CN102321911B - System and method for controlling zone melting furnace for producing silicon single crystal by using abnormity polycrystalline material - Google Patents
System and method for controlling zone melting furnace for producing silicon single crystal by using abnormity polycrystalline material Download PDFInfo
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- CN102321911B CN102321911B CN201110308209.0A CN201110308209A CN102321911B CN 102321911 B CN102321911 B CN 102321911B CN 201110308209 A CN201110308209 A CN 201110308209A CN 102321911 B CN102321911 B CN 102321911B
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- 238000004857 zone melting Methods 0.000 title claims abstract description 74
- 239000013078 crystal Substances 0.000 title claims abstract description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 title claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 16
- 239000010703 silicon Substances 0.000 title claims abstract description 16
- 239000000463 material Substances 0.000 title abstract 4
- 239000013598 vector Substances 0.000 claims abstract description 41
- 239000007788 liquid Substances 0.000 claims abstract description 21
- 238000005259 measurement Methods 0.000 claims description 7
- 238000005070 sampling Methods 0.000 claims description 4
- 230000002459 sustained effect Effects 0.000 claims description 4
- 241001269238 Data Species 0.000 claims description 3
- 238000003723 Smelting Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000002844 melting Methods 0.000 abstract description 6
- 230000008018 melting Effects 0.000 abstract description 6
- 230000005012 migration Effects 0.000 abstract description 4
- 238000013508 migration Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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Abstract
The invention relates to a system and method for controlling a zone melting furnace for producing silicon single crystal by using an abnormity polycrystalline material. The system comprises a zone melting furnace motion controller connected with a migration motor, at least three distance measurers and a PLC (Programmable Logic Controller). The three distance measurers are respectively connected with the PLC. The PLC is connected with the zone melting furnace motion controller. The PLC controller is used for transmitting migration vector data of an upper shaft of the zone melting furnace to the zone melting furnace motion controller in real time. The zone melting furnace motion controller is used for controlling the migration motor to drive an X shaft and an Y shaft of the upper shaft of the zone melting furnace to migrate so that the circle centre of any section of the whole abnormity polycrystalline material is centred in the process of reaching a solid-liquid interface. By using the improved control system and method, the problems of easy eccentricity of a melting zone, resulted from the abnormity polycrystalline material, even easiness for striking fire, resulted from the contact between the melting zone and a coil, and easy breakage of zone melting silicon single crystal, can be solved, therefore, the quality stability of the product is ensured.
Description
Technical field
The present invention relates to zone melting furnace Controlling System, particularly a kind of zone melting furnace Controlling System and control method of using special-shaped polycrystal to produce silicon single-crystal.
Background technology
In actual production, the polycrystalline charge bar that zone-melted silicon single crystal is used in producing is not all the cylindrical of standard, and it has bending to a certain degree, and such polycrystal is called special-shaped polycrystal.Even can say so, most of polycrystalline charge bars have bending to a certain degree.In the production of zone-melted silicon single crystal, crooked polycrystalline charge bar easily causes the bias in melting zone, and then causes, because melting zone easily causes sparking with contacting of coil, also easily causing the disconnected bud of zone-melted silicon single crystal simultaneously.
Summary of the invention
Object of the present invention is just existing zone melting furnace to transform, and makes it can automatically regulate when using special-shaped polycrystal, makes the solid-liquid interface of polycrystalline charge bar placed in the middle all the time, thereby avoids the appearance of variety of issue.
For reaching above object, need transform two parts of hardware and software of zone melting furnace.Hardware aspect increases the center point coordinate that three stadimeters are determined special-shaped polycrystalline charge bar circular section, and PLC controller carries out the control of data calculating.Software aspect, the PLC controller newly increasing is programmed, process input data and calculate side-play amount, the real-time offset vector of axle, upper axle speed, upper axle rotating speed on the horizontal throw by three distance by stadimeter polycrystal bar edges, the vertical distance of distance by stadimeter polycrystalline charge bar solid-liquid interface, the horizontal throw of distance by stadimeter burner hearth center O, zone melting furnace, calculate the t vector that after the time, on zone melting furnace, axle should be offset, thereby make polycrystalline charge bar cross section placed in the middle.
The technical scheme that the present invention takes is: a kind of zone melting furnace Controlling System of using special-shaped polycrystal to produce silicon single-crystal, comprise the zone melting furnace motion controller being connected with Y-axis skew motor with the X-axis of axle on zone melting furnace, it is characterized in that, also comprise at least three stadimeters and a PLC controller, three stadimeters are respectively the first stadimeter, the second stadimeter and the 3rd stadimeter, three stadimeters are fixed on zone melting furnace wall sustained height, and be connected with PLC controller respectively, PLC controller is connected with zone melting furnace motion controller.
Use special-shaped polycrystal to produce a zone melting furnace control method for silicon single-crystal, it is characterized in that, comprise the steps:
(1), the horizontal survey distance L of three distance by stadimeter burner hearth center O
0the vertical distance L data of data and three distance by stadimeter polycrystalline charge bar solid-liquid interfaces are by being manually input to PLC controller, when Controlling System starts, and the upper axle speed v of PLC controller read area smelting furnace motion controller and two data of upper axle rotating speed r; After Controlling System starts, according to the sampling period, three stadimeters are the horizontal throw l apart from polycrystal bar edge by self in real time
1, l
2, l
3data are input to PLC controller by zone melting furnace Ethernet;
(2), PLC controller is by the horizontal throw l of the distance polycrystal bar edge of three stadimeter inputs
1, l
2, l
3; The horizontal survey distance L of three distance by stadimeter burner hearth center O
0the coordinate that calculates three measurement point is a (0, L
0-l
1), b (L
0-l
2, 0), c (l
3-L
0, 0);
(3), according to three measurement point coordinate datas calculating, first calculate the now coordinate P (x of polycrystalline charge bar kernel of section point
0, y
0), wherein: x
0=
, y
0=
, now polycrystalline charge bar kernel of section is vectorial
=;
(4), with now polycrystalline charge bar kernel of section is vectorial
deduct the offset vector of axle on current zone melting furnace
draw the center vector of this polycrystalline charge bar kernel of section when axle is without skew on zone melting furnace
(x, y),
length=
;
(5), PLC controller calculates polycrystalline charge bar cross section according to the vertical distance L of upper axle speed v and three distance by stadimeter polycrystalline charge bar solid-liquid interfaces and arrives the required time t=of solid-liquid interface
;
(6) center vector of this polycrystalline charge bar kernel of section when, axle is without skew on zone melting furnace after t computing time
[
];
Wherein:,
,
(7), finally calculate: the offset vector of axle on zone melting furnace after time t
=-
=(
,-
);
(8), PLC controller is in real time by the offset vector of axle on zone melting furnace
data transmission is to zone melting furnace motion controller, and zone melting furnace motion controller is controlled skew motor and driven X-axis and the Y-axis of axle on zone melting furnace to be offset, and it is all placed in the middle making the arbitrary section of whole special-shaped polycrystalline charge bar obtain the center of circle when arriving solid-liquid interface.
The beneficial effect that the present invention produces is: adopt improved Controlling System and control method, solved in the production of zone-melted silicon single crystal, use special-shaped polycrystalline charge bar easily to cause the bias in melting zone, and then cause because melting zone easily causes sparking with contacting of coil, and the problem that also easily causes the disconnected bud of zone-melted silicon single crystal, thereby guarantee the stable of quality product.
Accompanying drawing explanation
Fig. 1 is zone melting furnace furnace binding vertical view;
Fig. 2 is zone melting furnace furnace binding front view;
Fig. 3 is for calculating polycrystalline charge bar kernel of section coordinate P (x
0, y
0) method schematic diagram;
Fig. 4 is polycrystalline charge bar kernel of section offset vector after t computing time
method schematic diagram;
Fig. 5 is in rectangular coordinate system,
,
,
,
and the operation relation schematic diagram between five vectors;
Fig. 6 is zone melting furnace Controlling System catenation principle block diagram.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described: with reference to Fig. 1, Fig. 2 and Fig. 6, a kind of zone melting furnace Controlling System of using special-shaped polycrystal to produce silicon single-crystal comprises the zone melting furnace motion controller being connected with Y-axis skew motor with the X-axis of axle on zone melting furnace, also comprise at least three stadimeters and a PLC controller, three stadimeters are respectively the first stadimeter 1, the second stadimeter 2 and the 3rd stadimeter 3, three stadimeters are fixed on zone melting furnace wall sustained height, and be connected with PLC controller respectively, PLC controller is connected with zone melting furnace motion controller.
A kind of zone melting furnace control method of using special-shaped polycrystal to produce silicon single-crystal comprises the steps:
(1), when installation control system, by the horizontal survey distance L of three distance by stadimeter burner hearth center O
0the vertical distance L data of data and three distance by stadimeter polycrystalline charge bar solid-liquid interfaces are by being manually input to PLC controller, (the L of each zone melting furnace
0invariable with L data); When Controlling System starts, the upper axle speed v of PLC controller read area smelting furnace motion controller and two data of upper axle rotating speed r; After Controlling System starts, according to the sampling period, three stadimeters are the horizontal throw l apart from polycrystal bar edge by self in real time
1, l
2, l
3data are input to PLC controller by zone melting furnace Ethernet;
(2), PLC controller is by the horizontal throw l of the distance polycrystal bar edge of three stadimeter inputs
1, l
2, l
3; The horizontal survey distance L of three distance by stadimeter burner hearth center O
0the coordinate that calculates three measurement point is a (0, L
0-l
1), b (L
0-l
2, 0), c (l
3-L
0, 0);
(3), according to three measurement point coordinate datas calculating, first calculate the now coordinate P (x of polycrystalline charge bar kernel of section point
0, y
0), wherein: x
0=
, y
0=
, now polycrystalline charge bar kernel of section is vectorial
=;
(4), with now polycrystalline charge bar kernel of section is vectorial
deduct the offset vector of axle on current zone melting furnace
draw the center vector of this polycrystalline charge bar kernel of section when axle is without skew on zone melting furnace
(x, y),
length=
;
(5), PLC controller calculates polycrystalline charge bar cross section according to the vertical distance L of upper axle speed v and three distance by stadimeter polycrystalline charge bar solid-liquid interfaces and arrives the required time t=of solid-liquid interface
;
(6) center vector of this polycrystalline charge bar kernel of section when, axle is without skew on zone melting furnace after t computing time
[
];
Wherein:
,
,
(7), finally calculate: the offset vector of axle on zone melting furnace after time t
=-
=(
,-
);
(8), PLC controller is in real time by the offset vector of axle on zone melting furnace
data transmission is to zone melting furnace motion controller, and zone melting furnace motion controller is controlled skew motor and driven X-axis and the Y-axis of axle on zone melting furnace to be offset, and it is all placed in the middle making the arbitrary section of whole special-shaped polycrystalline charge bar obtain the center of circle when arriving solid-liquid interface.
Principle of work of the present invention: zone melting furnace wall sustained height is welded with three stadimeters that point to furnace chamber center, by the horizontal throw of three distance by stadimeter polycrystal bar edges, the vertical distance of distance by stadimeter polycrystalline charge bar solid-liquid interface, the horizontal throw of distance by stadimeter burner hearth center O, the real-time offset vector of upper axle, upper axle speed, upper axle rotating speed, calculate the t vector that after the time, upper axle should be offset, thereby make polycrystalline rod cross section placed in the middle.PLC controller carries out computing to input data, polycrystalline charge bar kernel of section migration result is outputed to the motion controller of zone melting furnace, thereby the motion controller of zone melting furnace control skew motor to upper axle in x axle, the enterprising line displacement of y axle both direction, by real-time continuous, control the side-play amount of axle, every 1s or a time period, this place's polycrystalline charge bar kernel of section is calculated, so just can guarantee that arbitrary section center of circle when arriving solid-liquid interface of whole special-shaped polycrystal is all placed in the middle.
This Controlling System starts to start after Crystal fsometric Growing, starts to bring into play control action kou start time after t.
Be below the physical quantity of using in control method of the present invention:
L
0for the horizontal throw of distance by stadimeter burner hearth center O, this distance is by being manually input in PLC controller;
L is the vertical distance of distance by stadimeter polycrystalline charge bar solid-liquid interface, and this distance is by being manually input in PLC controller;
L
1, l
2and l
3be respectively the horizontal throw of three distance by stadimeter polycrystal bar edges;
V is upper axle speed, and these data can read in the motion controller of zone melting furnace;
R is upper axle rotating speed, and these data can read in the motion controller of zone melting furnace;
T=
, for polycrystalline charge bar cross section arrives the required time of solid-liquid interface;
Center vector for this polycrystalline charge bar cross section after time t;
Embodiment: the zone melting furnace model that the present embodiment adopts is PVA FZ-30.Take burner hearth center sets up system of coordinates as true origin.The horizontal throw L of distance by stadimeter burner hearth center O
0for 500mm; The vertical distance L of distance by stadimeter polycrystalline charge bar solid-liquid interface is 10mm; After Crystal fsometric Growing, upper axle rotating speed r is 0.2rpm; Upper axle speed v is 2mm/min; It is 5 min that polycrystalline charge bar cross section arrives the required time t of solid-liquid interface.
The sampling period of the present embodiment is 1min, every 1min, once finds range and calculates.16:05 starts to start native system, and the concrete data of data while proceeding to 16:15 see the following form.Offset vector during 16:10 wherein
the t calculating during for 16:05 offset vector after the time
.The offset vector of 16:11 to 16:15
the t calculating for 16:06 to 16:10 offset vector after the time
.
| Time | Offset vector | Center vector | Offset vector after t |
| 16:05 | （0，0） | （1，1） | （-1，-1） |
| 16:06 | （0，0） | （0，1） | （0，-1） |
| 16:07 | （0，0） | （1，0） | （-1，0） |
| 16:08 | （0，0） | （0，0） | （0，0） |
| 16:09 | （0，0） | （0，0） | （0，0） |
| 16:10 | （-1，-1） | （-
|
（-
|
| 16:11 | （0，-1） | ? | ? |
| 16:12 | （-1，0） | ? | ? |
| 16:13 | （0，0） | ? | ? |
| 16:14 | （0，0） | ? | ? |
| 16:15 | （-
|
? | ? |
In the present embodiment, the first stadimeter 1 is positioned at y axle positive dirction, and the second stadimeter 2 and the 33 is positioned at x axle, and the y axle of take is symmetrical as symmetry axis is Y-axis, referring to Fig. 1.
In order further to understand computation process, while now providing 16:10, the computation process after stadimeter range finding.
First by calculating the now coordinate P (x of polycrystalline charge bar kernel of section point
0, y
0) calculate center vector
[
], concrete grammar is as follows:
Referring to Fig. 1 to Fig. 5, three measurement point of 1,2, No. 3 stadimeter are respectively a, b, c, and three stadimeters record self apart from the horizontal throw l of polycrystal bar edge
1, l
2, l
3be respectively 497mm, 499mm and 498mm, known stadimeter is to the distance L of burner hearth center O
0for 500mm, the coordinate of three points is respectively a (0,3), b (1,0), c (2,0).
Equation by b, 2 straight lines of c is: y=0;
Equation by a, 2 straight lines of b is: x+
y-1=0;
The equation of 2 midperpendicular of bc is: x=
=-
;
The equation of 2 midperpendicular of ab is: x-3y+4=0;
Two midperpendicular solving simultaneous equations, can obtain center point coordinate P (x
0, y
0), wherein:
x
0=
=－
，y
0=
=
；
Polycrystalline charge bar kernel of section is vectorial
==
.
The center vector in polycrystalline charge bar cross section when upper axle is not offset
(x, y)=
, the offset vector of axle on zone melting furnace during 16:10
equal
, i.e. (x, y)=
-
=.
Suppose the not skew of upper axle, calculate through t after the time center vector in this polycrystalline charge bar cross section
[
]: length=
=
, because
so the angle in rectangular coordinate system is
=77 °.
After time t, angle
=77 °+360 °.
?
=
,=
.
Can draw, after time t, upper axle offset vector
(-
,-)=
, after this offset vector 5min, during 16:15, as offset vector
performance skew effect, skew motor is offset according to offset vector.
Claims (2)
1. a zone melting furnace Controlling System of using special-shaped polycrystal to produce silicon single-crystal, comprise the zone melting furnace motion controller being connected with Y-axis skew motor with the X-axis of axle on zone melting furnace, it is characterized in that, also comprise at least three stadimeters and a PLC controller, three stadimeters are respectively the first stadimeter (1), the second stadimeter (2) and the 3rd stadimeter (3), three stadimeters are fixed on zone melting furnace wall sustained height, and be connected with PLC controller respectively, PLC controller is connected with zone melting furnace motion controller.
2. the special-shaped polycrystal of use as claimed in claim 1 is produced a control method for the zone melting furnace Controlling System of silicon single-crystal, it is characterized in that, comprises the steps:
(1), the horizontal survey distance L of three distance by stadimeter burner hearth center O
0the vertical distance L data of data and three distance by stadimeter polycrystalline charge bar solid-liquid interfaces are by being manually input to PLC controller; When Controlling System starts, the upper axle speed v of PLC controller read area smelting furnace motion controller and two data of upper axle rotating speed r; After Controlling System starts, according to the sampling period, three stadimeters are the horizontal throw l apart from polycrystal bar edge by self in real time
1, l
2, l
3data are input to PLC controller by zone melting furnace Ethernet;
(2), PLC controller is by the horizontal throw l of the distance polycrystal bar edge of three stadimeter inputs
1, l
2, l
3; The horizontal survey distance L of three distance by stadimeter burner hearth center O
0the coordinate that calculates three measurement point is a (0, L
0-l
1), b (L
0-l
2, 0), c (l
3-L
0, 0);
(3), according to three measurement point coordinate datas calculating, first calculate the now coordinate P (x of polycrystalline charge bar kernel of section point
0, y
0), wherein: x
0=
,
, now polycrystalline charge bar kernel of section is vectorial
;
(4), with now polycrystalline charge bar kernel of section is vectorial
deduct the offset vector of axle on current zone melting furnace
draw the center vector of this polycrystalline charge bar kernel of section when axle is without skew on zone melting furnace
(x, y),
length=
;
(5), PLC controller calculates polycrystalline charge bar cross section according to the vertical distance L of upper axle speed v and three distance by stadimeter polycrystalline charge bar solid-liquid interfaces and arrives the required time t=of solid-liquid interface
;
(6) center vector of this polycrystalline charge bar kernel of section when, axle is without skew on zone melting furnace after t computing time
[
];
Wherein:
,
,
(7), finally calculate: the offset vector of axle on zone melting furnace after time t
=-
=(
,-
);
(8), PLC controller in real time by the offset vector data transmission of axle on zone melting furnace to zone melting furnace motion controller, zone melting furnace motion controller is controlled skew motor and is driven X-axis and the Y-axis of axle on zone melting furnace to be offset, and the center of circle of the arbitrary section that makes whole special-shaped polycrystalline charge bar when arriving solid-liquid interface is all placed in the middle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110308209.0A CN102321911B (en) | 2011-10-12 | 2011-10-12 | System and method for controlling zone melting furnace for producing silicon single crystal by using abnormity polycrystalline material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110308209.0A CN102321911B (en) | 2011-10-12 | 2011-10-12 | System and method for controlling zone melting furnace for producing silicon single crystal by using abnormity polycrystalline material |
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| CN102321911B true CN102321911B (en) | 2014-04-09 |
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| DE102012213715A1 (en) | 2012-08-02 | 2014-02-06 | Siltronic Ag | An apparatus for producing a single crystal by crystallizing the single crystal at a melting zone |
| CN106989692B (en) * | 2017-04-20 | 2019-03-15 | 浙江富通光纤技术有限公司 | The measurement method and device of preform |
| CN110727238A (en) * | 2019-11-07 | 2020-01-24 | 府谷县旭丽机电技术有限公司 | Double-station plasma fusion equipment control system and method |
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Non-Patent Citations (5)
| Title |
|---|
| Φ105mm区熔硅单晶的生长工艺研究;郭立洲;《稀有金属》;20021110(第06期);第514-516页 * |
| 我国人工晶体生长设备的回顾与展望;李留臣等;《人工晶体学报》;20020630(第03期);第328-331页 * |
| 李留臣等.我国人工晶体生长设备的回顾与展望.《人工晶体学报》.2002,(第03期), |
| 沈浩平，李翔，昝兴利，汪雨田等.CFZ单晶的生产及特点.《半导体杂志》.1998,(第03期), * |
| 郭立洲.Φ105mm区熔硅单晶的生长工艺研究.《稀有金属》.2002,(第06期), |
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