CN102476237A - Coaxial positioning laser precise processing device - Google Patents
Coaxial positioning laser precise processing device Download PDFInfo
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- CN102476237A CN102476237A CN 201010554322 CN201010554322A CN102476237A CN 102476237 A CN102476237 A CN 102476237A CN 201010554322 CN201010554322 CN 201010554322 CN 201010554322 A CN201010554322 A CN 201010554322A CN 102476237 A CN102476237 A CN 102476237A
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Abstract
The invention relates to a coaxial positioning laser precise processing device which is used for conveniently realizing the direct coupling of a diffraction-free light beam and a nozzle micro-pore and is used for a micro laser beam precise processing optical device for laser precision processing. The coaxial positioning laser precise processing device is provided with a laser device, a visible light source, a plane mirror, a beam-expanding collimator, an axicon, an optical window, a pressure fluid chamber and a nozzle micro-pore, wherein the plane mirror is located in front of the laser device and the visible light source; a laser beam emitted from the laser device is coupled with the light beam of the visible light source through the plane mirror; the beam-expanding collimator is located in front of the plane mirror; the axicon is located in front of the beam-expanding collimator; the pressure fluid chamber is located in front of the axicon; the optical window is arranged at the top of the pressure fluid chamber; the nozzle micro-pore is arranged at the bottom of the pressure fluid chamber; and the light beam after being coupled by the plane mirror is coaxial with the beam-expanding collimator, the axicon, the optical window and the nozzle micro-pore.
Description
Technical field
The invention belongs to a kind of Precision Machining device field, concrete relate to a kind of coaxial positioning laser accurate process equipment.
Background technology
The Richerzhagen Bernold of polytechnical university of Swiss Confederation has studied the phenomenon in the intrafascicular light conducting of water; And it is developed into a kind of Micrometer-Nanometer Processing Technology; Become an international monopoly technology (WO 95/32834), it installs shown in Fig. 1, adopts low pressure to produce fine water-jet a fluid stream 16; Simultaneously laser beam n being focused on the nozzle micropore with traditional positive lens 12 exports ingeniously; Utilize the total reflection effect of laser beam at the contact-making surface of water and air two media, the guiding laser beam acts on workpiece to be machined, and its effect is similar to the method for conventional glass optical fiber.Problems such as that this technology can solve is less to effective processing thickness of workpiece in the conventional laser processing, there is tapering in machined surface and coarse; But, require the strict coupling in condenser lens focus and nozzle micropore center, in addition owing to adopted condenser lens; There is no visible light coaxial positioning indication in existing water guiding laser system; System's assembling and adjusting difficulty, processing location inaccuracy can't realize with shortcomings such as machine testings.
It is little and Energy distribution is even that the diffraction light-free bundle has a center spot diameter, the characteristic that the collimation scope is long.Utilize the diffraction light-free bundle that workpiece is added man-hour; The dynamic range of working depth is big; Susceptibility to location of workpiece error in no range of diffraction is zero, and is strong to the flatness adaptability of surface of the work, and neither needs accurate focusing along optical axis direction; Also need not to consider the problem of parfocalization, processing such as the laser accurate cutting that can realize ideal, punching.
Summary of the invention
The objective of the invention is to deficiency, a kind of coaxial positioning laser accurate process equipment is provided, can realize easily that diffraction light-free bundle and nozzle micropore directly are coupled, be used for the micro laser beam precise finishing optical device of laser accurate processing to the prior art existence.
The present invention is provided with laser instrument, visible light source, level crossing, beam-expanding collimation device, axicon, optical window, pressurized fluid chamber and nozzle micropore.
Level crossing is positioned at laser instrument and visible light source the place ahead; The light beam of laser instrument emitted laser bundle and visible light source closes through the level crossing lotus root, and the beam-expanding collimation device is positioned at level crossing the place ahead, and axicon is positioned at beam-expanding collimation device the place ahead; Pressurized fluid chamber is positioned at axicon the place ahead; Optical window is located at the pressure fluid top of chamber, and the nozzle micropore is located at the pressurized fluid chamber bottom, and the light beam after the level crossing coupling is coaxial with beam-expanding collimation device, axicon, optical window and nozzle micropore.
Said laser instrument adopts the laser instrument of power bracket at watt level to hectowatt grade.As can adopt the Nd of 1.06 μ m wavelength: the YAG solid state laser.
Said visible light source can adopt common white radiant or low-power visible light wave range laser.Can adopt the 5W Halogen lamp LED like visible light source, or power is the He – Ne laser instrument of the 0.633 μ m wavelength of 3mW.
Said beam-expanding collimation device can adopt the beam-expanding collimation device of inverted telescope structure, as omiting or Kepler's structural shape in the gal.
Because the laser instrument that is adopted in the laser process equipment need have high power or high-energy; Therefore that have or even non-visible wave band of laser can't directly be used for equipment and debug, process the location and follow the tracks of and detect, and need be furnished with visible light location indicating device; But because of all not having visible light location indicating device in the existing water guiding laser process equipment; For this reason, the present invention is provided with the low-power visible light source, indicates as coaxial positioning.Visible light source can be common white light source, also can be the laser of monochromatic visible light wave band.The visible light device of indicating with high power (or high-energy) laser beam coaxial positioning is housed, can conveniently debugs, process location and random-tracking detection the process equipment optical system.Level crossing is used to locate the visible transmission and the processing of indication and uses laser total reflection.Visible light beam after the coupling and the high power that is used to process (or high-energy) laser beam have the linear correlation relation behind axicon.According to the dependency relation between them, through measurement to the actual hot spot of visible light beam, the hot spot situation of the laser beam that can obtain to be used to process.The beam-expanding collimation device can adopt the inverted telescope structure, and the beam-expanding collimation device has been realized the beam-expanding collimation to laser beam, the angle of divergence of compression laser beam.Suppose that l is for getting into the preceding laser-beam divergence angle of beam-expanding collimation device; K is the multiplication factor of beam-expanding collimation device; After then passing through the beam-expanding collimation device; The angle of divergence 2 of laser beam for 1/K before the incident doubly, i.e. 2=l/K expands the no diffraction zone length that laser beam behind the bundle can further enlarge diffraction light-free simultaneously.Axicon is used to produce the diffraction light-free bundle.The diffraction light-free bundle has characteristics such as the center spot diameter is little, Energy distribution even, the collimation head of district.Optical window is used for printing opacity.No diffracted laser beam gets into pressurized fluid chamber with the visible light beam of location indication through optical window, and is coupled to nozzle micropore porch.Pressurized fluid chamber produces the miniflow bundle with the nozzle micropore.High-pressure fluid gets into from the pressurized fluid chamber side, in pressurized fluid chamber, is converted into low-pressure fluid, and low-pressure fluid is through the outgoing to pressurized fluid chamber outside of nozzle micropore, formation certain-length, the microfluid waveguide stable region that beam diameter is constant.
This shows; The present invention has overcome existing water and has led laser system and exist coupling to laser spot and nozzle micropore central point to require height, be difficult to shortcoming such as detection; Utilize the intrafascicular heart characteristic of diffraction light-free, the coupling mechanism according to existing water guiding laser technology substitutes the traditional focus lens with axicon; Can very conveniently in no diffraction region, realize diffraction light-free bundle and the coupling coupling of being located at the nozzle micropore on the pressurized fluid chamber; The lotus root of expansion of laser light and a fluid stream is closed the zone, and the requirement to needing between condenser lens focus and the nozzle micropore very accurately to be coupled in the existing water guiding of the reduction laser aid has greatly realized making things convenient for system to debug; Efficient low-loss laser coupled output has kept advantages such as existing water guiding laser processing device processing distance, no heat affected area simultaneously.Utilize the diffraction light-free bundle that workpiece is added man-hour; The dynamic range of working depth is big; Susceptibility to location of workpiece error in no range of diffraction is zero, and is strong to the flatness adaptability of surface of the work, and neither needs accurate focusing along optical axis direction; Also need not to consider the problem of parfocalization, processing such as the laser accurate cutting that can realize ideal, punching.
Description of drawings
Fig. 1 closes the mechanism sketch map for the laser lotus root of existing water guiding laser beam precise finishing optical device
Fig. 2 is the structural representation of the embodiment of the invention
Fig. 3 is the geometric optical theory sketch map of the axicon of the embodiment of the invention, and the Z axle is represented optical axis, and the p axle is represented radial coordinate.
The specific embodiment
Referring to Fig. 2 and 3, the present invention is provided with laser instrument 1, visible light source 2, level crossing 3, beam-expanding collimation device 4, axicon 5, optical window 6, pressurized fluid chamber 7 and nozzle micropore 8.
Among the embodiment; Visible light source 2 adopts low-power visible light wave range laser; Power is the He – Ne laser instrument of 0.633 mum wavelength of 3mW; It is the Nd of 1.06 mum wavelengths of 100W that the laser instrument 1 that is used to process adopts power: YAG solid state laser, the fluid in the pressurized fluid chamber 7 are pure water.The visible light of visible light source 2 after level crossing 3 transmissions, and Nd: the coaxial coupling of YAG laser instrument 1 outgoing beam through level crossing 3 total reflections.Visible light beam after the coupling and sightless 1.06 mum wavelength Nd: the YAG laser beam impinges perpendicularly on axicon 5 bottom surfaces through beam-expanding collimation device 4 simultaneously.Nd after the coupling: the YAG laser beam will produce Bezier diffraction light-free bundle through axicon 5.Shown in Fig. 3; The laser beam radius of incident axicon 5 bottom surfaces is r, and the axicon medium refraction index is n, is the light beam of axicon outgoing and the angle of Z axle; When the cone angle φ of axicon 5 less; When disregarding prism thickness, according to geometric optics, maximum no diffraction region Zmax can be provided by following formula:
Zmax?=r/(n-1)φ
In maximum did not have diffraction region Zmax, according to the Bessel function characteristic, the minimum speck radius calculation of the intrafascicular heart of diffraction light-free formula did
R≈2.405/2п/λ(n-1)φ
With relevant parameter Nd: YAG laser wavelength lambda=1.06 μ m; Axicon medium (model is K9) is to these optical maser wavelength refractive index n=1.506; Cone angle φ=2 ° of axle pyramid; Laser beam radius r=the 10mm of incident axicon 5 bottom surfaces, substitution formula (l) and formula (2) can obtain Nd respectively: YAG laser is through producing maximum no diffraction region Zmax=566mm, no diffracted laser beam center speck radius R=22.97 μ m behind the axicon; And the aperture of nozzle micropore 8 is 0.1mm; Therefore, no diffracted laser beam center speck radius can incide in the nozzle micropore 8 much smaller than the aperture of nozzle micropore 8 fully.
For visible light; Behind optical imagery, get into nozzle micropore 8 simultaneously, realize mating lotus root and close, through outgoing after the water wave guide zone with laser beam; Its outgoing visible light beam is the same with laser beam to receive the constraint that ripples are led bore; Two beam and focus size approximately equal and coaxial has realized the coaxial positioning indication, and the size of detected visible light spot also is the laser facula size that is used to process simultaneously.The thin water layer that the optical window 6 of the no diffracted laser beam that produces through the water cavity top gets in the pressurized fluid chamber 7, in no diffraction region, the coupling of the center of no diffracted laser beam and nozzle micropore.Water in the pressurized fluid chamber 7 is through the 8 outside outgoing of nozzle micropore; Form the constant fine bourn waveguide stable region 10 of current beam diameter of certain-length; Based on total reflection principle; The laser beam that guiding is coupled into the fine bourn wave guide zone arrives processing work 9 surfaces, to workpiece punch, processing such as cutting.
Claims (1)
1. coaxial positioning laser accurate process equipment is characterized in that being provided with laser instrument, visible light source, level crossing, beam-expanding collimation device, axicon, optical window, pressurized fluid chamber and nozzle micropore; Level crossing is positioned at laser instrument and visible light source the place ahead; The light beam of laser instrument emitted laser bundle and visible light source closes through the level crossing misfortune, and the beam-expanding collimation device is positioned at level crossing the place ahead, and axicon is positioned at beam-expanding collimation device the place ahead; Pressurized fluid chamber is positioned at axicon the place ahead; Optical window is located at the pressure fluid top of chamber, and the nozzle micropore is located at the pressurized fluid chamber bottom, and the light beam after the level crossing lotus root is closed is coaxial with beam-expanding collimation device, axicon, optical window and nozzle micropore; Wherein
(1) said laser instrument adopts the laser instrument of power bracket at watt level to hectowatt grade, can be the Nd of 1.06 mum wavelengths: the YAG solid state laser;
(2) said visible light source is common white radiant or low-power visible light wave range laser, can be the 5W Halogen lamp LED, or power is the He-Ne laser instrument of 0.633 mum wavelength of 3mW.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010554322 CN102476237A (en) | 2010-11-23 | 2010-11-23 | Coaxial positioning laser precise processing device |
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| CN 201010554322 CN102476237A (en) | 2010-11-23 | 2010-11-23 | Coaxial positioning laser precise processing device |
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| CN102476237A true CN102476237A (en) | 2012-05-30 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105057893A (en) * | 2015-07-27 | 2015-11-18 | 上海微世半导体有限公司 | Laser drilling and cutting system for semiconductor material |
| CN106994562A (en) * | 2016-01-25 | 2017-08-01 | 郑钧文 | The laser cutting method and laser cutting machine of hard brittle material |
| CN107167451A (en) * | 2017-06-02 | 2017-09-15 | 合肥福瞳光电科技有限公司 | A kind of method and device for measuring smelly water clarity |
| CN107414284A (en) * | 2017-09-04 | 2017-12-01 | 北京工业大学 | A kind of PRK aids in micro- milling method and device |
| CN110142502A (en) * | 2019-05-15 | 2019-08-20 | 哈尔滨工业大学 | Water guides generating device of laser, water guiding laser-processing system and its processing method |
-
2010
- 2010-11-23 CN CN 201010554322 patent/CN102476237A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105057893A (en) * | 2015-07-27 | 2015-11-18 | 上海微世半导体有限公司 | Laser drilling and cutting system for semiconductor material |
| CN106994562A (en) * | 2016-01-25 | 2017-08-01 | 郑钧文 | The laser cutting method and laser cutting machine of hard brittle material |
| CN107167451A (en) * | 2017-06-02 | 2017-09-15 | 合肥福瞳光电科技有限公司 | A kind of method and device for measuring smelly water clarity |
| CN107414284A (en) * | 2017-09-04 | 2017-12-01 | 北京工业大学 | A kind of PRK aids in micro- milling method and device |
| CN110142502A (en) * | 2019-05-15 | 2019-08-20 | 哈尔滨工业大学 | Water guides generating device of laser, water guiding laser-processing system and its processing method |
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Application publication date: 20120530 |