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CN102275021A - Device and method for machining high pressure electric spark beam capable of rotating workpiece - Google Patents

Device and method for machining high pressure electric spark beam capable of rotating workpiece Download PDF

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Publication number
CN102275021A
CN102275021A CN2011102053372A CN201110205337A CN102275021A CN 102275021 A CN102275021 A CN 102275021A CN 2011102053372 A CN2011102053372 A CN 2011102053372A CN 201110205337 A CN201110205337 A CN 201110205337A CN 102275021 A CN102275021 A CN 102275021A
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China
Prior art keywords
electrode
voltage spark
spark line
workpiece
rotary table
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CN2011102053372A
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CN102275021B (en
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曹凤国
黄建宇
胡绛梅
张建东
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Beijing Dimeng Jiyi Superhard Material Technology Co ltd
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Beijing Dimeng Jiyi Superhard Material Technology Co ltd
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Abstract

The invention discloses a device and a method for machining a high pressure electric spark beam capable of rotating a workpiece. The machining device comprises a high pressure electric spark beam generator, a first electrode, a second electrode, a rotary working table mechanism, a high pressure electric spark beam position adjustment mechanism and a high pressure electric spark beam angle adjustment mechanism, wherein the rotary working table mechanism provides a rotary working table for the workpiece to be machined; the rotary working table is positioned between the first electrode and the second electrode; the high pressure electric spark beam position adjustment mechanism comprises a beam position adjustment handle, a framework support plate and an electrode support framework; the second electrode is arranged at one end of the beam position adjustment handle; the high pressure electric spark beam angle adjustment mechanism comprises a locking handle, an adjustable electrode angle plate and a positioning shaft; and the first electrode is fixed on the adjustable electrode angle plate. By using the device and the method, the surface quality of an inner hole of the workpiece can be improved, the machining efficiency can be improved and the operation difficulty can be reduced.

Description

A kind of high-voltage spark line processing unit (plant) and processing method of workpiece rotation
Technical field
The present invention relates to a kind of high-voltage spark line processing unit (plant) and processing method, relate in particular to a kind of high-voltage spark line processing unit (plant) of realizing the workpiece rotation by rotary table, also relate to simultaneously and utilize this device to realize the polishing method for processing, belong to the EDM Technology field.
Background technology
In recent years, along with the fast development of IC industry, the demand of various diamond micropore molds is presented the trend that increases day by day.But, the difficulty of processing of diamond micropore mold is very big, for example the endoporus pass of diamond micropore mold is that 6 zones such as sizing of 0 ° are formed by the outlet with different angles, back taper, compression, lubricated, inlet and angle, and the micropore mold aperture of minimum has only 0.005mm.For the micropore mold of aperture, pre-hole less than 0.003mm, process with conventional processing method such as Ultrasonic machining, line polishing processing etc., all need to use the instrument more very thin than the endoporus of diamond micropore mold, implement difficulty and very greatly almost can't finish.
In number of patent application is 200810030300.9 Chinese invention patent application, a kind of finishing method of diamond rectangle micropore mold die hole is disclosed, it is conceived substantially: with mould holder in the anchor clamps that are complementary with mould, the locality of mould in anchor clamps is adjustable, the polishing arrowband pump to die orifice wherein one group of opposite side polish mould half-twist then, another group opposite side of polishing arrowband polishing nib one by one, by that analogy, but whole periphery in the polished bore.This finishing method can polish rectangular micropore, all can play ablation to the long limit and the broadside of rectangle nib, and the shape that helps the hole keeps; The polishing arrowband can not be twisted fracture, the polishing efficiency height in polishing process.
Zhang Qinjian, Cao Fengguo etc. point out that in " research of artificial single crystal's diamond laser micropore process technology " (being stated from " diamond and grinding materials and grinding tool engineering " the 2nd phase in 2009) the traditional laser boring method of artificial single crystal's diamond adopts " consistency profiles ".The shortcoming of this method is that the material of peelling off the closer to the center in hole is many more, and accurate pass is difficult to obtain.This paper has proposed a kind of new laser numerical control punching adaptive model on the basis of theory and practice.In the compressional zone of mould, realize the even removal of material by the rotating speed of control workpiece, and pulsed laser energy is successively decreased along with reducing of aperture, to improve the pass precision.
On the other hand, electric processing methods such as electron beam processing, ion beam processing and Laser Processing successively appearred after the 1950's.These electric processing methods are without the instrument of moulding, but utilize the very high energy beam stream of density to process, and are particularly suitable for processing the peculiar part of high hardness material and complicated shape, precise fine.
Fig. 1 has shown the basic principle of high-voltage spark line.The high-voltage spark line is the high voltage (generally greater than 3000 volts) that adds the higher-order of oscillation at two on the electrode of certain distance, produces behind the puncture air.As shown in Figure 2, whole piece electric spark line is called front end, stage casing, tail end successively.Utilize the high-voltage spark line to pass the mould endoporus, it is carried out polishing processing, owing to needn't consider the making and the adjustment of small and tool master, therefore for the finishing in micropore diamond mould hole shape, aperture and the raising of endoporus fineness, the processing of high-voltage spark line is the most simple and easy to do and very effective processing method.
Typical existing high-voltage spark line processing unit (plant) is bonded in workpiece on the little pallet as shown in Figure 3, and little pallet can float on big pallet.When passing the workpiece endoporus, the high-voltage spark line adds man-hour, the workpiece transfixion, the position relative fixed of electrode, complete experience with the operator, by output energy adjustment control processing to high-voltage spark line generator, every processing all will be shut down after several seconds to tens seconds and be used microscopic examination, and start continues processing again after judging, adjusting, and such start and close repeated multiple times just can be finished processing.Because work in-process workpiece transfixion, the effect by the high-voltage spark line of being difficult to guarantees the smooth and easy of the circularity in mould aperture and hole shape.In addition, the electrode position relative fixed can not embody the effect of high-voltage spark line processing fully.Therefore, existing high-voltage spark line processing unit (plant) and technology thereof can not adapt to the processing of the micropore mold with high-precision requirement, and production efficiency is low, and it is big to grasp operation easier.
Summary of the invention
Primary technical problem to be solved by this invention is to provide a kind of high-voltage spark line processing unit (plant) of workpiece rotation.This device has solved the hole shape of processing micropore mould in the prior art effectively and fineness is of low quality, production efficiency is low and grasp problem such as operation difficulty.
Another technical problem to be solved by this invention is to provide a kind of said apparatus that utilizes to realize the polishing method for processing.
For realizing above-mentioned goal of the invention, the present invention adopts following technical scheme:
A kind of high-voltage spark line processing unit (plant) of workpiece rotation comprises high-voltage spark line generator, first electrode and second electrode, and described high-voltage spark line generator connects described first electrode and described second electrode respectively, it is characterized in that:
Described high-voltage spark line processing unit (plant) also comprises rotary table mechanism, high-voltage spark beam position governor motion and high-voltage spark line angle adjusting mechanism;
Described rotary table mechanism provides rotary table for workpiece to be processed, and described rotary table is between described first electrode and described second electrode;
Described high-voltage spark beam position guiding mechanism comprises beam position adjustment handle, frame supported plate and electrode supporting framework, described beam position adjustment handle and described electrode supporting frame fixation are on described frame supported plate, and described second electrode is installed in the end that handle is adjusted in described beam position;
Described high-voltage spark line angle adjusting mechanism comprises set lever, adjustable electrode angle board and locating shaft, described first electrode is fixed on the described adjustable electrode angle board, and be after the required angle of processing is adjusted in the center of circle, by the locking of described set lever with described locating shaft.
Wherein more preferably, described rotary table mechanism comprises described rotary table, electric rotating machine and workbench gripper shoe, and described rotary table is installed on the described workbench gripper shoe, rotates under the drive of described electric rotating machine.
Wherein more preferably, described rotary table uses insulating materials to make, and carrying is used to install the insulating coating of workpiece to be processed above.
Wherein more preferably, the bearing insert is in described workbench gripper shoe, and inner ring links to each other with described rotary table.
Wherein more preferably, described first electrode is the sharp electrode of awl, and described second electrode is a columnar electrode.
Wherein more preferably, in the upper end of described workbench gripper shoe positioning runner is arranged, the left and right side of described positioning runner is parallel with the axis of workbench pivot, and described electrode supporting framework moves in described positioning runner.
Wherein more preferably, arc hue angle chute is arranged on described adjustable electrode angle board, described arc hue angle chute is to be the center of circle with described locating shaft, is that radius forms with the distance between described set lever and the described locating shaft.
A kind of high-voltage spark line processing method of workpiece rotation realizes based on above-mentioned high-voltage spark line processing unit (plant), it is characterized in that comprising the steps:
(1) in first being processed, the angle position of adjustable electrode angle board is transferred to maximum, insulating coating is installed on rotary table, more described adjustable electrode angle board is transferred to the normal position and is begun processing;
(2) in process, rotary table remains rotation, and the relative position by high-voltage spark beam position guiding mechanism adjustment high-voltage spark line and workpiece to be processed utilizes the stage casing of high-voltage spark line or tail end to process;
(3) after the hole shape circularity for the treatment of the workpiece sizing area reaches requirement, further adjust the angle of described adjustable electrode angle board, make the axis of high-voltage spark line and workbench pivot form angle, make the processing of hole shape smoothness.
Wherein in described step (3), described angle is between 0 ° to 5 °.
Compared with prior art, the present invention carries out polishing processing by adopting rotary table mechanism, high-voltage spark beam position governor motion and high-voltage spark line angle adjusting mechanism to the diamond micropore mold, its hole shape and fineness can both be guaranteed, and crudy significantly improves.On the other hand, in process, reduced significantly and closed the unproductive time that start observation adjustment is caused, improved production efficiency, reduced operation easier.
Description of drawings
The present invention is described in further detail below in conjunction with the drawings and the specific embodiments.
Fig. 1 is the operation principle schematic diagram of high-voltage spark line;
Fig. 2 is the decomposing schematic representation of high-voltage spark line;
Fig. 3 is a kind of schematic diagram of typical existing high-voltage spark line processing unit (plant);
Fig. 4 is the overall structure schematic diagram of high-voltage spark line processing unit (plant) provided by the present invention;
Fig. 5 is in the high-voltage spark line processing unit (plant) provided by the present invention, the structural representation of rotary table;
Fig. 6 is in the high-voltage spark line processing unit (plant) provided by the present invention, the schematic diagram of high-voltage spark beam position governor motion;
Fig. 7 is in the high-voltage spark line processing unit (plant) provided by the present invention, the schematic diagram of high-voltage spark line angle adjusting mechanism;
Fig. 8 is the structural representation of the insulating coating of clamping workpiece;
Number in the figure explanation: 1: rotary table; 2: high-voltage spark line generator; 3: electric rotating machine; 4: handle is adjusted in the beam position; 5: the frame supported plate; 6: the electrode supporting framework; 7: the workbench gripper shoe; 8: set lever; 9: the adjustable electrode angle board; 10: bore sharp electrode; 11: columnar electrode; 12: bearing; 13: locating shaft; 14: insulating coating.
The specific embodiment
As previously mentioned, in existing high-voltage spark line processing unit (plant), add man-hour when the high-voltage spark line passes the workpiece endoporus, workpiece is actionless, and the position of electrode is also fixed.The present invention has carried out the corresponding structure improvement to this, efficiently solve in the prior art hole shape of processing micropore mould and fineness is of low quality, production efficiency is low and grasp problem such as operation difficulty.
As shown in Figure 4, high-voltage spark line processing unit (plant) provided by the present invention also comprises rotary table mechanism, high-voltage spark beam position governor motion and high-voltage spark line angle adjusting mechanism except comprising the high-voltage spark line generator 2 that is used to produce the high-voltage spark line, boring sharp electrode (first electrode) 10 and the columnar electrode (second electrode) 11.Wherein, rotary table mechanism is used to the polishing processing of diamond micropore mold that rotatable workbench is provided, and the rotation by workpiece to be processed can make hole shape circularity be guaranteed.High-voltage spark beam position governor motion is used for the concrete Working position of high-voltage spark line is adjusted.Utilize the diverse location such as tail end, stage casing of high-voltage spark line to process and to improve workpiece surface finish, also can guarantee the hole shape precision.High-voltage spark line angle adjusting mechanism is used to adjust the angle that the high-voltage spark line enters workpiece to be processed, it can make the high-voltage spark line flow through along the workpiece inwall and form processing, thereby make the pass smoothness of workpiece to be processed, further improved crudy.The setting of above-mentioned each mechanism is that the present invention is different from one of remarkable technical characterictic of prior art, below this is launched detailed explanation.
As shown in Figure 5, rotary table mechanism comprises rotary table 1, electric rotating machine 3 and workbench gripper shoe 7.These rotary table 1 preferred use insulating materials such as making such as nylon, pottery are installed on the workbench gripper shoe 7, and rotate under the drive of electric rotating machine 3.In rotary table mechanism, bearing 12 inserts are in workbench gripper shoe 7, and its inner ring links to each other with rotary table 1.For avoiding that the high-voltage spark line is exerted an influence, the bearing inner race diameter that is connected with rotary table 1 is preferably greater than 30mm, for example is 50mm etc.
High-voltage spark line generator 2 connects sharp electrode 10 of awl and columnar electrode 11 respectively by insulated electric conductor, by high voltage stable high-voltage spark line of generation between sharp electrode 10 of awl and columnar electrode 11 of the higher-order of oscillation.Rotary table 1 is carrying the insulating coating 14 that is used to install workpiece to be processed on it between sharp electrode 10 of awl and columnar electrode 11.
As shown in Figure 6, high-voltage spark beam position guiding mechanism is made up of beam position adjustment handle 4, frame supported plate 5 and electrode supporting framework 6.Wherein, handle 4 is adjusted in the beam position and electrode supporting framework 6 is fixed on the frame supported plate 5, and columnar electrode 11 is installed in the end that handle 4 is adjusted in the beam position.Can make sharp electrode 10 of awl and columnar electrode 11 move axially to the processing desired position by adjusting beam position adjustment handle 4 at the drive lower edge of electrode supporting framework 6 workbench.
Referring to Fig. 5 and shown in Figure 6, in the upper end of workbench gripper shoe 7 positioning runner is arranged, the left and right side of this positioning runner is parallel with the axis of workbench pivot.Electrode supporting framework 6 moves in the positioning runner of workbench gripper shoe 7 upper ends, to guarantee that having an electrode at least is to move on the pivot axis of rotary table 1.Like this, when adjusting handle 4 by the beam position and regulate, electrode supporting framework 6 moves along the positioning runner of workbench gripper shoe 7 upper ends shown in Figure 5, with guarantee the high-voltage spark line in the workspace along moving on the pivot axis of workbench.
As shown in Figure 7, high-voltage spark line angle adjusting mechanism comprises set lever 8, adjustable electrode angle board 9 and locating shaft 13.By the fixation of set lever 8 and adjustable electrode angle board 9, bore sharp electrode 10 and the fixing relative position relation of columnar electrode 11 formation, so that realize stable high-voltage spark line.Boring sharp electrode 10 and be fixed on the adjustable electrode angle board 9, is after the required angle of processing is adjusted in the center of circle with locating shaft 13, by set lever 8 lockings.An arc hue angle chute is arranged on adjustable electrode angle board 9.This arc hue angle chute is to be the center of circle with locating shaft 13, is that radius forms with the distance between set lever 8 and the locating shaft 13.Adjustable electrode angle board 9 utilizes the positioning accuracy that guarantees angle adjustment that cooperates between set lever 8 and the arc hue angle chute.Adjustable electrode angle board 9 is the center of circle with locating shaft 13, drives the awl point electrode 10 fix on it and rotates, and is locked with set lever 8 after forwarding desired location to.
Fig. 8 is the structural representation of the insulating coating of clamping workpiece to be processed.Workpiece to be processed is installed in the center of insulating coating 14.Adding man-hour, will be that the workpiece to be processed of material is installed among the insulating coating 14 that insulating materials such as plastics or pottery make with rough diamond or artificial single crystal's diamond etc. at first, and clamping be on rotary table 1.When the clamping workpiece to be processed, should guarantee that the endoporus center of workpiece to be processed overlaps with the center of insulating coating 14, the center of insulating coating 14 also overlaps with the pivot of rotary table 1 simultaneously, to guarantee the hole shape quality.Under the drive of electric rotating machine 3, rotate on the pivot of rotary table 1 at the endoporus center of workpiece to be processed, pass workpiece to be processed by the high-voltage spark line, the workpiece endoporus in the rotation is carried out polishing processing, can significantly improve the hole shape circularity of workpiece to be processed.
Below, realize that to utilizing high-voltage spark line processing unit (plant) shown in Figure 4 the concrete grammar of polishing processing is described in detail.At first, the different requirements according to the different Working positions of diamond micropore mold endoporus to be processed utilize high-voltage spark beam position guiding mechanism to carry out position adjustments, make workpiece to be processed just in time be arranged in the tail end and the segment limit of high-voltage spark line.Then, requirement according to diamond micropore mold hole shape zones of different to be processed, further utilize high-voltage spark line angle-adjusting mechanism to adjust, the requirement of adjustment is to make to form 0 ° to 5 ° angle between the central axis of high-voltage spark line and rotary table 1.
Particularly, earlier the angle position of adjustable electrode angle board 9 is transferred to maximum, insulating coating 14 as shown in Figure 8 is installed on rotary table 1, again adjustable electrode angle board 9 is transferred to the normal position and is begun processing in first being processed.In process, rotary table 1 remains rotation, and the energy basic fixed of high-voltage spark line, utilizes the tail end of high-voltage spark line to carry out shaping processing.In this process, can adjust the relative position of high-voltage spark line and workpiece to be processed as required.After the hole shape circularity for the treatment of the workpiece sizing area reaches requirement, it is motionless that the high-voltage spark beam position keeps, further adjust the angle of adjustable electrode angle board 9, the axis shape of high-voltage spark line and workbench pivot is had a certain degree, help the slick and sly smooth of each regional perspective of workpiece endoporus like this.In the actual processing, guaranteeing that this angle is the bigger the better under the normal situation of high-voltage spark line, but generally should not surpass 5 °, otherwise can influence normally carrying out of processing.This fine setting angle is carried out high-voltage spark line method for processing, is the effective measures that guarantee workpiece to be processed endoporus hole shape smoothness.
In addition, add man-hour in the shaping that focuses on the diamond micropore mold, it is higher to utilize the tail end of high-voltage spark line to carry out working (machining) efficiency.Improve in the processing of diamond micropore mold fineness at needs, integrated operation and above-mentioned shaping processing are similar, different is the position of wanting mobile high-voltage electric spark line, the high-voltage spark line is moved to workpiece account for 1/3 place of line total length, the processing that utilizes the stage casing of high-voltage spark line workpiece to be improved fineness apart from tail end.The effect that facts have proved such processing is best.
Utilize processing unit (plant) provided by the present invention and processing method that the diamond micropore mold is carried out polishing processing, its hole shape and fineness can both be guaranteed, and crudy significantly improves.On the other hand, in process, only need measure the mould aperture, and needn't frequently control processing according to the output energy of hole shape quality adjustment high-voltage spark line generator, and close the unproductive time that start observation adjustment is caused thereby reduced significantly, improved production efficiency.
More than the high-voltage spark line processing unit (plant) and the processing method of workpiece provided by the present invention rotation had been described in detail.To those skilled in the art, any conspicuous change of under the prerequisite that does not deviate from connotation of the present invention it being done all will constitute to infringement of patent right of the present invention, with corresponding legal responsibilities.

Claims (10)

1. the high-voltage spark line processing unit (plant) of a workpiece rotation comprises high-voltage spark line generator, first electrode and second electrode, and described high-voltage spark line generator connects described first electrode and described second electrode respectively, it is characterized in that:
Described high-voltage spark line processing unit (plant) also comprises rotary table mechanism, high-voltage spark beam position governor motion and high-voltage spark line angle adjusting mechanism;
Described rotary table mechanism provides rotary table for workpiece to be processed, and described rotary table is between described first electrode and described second electrode;
Described high-voltage spark beam position guiding mechanism comprises beam position adjustment handle, frame supported plate and electrode supporting framework, described beam position adjustment handle and described electrode supporting frame fixation are on described frame supported plate, and described second electrode is installed in the end that handle is adjusted in described beam position;
Described high-voltage spark line angle adjusting mechanism comprises set lever, adjustable electrode angle board and locating shaft, described first electrode is fixed on the described adjustable electrode angle board, and be after the required angle of processing is adjusted in the center of circle, by the locking of described set lever with described locating shaft.
2. the high-voltage spark line processing unit (plant) of workpiece rotation as claimed in claim 1 is characterized in that:
Described rotary table mechanism comprises described rotary table, electric rotating machine and workbench gripper shoe, and described rotary table is installed on the described workbench gripper shoe, rotates under the drive of described electric rotating machine.
3. the high-voltage spark line processing unit (plant) of workpiece rotation as claimed in claim 1 or 2 is characterized in that:
Described rotary table uses insulating materials to make, and carrying is used to install the insulating coating of workpiece to be processed above.
4. the high-voltage spark line processing unit (plant) of workpiece rotation as claimed in claim 2 is characterized in that:
The bearing insert is in described workbench gripper shoe, and inner ring links to each other with described rotary table.
5. the high-voltage spark line processing unit (plant) of workpiece rotation as claimed in claim 4 is characterized in that:
The inner ring diameter of described bearing is greater than 30mm.
6. the high-voltage spark line processing unit (plant) of workpiece rotation as claimed in claim 1 is characterized in that:
Described first electrode is the sharp electrode of awl, and described second electrode is a columnar electrode.
7. the high-voltage spark line processing unit (plant) of workpiece rotation as claimed in claim 1 is characterized in that:
There is positioning runner upper end in described workbench gripper shoe, and the left and right side of described positioning runner is parallel with the axis of workbench pivot, and described electrode supporting framework moves in described positioning runner.
8. the high-voltage spark line processing unit (plant) of workpiece rotation as claimed in claim 1 is characterized in that:
Arc hue angle chute is arranged on described adjustable electrode angle board, and described arc hue angle chute is to be the center of circle with described locating shaft, is that radius forms with the distance between described set lever and the described locating shaft.
9. the high-voltage spark line processing method of a workpiece rotation realizes based on the described high-voltage spark line of claim 1 processing unit (plant), it is characterized in that comprising the steps:
(1) in first being processed, the angle position of adjustable electrode angle board is transferred to maximum, insulating coating is installed on rotary table, more described adjustable electrode angle board is transferred to the normal position and is begun processing;
(2) in process, rotary table remains rotation, and the relative position by high-voltage spark beam position guiding mechanism adjustment high-voltage spark line and workpiece to be processed utilizes the stage casing of high-voltage spark line or tail end to process;
(3) after the hole shape circularity for the treatment of the workpiece sizing area reaches requirement, further adjust the angle of described adjustable electrode angle board, make the axis of high-voltage spark line and workbench pivot form angle, make the processing of hole shape smoothness.
10. high-voltage spark line processing method as claimed in claim 9 is characterized in that:
In the described step (3), described angle is between 0 ° to 5 °.
CN201110205337.2A 2011-07-21 2011-07-21 Device and method for machining high pressure electric spark beam capable of rotating workpiece Expired - Fee Related CN102275021B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103934533A (en) * 2014-05-13 2014-07-23 四川中邦模具有限公司 Angle changing mechanism used in electric spark cutting process

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CN101658979A (en) * 2009-10-09 2010-03-03 廊坊昊博金刚石有限公司 Laser double-faced synchronous machining system and machining method thereof
CN101870020A (en) * 2010-07-07 2010-10-27 铜陵精远线模有限责任公司 Electric spark punching machine capable of punching conical holes
CN202291731U (en) * 2011-07-21 2012-07-04 北京迪蒙吉意超硬材料技术有限公司 Workpiece rotating high-voltage electric spark beam current machining device

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Publication number Priority date Publication date Assignee Title
US2441319A (en) * 1943-10-02 1948-05-11 Elox Corp Disintegrating or removing metallic material
EP0129340A1 (en) * 1983-05-19 1984-12-27 Matsushita Electric Industrial Co., Ltd. Electrical discharge machining apparatus for forming minute holes in a workpiece
CN101185983A (en) * 2007-11-26 2008-05-28 中国石油大学(华东) Non-conducting material electric spark milling method
CN101658979A (en) * 2009-10-09 2010-03-03 廊坊昊博金刚石有限公司 Laser double-faced synchronous machining system and machining method thereof
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103934533A (en) * 2014-05-13 2014-07-23 四川中邦模具有限公司 Angle changing mechanism used in electric spark cutting process

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