CN102435582B - High precision laser absorptivity measuring device - Google Patents
High precision laser absorptivity measuring device Download PDFInfo
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- CN102435582B CN102435582B CN2011103117032A CN201110311703A CN102435582B CN 102435582 B CN102435582 B CN 102435582B CN 2011103117032 A CN2011103117032 A CN 2011103117032A CN 201110311703 A CN201110311703 A CN 201110311703A CN 102435582 B CN102435582 B CN 102435582B
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Abstract
The invention relates to the field of research on laser absorbing and scattering characteristics of materials, in particular to a high precision laser absorptivity measuring device. In the prior art, the absorbability of a material cannot be measured at high precision. In order to solve the problem in the prior art, the high precision laser absorptivity measuring device comprises an optical measuring assembly, wherein the optical measuring assembly comprises a laser light source, an acoustic optical modulator, a beam shaping component, a semitransparent mirror, a reflector and an integrating sphere; the laser light source, the acoustic optical modulator, the beam shaping component, the semitransparent mirror and the reflector are positioned in the same optical path; a plurality of openings are formed in the integrating sphere; a light guide pipe is arranged at the first opening; the light guide pipe is arranged along the line of centers of the first and second openings; and a first photoelectric detector is arranged at the third opening. The device accurately measures high absorptivity, and is high in accuracy, convenient to measure and wide in application range.
Description
Technical field:
The present invention relates to laser absorption and the scattering properties research field of material, be specifically related to a kind of high precision laser absorptivity measuring device.
Background technology:
The high-absorbility material has high using value in military and civilian fields such as laser camouflage and lasing safeties.As high precision measurement system in optical laboratory, surface all and that test is irrelevant all requires its Darkening process, in order to absorb to greatest extent parasitic light, prevents that its surperficial reflected light from affecting the precision of test macro.Darkening process can be the oxidation melanism, it is pitch-dark to spray, sootiness, subsides black flannelette etc.At present the measuring method of absorption of sample rate mainly contains three classes: the first kind is the angle from calorimetric, the temperature variation by measuring material the corresponding calculation of thermodynamics of the carrying out rate that is absorbed.Main research work has, utilize lumped-parameter method to carry out absorptivity calculating, utilize the unsteady-state heat transfer of a peacekeeping two dimension of method of finite difference to learn model calculating absorptivity (tribology National Key Laboratory of [1] Tsing-Hua University, Acta Physica Sinica, 2001,50(5): 856～859).These class methods have the use precondition, have limited its usable range.The Equations of The Second Kind method be situation about changing according to laser action district materials behavior indirectly study absorbing state ([2] Siom of Chinese Academy of Sciences, laser, 1981,3:26-31).The work of this respect is mainly that the physical dimension by measuring the laser heat action district is evaluated indirectly to absorptivity, and these class methods generally can only be for estimating absorptivity qualitatively.The 3rd class is by measurement of reflectivity, then deducts reflectivity by incident radiation and obtain absorptivity ([3] aerospace journal, 1983,3:89～104).
With the most approaching prior art of the present invention, be wherein Changchun ray machine institute (solar energy journal, 1992,13(3): 406～411) and Chinese Academy of Sciences's Changchun optical precision optical machinery and physics Institute's (utility model patent, 2004, the patent No.: two kinds of absorption rate measuring devices CN03212220.9), as shown in Figure 1, 2.And the measurement of document [3] solar spectrum absorptivity.
Above 3 kinds of schemes are not all considered the impact that under conventional environment, in air, the scattering loss of dust granule causes measurement, exist inherent error because of surveying instrument equipment simultaneously, therefore can not realize the high-acruracy survey of material absorptivity.
In addition, each scheme also has following shortcoming.
The major defect of the measurement mechanism that solar energy journal provides is: can not eliminate the impact of specular light on measuring from principle, the set-up mode of device causes specular light to reflect integrating sphere along input path, and the actual absorptivity recorded is not deducted the impact of this part.
In CN03212220.9, in order to overcome the impact of specular light on measuring, in front on the basis of measurement mechanism, specular light is gone out outside integrating sphere and measured along the former pass of incident light, although it is improved, still from principle, do not processed, and make light path complicated.
Described the measurement to the solar spectrum absorptivity in document 3, detector or absorbing material need to be placed in to the center of integrating sphere, not easy to operate and change, impracticable.
Summary of the invention:
The technical problem to be solved in the present invention is to provide a kind of high precision laser absorptivity measuring device, the problem that can not realize high-precision Optical thin film existed to overcome prior art.
The problem existed in order to solve prior art, technical scheme provided by the invention is:
A kind of high-precision laser absorptiometry device, comprise optical table 20, computing machine 21 and Control Component, on described optical table 20, optical flat 19 is installed, and is provided with the optical measurement assembly on optical flat 19, it is characterized in that:
Described optical measurement assembly comprises LASER Light Source 1, acousto-optic modulator 2, beam shaping assembly 3, saturating anti-mirror 4, catoptron 5 and integrating sphere 7, wherein LASER Light Source 1, acousto-optic modulator 2, beam shaping assembly 3, saturating anti-mirror 4 and catoptron 5 are positioned on same light path, be provided with the perforate of 3 places on integrating sphere 7, respectively the first perforate 6, the second perforate 9 and the 3rd perforate 11, the first perforate 6 places are provided with light pipe 8, light pipe 8 is along the center line connecting direction setting of the first perforate 6 and the second perforate 9, and the 3rd perforate 11 places are provided with the first photodetector 12; The incident light that described catoptron 5 provides is injected on the sample 10 of placing at the second perforate 9 places along light pipe 8, normal between incident angle and specular angle is through the centre of sphere of integrating sphere 7, the setting principle of incident angle is that specular light is in integrating sphere and away from the photosurface of the first photodetector 12, the front end of the first photodetector 12 is provided with protection baffle plate 13, and the surface of protection baffle plate 13 is identical with the integrating sphere inner surface treatment;
Described Control Component comprises the first lock-in amplifier 15, the second lock-in amplifier 16, synchronous data collection unit 17 and waveform generator 18, computing machine 21 control waveform generator 18 output square-wave signals, this square-wave signal drives for the modulation of acousto-optic modulator 2, and this square-wave signal is sent in the first lock-in amplifier 15 and the second lock-in amplifier 16 simultaneously; The reflected light of saturating anti-mirror 4 converts electric signal to after by the second photodetector 14 arranged on its light path, this electric signal is exported the voltage signal after denoising after the second lock-in amplifier 16, and this voltage signal signal is sent into computing machine 21 after synchronous data collection unit 17 gathers; Described the first photodetector 12 output electrical signals are exported the voltage signal after denoising after the first lock-in amplifier 15, and this voltage signal is sent into computing machine 21 after synchronous data collection unit 17 gathers.
The laser that above-mentioned LASER Light Source 1 is sent is injected acousto-optic modulator 2 with Bragg angle, the first-order diffraction light of acousto-optic modulator 2 is as measuring incident light, computing machine 21 control waveform generator 18 output square-wave signals, this square-wave signal drives for the modulation of acousto-optic modulator 2.
Between above-mentioned acousto-optic modulator 2 and beam shaping assembly 3, attenuator is set.So just can be used for the low absorptivity sample is measured.
The laser energy penetrated in conventional environment or non-compliant dust free room is seen obvious laser optical path, this is because the effect of dust granule to the scattered light of laser in air under conventional environment, for high-precision Optical thin film or need to carry out, or need to try every possible means to deduct the impact of dust granule on the scattered light of laser in air under conventional environment under such as the hundred-grade super-clean room environmental.Compared with prior art, advantage of the present invention is:
1, realized the Measurement accuracy of high-absorbility, precision is high:
The source of error of measuring the material absorptivity based on integrating sphere mainly contains following 2 points: ([3] aerospace journal, 1983,3:89～104)
(1), the error of integrating sphere structure
(2), the error of surveying instrument equipment
For source of error (1), from the data of consulting, forefathers' method is all the effects that utilize the basic function of integrating sphere to collect light and even light, and in integrating sphere, light path does not process.During measurement, incident light is very strong for the reflected light after being absorbed by high absorbing material, the scattered light produced due to the ambient dust particle on the light path of incident light in integrating sphere all is integrated ball and has collected, this part is noise signal only, but traditional integrating sphere light path is not done any processing, cause this part noise light directly to be added on flashlight, produce very strong noise, and due to the mobility of air self, this part noise light signal is changed at any time, uncertain, can cause the fluctuation of measuring-signal, produce measuring error, measure occasion at high-absorbility, more can sharply reduce signal to noise ratio (S/N ratio).
and the present invention designs in order to overcome this defect just, add light pipe in integrating sphere, and inside pipe wall Darkening process, outer wall is processed identical with the integrating sphere inwall, light incides on sample through light pipe, the scattering overwhelming majority that laser produces on input path in ball is absorbed, can't scatter in integrating sphere, can not exert an influence to measuring-signal, the present invention arranges a light pipe 8 at the first opening 6 places, incident light is mapped on sample 10 through light pipe 8, light pipe 8 the impact of on the one hand having avoided the scattered lights of particle on input path such as integrating sphere 7 interior dusts to cause measurement is set, on the other hand also almost completely resistance shelves from the emergent light of the first opening 6.The present invention has overcome the inherent shortcoming of traditional quadrature ball light path, has greatly improved the signal to noise ratio (S/N ratio) of measuring.
For source of error two, mainly contain the error that light source fluctuation causes, the error that bias light produces, and the error of detector circuit zero point drift generation, the technology of traditional measurement absorptivity is all directly to measure, for these source of errors, do not processed, apparatus of the present invention have been taked the light source fluctuation monitoring, light have been modulated to the measuring error of utilizing related detecting method to come background correction light and detector circuit zero point drift to bring, realize high-acruracy survey.
2, the laser that apparatus of the present invention are first sent LASER Light Source on the one hand carries out acoustooptic modulation, acousto-optic modulator is modulated by the square-wave signal that is subject to computer-controlled waveform generator output, laser enters to inject acousto-optic modulator with Bragg angle, utilize its 1 order diffraction light to use incident light, this design to avoid the light that is reflected back LASER Light Source along input path LASER Light Source to be gone out to the impact of luminous power as measuring; Use on the other hand anti-mirror light splitting, a road is for to the monitoring of laser power fluctuation and as the measurement of reference light, and another road is as the incident light of test; Its three, coordinate the modulation to laser, carry out processing signals with lock-in amplifier, can avoid the impact of the noises such as bias light, detector drift, improve the measuring accuracy of system.Its four, utilize the synchronous data collection function to carry out the synchro measure computing to reference light and flashlight, deducted the impact of light source fluctuation on measuring.
3, applied widely: apparatus of the present invention not only are applicable to the accurate Quick Measurement of high-absorbility absorption of sample rate, also suitable the low absorptivity sample are measured.
4, convenient test, easy and simple to handle: apparatus of the present invention can be used the LASER Light Source of different wave length as required instead, simultaneously can convenient and swift quantitative detection sample for the absorptivity of laser, avoided the measuring error that in the air, the scattering of dust granule causes, be not subject to the environment interference of stray light, easily operation, be convenient to repeated test.
5, in the present invention, light enters to inject integrating sphere 7 from the first opening 6, through light pipe 8, be mapped on the sample 10 that is positioned at the second opening 9, one angle is set between incident light and normal, and normal is through the centre of sphere of integrating sphere 7, like this specular light with diffuse all in integrating sphere.
The accompanying drawing explanation:
The structural representation of Fig. 1 prior art;
Improved structural representation on Fig. 2 prior art;
Fig. 3 is measurement mechanism structural representation of the present invention
Fig. 4 is the raw measurement data waveform while light pipe 8 not being installed;
Fig. 5 is raw measurement data waveform when light pipe 8 is installed.
Description of reference numerals is as follows:
1-LASER Light Source, 2-acousto-optic modulator, 3-beam shaping assembly, the saturating anti-mirror of 4-, 5-catoptron, 6-the first opening, 7-integrating sphere, 8-light pipe, 9-the second opening, 10-sample 11-the 3rd opening, 12-the first photodetector, 13-protection baffle plate, 14-the second photodetector, 15-the first lock-in amplifier, 16-the second lock-in amplifier, 17-synchronous data collection unit, 18-waveform generator, 19-optical flat, 20-optical table, 21-computing machine.
Embodiment:
Below in conjunction with drawings and Examples, the present invention is described in detail.
Referring to Fig. 1 and Fig. 2, they are respectively the devices provided in the measurement mechanism that provides of solar energy journal and Chinese patent " CN03212220.9 ".
Referring to Fig. 3, a kind of high precision laser absorptivity measuring device provided by the invention, comprise optical table 20, computing machine 21 and Control Component, on described optical table 20, optical flat 19 is installed, and is provided with the optical measurement assembly on optical flat 19.
Said optical measurement assembly comprises LASER Light Source 1, acousto-optic modulator 2, beam shaping assembly 3, saturating anti-mirror 4, catoptron 5 and integrating sphere 7, wherein LASER Light Source 1, acousto-optic modulator 2, beam shaping assembly 3, saturating anti-mirror 4 and catoptron 5 are positioned on same light path, be provided with the perforate of 3 places on integrating sphere 7, respectively the first perforate 6, the second perforate 9 and the 3rd perforate 11, the first perforate 6 places are provided with light pipe 8, light pipe 8 is along the center line connecting direction setting of the first perforate 6 and the second perforate 9, and the 3rd perforate 11 places are provided with the first photodetector 12; The incident light that described catoptron 5 provides is injected on the sample 10 of placing at the second perforate 9 places along light pipe 8, normal between incident angle and specular angle is through the centre of sphere of integrating sphere 7, the setting principle of incident angle is that specular light is in integrating sphere and away from the photosurface of the first photodetector 12, the front end of the first photodetector 12 is provided with protection baffle plate 13, and the surface of protection baffle plate 13 is identical with the integrating sphere inner surface treatment;
Said Control Component comprises the first lock-in amplifier 15, the second lock-in amplifier 16, synchronous data collection unit 17 and waveform generator 18, computing machine 21 control waveform generator 18 output square-wave signals, this square-wave signal drives for the modulation of acousto-optic modulator 2, and this square-wave signal is sent in the first lock-in amplifier 15 and the second lock-in amplifier 16 simultaneously; The reflected light of saturating anti-mirror 4 converts electric signal to after by the second photodetector 14 arranged on its light path, this electric signal is exported the voltage signal after denoising after the second lock-in amplifier 16, and this voltage signal signal is sent into computing machine 21 after synchronous data collection unit 17 gathers; Described the first photodetector 12 output electrical signals are exported the voltage signal after denoising after the first lock-in amplifier 15, and this voltage signal is sent into computing machine 21 after synchronous data collection unit 17 gathers.
The laser that said LASER Light Source 1 is sent is injected acousto-optic modulator 2 with Bragg angle, the first-order diffraction light of acousto-optic modulator 2 is as measuring incident light, computer control waveform generator 18 output square-wave signals, this square-wave signal drives for the modulation of acousto-optic modulator 2.
Measuring process is described below:
by the testing sample 10(of high-absorbility as: the flat board of black flannelette is posted on surface) be placed in integrating sphere the second opening 9 places, computer control waveform generator 18 sends square-wave signal, incident light shines on sample 10 through light pipe 8, integrating sphere 7 is collected minute surface and diffuses, send the first lock-in amplifier 15 denoisings after being converted to electric signal by the first photodetector 12, the second photodetector 14 also will be converted to by the light splitting of saturating anti-mirror 4 electric signal and send the second lock-in amplifier 16 denoisings simultaneously, computer control synchronous data collection 17 synchronous acquisition signals, the absorptivity that directly obtains sample is processed in the row operation of going forward side by side.
While having utilized apparatus of the present invention to compare light pipe 8 not to be installed and light pipe 8 is installed effects on surface post black flannelette flat board the measurement data to the He-Ne Lasers absorptivity original waveform as shown in Figure 4 and Figure 5.
From Fig. 4 and Fig. 5, under same test condition, light pipe 8 measurement data are not installed obviously to be increased, fluctuation also strengthens, the design and installation of visible light pipe 8 has greatly reduced the impacts of particle scattering laser on measuring such as dust in the air on the interior light path of integrating sphere 7, and this is also the major reason that apparatus of the present invention improve measuring accuracy.
If between the acousto-optic modulator 2 of input path and beam shaping assembly 3, attenuator is set, can realizes the low absorptivity sample is measured.
Claims (2)
1. a high-precision laser absorptiometry device, comprise optical table (20), computing machine (21) and Control Component, optical flat (19) is installed on described optical table (20), optical flat is provided with the optical measurement assembly on (19), it is characterized in that: described optical measurement assembly comprises LASER Light Source (1), acousto-optic modulator (2), beam shaping assembly (3), saturating anti-mirror (4), catoptron (5) and integrating sphere (7), LASER Light Source (1) wherein, acousto-optic modulator (2), beam shaping assembly (3), saturating anti-mirror (4) and catoptron (5) are positioned on same light path, integrating sphere is provided with the perforate of 3 places on (7), respectively the first perforate (6), the second perforate (9) and the 3rd perforate (11), the first perforate (6) locates to be provided with light pipe (8), light pipe (8) is the center line connecting direction setting with the second perforate (9) along the first perforate (6), the 3rd perforate (11) locates to be provided with the first photodetector (12), the incident light that described catoptron (5) provides is injected the second perforate (9) along light pipe (8) and is located on the sample (10) of placement, normal between incident angle and specular angle is through the centre of sphere of integrating sphere (7), the setting principle of incident angle is that specular light is in integrating sphere and away from the photosurface of the first photodetector (12), the front end of the first photodetector (12) is provided with protection baffle plate (13), the surface of protection baffle plate (13) is identical with the integrating sphere inner surface treatment, described Control Component comprises the first lock-in amplifier (15), the second lock-in amplifier (16), synchronous data collection unit (17) and waveform generator (18), computing machine (21) control waveform generator (18) output square-wave signal, this square-wave signal drives for the modulation of acousto-optic modulator (2), and this square-wave signal is sent in the first lock-in amplifier (15) and the second lock-in amplifier (16) simultaneously, the reflected light of saturating anti-mirror (4) converts electric signal to by the second photodetector (14) arranged on its light path, this electric signal is exported the voltage signal after denoising after the first lock-in amplifier (15), and this voltage signal is sent into computing machine (21) after synchronous data collection unit (17) gather, described the first photodetector (12) output electrical signals is exported the voltage signal after denoising after the first lock-in amplifier (15), and this voltage signal is sent into computing machine (21) after synchronous data collection unit (17) gather, described light pipe (8) inwall Darkening process, outer wall is processed identical with the integrating sphere inwall, the laser that described LASER Light Source (1) is sent is injected acousto-optic modulator (2) with Bragg angle, and the first-order diffraction light of acousto-optic modulator (2) is as measuring incident light, saturating anti-mirror (4) light splitting Hou， mono-tunnel is for to the monitoring of laser power fluctuation and as the measurement of reference light, and another road is as the incident light of test.
2. a kind of high-precision laser absorptiometry device according to claim 1, is characterized in that: between described acousto-optic modulator (2) and beam shaping assembly (3), be provided with attenuator.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| EP3186826A4 (en) * | 2014-08-29 | 2018-02-14 | Aurora Solar Technologies (Canada) Inc. | System for measuring levels of radiation reflecting from semiconductor material for use in measuring the dopant content thereof |
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| CN103063702B (en) * | 2013-01-05 | 2014-11-26 | 江苏大学 | Method and device for testing laser absorptivity of powdery material |
| CN105259115B (en) * | 2015-09-29 | 2018-04-10 | 北京卫星制造厂 | A kind of portable solar absorptance detector |
| CN107843562A (en) * | 2017-12-08 | 2018-03-27 | 湖南文理学院 | A kind of integrating sphere device and integration sphere light source system |
| CN108061707A (en) * | 2017-12-08 | 2018-05-22 | 湖南文理学院 | A kind of integration sphere light source system and test method |
| CN108982392A (en) * | 2018-09-28 | 2018-12-11 | 中国科学院长春光学精密机械与物理研究所 | A kind of laser absorption rate measuring device and laser absorption rate measurement method |
| CN109520929B (en) * | 2018-12-03 | 2021-04-27 | 东北石油大学 | Stray light suppression device for laser detection of oil and gas pollutants |
| CN112255193A (en) * | 2020-10-10 | 2021-01-22 | 桂林电子科技大学 | Laser absorption rate measuring device for spherical metal material changing along with temperature |
| CN114235756B (en) * | 2021-11-15 | 2024-02-23 | 西安工业大学 | High-precision laser scanning type transmissivity distribution measuring device and measuring method |
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| JPS63167243A (en) * | 1986-12-27 | 1988-07-11 | Satake Eng Co Ltd | Method for measuring component content of rice |
| CN2658729Y (en) * | 2003-03-26 | 2004-11-24 | 中国科学院长春光学精密机械与物理研究所 | Absorption rate measuring device |
| CN101178360B (en) * | 2007-09-24 | 2010-12-15 | 重庆医科大学 | Homogeneous phase affinity analyzing novel methods based on integrating sphere reinforced light scattering testing technology |
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| EP3186826A4 (en) * | 2014-08-29 | 2018-02-14 | Aurora Solar Technologies (Canada) Inc. | System for measuring levels of radiation reflecting from semiconductor material for use in measuring the dopant content thereof |
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