CN102214975B - Cooling structure of linear motor - Google Patents
Cooling structure of linear motor Download PDFInfo
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- CN102214975B CN102214975B CN 201010143634 CN201010143634A CN102214975B CN 102214975 B CN102214975 B CN 102214975B CN 201010143634 CN201010143634 CN 201010143634 CN 201010143634 A CN201010143634 A CN 201010143634A CN 102214975 B CN102214975 B CN 102214975B
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Abstract
The invention discloses a cooling structure of a linear motor. The cooling structure comprises a cooling assembly, a motor coil assembly, a first pipeline and a second pipeline, wherein the motor coil assembly is positioned at the inner side of the cooling assembly; the first pipeline and the second pipeline are arranged at the same side of the cooling assembly; and the motor coil temperature and the motor outer surface temperature are simultaneously subjected to temperature control by virtue of the cooling structure of the linear motor favorably, the coil temperature control of normal operation for the motor can be achieved, and simultaneously the heat influence of the cooling structure on the external environment is reduced to the minimum.
Description
Technical field
The present invention relates to the techniques of linear motor field, relate in particular to a kind of cooling structure of linear motor.
Background technology
Linear motor accelerated degree is one of linear electric motors important indicator.Linear motor accelerated degree is increasing, requires by the electric current in the coil just greatly, and therefore, the caloric value of coil is just large.Excessive heating causes coil temperature to raise, and temperature is elevated to a certain degree, when surpassing the insulating barrier burning-point of parcel coil copper core, coil has just burnt out short circuit, therefore, and the linear electric motors cooling technology, broad sense says temperature control technology, is the developing important topic of techniques of linear motor always.More than the said function that prevents that motor from burning out, can only say that linear electric motors are to temperature controlled General Requirement.New occasion in the linear electric motors application, such as equipment such as photo-etching machine work-piece platform and mask platform, precision instrument calibration, spray printing platforms, its used cooling structure of linear motor prevents the temp. control function that coil burns out except satisfying, also having a function of temperature control is exactly to control the heat radiation of motor External Environment, and this is so that the linear electric motors that manufacture and design by former thermal design principle can not satisfy the application demand of new occasion.
Patent CN 101009453A discloses a kind of dynamic coil linear motor, and wherein the cooling structure design is one of important claim of this patent.It is the circuitous straight tube of arranging within being close to up and down two metal walls of coil, two-layer cooling about minute, the single loop water circulation is to the control coil temperature, successful, but the hull-skin temperature of motor is uncontrollable, and in fact, in this patented technology, the motor outer surface also becomes one of path of strengthening the coil heat radiation, therefore, in the application scenario of the External Environment heat dissipation capacity of needs control motor own, this patented technology is with helpless.
Patent CN 1327627A discloses a kind of coil assembly and manufacture method thereof of linear motor.One of patented technology emphasis is still the cooling structure design.Cooling water pipe is close to the outer surface of whole coil, the circulation of cold-producing medium single loop, manufacturing process is simple, and energy effective cooling motor coil temperature is because the employing of cold-producing medium also can reduce motor heat radiation to external world itself to a great extent, but hull-skin temperature is uncontrollable, the one, be presented as the uneven distribution of hull-skin temperature, the 2nd, be presented as that hull-skin temperature may to occur excessively cold, therefore, although the control of coil self-temperature effectively, the thermal impact of External Environment is still very large.
The cooling system of patent CN200410036817.0 actuating type coil, a kind of coil cooling means is disclosed, the purpose of its cooling still is the control coil temperature and does not relate to the hull-skin temperature of motor self, can not deal with problems in this technology of occasion that heat radiation is had high request.
Therefore, design and a kind ofly implement simultaneously temperature control for coil temperature and motor hull-skin temperature, solve the coil temperature control that motor runs well, it is very necessary simultaneously the thermal impact of self External Environment to be reduced to minimum cooling structure of linear motor, is one of techniques of linear motor field problem at present anxious to be resolved.
Summary of the invention
The embodiment of the invention provides a kind of cooling structure of linear motor of controllable motor surface temperature, comprise a cooling package, motor coil assembly, the first pipeline and second pipe, it is inboard that the said motor coil block is positioned at the cold drawing assembly, the first pipeline and second pipe are arranged at the same side of cooling package, this cooling structure of linear motor is implemented temperature control simultaneously to coil temperature and motor hull-skin temperature preferably, solve the coil temperature control that motor runs well, the while is reduced to minimum to the thermal impact of self External Environment.
The embodiment of the invention provides following technical scheme:
A kind of cooling structure of linear motor of controllable motor surface temperature, comprise a cooling package, motor coil assembly, the first pipeline and second pipe, it is inboard that the said motor coil block is positioned at the cold drawing assembly, and the first pipeline and second pipe are arranged at the same side of cooling package.
Preferably, above-mentioned cooling package is made of cold drawing and the afflux cover plate that confluxes, and above-mentioned cold drawing and the afflux cover plate that confluxes is connected by welding manner.
Preferably, an end of above-mentioned cold drawing assembly is provided with a bending.
Preferably, an end of above-mentioned cold drawing assembly further is provided with a fixing rear end cap, and above-mentioned fixedly rear end cap can wrap up an end bending of cold drawing assembly.
Preferably, the depth-width ratio of above-mentioned cold drawing is greater than more than 1 to 5.
Preferably, the material of above-mentioned cold drawing is aluminium (such as the aluminium alloy of trade mark LF21) or stainless steel.
Preferably, above-mentioned the first pipeline and second pipe are arranged on conflux the same side of cover plate of above-mentioned afflux.
Preferably, above-mentioned coil block encapsulates with epoxy resin.
Preferably, above-mentioned cooling package is the U-shaped structure of sealing, and described cold drawing is the single channel cold drawing, and structure is U-shaped structure, and the shunting of cooling water and afflux are positioned at the lead-out wires of coil end of cooling package, seal simultaneously the openend of U-shaped cold drawing.
Preferably, directly push the cooling package with the U-shaped structure of sealing after the encapsulation of said motor coil block, the inboard coated with thermally conductive cream of described cooling package thin layer, two sides and other space epoxy sealing after the motor coil assembly pushes.
Preferably, the heat insulation layer of above-mentioned cooling package outer surface is that conductive coefficient is lower than the applied material of 0.03 (SI).
The cooling structure of linear motor of a kind of controllable motor surface temperature provided by the invention, comprise a cooling package, motor coil assembly, the first pipeline and second pipe, it is inboard that the said motor coil block is positioned at the cold drawing assembly, the first pipeline and second pipe are arranged at the same side of cooling package, this cooling structure of linear motor is implemented temperature control simultaneously to coil temperature and motor hull-skin temperature preferably, solve the coil temperature control that motor runs well, the while is reduced to minimum to the thermal impact of self External Environment.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of surface radiating thermal resistance and cooling duct thermal resistance;
Fig. 2 is that outer heat insulation layer is the Temperature Distribution schematic diagram of the outer surface of motor;
Fig. 3 is the temperature gradient distribution simulation analysis figure of motor internal;
Fig. 4 is the motor cooling schematic perspective view of the embodiment of the invention;
Fig. 5 is the motor cooling three-view diagram of the embodiment of the invention;
Fig. 6 is motor cooling one cutaway view of the embodiment of the invention;
Fig. 7 is the assembly drawing of the motor cooling of the embodiment of the invention;
Fig. 8 is the bending schematic diagram of the motor cooling of the embodiment of the invention.
Embodiment
The cooling structure of the embodiment of the invention can be used for the linear electric motors of single and a plurality of coils, for making purpose of the present invention, technical scheme and advantage clearer, and the embodiment that develops simultaneously with reference to the accompanying drawings, the present invention is described in more detail.Particularly, the embodiment of the invention is take two coil controlled surface temperature cooling structure of linear motors as example.
General cooling structure design than control line chart maximum temperaturerise, the embodiment of the invention can be controlled simultaneously the motor surface temperature and be wrapped in the coil maximum temperature of motor internal, in general cooling structure design, except using coolant, such as water, take away outside most of burn-off of motor, the motor surface also is designed to an important heat radiation approach, but also usually the heat transfer property by strengthening surface increases heat radiation by the motor surface, and in embodiment of the invention application scenario in one's power, the surface radiating approach almost is under an embargo, because surface temperature must be controlled at lower temperature rise, such as 0.5 ℃.The thinking that this means Cooling Design is fully different with method, the emphasis of design just is not to take away heat with coolant, and be accurately to distribute between heat that how heat radiation is taken away to coolant and the surperficial dissipated heat, how to design the thermal resistance of coolant guiding channel and the ratio between the surface radiating thermal resistance, surface temperature rise and coil temperature rise are met the demands simultaneously.
The below describes in detail for two design focal points recited above:
1, increases the design that coolant is taken away heat
Obviously, according to general knowledge, the flow that increases coolant (present embodiment is water) can be taken away more heat, but true really not so.In high request linear electric motors application scenario, the coolant flow at high speed will be introduced vibration, therefore need the flowing velocity of limiter tube inner fluid, and also corresponding Large Diameter Pipeline of large flow, and turnover pipeline mechanical space often is important restrictions, and caliber also is conditional like this, so flow is restricted, universal experience, as described in example, all can only provide the flow about 2 liters, according to the motor size ratio, can calculate and judge that flowing of water can only be in laminar condition, Reynolds number is between 500～600.According to the laminar flow heat transfer feature, 2 up-flow amounts and 10 liters are on increasing not impact of heat transfer efficiency, therefore in other words, can not adopt the method that increases flow, obviously, can only consider that this factor is exactly the structure of cooling duct in other heat transfer efficiency influencing factor except flow.The traditional Cooling Design that comprises aforementioned two referenced patent has all adopted pipe, the value that the heat transfer efficiency of pipe represents with nusselt number is 4.4, and the laminar flow heat transfer efficient of the cooling duct of large ratio of height to width can reach 6.5 even 8, therefore the invention process has adopted 1 to 8 large ratio of height to width example cooling duct, heat transfer efficiency nusselt number value 6.5, pipe on year-on-year basis, heat exchange coefficient can improve 80%.This design has guaranteed that cooling structure cooling water under the flow of restriction can take away the ability of coil dissipation heat as much as possible.
2, the thermal resistance of coolant guiding channel and surface radiating thermal resistance partition equilibrium design
The purpose of thermal resistance balance is the control surface temperature rise, and the cooling structure of linear motor of the embodiment of the invention will address this problem preferably.Surface radiating thermal resistance and cooling duct thermal resistance are relation in parallel, and be shown in Figure 1.R2 is the material thermal resistance, and R3 is metal shell, and R4 is heat-insulating material, and R5 is the air heat exchange thermal resistance, and R6 is cooling water heat exchange thermal resistance, and R7 is air temperature rise thermal resistance, and R8 is the cooling water temperature rise thermal resistance.
During machine operation, total hot-fluid is certain, therefore, the balance of thermal resistance mainly realizes that by increasing R4 in this example, heat insulation layer thickness is 0.6mm, flow 1.5L/min, less than 1% of the total heat dissipation of motor, the maximum temperaturerise on motor surface is 0.252 ℃ from motor surface dispersed heat, outer heat insulation layer be motor outer surface Temperature Distribution as shown in Figure 2.The size of R4 value is used for the balance of thermal resistance and then distributes heat flow, control surface temperature.
As shown in Figure 3, be the temperature gradient distribution simulation analysis figure of this motor internal, thermoisopleth is more intensive, the representation temperature gradient is larger, and hot-fluid is just larger, otherwise, more sparse, the representation temperature gradient is less, and hot-fluid is also less, can see, main large temperature gradient zone concentrates in the middle of cooling duct and the coil, hot-fluid is very little behind the cooling duct, represents most of hot-fluid Absorption of Medium that is cooled, thereby so that hull-skin temperature be effectively controlled.
The embodiment of the invention provides a kind of cooling structure of linear motor, comprise a cooling package 13, motor coil assembly 14, the first pipeline 7 and second pipe 8, said motor coil block 14 is positioned at cooling package 13 inboards, and the first pipeline and second pipe are arranged at the same side of cooling package 13.
Particularly, above-mentioned cooling package 13 is made of cold drawing 1 and the afflux cover plate 9 that confluxes, and conflux cover plate 9 of above-mentioned cold drawing 1 and afflux is connected by welding manner.
Particularly, an end of above-mentioned cooling package 13 is provided with a bending 11.
Particularly, an end of above-mentioned cooling package 13 further is provided with a fixing rear end cap 10, and above-mentioned fixedly rear end cap 10 can wrap up an end bending 11 of cooling package 13.
Particularly, above-mentioned cold drawing 1 depth-width ratio be greater than more than 1 to 5, can be according to the different arbitrarily combinations of the motor lines number of turns, to improve heat exchange coefficient.
Particularly, the material of above-mentioned cold drawing 1 is aluminium (be the aluminium alloy of LF21 such as the trade mark) or stainless steel.
Particularly, above-mentioned the first pipeline 7 and second pipe 8 are arranged on conflux the same side of cover plate 9 of above-mentioned afflux.
Particularly, above-mentioned coil block 14 usefulness epoxy resin 4 encapsulate.
Particularly, above-mentioned cooling package 13 is the U-shaped structure of sealing, and above-mentioned cold drawing 1 is the single channel cold drawing, and structure is U-shaped structure, and the shunting of cooling water and afflux are positioned at the lead-out wires of coil end of cooling package 13, seal simultaneously the openend of U-shaped cold drawing.
Particularly, the coolant in the invention process is water.
Particularly, directly push the U-shaped structure cooling package 13 with sealing after 14 encapsulation of said motor coil block, cooling package 13 inboard coated with thermally conductive cream thin layers 12, two sides after motor coil assembly 14 pushes and other space seal with epoxy resin 4.
Particularly, heat insulation layer 5 is used for increasing the surface radiating thermal resistance, and heat insulation layer 5 is lower than the applied material of 0.03 (SI) for conductive coefficient.
Particularly, the heat insulation layer of above-mentioned cooling package outer surface is that conductive coefficient is lower than the applied material of 0.03 (SI).
Particularly, the controlled surface temperature cooling structure of linear motor of the embodiment of the invention such as Fig. 4 are to shown in Figure 8.What preferably corresponding every width of cloth figure was described above-mentioned cold drawing 1 is designed to the large ratio of height to width example, particularly be greater than more than 1 to 5, can arbitrarily make up according to the motor lines number of turns is different, with the raising heat exchange coefficient.The material of cold drawing 1 is aluminium (such as LF21) or stainless steel, and cold drawing 1 has bending 11 as shown in Figure 5, and cooled channel segments becomes U-shaped, the rear end by one fixedly rear end cap 10 cover.Conflux cover plate 9 of four blocks of cold drawings 1 and afflux is bolted together by Welding, consists of cooling package 13.The inner surface that cold drawing 1 contacts with coil scribbles heat-conducting cream, forms heat-conducting cream thin layer 12, can directly insert cooling package 13 with the motor coil assembly 14 of epoxy encapsulation, as shown in Figure 7.The assemblage gap of the bending 11 of cooling package 13 and 14 formation of motor coil assembly is filled with epoxy resin 4.Behind motor coil assembly 14 location, floating with epoxy resin 4 such as the direction of arrow both sides of Fig. 7.Fixedly rear end cap 10, apply heat insulation layer 5 in both side surface, entered the cold drawing 1 of cooling package 13 during cooling by the first pipeline 7, are diverted to four cooling ducts and are pooled to second pipe 8 outflows through the cooling duct of flowing through lower surface after the bending 11.
To the linear electric motors of multi-coil, and the method for aforementioned two coil cooling structures design is similar, increases successively the quantity of cold drawing, and the cold drawing overlay area all needs to cover the position of epoxy encapsulation layer 4 at least.
Except the temperature rise of control coil itself, can also control the external heat radiation of whole motor, namely control the hull-skin temperature of whole motor, two functions realize simultaneously; In the embodiment of the invention, coolant is water, the single loop circulation, but at the main heat-delivery surface of coil, then be that a plurality of minim channels are in parallel, so that the surface temperature that whole motor is externally exported is more even; And prior art on same cooling surface all usefulness be series loop, temperature distributing disproportionation is even on the main radiating surface; The design of large depth-width ratio has been adopted in each cooling duct in parallel, the pipe cooling duct in compared to existing technology, and heat exchange efficiency can increase by 40%～80%; Then outer in each cooling duct all covers adiabatic thin layer, increases the heat transfer resistance of air side, thus better control surface temperature rise; Two small size end faces of coil all adopt insulating material, and are simultaneously corresponding with the cooling duct heat output, select the low thermal conductivity material with the hull-skin temperature of the whole motor of balance; Each cooling duct independently becomes a single face cooled cold plate, leaves the gap between the cold drawing, causes deformation to avoid expanding with heat and contract with cold, and increases contact heat resistance.
In sum, the invention provides a kind of cooling structure of linear motor, comprise a cooling package, motor coil assembly, the first pipeline and second pipe, it is inboard that the said motor coil block is positioned at the cold drawing assembly, the first pipeline and second pipe are arranged at the same side of cooling package, this cooling structure of linear motor is implemented temperature control simultaneously to coil temperature and motor hull-skin temperature preferably, solves the coil temperature control that motor runs well, and the while is reduced to minimum to the thermal impact of self External Environment.
More than a kind of cooling structure of linear motor provided by the present invention is described in detail, used specific case herein principle of the present invention and execution mode set forth, the explanation of above embodiment just is used for helping to understand the solution of the present invention; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (9)
1. a cooling structure of linear motor comprises a cooling package, motor coil assembly, the first pipeline and second pipe, and described motor coil assembly is positioned at the cooling package inboard, and the first pipeline and second pipe are arranged at the same side of cooling package;
Described cooling package comprises cold drawing, and described cooling package is the U-shaped structure of sealing, and described cold drawing is the single channel cold drawing, and structure is U-shaped structure, and the shunting of cooling water and afflux are positioned at the lead-out wires of coil end of cooling package, seal simultaneously the openend of U-shaped cold drawing;
Directly push the cooling package with the U-shaped structure of sealing after the described motor coil component package, the inboard coated with thermally conductive cream of described cooling package thin layer, two sides and other space epoxy sealing after the motor coil assembly pushes;
Described cooling package outer surface is coated with heat insulation layer.
2. motor cooling according to claim 1 is characterized in that, described cooling package is made of cold drawing and the afflux cover plate that confluxes, and described cold drawing and the afflux cover plate that confluxes is connected by welding manner.
3. motor cooling according to claim 1 is characterized in that, an end of described cooling package is provided with a bending.
4. motor cooling according to claim 1 is characterized in that, an end of described cooling package further is provided with a fixing rear end cap, and described fixedly rear end cap can wrap up an end bending of cooling package.
5. motor cooling according to claim 2 is characterized in that, the ratio of width to height of described cold drawing is greater than 5 to 1.
6. motor cooling according to claim 2 is characterized in that, the material of described cold drawing is aluminium or stainless steel.
7. motor cooling according to claim 2 is characterized in that, described the first pipeline and second pipe are arranged on conflux the same side of cover plate of above-mentioned afflux.
8. motor cooling according to claim 1 is characterized in that, described motor coil assembly encapsulates with epoxy resin.
9. motor cooling according to claim 1 is characterized in that, the heat insulation layer of described cooling package outer surface is that conductive coefficient is lower than 0.03 applied material.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010143634 CN102214975B (en) | 2010-04-09 | 2010-04-09 | Cooling structure of linear motor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010143634 CN102214975B (en) | 2010-04-09 | 2010-04-09 | Cooling structure of linear motor |
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| CN102214975A CN102214975A (en) | 2011-10-12 |
| CN102214975B true CN102214975B (en) | 2013-01-23 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102570651A (en) * | 2011-11-15 | 2012-07-11 | 太仓富田瑞兰得电机有限公司 | Liquid-cooled cooling device and motor with the same |
| CN105578838B (en) * | 2014-10-16 | 2018-01-05 | 中山大洋电机股份有限公司 | A kind of electric machine controller |
| WO2018215183A1 (en) | 2017-05-26 | 2018-11-29 | Asml Netherlands B.V. | Actuator, linear motor and lithographic apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6956308B2 (en) * | 2003-07-15 | 2005-10-18 | Nikon Corporation | Dual flow circulation system for a mover |
| CN1965459A (en) * | 2004-07-12 | 2007-05-16 | 住友重机械工业株式会社 | Linear motor and stage device using the linear motor |
| CN101657956A (en) * | 2007-06-13 | 2010-02-24 | 株式会社安川电机 | canned linear motor armature and canned linear motor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007159286A (en) * | 2005-12-06 | 2007-06-21 | Yaskawa Electric Corp | Linear motor |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6956308B2 (en) * | 2003-07-15 | 2005-10-18 | Nikon Corporation | Dual flow circulation system for a mover |
| CN1965459A (en) * | 2004-07-12 | 2007-05-16 | 住友重机械工业株式会社 | Linear motor and stage device using the linear motor |
| CN101657956A (en) * | 2007-06-13 | 2010-02-24 | 株式会社安川电机 | canned linear motor armature and canned linear motor |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2007-159286A 2007.06.21 |
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Address after: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |