CN102183221A - Measurement method for verticality of optical axis of microscope system - Google Patents
Measurement method for verticality of optical axis of microscope system Download PDFInfo
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Abstract
The invention provides a measurement method for the verticality of an optical axis of a microscope system. In the invention, two identical calibrating boards are arranged on an intersecting line of an inclined plane of the optical axis and an optical platform at a distance (L), a light path entering the microscope system is extended to form two arms, a motor drives a microscope lens to move in a direction vertical to the optical platform at a certain step length (S), and images of the two calibrating boards are obtained respectively; and the definitions of the images of the calibrating boards are subjected to quantized judgment by using a computer vision based definition evaluation function (TenenGrad function), and are subjected to normalized comparison, if the definitions of the images of the calibrating boards are within 1% of a judging criterion, the optical axis of the microscope system is judged to be vertical, and the verticality of the optical axis at the moment is calculated, namely h equals to S/L. In the invention, the verticality of the optical axis of the microscope system and the optical platform is measured by using applied optics and machine vision image processing knowledge, so that the optical axis is ensured to be vertical to the platform within an error range. The method has the advantages of high measurement accuracy, simplicity in system and high feasibility.
Description
Technical field
The invention belongs to the surveying instrument equipment technical field, relate to the applied optics field and based on the image measurement technology of machine vision.
Background technology
Microscopic system is widely used in laboratory study and the commercial production, and the vertical extent of microscopes optical axis and measured object is to later Flame Image Process and surveying work, and the three-dimensional reconstruction work of image all has direct influence.
When current microscopic system is carried out surveying work, can not guarantee fully all under the actual conditions that optical axis is vertical fully with measured object, need demarcate in advance that this process is comparatively loaded down with trivial details to video camera.In the time of most of measured object all be placed on the optical table or with optical table keeping parallelism state, to guarantee that at first the microscopic system optical axis is vertical with optical table so wish that the microscopic system optical axis is vertical with measured object.The assurance microscopic system optical axis method vertical with optical table commonly used at present is to use mechanical system to guarantee that microscopic system lens barrel external diameter and optical table are 90 °.Concrete grammar is to use the right angle guiding ruler of enough height, one bar right-angle side is placed on it is fitted tightly, and behind definite microscopic system lens barrel height, it is fitted in another right-angle side of right angle guiding ruler, after stablizing lens barrel is fixed.Operation is simple and feasible for this method, but the level altitude of microscopic system lens barrel can be subjected to the influence of right angle guiding ruler height, and span is limited; And the lens barrel axis might not be parallel fully with optical axis, so vertical optical axis and the platform of can not guaranteeing with platform of lens barrel keeps vertical, the purpose of adjusting optical axis does not reach; The simple mechanical system precision of lens barrel external diameter applying right angle guiding ruler of using is not high, and error is bigger for the microscopic system of small field of view, the little depth of field.
Summary of the invention
The present invention seeks to solve the problem that current mechanical system is too coarse, simple, error is big, a kind of novel microscopic system optical axis verticality measuring method is provided in order to remedy now for the blank of microscopic system optical axis and optical table squareness measurement.
The inventive method is utilized the knowledge of applied optics and machine vision Flame Image Process, builds a simple light path system structure, can measure the vertical extent of microscopic system optical axis and optical table, thereby guarantees that optical axis and platform keep vertical in error range.This method measuring accuracy height, system is simple, feasibility good.
The measuring method of microscopic system optical axis verticality of the present invention, its concrete steps are:
The first, select the high resolution CCD that has motor-driven microlens and match;
The second, utilize the shift position of 1mm standard ball in microscopic field of view to determine the vergence direction of microlens and optical table;
The 3rd, gather a series of images of scaling board with different step-lengths, with the functional value of the every width of cloth image of sharpness evaluation function TenenGrad function calculation, relatively the sharpness evaluation function value of images acquired under each step value is selected suitable minimum step as driving the step-length that microscopic system moves;
The 4th, two identical scaling board standoff distance L are placed on the intersection of inclined light shaft face and optical table, the light path that enters microscopic system is extended into two arms, by rotatable reflector apparatus the reflection ray of scaling board is imported microscopic system respectively, and on the CCD receiving plane, form the image of two width of cloth scaling boards respectively;
The 5th, drive microlens in direction motion with selected step-length perpendicular to optical table, obtain the scaling board imaging of one road light earlier, use based on the sharpness evaluation function TenenGrad function of computer vision the judgement that the imaging definition of scaling board quantizes, microlens is stopped at obtain the position of maximum sharpness evaluation function value;
The 6th, with the catoptron half-twist in the reflector apparatus, make microlens receive another scaling board imaging, be calculated to be the sharpness evaluation function value of picture when the most clear, carry out normalization relatively with the sharpness evaluation function value that the 5th step obtained, if the two in criterion 1%, thinks that then the microscopic system optical axis reaches vertical, calculate the verticality h=S/L of optical axis this moment, i.e. the ratio of distance L between the step value S of motor-driven microlens and two scaling boards; If the sharpness evaluation function value normalization of two scaling board imagings is not more in 1%, think that then the microscopic system optical axis does not reach vertical, needing to adjust optical axis makes it more vertical, repeat the experiment in the 4th, the 5th step again, until the normalization fiducial value of the sharpness evaluation function value that obtains two scaling board imagings the most clearly in 1%, assert that then the microscopic system optical axis reaches vertically, calculates verticality.
Measuring principle
The present invention is actually the light path that will enter microscopic system and extends into two arms, on two identical scaling boards intersection that is placed on inclined light shaft face and optical table separated by a distance, adopt the reflecting LED light illumination, by rotatable reflector apparatus the reflection ray of scaling board is imported microscopic system respectively, on the CCD receiving plane, form the image of two width of cloth scaling boards respectively.
The judgement that the present invention quantizes the readability of image with the sharpness evaluation function in the computer vision, the sharpness evaluation function TenenGrad function that is based on gradient function that adopts, the reflection of the readability of image be exactly system imaging surface near or away from degree to focal plane: when focusing fully, clear picture, the edge is more sharp-pointed, and to comprise quantity of information more, and the sharpness evaluation function value is big more; When the image out of focus, image blurring, it is few that edge fog comprises quantity of information, and the sharpness evaluation function value is more little.
And among the present invention the out of focus of microscopic system to be measured the focusing degree be by the distance decision of the object lens of microscopic system camera lens and object plane, so what the readability of image reflected in the present invention's microscopic system to be measured is exactly the distance of object plane and microlens, two width of cloth image definition degree that ought collect like this are similar to be arrived to a certain degree, when in other words thinking relatively that with the sharpness evaluation function quantification sharpness evaluation function value of two width of cloth images differs within the specific limits, think that promptly two scaling boards are identical with microscopic system object lens distance, that is to say that this moment, the microscopic system optical axis was vertical with optical table.What verticality was represented is exactly microscopic system optical axis and the accurate vertical error of optical table, so verticality is exactly to assert perfect optics platform plane and the inclination angle of actual optical table with respect to the clinoplane formation of optical axis under the vertical state of optical axis among the present invention, this inclination angle can be represented by the difference of the object distance of two scaling boards and the ratio of two scaling board distances.And do straight-line motor step-length assert that the difference of two scaling board object distances drives the microscopic system lens barrel exactly under the vertical state of optical axis, so the optical axis verticality of microscopic system to be measured is exactly the ratio of step-length and two scaling board distances.
Advantage of the present invention and good effect:
1, uses traditional mechanical system can only measure the verticality of microscopic system lens barrel external diameter, promptly think the verticality of microscopic system optical axis with respect to optical table with respect to optical table.But it is not because parallel fully in the microscopic system lens barrel external diameter reality with the microscopic system optical axis, so use the metering system of light path adjutage method to overcome the defective of traditional mechanical system among the present invention, really remedied and measured the blank of microscopic system optical axis with respect to the optical table verticality.
2, use light path adjutage method to measure the verticality of microscopic system optical axis with respect to optical table, measuring accuracy height, accurate positioning.Our experiments show that, it in 2 times of object lens, resolution the image of gathering under 1620 * 1236 the CCD condition, using the minimum step that can distinguish two width of cloth image definitions based on the sharpness evaluation function TenenGrad function of image gradient in certain critical field is 50um, concrete criterion is exactly the sharpness evaluation function value normalization of a series of images that will collect, normalized functional value is promptly thought outside it and can be distinguished 1% with the interior readability undistinguishable of promptly thinking two width of cloth images.Experimental result shows that when minimum step was 50um, just outside 1%, 50um was the minimum step that two width of cloth images can be distinguished to the normalized function value of two width of cloth images in other words.Distance between two scaling boards is made as 30cm, and the verticality of microscopic system optical axis is exactly 50/300000=1.67 * 10 so
-4, and be the right angle guiding ruler of 300 * 200mm for specification, its full accuracy is 6um, so relative measuring accuracy is exactly 6/300=0.02, so adopt the precision of light path adjutage method to be higher than the precision of simple mechanical system far away.
Description of drawings
Fig. 1 is the principle schematic that the present invention determines the inclined light shaft face.
Fig. 2 is a measuring principle synoptic diagram of the present invention.
Among Fig. 1,1 and 2 is the microscopic systems to be measured that are positioned at diverse location, the 3rd, and 1mm standard ball to be measured, 4 and 5 is two standard ball imagings on the CCD receiving plane,
The each several part implication is as follows among Fig. 2:
6: the perfect optics platform plane
7: actual optical table is with respect to the clinoplane of optical axis
8-9: two identical scaling boards
10-11: light source
12-13: beam splitter
14-15:45 ° of catoptron
16: rotatable completely reflecting mirror
17: microscopic system to be measured
The 18:CCD receiving plane.
Embodiment
Embodiment 1
1, determines the inclined light shaft face
Measure optical axis verticality with light path adjutage method, at first will determine the direction of microscopic system inclined light shaft, to determine the placement direction of scaling board.As Fig. 1, in order accurately to obtain the inclined light shaft face, concrete grammar is: with the standard of a 1mm standard ball 3(choice criteria ball size is that it can not exceed the visual field at the centre of sphere of microscopic system imaging) as measured object in 1 time imaging of microscopic system, adjusting standard ball makes its centre of sphere be imaged on the center, visual field, using motor driver to drive camera lens is moving perpendicular to the rectilinear direction of object plane is parallel, be exactly that the motor-driven microlens moves to the direction away from the XY plane on the Z axle among this embodiment, because the out of plumb on microscopic system optical axis and XY plane, microlens (be shown as among the figure from the position 1 to the position 2) in process away from the XY plane motion, the centre of sphere will the direction to correspondence move in the visual field on the CCD receiving plane, and the moving direction of the centre of sphere is exactly the dip plane of microscopic system optical axis so.As shown in Figure 1, microscopic system optical axis direction Y-axis positive dirction tilts in this example, therefore the motor-driven microlens is when Z axle forward moves, and the standard ball centre of sphere that shows on the CCD receiving plane will move to the Y-axis negative direction, and the display standard ball moves to position 5 at XY image that the plane becomes from position 4 in the drawings.Can determine the vergence direction of microscopic system optical axis by this method, thereby obtain the intersection of inclined light shaft face and object plane (optical table), for the placement of scaling board provides accurate orientation.Can determine in this example that the microscopic system optical axis tilts in Y-axis, scaling board just is placed on object plane (optical table) line of position 4 and position 5 correspondences when next step builds light path.
2, build light path
Build light path as shown in Figure 2,17 is microscopic systems to be measured among the figure, the microscopic system optical axis is fully vertical with optical table under the perfect condition, optical table is exactly 6 a perfect condition among the figure, because the out of plumb of microscopic system optical axis in the reality, optical flat in the historical facts or anecdotes border just presents the heeling condition shown in 7 (actual is that the microscopic system camera lens tilts, constant for the ease of understanding in the synoptic diagram microlens, optical table plane relative tilt) with respect to the microscopic system optical axis.Adopt led light source 10 and 11 reflective illuminations in this light path, use 12,13 beam splitters that reflection ray vertical optical plane is penetrated, and receive, reflect parallel rays by 45 ° catoptron 14,15.It under the microscopic system rotatable catoptron 16, only scribble the film that is all-trans in one side, one side orientating reflex mirror 14 that can reflection ray also rotates to parallel with catoptron 14, reflection ray vertically enters microscopic system, can collect the picture of scaling board 8, rotate to parallelly with 16, obtain the imaging of scaling board 9 with catoptron 15.
3, analytical calculation, this process was divided into for three steps:
The first, set step-length.Motor will drive the microscopic system motion with a fixed step size in the present embodiment, guarantee that by following step the microscopic system optical axis is vertical again, so step-length is the important references standard of optical axis verticality.Bigger than normal, the low precision of the excessive error of perpendicularity of step-length, the sharpness of the too small microscopic system images acquired of step-length are difficult for differentiating, causing erroneous judgement easily, so will test the selected suitable step value drive motor motion of a plurality of step-lengths.Concrete grammar is that some step values are tested, under each step-length, gather 9 width of cloth images of front and back, the most clear position of scaling board imaging, calculate the sharpness evaluation function value of every width of cloth image, carry out normalization relatively, choose the step-length of the discernmible minimum step of sharpness as the drive motor motion.Here judge that the discernmible standard of sharpness is exactly that sharpness evaluation function value behind each width of cloth image normalization differs more than 1%.Final selected step-length S is as suitable step-length.
The second, the sharpness evaluation function value of calculating scaling board 8.Rotating mirror 16 is adjusted to parallel, makes the picture that can collect scaling board 8 on the CCD receiving plane 18 of microscopic system with catoptron 14.Keep microscopic system 17 inclined light shaft attitudes constant, use motor driver to drive microscopic system camera lens 17 and on perpendicular to the straight line of optical table, move (this straight line is as the criterion with the grating chi of motor driver) with step-length S.The CCD receiving plane of microscopic system connects computer processing system, whenever a mobile camera lens calculates the sharpness evaluation function value of present image with the Image Definition based on gradation of image in the computer vision, in being a bit larger tham the field depth of microscopic system, can obtain the sharpness evaluation function value of image that a series of scaling board 8 becomes like this, add up the size of these functional values and the correspondence position of every width of cloth image, the most clear position of image is promptly regarded as in the position of the microscopic system camera lens 17 of sharpness evaluation function value the maximum correspondence, notes the sharpness evaluation function value of this moment.
The 3rd, it is vertical to adjust optical axis, calculates verticality.With catoptron 16 half-twists, make the scaling board 9 can imaging on CCD receiving plane 18.Equally drive microscopic system camera lens 17 and on perpendicular to the straight line of optical table, move, gather a series of images that scaling board 9 is become with step-length S, and the most clear position of relatively finding scaling board 9 imagings by the sharpness evaluation function value.
Because scaling board 8,9 is identical, so the readability of their imagings under identical object distance also is identical, the sharpness evaluation function value of using same sharpness evaluation function to obtain the image of scaling board 9 also is identical.But the sharpness evaluation function value that the picture rich in detail of two width of cloth that collect in the actual measurement calculates can not be identical, so the sharpness evaluation function value of two width of cloth images is carried out normalization relatively, the two difference is 1% with the interior sharpness undistinguishable of promptly thinking two width of cloth images, and two scaling board object distances are identical.The object distance L1=AE+EF+FG of scaling board 8 among Fig. 2, the object distance of scaling board 9 is L2=AB+BC+CD, therefore when L1 approached L2 more, the sharpness evaluation function value of two blocks of images that scaling board becomes was exactly close more.When scaling board 9 can be after imaging on the CCD receiving plane 18, image calculation sharpness evaluation function value to the scaling board 9 that collects, with the scaling board 8 of record before the sharpness evaluation function value when becoming picture rich in detail do normalization relatively, if the two difference thinks promptly that with interior sharpness undistinguishable, the optical axis of the picture rich in detail of two width of cloth are vertical 1%; If difference beyond 1% then think and need optical axis out of plumb and optical table to adjust the microscopic system optical axis and make it more vertical, continues above step and measures.The sharpness evaluation function value difference of the picture rich in detail that becomes when two scaling boards that collect is not in 1% the time, assert that then the microscopic system optical axis is perpendicular to optical table, if two scaling boards are apart from GD=L, so the verticality h between this microscopic system optical axis and the optical table is h=S/L.
4, example explanation
We have done following experiment under the existence conditions of laboratory, detailed process is as follows:
One, microscopic system adopts 2 times of objective lens, and resolution is 1620 * 1236 CCD, and this microscopic system is fixed on the Z axle perpendicular to optical table, and this can be the motor-driven of um level by precision;
Two, the sharpness evaluation function TenenGrad gradient function formula that adopts in the present embodiment is
Three, gather near 9 width of cloth images of scaling board the most clear position with 60um, 50um, 40um, 30um, 20um, 10um as the test step-length respectively, calculate the TenenGrad gradient function value of every width of cloth image, it is as shown in table 1 to obtain the result,
Table 1
The TenenGrad gradient function value that calculates under every group of step value is carried out normalization, and it is as shown in table 2 to obtain the result
Table 2
From table 2 data as can be seen, sharpness evaluation function value behind the image normalization of gathering when step-length is 50um, 60um all differs more than 1%, and 50um is qualified minimum step, so the step value that moves along the Z axle as the motor-driven microscopic system at this selected 50um.
Four, the distance between two scaling boards is made as 30cm, and then the verticality of this microscopic system is 50/300000=1.67 * 10
-4
Above-mentioned data show, measure the precision of microscopic system verticality precision far above mechanical system by elaboration method of the present invention.
Claims (1)
1. the measuring method of a microscopic system optical axis verticality is characterized in that the concrete steps of this method are:
The measuring method of microscopic system optical axis verticality of the present invention, its concrete steps are:
The first, select the high resolution CCD that has motor-driven microlens and match;
The second, utilize the shift position of 1mm standard ball in microscopic field of view to determine the vergence direction of microlens and optical table;
The 3rd, gather a series of images of scaling board with different step-lengths, with the functional value of the every width of cloth image of sharpness evaluation function TenenGrad function calculation, relatively the sharpness evaluation function value of images acquired under each step value is selected suitable minimum step as driving the step-length that microscopic system moves;
The 4th, two identical scaling board standoff distance L are placed on the intersection of inclined light shaft face and optical table, the light path that enters microscopic system is extended into two arms, by rotatable reflector apparatus the reflection ray of scaling board is imported microscopic system respectively, and on the CCD receiving plane, form the image of two width of cloth scaling boards respectively;
The 5th, drive microlens in direction motion with selected step-length perpendicular to optical table, obtain the scaling board imaging of one road light earlier, use based on the sharpness evaluation function TenenGrad function of computer vision the judgement that the imaging definition of scaling board quantizes, microlens is stopped at obtain the position of maximum sharpness evaluation function value;
The 6th, with the catoptron half-twist in the reflector apparatus, make microlens receive another scaling board imaging, be calculated to be the sharpness evaluation function value of picture when the most clear, carry out normalization relatively with the sharpness evaluation function value that the 5th step obtained, if the two in criterion 1%, thinks that then the microscopic system optical axis reaches vertical, calculate the verticality h=S/L of optical axis this moment, i.e. the ratio of distance L between the step value S of motor-driven microlens and two scaling boards; If the sharpness evaluation function value normalization of two scaling board imagings is not more in 1%, think that then the microscopic system optical axis does not reach vertical, needing to adjust optical axis makes it more vertical, repeat the experiment in the 4th, the 5th step again, until the normalization fiducial value of the sharpness evaluation function value that obtains two scaling board imagings the most clearly in 1%, assert that then the microscopic system optical axis reaches vertically, calculates verticality.
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| CN117073991A (en) * | 2023-10-17 | 2023-11-17 | 苏州华英光电仪器有限公司 | Detection device and detection method for microscope rotary drum |
| CN117073991B (en) * | 2023-10-17 | 2024-01-26 | 苏州华英光电仪器有限公司 | Detection device and detection method for microscope rotary drum |
| CN117706757A (en) * | 2023-11-20 | 2024-03-15 | 奈米科学仪器设备(上海)有限公司 | Focusing device and method based on double Z axes |
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