CN102507987A - Integrated optical fiber probe type near-field optical tweezers and method for measuring near-field optical trapping force by AFM (Atomic Force Microscope) - Google Patents
Integrated optical fiber probe type near-field optical tweezers and method for measuring near-field optical trapping force by AFM (Atomic Force Microscope) Download PDFInfo
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Abstract
The invention discloses integrated optical fiber probe type near-field optical tweezers and a method for measuring near-field optical trapping force by an AFM (Atomic Force Microscope). The AFM is used for measuring relation curves between acting forces and probe-base distances before and after light transmission, and the method is used for detecting the near field optical trapping force according to the two forces-distance curves. In a process that the AFM probe approaches and leaves a base surface to acquire the force-distance curves, by means of adding a near-field optical field outside the optical fiber probe type near-field optical tweezers, the AFM probe is exposed to the action of the optical trapping force in the process of converting an evanescent field into a homogeneous field. By the comparison of the force-distance curves before and after light transmission, the near-field optical trapping force can be calibrated for the optical fiber probe type near-field optical tweezers. According to the invention, the difficulty of a fluid mechanics detection method is overcome, and a method for measuring the optical trapping force distribution of laser near-field optical tweezers is provided.
Description
Technical field
The present invention relates near field optic and nano-manipulation field, particularly a kind of integrated optical fiber sonde-type near-field optical tweezers and AFM measure the method for near field ligh trap power.
Background technology
Utilize the acting force of the skin ox magnitude that mechanics effect produced of light; Far field light tweezer can be realized accurate location and the operation to fine particle (sub-micron is to tens of microns sizes) at the laser spot place; But owing to receive limiting it and catching size and only be confined to micron dimension of optical diffraction limit; In addition because the elongation of focused spot size unnecessary capture particles can occur near the optics potential well, so it catches precision and stability also will be affected.Because the ultimate principle of optical manipulation method is the action effect of ligh trap power to object,, utilize body surface can realize directional operation equally in the near field of decay rapidly to particulate so the optical manipulation of particulate is not limited to the focused beam in far field.Have a kind of evanescent field of rapid decay in the body surface sub-wavelength zone (near-field region), this local evanescent field plays a leading role in near-field region.Can this evanescent field be converted into propagation field when particulate places evanescent field, photon momentum changes in conversion process, and correspondingly the momentum of particulate also changes, thereby particulate is produced the effect of power.Optical fiber probe type near-field optical tweezers promptly utilizes this local evanescent field to come particulate is carried out nano-manipulation; This method can break through diffraction limit; Might realize the operation of tens nanoparticles; Because reach and capture space are very little, this method can also be eliminated the sort of background interference phenomenon in the light tweezer of far field in addition.Under nanometer operating system miniaturization and integrated trend, to compare with far field light tweezer, optical fiber probe type near-field optical tweezers is more easy of integration among system, so this method will become nanoparticle and biologic single molecular one of the most strong operation tool.Ligh trap power is one of important parameter of optical fiber probe type near-field optical tweezers operating performance; Therefore need demarcate ligh trap power in the near field optic operating process; But owing to lack the measurement near field ligh trap force signal, this high-precision nano-manipulation technology has received great restriction.
Light tweezer hydrodynamic methods commonly used in far field is demarcated and is measured ligh trap power.In static relatively liquid environment with particle capture after; The mobile relative liquid environment of particulate that makes through the control sample cell produces a directed movement; If translational speed is greater than the velocity of escape of particulate in the optics potential well; The fluid viscous force that particulate receives will be greater than ligh trap power, the viscosity resistance that balances each other with ligh trap power when utilizing this speed can calculate the relative surrounding liquid motion of particulate, thus realization is to the ligh trap force measurement.When using this method the ligh trap power of optical fiber probe type near-field optical tweezers being measured; Because the ligh trap power of optical fiber probe type near-field optical tweezers and catch size and flying ox level and nanoscale respectively, therefore having higher requirement aspect the shift position of accurate control sample cell and the translational speed.In addition, because therefore the displacement of the particulate that in ligh trap power measuring process, need be hunted down in the corresponding moment of record needs a cover can realize more the image demonstration and the data handling system of high precision position shift measurement.Through record to the particle manipulating process; The particulate of gained moves the positional information that image sequence has all comprised the corresponding moment; Image is handled the shift in position that the particulate image border is directly compared in the back; Can obtain the particle displacement information in the corresponding moment, but at present image processing techniques is difficult in nanometer range the influence of clutter reduction signal and non-echo signal effectively, so the high precision position shift measurement has implemented certain difficulty.It is thus clear that; Since the ligh trap power of optical fiber probe type near-field optical tweezers and capture particles size all will be much smaller than the far field the corresponding size of light tweezer; Sensitivity and accuracy of observation requirement to system when measuring ligh trap power are higher, therefore are difficult to utilize hydrodynamic methods that near field ligh trap power is measured and demarcated.For realizing, need to seek a kind of new detection method, through to the research of near field ligh trap power and then understand the operating performance of optical fiber probe type near-field optical tweezers near field ligh trap force measurement.
Summary of the invention
The objective of the invention is to for overcoming the inconvenience of fluid mechanics detection method; The method that a kind of integrated optical fiber sonde-type near-field optical tweezers and AFM measure near field ligh trap power is proposed; Use this method to obtain that the AFM probe approaches and the power-distance Curve when leaving substrate surface, draw the size and the distribution situation of near field ligh trap power through relatively adding power-distance Curve before and after the near field.
The ultimate principle that realizes near field ligh trap power quantitative measurment is to utilize near the evanescent field disturbance is produced the optical fiber probe ligh trap power to cause that the AFM probe approaches and the variation of power-distance Curve when leaving substrate.Theoretical according near field optic; Light field at body surface comprises two kinds of optics compositions; A kind of is the propagation field that can propagate to the distant place that is produced by the object coarse structure; Another kind be the local that produces by the object nanostructured in body surface, but outside body surface the non-radiation evanescent field of decay rapidly.Optical diffraction limit is based upon on the basis of propagation field, and the near field evanescent field is not retrained by it, so the evanescent field that field optical fibre probe produced do not receive the restriction of diffraction limit, can in the distance range of wavelength, show local strong variations.Through adopting a little limited object (like the AFM probe) can evanescent field converted to propagation field and produce new evanescent field, finite be known from experience the effect that receives ligh trap power in transfer process.Therefore; Add a near field light field if approach and leave in the process that substrate surface obtains power-distance Curve through optical fiber probe at the AFM probe; The limited nanometer pinpoint structure of AFM probe can convert evanescent field to propagation field, and therefore afm tip receives the effect of ligh trap power.The ligh trap force direction that the AFM probe receives can judge that the big I of ligh trap power is come out by Finite-Difference Time-Domain Method and Maxwell's stress tensor integral and calculating according to the photodynamics principle.Under the influence of ligh trap power; Add the acting force that obtains behind the near field relation curve that probe-basal spacing leaves is had difference on details; Through relatively adding the power-distance relation curve that obtains respectively before and after the near field, can realize optical fiber probe type near-field optical tweezers ligh trap force measurement.
To the integrated optical fiber sonde-type near-field optical tweezers of the present invention's proposition and the method for AFM measurement near field ligh trap power; Optical fiber probe type near-field optical tweezers system comprises that LASER Light Source, light path adjustment and detection means, three-dimensional adjustment platform and field optical fibre probe form near field local evanescent field, and the AFM system comprises that piezoelectric ceramic scanatron, feedback control circuit and laser deflection and pick-up unit come obtaining of realizable force-distance Curve.The near field probe adopts most advanced and sophisticated metal-coated membrane optical fiber probe with nano aperture; This aperture type optical fiber probe is processed by optical fiber/silicon/silicon nitride material; At single mode or have on the most advanced and sophisticated conical surface of bare fibre probe of graded index and plate layer of metal film, the tip has the logical light aperture of diameter less than incident wavelength.Optical fiber probe type near-field optical tweezers is introduced sample cell through AFM system sample chamber with outside interface, moving and progressively scan the integrated of realization system through the AFM probe.
Technical scheme of the present invention is: a kind of integrated optical fiber sonde-type near-field optical tweezers and AFM measure the method for near field ligh trap power; Adopt the system architecture of measuring near field ligh trap power; This system architecture comprises optical fiber probe type near-field optical tweezers system and AFM system, and optical fiber probe type near-field optical tweezers system comprises semiconductor diode laser, flange adjustable optical attenuator, optical fiber polarisation spinner, optical fiber splitter, Fiber Dynamometer, single mode field optical fibre probe, three-dimensional adjustment platform and sample cell; The AFM system comprises that piezoelectric ceramic scanatron, feedback control circuit, laser instrument, position detector and image show and data handling system; Semiconductor laser adds the flange adjustable optical attenuator after protecting inclined to one side tail optical fiber output; Regulate power through regulating drive source electric current and attenuator; Then through optical fiber polarisation spinner adjustment polarization direction; Tell the power monitoring that beam of laser is used for Fiber Dynamometer by optical fiber splitter subsequently, another bundle optically-coupled gets into the single mode field optical fibre probe, said method comprising the steps of:
Coarse positioning: utilize three-dimensional adjustment platform to regulate the insertion angle of optical fiber probe, and move to AFM probe place;
Thin location: approach optical fiber probe through piezoelectric ceramic scanatron control AFM probe, find the tip location of optical fiber probe accurately;
Fine positioning: constantly adjust the center of scanning imagery, the distance between optical fiber probe and the AFM probe is accurately remained in the optical fiber probe pore diameter range;
Curved measurement before the logical light: control AFM probe approaches substrate surface, leaves substrate then, and the power of being experienced through record AFM probe obtains power-distance Curve;
Curved measurement behind the logical light: with the logical light of optical fiber probe type near-field optical tweezers, add a near field light field, measure once more afterwards that the AFM probe approaches and the power-distance Curve when leaving substrate surface at fiber optic probe tip.
In another embodiment of the present invention; The step of said coarse positioning comprises the dip plane that combines three-dimensional adjustment platform and image demonstration and data handling system control optical fiber probe to be close to substrate; Parallel to guarantee its central axis with substrate surface; Further control the optical fiber probe perforation hole afterwards in suprabasil position, the distance that guarantees its central axis and substrate surface is near field range; Said thin localization step comprises through automatic prober approaches; The AFM probe is remained in the scope of 10 μ m on the optical fiber probe needle surface; On image demonstration and data handling system, observe optical fiber probe and AFM probe simultaneously; Utilize piezoelectric ceramic scanatron control AFM probe to move to the optical fiber probe needle point is most advanced and sophisticated, find optical fiber probe needle point tip after, under the pattern of rapping, utilize AFM to begin the optical fiber probe upper surface is carried out scanning imagery.
In another embodiment of the present invention, described optical fiber probe type near-field optical tweezers is made up of the low-loss coupling optical path of full optical fiber,
In another embodiment of the present invention, the clean silicon chip that described substrate contains the silicon dioxide oxide layer by the surface is formed, and the substrate pitch angle is identical with the cone angle of optical fiber probe.
In another embodiment of the present invention, described optical fiber probe is made up of the metal-coated membrane optical fiber probe that the tip has nano aperture, and this aperture fiber optic probe tip has the logical light aperture of diameter less than incident wavelength.
In another embodiment of the present invention, APC type joint style is adopted in the system architecture coupling part, and at the incident end of field optical fibre probe, the mode of melting welding through heat is carried out the low-loss coupling.
In another embodiment of the present invention, fiber core is a silicon dioxide, and the metal film of fiber outer layer is an aluminium lamination, and the AFM probe is the silicon probe.
In another embodiment of the present invention, optical fiber probe perforation hole diameter is 200nm, and metallic diaphragm thickness 140nm, cone angle get 90 °, and fiber core refractive index is 1.5, and it is 1 air that optical fiber probe places refractive index.
In another embodiment of the present invention, optical fiber probe is with respect to AFM probe vertical incidence, and distance is made as 70nm between two probes.
The method that this integrated optical fiber sonde-type near-field optical tweezers that the present invention proposes and AFM measure near field ligh trap power has following principal character:
(1) the low-loss coupling optical path of full optical fiber avoids the use of space optics, removes the restriction of optical table, can improve the flexibility ratio of optical fiber probe type near-field optical tweezers system;
(2) the mutually integrated near field ligh trap power detection system of optical fiber probe type near-field optical tweezers and AFM simple in structure, be convenient to adjustment, cost is low;
(3) adopt AFM to accomplish near field ligh trap force measurement, different with traditional fluid mechanics measuring method;
(4) capture systems can separate with measuring system, to changing equipment such as optical fiber probe and sample cell in the optical fiber probe type near-field optical tweezers system bigger degree of freedom is arranged.
The method that this integrated optical fiber sonde-type near-field optical tweezers that the present invention proposes and AFM measure near field ligh trap power has following advantage:
(1) overcome the problems such as measurement with displacement that move that precision in the fluid mechanics detection method depends on sample cell, can realize the quantitative measurment of ligh trap power in the optical fiber probe type near-field optical tweezers, for the experimental study of near field optic operation bring convenient;
(2) utilize the AFM probe to produce and the mode of gathering the near field optic disturbance is obtained the situation of change of ligh trap power in the optical fiber probe type near-field optical tweezers, can enlarge the range of application that near field ligh trap power is measured;
(3) simple to operation, but the variation of real-time detection near field ligh trap power is demarcated the ligh trap power of optical fiber probe type near-field optical tweezers quantitatively;
(4) add near field apparatus and be made up of optical fiber probe type near-field optical tweezers, survey with control gear and form by existing AFM system, rational in infrastructure, technical requirement is not high, and cost is lower, and is easy to maintenance.
Description of drawings
The near field ligh trap power that Fig. 1 receives for AFM probe in the method for integrated optical fiber sonde-type near-field optical tweezers and AFM measurement near field ligh trap power: 1-fiber core; The 2-metal film; The 3-AFM probe;
Figure 1A is the numerical evaluation model that integrated optical fiber sonde-type near-field optical tweezers and AFM measure near field ligh trap power;
Figure 1B be integrated optical fiber sonde-type near-field optical tweezers and AFM when measuring near field ligh trap power x to ligh trap power distribute;
Fig. 2 for the mutually integrated near field ligh trap power measuring process synoptic diagram of optical fiber probe type near-field optical tweezers and AFM and with power-distance Curve of obtaining: the 4-laser instrument; The 5-position detector; The 6-substrate;
Fig. 2 A adds the synoptic diagram that AFM before the near field obtains power-distance Curve;
Fig. 2 B adds the synoptic diagram that AFM behind the near field obtains power-distance Curve;
Power-distance Curve and near field ligh trap power that Fig. 2 C obtains when being integrated optical fiber sonde-type near-field optical tweezers and AFM measurement near field ligh trap power are measured curve;
Fig. 3 is optical fiber probe type near-field optical tweezers and the mutually integrated near field ligh trap force measuring system synoptic diagram of AFM: the 7-semiconductor laser; 8-protects inclined to one side tail optical fiber; The 9-attenuator; 10-optical fiber polarisation spinner; The 11-optical fiber splitter; The 12-Fiber Dynamometer; The 13-optical fiber probe; The three-dimensional adjustment of 14-platform; The 15-AFM pedestal; The 16-sample cell; The 17-piezoelectric ceramic scanatron; The 18-AFM probe base; The 19-feedback control circuit; The 20-AFM image shows and data handling system.
Embodiment
Below in conjunction with embodiment and accompanying drawing the present invention is described further:
The near field ligh trap power that Fig. 1 receives for AFM probe in the method for integrated optical fiber sonde-type near-field optical tweezers and AFM measurement near field ligh trap power.The numerical evaluation model is shown in Figure 1A, and optical fiber probe can be divided into nanosection, micron district and three parts of conducting region.Wherein nanosection is the workspace of optical fiber probe, mainly plays the light harvesting effect; The micron district is the transitional region of optical fiber probe, and the variation of optical fiber structure causes the reduction of transfer efficiency in this zone; The same light conducting signal that is used for of conducting region with ordinary optic fibre.When optical maser wavelength during greater than the diameter in optical fiber probe micron district, the phenomenon that partial reflection, part are revealed will appear in the laser that transmits in the optical fiber, and the laser of revealing away forms the evanescent field of rapid decay at the needle point place.Employing is carried out emulation based on the near field ligh trap power computing method of three-dimensional Finite-Difference Time-Domain Method and Maxwell's stress tensor, can obtain the distribution situation that x axially goes up ligh trap power.Fiber core 1 is a silicon dioxide in the calculating, and the metal film 2 of fiber outer layer is an aluminium lamination, and AFM probe 3 is the silicon probe.Optical fiber probe perforation hole diameter is 200nm, and metallic diaphragm thickness is 140nm, and cone angle is got 90 °, and fibre core 1 refractive index is 1.5, and it is 1 air that optical fiber probe places refractive index.Incident light is got the uniform plane wave that wavelength is 808nm, and also edge-z direction is from the big end incident of optical fiber probe along y direction polarization, and each electric field component is respectively E
x=E
z=0, E
y=-8.85 * 10
5V/m.Radius-of-curvature is 10nm, highly for the AFM probe 3 of 50nm places near the optical fiber probe needle point, be that the refractive index of AFM probe 3 under the 808nm situation is 3.68 in incident wavelength.Optical fiber probe 13 is with respect to AFM probe 3 vertical incidence, and distance is made as 70nm between two probes.Optical fiber probe needle point aperture center is made as true origin, and the incident direction of laser and polarization direction are shown in K and E.The whole three dimensions of required calculating is divided into 320 * 315 * 210 grid cell arrays; Each cell is respectively Δ x=Δ y=Δ z=3nm in the mesh space step-length of xyz coordinate direction; Time step is Δ t=Δ x/2c, and wherein c is the light velocity in the vacuum.The ligh trap power of AFM probe 3 on x in the near field is axial distributes shown in Figure 1B.Because light field has symmetry, be positioned at the ligh trap power distribution on the negative semiaxis of x axle so only provided AFM probe 3 in the drawings.Among the figure ordinate be x to ligh trap power, horizontal ordinate is the distance of stray fiber probe axis, the negative value of ligh trap power representes that light field points to the direction of optical fiber probe axis to the acting force of AFM probe 3 in the curve, promptly has AFM probe 3 is attracted to the trend on the axis.Can see that x has experienced one to ligh trap power and increased the process that afterwards reduces earlier, in the trend of x AFM probe 3 oriented probe axe movements under the effect of ligh trap power.Because light field has symmetry, when AFM probe 3 is positioned at the axle center suffered x to ligh trap power to make a concerted effort be zero.
Fig. 2 for the mutually integrated near field ligh trap power measuring process synoptic diagram of optical fiber probe type near-field optical tweezers and AFM and with power-distance Curve of obtaining.Add AFM obtains power-distance Curve before and after the near field process respectively shown in Fig. 2 A, Fig. 2 B.Optical fiber probe places in the substrate 6 of inclination, because substrate 6 pitch angle are identical with the cone angle of optical fiber probe, the optical fiber probe central axis can concern with substrate 6 surperficial keeping parallelisms.The needle point height of AFM probe 3 is much larger than the outgoing aperture of optical fiber probe at this moment; The horizontal range with AFM probe 3 and optical fiber probe be controlled at the optical fiber probe pore diameter range with interior situation under, AFM probe 3 can be experienced the action effect that ligh trap power is brought when adding the near field.AFM probe 3 approaches and leaves in the process of substrate 6 before and after logical light; Respectively the relation curve of acting force and 6 distances of AFM probe 3-substrate is measured; Power-distance Curve when only getting AFM probe 3 and approach substrate 6 for ease of analyzing is shown in dotted line and dotted line among Fig. 2 C.Can see that from the result when AFM probe 3 approached substrate 6 vertically downward, needle point received the effect of Van der Waals force before the logical light, this moment, cantilever produced faint distortion downwards.Owing to there is droplet liquid, cantilever produces less distortion saltus step under the effect of capillary force when needle point contacts with substrate 6.AFM probe 3 needle points continue when pressing down, and probe produces distortion upwards because of the effect that receives electrostatic force makes cantilever.Because the contact repulsion that produces when further pressing down is ligh trap power much larger than the near field, the power-distance Curve in the time of therefore need not considering further to press down.Power-the distance Curve that obtains behind the logical light similarly, but because some variations appear in the power-distance Curve that exists of near field ligh trap power on details.Through the comparative analysis to two power-distance Curve, the ligh trap power that obtains optical fiber probe type near-field optical tweezers is perpendicular to the situation of change on the optical fiber probe axis direction, shown in solid line among Fig. 2 C.Can see that from measurement result ligh trap power is consistent to ligh trap power change curve with the x that obtains through numerical evaluation at the change curve of x on axially, so integrated optical fiber sonde-type near-field optical tweezers and AFM can realize the demarcation near field ligh trap power.
In optical fiber probe type near-field optical tweezers ligh trap force measurement and calibration process, the method for the integrated optical fiber sonde-type near-field optical tweezers that the present invention proposes and AFM measurement near field ligh trap power has measurement three partial functions of integrated and power-distance Curve of formation, optical fiber probe and the AFM probe 3 of near field ligh trap power.Because the needle point of optical fiber probe aligns with the tilting table of silicon base 6; Thereby avoided the interference and collision between optical fiber probe and the AFM probe 3; In AFM probe 3 approaches and leave the process on substrate 6 surfaces, place simultaneously AFM probe 3 in the optical fiber probe pore diameter range can experience the action effect of ligh trap power when adding the near field, so the near field ligh trap power detection method that the present invention proposes can be realized ligh trap force measurement in the optical fiber probe type near-field optical tweezers.Compare with the fluid mechanics detection method; The near field ligh trap power detection system cost that the present invention proposes is low; Simple in structure, be prone to install, the situation of change of quantitative test near field ligh trap power easily can improve the nano-manipulation ability of optical fiber probe type near-field optical tweezers greatly.
Embodiment: adopt the mutually integrated method of optical fiber probe type near-field optical tweezers and AFM to realize the detection of near field ligh trap power.
This method structural representation is as shown in Figure 3.The system architecture that integrated optical fiber sonde-type near-field optical tweezers that the present invention proposes and AFM measure near field ligh trap power comprises optical fiber probe type near-field optical tweezers system and AFM system: optical fiber probe type near-field optical tweezers system comprises semiconductor diode laser 7, flange adjustable optical attenuator 9, optical fiber polarisation spinner 10, optical fiber splitter 11, Fiber Dynamometer 12, single mode field optical fibre probe 13, three-dimensional adjustment platform 14 and sample cell 16; The AFM system comprises that piezoelectric ceramic scanatron 17, feedback control circuit 19, laser instrument 4, position detector 5 and image show and data handling system 20.Semiconductor laser 7 adds flange adjustable optical attenuator 9 after protecting inclined to one side tail optical fiber 8 outputs; Regulate power through regulating drive source electric current and power attenuator 9; Then through optical fiber polarisation spinner 10 adjustment polarization directions; Tell beam of laser by optical fiber splitter 11 subsequently and give the monitoring of Fiber Dynamometer 12 rate of doing works, another bundle optically-coupled gets into single mode field optical fibre probe 13.Consider the influence of back reflected laser to light source power stability, APC type joint style is adopted in the optical device coupling part, and at the incident end of field optical fibre probe 13, the mode of melting welding through heat is carried out the low-loss coupling.The three-dimensional adjustment of this near field ligh trap force measuring method utilization platform 14 places single mode field optical fibre probe 13 in the substrate 6 of sample cell 16 medium dips; Wherein substrate 6 pitch angle are identical with the cone angle of optical fiber probe 13; Optical fiber probe 13 central axis and substrate 6 surperficial keeping parallelisms, and the needle point height of AFM probe 3 is much larger than the outgoing aperture of optical fiber probe 13.By the piezoelectric ceramic scanatron 17 of AFM, the pore diameter range that the horizontal range of AFM probe 3 and optical fiber probe 13 is controlled at optical fiber probe 13 is with under the interior situation.Utilize the output power of Fiber Dynamometer 12 monitorings semiconductor diode laser 7 after flange adjustable optical attenuator 9 is regulated; Through the acting force that obtains respectively before and after the logical light of comparative analysis relation curve, optical fiber probe type near-field optical tweezers is being measured perpendicular to the ligh trap power on optical fiber probe 13 axis directions 6 distances of AFM probe 3-substrate.
The step that integrated optical fiber sonde-type near-field optical tweezers and AFM measure near field ligh trap power comprises:
Coarse positioning: utilize three-dimensional adjustment platform to regulate the insertion angle of optical fiber probe, and move to AFM probe place;
Thin location: approach optical fiber probe through piezoelectric ceramic scanatron control AFM probe, find the tip location of optical fiber probe accurately;
Fine positioning: constantly adjust the center of scanning imagery, the distance between optical fiber probe and the AFM probe is accurately remained in the optical fiber probe pore diameter range;
Curved measurement before the logical light: control AFM probe approaches substrate surface, leaves substrate then, and the power of being experienced through record AFM probe obtains power-distance Curve;
Curved measurement behind the logical light: with the logical light of optical fiber probe type near-field optical tweezers, add a near field light field, measure once more afterwards that the AFM probe approaches and the power-distance Curve when leaving substrate surface at fiber optic probe tip.
The concrete steps that specify integrated optical fiber sonde-type near-field optical tweezers and AFM measurement near field ligh trap power in conjunction with Fig. 3 are following:
(1) combine three-dimensional adjustment platform 14 and afm image demonstration and data handling system 20 control optical fiber probes 13 to be close to the dip plane of substrate 6, parallel to guarantee its central axis with substrate 6 surfaces.Further control the position of optical fiber probe 13 perforation holes in substrate 6 afterwards, the distance that guarantees its central axis and substrate 6 surfaces is near field range;
(2) approach through automatic prober, AFM probe 3 is remained in the scope of 10 μ m on optical fiber probe 13 needle surfaces, this moment, afm image demonstration and data handling system 20 can be observed optical fiber probe 13 and AFM probe 3 simultaneously.Utilize piezoelectric ceramic scanatron 17 control AFM probes 3 to move to optical fiber probe 13 needle points are most advanced and sophisticated, find optical fiber probe 13 needle point tips after, under the pattern of rapping, utilize AFM to begin optical fiber probe 13 upper surfaces are carried out scanning imagery;
(3) adopt repeatedly skew setting, the horizontal range of AFM probe 3 with optical fiber probe 13 is controlled in the pore diameter range of optical fiber probe 13 through the scanning imagery mode;
(4) under the situation of obstructed light, control AFM probe 3 approaches substrate 6 surfaces, leaves substrate 6 then, and the power of being experienced through record AFM probe 3 is obtained the power-distance Curve that adds before the near field;
(5) output power of adjustment semiconductor laser 7 is controlled AFM probe 3 equally and is approached substrate 6 surfaces to certain value, leaves substrate 6 then, notes the power-distance Curve that adds behind the near field.Through relatively adding the power-distance relation curve that obtains respectively before and after the near field, can realize near field ligh trap force measurement.
Described optical fiber probe type near-field optical tweezers is made up of the low-loss coupling optical path of full optical fiber.Described substrate contains SiO by the surface
2The clean silicon chip of oxide layer is formed, and the substrate pitch angle is identical with the cone angle of optical fiber probe.
Described optical fiber probe is made up of the metal-coated membrane optical fiber probe that the tip has nano aperture, and this aperture fiber optic probe tip has the logical light aperture of diameter less than incident wavelength.
Described AFM probe produces optical disturbance in the optical fiber probe near field range method is that laser coupled is advanced optical fiber probe; Tip at probe forms the evanescent field of decaying rapidly along three-dimensional; Its limited nanometer pinpoint structure converted evanescent field to propagation field after the AFM probe placed this evanescent field, and afm tip receives the effect of ligh trap power in transfer process.
Described measurement AFM probe approach and when leaving substrate surface acting force the relation curve that probe-basal spacing leaves is carried out before adding the near field He after adding the near field respectively.
Cantilever produced distortion downwards and AFM probe and only receives electrostatic force not contacted repulsion to make the time spent cantilever and produce the upwards zone of distortion, can realize near field ligh trap force measurement through the difference on two kinds of power of comparative analysis-distance Curve details when the difference of described two kinds of power-distance Curve was present in the AFM probe and receives Van der Waals force with capillary force action.
Claims (9)
1. integrated optical fiber sonde-type near-field optical tweezers and AFM measure the method for near field ligh trap power; Adopt the system architecture of measuring near field ligh trap power; This system architecture comprises optical fiber probe type near-field optical tweezers system and AFM system, and optical fiber probe type near-field optical tweezers system comprises semiconductor diode laser (7), flange adjustable optical attenuator (9), optical fiber polarisation spinner (10), optical fiber splitter (11), Fiber Dynamometer (12), single mode field optical fibre probe (13), three-dimensional adjustment platform (14) and sample cell (16); The AFM system comprises that piezoelectric ceramic scanatron (17), feedback control circuit (19), laser instrument (4), position detector (5) and image show and data handling system (20); Semiconductor laser (7) adds flange adjustable optical attenuator (9) after protecting inclined to one side tail optical fiber (8) output; Regulate power through regulating drive source electric current and attenuator (9); Then through optical fiber polarisation spinner (10) adjustment polarization direction; Tell the power monitoring that beam of laser is used for Fiber Dynamometer (12) by optical fiber splitter (11) subsequently, another bundle optically-coupled gets into single mode field optical fibre probe (13), said method comprising the steps of:
Coarse positioning: utilize three-dimensional adjustment platform to regulate the insertion angle of optical fiber probe, and move to AFM probe place;
Thin location: approach optical fiber probe through piezoelectric ceramic scanatron control AFM probe, find the tip location of optical fiber probe accurately;
Fine positioning: constantly adjust the center of scanning imagery, the distance between optical fiber probe and the AFM probe is accurately remained in the optical fiber probe pore diameter range;
Curved measurement before the logical light: control AFM probe approaches substrate surface, leaves substrate then, and the power of being experienced through record AFM probe obtains power-distance Curve;
Curved measurement behind the logical light: with the logical light of optical fiber probe type near-field optical tweezers, add a near field light field, measure once more afterwards that the AFM probe approaches and the power-distance Curve when leaving substrate surface at fiber optic probe tip.
2. method according to claim 1 is characterized in that,
The step of said coarse positioning comprises the dip plane that combines three-dimensional adjustment platform (14) and image demonstration and data handling system (20) control optical fiber probe (13) to be close to substrate (6); Parallel to guarantee its central axis with substrate (6) surface; Further control the position of optical fiber probe (13) perforation hole in substrate (6) afterwards, the distance that guarantees its central axis and substrate (6) surface is near field range;
Said thin localization step comprises through automatic prober approaches; AFM probe (3) is remained in the scope of 10 μ m on optical fiber probe (13) needle surface; On image demonstration and data handling system (20), observe optical fiber probe (13) and AFM probe (3) simultaneously; Utilize piezoelectric ceramic scanatron (17) control AFM probe (3) most advanced and sophisticated mobile to optical fiber probe (13) needle point; After finding optical fiber probe (13) needle point tip, under the pattern of rapping, utilize AFM to begin optical fiber probe (13) upper surface is carried out scanning imagery.
3. method according to claim 1 and 2 is characterized in that, described optical fiber probe type near-field optical tweezers is made up of the low-loss coupling optical path of full optical fiber.
4. according to a described method among the claim 1-3, it is characterized in that the clean silicon chip that described substrate contains the silicon dioxide oxide layer by the surface is formed, the substrate pitch angle is identical with the cone angle of optical fiber probe.
5. according to a described method among the claim 1-4, it is characterized in that described optical fiber probe is made up of the metal-coated membrane optical fiber probe that the tip has nano aperture, this aperture fiber optic probe tip has the logical light aperture of diameter less than incident wavelength.
6. according to a described method among the claim 1-5, it is characterized in that APC type joint style is adopted in the system architecture coupling part, at the incident end of field optical fibre probe (13), the mode of melting welding through heat is carried out the low-loss coupling.
7. according to a described method among the claim 1-6, it is characterized in that fiber core (1) is a silicon dioxide, the metal film of fiber outer layer (2) is an aluminium lamination, and AFM probe (3) is the silicon probe.
8. according to a described method among the claim 1-7, it is characterized in that optical fiber probe perforation hole diameter is 200nm, metallic diaphragm thickness 140nm, cone angle get 90 °, and fibre core (1) refractive index is 1.5, and it is 1 air that optical fiber probe places refractive index.
9. according to a described method among the claim 1-8, it is characterized in that optical fiber probe (13) is with respect to AFM probe (3) vertical incidence, and distance is made as 70nm between two probes.
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