17
- 238000005260 corrosion Methods 0.000 claims abstract description 17
- 238000011065 in-situ storage Methods 0.000 claims abstract description 14
- 238000006243 chemical reaction Methods 0.000 claims abstract description 10
- 238000011084 recovery Methods 0.000 claims abstract description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 12
- 238000005202 decontamination Methods 0.000 claims description 5
- 230000003588 decontaminative effect Effects 0.000 claims description 5
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000003513 alkali Substances 0.000 claims description 4
- 239000010425 asbestos Substances 0.000 claims description 4
- 239000002808 molecular sieve Substances 0.000 claims description 4
- 229910052895 riebeckite Inorganic materials 0.000 claims description 4
- 239000000741 silica gel Substances 0.000 claims description 4
- 229910002027 silica gel Inorganic materials 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 230000001276 controlling effect Effects 0.000 claims description 2
- 239000000428 dust Substances 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims description 2
- 239000008187 granular material Substances 0.000 claims description 2
- 238000011160 research Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 4
- 238000010790 dilution Methods 0.000 description 6
- 239000012895 dilution Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 210000000416 exudates and transudate Anatomy 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
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Abstract
The invention discloses a trace corrosive gas environmental test box and belongs to the technical field of environment friendliness and material corrosion research. The trace corrosive gas environmental test box comprises a clean air supply module, a trace corrosive gas generation module, a sample corrosion test reaction module, an air recovery module and an in-situ image acquisition system. A multi-gas-path trace corrosive gas environmental test box which can perform in-situ observation on the surface state of a sample and control temperature to be 25 to 80 DEG C, humidity to be 40 to 97 percent and the concentration of the trace corrosive gas to be 10 to 10,000ppb is implemented. The trace corrosive gas environmental test box has the advantages of occupying small floor, along with simple structure, convenience in operation, light pollution, high accuracy, capacity of controlling temperature, humidity and the concentration of polluted air simultaneously and acquiring images of a sample state in real time, and can be applied to scientific research and engineering experimental research.
Description
Technical field
The invention belongs to environmental protection, material corrosion studying technological domain, a kind of temperature control of in-situ observation specimen surface state, control are wet, the microcorrosion property gaseous environment chamber of pilot-gas concentration but particularly provide.
Technical background
Along with the progress of science and technology, the integrated and microminiaturized further lifting of electronic devices and components, the absorption liquid film of denier or corrosion product all can produce serious influence to the performance of electronic devices and components.In case the character of electronic devices and components environmental damage is to form thin liquid film on its metal surface then begin to take place corrosion electrochemistry to react, especially when there being SO
2, H
2S, NO
xWhen the dusty gas, electronic devices and components are corrosion fast, causes device function to exhaust, and makes the total system collapse.Even in atmospheric environment, there is the seldom SO of 1 ppb level concentration
2, H
2S, NO
xDeng harmful gas, also can cause heavy corrosion to electronic equipment, cause electronic failure.For example, the corrosion fault repeatedly takes place in silver-plated electronic devices and components that certain financial company is worth in 200,000,000 yuan the main frame room circuit board fast in the sulfur-bearing air, cause the finance data system repeatedly to be collapsed, and consequence is very serious.
At the early-stage about the corrosion research of trace (ppb magnitude) corrosive gas environment at present, this is limited by the development level of environmental test equipment to a great extent.Traditional gas cylinder distribution---the dusty gas concentration that multistage dilution mode produces can only be accurate to the ppm magnitude, does not far reach the precision of ppb magnitude, and floor area is big, complicated operating process; And the device that minority utilizes osmos tube carrier band and dilution mode to produce corrosive gas can reach the requirement of ppb magnitude; But single source of the gas can only be provided; And can not control temperature and humidity, can not in-situ observation specimen surface state, this far can not satisfy the needs of microcorrosion property gaseous environment test.
Summary of the invention
The object of the present invention is to provide the chamber of a kind of microcorrosion property gaseous environment; The problem that has solved that expensive floor area in the equipment use in the past is big, the device precision is low, source of the gas is single, humiture is uncontrollable, can not in-situ observation realizes the microcorrosion property gaseous environment chamber of the high precision ppb magnitude (10-10000ppb) of a kind of convenience simple in structure, light and handy, multichannel source of the gas, temperature and humidity control, in-situ observation.
The present invention includes pure air and give gas module, microcorrosion property gas generating module, sample corrosion test reaction module, gas recovery module and in-situ image acquisition system.
1. pure air gives the gas module by air compressor, pressure maintaining valve and the dry decontamination pipe be made up of NaOH, discolour silica gel, alkali asbestos, molecular sieve, pressure maintaining valve and tensimeter; In order to form the regulated air source; And with airborne dust granules thing and steam filtration removal, for environmental test chamber provides pure air.
2. microcorrosion property gas generating module is made up of one or more corrosive gas generation systems and pure air system; Described corrosive gas generation systems is made up of second needle-valve, second mass flowmeter, the first self-adaptation temperature control appearance, first calibration cell and osmos tube; First needle-valve, second mass flowmeter are connected through pipeline with osmos tube in order, and osmos tube is arranged in first calibration cell, and the first self-adaptation temperature control appearance is connected with first calibration cell, in order to control the temperature in first calibration cell; Osmos tube provides stable corrosive gas source under steady temperature, second mass flowmeter is used for controlling the flow velocity of carrier band gas, can the gas concentration that carrier band goes out be controlled at 1-1000ppb;
Described pure air system is made up of first needle-valve, first mass flowmeter, gas distributing chamber; Second needle-valve, first mass flowmeter are connected with gas distributing chamber in order;
Described tensimeter is connected with needle-valve in the pure air system through pipeline and corrosive gas generation systems;
The osmos tube principle is made up of interior dress liquid dusty gas and close-fitting with it infiltration cap, can be used for gas standard the source takes place.Its concentration is calculated and can be calculated as follows:
In the formula,
C: the microcorrosion gas concentration (
Mg/m 3 Or
Ppm);
M: the molal weight of etchant gas (
G/mol);
P 0 : standard atmospheric pressure (
Pa);
V 0 : the molar volume of etchant gas (
L/mol);
T 0 : standard temperature (
K);
P: ambient atmosphere pressure (
Pa);
T: the calibration cell temperature (
K);
R: the permeability of osmos tube (
μ g/min);
Q: the carrier band gas flow (
ML/min).
After an osmos tube was given, it sees through rate R was definite value, and the variable concentrations minimum gas is mainly confirmed through regulating carrier band gas flow and calibration cell temperature.
3. sample corrosion test reaction module is made up of temperature control part branch, humidity control section, blower fan, sample stage and gas mixer chamber; The second self-adaptation temperature control appearance is connected with second calibration cell, constitutes the temperature control part branch; The humidity control section comprises humidification source, the 3rd mass flowmeter and self-adaptation humidity-control instrument; The 3rd mass flowmeter is connected with gas mixer chamber 24 through pipeline with the humidification source; The self-adaptation humidity-control instrument is connected with gas mixer chamber, the 3rd mass flowmeter; The 3rd mass flowmeter is realized humidity control through the flow in the feedback signal control humidification source of self-adaptation humidity-control instrument; Blower fan and specimen mounting are arranged in gas mixer chamber; Sample to be tested is positioned on the specimen mounting; The etchant gas that described corrosive gas generation systems is produced mixes the back and gets in the gas mixer chamber in pipeline; Gas distributing chamber in the described pure air system is connected with gas mixer chamber, and all mixed gass are stirred by blower fan.
4. the gas recovery module is carried out filtered and recycled to the tail gas after testing, and removes harmfulness gas wherein, like H
2S, SO
2Deng.
5. the in-situ image acquisition system is made up of long burnt DV and computing machine, and the glass window that can see through gas mixer chamber carries out real-time monitored to the specimen surface state.
The present invention is a kind of specialized equipment of microcorrosion property gaseous environment test, can substitute existing testing equipment, the dusty gas environmental test standard-required in be up to state standards (GB), NACE standard and the iso standard.With traditional gas cylinder distribution---the device of multistage dilution mode compare have the precision height, simple in structure, small and exquisite, cost is low, pollution is little, simple operation and other advantages; The device that utilizes the osmos tube carrier band with other and dilute mode is compared, but has advantages such as gas circuit is many, controllable temperature, controlled wet in-situ observation specimen surface state.
Description of drawings
Fig. 1 is total figure of the concrete formation of the present invention and part perspective part-view.
Among the figure:
1. air compressor, 2. pressure maintaining valve, 3.. NaOH .4. discolour silica gel, 5. alkali asbestos, 6. molecular sieve, 7. pressure maintaining valve, 8. tensimeter, 9. first needle-valve, 10. second needle-valve, 11. first mass flowmeters, 12. second mass flowmeters, 13. first self-adaptation temperature control appearance, 14. first calibration cells, 15. osmos tubes, 16. gas distributing chamber, 17. second self-adaptation temperature control appearance, 18. the 3rd mass flowmeters, 19. humidification sources, 20. self-adaptation humidity-control instruments, 21. blower fans, 22. second calibration cells, 23. specimen mountings, 24. gas mixer chambers, 25. tail gas recycle, 26. long focus video cameras, 27. computing machines.
Embodiment
Fig. 1 is one embodiment of the present invention.
Pure air forms the dry decontamination pipe by air compressor 1, pressure maintaining valve 2 with by NaOH 3, discolour silica gel 4, alkali asbestos 5, molecular sieve 6, pressure maintaining valve 7 and tensimeter 8 for the gas module.Dilution and carrier band air are generated by air compressor 1, are divided into four the tunnel behind the pressure maintaining valve 2 of flowing through, the dry decontamination pipe and get into microcorrosion property gas generating module.
Wherein one the tunnel through the 16 composition pure air systems of first flow meter 11 entering gas distributing chamber with first needle-valve 9, as the secondary dilution gas source.Other three the tunnel gets into one or more corrosive gas generation systems; Second flowmeter 12 through with first needle-valve 10 gets into first calibration cell 14; With exudate in the osmos tube that certain material is housed in the groove 15 or diffusate dilution carrier band to sample corrosion test reaction module; 13 pairs first calibration cells of the first self-adaptation temperature control appearance 14 carry out temperature control, thus the rate of diffusion of control osmos tube 15.
In the corrosion test reaction module, 17 pairs in second self-adaptation temperature control appearance reaction indoor temperature is controlled, 20 pairs the 3rd mass flowmeters 18 of self-adaptation humidity-control instrument and humidifier 19 are controlled, thus the humidity in the control reaction chamber.The running of blower fan 21 can guarantee to react the even of indoor temperature, humidity and dusty gas concentration, the emptying after gas recovery module 25 is handled of the gas after the test.The glass window that the long focus video camera 26 of in-situ image acquisition system sees through the corrosion test reaction module carries out real-time in-situ observation to the sample surfaces state, and carries out record through 27 pairs of images of computing machine.
What point out as possible here is that each parts in the instance that relates in the above-mentioned explanation are a kind of design of preferred embodiments, and design has mainly been considered to be convenient to processing and reduced cost.The present invention has realized many gas circuits microcorrosion property gaseous environment chamber of a kind of temperature control (25-80 ℃), control wet (40-97%), control microcorrosion property gas concentration (10-10000ppb), is suitable for correlative technology fields such as environmental protection, material corrosion research.
Claims (4)
1. microcorrosion property gaseous environment chamber is characterized in that: chamber forms for gas module, microcorrosion property gas generating module, sample corrosion test reaction module, gas recovery module and in-situ image acquisition system by pure air;
Described pure air is connected to form for the gas module successively by air compressor (1), pressure maintaining valve (2), dry decontamination pipe, pressure maintaining valve (7) and tensimeter (8); Pure air gives the gas module in order to form the regulated air source; And with airborne dust granules thing and steam filtration removal, for environmental test chamber provides pure air;
Described microcorrosion property gas generating module is made up of one or more corrosive gas generation systems and pure air system; Described corrosive gas generation systems is made up of second needle-valve (10), second mass flowmeter (12), the first self-adaptation temperature control appearance (13), first calibration cell (14) and osmos tube (15); Second needle-valve (10), second mass flowmeter (12) are connected through pipeline with osmos tube (15) in order; Osmos tube (15) is arranged in first calibration cell (14); The first self-adaptation temperature control appearance (13) is connected with calibration cell (14), in order to control the temperature in first calibration cell (14); Osmos tube (15) provides stable corrosive gas source under steady temperature, second mass flowmeter (12) is used for controlling the flow velocity of carrier band gas, can the gas concentration that carrier band goes out be controlled at 1-1000ppb;
Described pure air system is made up of first needle-valve (9), first mass flowmeter (11), gas distributing chamber (16); Needle-valve (9), first mass flowmeter (11) are connected with gas distributing chamber (16) in order;
Described tensimeter (8) is connected with needle-valve in the pure air system through pipeline and corrosive gas generation systems;
Described sample corrosion test reaction module is made up of temperature control part branch, humidity control section, blower fan (21), specimen mounting (23) and gas mixer chamber (24); Temperature control part divides and is connected with gas mixer chamber (24), and gas mixer chamber (24) is carried out temperature control; The humidity control section is connected with gas mixer chamber (24), and gas mixer chamber (24) is carried out humidity control; , blower fan (21) and specimen mounting (23) are arranged in gas mixer chamber (24); Sample to be tested is positioned on the specimen mounting (23); The etchant gas that described corrosive gas generation systems is produced mixes the back and gets in the gas mixer chamber (24) in pipeline; Gas distributing chamber (16) in the described pure air system is connected with gas mixer chamber (24), and all mixed gass are stirred by blower fan (21);
Described in-situ image acquisition system is made up of long burnt DV (26) and computing machine (27), and the glass window that the in-situ image acquisition system sees through gas mixer chamber (24) carries out real-time monitored to the specimen surface state;
Described gas recovery module (25) is connected with gas mixer chamber (24), is used for the tail gas after the test is carried out filtered and recycled, removes harmfulness gas wherein.
2. a kind of microcorrosion property gaseous environment as claimed in claim 1 chamber is characterized in that: described dry decontamination pipe is connected to form by NaOH (3), discolour silica gel (4), alkali asbestos (5) and molecular sieve (6) successively.
3. a kind of microcorrosion property gaseous environment as claimed in claim 1 chamber; It is characterized in that: described temperature control part is divided into the second self-adaptation temperature control appearance (17) and is connected with second calibration cell (22), and second calibration cell (22) wraps in outside the gas mixer chamber (24).
4. a kind of microcorrosion property gaseous environment as claimed in claim 1 chamber; It is characterized in that: described humidity control section comprises humidification source (19), the 3rd mass flowmeter (18) and self-adaptation humidity-control instrument (20); The 3rd mass flowmeter (18) is connected with gas mixer chamber (24) through pipeline with humidification source (19); Self-adaptation humidity-control instrument (20) is connected with gas mixer chamber (24), the 3rd mass flowmeter (18), and the 3rd mass flowmeter (18) is through the flow in the feedback signal control humidification source (19) of self-adaptation humidity-control instrument (20).
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|---|---|---|---|
| CN 201210009830 CN102539311B (en) | 2012-01-13 | 2012-01-13 | Trace corrosive gas environmental test box |
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|---|---|---|---|
| CN 201210009830 CN102539311B (en) | 2012-01-13 | 2012-01-13 | Trace corrosive gas environmental test box |
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| Publication Number | Publication Date |
|---|---|
| CN102539311A true CN102539311A (en) | 2012-07-04 |
| CN102539311B CN102539311B (en) | 2013-07-03 |
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|---|---|---|---|
| CN 201210009830 Expired - Fee Related CN102539311B (en) | 2012-01-13 | 2012-01-13 | Trace corrosive gas environmental test box |
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